WO2014207897A1 - Solder material and solder joint - Google Patents
Solder material and solder joint Download PDFInfo
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- WO2014207897A1 WO2014207897A1 PCT/JP2013/067829 JP2013067829W WO2014207897A1 WO 2014207897 A1 WO2014207897 A1 WO 2014207897A1 JP 2013067829 W JP2013067829 W JP 2013067829W WO 2014207897 A1 WO2014207897 A1 WO 2014207897A1
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- solder
- layer
- core layer
- emitted
- dose
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/26—Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/17—Metallic particles coated with metal
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/18—Non-metallic particles coated with metal
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0211—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in cutting
- B23K35/0216—Rods, electrodes, wires
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
- B23K35/0233—Sheets, foils
- B23K35/0238—Sheets, foils layered
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
- B23K35/0244—Powders, particles or spheres; Preforms made therefrom
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
- B23K35/0244—Powders, particles or spheres; Preforms made therefrom
- B23K35/025—Pastes, creams, slurries
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/26—Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
- B23K35/262—Sn as the principal constituent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/28—Selection of soldering or welding materials proper with the principal constituent melting at less than 950 degrees C
- B23K35/282—Zn as the principal constituent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
- B23K35/3006—Ag as the principal constituent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
- B23K35/3013—Au as the principal constituent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
- B23K35/302—Cu as the principal constituent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
- B23K35/3033—Ni as the principal constituent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
- B23K35/3053—Fe as the principal constituent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/32—Selection of soldering or welding materials proper with the principal constituent melting at more than 1550 degrees C
- B23K35/325—Ti as the principal constituent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/36—Selection of non-metallic compositions, e.g. coatings, fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/36—Selection of non-metallic compositions, e.g. coatings, fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest
- B23K35/3601—Selection of non-metallic compositions, e.g. coatings, fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest with inorganic compounds as principal constituents
- B23K35/3602—Carbonates, basic oxides or hydroxides
Definitions
- the present invention relates to a solder material and a solder joint formed by using a solder material capable of suppressing radiation, particularly radiation dose of ⁇ rays.
- BGA ball grid array
- An electronic component to which BGA is applied includes, for example, a semiconductor package.
- a semiconductor package a semiconductor chip having electrodes is sealed with a resin.
- Solder bumps are formed on the electrodes of the semiconductor chip. This solder bump is formed by joining a solder ball to an electrode of a semiconductor chip.
- a semiconductor package using BGA is placed on a printed circuit board so that each solder bump comes into contact with the conductive land of the printed circuit board.
- solder bump in which a Cu ball is bonded to an electrode of an electronic component with a paste has been studied (for example, see Patent Document 1).
- a solder bump having a Cu ball can support the semiconductor package with a Cu ball that does not melt at the melting point of the solder even when the weight of the semiconductor package is added to the solder bump when an electronic component is mounted on a printed circuit board. Therefore, the solder hump is not crushed by the weight of the semiconductor package.
- the refining of Cu goes through a process of heating Cu to about 1000 ° C., so that a radioactive element such as 210 Po that emits ⁇ rays can be volatilized, and the emitted ⁇ dose is It is thought that it can be kept low. It is also conceivable to use a Cu ball having a high purity that does not contain an element involved in the emission of ⁇ rays.
- the present invention has been made to solve such a problem, and provides a solder material capable of suppressing the radiation dose of radiation, particularly alpha rays, and a solder joint formed using the solder material. With the goal.
- the inventors coated the material that becomes the core layer with a material whose ⁇ dose is lower than the allowable value of the ⁇ dose radiated from the solder material. It was found that radiation of lines can be suppressed.
- the present invention includes a core layer having a size that secures a gap between a bonded object and an object to be bonded, and a coating layer that covers the core layer, and the coating layer has a temperature at which the core layer is not melted.
- the core layer either the functional layer provided inside the coating layer and the core layer provided inside the functional layer, Or it is a solder material comprised with the metal material which has the thickness which shields the radiation radiated
- this invention is the solder joint formed using this solder material.
- the coating layer has a melting point that melts at a temperature at which the core layer is not melted, and solidifies Sn alone, an alloy material containing Sn, or Pb that joins the joined object and the object to be joined. It is preferably composed of any one of an alloy material containing Sn, a simple substance of In, and an alloy material containing In.
- the coating layer is made of an alloy that is used.
