WO2015066448A1

WO2015066448A1 - Apparatus and method for direct contact pressure dispensing using floating liquid extraction element

Info

Publication number: WO2015066448A1
Application number: PCT/US2014/063378
Authority: WO
Inventors: Glenn M. Tom
Original assignee: Advanced Technology Materials Inc
Current assignee: Advanced Technology Materials Inc
Priority date: 2013-11-01
Filing date: 2014-10-31
Publication date: 2015-05-07
Anticipated expiration: 2016-05-01
Also published as: TW201522172A

Abstract

A direct contact pressure dispensing apparatus including a skimmer arranged to float on liquid within a container and defining at least one liquid extraction opening positioned below an upper level of liquid in the container, and a material extraction hose coupled between the skimmer and an outlet port of the container. Withdrawal of liquid proximate to a gas/liquid interface reduces or inhibits saturation of liquid with pressurization gas. The skimmer can translate along a vertical support rod. A pressurizable reservoir can be arranged between the pressure dispensing container and a locus of use for the liquid.

Description

APPARATUS AND METHOD FOR DKECT CONTACT PRESSURE DISPENSING USING FLOATING LIQUID EXTRACTION ELEMENT RELATED APPLICATION

This application claims the benefit of U.S. Provisional Patent Application No. 61/899,060, filed November 1, 2013, which is incorporated by reference herein in its entirety.

TECHNICAL FIELD

The present disclosure relates generally to fluid handling and dispensing systems, such as may be used to dispense contents of containers using pressurized gas. More specifically, the disclosure relates to direct contact pressure dispensing of liquid or liquid- containing materials from liner-less containers (wherein such liquid-containing materials are in direct contact with pressurized gas) while reducing dissolution of pressurized gas into liquids to be dispensed, and associated disclosures related to fabrication, use, and deployment of such systems.

BACKGROUND

In many industrial applications, chemical reagents and compositions are required to be supplied in a high purity state, and specialized packaging has been developed to ensure that the supplied material is maintained in a pure and suitable form, throughout the package fill, storage, transport, and ultimate dispensing operations. Examples of materials that may require high-purity packaging include pharmaceuticals, medical materials, biological materials, radioactive materials, nanomaterials, food materials, and materials for manufacturing and/or industrial production processes.

In the fields of microelectronic device and display panel manufacturing, the need for suitable packaging is particularly compelling for a wide variety of liquids and liquid- containing compositions, since any contaminants in the packaged material, and/or ingress of environmental contaminants to the contained material in the package, can adversely affect the microelectronic device and display panel products that are manufactured with such liquids or liquid-containing compositions, rendering the resulting products deficient or even useless for their intended use.

As a result of these considerations, many types of high-purity packaging have been developed for liquids and liquid-containing compositions used in microelectronic device and display panel manufacturing, such as photoresists, etchants, chemical vapor deposition reagents, solvents, wafer and tool cleaning formulations, chemical mechanical polishing compositions, color filtering chemistries, overcoats, liquid crystal materials, etc.

A first type of high-purity packaging includes rigid glass, metal, or plastic drums or bottles that contain material to be dispensed (i.e., without use of flexible liners). Pressure-rated stainless steel vessels are commonly used due to their ability to withstand elevated pressures and ability to meet rigorous cleanliness specifications. Material may be dispensed from such containers using dispense pumps. Unfortunately, pumps for high purity materials are not only expensive, but also are known to contribute to contamination in the form of shedding from bellows, diaphragms, and/or check valves thereof. To avoid the need for expensive pumps, direct contact pressure dispensing arrangements have been developed, wherein high-purity liquid is forced out of a container using a pressurized drive gas that directly contacts the liquid to be dispensed. According to such arrangement, however, drive gas can be forced into the dispensed liquid, thereby causing microbubbles to form in the liquid. When the resulting liquids are used in applications such as deposition of material on microelectronic device structures, the presence of microbubbles in the deposited liquids may cause defects in the deposited layer and/or in subsequent deposited layers. Regardless of whether pumps or direct pressure dispensing are employed, dispensing systems of the foregoing types suffer from limited utility in that the drums or bottles are expensive in character, and must be rigorously cleaned and shipped to a chemical fill facility to permit such containers to be re-used in order to amortize the cost of such containers over multiple cycles of filling, shipment, and use.

A second type of high-purity packaging that has been developed includes a flexible liner or bag arranged within a substantially rigid outer container (also known as an overpack), wherein pressurized gas is supplied to a space between the liner and the outer container to pressurize and promote dispensation of contents of the liner. Such packaging is commonly referred to as "bag-in-can" (BIC), "bag-in-bottle" (BIB) and "bag-in-drum" (BID) packaging. Packaging of such general type is commercially available (e.g., under the trademark NOWPak^®) from Advanced Technology Materials, Inc. (Danbury, Connecticut, USA). A flexible liner may be provided as a pre-cleaned, sterile collapsible bag of a polymeric film material, such as polytetrafluoroethylene (PTFE), low-density polyethylene, medium-density polyethylene, PTFE-based laminates, polyamide, polyester, polyurethane, or the like, selected to be inert to the material (e.g., liquid) to be contained in the liner. Multi-layer laminates may also be used, with exemplary materials of construction further including metalized films, foils, polymers/copolymers, laminates, extrusions, co-extrusions, and blown and cast films.

In use of liner-based packaging to dispense liquids, a liquid is typically dispensed from the liner by connecting a dispensing assembly including a dip tube or short probe to a port of the liner, with the dip tube being immersed in the contained liquid. Fluid (e.g., gas) pressure is applied to the exterior surface of the liner (i.e., in the space between the liner and a surrounding container) to progressively collapse the flexible liner and thereby force liquid through the dispensing assembly for discharge to associated flow circuitry to flow to an end-use tool or site. Liner-based pressure dispensing systems limit or prevent direct contact between the liquid to be dispensed and pressurized gas, thereby limiting the potential for dissolution of pressurized gas into liquid to be dispensed. The liner is typically arranged for a one-time use, whereas the overpack may be configured for onetime use or (more commonly) for multiple uses. To promote re-use, an overpack may be shipped to the manufacturer or intermediary, fitted with a new liner (without need for rigorous cleaning of the overpack or outer container), and thereafter re-filled at a chemical fill facility. Unfortunately, flexible liners may be subject to influx of gas through pinholes and/or leakage along seams thereof, thereby leading to potential problems with pinhole leaks, weld tears, and overflow.

Traditional rigid containers, including overpacks used with flexible liners, can also be disadvantageous because such rigid containers/overpacks commonly have only a single static expanded state, in that regardless of whether the container is empty or full, the container has the same shape and therefore takes up the same amount of space. Thus, when empty containers are shipped from the container manufacturer to a supplier to be filled, the containers disadvantageously occupy the same shipping volume as they do when they are full. The inability of many traditional rigid containers/overpacks to either collapse into a relatively smaller size when empty, and/or to efficiently densely pack together to efficiently use shipping space, can increase the cost of shipping and ultimately the cost of the material being shipped.

A third type of container that has recently been developed for storage and dispensing of high-purity materials includes substantially rigid collapsible containers (such as disclosed in International Publication No. WO 2012/051093) and substantially rigid foldable containers (such as disclosed in U.S. Patent Application Publication No. 2014/0307042 Al), the foregoing applications being assigned to the same assignee as the present application. Liquid may be dispensed from a substantially rigid collapsible and/or foldable container using pumps, pressurized gas (e.g., direct pressure dispensing), or vacuum, such as by extracting liquid from a top-mounted port using a dip tube. A substantially rigid molded collapsible container may include fold lines or fold patterns that define an arrangement whereby the container may be selectively collapsed or maintained in a free-standing condition, thereby permitting a container to be collapsed when empty to reduce shipping volume and shipping costs. The resulting rigid collapsible container may be used as a stand-alone container without an outer container, and without a flexible liner arranged therein. The container may be blow-molded as a unitary piece including folds or pre-folds permitting the container to collapse into a relatively flat position. Seams and/or welds in the rigid collapsible container may be substantially eliminated, thereby substantially reducing or eliminating the problems associated with pinholes, weld tears, and overflow. Desirable materials of construction include polyethylene terephthalate (PET), polyethylene naphthalate (PEN), poly(butylene 2,6-naphthalate) (PBN), polyethylene (PE), linear low-density polyethylene (LLDPE), low-density polyethylene (LDPE), medium-density polyethylene (MDPE), high-density polyethylene (HDPE), and/or polypropylene (PP).

