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WO2015055782A1 - Scanner having facilitated pointing - Google Patents

Scanner having facilitated pointing Download PDF

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Publication number
WO2015055782A1
WO2015055782A1 PCT/EP2014/072258 EP2014072258W WO2015055782A1 WO 2015055782 A1 WO2015055782 A1 WO 2015055782A1 EP 2014072258 W EP2014072258 W EP 2014072258W WO 2015055782 A1 WO2015055782 A1 WO 2015055782A1
Authority
WO
WIPO (PCT)
Prior art keywords
measuring
indicator
laser beam
measured
measuring head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2014/072258
Other languages
French (fr)
Inventor
Laurent Desforges
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hexagon Metrology SAS
Original Assignee
Hexagon Metrology SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hexagon Metrology SAS filed Critical Hexagon Metrology SAS
Publication of WO2015055782A1 publication Critical patent/WO2015055782A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/002Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/047Accessories, e.g. for positioning, for tool-setting, for measuring probes

Definitions

  • the present invention relates to the field of coordinate metrology and more particularly to three-dimensional measurement arms.
  • a three-dimensional measuring machine is a measuring instrument used in dimensional metrology whose function is to acquire the coordinates of different points of a part to be measured in order, for example, to verify the conformity of dimensions, geometry and / or forms of the room.
  • Such machines generally comprise a base on which is mounted a measuring arm at the end of which is a measuring head.
  • the measuring arm is conventionally constituted of rigid segments interconnected for example by means of pivots and / or ball joints provided with encoders accurately measuring the movements of the segments relative to each other.
  • the measuring head has means for acquiring a point on an object to be measured.
  • measuring heads There are two main types of measuring heads depending on whether the measurement is made by contact or without contact with the part.
  • the measuring head comprises a probe to come into contact with the part.
  • the acquisition of the coordinates is controlled either automatically by detecting the contacting of the probe with the surface of the part or by the operator by means of a command button that the operator actuates when the probe is in contact with the zone. searched for the piece.
  • the measuring head In non-contact measuring heads, the measuring head usually integrates a laser pointer diode which illuminates an area of the surface of the part to be measured and an optical sensor or camera which achieves an acquisition of the reflected light and deduces therefrom the distance measurement by calculating the phase difference between the incident light beam and the light beam which is reflected by the surface of the piece to be measured.
  • the control of the acquisition can be carried out continuously or punctually by the operator by means of a control button that the operator actuates when the probe is in contact with the desired zone of the workpiece or when the dotted zone is illuminated. by the light signal.
  • the relative positions of the different segments of the measuring arm are stored in the memory of a processing unit connected to the measuring arm.
  • the processing unit is arranged to determine the coordinates of the measurement points in a repository, generally attached to the base, from the dimensions of the segments, their relative positions and the information of the measurement head. An adapted treatment of these coordinates makes it possible to extract dimensions, shape and geometry of the piece to be measured.
  • the aim of the invention is to improve the performance of non - contact measuring head measuring machines.
  • the performance of the measurement is related to the number of points that can be simultaneously acquired by the camera.
  • this ability to acquire a large number of points depends in particular on the respective positions of the camera and the piece to be measured.
  • the camera and the source of the laser beam have convergent optical axes in such a way that when the distance between the workpiece and the measuring head is within a predetermined distance range, the area of the workpiece illuminated by the laser beam is in the field of the camera.
  • the camera does not see the area of the room illuminated and therefore does not allow the measurement to be made.
  • the accuracy of the measurement reduces at the same time as the distance separating the measuring device from the part to be measured increases.
  • the portion of light projected on the part and visible by the camera increases with the distance separating the piece to be measured from the measuring device.
  • the operator could consult the screen to see if the measuring head is positioned optimally with respect to the workpiece. Indeed, the computer can provide an alert message when the measurement could not be performed or the accuracy or the number of points acquired simultaneously is unsatisfactory.
  • the operators can not generally have the screen and the room simultaneously in their field of vision so that they preferentially look at the part to be measured.
  • An object of the invention is to facilitate measuring operations carried out by a measuring head laser by limiting the complexity of the latter.
  • a measuring method is provided by means of a three-dimensional measuring machine comprising a measuring head comprising a laser transmitter for emitting a laser beam incident on the part to be measured and a sensor for measuring image to detect a laser beam reflected by the part.
  • the method comprises the steps of:
  • the indicator is provided by the measuring head.
  • the operator can have the part and the measuring head simultaneously in his field of vision.
  • the indicator is therefore noticeable by the operator without the latter having to leave the room of the eyes.
  • different indicators are emitted depending on whether the measuring head must be near or away from the part to be measured.
  • the invention also relates to a machine for Three - dimensional measurement comprising a processing unit connected to a measuring head comprising a laser transmitter for transmitting to the part to be measured an incident laser beam and an image sensor for detecting a laser beam reflected by the part.
  • the processing unit and the measuring head are arranged to implement the above method.
  • FIG 1 is a schematic perspective view of a measuring arm according to the invention.
  • FIG 2 is a schematic perspective view partially broken away of a measuring head according to the invention.
  • FIG. 3 is a logic diagram describing the operation of the measuring machine according to the invention.
  • the measuring machine here a generally designated articulated arm 1, comprises a fixed base 2 which is connected to a support such as a table or the floor and which carries a vertical shaft 3 on which is rotatably mounted a bearing 4.
  • a first end of a first arm segment 5 is articulated on the bearing 4 by means of a pivot connection 6 of horizontal axis.
  • the second end of the first arm segment 5 receives a second arm segment 7 articulated at this end about a pivot 8 along a horizontal axis.
  • the other end of the second segment 7 of the measuring arm 1 receives a measuring head 9 also articulated along a pivot 10 of horizontal axis.
  • the measurement head 9 comprises a housing 15 provided with a laser diode 16, a CCD sensor 17 and a positioning indicator, in this case an RGB LED 19, all connected to an electronic card. 20.
  • the laser diode 16 is mounted on the measuring head to emit a light beam in the form of a flat incident laser beam 18 extending on either side of an optical axis and the CCD sensor 17 is mounted below the laser diode 16 to have its optical axis inclined, for example at 30 °, with respect to the optical axis of the incident laser beam.