- the core layer is Cu, Ni, Ag, Bi, Pb, Al, Sn, Fe, Zn, In, Ge, Sb, Co having a melting point that is not melted at the temperature at which the coating layer melts.
- Mn, Au, Si, Pt, Cr, La, Mo, Nb, Pd, Ti, Zr, and Mg are preferably composed of a single metal, a metal oxide, a metal mixed oxide, or an alloy.
- the core layer is preferably composed of a resin material, a carbon material, or a ceramic that is not melted at a temperature at which the coating layer melts.
- the coating layer shields ⁇ rays radiated from either the core layer, the core layer and the functional layer, or both the core layer and the functional layer, and the ⁇ dose transmitted through the coating layer is 0.0200 cph / cm. It is preferably made of a metal material having a thickness of 2 or less and an ⁇ dose emitted from the coating layer of 0.0200 cph / cm 2 or less. Further, the ⁇ dose emitted from the coating layer is preferably 0.0020 cph / cm 2 or less, more preferably 0.0010 cph / cm 2 or less, from the viewpoint of suppressing soft errors in further high-density mounting. Furthermore, the thickness of the coating layer is preferably 1 ⁇ m or more and 1000 ⁇ m or less.
- the ⁇ -ray which is the radiation emitted from the coating layer itself, is less than or equal to the allowable value of the ⁇ dose emitted from the solder material, and the coating layer is provided inside the core layer and the coating layer. And a thickness that can block ⁇ -rays radiated from either the core layer provided inside the functional layer or both the core layer and the functional layer.
- the ⁇ dose emitted from the solder material can be suppressed to a predetermined allowable value or less, and the occurrence of soft errors due to ⁇ rays can be suppressed.
- materials that have previously been difficult to reduce the ⁇ dose can be used as a nucleus layer with a configuration that suppresses the occurrence of soft errors due to ⁇ rays, and the range of selection of materials that constitute the nucleus layer Can be spread.
- FIG. 1 is a cross-sectional view showing an example of a solder ball according to the present embodiment
- FIG. 2 is a cross-sectional view showing an example of a solder joint in a use state of the solder ball according to the present embodiment.
- a solder ball will be described as an example.
- the solder ball 1A of the present embodiment includes a spherical core layer 2A having a desired diameter and a solder layer 3A covering the core layer 2A.
- the solder joint 12 ⁇ / b> A is disposed between the electrode 10 a of the semiconductor chip 10 that is a bonded object and the conductive land 11 a of the printed circuit board 11 that is a bonded object.
- solder ball 1A the solder layer 3A constituting the outermost layer is melted by heating, and the molten solder layer 3A is solidified to form a solder joint 12A, thereby joining the electrode 10a and the conductive land 11a.
- the solder joint 12 ⁇ / b> A is a core layer 2 ⁇ / b> A covered with the solder layer 3 ⁇ / b> A, and ensures a gap between the semiconductor chip 10 and the printed board 11.
- the core layer 2A is made of a metal material or a resin material having a melting point Tm2 (Tm2> Tm1) that is not melted at the melting point Tm1 of the solder layer 3A.
- a metal material is selected as the core layer 2A
- examples of the metal material having a melting point Tm2 higher than the melting point Tm1 of the solder layer 3A include Cu, Ni, Ag, Bi, Pb, Al, Sn, Fe, Zn, Consists of simple metals such as In, Ge, Sb, Co, Mn, Au, Si, Pt, Cr, La, Mo, Nb, Pd, Ti, Zr, Mg, metal oxides, metal mixed oxides, or alloys
- the core layer 2A may add P or the like as an additive element to these metal materials described above.
- the core layer 2A is interposed between the electrode 10a and the conductive land 11a in a state where the core layer 2A is covered with the solder layer 3A obtained by bonding the electrode 10a of the semiconductor chip 10 and the conductive land 11a of the printed board 11. It has a diameter that secures an interval between the semiconductor chip 10 and the printed circuit board 11.
- the solder layer 3A is an example of a coating layer, and is made of a metal material having a melting point Tm1 lower than the melting point Tm2 of the core layer 2A.
- the solder layer 3A is melted and solidified by heating at a temperature equal to or higher than the melting point Tm1 of the solder layer 3A itself and lower than the melting point Tm2 of the core layer 2A, so that the electrode 10a of the semiconductor chip 10 and the printed circuit board 11 are solidified.
- the conductive land 11a is joined.