A substantially rigid collapsible container may include four side walls, a top surface connected to one end of each of the four side walls and defining a square or rectangular pyramid, and a bottom surface connected to the opposite end of each of the four side walls and defining a square or rectangular pyramid. A fitment may be positioned at the apex of the top surface. Two opposing side walls of the four side walls may each have multiple fold lines radially extending from a central region of the respective side wall. In certain instances, radially extending fold lines may intersect at a central region, while in other instances the central region may include a stress relief limiter. Exemplary thicknesses of such materials may be from about 0.05 mm to about 3 mm thick, desirably from about 1 .0 mm to about 2 mm thick.; however, desirable wall thicknesses may vary, based on factors including the volume of the container, the intended contents, the intended dispense method, or the intended application, among other factors. Generally, a substantially rigid container may have sufficient wall thickness and rigidity to substantially reduce or eliminate the occurrence of pinholes. Although substantially rigid collapsible or foldable containers may provide certain benefits relative to liner-based pressure dispensing containers, when containers are used for direct contact pressure dispensing (wherein pressurized gas contacts liquid to be dispensed), problems remain with dissolution of drive gas into liquid to be dispensed, leading to presence of microbubbles that may cause defects when layers of liquid are deposited on a target surface.

It would be desirable to overcome limitations associated conventional pressure dispensing apparatuses and methods.

SUMMARY

The present disclosure relates to fluid handling and dispensing systems and methods that overcome various issues present in conventional systems. Various embodiments of the present disclosure are directed to improved fluid handling apparatuses and methods for direct contact pressure dispensing of liquids using pressurized gas, while reducing dissolution of pressurized gas into liquids to be dispensed.

In one embodiment, a skimmer is arranged to float on liquid or liquid-containing material within the interior of a container and defines at least one liquid extraction opening positioned below an upper level of liquid or liquid-containing material within the container, and use of a material extraction hose coupled between the skimmer and an outlet port of the container in order to convey liquid or liquid-containing material received from the at least one liquid extraction opening to the outlet port. In certain embodiments, such a container may be devoid of a liner and configured to receive pressurized gas in direct contact with liquid or liquid-containing material within the container for pressure dispensing thereof. In certain embodiments, the container may comprise a rigid collapsible or rigid foldable container. Use of a skimmer to extract liquid from the container proximate to the gas/liquid interface promotes (e.g., continuous) removal of liquid having the greatest concentration of dissolved gas. If liquid is withdrawn (e.g., with a skimmer) along the gas/liquid interface faster than gas can diffuse into the liquid, then the bulk liquid will not reach a condition of being saturated with pressurization gas. Also, to the extent that mixing occurs between upper layers and lower layers of liquid within the container, then gas saturation levels will also be suppressed. The container, skimmer, and related components can be metallic. In one embodiment, a liquid dispensing apparatus is arranged to extract a liquid or liquid-containing material from a pressure dispensing container configured to receive pressurized gas in direct contact with the liquid or liquid-containing material, the apparatus comprising: a skimmer arranged to float on the liquid or liquid-containing material within an interior of the container and defining at least one liquid extraction opening positioned below an upper level of liquid or liquid-containing material within the container; and a material extraction hose coupled between the skimmer and an outlet port of the container, and arranged to convey liquid or liquid-containing material received from the at least one liquid extraction opening to the outlet port.

In some embodiments, a fluid processing method is disclosed comprising: providing a first pressure dispensing container defining an interior and having a skimmer and at least a portion of a material extraction hose inserted into the interior, the first pressure dispensing container containing liquid or liquid-containing material, the skimmer being arranged to float on the liquid or liquid-containing material within the first pressure dispensing container and defining at least one liquid extraction opening positioned below an upper level of liquid or liquid-containing material within the container, the material extraction hose being coupled between the skimmer and an outlet port of the container and being arranged to convey liquid or liquid-containing material received from the at least one liquid extraction opening to the outlet port; supplying pressurized gas to the interior of the first pressure dispensing container to contact the liquid or liquid-containing material; and extracting liquid from the interior of the first pressure dispensing container through the at least one liquid extraction opening and the material extraction hose.

In various embodiments, a fluid processing method is disclosed, comprising: providing a first pressure dispensing container defining an interior and having a skimmer and at least a portion of a material extraction hose inserted into the interior, the first pressure dispensing container containing liquid or liquid-containing material, the skimmer being arranged to float on the liquid or liquid-containing material within the first pressure dispensing container and defining at least one liquid extraction opening positioned below an upper level of liquid or liquid-containing material within the container, the material extraction hose being coupled between the skimmer and an outlet port of the container and being arranged to convey liquid or liquid-containing material received from the at least one liquid extraction opening to the outlet port; and providing a set of instructions on a tangible medium, the instructions comprising: • supplying pressurized gas to the interior of the first pressure dispensing container to contact the liquid or liquid-containing material; and

• extracting liquid from the interior of the first pressure dispensing container through the at least one liquid extraction opening and the material extraction hose. In one embodiment, the set of instructions comprise attaching a container closure element to the container proximate to the outlet port, the container closure element being arranged to permit passage of liquid or liquid-containing material received from the material extraction hose. The set of instructions can further comprise detecting a condition indicative of exhaustion or near-exhaustion of liquid or liquid-containing material from the first pressure dispensing container, and terminating extraction of liquid from the interior of the first pressure dispensing container responsive to said detecting. In one embodiment, the step in said instructions of detecting of the condition indicative of exhaustion or near- exhaustion of liquid or liquid-containing material from the first pressure dispensing container comprises detection of a condition indicating that the skimmer is proximate to or in contact with a bottom wall or bottom portion of the pressure dispensing container. In one embodiment, the instructions comprise: removing the skimmer and material extraction hose from the first pressure dispensing container; inserting the skimmer and material extraction hose into a second pressure dispensing container containing liquid or liquid- containing material; supplying pressurized gas to the interior of the second pressure dispensing container to contact liquid or liquid-containing material contained therein; and extracting liquid from the interior of the second pressure dispensing container through the at least one liquid extraction opening and the material extraction hose.

The instructions on a tangible medium can include, but are not limited to, instructions on a printed document or label, or on a computerrreadable medium such as a compact disc or computer memory on a remote server accessible over the internet.

In various embodiments, a method for dispensing liquid or liquid-containing material is disclosed utilizing a pressure dispensing container configured to receive pressurized gas in direct contact with the liquid or liquid-containing material, the method comprising: comparing a desired volumetric dispensing rate of liquid or liquid-containing material to a value indicative of or derived from rate of diffusion of a pressurization gas into the liquid or liquid-containing material; and selecting the pressure dispensing container with a cross-sectional area sized to permit liquid or liquid-containing material to be withdrawn using a floatable skimmer from at least one submerged extraction opening of the skimmer proximate to a liquid/gas interface within the container to cause the level of liquid or liquid-containing material in the container to decline faster than a rate at which the liquid or liquid-containing material could otherwise become saturated with the pressurization gas.

Any one or more features of the embodiments disclosed herein may be combined for additional advantage. Other aspects, features and embodiments will be more fully apparent from the disclosure, including the appended claims.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a simplified schematic view of a conventional direct contact pressure dispensing system, illustrating the phenomenon of gas dissolution in a liquid proximate to the gas/liquid interface.

FIG. 2 is a simplified schematic view illustrating a material delivery system including a direct contact pressure dispensing container including therein a skimmer arranged to float on liquid within the container, with the skimmer including at least one liquid extraction opening positioned below an upper level of liquid within the container, and a material extraction hose coupled between the skimmer and an outlet port of the container, according to one embodiment of the present disclosure.

FIG. 3 is side cross-sectional view of a skimmer including different upper and lower material portions according to one embodiment of the present disclosure.

FIG. 4 is side cross-sectional view of a skimmer including liquid extraction openings arranged along angled lower wall portions thereof according to one embodiment of the present disclosure.

FIG. 5 is a side cross-sectional view of a skimmer including primary and secondary liquid extraction openings of different sizes arranged to supply liquid to an internal sump, and including a material extraction hose arranged to extract liquid from a lower portion of the internal sump, according to one embodiment of the present disclosure.

FIG. 6 is a side-cross-sectional view of a liquid dispensing apparatus including a skimmer, a material extraction hose, and a container closure element arranged to be removably attached to a container proximate to an outlet port, with the skimmer including at least one liquid extraction opening arranged along a lateral wall thereof, and with the apparatus including a tether affixed to the skimmer, according to one embodiment of the present disclosure.

FIG. 7 is a side-cross-sectional view of a liquid dispensing apparatus including a container closure element arranged to be removably attached to a container proximate to an outlet port, a vertically arranged support rod suspended from the container closure element, a material extraction hose, and a skimmer arranged to travel along the support rod, with the skimmer including liquid extraction openings of different sizes arranged to supply liquid to an internal sump arranged to receive the material extraction hose, according to one embodiment of the present disclosure.

FIG. 8A is a perspective view of a liquid dispensing apparatus including a container closure element arranged to be removably attached to a container proximate to an outlet port, a vertically arranged support rod suspended from the container closure element, a material extraction hose, and a skimmer arranged to travel along the support rod, with the skimmer including upper liquid extraction openings comprising slots and a smaller lower liquid extraction opening all arranged to supply liquid to an internal sump arranged to receive the material extraction hose, according to one embodiment of the present disclosure.

FIG. 8B is an upper perspective view of portion of the liquid dispensing apparatus of FIG. 8A including the skimmer and portions of the support rod and material extraction hose.

