WO2015064834A1 - Dual injection casting apparatus - Google Patents

Abstract

The present invention relates to a dual injection casting apparatus comprising: a first assembly that is disposed on an upper side of a working chamber having an inner space formed therein in which a substrate is placed and injects a first melted material of a fine powder shape onto the substrate while supplying the first melted material together with high-pressure cooling gas into the working chamber; a second assembly that is disposed on the upper side of the working chamber and injects a second melted material of a fine powder shape onto the substrate while supplying the second melted material together with high-pressure cooling gas into the working chamber; and a third assembly that is embedded in the second assembly and prevents the second material from being aggregated before and when injected onto the substrate. The first and second materials injected onto the substrate are uniformly distributed; therefore, the dual injection casting apparatus makes it possible to produce a high-reliability product satisfying a condition required for manufacturing a low-thermal-expansion metal matrix composite.

Description

Dual spray casting device

The present invention relates to a double spray casting apparatus, and more particularly, to a double spray casting apparatus that enables the production of reliable products that meet the conditions required for the production of low thermal expansion metal composite material.

Recently, in order to cope with the complicated and miniaturized structure of semiconductor devices, rather than conventional batch type manufacturing apparatuses that process dozens of wafers at once, single-sheet fabrication processing single wafers in one complex process A lot of devices are applied.

Consumable core components used in such a sheet type manufacturing apparatus include crackers, boards, susceptors, upper and lower electrodes in chambers, diffusers, and shower heads.

Among these, the susceptor is a place where the glass substrate is placed during the chemical vapor deposition (CVD) process in the manufacturing process of semiconductors and LCD displays. A semiconductor that supports the glass substrate and raises the glass substrate to the temperature required for the CVD process And it can be said to be a key component necessary for the display manufacturing process.

Therefore, susceptor materials such as semiconductors, displays, and solar cells are exposed to continuous thermal fatigue conditions (AlN, Al ₂ O ₃ , Y ₂ O ₃ ) or metal composite materials (Al-) with low thermal expansion characteristics. Si-based alloy) is applied.

Since the susceptor material emphasizes the durability of the material to cope with long-term operation, it requires a metal composite material having a complicated manufacturing process rather than a ceramic material that is weak to thermal brittleness.

In addition, as the area of the semiconductor substrate increases and the diameter increases, it is no longer possible to mechanically clamp the substrate throughout the entire process.In order to solve this technical problem, an electrostatic chuck is used to hold the substrate using static electricity. ESC) must also be equipped.

Therefore, it is possible to suppress heater disconnection and surface insulation layer breakage as the area of the substrate increases, and to develop a material manufactured by the advanced surface coating process technology while having plasma resistance and corrosion resistance. In addition to improving the uniformity of the temperature distribution over time, it also increases the heating and cooling rates of large area susceptors, and can perform electrostatic chuck functions even at high temperature susceptors, and to lower the supply cost of parts. It is a technical requirement of semiconductor device and equipment manufacturers to provide a product.

However, among the stringent requirements listed above, the production of low thermal expansion metal composite materials requires more than 50% of Si, an alloying element, and fine primary Si particles of 20 µm or less on the aluminum substrate. There is a difficulty in developing the base technology and process technology.

While the basic technology and the process technology for the production of materials are secured to some extent in domestic famous large semiconductor display companies, the core consumable parts manufacturing technology of the rear device industry such as the susceptor described above is lacking in original technology. The situation is highly dependent.

On the other hand, the spray casting process for producing a low thermal expansion metal composite material has the advantage that it can be obtained at the same time, such as thermal, physical, mechanical properties that can not be obtained conventionally through the microstructure of the structure by rapid solidification.

That is, the spray casting process sprays molten metal into fine droplets using an inert gas of high speed and high pressure in an inert protective atmosphere, and at the same time, the fine droplets collide at high speed on a substrate having a desired shape to form a very thin plate. To be laminated.

Therefore, the spray casting process is performed in an inert gas atmosphere, such as melting, atomization, and lamination, so that the influence of impurities or contaminants that may be mixed from outside can be minimized, and high quality products can be produced. In addition, by controlling the shape and the movement state of the substrate, and the type and the movement state of the spray nozzle, there is an advantage that the production of the near-net-shape is possible.

In addition, the spray casting process has the advantages of rapid solidification such as enhanced dispersion, finer structure, increased solidity, uniform phase distribution, and removal of segregated phases. It is a process that combines the manufacturing process of near-net-shape products.

However, in spite of the above advantages of the spray casting process, the above-described spray casting process has limitations such as surface roughness and micropores in the spray casting material.

In addition, the injection casting process has a problem that it is difficult to apply the composite material because most of the applicable material is limited to the metal material.

[Preceding technical literature]

[Patent Documents]

Patent Registration No. 10-0508344

Patent Publication No. 10-2010-0112016

The present invention has been invented to improve the above problems, and to provide a dual spray casting apparatus that enables the production of a reliable product that satisfies the conditions required for the production of low thermal expansion metal composite material.