- the solder layer 3A is made of a metal material in which the ⁇ rays emitted from the solder layer 3A itself are less than a predetermined value in order to suppress the emission of ⁇ rays that are radiation emitted from the solder ball 1A and the solder joint 12A. . Furthermore, the solder layer 3A has a thickness capable of shielding ⁇ rays emitted from the core layer 2A and suppressing the ⁇ dose emitted from the solder balls 1A and the solder joints 12A to a predetermined allowable value or less.
- the solder layer 3A is composed of, for example, Sn alone, Sn-based alloy material, Sn-based alloy material not containing Pb, In-alone, or In-based alloy material as a metal material that satisfies the above-described conditions. .
- the solder layer 3A is made of Sn—Ag—Cu, Sn—Ag, Sn—Cu, Sn—Bi, Sn—In, Sn—Pb, or the like as an Sn-based alloy material.
- the solder layer 3A is made of an alloy obtained by adding other elements to the above-described alloys.
- the solder layer 3A is made of the desired metal material described above, and is formed by forming a layer by plating on the surface of the core layer 2A.
- the ⁇ dose As2 emitted from the core layer 2A and the ⁇ emitted from the solder layer 3A with respect to the allowable value As1 of the ⁇ dose emitted from the solder ball 1A and the solder joint 12A If the dose As3 is lower than the allowable value As1, the ⁇ dose radiated from the solder ball 1A and the solder joint 12A can be suppressed to the allowable value As1 or less.
- the ⁇ dose As2 emitted from the core layer 2A is larger than the allowable value As1 of the ⁇ dose emitted from the solder ball 1A and the solder joint 12A, the ⁇ rays emitted from the core layer 2A are generated by the solder layer 3A.
- the ⁇ dose emitted from the solder ball 1A and the solder joint 12A can be suppressed to an allowable value As1 or less.
- the solder layer 3A is made of a metal material in which the ⁇ dose As3 emitted from the solder layer 3A itself is equal to or less than the allowable value As1 of the ⁇ dose emitted from the solder ball 1A and the solder joint 12A.
- the solder layer 3A is emitted from the core layer 2A even when the ⁇ dose As2 emitted from the core layer 2A is larger than the allowable value As1 of the ⁇ dose emitted from the solder ball 1A and the solder joint 12A.
- the ⁇ dose emitted from the solder balls 1A and the solder joints 12A can be reduced to the allowable value As1.
- the electrode 10a of the semiconductor chip 10 and the conductive land 11a of the printed circuit board 11 can be joined, and even after solidification, the core layer 2A is covered.
- the thickness is such that the ⁇ rays emitted from the core layer 2A can be shielded.
- the solder layer 3A has a thickness that can secure the space between the semiconductor chip 10 and the printed board 11 by the core layer 2A covered with the solidified solder layer 3A.
- the ⁇ rays radiated from the solder layer 3A itself are below the allowable value of the ⁇ dose radiated from the solder ball 1A and the solder joint 12A.
- the solder layer 3A has a thickness capable of shielding ⁇ rays emitted from the core layer 2A and suppressing the ⁇ dose emitted from the solder balls 1A and the solder joints 12A to a predetermined allowable value or less. If so, it is possible to suppress the occurrence of soft errors due to ⁇ rays. Further, the range of selection of materials that can be used as the nucleus layer can be expanded.
- solder ball 1A having desired characteristics, such as being able to suppress the emission of ⁇ -rays and ensuring the interval between the bonded object and the bonded object at low cost.
- FIG. 3 is a cross-sectional view showing a modification of the solder ball of the present embodiment.
- a solder ball 1B according to a modification of the present embodiment includes a spherical core layer 2B having a desired diameter, one or more functional layers 4B covering the core layer 2B, and the core layer 2B and the functional layer 4B.
- the solder layer 3B is provided.
- the core layer 2B is composed of a metal material or a resin material having a melting point that is not melted at the melting point of the solder layer 3B, similarly to the core layer 2A. If the core layer 2B is a metal material, for example, Cu, Ni, Ag, Bi, Pb, Al, Sn, Fe, Zn, In, Ge, Sb, Co, Mn, Au, Si, Pt, Cr, La , Mo, Nb, Pd, Ti, Zr, Mg and other simple metals, metal oxides, mixed metal oxides, or alloys, or any of these metal materials plus P as an additive element .