FIG. 8C is a perspective transparency view of the portion of the liquid dispensing apparatus of FIG. 8B.

FIG. 8D is a lower perspective view of the portion of the liquid dispensing apparatus of FIGS. 8B-8C.

FIG. 9 is a simplified schematic view of a material dispensing system including a skimmer arranged within a direct contact pressure dispensing container, and including a pressurizable reservoir arranged between the container and a point of use.

DETAILED DESCRIPTION

Referring to FIG. 1 , is a simplified schematic view of a conventional direct contact pressure dispensing system 100 is depicted, illustrating the phenomenon of gas dissolution in a liquid proximate to the gas/liquid interface, to provide context to the present disclosure. A container 1 10 with a top wall 1 1 1, a bottom wall 1 12, and at least one side wall 1 13 includes a gas inlet port 116 arranged to supply pressurized gas 120 to an upper interior portion of the container 1 10. A dip tube 1 18 is arranged to permit removal of pressurized liquid from the container, with an opening 1 19 of the dip tube 1 18 being submerged in liquid 125 and arranged proximate to the bottom wall 1 12 of the container 1 10. When pressurized gas 120 is supplied into the container 1 10, the gas pressure provides a gradient that moves gas into the liquid 125 according to the following equation (1):

(1) t = x² / (2D),

where / is time (in seconds), x is distance (in cm), and D is the diffusion coefficient

(in units of cm²/sec). An estimate for the diffusion coefficient can be obtained using the Stokes-Einstein equation (which is strictly applicable for colloidal particles in a fluid when the particle diameter is large compared to the diameter of the fluid, but is also used as a model equation for predicting the diffusivity of small molecules in a liquid to provide values of the same order of magnitude as experimentally measured diffusion coefficients); such equation (2) is set out below:

(2) Ό = (!ί Τ) / (3 π μ ά),

where k is the Boltzmann constant, T is the absolute temperature, d is the diameter of the molecule that is diffusing, and μ is the viscosity of the suspending fluid. Since extent of diffusion of gas into the liquid at any particular time is dependent upon distance, a stratification of gas concentration is present in the liquid near the gas/liquid interface 123; such stratification is schematically illustrated in the form of liquid sublayers 125A, 125B, 125C having different gas concentrations therein, with a higher gas concentration closest to the gas/liquid interface 123, and a lower gas concentration with increasing distance from the gas/liquid interface 123. Since liquid 125 is withdrawn from the container 1 10 through the dip tube opening 1 19 located near the bottom wall 1 12 of the container, the concentration of gas will continue to rise proximate to the gas-liquid interface 123 and beyond, and likely will reach a saturation value unless liquid is dispensed very rapidly from the container 1 10.

In a typical application, a rate of liquid dispensation is dictated by the demand of a fluid-utilizing process. In certain embodiments, a floatable skimmer and material extraction hose as disclosed herein may be used to remove liquid or liquid-containing material from a pressure dispensing container arranged for direct contact between pressurizing gas and liquid to be dispensed, to cause the level of liquid or liquid- containing material in the container to decline faster than a rate at which the liquid or liquid-containing material could otherwise become saturated with the pressurization gas.

In certain embodiments, a rigid (or substantially rigid) foldable or collapsible container may be used, and such a container can be devoid of a liner and configured to receive pressurized gas for direct contact with liquid or liquid-containing material within the container. As used herein, the terms "rigid" or "substantially rigid" are meant to also include the characteristic of an object or material to substantially hold its shape and/or volume when in an environment of a first pressure, but wherein the shape and/or volume may be altered in an environment of increased or decreased pressure. The amount of increased or decreased pressure needed to alter the shape and/or volume of the object or material may depend on the application desired for the material or object and may vary from application to application. In one embodiment, a rigid or substantially rigid collapsible or foldable container may be fabricated of material of sufficient thickness and composition for the container to be self-supporting when filled with liquid. A rigid or substantially rigid collapsible container may be of single-wall or multi-wall character, and can comprise polymeric materials. Laminated composites of multiple layers of polymeric materials and/or other materials (e.g., laminated by application of heat and/or pressure) may be used. A rigid or substantially rigid collapsible container may be formed by any one or more suitable steps including molding, shaping, lamination, extrusion, and welding steps. A rigid or substantially rigid collapsible container can incude a substantially rigid opening or port integrally formed with the container.

For semiconductor manufacturing applications, liquid or liquid-containing material contained in a pressure dispensing container as disclosed herein should have less than 75 particles/milliliter of particles having a diameter of 0.20 microns or larger, at the point of fill of the liner; in some embodiments, less than 50 particles/milliliter; in some embodiments, less than 35 particles/milliliter; and in some embodiments, less than 20 particles/milliliter. The container should have less than 30 parts per billion (ppb) of total organic carbon (TOC) in the liquid; in some embodiments, less than 15 ppb of TOC. Various embodiments present less than 10 parts per trillion metal extractable levels per critical elements, such as calcium, cobalt, copper, chromium, iron, molybdenum, manganese, sodium, nickel, and tungsten, and with less than 150 parts per trillion iron and copper extractable levels per element for liner containment of hydrogen fluoride, hydrogen peroxide and ammonium hydroxide, consistent with the specifications set out in the Semiconductor Industry Association, International Technology Roadmap for Semiconductors (SIA, ITRS) 1999 Edition.

Containers, apparatuses and systems as disclosed can be employed for storage and dispensing of chemical reagents and compositions of widely varied character. Although embodiments are hereafter described primarily with reference to storage and dispensing of liquid or liquid-containing compositions for use in the manufacture of microelectronic device products, it will be appreciated that the utility of the embodiments is not thus limited, but rather extend to and encompasses a wide variety of other applications and contained materials. For example, such liquid containment systems have utility in numerous other applications, including but not limited to medical and pharmaceutical products, building and construction materials, food and beverage products, biological materials, radioactive materials, nanomaterials, fossil fuels and oils, agriculture chemicals, materials for manufacturing and/or industrial production processes, biopharma, solar, coatings and automobiles, where liquid media or liquid materials require packaging.

The term "microelectronic device" as used herein refers to semiconductor substrates, flat-panel displays, thin-film recording heads, microelectromechanical systems, LED substrates, and other advanced microelectronic components. The microelectronic device may include patterned silicon wafers, flat-panel display substrates, polymeric substrates, or microporous / mesoporous inorganic solids.

In one embodiment, a liquid dispensing apparatus is arranged to extract a liquid or liquid-containing material from a pressure dispensing container configured to receive pressurized gas in direct contact with the liquid or liquid-containing material, the apparatus comprising: a skimmer arranged to float on the liquid or liquid-containing material within an interior of the container and defining at least one liquid extraction opening positioned below an upper level of liquid or liquid-containing material within the container; and a material extraction hose coupled between the skimmer and an outlet port of the container, and arranged to convey liquid or liquid-containing material received from the at least one liquid extraction opening to the outlet port.

A skimmer may comprise any suitable shape or conformation that permits a skimmer to float on the surface of liquid or liquid-containing material within a container, to permit the skimmer to translate downward as liquid level in a container drops due to removal (dispensation) of liquid through the skimmer. In certain embodiments, a skimmer and associated material extraction hose are arranged for removable insertion into a container through a container opening (e.g., a container outlet port, which may be arranged at a mouth of a container along an upper wall thereof). In certain embodiments, a material extraction hose is intermediately arranged between a skimmer and a container closure element arranged to be removably engaged (e.g., manually engaged) to a container proximate to a container opening such as a container outlet port and/or container mouth. In certain embodiments, a container mouth may include a male threaded surface, and a container closure element may include a female threaded surface arranged to engage a neck or mouth of a container. In alternative embodiments, a container mouth may include a female threaded surface, and a container closure element may comprise a male threaded surface arranged to engage the container neck or mouth.

In certain embodiments, a skimmer is sized and shaped to substantially conform to a bottom surface of a container that contains the skimmer, in order to enhance removal of liquid or liquid-containing material from a container. In certain embodiments, a bottom of a skimmer may be substantially flat (e.g., horizontally arranged), and a bottom wall of a container that contains the skimmer includes a bottom wall that is also substantially flat and arranged to receive a bottom surface of the skimmer. In certain embodiments, a bottom portion of a container may include a rounded surface, and a bottom portion of a skimmer may include a rounded portion that is sized and shaped to conform to the bottom portion of the corresponding container. In certain embodiments, a bottom portion of a container may include a sump (e.g., a portion of reduced width or cross-sectional area relative to a main body portion of the container), and at least a portion of a skimmer may be arranged to fit into the sump. In certain embodiments, a bottom portion of a container (or sump thereof) may include a conical or frustoconical (i.e., truncated conical) shape, and at least a portion of a skimmer may comprise a corresponding conical or frustoconical shape arranged to fit into or against the bottom portion of the container.