  • the electronic card 20 comprises storage means 21 and a microcontroller 22 arranged to notably analyze the phase difference between the incident light beam emitted by the laser diode 16 and the reflected laser beam received by each of the elementary detectors (commonly called "pixels") of the CDD sensor 17 after reflection of the beam on the object to be measured.
  • the microcontroller 22 is arranged to calculate then the distances separating the emission point of the laser (namely the laser diode 16) of the object to be measured.
  • a processing unit 23 which then determines the coordinates of the measurement points in an Oxyz orthogonal reference linked to the fixed base 2. From the coordinates of several points, the processing unit 23 calculates the distances separating the measurement points and / or the geometry of the measured part.
  • the measuring head 9 makes it possible to acquire the measurement points situated in an acquisition zone 24 corresponding to the intersection of the incident flat laser beam 18, here of triangular shape, emitted by the laser diode 16 and the field of view. acquisition covered by the CCD sensor 17.
  • This acquisition zone 24 corresponds to measuring points located at a distance from the laser diode 16 for example between 91.5 millimeters and 222 millimeters and located in the incident laser beam 18.
  • This acquisition zone 24 is framed by two zones 25 and 26 extending respectively between 0 and 91.5 millimeters from the laser diode 16 and beyond 222 millimeters thereof, which correspond to zones in which the measurement is impossible.
  • the acquisition zone 24 comprises a median zone 24.1 in which the measurement is optimal because, in this zone, the width of the beam makes it possible to acquire a large number of points with good precision (here, in the order of 0.1%).
  • This optimal acquisition zone 24.1 is framed by a first secondary acquisition zone 24.2 and a second secondary acquisition zone 24.3.
  • the accuracy of the measurement is good (less than 0.1%) but the beam width is small, resulting in the simultaneous acquisition of a small number of measurement points and therefore an extension of the acquisition times for a given part with respect to an acquisition in zone 24.2.
  • the accuracy of the measurement is low (of the order of 0.3%) over a large number of measurement points which degrades the overall accuracy of the measurement of the room.
  • the optimum acquisition area 24.1 extends from a distance of 120 millimeters from the laser diode 16 to a distance of 190 millimeters from the laser diode 16.
  • the surface ABCD of a parallelepiped 30 - he orients the measuring head 9 towards the surface ABCD and puts the arm of measurement 1, which activates the measuring head 9 (step 30) and energizes the laser diode 16 which then emits an incident laser beam 18 (step 31) allowing the user to adjust the sight on the surface ABCD.
  • the CCD 17 receives the laser beam reflected by said surface and transmits an image signal to the microcontroller 21.
  • the microcontroller 21 processes the information by analyzing the image signal (step 32) to determine the position of the reflected light beam on the CCD sensor 17.
  • the CCD sensor 17 is virtually divided into three horizontal bands 17.1, 17.2, 17.3 respectively corresponding at the points of reflection of the points situated in the acquisition zones 24.1, 24.2, 24.3 of the acquisition zone 24.
  • the microcontroller 21 then commands the LED 19 to display a color which is a function of the sensor band CCD 17 on which is reflected the greatest number of points by the reflected light beam (step 33).
  • the part is in the optimal distance range 24.1 and the microcontroller 21 controls the ignition of the diode 19 in the green color (step 35). The operator is then informed that he achieves optimal acquisition of the points of the part to be measured when scanning the ABCD surface with the incident laser beam.
  • the part is in the range of distance 24.2 and the microcontroller 21 controls the ignition of the diode 19 in the blue color (step 34).
  • the operator is then informed that he is not in the zone optimal measurement of the measuring head 9 and it must then move the measuring head 9 of the room to continue the acquisition of the piece to be measured under optimal conditions.
  • the part is in the range of distance 24.3 and the microcontroller 21 controls the ignition of the diode 19 in the yellow color (step 36).
  • the operator is then informed that he is not in the optimal measurement zone of the measuring head 9 and that he must then bring the measurement head 9 closer to the part to continue the acquisition of the part to measure under ideal conditions.
  • the measurement head When none of the areas of the CCD sensor 17 are illuminated, the measurement head is located in one of the zones 25 or 26 in which the acquisition is impossible and the microcontroller 21 then commands the LED 19 to display the the red color (step 37).
  • This produces a laser measurement head 9 comprising a positioning indicator - the colored display of the LED 19 - which allows the operator to know if the measuring head 9 is at the right distance to the workpiece.
  • This indicator also allows the user to adjust the position of the measuring head 9 so as to obtain an optimal measurement. Alternatively, the user can take a measurement when the measuring head is in the zones 24.2 and 24.3.
  • the luminous intensity of the RGB LED 19 is adjustable in order to adapt to the ambient lighting conditions by means of a mechanical control on the measuring head 9, for example a potentiometer, or means of a software command located in the processing unit 23, or again via a brightness sensor.
  • the color of the indicator light provided by the RGB LED 19 includes a portion of blue, green and yellow whose respective intensities are proportional to the number of points in the areas 17.1, 17.2 and 17.3 of the CCD sensor 17.
  • the efficiency indicator of the measuring head is, here, the colored display of an LED
  • the invention applies to other types of efficiency indicator such as an indicator comprising a sound signal or a vibration, or the frequency of a flashing light;
  • the measuring head is articulated on the end of the measuring arm, it can also be rotatably mounted on the end of the measuring arm;
  • the receiver for the reflected light is a CCD sensor, the invention is also applicable to other types of reflected light receiver such as for example a CMOS sensor;
  • the invention also applies to measuring heads having a different acquisition area
  • the surface of the CCD sensor is subdivided into a grid of three zones, the invention also applies to different number and disposition zones such as for example two zones, four or more four;
  • the invention also applies to a measuring arm linked to a mobile base
  • the invention also applies to an analysis of the signal of the image received and a generation of the indicator produced by the processing unit 23.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention relates to a method for measuring by means of a three-dimensional measurement machine (1) comprising a measurement head (9) including a laser emitter (16) for emitting an incident laser beam toward the part to be measured, and an image sensor (17) for detecting a laser beam reflected by the part. The method includes a phase of positioning the measurement head relative to the part to be measured, comprising the following steps: supplying at least one indicator representing the position of the incident laser beam on the image sensor; moving the measurement head closer to or farther from the part to be measured depending on the indicator. The invention further relates to a three-dimensional measurement machine (1) for implementing said method.