In order to achieve the above object, the present invention is disposed on the upper side of the work chamber in which the internal space in which the substrate is disposed, the molten first material while supplying the molten first material with the high-pressure cooling gas into the working chamber A first assembly spraying a material onto the substrate in the form of fine powder; A second assembly disposed above the working chamber and spraying the molten second material in the form of fine powder onto the substrate while supplying the molten second material together with the high pressure cooling gas into the working chamber; And a third assembly embedded in the second assembly and preventing the second material from agglomerating before being sprayed onto the substrate and when spraying onto the substrate. It is possible to provide a double spray casting device, characterized in that the second material is uniformly distributed.

In addition, the present invention is disposed on the upper side of the working chamber is formed the inner space in which the substrate is disposed, and melt the first material supplied from the outside, while supplying the molten first material with the high-pressure cooling gas into the working chamber A first assembly spraying the molten first material in the form of fine powder onto the substrate; The molten second material is disposed above the working chamber, and receives and melts a second material having different physical properties from the first material from the outside, and supplies the molten second material with the high pressure cooling gas into the working chamber. A second assembly spraying a material onto the substrate in the form of fine powder; And a third assembly embedded in the second assembly and preventing the second material from agglomerating before being sprayed onto the substrate and when spraying onto the substrate. It is possible to provide a double spray casting device, characterized in that the second material is uniformly distributed.

In addition, the present invention is disposed on the upper side of the work chamber in which the internal space in which the substrate is disposed is formed, melting the first material supplied from the outside, while supplying the molten first material with the high-pressure cooling gas into the working chamber A first assembly spraying the molten first material in the form of fine powder onto the substrate; A first injection scanning controller provided in the first assembly and configured to adjust an injection angle of the molten first material injected into the working chamber; The molten second material is disposed above the working chamber, and receives and melts a second material having different physical properties from the first material from the outside, and supplies the molten second material with the high pressure cooling gas into the working chamber. A second assembly spraying a material onto the substrate in the form of fine powder; A second injection scanning controller provided in the second assembly and configured to adjust an injection angle of the molten second material injected into the working chamber; And a third assembly embedded in the second assembly and preventing the second material from agglomerating before being sprayed onto the substrate and when spraying onto the substrate. It is also possible to provide a double spray casting device, characterized in that the second material is uniformly distributed.

Here, the third assembly, a rotation shaft connected to the drive motor, the drive motor, and embedded in a second tundish in communication with a second melting furnace for heating and melting the second material supplied from the outside, and the rotation shaft It is formed in a spiral shape along the outer circumference of the characterized in that it comprises a wing screw for continuously stirring the second material while rotating in conjunction with the rotary shaft.

In this case, the third assembly is mounted on a second tundish in communication with a second melting furnace for heating and melting the second material supplied from the outside, and the high frequency is applied to the second material in which the solid powder is dispersed in a solvent. And applying an ultrasonic wave to form a bubble in the solvent, and to form the bubble on the surface of the solid powder.

The third assembly is mounted on a second tundish in communication with a second melting furnace for heating and melting the second material supplied from the outside, and the second material near the inner surface of the second tundish has a low frequency. It characterized in that it comprises a vibration generator to give a vibration to continuously agitate the second material.

The third assembly may include a rotating shaft connected to a driving motor and a second tundish connected to a second melting furnace for heating and melting the second material supplied from the outside, and the rotating shaft connected to the driving motor. The second turn is formed in a spiral shape along the outer circumferential surface of the wing screw to communicate with the rotary shaft to continuously stir the second material, and to communicate with the second melting furnace for heating and melting the second material supplied from the outside. An ultrasonic generator mounted on a dish, applying ultrasonic waves of high frequency to the second material in which the solid powder is dispersed in the solvent to form bubbles in the solvent, and bursting the formed bubbles on the surface of the solid powder; Mounted in a second tundish in communication with a second melting furnace for heating and melting the received second material, and in the second tundish And the second material in the vicinity of applying vibration of low frequencies characterized in that it comprises a vibration generator such that the second material is constantly stirred.

The first material may be a metal, a metal alloy, or a metal and ceramic mixture, and the second material may be a ceramic.

In addition, the first material and the second material is characterized in that the metal or metal alloy having a different melting point.

The first material may be a metal or a metal alloy or a mixture of a metal and a polymer material, and the second material may be a polymer material.

The dual injection casting apparatus further includes a substrate manipulation assembly mounted in the working chamber, supporting the substrate, and rotating the substrate forward and backward or lifting the substrate in an upward and downward direction. It features.

The first assembly and the second assembly may be disposed to be inclined in opposite directions with respect to the working chamber.