In certain embodiments, a skimmer may include one or multiple materials. In certain embodiments, a lower portion of the skimmer comprises a greater density material than an upper portion of the skimmer (with such configuration desirably operating similar to a keel to cause the skimmer to maintain a desired (e.g., upright) attitude when floating on the liquid or liquid-containing material). In certain embodiments, at least the liquid- contacting surfaces of a skimmer may comprise the same material(s) of construction as the container in which the skimmer is contained. Desirable materials for surfaces of a skimmer arranged to contact liquids include (but are not limited to) polymers such as polyethylene, polypropylene, PEEK, etc. as well as fluorinated polymers such as polytetrafluoroethylene.

In certain embodiments, a floatable skimmer includes at least one or more liquid extraction openings that are submerged below a level of liquid or liquid-containing material within a container. In certain embodiments, at least one liquid extraction opening (or at least a portion thereof) is arranged within 3 millimeters of the upper level of liquid or liquid-containing material within the container. In certain embodiments, a skimmer includes at least one first submerged liquid extraction opening arranged at a first vertical level, and includes at least one second submerged liquid extraction opening arranged at a second vertical level that is below the first vertical level. In certain embodiments, the at least one second liquid extraction opening may include a smaller diameter or cross- sectional area than a diameter or cross-sectional area of the at least one first liquid extraction opening.

In certain embodiments, a skimmer may include at least one channel or recess defined in an upper surface of the skimmer, wherein a lower boundary of the at least one channel or recess is arranged to be positioned below an upper level of liquid or liquid- containing material within the container, and at least one extraction opening arranged to receive liquid or liquid-containing material from the at least one channel or recess. In certain embodiments, a skimmer includes a second liquid extraction opening that is defined in a lower or lateral surface of the skimmer that is arranged at a vertical level below a vertical level of the first liquid extraction opening, and/or that has a smaller cross- sectional area than a cross-sectional area of the first liquid extraction opening.

In certain embodiments, a skimmer may define or otherwise include an internal sump arranged to receive liquid or liquid-containing material from at least one liquid extraction opening defined in the skimmer, and a material extraction hose (or an extension thereof) may be arranged to withdraw liquid or liquid-containing material from the internal sump (in some embodiments, from a lower portion of the internal sump). In certain embodiments, a skimmer may include an upper liquid extraction opening arranged to supply liquid or liquid containing material to the internal sump, and may include a lower liquid extraction opening arranged to supply liquid or liquid containing material to the internal sump, with the lower liquid extraction opening having a smaller cross- sectional area than the upper liquid extraction opening, and the lower liquid extraction opening being arranged at a vertical level below a vertical level of the upper liquid extraction opening.

In certain embodiments, a material extraction hose may be flexible or otherwise moveable to permit reliable fluid connection between the skimmer and an outlet port of the container, despite the need for a floatable skimmer to change position (e.g., height) within a container due to dropping level in the container of liquid on which the skimmer floats. In certain embodiments, a material extraction hose useful with comprises a flexible, self-coiling hose. In certain embodiments, at least the liquid-contacting surfaces of the material extraction hose may comprise the same material(s) of construction as the container in which the hose is contained. Desirable materials for surfaces of a material extraction hose arranged to contact liquids include (but are not limited to) polymers such as polyethylene, polypropylene, PEEK, etc. as well as fluorinated polymers such as polytetrafluoroethylene. In certain embodiments, a material extraction hose may be reinforced with fibers, wires, and/or other materials to promote enhanced strength and/or durability.

In certain embodiments, a container closure element is arranged to be removably attached to the container proximate to an outlet port, and the container closure element is arranged to permit passage of liquid or liquid-containing material received from the material extraction hose. A container closure element may include a threaded surface arranged to engage a corresponding threaded surface along or proximate to a container outlet port. Any of various types of removal connections (which can be manually removable) may be provided between a container closure element and a corresponding container. In certain embodiments, a container closure element may include connections thereof for pressurized gas, for a material extraction hose, and for a pressure relief valve (or gas liner arranged in fluid communication with a pressure relief valve). In certain embodiments, a container closure element may have associated therewith a support rod, a retractable tether, and/or another mechanical element providing a mechanical link (secondary to the material extraction hose) between the container closure element and the skimmer, such as may be desirable to facilitate removal of the skimmer without imposing undue stress on the material extraction hose. In certain embodiments, a retractable tether may embody a wire or flexible line (similar to fishing line) and may be joined to a retraction mechanism such as a windable spool or reel arranged external to the container, to permit tether to be selectively lengthened or shortened. It may be desirable to shorten a tether (i.e., to a length shorter than a material extraction hose) upon removal of a skimmer from a container, in order to avoid imposition of undue stress on a material extraction hose.

In certain embodiments, a material dispensing apparatus includes a rigid vertical support element (e.g., a rod) suspended within the container, and a skimmer is arranged to translate vertically along the vertical support element. In certain embodiments, a skimmer includes a vertically aligned aperture or opening arranged to receive the vertical support element, wherein cooperation between the vertically aligned aperture and the vertical support rod received therein simultaneously permits vertical translation of the skimmer and limits lateral translation of the skimmer relative to the container. In certain embodiments, a container closure element is arranged to be removably attached to the container proximate to an outlet port of the container, and the vertical support rod is affixed to the container closure element.

In certain embodiments, a material dispensing apparatus includes a skimmer , a material extraction hose, and a container closure element all as disclosed herein, wherein such apparatus is arranged to be used with a first container until contents of the first container are exhausted, and such apparatus may then be removed from the first container and then subsequently used with a second container for continued dispensation of liquid or liquid-containing material. In certain embodiments, a container outlet port, a skimmer, and a material extraction hose are sized and shaped to permit the skimmer and the material extraction hose to be inserted into and removed from an interior of a container through the outlet port to promote re-use of the material dispensing apparatus with multiple containers. In certain embodiments, a material dispensing apparatus may include at least one support element (e.g., support rod and/or retractable tether), at least one sensor, and/or any other features or elements as disclosed herein.

In certain embodiments, one or more sensors and/or sensor-responsive elements may be arranged in or along a skimmer and in or along a corresponding portion of a container (e.g., along a container bottom wall and/or container side wall) in order to sense level of the skimmer as a proxy for determining liquid level (or determining that the container is exhausted or nearly exhausted of liquid or liquid-containing material). In certain embodiments, at least one of a magnet or a magnetically responsive material may be arranged in or on a lower or lateral surface of a skimmer, and a corresponding magnetically responsive or magnetic material may be arranged in or along a lower or lateral wall surface of a container, in order to permit sensing of proximity of the skimmer to the bottom wall of the container to generate an output signal indicating that the container is exhausted or nearly exhausted of liquid or liquid-containing material due to sensing of interaction of a magnetic material and a magnetically responsive material in proximity to one another. Other types of sensors and/or interactive materials or devices may be provided at one or more positions and used to determine when a skimmer is proximate to a lower or lateral wall surface of a container, such as a float device or an ultrasonic detector, in order to aid in determining whether a container is exhausted or nearly exhausted of liquid or liquid-containing material.

In certain embodiments, a pressurizable reservoir may be arranged to receive liquid or liquid-containing material from pressure dispensing container including a skimmer and material extraction hose as disclosed herein, wherein the pressurizable reservoir is arranged to supply liquid or liquid-containing material to a downstream liquid-utilizing process or process tool. In certain embodiments, an interior of the pressurizable reservoir containing liquid or liquid-containing material is arranged to be pressurized (e.g., utilizing pressurized gas, a piston, or any suitable pressurization element) to a higher pressure than the pressure dispensing container, to thereby increase pressure of liquid or liquid- containing material to be received by the downstream process or process tool. In this manner, the pressurizable reservoir may be used in a manner similar to a transfer pump, to increase pressure of liquid or liquid-containing material. In certain embodiments, a pressurizable reservoir is substantially smaller in volume than the upstream pressure dispensing container. One advantage of utilizing a pressurizable reservoir intermediately arranged between a larger volume pressure dispensing container and point of use (e.g., process tool) is that it may avoid the need to operate the larger volume pressure dispensing container at high pressures. Since force on container walls may be calculated as pressure times area, the ability to operate a larger volume pressure dispensing container at lower pressures significantly reduces material wall thickness requirements for such a container. Additionally, when a smaller volume pressurizable reservoir is intermediately arranged between a larger volume pressure dispensing container and a point of use, the contact time between pressurized gas and liquid or liquid-containing material within the pressurizable reservoir may be short, thereby limiting the opportunity for gas to be dissolved in liquid or liquid containing material in the reservoir. Use of skimmer may therefore be unnecessary in a small volume pressurizable reservoir (although a skimmer may be used in such context in certain embodiments). In certain embodiments, a volumetric ratio of a pressurizable reservoir to the volume of a corresponding pressure dispensing container can be less than about one fourth (as disclosed herein), arranged upstream of the reservoir and in fluid-donating relationship with the reservoir. In some embodiments, the volumetric ratio is less than about one eighth; in some embodiments, the volumetric ratio is less than about one twelfth; in some embodiments, the volumetric ratio is less than about one sixteenth; and in some embodiments, the volumetric ratio is less than about one twentieth. In certain embodiments, a pressurizable reservoir may be pressurized to a pressure ratio of at least two times the pressure level within a pressure dispensing container (as disclosed herein), arranged upstream of the reservoir and in fluid-donating relationship with the reservoir. In some embodiments, the pressure ratio is at least four; in some embodiments, the pressure ratio is at least eight; in some embodiments, the pressure ratio is at least 12; and in some embodiments, the pressure ratio is at least 20. For these embodiments, the pressure ratio does not exceed 25.