Description

Scanner à pointage facilité  Easy Point Scanner

La présente invention concerne le domaine de la métrologie par coordonnées et plus particulièrement les bras de mesure tridimensionnelle. The present invention relates to the field of coordinate metrology and more particularly to three-dimensional measurement arms.

ARRIERE PLAN DE L'INVENTION  BACKGROUND OF THE INVENTION

Une machine à mesurer tridimensionnelle est un instrument de mesure utilisé en métrologie dimensionnelle dont la fonction est d'acquérir les coordonnées de différents points d'une pièce à mesurer afin par exemple de vérifier la conformité des cotes, de la géométrie et ou des formes de la pièce.  A three-dimensional measuring machine is a measuring instrument used in dimensional metrology whose function is to acquire the coordinates of different points of a part to be measured in order, for example, to verify the conformity of dimensions, geometry and / or forms of the room.

De telles machines comprennent généralement une base sur laquelle est monté un bras de mesure à l'extrémité duquel se trouve une tête de mesure. Le bras de mesure est classiquement constitué de segments rigides reliés entre eux par exemple au moyen de pivots et/ou de rotules pourvus de codeurs mesurant avec précision les déplacements des segments les uns par rapport aux autres. Such machines generally comprise a base on which is mounted a measuring arm at the end of which is a measuring head. The measuring arm is conventionally constituted of rigid segments interconnected for example by means of pivots and / or ball joints provided with encoders accurately measuring the movements of the segments relative to each other.

La tête de mesure possède des moyens d'acquisition d'un point sur un objet à mesurer. The measuring head has means for acquiring a point on an object to be measured.

Il existe deux types principaux de têtes de mesure selon que la mesure est effectuée par contact ou sans contact avec la pièce.  There are two main types of measuring heads depending on whether the measurement is made by contact or without contact with the part.

Dans les têtes de mesure par contact, la tête de mesure comprend un palpeur pour venir en contact avec la pièce. L'acquisition des coordonnées est commandée soit automatiquement par détection de la mise en contact du palpeur avec la surface de la pièce soit par l'opérateur au moyen d'un bouton de commande que l'opérateur actionne lorsque le palpeur est contact de la zone recherchée de la pièce.  In the measuring heads by contact, the measuring head comprises a probe to come into contact with the part. The acquisition of the coordinates is controlled either automatically by detecting the contacting of the probe with the surface of the part or by the operator by means of a command button that the operator actuates when the probe is in contact with the zone. searched for the piece.

Dans les têtes de mesure sans contact, la tête de mesure intègre généralement une diode laser de pointage qui illumine une zone de la surface de la pièce à mesurer et un capteur optique ou caméra qui réalise une acquisition de la lumière réfléchie et en déduit la mesure de distance par calcul du déphasage entre le rayon lumineux incident et le rayon lumineux qui est réfléchi par la surface de la pièce à mesurer. Certaines têtes de mesure, dites têtes scanner, projettent un faisceau plat formant une ligne sur la pièce à mesurer pour permettre une acquisition rapide de la forme de la pièce à mesurer. In non-contact measuring heads, the measuring head usually integrates a laser pointer diode which illuminates an area of the surface of the part to be measured and an optical sensor or camera which achieves an acquisition of the reflected light and deduces therefrom the distance measurement by calculating the phase difference between the incident light beam and the light beam which is reflected by the surface of the piece to be measured. Some measuring heads, called scanner heads, project a flat beam forming a line on the part to be measured to allow rapid acquisition of the shape of the part to be measured.

La commande de l'acquisition peut être effectuée en continue ou ponctuellement par l'opérateur au moyen d'un bouton de commande que l'opérateur actionne lorsque le palpeur est contact de la zone recherchée de la pièce ou que la zone à pointée est illuminée par le signal lumineux. Lors de la commande de l'acquisition, les positions relatives des différents segments du bras de mesure sont enregistrées dans la mémoire d'une unité de traitement reliée au bras de mesure. L'unité de traitement est agencée pour déterminer les coordonnées des points de mesure dans un référentiel, généralement attaché à la base, à partir des dimensions des segments, de leurs positions relative et des informations de la tête de mesure. Un traitement adapté de ces coordonnées permet d'en extraire des cotes, forme et géométrie de la pièce à mesurer.  The control of the acquisition can be carried out continuously or punctually by the operator by means of a control button that the operator actuates when the probe is in contact with the desired zone of the workpiece or when the dotted zone is illuminated. by the light signal. When controlling the acquisition, the relative positions of the different segments of the measuring arm are stored in the memory of a processing unit connected to the measuring arm. The processing unit is arranged to determine the coordinates of the measurement points in a repository, generally attached to the base, from the dimensions of the segments, their relative positions and the information of the measurement head. An adapted treatment of these coordinates makes it possible to extract dimensions, shape and geometry of the piece to be measured.

L' invention vise à améliorer les performances des machines à mesurer à tête de mesure sans contact.  The aim of the invention is to improve the performance of non - contact measuring head measuring machines.

Dans de telles machines à mesurer, la performance de la mesure est liée au nombre de points susceptibles d'être simultanément acquis par la caméra. In such measuring machines, the performance of the measurement is related to the number of points that can be simultaneously acquired by the camera.