- a metal material for example, Cu, Ni, Ag, Bi, Pb, Al, Sn, Fe, Zn, In, Ge, Sb, Co, Mn, Au, Si, Pt, Cr, La , Mo, Nb, Pd, Ti, Zr, Mg and other simple metals, metal oxides, mixed metal oxides, or alloys, or any of these metal materials plus P as an additive
- the functional layer 4B is made of a metal material or a resin material having a melting point that is not melted at the melting point of the solder layer 3B.
- the functional layer 4B is configured by providing, for example, a Ni plating layer on the surface of the core layer 2B. Note that when a resin material is selected as the core layer, a base plating layer made of Ni or the like is indispensable for forming a solder layer as usual.
- the solder layer 3B is an example of a coating layer, and is composed of a metal material having a melting point lower than that of the core layer 2B and the functional layer 4B.
- the solder layer 3B is melted and solidified by heating at a temperature higher than the melting point of the solder layer 3B itself and lower than the melting point of the core layer 2B and the functional layer 4B. To do.
- the solder layer 3B is made of a metal material in which the ⁇ rays emitted from the solder layer 3B itself are less than a predetermined value in order to suppress the emission of ⁇ rays that are radiation emitted from the solder balls 1B. Further, the solder layer 3B shields the ⁇ rays emitted from the core layer 2B or the functional layer 4B, or the core layer 2B and the functional layer 4B, and the ⁇ dose emitted from the solder ball 1B is below a predetermined allowable value. It has a thickness that can be suppressed.
- the solder layer 3B is, for example, Sn—Ag—Cu, Sn—Ag, Sn—Cu, Sn—Bi, Sn—In, Sn—Pb, etc. It is comprised with the alloy which added these elements.
- solder ball 1B by providing a plated layer of Ni as the functional layer 4B on the surface of the core layer 2B, a uniform solder layer 3B is formed on the surface of the core layer 2B in the step of forming the solder layer 3B by plating. be able to.
- the nucleus layer 2B or the functional layer 4B, or the nucleus layer 2B and the functional layer 4B is larger than the allowable value of the ⁇ dose emitted from the solder ball 1B, the nucleus layer 2B or the function
- the ⁇ dose emitted from the solder balls 1B can be suppressed to an allowable value or less.
- the solder layer 3B is made of a metal material in which the ⁇ dose emitted from the solder layer 3B itself is less than the allowable value of the ⁇ dose emitted from the solder ball 1B.
- the solder layer 3B has a case where the ⁇ dose emitted from the core layer 2B or the functional layer 4B or the core layer 2B and the functional layer 4B is larger than the allowable value of the ⁇ dose emitted from the solder ball 1B.
- the ⁇ dose emitted from the solder ball 1B can be suppressed to an allowable value. Consists of.
- a predetermined functional layer 4B is provided inside the solder layer 3B to have a multilayer structure.
- the solder ball 1B having such a multilayer structure even when the ⁇ dose emitted from the functional layer 4B is larger than the allowable value of the ⁇ dose emitted from the solder ball 1B, the ⁇ emitted from the functional layer 4B.
- the wire can be shielded by the solder layer 3B, and restrictions on the material that can be used as the functional layer can be reduced.
- the ⁇ dose emitted from the functional layer 4B is smaller than the allowable value of the ⁇ dose emitted from the solder ball 1B, the ⁇ rays emitted from the core layer 2B are converted into the functional layer 4B and the solder layer 3B. Can be shielded.
- the ⁇ ray emitted from the solder layer 3B itself is less than the allowable value of the ⁇ dose emitted from the solder ball 1B
- the solder layer 3B is the core layer 2B or A structure having a thickness capable of shielding ⁇ rays emitted from the functional layer 4B or the core layer 2B and the functional layer 4B and suppressing the ⁇ dose emitted from the solder balls 1B to a predetermined allowable value or less. Then, it is possible to suppress the occurrence of soft errors due to ⁇ rays.
- the range of selection of the material which can be used as a nucleus layer and a functional layer can be expanded.
- solder balls 1B having desired characteristics, such as low radiation of ⁇ -rays and ensuring a space between the object to be bonded and the object to be bonded, at a low cost.
- FIG. 4 is a cross-sectional view showing another modification of the solder material of the present invention.
- a spherical solder ball has been described as an example of the solder material.
- the solder material 1 ⁇ / b> C may be configured as a shape that is covered with the functional layer 4 ⁇ / b> B and the solder layer 3 ⁇ / b> B that are equal to or more than one layer. Moreover, it is good also as a structure which does not provide the functional layer 4B.