The first assembly is configured to temporarily receive a first melting furnace for heating and melting the first material supplied from the outside and the molten first material communicated with the first melting furnace and supplied from the first melting furnace. A first tundish for continuously heating the molten first material with a flame supplied from a plurality of oxygen torches provided at an outer side, and a bottom surface of the first tundish provided with the molten agent And a first gas injection nozzle provided with a first molten metal nozzle through which the first material is discharged, and a first gas injection nozzle provided at an outer side of the first molten metal nozzle to inject the high-pressure cooling gas.

The second assembly may be configured to temporarily receive a second melting furnace for heating and melting the second material supplied from the outside, and the molten second material communicated with the second melting furnace and supplied from the second melting furnace. A second tundish for continuously heating the molten second material with a flame supplied from a plurality of oxygen torches provided on the outside, and a molten agent provided on a bottom surface of the second tundish A second molten metal nozzle through which the material is discharged, and a second gas injection nozzle provided on an outer side of the second molten metal nozzle to inject the high-pressure cooling gas, wherein the third assembly includes the second tundish of the second tundish; It is characterized in that it is mounted inside or outside.

The second molten metal nozzle may be made of graphite, and an end portion of the second molten metal nozzle may further include a plurality of fine injection holes communicating with the second tundish.

And a range of angles at which the first injection scanning controller injects the molten first material from the first assembly and angles at which the second injection scanning controller injects the molten second material from the second assembly. Each of the first material and the second material is characterized in that the 4 ° to 8 ° with respect to both sides of the imaginary line extending from the outlet.

The first injection scanning controller may include a first actuator mounted to the first assembly, and a first rotating nozzle capable of adjusting an angle in conjunction with forward and reverse rotation of the first actuator.

The second injection scanning controller may include a second actuator mounted to the second assembly, and a second rotating nozzle capable of adjusting an angle in conjunction with forward and reverse rotation of the second actuator.

According to the present invention having the above configuration, the following effects can be achieved.

First, the present invention allows the first material and the second material having different physical properties from the first assembly and the second assembly to be sprayed onto the substrate in the form of fine powder so that the first and second materials are uniformly and cleanly distributed. Composite materials can be provided, helping to produce highly reliable and high-precision semiconductor and display products.

In particular, the present invention provides a dispersion strengthening effect by applying various embodiments, such as continuously stirring to prevent the second material from agglomerating before the third assembly mounted on the second assembly is sprayed onto the substrate and when sprayed onto the substrate. We can plan.

In particular, the present invention is applicable to the manufacture of composite materials made of different materials, such as metal and ceramics or metal and polymer materials, through which the special addition of physical, electrical, and thermal properties in addition to the original properties of the metal It can also be used to manufacture composites.

In addition, the present invention is also applicable to the manufacture of a composite material consisting of a metal material having a different melting point, through which a special composite material with additional physical, electrical, and thermal properties more than the characteristics of the low-melting metal inherently Of course, it can be utilized in the manufacture of.

1 is a partial cross-sectional conceptual view showing the overall structure of a dual injection casting device according to an embodiment of the present invention

2 and 3 is a partial cross-sectional conceptual view showing the overall structure of the third assembly, which is the main part of the dual injection casting device according to various embodiments of the present invention

4 is an enlarged conceptual view of portion A of FIG. 1;

5 is a perspective view showing a structure in which a first assembly and a second assembly, which are main parts of a dual jet casting apparatus according to an embodiment, are mounted on a chamber upper plate of a working chamber;

6 is an optical microscope comparison picture of a composite material manufactured by a double spray casting apparatus according to an embodiment of the present invention and a composite material manufactured by a conventional spray casting apparatus.

Figure 7 is a graph comparing the relative length change rate of the composite material produced by the double injection molding apparatus according to an embodiment of the present invention and the composite material produced by the conventional injection casting device

8 is a graph comparing the change in coefficient of thermal expansion according to the temperature of the composite material produced by the dual injection casting device according to an embodiment of the present invention and the composite material produced by the conventional injection casting device

9 is a graph comparing the hardness measurement results of the composite material produced by the dual injection casting device according to an embodiment of the present invention and the composite material produced by the conventional injection casting device

10 to 12 are graphs showing particle distribution plots of area fractions of Si powder and SiC powder (SiCp), which are injection castings, respectively.

Advantages and features of the present invention, and methods for achieving them will be apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings.

However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms.

In this specification, the embodiments are provided so that the disclosure of the present invention may be completed and the scope of the present invention may be completely provided to those skilled in the art.

And the present invention is only defined by the scope of the claims.

Advantages and features of the present invention, and methods for achieving them will be apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings.

However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms.

In this specification, the embodiments are provided so that the disclosure of the present invention may be completed and the scope of the present invention may be completely provided to those skilled in the art.

And the present invention is only defined by the scope of the claims.

Thus, in some embodiments, well known components, well known operations and well known techniques are not described in detail in order to avoid obscuring the present invention.

In addition, the same reference numerals throughout the specification refer to the same components, and the terminology (discussed) used herein is for the purpose of describing the embodiments are not intended to limit the invention.