In certain embodiments, a fluid processing method comprises: providing a first pressure dispensing container defining an interior and having a skimmer and at least a portion of a material extraction hose inserted into the interior, the first pressure dispensing container containing liquid or liquid-containing material, the skimmer being arranged to float on the liquid or liquid-containing material within the first pressure dispensing container and defining at least one liquid extraction opening positioned below an upper level of liquid or liquid-containing material within the container, the material extraction hose being coupled between the skimmer and an outlet port of the container and being arranged to convey liquid or liquid-containing material received from the at least one liquid extraction opening to the outlet port; supplying pressurized gas to the interior of the first pressure dispensing container to contact the liquid or liquid-containing material; and extracting liquid from the interior of the first pressure dispensing container through the at least one liquid extraction opening and the material extraction hose. In certain embodiments, such method may further include attaching a container closure element to the container proximate to the outlet port, wherein the container closure element is arranged to permit passage of liquid or liquid-containing material received from the material extraction hose. In certain embodiments, a fluid processing method as disclosed herein may include detecting a condition indicative of exhaustion or near-exhaustion of liquid or liquid- containing material from the first pressure dispensing container, and terminating extraction of liquid from the interior of the first pressure dispensing container responsive to said detecting. In certain embodiments, the detecting of a condition indicative of exhaustion or near-exhaustion of liquid or liquid-containing material from the first pressure dispensing container may include detection of a condition indicating that the skimmer is proximate to or in contact with a bottom wall or bottom portion of the pressure dispensing container.

In certain embodiments, a fluid processing method as disclosed herein may include removing a skimmer and material extraction hose from a first pressure dispensing container; inserting the skimmer and material extraction hose into a second pressure dispensing container containing liquid or liquid-containing material; supplying pressurized gas to the interior of the second pressure dispensing container to contact liquid or liquid- containing material contained therein; and extracting liquid from the interior of the second pressure dispensing container through the at least one liquid extraction opening and the material extraction hose.

In certain embodiments, a fluid processing method as disclosed herein may include delivering liquid or liquid-containing material received from the first pressure dispensing container to a process tool arranged to utilize the liquid or liquid-containing material. In certain embodiments, such a process tool may include a semiconductor or microelectronic device manufacturing tool. In certain embodiments, a method as disclosed herein may further include manufacturing at least a portion of a semiconductor or microelectronic device utilizing the semiconductor or microelectronic device manufacturing tool.

In certain embodiments, a method for dispensing liquid or liquid-containing material may utilize a pressure dispensing container configured to receive pressurized gas in direct contact with the liquid or liquid-containing material, and the method may include the following steps: comparing a desired volumetric dispensing rate of liquid or liquid- containing material to a value indicative of or derived from rate of diffusion of a pressurization gas into the liquid or liquid-containing material; and selecting the pressure dispensing container with a cross-sectional area sized to permit liquid or liquid-containing material to be withdrawn using a floatable skimmer from at least one submerged extraction opening of the skimmer proximate to a liquid/gas interface within the container to cause the level of liquid or liquid-containing material in the container to decline faster than a rate at which the liquid or liquid-containing material could otherwise become saturated with the pressurization gas. In certain embodiments, a method may further include supplying pressurization gas to the pressure dispensing container, and withdrawing liquid or liquid-containing material from the container through (i) the at least one extraction opening of the skimmer proximate to the liquid/gas interface within the container and (ii) a material extraction hose coupled between the skimmer and an outlet port of the container, to cause the level of liquid or liquid-containing material in the container to decline faster than a rate at which the liquid or liquid-containing material could otherwise become saturated with the pressurization gas.

Further details of exemplary embodiments are explained below in connection with the figures.

Referring to FIG. 2, a material delivery system 200 is illustrated in an embodiment of the disclosure, including a direct contact pressure dispensing container 210 including therein a skimmer 250 arranged to float on liquid 225 within the container 210. The skimmer 250 can include at least one liquid extraction opening 255 positioned below an upper level of liquid (i.e., a gas/liquid interface 223) within the container 210, with a material extraction hose 268 coupled between the skimmer 250 and an outlet port 216 of the container 210 (defined by container neck 215). The container 210 includes an upper wall 221, a lower wall 222, at least one side wall 213, and a reduced width sump portion 214 proximate to the lower wall 222. The container 210 may embody a rigid collapsible or rigid foldable container. The skimmer 250 includes an upper surface 251 that may be arranged above the gas/liquid interface 223 and a lower surface 252 arranged below the gas/liquid interface 223, with the at least one liquid extraction opening 255 being submerged below the gas/liquid interface 223. A container closure element 270 is removably coupled to the neck 215 of the container 210. The container closure element 270 is arranged to permit passage of liquid or liquid-containing material out of the container 210 via the material extraction hose 268, is arranged to permit passage of pressurized gas (supplied by pressurization gas source 281) into the container 210 via a pressurized gas line 282, and is arranged to permit pressurized gas to be vented from the container 210 through vent line 284, which is coupled with a pressure relief valve 285 and an optional overpressure vent 285A.

With continued reference to FIG. 2, the container 210 may have associated therewith at least one sensor 286 arranged to sense proximity of the skimmer 250; the at least one sensor 286 may be located proximate to the sump 214 along the lower wall 222. Alternatively, or additionally, the container 210 may be arranged on a scale 288 arranged to sense weight of the container 210 and liquid 225 contained therein. Alternatively, or additionally, the material extraction hose 268 may be in fluid communication with a downstream empty detection sensor 292, which may embody a first bubble detector, capacitance sensor, or other sensor. The at least one sensor 286, the scale 288, and/or the downstream sensor 292 may be utilized to detect at least one condition indicative of exhaustion or near-exhaustion of liquid or liquid-containing material 225 from the container 210. When such a condition is detected, liquid dispensation may be terminated, a pressure dispensing apparatus (e.g., including the container closure element 270, material extraction hose 268, and skimmer 250) may be removed from the container 210 and affixed to another container (not shown) for continued dispensation of liquid or liquid- containing material to a downstream liquid-utilizing process 296.

In operation, gas may be supplied from a pressurization gas source 281 through pressurized gas line 282 and the container closure element 270 to an interior of the container 210 to directly contact liquid or liquid-containing material 225 contained therein. Such gas 220 increases pressure of the liquid or liquid-containing material 225 in the container 210, and forces liquid or liquid-containing material 225 through at least one liquid extraction opening 255 of the skimmer 250 into the material extraction hose 268 (which extends through the outlet port 216 and container closure element 270) to exit the container 210. In certain embodiments, liquid or liquid-containing material may be dispensed through a valve 290 to a reservoir 294, which may embody a pressurizable reservoir arranged to increase pressure of the liquid or liquid-containing material and/or may embody a ventable reservoir to facilitate removal of gas entrained in liquid or liquid- containing material received from the container 210. Operation of various components of the material dispensing system 200 may be controlled with a controller 299.

Referring to FIG. 3, a skimmer 350 is illustrated in an embodiment of the disclosure. The skimmer 350 includes an upper surface 351 , a lower end 352, a lateral wall surface 354, and an angled lower wall surface 353 that is non-perpendicular to the lateral wall surface 354. The skimmer 350 can also include an upper portion 357 that includes a different material than a lower portion 358, with the lower portion 358 optionally including a material of higher density to cause the skimmer 350 to maintain a desired (e.g., upright) attitude when floating on liquid or liquid-containing material within a container, with the skimmer being arranged to cause liquid extraction openings 355A, 355B to be submerged below an upper level of liquid or liquid-containing material in dispensing operation. As shown in FIG. 3, the liquid extraction openings 355A, 355B are arranged along a lateral wall surface 354 of the skimmer 350 and are in fluid communication with an internal passage 356 that may be horizontally arranged. The liquid extraction openings 355A, 355B are in fluid communication with a vertical passage 365 that conveys liquid or liquid-containing material to a material extraction hose 368.