- the diameter of the solder ball is preferably 1 to 1000 ⁇ m. Within this range, spherical solder balls can be stably manufactured, and connection short-circuiting when the terminals are at a narrow pitch can be suppressed.
- the assembly of “solder balls” may be referred to as “solder powder”.
- the “solder powder” is an aggregate of a large number of solder balls, each of which has the above-mentioned characteristics. For example, it is distinguished in the form of use from a single solder ball, such as being formulated as a powder in solder paste. Similarly, when used for the formation of solder bumps, it is normally treated as an assembly, so the “solder powder” used in such a form is distinguished from a single solder ball.
- the solder ball 1A of the example was prepared by varying the thickness of the solder layer 3A.
- the ⁇ dose emitted from 1A was measured.
- the ⁇ dose emitted from the core layer 2A without the solder layer 3A was measured.
- a spherical Ag 30 ppm-Bi ball formed by a known atomizing method or the like was used as the core layer 2A according to the present invention.
- barrel plating is used as an example of the method for forming the solder layer 3A according to the present invention on the prepared Ag30ppm-Bi ball will be described below.
- the solder plating solution was prepared as follows. 1/3 of the water required for adjusting the plating solution and the total volume of 54% by weight methanesulfonic acid aqueous solution were placed in the stirring vessel as the groundwater. Next, acetylcysteine, which is an example of a mercaptan compound as a complexing agent, was added and confirmed for dissolution, and 2,2'-dithiodianiline, which was an example of an aromatic amino compound as another complexing agent, was then added. When it became a light blue gel-like liquid, stannous methanesulfonate was quickly added.
- ⁇ -naphthol polyethoxylate (EO 10 mol) 3 g / L as an example of a surfactant was added, and the preparation of the plating solution was completed.
- a plating solution having a methanesulfonic acid concentration of 2.64 mol / L and a tin ion concentration of 0.337 mol / L in the plating solution was prepared.
- Example 1 Example 2, and Comparative Example, the diameter of the core layer 2A was 350 ⁇ m.
- the thickness of the solder layer 3A was 10 ⁇ m.
- the diameter of the solder ball 1A becomes 370 ⁇ m.
- the thickness of the solder layer 3A was 30 ⁇ m.
- the diameter of the solder ball 1A is 410 ⁇ m by setting the thickness of the solder layer 3A to 30 ⁇ m.
- the amount of electricity is calculated by the following formula (1) according to Faraday's law of electrolysis, the desired amount of solder plating is estimated, the amount of electricity is calculated, and a current is passed through the plating solution so that the calculated amount of electricity is obtained. Then, the plating process is performed while flowing the plating solution.
- the capacity of the plating tank can be determined according to the total amount of Ag-Bi balls and plating solution.
- w is the amount of electrolytic deposition (g)
- I is the current (A)
- t is the energization time (seconds)
- M is the atomic weight of the deposited element (in the case of Sn, 118.71)
- Z is the valence.
- Sn is bivalent
- F is a Faraday constant (96500 coulombs)
- Q is represented by (I ⁇ sec)
- the ⁇ ray was measured with a gas flow type apparatus based on JEDEC.
- the sample used was stored in PR gas for 24 hours, the sample area was 900 cm 2 , and the measurement time was 72 hours. The first 10 hours are not used for measurement because of an error in the ⁇ dose in the air.
- the ⁇ dose emitted from the core layer 2A not provided with the solder layer 3A was 0.0898 cph / cm 2 .
- the ⁇ dose emitted from the solder ball 1A was 0.0160 cph / cm 2 .
- Example 2 in which the thickness of the solder layer 3A covering the core layer 2A was 30 ⁇ m, the ⁇ dose emitted from the solder ball 1A was 0.0107 cph / cm 2 .
- the ⁇ dose As2 emitted from the core layer 2A is more than the allowable value As1 of the ⁇ dose emitted from the solder ball 1A. Even if it is large, the alpha dose emitted from the solder ball 1A can be suppressed to the allowable value As1 (0.0200cph / cm 2 ) or less by covering the core layer 2A with the solder layer 3A having a thickness of 10 ⁇ m or more. I understood.
- the present invention is applied to solder balls used for mounting electronic parts to which BGA is applied.