As used herein, the singular forms "a", "an" and "the" include plural unless the context clearly dictates otherwise, and the elements and acts referred to as 'comprises' or 'do' not exclude the presence or addition of one or more other components and acts. .

Unless otherwise defined, all terms (including technical and scientific terms) used in the present specification may be used in a sense that can be commonly understood by those skilled in the art.

In addition, the terms defined in the commonly used dictionary are not ideally or excessively interpreted unless they are defined.

Hereinafter, with reference to the accompanying drawings will be described a preferred embodiment of the present invention.

1 is a partial cross-sectional conceptual view showing the overall structure of a dual spray casting apparatus according to an embodiment of the present invention, Figures 2 and 3 of the third assembly which is the main part of the dual spray casting apparatus according to various embodiments of the present invention 4 is a conceptual view of a partial cross-sectional view showing an overall structure, and FIG. 4 is an enlarged conceptual view of part A of FIG. 1, and FIG. 5 is a first assembly and a second assembly which are main parts of a dual injection casting apparatus according to an embodiment of the present invention. A perspective view showing the structure mounted on the chamber top plate.

For reference, in FIG. 5, reference numeral 122 denotes a first supply pipe for supplying oxygen for heating the first tundish 120 of the first assembly 100, and 222 denotes a second supply tube of the second assembly 200. Each of the second supply pipes for supplying oxygen for heating the tundish 220 is shown.

In FIG. 5, reference numeral 125 denotes a first scanning box in which a series of manipulations, such as adjusting an angle at which the first material 710 is injected through the first assembly 100, is performed. The first inspection window for identifying the operation is made, 225 is a second scanning box that performs a series of operations, such as adjusting the angle at which the second material 720 is injected through the second assembly 200, 226 each shows a second inspection window for identifying a situation in which such a series of operations are made.

As shown in the present invention, the first material 710 and the second material 720 having different physical properties from the first material 710 from the first assembly 100 and the second assembly 200 are respectively working chambers. The substrate 800 may be sprayed onto the substrate 800, and the second assembly 200 may be mounted to the third assembly 250, thereby preventing the aggregation of the second material 720.

The first assembly 100 is disposed above the work chamber 900 in which the internal space in which the substrate 800 is disposed is formed, melts the first material 710 supplied from the outside, and melts the first material 710. ) Is injected into the working chamber 900 together with the high-pressure cooling gas to spray the molten first material 710 to the substrate 800 in the form of fine powder.

The second assembly 200 is disposed above the working chamber 900, and receives and melts a second material 720 having different physical properties from the first material 710 from the outside, and melts the second material 720. To spray the molten second material 720 to the substrate 800 in the form of a fine powder while supplying the high pressure cooling gas into the working chamber 900.

On the other hand, the dispersion strengthening method is one of the methods to strengthen the metal and metal alloy material is a method of dispersing the fine solid powder in the metal and metal alloy material.

However, due to their small size, the solid powders aggregate with each other to reduce surface energy.

Accordingly, when the first material 710 or the second material 720 such as the solid powder is applied to the dual spray casting apparatus according to the present invention without any special consideration or countermeasures, the solid powder is fine and uniform in the metal and metal alloy material. Since it is not dispersed in a uniformly distributed in a coherent form, it is not possible to obtain a dispersion strengthening effect.

Accordingly, the third assembly 250 is embedded in the second assembly 200 and serves to prevent the second material 720 from agglomerating before spraying onto the substrate 800 and when spraying onto the substrate 800. It is.

As described above, in the present invention, the first material 710 and the second material 720 sprayed onto the substrate 800 may be uniformly distributed, and the composite material thus manufactured may help to produce a highly reliable product. There will be.

The present invention can be applied to the embodiment of the structure described above, it is also possible to apply a variety of embodiments as follows.

As described above, the first material 710 is sprayed through the first assembly 100, and the second material 720 is sprayed through the second assembly 200 as described above. Material.

That is, the first material 710 may be, for example, a metal such as Al or Cu or Fe, or may be a metal alloy such as Al alloy or Cu alloy or Fe alloy, or a mixture of Al and Si or Cu and Metal or ceramic mixtures, such as mixtures of Si or mixtures of Fe and Si, and the like.

The second material 720 may be, for example, a ceramic such as ceramic powder (SiCp).

The first material 710 and the second material 720 may be metals or metal alloys having different melting points.

In addition, the first material 710 may be a metal or a metal alloy or a mixture of a metal and a polymer material, and the second material 720 may be a polymer material.

Therefore, the present invention is applicable to the manufacture of a composite material made of different materials such as metal and ceramic or metal and polymer material, through which the special addition of physical, electrical, and thermal properties in addition to the original properties of the metal It can also be used to manufacture composites.

In addition, the present invention is also applicable to the manufacture of a composite material consisting of a metal material having a different melting point, through which a special composite material with additional physical, electrical, and thermal properties more than the characteristics of the low-melting metal inherently Of course, it can be utilized in the manufacture of.