Referring to FIG. 4, a skimmer 450 is illustrated in an embodiment of the disclosure. The skimmer 450 includes an upper surface 451 , a lower end 452, a lateral wall surface 454, and an angled lower wall surface 453 that is non-perpendicular to the lateral wall surface 454. The skimmer 450 can maintain a desired (e.g., upright) attitude when floating on liquid or liquid-containing material within a container, with the skimmer 450 being arranged to cause liquid extraction openings 455A, 455B to be submerged below an upper level of liquid or liquid-containing material in dispensing operation. As depicted in FIG. 4, the liquid extraction openings 455A, 455B are arranged along the angled lower wall surface 453 of the skimmer 450, and admit liquid into inclined passages 456A, 456B in fluid communication with a vertical passage 465 that conveys liquid or liquid-containing material to a material extraction hose 468. The skimmer 450 further includes a weight and/or magnet or magnetically responsive material 487 arranged proximate to the lower end 452. If such element 487 embodies a magnet or magnetically responsive material, then the element 487 may be arranged to interact with a corresponding magnetically responsive material or magnet arranged proximate to at least one wall of a container containing the skimmer 450, in order to sense proximity and/or position of the floatable skimmer 450 as may be useful to determine when the container is exhausted or nearly exhausted of liquid or liquid-containing material.

Referring to FIG. 5, a skimmer 550 is depicted in an embodiment of the disclosure. The skimmer 550 includes an upper surface 551, a lower end 552, a lateral wall surface 554, and an angled lower wall surface 553 that is non-perpendicular to the lateral wall surface 554. The skimmer 550 can also include an upper portion 557 that includes a different material than a lower portion 558, with the lower portion optionally including a material of higher density to cause the skimmer 550 to maintain a desired (e.g., upright) attitude when floating on liquid or liquid-containing material within a container, with the skimmer 550 being arranged to cause liquid extraction openings 555A, 555B, 559 to be submerged below an upper level of liquid or liquid-containing material in dispensing operation. As depicted in FIG. 5, primary liquid extraction openings 555A, 555B are arranged proximate to an interface between the lateral wall surface 554 and the angled lower wall surface 553, and admit liquid into at least one passage in fluid communication with an internal sump 561. The internal sump 561 is also arranged to receive liquid from at least one secondary liquid extraction opening 559 arranged at a vertical level that is lower than a vertical level of the primary liquid extraction openings 555A-555B. The secondary liquid extraction opening can define a smaller cross-sectional area than the primary liquid extraction openings 555A-555B to ensure that a majority of liquid or liquid-containing material is withdrawn from a container at a position closer to a gas/liquid interface therein, while the presence of the secondary liquid extraction opening also permits removal of a greater amount of liquid or liquid-containing material from a container (thereby reducing unrecoverable residual waste at the conclusion of material dispensation). A lower end 567 of the material extraction hose 568 (or an extension of the material extraction hose) can be arranged to withdraw liquid or liquid containing material from a lower portion of the sump 561.

Referring to FIG. 6, a liquid dispensing apparatus 605 is depicted in an embodiment of the disclosure. The liquid dispensing apparatus 605 includes a skimmer 650, a material extraction hose 668, and a container closure element 670 arranged to be removably attached to a container proximate to an outlet port (not depicted). The skimmer 650 can also include an upper surface 651 , a lower end 652, a lateral wall surface 654, and an angled lower wall surface 653 that is non-perpendicular to the lateral wall surface 654. Liquid extraction openings 655A-655B are arranged along a lateral wall 654 of the skimmer 650 and in fluid communication with a horizontally arranged internal passage 656 that leads to a material extraction hose 668 (or an extension thereof within the skimmer 650). The container closure element 670 includes an upper surface 671 through which multiple items extend - namely, the material extraction hose 668, a pressurization gas inlet 682 (arranged to be in fluid communication with a pressurization gas source), and a pressure relief outlet 684 (arranged to be in fluid communication with a pressure relief valve). The container closure element 670 includes a threaded surface 672 (e.g., female threaded surface) to permit the container closure element 670 to removably engage a corresponding threaded surface of a container neck (not shown). The container closure element further includes a plug or other removable element 644 through which a retractable tether 643 extends, with the tether 643 being affixed to the skimmer 650 and further being coupled to a retraction element 645, which may include a spool or reel. In certain embodiments, the tether 643 may be selectively shortened (i.e., to a length shorter than a material extraction hose) using the retraction element 645 to ready the skimmer 650 for removal from a container, in order to avoid imposition of undue stress on the material extraction hose 668. The apparatus 605 is arranged to be used with a first pressure dispensing container until contents thereof are exhausted, and then transferred to a second pressure dispensing container for continued dispensing of liquid or liquid-containing material.

Referring to FIG. 7, a liquid dispensing apparatus 705 is depicted in an embodiment of the disclosure. The liquid dispensing apparatus 705 includes a container closure element 771 arranged to be removably attached to a container proximate to an outlet port thereof, a vertically arranged support rod 740 suspended from the container closure element 771 (along upper end 741 of the rod 740), a material extraction hose 768, and a skimmer 750 arranged to travel along the support rod 741. The skimmer 750 can include liquid extraction openings 755, 759 of different sizes arranged to supply liquid to an internal sump 761 arranged to receive a lower end 767 of the material extraction hose 768 or an extension thereof. The skimmer 750 can also include an upper surface 751 , a lower end 752, a lateral wall surface 754, and an aperture 763 through which the support rod 741 extends. Cooperation between the vertically aligned aperture 763 and the vertical support rod 740 received therein simultaneously permits vertical translation of the skimmer 750 within a container and limits lateral translation of the skimmer 750 relative to the container, and also permits the skimmer 750 to be rigidly supported during removal from a container and insertion into another container without imposing undue stress on the (flexible) material extraction hose 768. A bottom surface 752 of the skimmer 750 defines a recess 752A arranged to receive a widened travel stop end portion 742 of the support rod 740. A primary liquid extraction opening 755 is defined in a lateral wall 754 of the skimmer 750 and is arranged to supply liquid or liquid-containing material into the sump 761. A secondary liquid extraction opening 759, which is arranged at a vertical level lower than the primary extraction opening 759 and includes a smaller cross-sectional area than that primary extraction opening 759, is also arranged to supply liquid or liquid- containing material into the sump 761. The (larger and higher) primary liquid extraction opening 755 ensures that a majority of liquid or liquid-containing material is withdrawn from a container at a position closer to a gas/liquid interface therein, while the presence of the (smaller and lower) secondary liquid extraction opening also permits removal of a greater amount of liquid or liquid-containing material from near the bottom of a container (thereby reducing unrecoverable residual waste at the conclusion of material dispensation). A lower end 767 of the material extraction hose 768 (or an extension of the hose 768) is arranged to extract liquid or liquid-containing material from a lower portion of the internal sump 761. The apparatus 705 is arranged to be used with a first pressure dispensing container until contents thereof are exhausted, and then transferred to a second pressure dispensing container for continued dispensing of liquid or liquid-containing material.

Referring to FIG. 8A-8D, a liquid dispensing apparatus 805 is depicted in an embodiment of the disclosure. The liquid dispensing apparatus 805 includes a container closure element 870 arranged to be removably attached to a container proximate to an outlet port (not depicted), a vertically arranged support rod 840 suspended from the container closure element 870, a material extraction hose 868, and a skimmer 850 arranged to travel along the support rod 840. FIGS. 8B-8D illustrate portions of the support rod 840 and material extraction hose 868 of FIG. 8A, with FIG. 8B providing an upper perspective view of the skimmer 850, with FIG. 8C providing a perspective transparency view of the skimmer 850, and with FIG. 8D providing a lower perspective view of the skimmer 850.

The skimmer 850 includes an upper surface 851, a lower end 852, a lateral wall surface 854, and an aperture 863 through which the support rod 840 extends. Cooperation between the vertically aligned aperture 863 and the vertical support rod 840 received therein simultaneously permits vertical translation of the skimmer 850 within a container and limits lateral translation of the skimmer 850 relative to the container, and also permits the skimmer 850 to be rigidly supported during removal from a container and insertion into another container without imposing undue stress on the (flexible) material extraction hose 868. Travel of the skimmer 850 along the support rod 840 may be limited with a widened travel stop lower end 842 of the rod 840. The skimmer 850 includes upper (primary) liquid extraction openings 855 comprising channels or slots defined in the upper surface 851, and a smaller (secondary) lower liquid extraction opening 859, with the openings 855, 859 all arranged to supply liquid to an internal sump 861 arranged to receive the material extraction hose 868 (or an extension 866 of the hose 868, which may include a fitting 866 affixed to the skimmer 850. (Although four channels or slots are shown in the upper surface 851, it is to be appreciated that any suitable number of one or more channels or slots may be provided.) A lower end 867 of the material extraction hose 868 or extension 866 is arranged in a lower portion of the internal sump 861 for withdrawal of liquid or liquid-containing material. The skimmer 850 is floatable on liquid or liquid-containing material in such a manner that a lower portion of each upper liquid extraction opening or slot 855 is arranged below an gas/liquid interface 823 (i.e., uppermost level of liquid or liquid containing material). Although the liquid dispensing apparatus 805 is illustrated with the skimmer 850 in a lower-most position relative to the support rod 840, it is to be appreciated that the skimmer 850 can translate vertically along the support rod 840 to float along a gas/liquid interface 823, such that vertical position of the skimmer 850 follows the vertical level of liquid or liquid-containing material within a container (not shown) into which the skimmer 850 is inserted.