Pour des raisons notamment optiques, cette capacité à acquérir un grand nombre de points dépend notamment des positions respectives de la caméra et de la pièce à mesurer. En effet, la caméra et la source du faisceau laser ont des axes optiques convergents de telle manière que, lorsque la distance entre la pièce et la tête de mesure est dans une plage de distance prédéterminée, la zone de la pièce illuminée par le faisceau laser est dans le champ de la caméra. Il en résulte que trop proche ou trop loin de la pièce, la caméra ne voit pas la zone de la pièce illuminée et ne permet donc pas d'effectuer la mesure. Au sein même de la plage de distances dans laquelle la caméra est capable d'acquérir la mesure, il existe une zone optimale de mesure correspondant à l'acquisition simultanée d'un nombre maximal de points par le dispositif de mesure. En effet, la précision de la mesure réduit en même temps que la distance séparant le dispositif de mesure de la pièce à mesurer augmente. Par contre, la portion de lumière projetée sur la pièce et visible par la caméra (et donc le nombre de points de mesure pouvant être acquis simultanément) augmente avec la distance séparant la pièce à mesurer du dispositif de mesure. Ainsi, il est difficile pour l'utilisateur de positionner la tête de mesure de manière à obtenir une mesure suffisamment précise d'un nuage de points suffisamment dense. For reasons including optical, this ability to acquire a large number of points depends in particular on the respective positions of the camera and the piece to be measured. Indeed, the camera and the source of the laser beam have convergent optical axes in such a way that when the distance between the workpiece and the measuring head is within a predetermined distance range, the area of the workpiece illuminated by the laser beam is in the field of the camera. As a result, too close to or too far from the room, the camera does not see the area of the room illuminated and therefore does not allow the measurement to be made. Even within the range of distances in which the camera is able to acquire the measurement, there is an optimum measurement area corresponding to the simultaneous acquisition of a maximum number of points by the measuring device. In fact, the accuracy of the measurement reduces at the same time as the distance separating the measuring device from the part to be measured increases. On the other hand, the portion of light projected on the part and visible by the camera (and therefore the number of measuring points that can be acquired simultaneously) increases with the distance separating the piece to be measured from the measuring device. Thus, it is difficult for the user to position the measuring head so as to obtain a sufficiently accurate measurement of a sufficiently dense cloud of points.

Lorsqu'un ordinateur pourvu d'un écran est relié à la machine à mesurer, l'opérateur pourrait consulter l'écran pour voir si la tête de mesure est positionnée de manière optimale par rapport à la pièce. En effet, l'ordinateur peut fournir un message d'alerte lorsque la mesure n'a pu être réalisée ou que la précision ou le nombre de points acquis simultanément est insatisfaisant. Toutefois, les opérateurs ne peuvent généralement pas avoir l'écran et la pièce simultanément dans leur champ de vision de sorte qu' ils regardent préférentiellement la pièce à mesurer.  When a computer equipped with a screen is connected to the machine to be measured, the operator could consult the screen to see if the measuring head is positioned optimally with respect to the workpiece. Indeed, the computer can provide an alert message when the measurement could not be performed or the accuracy or the number of points acquired simultaneously is unsatisfactory. However, the operators can not generally have the screen and the room simultaneously in their field of vision so that they preferentially look at the part to be measured.

OBJET DE L'INVENTION  OBJECT OF THE INVENTION

Un but de l'invention est de faciliter les opérations de mesure réalisée par une tête de mesure laser en limitant la complexification de cette dernière. RESUME DE L'INVENTION An object of the invention is to facilitate measuring operations carried out by a measuring head laser by limiting the complexity of the latter. SUMMARY OF THE INVENTION

A cet effet, on prévoit, selon l'invention, un procédé de mesure au moyen d'une machine à mesurer tridimensionnelle comportant une tête de mesure comprenant un émetteur laser pour émettre un faisceau laser incident vers la pièce à mesurer et un capteur d' image pour détecter un faisceau laser réfléchi par la pièce. Le procédé comporte les étapes de :  For this purpose, according to the invention, a measuring method is provided by means of a three-dimensional measuring machine comprising a measuring head comprising a laser transmitter for emitting a laser beam incident on the part to be measured and a sensor for measuring image to detect a laser beam reflected by the part. The method comprises the steps of:

- analyser une image fournie par le capteur d' image pour détecter une position du faisceau laser réfléchi sur le capteur d' image ;  - analyzing an image provided by the image sensor to detect a position of the reflected laser beam on the image sensor;

- fournir au moins un indicateur représentatif de la position du faisceau laser réfléchi sur le capteur d' image ;  - providing at least one indicator representative of the position of the reflected laser beam on the image sensor;

- rapprocher ou éloigner la tête de mesure de la pièce à mesurer en fonction de l'indicateur.  - Move the measuring head closer to or away from the workpiece according to the indicator.

Ainsi, tout en prenant la mesure de la pièce, il est possible de savoir simplement si la tête de mesure est correctement positionnée et s'il est nécessaire de la déplacer pour la positionner de manière optimale.  Thus, while taking the measurement of the part, it is possible to know simply if the measuring head is correctly positioned and if it is necessary to move it to position it optimally.

Avantageusement, l'indicateur est fourni par la tête de mesure.  Advantageously, the indicator is provided by the measuring head.

Lorsque la tête de mesure est manipulée par un opérateur, l'opérateur peut avoir la pièce et la tête de mesure simultanément dans son champ de vision. L'indicateur est donc perceptible par l'opérateur sans que celui-ci n'ait à quitter la pièce des yeux.  When the measuring head is manipulated by an operator, the operator can have the part and the measuring head simultaneously in his field of vision. The indicator is therefore noticeable by the operator without the latter having to leave the room of the eyes.

De préférence, des indicateurs différents sont émis selon que la tête de mesure doit être rapprochée ou éloignée de la pièce à mesurer.  Preferably, different indicators are emitted depending on whether the measuring head must be near or away from the part to be measured.

Ceci facilite encore le positionnement correct de la tête de mesure par l'opérateur qui est guidé par les différents indicateurs qu'il perçoit.  This further facilitates the correct positioning of the measuring head by the operator who is guided by the various indicators that he perceives.

L' invention concerne également une machine à mesurer tridimensionnelle comportant une unité de traitement reliée à une tête de mesure comprenant un émetteur laser pour émettre vers la pièce à mesurer un faisceau laser incident et un capteur d' image pour détecter un faisceau laser réfléchi par la pièce. L'unité de traitement et la tête de mesure sont agencées pour mettre en œuvre le procédé ci-dessus. The invention also relates to a machine for Three - dimensional measurement comprising a processing unit connected to a measuring head comprising a laser transmitter for transmitting to the part to be measured an incident laser beam and an image sensor for detecting a laser beam reflected by the part. The processing unit and the measuring head are arranged to implement the above method.