On the other hand, the first assembly 100 is for melting and spraying the first material 710 in the form of fine powder as described above, the first melting furnace 110, the first tundish 120 and the first molten metal It can be seen that the structure including the nozzle 130 and the first gas injection nozzle 140.

The first melting furnace 110 is to heat and melt the first material 710 supplied from the outside.

The first tundish 120 is in communication with the first melting furnace 110, and has a space for temporarily receiving the molten first material 710 supplied from the first melting furnace 110, a plurality of The molten first material 710 is continuously heated with a flame supplied from an oxygen torch (hereinafter, not shown).

The first molten metal nozzle 130 is provided on the bottom surface of the first tundish 120 to discharge the molten first material 710 and is preferably made of graphite in terms of heat resistance.

The first gas injection nozzle 140 is provided outside the first molten metal nozzle 130 to inject a high pressure cooling gas.

Accordingly, the first material 710 is heated and melted in the first melting furnace 110 to be guided through the first tundish guide 115 to be temporarily accommodated in the first tundish 120, but the first material 710 may be used. When the process is completed by receiving a flame from the oxygen torch provided on the outside of the first tundish 120 so that is not solidified.

Subsequently, the first material 710 descends to the working chamber 900 through the first molten metal nozzle 130 in a molten state, and the N ₂ gas, which is an inert gas, is passed through the first gas injection nozzle 140. By spraying the same high pressure cooling gas together, the first material 710 is sprayed in the form of a metal powder that is in a molten state from a molten state.

On the other hand, the second assembly 200 is for melting and spraying the second material 720 in the form of fine powder as described above, the second melting furnace 210, the second tundish 220 and the second molten metal It can be seen that the structure including the nozzle 230 and the second gas injection nozzle 240.

The second melting furnace 210 is to heat and melt the second material 720 supplied from the outside.

The second tundish 220 communicates with the second melting furnace 210, and has a space for temporarily receiving the molten second material 720 supplied from the second melting furnace 210, and includes a plurality of externally provided plates. The molten second material 720 is continuously heated with a flame supplied from an oxygen torch (hereinafter, not shown).

The second molten metal nozzle 230 is provided on the bottom surface of the second tundish 220 to discharge the molten second material 720. The second molten metal nozzle 230 is preferably made of graphite in terms of heat resistance.

The second gas injection nozzle 240 is provided outside the second molten metal nozzle 230 to inject a high pressure cooling gas.

Therefore, the second material 720 is heated and melted in the second melting furnace 210 to be guided through the second tundish guide 215 to be temporarily accommodated in the second tundish 220, but the second material 720 When the process is completed by receiving a flame from the oxygen torch provided on the outside of the second tundish 220 so that is not solidified.

Thereafter, the second material 720 descends to the working chamber 900 through the second molten metal nozzle 230 in a molten state, and the N ₂ gas, which is an inert gas, is passed through the second gas injection nozzle 240. By spraying the same high pressure cooling gas together, the second material 720 is sprayed in the form of a metal powder in a semi-melt state from a molten state.

Meanwhile, as described above, the third assembly 250 continuously prevents agglomeration of the second material 720 so that the substrate is finely and uniformly in a powder state uniformly dispersed before or when sprayed onto the substrate 800. In order to be injected to the (800), as shown in Figure 2 (a) it can be applied to a structure by mechanical stirring, that is, a structure including a drive motor 251 and the rotating shaft 253 and the wing screw 252. .

That is, the rotation shaft 253 is connected to the drive motor 251 and embedded in the second tundish 220 communicating with the second melting furnace for heating and melting the second material 720 supplied from the outside.

The wing screw 252 is formed in a spiral shape along the outer circumferential surface of the rotating shaft 253 to continuously stir the second material 720 while rotating in conjunction with the rotating shaft 253.

Wing screw 252 is shown in a spiral shape, but is not necessarily limited to such a shape and structure, the plate-shaped wing plate (not shown) protruding radially or zigzag at the end of the rotation axis 253 is rotated It is possible to continuously prevent the aggregation of the second material 720 while rotating or stirring.

Then, the third assembly 250 is mounted to the second tundish 220 in communication with the second melting furnace for heating and melting the second material 720 supplied from the outside, as shown in Figure 2 (b), the solid powder A structure including an ultrasonic generator 254 is applied to the second material 720 dispersed in the solvent to form bubbles in the solvent by applying ultrasonic waves having a high frequency of several tens of KHz and to pop the formed bubbles on the solid powder surface. It may be.

That is, the ultrasonic generator 254 may be said to overcome the limitation of the structure by mechanical stirring shown in FIG.

In other words, the ultrasonic generator 254 may be a technical means for compensating that the wing screw 252 may not stir until every second material 720 near the inner wall surface of the second tundish 220.

In addition, the third assembly 250 is mounted to the second tundish 220 in communication with the second melting furnace for heating and melting the second material 720 supplied from the outside, as shown in FIG. Vibration generator 255 to impart a low frequency vibration of 10 to 100 Hz, more preferably 50 to 60 Hz to the second material 720 near the inner surface of the tundish 220 to continuously stir the second material 720. The structure including) may also be applied.