In operation of the liquid dispensing apparatus 805, the skimmer 850 is arranged to float on liquid or liquid-containing material within a container, with a gas/liquid interface 823 positioned above a bottom surface of the upper liquid extraction openings 855. When pressurized gas is supplied to the container to cause pressurization of the liquid or liquid- containing material, such material is extracted from the container through the sump 861 and material extraction hose 868, which extends through the container closure element 870 to flow to a point of use. When liquid or liquid-containing material is sufficiently depleted from the container to cause liquid level to drop below the upper liquid extraction openings 855, liquid continues to flow through the lower liquid extraction opening 859 into the sump 861 to be extracted via the material extraction hose until liquid level in the container falls below the bottom of the sump 861. The apparatus 805 may be removed from the pressure dispensing container, and then transferred to a second pressure dispensing container for continued dispensing of liquid or liquid-containing material.

Referring to FIG. 9 a material dispensing system 907 is illustrated in an embodiment of the disclosure. The material dispensing system 907 includes a skimmer 950 arranged within a direct contact pressure dispensing container 910, and includes a pressurizable reservoir 994 arranged between the container 910 and a point of use 996 (e.g., a process tool). The skimmer 950 includes at least one liquid extraction opening 955 positioned below an upper level of liquid (i.e., a gas/liquid interface 923) within the container 910, and a material extraction hose 968 is coupled between the skimmer 950 and an outlet port 916 of the container 910 (defined by container neck 915) arranged along a top wall 911 of the container 910. The skimmer 950 includes an upper surface 951 that may be arranged above the gas/liquid interface 923 and a lower surface 952 arranged below the gas/liquid interface 923, with the at least one liquid extraction opening 955 being submerged below the gas/liquid interface 923. A container closure element 970 is removably coupled to the neck 915 of the container 910. The container closure element 970 is arranged to permit passage of liquid or liquid-containing material out of the container 910 via the material extraction hose 968, to admit pressurized gas 920 into the container 910 from a pressurization gas source 981 via line 982, and may also permit pressurized gas to be vented from the container 910 through a pressure relief valve and/or vent 986. At least one valve VI may be arranged between the pressurization gas source 981 and the container 910. In one embodiment, a sump portion 914 may be arranged along a lower wall 922 of the container 910, with the sump 914 and the skimmer 950 being compatible in size and shape to permit the skimmer 950 to be arranged proximate to or against a bottom of the sump 914 to maximize removal of liquid 925 from the container 910.

Liquid or liquid-containing material may be dispensed from the container 910 through a valve V2 to reach a pressurizable reservoir 994 arranged between the container 910 and a point of use 996 (e.g., process tool). A liquid level 993 within the pressurizable reservoir 994 may be monitored with high and low level sensors 931, 932. The pressurizable reservoir 994 may be in selective fluid communication with a pressurization gas source 981A by way of a gas valve V4, and optionally in selective fluid communication with a vacuum source 986A by way of a vacuum valve V5. Liquid may be conveyed from the reservoir 994 through a downstream valve V3 to a point of use 996. An interior of the pressurizable reservoir 994 is arranged to be pressurized to a higher pressure than the pressure dispensing container 910, to thereby increase pressure of liquid or liquid-containing material 993 before such liquid or liquid-containing material is supplied to the point of use 996. The reservoir 994 can therefore operate as a transfer pump, and can define a substantially smaller volume than the volume of the upstream container 910.

In operation of the system 907, pressurized gas 920 may be supplied from gas source 981 to contact liquid 925 in the pressure dispensing container 910, thereby pressurizing liquid to promote extraction of liquid through the skimmer 950 and material extraction hose 968. Such liquid is conveyed to the reservoir 994, and a valve between the reservoir 994 and container 910 may be closed. Pressurized gas may be supplied from gas source 981 A to the reservoir 994 to contact liquid 993, thereby elevating pressure of the liquid which is then supplied through valve to the point of use 996. When low liquid level is detected in the reservoir 994 by the low level sensor 932, additional liquid is supplied from the pressure dispensing container 910 to the reservoir 994 for continued dispensing to the point of use 996. The vacuum source 986A may be used to remove gas from the reservoir 994 at times when the reservoir is not dispensing liquid to the point of use 996. In certain embodiments, the vacuum source 986A may additionally or alternatively be used to transfer (or to assist in transfer) of liquid from the container 910 to the reservoir 994 by establishment of a pressure differential therebetween, thereby reducing the pressure that would otherwise need to be maintained in the container 910 to accomplish transfer of liquid to the reservoir 994.

Embodiments disclosed herein may provide one or more of the following beneficial technical effects: reduced dissolution of pressurized gas into liquids to be dispensed; enablement of use of rigid collapsible or rigid foldable containers without necessity for collapsible liners; and enablement of re-use of liquid dispensing components with different containers.

While illustrative embodiments are disclosed herein, it will be appreciated that the utility of the disclosure is not thus limited, but rather extends to and encompasses numerous other variations, modifications and alternative embodiments, as will suggest themselves to those of ordinary skill in the field of the present disclosure. Any one or more features described in connection with one or more embodiment(s) are contemplated to be combined with one or more features of any other embodiment(s), unless specifically indicated to the contrary herein. Correspondingly, the invention as hereinafter claimed is intended to be broadly construed and interpreted, as including all such variations, modifications and alternative embodiments, within its spirit and scope.

Various modifications to the embodiments may be apparent to one of skill in the art upon reading this disclosure. For example, persons of ordinary skill in the relevant art will recognize that the various features described for the different embodiments can be suitably combined, un-combined, and re-combined with other features, alone, or in different combinations. Likewise, the various features described above should all be regarded as example embodiments, rather than limitations to the scope or spirit of the disclosure. Persons of ordinary skill in the relevant arts will recognize that various embodiments can comprise fewer features than illustrated in any individual embodiment described above. The embodiments described herein are not meant to be an exhaustive presentation of the ways in which the various features may be combined. Accordingly, the embodiments are not mutually exclusive combinations of features; rather, the claims can comprise a combination of different individual features selected from different individual embodiments, as understood by persons of ordinary skill in the art.

The following is hereby incorporated by reference herein except for express definitions contained therein: International Publication No. WO 2012/051093, entitled "Substantially Rigid Collapsible Liner, Container and/or Liner for Replacing Glass Bottles, and Enhanced Flexible Liners," filed October 10, 201 1; U.S. Patent Application Publication No. 2014/0307042 Al, entitled "Substantially Rigid Foldable Container" filed on March 15, 2013. Any incorporation by reference of documents herein is limited such that no subject matter is incorporated that is contrary to the explicit disclosure herein. Any incorporation by reference of documents above is further limited such that no claims included in the documents are incorporated by reference herein. Any incorporation by reference of documents above is yet further limited such that any definitions provided in the documents are not incorporated by reference herein unless expressly included herein.

References to "embodiment(s)", "disclosure", "present disclosure", "embodiment(s) of the disclosure", "disclosed embodiment(s)", and the like contained herein refer to the specification (text, including the claims, and figures) of this patent application that are not admitted prior art.

For purposes of interpreting the claims, it is expressly intended that the provisions of 35 U.S.C. 112(f) are not to be invoked unless the specific terms "means for" or "step for" are recited in the respective claim.

Claims

CLAIMS What is claimed is:

1. A liquid dispensing apparatus arranged to extract a liquid or liquid-containing material from a pressure dispensing container configured to receive pressurized gas in direct contact with the liquid or liquid-containing material, the apparatus comprising: a skimmer arranged to float on the liquid or liquid-containing material within an interior of the container and defining at least one liquid extraction opening positioned below an upper level of liquid or liquid-containing material within the container; and

a material extraction hose coupled between the skimmer and an outlet port of the container, and arranged to convey liquid or liquid-containing material received from the at least one liquid extraction opening to the outlet port.

2. An apparatus according to claim 1 , wherein a lower portion of the skimmer comprises a greater density material than an upper portion of the skimmer.

3. An apparatus according to claim 1 , wherein the material extraction hose comprises a flexible, self-coiling hose.

4. An apparatus according to claim 1 , wherein the at least one liquid extraction opening is arranged within 3 millimeters of the upper level of liquid or liquid-containing material within the container.

5. An apparatus according to claim 1, further comprising a vertical support element suspended within the container, wherein the skimmer comprises a vertically aligned aperture or opening arranged to receive the support element to simultaneously permit vertical translation of the skimmer and limit lateral translation of the skimmer relative to the container.

6. An apparatus according to claim 5, further comprising a container closure element arranged to be removably attached to the container proximate to the outlet port, wherein the vertical support element is affixed to the container closure element, and wherein the container closure element is arranged to permit passage of liquid or liquid-containing material received from the material extraction hose.

7. An apparatus according to claim 1, wherein:

the skimmer comprises at least one channel defined in an upper surface of the skimmer, wherein a lower boundary of the at least one channel is arranged to be positioned below an upper level of liquid or liquid-containing material within the container; and

the at least one liquid extraction opening comprises a first liquid extraction opening arranged to receive liquid or liquid-containing material from the at least one channel.