BREVE DESCRIPTION DES DESSINS  BRIEF DESCRIPTION OF THE DRAWINGS

Il sera fait référence aux figures annexées parmi lesquelles :  Reference will be made to the appended figures among which:

-la figure 1 est une représentation schématique en perspective d'un bras de mesure selon l'invention ;  FIG 1 is a schematic perspective view of a measuring arm according to the invention;

-la figure 2 est une représentation schématique en perspective partiellement écorchée d'une tête de mesure selon l'invention ;  FIG 2 is a schematic perspective view partially broken away of a measuring head according to the invention;

-la figure 3 est un logigramme décrivant le fonctionnement de la machine de mesure selon l'invention.  FIG. 3 is a logic diagram describing the operation of the measuring machine according to the invention.

DESCRIPTION DETAILLEE DE L'INVENTION  DETAILED DESCRIPTION OF THE INVENTION

En référence à la figure 1, la machine à mesurer selon l'invention, ici un bras articulé généralement désigné 1, comprend une base fixe 2 qui est liée à un support comme une table ou le sol et qui porte un arbre vertical 3 sur lequel est monté à rotation un palier 4. Une première extrémité d'un premier segment de bras 5 est articulée sur le palier 4 à l'aide d'une liaison pivot 6 d'axe horizontal. La seconde extrémité du premier segment de bras 5 reçoit un deuxième segment de bras 7 articulé en cette extrémité autour d'un pivot 8 selon un axe horizontal. L'autre extrémité du deuxième segment 7 du bras de mesure 1 reçoit une tête de mesure 9 elle aussi articulée selon un pivot 10 d'axe horizontal. Le palier 4 ainsi que les pivots 6, 8 et 10 sont respectivement pourvus d'un codeur rotatif absolu 11, 12, 13 et 14 mesurant les angles de rotation respectifs de chacune des articulations du bras de mesure 1. En référence à la figure 2, la tête de mesure 9 comprend un boîtier 15 pourvu d'une diode laser 16, d'un capteur CCD 17 et d'un indicateur de positionnement, ici une LED RGB 19, tous reliés à une carte électronique 20. La diode laser 16 est montée sur la tête de mesure pour émettre un rayon lumineux sous la forme d'un faisceau laser incident plat 18 s' étendant de part et d'autre d'un axe optique et le capteur CCD 17 est monté au-dessous de la diode laser 16 pour avoir son axe optique incliné, par exemple à 30°, par rapport à l'axe optique du faisceau laser incident. La carte électronique 20 comprend des moyens de mémorisation 21 et un microcontrôleur 22 agencé pour notamment analyser le déphasage entre le rayon lumineux incident émis par la diode laser 16 et le faisceau laser réfléchi reçu par chacun des détecteurs élémentaires (couramment appelés « pixels ») du capteur CDD 17 après réflexion du faisceau sur l'objet à mesurer. Le microcontrôleur 22 est agencé pour calculer alors les distances séparant le point d'émission du laser (à savoir la diode laser 16) de l'objet à mesurer. Referring to Figure 1, the measuring machine according to the invention, here a generally designated articulated arm 1, comprises a fixed base 2 which is connected to a support such as a table or the floor and which carries a vertical shaft 3 on which is rotatably mounted a bearing 4. A first end of a first arm segment 5 is articulated on the bearing 4 by means of a pivot connection 6 of horizontal axis. The second end of the first arm segment 5 receives a second arm segment 7 articulated at this end about a pivot 8 along a horizontal axis. The other end of the second segment 7 of the measuring arm 1 receives a measuring head 9 also articulated along a pivot 10 of horizontal axis. The bearing 4 and the pivots 6, 8 and 10 are respectively provided with an absolute rotary encoder 11, 12, 13 and 14 measuring the respective angles of rotation of each of the joints of the measuring arm 1. With reference to FIG. 2, the measurement head 9 comprises a housing 15 provided with a laser diode 16, a CCD sensor 17 and a positioning indicator, in this case an RGB LED 19, all connected to an electronic card. 20. The laser diode 16 is mounted on the measuring head to emit a light beam in the form of a flat incident laser beam 18 extending on either side of an optical axis and the CCD sensor 17 is mounted below the laser diode 16 to have its optical axis inclined, for example at 30 °, with respect to the optical axis of the incident laser beam. The electronic card 20 comprises storage means 21 and a microcontroller 22 arranged to notably analyze the phase difference between the incident light beam emitted by the laser diode 16 and the reflected laser beam received by each of the elementary detectors (commonly called "pixels") of the CDD sensor 17 after reflection of the beam on the object to be measured. The microcontroller 22 is arranged to calculate then the distances separating the emission point of the laser (namely the laser diode 16) of the object to be measured.

Ces distances ainsi que les valeurs mesurées par les codeurs 11 à 14 sont transmises à une unité de traitement 23 qui détermine alors les coordonnées des points de mesure dans un repère orthogonal Oxyz lié à la base fixe 2. A partir des coordonnées de plusieurs points, l'unité de traitement 23 calcule les distances séparant les points de mesure et/ou la géométrie de la pièce mesurée.  These distances as well as the values measured by the encoders 11 to 14 are transmitted to a processing unit 23 which then determines the coordinates of the measurement points in an Oxyz orthogonal reference linked to the fixed base 2. From the coordinates of several points, the processing unit 23 calculates the distances separating the measurement points and / or the geometry of the measured part.