The third assembly 250 shown in FIGS. 2 (a) and 2 (c), i.e., the structure by mechanical stirring and the vibration generator 255, is used in both cases where the solid powder or the solid powder is dispersed in the solvent. This is possible.

In addition, the third assembly 250 illustrated in FIG. 2B, that is, the ultrasonic generator 254 may be used only when the solid powder is dispersed in a solvent. As described above, by applying a high frequency of several tens of KHz, It is possible to more effectively disperse the solid powder by forming bubbles in the solvent and popping the formed bubbles on the surface of the solid powder.

As described above, the third assembly 250 may be equipped with the structure according to each embodiment to the inside and the outside of the second tundish 220 alone, as shown in FIG. 3. In accordance with the structure by mechanical stirring and the ultrasonic generator 254 and the vibration generator 255, respectively or at the same time will be able to continuously prevent the aggregation of the second material (720).

In addition, the present invention, while manufacturing the second molten metal nozzle 230 with the third assembly 250 as described above, the second molten metal nozzle 230 is in communication with the second tundish 220 at the end Of course, the plurality of fine spray holes 232 may be formed to uniformly spray the second material 720 having a fine powder form without aggregation.

On the other hand, the present invention is provided in the first assembly 100, the first injection scanning controller 300 for adjusting the injection angle of the molten first material 710 is injected into the working chamber 900 and the second assembly Embodiments of the structure including the second injection scanning controller 400 provided in the 200 and adjusting the injection angle of the molten second material 720 injected into the working chamber 900 may be applied. Of course.

Here, the first assembly 100 and the second assembly 200 are arranged to be inclined in the opposite direction with respect to the working chamber 900, as shown in the drawing, so as to the substrate 800 disposed in the working chamber 900 The first material 710 and the second material 720 may be sprayed intensively.

In detail, the first injection scanning controller 300 may include a first actuator 310 mounted on the first assembly 100 and a first adjustable angle in conjunction with forward and reverse rotation of the first actuator 310. It can be seen that the configuration including the rotating nozzle 320.

In addition, the second injection scanning controller 400 may include a second rotating nozzle capable of adjusting an angle in conjunction with forward and reverse rotation of the second actuator 410 and the second actuator 410 mounted on the second assembly 200. It can be seen that the configuration including the (420).

In addition, the dual injection casting device according to an embodiment of the present invention is applied to the injection operation of the first assembly 100, the first injection scanning controller 300 and the second assembly 200 and the second injection scanning controller 400. According to an embodiment of the present invention, an embodiment of the structure further including the substrate manipulation assembly 500 may be applied to vary the thickness and the area of the first material 710 and the second material 720 stacked on the substrate 800.

That is, the substrate manipulation assembly 500 is mounted in the working chamber 900, supports the substrate 800, and rotates the substrate 800 forward and backward or moves up and down the working chamber 900. As shown, it can be made of a combination of the drive motor capable of forward and reverse rotation to the structure of the cylinder rod, as well as may be applied to other various applications and modifications of course.

Meanwhile, angles θ1 and θ1 ′ at which the first injection scanning controller 300 injects the molten first material 710 from the first assembly 100, and the second injection scanning controller 400 are the second assembly The range of angles θ2 and θ2 'for injecting the molten second material 720 from the 200 is an imaginary line (L) extending from the outlet from which the first material 710 and the second material 720 are injected. It is preferable that they are 4 degrees-8 degrees with respect to both sides of ().

That is, the virtual line l is in the range of 4 ° to 8 ° with respect to both sides of the virtual line L from the above-described point of time, with the outlets of the first rotating nozzle 320 and the second rotating nozzle 420 as the starting point. Since it can be varied in the injection, it is possible to spray and stack the first material 710 and the second material 720 uniformly and finely over a wider area.

When the angles θ1 and θ1 'for spraying the molten first material 710 and the angles θ2 and θ2' for spraying the molten second material 720 are preferably made within about 6 °, In addition to semiconductor wafers with a diameter of around 450mm, it can be applied to 11th generation display panels that will be mass-produced in 2013.

The composite material manufactured by using the double spray casting apparatus according to the above embodiment will be compared and analyzed in various aspects with the composite material produced by the conventional spray casting apparatus with reference to FIGS. 6 to 9.

6 is an optical microscope comparison picture of a composite material manufactured by a dual spray casting apparatus according to an embodiment of the present invention and a composite material manufactured by a conventional spray casting apparatus.

In the microstructure of the Al-25% Si alloy using the conventional spray casting apparatus, it can be seen that Si particles of about 10 μm are distributed as shown in FIG.

In contrast, the microstructure of the composite material manufactured by the dual spray casting apparatus according to the exemplary embodiment of the present invention can be confirmed that the SiCp particles are uniformly distributed in addition to the finer primary Si particles as shown in FIG.