8. An apparatus according to claim 7, wherein the at least one liquid extraction opening comprises a second liquid extraction opening that (i) is defined in a lower or lateral surface of the skimmer, and (ii) is arranged at a vertical level below a vertical level of the first liquid extraction opening.

9. An apparatus according to claim 8, wherein the second liquid extraction opening has a smaller cross-sectional area than a cross-sectional area of the first liquid extraction opening.

10. An apparatus according to claim 1, further comprising at least one of a magnet or a magnetically interactive material arranged in or on a lower or lateral surface of the skimmer.

1 1. An apparatus according to claim 1, further comprising a container closure element arranged to be removably attached to the container proximate to the outlet port, wherein the container closure element is arranged to permit passage of liquid or liquid-containing materia] received from the material extraction hose.

12. An apparatus according to claim 11, wherein the container closure element comprises at least one of the following features: (i) the container closure element comprises a threaded surface arranged to cooperate with a threaded neck of the container, and (ii) the container closure element is arranged to permit passage of pressurized gas between the interior of the container and a pressurized gas source or a vent.

13. A pressure dispensing container comprising the liquid dispensing apparatus of claim 1, wherein the pressure dispensing container is configured to receive pressurized gas in direct contact with the liquid or liquid-containing material, and the pressure dispensing container comprises an outlet port arranged to receive liquid or liquid-containing material from the material extraction hose.

14. A pressure dispensing container according to claim 13, being devoid of a liner and being configured to receive pressurized gas in direct contact with liquid or liquid- containing material within the container.

15. A pressure dispensing container according to claim 13, wherein the container comprises a rigid collapsible or rigid foldable container.

16. A pressure dispensing container according to claim 13, wherein a bottom portion of the container comprises a reduced width sump region, and a bottom portion of the skimmer is sized and shaped to substantially conform to the reduced width sump region.

17. A pressure dispensing container according to claim 13, wherein a bottom portion of the container comprises a sump region having a conical or frustoconical shape, a bottom portion of the skimmer comprises a conical or frustoconical shape, and the bottom portion of the skimmer is arranged to fit into the sump region.

18. A pressure dispensing container according to claim 13, wherein the outlet port, the skimmer, and the material extraction hose are sized and shaped to permit the skimmer and the material extraction hose to be inserted into and removed from an interior of the container through the outlet port.

19. A material delivery system comprising the pressure dispensing container of claim 13, and further comprising a pressurizable reservoir arranged to receive liquid or liquid- containing material from the pressure dispensing container, wherein an interior of the pressurizable reservoir containing liquid or liquid-containing material is arranged to be pressurized to a higher pressure than the pressure dispensing container.

20. A material delivery system according to claim 19, wherein the pressurizable reservoir is in fluid communication with a process tool arranged to receive the liquid or liquid-containing material.

21. An apparatus according to claim 1 , wherein:

the skimmer defines an internal sump;

the at least one liquid extraction opening comprises an upper liquid extraction opening arranged to supply liquid or liquid containing material to the internal sump;

the at least one extraction opening comprises a lower liquid extraction opening arranged to supply liquid or liquid containing material to the internal sump, the lower liquid extraction opening being arranged at a vertical level below a vertical level of the upper liquid extraction opening; and

the material extraction hose or an extension thereof is arranged to withdraw liquid or liquid containing material from a lower portion of the internal sump.

22. An apparatus according to claim 21, wherein the lower liquid extraction opening defines a smaller cross-sectional area than the upper liquid extraction opening.

23. A fluid processing method comprising:

providing a first pressure dispensing container defining an interior and having a skimmer and at least a portion of a material extraction hose inserted into the interior, the first pressure dispensing container containing liquid or liquid-containing material, the skimmer being arranged to float on the liquid or liquid-containing material within the first pressure dispensing container and defining at least one liquid extraction opening positioned below an upper level of liquid or liquid-containing material within the container, the material extraction hose being coupled between the skimmer and an outlet port of the container and being arranged to convey liquid or liquid-containing material received from the at least one liquid extraction opening to the outlet port;

supplying pressurized gas to the interior of the first pressure dispensing container to contact the liquid or liquid-containing material; and

extracting liquid from the interior of the first pressure dispensing container through the at least one liquid extraction opening and the material extraction hose.

24. A method according to claim 23, further comprising attaching a container closure element to the container proximate to the outlet port, wherein the container closure element is arranged to permit passage of liquid or liquid-containing material received from the material extraction hose.

25. A method according to claim 23, further comprising detecting a condition indicative of exhaustion or near-exhaustion of liquid or liquid-containing material from the first pressure dispensing container, and terminating extraction of liquid from the interior of the first pressure dispensing container responsive to said detecting.

26. A method according to claim 25, wherein said detecting of a condition indicative of exhaustion or near-exhaustion of liquid or liquid-containing material from the first pressure dispensing container comprises detection of a condition indicating that the skimmer is proximate to or in contact with a bottom wall or bottom portion of the pressure dispensing container.

27. A method according to claim 25, further comprising:

removing the skimmer and material extraction hose from the first pressure dispensing container;

inserting the skimmer and material extraction hose into a second pressure dispensing container containing liquid or liquid-containing material;

supplying pressurized gas to the interior of the second pressure dispensing container to contact liquid or liquid-containing material contained therein; and

extracting liquid from the interior of the second pressure dispensing container through the at least one liquid extraction opening and the material extraction hose.

28. A method according to claim 23, further comprising delivering liquid or liquid- containing material received from the first pressure dispensing container to a process tool arranged to utilize the liquid or liquid-containing material.

29. A method according to claim 28, wherein the process tool comprises a semiconductor or microelectronic device manufacturing tool.

30. A method according to claim 29, further comprising manufacturing at least a portion of a semiconductor or microelectronic device utilizing the semiconductor or microelectronic device manufacturing tool.

31. A method according to claim 30, wherein the at least a portion of the semiconductor or microelectronic device is a flat-panel display substrate.

32. A method for dispensing liquid or liquid-containing material utilizing a pressure dispensing container configured to receive pressurized gas in direct contact with the liquid or liquid-containing material, the method comprising:

comparing a desired volumetric dispensing rate of liquid or liquid-containing material to a value indicative of or derived from rate of diffusion of a pressurization gas into the liquid or liquid-containing material; and

selecting the pressure dispensing container with a cross-sectional area sized to permit liquid or liquid-containing material to be withdrawn using a floatable skimmer from at least one submerged extraction opening of the skimmer proximate to a liquid/gas interface within the container to cause the level of liquid or liquid-containing material in the container to decline faster than a rate at which the liquid or liquid-containing material could otherwise become saturated with the pressurization gas.

33. A method according to claim 32, further comprising supplying pressurization gas to the pressure dispensing container, and withdrawing liquid or liquid-containing material from the container through (i) the at least one extraction opening of the skimmer proximate to the liquid/gas interface within the container and (ii) a material extraction hose coupled between the skimmer and an outlet port of the container, to cause the level of liquid or liquid-containing material in the container to decline faster than a rate at which the liquid or liquid-containing material could otherwise become saturated with the pressurization gas.

34. A fluid processing method comprising:

providing a first pressure dispensing container defining an interior and having a skimmer and at least a portion of a material extraction hose inserted into the interior, the first pressure dispensing container containing liquid or liquid-containing material, the skimmer being arranged to float on the liquid or liquid-containing material within the first pressure dispensing container and defining at least one liquid extraction opening positioned below an upper level of liquid or liquid-containing material within the container, the material extraction hose being coupled between the skimmer and an outlet port of the container and being arranged to convey liquid or liquid-containing material received from the at least one liquid extraction opening to the outlet port; and providing a set of instructions on a tangible medium, the instructions comprising: supplying pressurized gas to the interior of the first pressure dispensing container to contact the liquid or liquid-containing material; and

35. A method according to claim 34, wherein the set of instructions comprise attaching a container closure element to the container proximate to the outlet port, the container closure element being arranged to permit passage of liquid or liquid-containing material received from the material extraction hose.

36. A method according to claim 34, wherein the set of instructions comprise detecting a condition indicative of exhaustion or near-exhaustion of liquid or liquid-containing material from the first pressure dispensing container, and terminating extraction of liquid from the interior of the first pressure dispensing container responsive to said detecting.

37. A method according to claim 36, wherein the step in said instructions of detecting of the condition indicative of exhaustion or near-exhaustion of liquid or liquid-containing material from the first pressure dispensing container comprises detection of a condition indicating that the skimmer is proximate to or in contact with a bottom wall or bottom portion of the pressure dispensing container.

38. A method according to claim 36, wherein the instructions comprise:

supplying pressurized gas to the interior of the second pressure dispensing container to contact liquid or liquid-containing material contained therein; and extracting liquid from the interior of the second pressure dispensing container through the at least one liquid extraction opening and the material extraction hose.