La tête de mesure 9 permet de réaliser l'acquisition des points de mesure situés dans une zone d'acquisition 24 correspondant à l'intersection du faisceau laser plat incident 18, ici de forme triangulaire, émis par la diode laser 16 et du champ d'acquisition couvert par le capteur CCD 17. Cette zone d'acquisition 24 correspond à des points de mesure situés à une distance de la diode laser 16 comprise par exemple entre 91.5 millimètres et 222 millimètres et situés dans le faisceau laser incident 18 . Cette zone d'acquisition 24 est encadrée de deux zones 25 et 26, s' étendant respectivement entre 0 et 91.5 millimètres de la diode laser 16 et au-delà de 222 millimètre de celle-ci, qui correspondent à des zones dans lesquelles la mesure est impossible. La zone d'acquisition 24 comprend une zone médiane 24.1 dans laquelle la mesure est optimale car, dans cette zone, la largeur du faisceau permet l'acquisition d'un grand nombre de point avec une bonne précision (ici, de l'ordre de 0,1%). Cette zone d'acquisition optimale 24.1 est encadrée par une première zone d'acquisition secondaire 24.2 et une seconde zone d'acquisition secondaire 24.3. Dans la zone 24.2 la plus proche de la diode laser 16, la précision de la mesure est bonne (inférieure à 0,1 %) mais la largeur du faisceau est faible, entraînant l'acquisition simultanée d'un nombre réduit de points de mesure et donc un allongement des temps d'acquisition pour une pièce donnée par rapport à une acquisition dans la zone 24.2. Dans la zone 24.3 la plus éloignée de la diode laser 16, la précision de la mesure est faible (de l'ordre de 0,3 %) sur un nombre de points de mesure élevé ce qui dégrade la précision globale de la mesure de la pièce. The measuring head 9 makes it possible to acquire the measurement points situated in an acquisition zone 24 corresponding to the intersection of the incident flat laser beam 18, here of triangular shape, emitted by the laser diode 16 and the field of view. acquisition covered by the CCD sensor 17. This acquisition zone 24 corresponds to measuring points located at a distance from the laser diode 16 for example between 91.5 millimeters and 222 millimeters and located in the incident laser beam 18. This acquisition zone 24 is framed by two zones 25 and 26 extending respectively between 0 and 91.5 millimeters from the laser diode 16 and beyond 222 millimeters thereof, which correspond to zones in which the measurement is impossible. The acquisition zone 24 comprises a median zone 24.1 in which the measurement is optimal because, in this zone, the width of the beam makes it possible to acquire a large number of points with good precision (here, in the order of 0.1%). This optimal acquisition zone 24.1 is framed by a first secondary acquisition zone 24.2 and a second secondary acquisition zone 24.3. In the 24.2 zone closest to the laser diode 16, the accuracy of the measurement is good (less than 0.1%) but the beam width is small, resulting in the simultaneous acquisition of a small number of measurement points and therefore an extension of the acquisition times for a given part with respect to an acquisition in zone 24.2. In the zone 24.3 furthest away from the laser diode 16, the accuracy of the measurement is low (of the order of 0.3%) over a large number of measurement points which degrades the overall accuracy of the measurement of the room.

Dans le mode de réalisation décrit, la zone d'acquisition optimale 24.1 s'étend depuis une distance de 120 millimètres de la diode laser 16 jusqu'à une distance de 190 millimètres de la diode laser 16.  In the embodiment described, the optimum acquisition area 24.1 extends from a distance of 120 millimeters from the laser diode 16 to a distance of 190 millimeters from the laser diode 16.

En référence aux figures 2 et 3 le fonctionnement de la tête de mesure 9 est détaillé.  Referring to Figures 2 and 3 the operation of the measuring head 9 is detailed.

Lorsque l'utilisateur désire acquérir la forme d'une surface d'une pièce à mesurer - ici la surface ABCD d'un parallélépipède 30 - il oriente la tête de mesure 9 vers la surface ABCD et met sous tension le bras de mesure 1, ce qui active la tête de mesure 9 (étape 30) et met sous tension la diode laser 16 qui émet alors un faisceau laser incident 18 (étape 31) permettant à l'utilisateur d'ajuster la visée sur la surface ABCD. Dans le même temps, le capteur CCD 17 reçoit le faisceau laser réfléchi par ladite surface et transmet un signal d'image au microcontrôleur 21. When the user wishes to acquire the shape of a surface of a part to be measured - here the surface ABCD of a parallelepiped 30 - he orients the measuring head 9 towards the surface ABCD and puts the arm of measurement 1, which activates the measuring head 9 (step 30) and energizes the laser diode 16 which then emits an incident laser beam 18 (step 31) allowing the user to adjust the sight on the surface ABCD. At the same time, the CCD 17 receives the laser beam reflected by said surface and transmits an image signal to the microcontroller 21.

Le microcontrôleur 21 traite l'information en analysant le signal d'image (étape 32) pour déterminer la position du faisceau lumineux réfléchi sur le capteur CCD 17. Le capteur CCD 17 est virtuellement divisé en trois bandes horizontales 17.1, 17.2, 17.3 correspondant respectivement aux endroits de réflexion des points situés dans les zones d'acquisition 24.1, 24.2, 24.3 de la zone d'acquisition 24. Le microcontrôleur 21 commande alors à la LED 19 l'affichage d'une couleur qui est fonction de la bande du capteur CCD 17 sur laquelle est réfléchi le plus grand nombre de points par le faisceau lumineux réfléchi (étape 33) .  The microcontroller 21 processes the information by analyzing the image signal (step 32) to determine the position of the reflected light beam on the CCD sensor 17. The CCD sensor 17 is virtually divided into three horizontal bands 17.1, 17.2, 17.3 respectively corresponding at the points of reflection of the points situated in the acquisition zones 24.1, 24.2, 24.3 of the acquisition zone 24. The microcontroller 21 then commands the LED 19 to display a color which is a function of the sensor band CCD 17 on which is reflected the greatest number of points by the reflected light beam (step 33).

Lorsque l'analyse du signal d'image révèle que les détecteurs élémentaires de la zone centrale 17.2 du capteur CCD 17 sont majoritairement illuminés, la pièce se trouve dans la plage de distance optimale 24.1 et le microcontrôleur 21 commande l'allumage de la diode 19 dans la couleur verte (étape 35). L'opérateur est alors informé qu'il réalise une acquisition optimale des points de la pièce à mesurer lors du balayage de la surface ABCD avec le faisceau laser incident.  When the analysis of the image signal reveals that the elementary detectors of the central zone 17.2 of the CCD sensor 17 are mainly illuminated, the part is in the optimal distance range 24.1 and the microcontroller 21 controls the ignition of the diode 19 in the green color (step 35). The operator is then informed that he achieves optimal acquisition of the points of the part to be measured when scanning the ABCD surface with the incident laser beam.