On the other hand, Figure 7 is a graph comparing the relative length change rate of the composite material produced by the double injection molding apparatus according to an embodiment of the present invention and the composite material produced by the conventional injection casting device.

For reference, in FIG. 7, CTE represents a coefficient of thermal expansion.

And, Figure 8 is a graph comparing the change in the coefficient of thermal expansion according to the temperature of the composite material produced by the dual injection casting device according to an embodiment of the present invention and the composite material produced by the conventional injection casting device, 9 is a graph comparing the hardness measurement results of the composite material produced by the dual injection casting device according to an embodiment of the present invention and the composite material produced by the conventional injection casting device.

In general, the coefficient of thermal expansion of a material is measured as a thermal expansion coefficient (Coefficient of Thermal Expansion, CTE) by measuring the deviation of the length of the material according to temperature using a dilatometer, calculate the slope, as shown in FIG. Compared to the composite material produced by the injection casting device, the composite material produced by the present invention can be seen that the length change rate according to temperature is reduced by 40% or more.

Specifically, the coefficient of thermal expansion of the composite material produced by the present invention within the temperature range of 500 ℃ from room temperature is 11.9 × 10 ^-6 / ℃ it can be seen that having a coefficient of thermal expansion 38% lower than that of the conventional spray casting. .

While the thermal expansion coefficient of the composite material manufactured by the conventional spray casting apparatus increases as the temperature is increased as shown in FIG. 8, the composite material manufactured according to the present invention decreases the thermal expansion coefficient at 400 ° C. or higher and the existing temperature at 400 ° C. or lower. It was confirmed that it has a coefficient of thermal expansion 40% lower than that of the composite material produced by the spray casting device of.

In addition, the composite material produced by the present invention was confirmed to have a hardness value of 30% or more as compared to the composite material manufactured by the conventional injection casting device as shown in FIG.

In addition, the composite material prepared according to the present invention can be confirmed that when the third assembly 250 is missing as shown in Figure 10, the particle size is largely aggregated to 100㎛ sprayed.

In contrast, when the composite material manufactured according to the present invention is equipped with only the vibration generator 255 of FIG. 2 (c) of the third assembly 250, the particle size is 80 μm as shown in FIG. It can be seen that the injection in a somewhat reduced state compared to.

In contrast, the composite material manufactured according to the present invention is a third assembly 250 of the third assembly 250, that is, the third assembly 250 of the structure shown in FIG. When the ultrasonic generator 254 and the vibration generator 255 are all applied, as shown in FIG. 12, the particle size is 30 μm, which is very fine and uniformly sprayed compared to the case of FIGS. 10 and 11.

Accordingly, the present invention significantly reduces the length change rate and the coefficient of thermal expansion and the hardness of the composite materials produced by the conventional spray casting apparatus up to high temperature and low temperature, thereby improving the heat resistance and durability. It can be seen that.

As described above, it can be seen that the present invention has as its basic technical idea to provide a dual spray casting apparatus capable of producing a highly reliable product that satisfies the conditions required for manufacturing a low thermal expansion metal composite material.

In addition, many modifications and applications are possible to those skilled in the art within the scope of the basic technical idea of the present invention.

Claims (18)

An upper space of a work chamber in which an internal space in which a substrate is disposed is disposed, and injects the molten first material into the work chamber together with a high-pressure cooling gas into the working chamber while spraying the molten first material in the form of a fine powder; 1 assembly; A second assembly disposed above the working chamber and spraying the molten second material in the form of fine powder onto the substrate while supplying the molten second material together with the high pressure cooling gas into the working chamber; And And a third assembly embedded in the second assembly and preventing the second material from agglomerating before being sprayed onto the substrate and when spraying onto the substrate. And the first material and the second material sprayed on the substrate are uniformly distributed. The molten first material is disposed above the working chamber in which the internal space in which the substrate is disposed is melted, and the first material supplied from the outside is melted and the molten first material is supplied into the working chamber together with the high pressure cooling gas. A first assembly for spraying onto the substrate in the form of fine powder; The molten second material is disposed above the working chamber, and receives and melts a second material having different physical properties from the first material from the outside, and supplies the molten second material with the high pressure cooling gas into the working chamber. A second assembly spraying a material onto the substrate in the form of fine powder; And And a third assembly embedded in the second assembly and preventing the second material from agglomerating before being sprayed onto the substrate and when spraying onto the substrate. And the first material and the second material sprayed on the substrate are uniformly distributed. The molten first material is disposed above the working chamber in which the internal space in which the substrate is disposed is melted, and the first material supplied from the outside is melted and the molten first material is supplied into the working chamber together with the high pressure cooling gas. A first assembly for spraying onto the substrate in the form of fine powder; A first injection scanning controller provided in the first assembly and configured to adjust an injection angle of the molten first material injected into the working chamber; The molten second material is disposed above the working chamber, and receives and melts a second material having different physical properties from the first material from the outside, and supplies the molten second material with the high pressure cooling gas into the working chamber. A second assembly spraying a material onto the substrate in the form of fine powder; A second injection scanning controller provided in the second assembly and configured to adjust an injection angle of the molten second material injected into the working chamber; And And a third assembly embedded in the second assembly and preventing the second material from agglomerating before being sprayed onto the substrate and when spraying onto the substrate. And the first material and the second material sprayed on the substrate are uniformly distributed. The method according to any one of claims 1 to 3, The third assembly, Drive motor, A rotating shaft connected to the driving motor and embedded in a second tundish connected to a second melting furnace for heating and melting the second material supplied from the outside; And a wing screw formed in a spiral shape along the outer circumferential surface of the rotating shaft to continuously stir the second material while interlocking with the rotating shaft. The method according to any one of claims 1 to 3, The third assembly, Equipped with a second tundish in communication with a second melting furnace for heating and melting the second material supplied from the outside, and applying a high frequency ultrasonic wave to the second material in a state where the solid powder is dispersed in the solvent, And an ultrasonic generator for forming bubbles and popping the formed bubbles on the solid powder surface. The method according to any one of claims 1 to 3, The third assembly, A second tundish which is in communication with a second melting furnace which heats and melts the second material supplied from the outside, and imparts a low frequency vibration to the second material near the inner surface of the second tundish to give the second material Dual injection casting device comprising a vibration generator to continuously stir. The method according to any one of claims 1 to 3, The third assembly, Drive motor, A rotating shaft connected to the driving motor and embedded in a second tundish connected to a second melting furnace for heating and melting the second material supplied from the outside; A wing screw formed in a spiral shape along the outer circumferential surface of the rotating shaft to continuously stir the second material while interlocking with the rotating shaft; Equipped with a second tundish in communication with a second melting furnace for heating and melting the second material supplied from the outside, and applying a high frequency ultrasonic wave to the second material in a state where the solid powder is dispersed in the solvent, An ultrasonic generator for forming bubbles and popping the formed bubbles on the solid powder surface; A second tundish which is in communication with a second melting furnace which heats and melts the second material supplied from the outside, and imparts a low frequency vibration to the second material near the inner surface of the second tundish to give the second material Dual injection casting device comprising a vibration generator to continuously stir. The method according to any one of claims 1 to 3, Wherein said first material is a metal or metal alloy or a metal and ceramic mixture, and said second material is a ceramic. The method according to any one of claims 1 to 3, And the first material and the second material are metal or metal alloys having different melting points. The method according to any one of claims 1 to 3, The first material is a metal or metal alloy or a mixture of a metal and a polymer material, the second material is a dual injection casting device, characterized in that the polymer material. The method according to any one of claims 1 to 3, The dual injection casting device, And a substrate operating assembly mounted in the working chamber to support the substrate and to rotate the substrate forward and backward or to move up and down in the working chamber. The method according to any one of claims 1 to 3, And the first assembly and the second assembly are inclined in opposite directions with respect to the working chamber, respectively. The method according to any one of claims 1 to 3, The first assembly, A first melting furnace for heating and melting the first material supplied from the outside; A space for temporarily accommodating the molten first material supplied from the first melting furnace and in communication with the first melting furnace; The first tundish to continue heating, A first molten metal nozzle provided on a bottom surface of the first tundish for discharging the molten first material; And a first gas injection nozzle provided at an outer side of the first molten metal nozzle to inject the high-pressure cooling gas. The method according to any one of claims 1 to 3, The second assembly, A second melting furnace for heating and melting the second material supplied from the outside; A space for temporarily accommodating the molten second material supplied from the second melting furnace and in communication with the second melting furnace, wherein the molten second material is supplied with a flame supplied from a plurality of oxygen torches provided on the outside; A second tundish to continue heating, A second molten metal nozzle provided on a bottom surface of the second tundish for discharging the molten second material; A second gas injection nozzle provided at an outer side of the second molten metal nozzle to inject the high pressure cooling gas, And the third assembly is mounted inside or outside the second tundish. The method according to claim 14, The second molten metal nozzle is made of graphite, the end of the second molten metal nozzle, the dual injection casting apparatus further comprises a plurality of fine injection holes in communication with the second tundish. The method according to claim 3, An angle at which the first spray scanning controller sprays the molten first material from the first assembly; The range of the angle that the second injection scanning controller injects the molten second material from the second assembly, And 4 ° to 8 ° with respect to both sides of the imaginary line extending from the outlet from which the first material and the second material are injected, respectively. The method according to claim 3, The first injection scanning controller, A first actuator mounted to the first assembly, And a first rotating nozzle capable of adjusting an angle in conjunction with forward and reverse rotation of the first actuator. The method according to claim 3, The second injection scanning controller, A second actuator mounted to the second assembly, And a second rotating nozzle capable of adjusting an angle in conjunction with forward and reverse rotation of the second actuator.

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