Lorsque l'analyse du signal d'image révèle que les détecteurs élémentaires de la bande périphérique supérieure 17.1 du capteur CCD 17 sont majoritairement illuminés, la pièce se trouve dans la plage de distance 24.2 et le microcontrôleur 21 commande l'allumage de la diode 19 dans la couleur bleue (étape 34) . L'opérateur est alors informé du fait qu'il n'est pas dans la zone optimale de mesure de la tête de mesure 9 et qu'il doit alors éloigner la tête de mesure 9 de la pièce pour poursuivre l'acquisition de la pièce à mesurer dans des conditions optimales. When the analysis of the image signal reveals that the elementary detectors of the upper peripheral band 17.1 of the CCD sensor 17 are predominantly illuminated, the part is in the range of distance 24.2 and the microcontroller 21 controls the ignition of the diode 19 in the blue color (step 34). The operator is then informed that he is not in the zone optimal measurement of the measuring head 9 and it must then move the measuring head 9 of the room to continue the acquisition of the piece to be measured under optimal conditions.

Lorsque l'analyse du signal d'image révèle que les détecteurs élémentaires de la bande périphérique inférieure 17.3 du capteur CCD 17 sont majoritairement illuminés, la pièce se trouve dans la plage de distance 24.3 et le microcontrôleur 21 commande l'allumage de la diode 19 dans la couleur jaune (étape 36) . L'opérateur est alors informé du fait qu'il n'est pas dans la zone optimale de mesure de la tête de mesure 9 et qu'il doit alors rapprocher la tête de mesure 9 de la pièce pour poursuivre l'acquisition de la pièce à mesurer dans des conditions idéales.  When the analysis of the image signal reveals that the elementary detectors of the lower peripheral band 17.3 of the CCD sensor 17 are mainly illuminated, the part is in the range of distance 24.3 and the microcontroller 21 controls the ignition of the diode 19 in the yellow color (step 36). The operator is then informed that he is not in the optimal measurement zone of the measuring head 9 and that he must then bring the measurement head 9 closer to the part to continue the acquisition of the part to measure under ideal conditions.

Lorsqu' aucune des zones du capteur CCD 17 n'est illuminée, la tête de mesure se situe dans l'une des zones 25 ou 26 dans laquelle l'acquisition est impossible et le microcontrôleur 21 commande alors à la LED 19 l'affichage de la couleur rouge (étape 37) .  When none of the areas of the CCD sensor 17 are illuminated, the measurement head is located in one of the zones 25 or 26 in which the acquisition is impossible and the microcontroller 21 then commands the LED 19 to display the the red color (step 37).

On obtient ainsi une tête de mesure laser 9 comprenant un indicateur de positionnement - l'affichage coloré de la LED 19 - qui permet à l'opérateur de savoir si la tête de mesure 9 est à la bonne distance par rapport à la pièce. Cet indicateur permet également à l'utilisateur d'ajuster la position de la tête de mesure 9 de manière à obtenir une mesure optimale. En variante, l'utilisateur peut effectuer une mesure lorsque la tête de mesure se trouve dans les zones 24.2 et 24.3.  This produces a laser measurement head 9 comprising a positioning indicator - the colored display of the LED 19 - which allows the operator to know if the measuring head 9 is at the right distance to the workpiece. This indicator also allows the user to adjust the position of the measuring head 9 so as to obtain an optimal measurement. Alternatively, the user can take a measurement when the measuring head is in the zones 24.2 and 24.3.

Selon un mode de réalisation particulier, l'intensité lumineuse de la LED RGB 19 est réglable afin de s'adapter aux conditions d'éclairage ambiant au moyen d'une commande mécanique sur la tête de mesure 9 comme par exemple un potentiomètre, ou au moyen d'une commande logicielle située dans l'unité de traitement 23, ou encore via un capteur de luminosité. According to a particular embodiment, the luminous intensity of the RGB LED 19 is adjustable in order to adapt to the ambient lighting conditions by means of a mechanical control on the measuring head 9, for example a potentiometer, or means of a software command located in the processing unit 23, or again via a brightness sensor.

Selon un autre mode de réalisation avantageux, la couleur de l'indicateur lumineux fourni par la LED RGB 19 intègre une part de bleu, vert et jaune dont les intensités respectives sont proportionnelles au nombre de points figurant dans les zones 17.1, 17.2 et 17.3 du capteur CCD 17.  According to another advantageous embodiment, the color of the indicator light provided by the RGB LED 19 includes a portion of blue, green and yellow whose respective intensities are proportional to the number of points in the areas 17.1, 17.2 and 17.3 of the CCD sensor 17.

Bien entendu, l'invention n'est pas limitée aux modes de réalisation décrits mais englobe toute variante entrant dans le champ de l'invention telle que définie par les revendications.  Of course, the invention is not limited to the embodiments described but encompasses any variant within the scope of the invention as defined by the claims.

En particulier,  In particular,

bien qu'ici l'indicateur d'efficacité de la tête de mesure soit, ici, l'affichage coloré d'une LED, l'invention s'applique à d'autres types d'indicateur d'efficacité comme par exemple un indicateur comprenant un signal sonore ou une vibration, ou la fréquence d'un clignotement lumineux ;  although here the efficiency indicator of the measuring head is, here, the colored display of an LED, the invention applies to other types of efficiency indicator such as an indicator comprising a sound signal or a vibration, or the frequency of a flashing light;

- bien qu' ici la tête de mesure soit articulée sur l'extrémité du bras de mesure, celle-ci peut être également montée à rotation sur l'extrémité du bras de mesure ;  - Although here the measuring head is articulated on the end of the measuring arm, it can also be rotatably mounted on the end of the measuring arm;

bien qu' ici le récepteur pour la lumière réfléchie soit un capteur CCD, l'invention s'applique également à d'autres types de récepteur de lumière réfléchie comme par exemple un capteur CMOS ;  although here the receiver for the reflected light is a CCD sensor, the invention is also applicable to other types of reflected light receiver such as for example a CMOS sensor;

- bien qu' ici la zone d' acquisition de la tête de mesure soit comprise entre 25 millimètres et 235 millimètres de la diode laser, l'invention s'applique également à des têtes de mesure ayant une zone d'acquisition différente ;  - Although here the acquisition area of the measuring head is between 25 millimeters and 235 millimeters of the laser diode, the invention also applies to measuring heads having a different acquisition area;

bien qu' ici la surface du capteur CCD soit subdivisée en un quadrillage de trois zones, l'invention s'applique également à des zones en nombre et disposition différents comme par exemple deux zones, quatre ou plus de quatre; although here the surface of the CCD sensor is subdivided into a grid of three zones, the invention also applies to different number and disposition zones such as for example two zones, four or more four;

- bien qu' ici le bras de mesure repose sur une base fixe, l'invention s'applique également à un bras de mesure liée à une base mobile ;  - Although here the measuring arm rests on a fixed base, the invention also applies to a measuring arm linked to a mobile base;

-bien qu'ici l'analyse du signal de l'image reçue par le capteur CCD 17 et la génération de l'indicateur soient effectuées par le microcontrôleur 21, l'invention s'applique également à une analyse du signal de l'image reçue et une génération de l'indicateur réalisées par l'unité de traitement 23.  -Although here the analysis of the signal of the image received by the CCD sensor 17 and the generation of the indicator are carried out by the microcontroller 21, the invention also applies to an analysis of the signal of the image received and a generation of the indicator produced by the processing unit 23.

Claims

REVENDICATIONS 1. Procédé de mesure au moyen d'une machine à mesurer tridimensionnelle (1) comportant une tête de mesure (9) comprenant un émetteur laser (16) pour émettre un faisceau laser incident (18) vers la pièce à mesurer et un capteur d'image (17) pour détecter un faisceau laser réfléchi par la pièce, le procédé comportant les étapes de : 1. Measuring method by means of a three-dimensional measuring machine (1) having a measuring head (9) comprising a laser transmitter (16) for emitting an incident laser beam (18) to the piece to be measured and a sensor for measuring image (17) for detecting a laser beam reflected from the workpiece, the method comprising the steps of: - analyser une image fournie par le capteur d' image pour détecter une position du faisceau laser réfléchi sur le capteur d'image (17);  - analyzing an image provided by the image sensor to detect a position of the reflected laser beam on the image sensor (17); fournir au moins un indicateur (19) représentatif de la position du faisceau laser réfléchi sur le capteur d'image (17);  providing at least one indicator (19) representative of the position of the reflected laser beam on the image sensor (17); - rapprocher ou éloigner la tête de mesure (9) de la pièce à mesurer en fonction de l'indicateur (19), caractérisé en ce que l'indicateur (19) est fourni par la tête de mesure (9) .  - Move the measurement head (9) closer to or away from the part to be measured according to the indicator (19), characterized in that the indicator (19) is provided by the measuring head (9). 2. Procédé selon la revendication 1, dans lequel l'indicateur (19) est un indicateur visuel.  The method of claim 1, wherein the indicator (19) is a visual indicator. 3. Procédé selon la revendication 1, dans lequel des indicateurs (19) différents sont émis selon que la tête de mesure (9) doit être rapprochée ou éloignée de la pièce à mesurer.  3. Method according to claim 1, wherein different indicators (19) are emitted according to whether the measuring head (9) is to be moved closer to or away from the piece to be measured. 4. Procédé selon la revendication 3, dans lequel l'indicateur (19) est un indicateur visuel coloré.  The method of claim 3, wherein the indicator (19) is a colored visual indicator. 5. Machine à mesurer tridimensionnelle (1) comportant une unité de traitement reliée à une tête de mesure (9) comprenant un émetteur laser (16) pour émettre vers la pièce à mesurer un faisceau laser incident (18) et un capteur d'image (17) pour détecter un faisceau laser réfléchi par la pièce, caractérisée en ce que l'unité de traitement (23) et/ou la tête de mesure (9) sont agencées pour mettre en œuvre le procédé selon l'une quelconque des revendications précédentes et dans laquelle la tête de mesure (9) est pourvue d'au moins une diode (19) formant l'indicateur. 5. A three-dimensional measuring machine (1) comprising a processing unit connected to a measuring head (9) comprising a laser transmitter (16) for transmitting an incident laser beam (18) and an image sensor towards the part to be measured. (17) for detecting a laser beam reflected by the workpiece, characterized in that the processing unit (23) and / or the measuring head (9) are arranged to implement the method according to one of the any of the preceding claims and wherein the measuring head (9) is provided with at least one diode (19) forming the indicator.
PCT/EP2014/072258 2013-10-18 2014-10-16 Scanner having facilitated pointing Ceased WO2015055782A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0277542A1 (en) * 1987-02-05 1988-08-10 Firma Carl Zeiss Optoelectronic distance sensor
US5430547A (en) * 1992-04-07 1995-07-04 Honda Giken Kogyo Kabushiki Kaisha Non-contacting position detecting apparatus
US20100183197A1 (en) * 2007-06-15 2010-07-22 Kabushiki Kaisha Toshiba Apparatus for inspecting and measuring object to be measured
US20120113435A1 (en) * 2009-07-03 2012-05-10 Hexagon Metrology Kabushiki Kaisha Apparatus for generating three-dimensional image of object

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0277542A1 (en) * 1987-02-05 1988-08-10 Firma Carl Zeiss Optoelectronic distance sensor
US5430547A (en) * 1992-04-07 1995-07-04 Honda Giken Kogyo Kabushiki Kaisha Non-contacting position detecting apparatus
US20100183197A1 (en) * 2007-06-15 2010-07-22 Kabushiki Kaisha Toshiba Apparatus for inspecting and measuring object to be measured
US20120113435A1 (en) * 2009-07-03 2012-05-10 Hexagon Metrology Kabushiki Kaisha Apparatus for generating three-dimensional image of object

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