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Abstract
Description
本発明は、放射線、特にα線の放射線量を抑えられるようにしたはんだ材料及びはんだ材料を使用して形成されたはんだ継手に関する。 The present invention relates to a solder material and a solder joint formed by using a solder material capable of suppressing radiation, particularly radiation dose of α rays.
近年、情報機器の小型化により、情報機器に搭載される電子部品においても急速な小型化が進行している。電子部品は、小型化の要求により接続端子の狭小化や実装面積の縮小化に対応するため、裏面に電極が設置されたボールグリッドアレイ(以下、BGAと称す)が適用されている。 In recent years, due to miniaturization of information equipment, electronic components mounted on information equipment are also rapidly downsized. In order to meet the demand for downsizing and the reduction of the connection terminals and the reduction of the mounting area, electronic components are applied with a ball grid array (hereinafter referred to as BGA) in which electrodes are installed on the back surface.
BGAを適用した電子部品には、例えば半導体パッケージがある。半導体パッケージでは、電極を有する半導体チップが樹脂で封止されている。半導体チップの電極には、はんだバンプが形成されている。このはんだバンプは、はんだボールを半導体チップの電極に接合することによって形成されている。BGAを適用した半導体パッケージは、各はんだバンプがプリント基板の導電性ランドに接触するように、プリント基板上に置かれ、加熱により溶融したはんだバンプとランドが接合することにより、プリント基板に搭載される。また、更なる高密度実装の要求に対応するため、半導体パッケージが高さ方向に積み重ねられた3次元高密度実装が検討されている。 An electronic component to which BGA is applied includes, for example, a semiconductor package. In a semiconductor package, a semiconductor chip having electrodes is sealed with a resin. Solder bumps are formed on the electrodes of the semiconductor chip. This solder bump is formed by joining a solder ball to an electrode of a semiconductor chip. A semiconductor package using BGA is placed on a printed circuit board so that each solder bump comes into contact with the conductive land of the printed circuit board. The Further, in order to meet the demand for further high-density mounting, three-dimensional high-density mounting in which semiconductor packages are stacked in the height direction has been studied.
しかし、3次元高密度実装がなされた半導体パッケージにBGAが適用されると、半導体パッケージの自重によりはんだボールが潰れてしまい、電極間で接続短絡が発生する。これは、高密度実装を行う上での支障となる。 However, when BGA is applied to a semiconductor package on which three-dimensional high-density mounting is performed, the solder balls are crushed by the weight of the semiconductor package, and a connection short circuit occurs between the electrodes. This hinders high-density mounting.
そこで、電子部品の電極にペーストでCuボールが接合されたはんだバンプが検討されている(例えば、特許文献1参照)。Cuボールを有するはんだバンプは、電子部品がプリント基板に実装される際、半導体パッケージの重量がはんだバンプに加わっても、はんだの融点では溶融しないCuボールにより半導体パッケージを支えることができる。従って、半導体パッケージの自重によりはんだハンプが潰れることがない。 Therefore, a solder bump in which a Cu ball is bonded to an electrode of an electronic component with a paste has been studied (for example, see Patent Document 1). A solder bump having a Cu ball can support the semiconductor package with a Cu ball that does not melt at the melting point of the solder even when the weight of the semiconductor package is added to the solder bump when an electronic component is mounted on a printed circuit board. Therefore, the solder hump is not crushed by the weight of the semiconductor package.
ところで、電子部品の小型化は高密度実装を可能にするが、電子部品の高密度実装は、ソフトエラーという問題を引き起こすことになった。ソフトエラーは半導体集積回路(以下、ICと称する)のメモリセル中に放射線であるα線が進入することにより記憶内容が書き換えられる可能性があるというものである。α線は、はんだ合金中のU、Th、210Po等の放射性元素がα崩壊することにより放射されると考えられている。そこで、近年では、放射性元素の含有量を低減した低α線のはんだ材料の開発が行われている。 By the way, miniaturization of electronic components enables high-density mounting, but high-density mounting of electronic components causes a problem of soft errors. The soft error is that the stored content may be rewritten when alpha rays, which are radiations, enter memory cells of a semiconductor integrated circuit (hereinafter referred to as IC). It is considered that α rays are emitted when a radioactive element such as U, Th, 210 Po, etc. in the solder alloy undergoes α decay. Therefore, in recent years, development of low α-ray solder materials in which the content of radioactive elements is reduced has been carried out.
Cuボールを有するはんだバンプでは、Cuの精錬を、Cuを1000℃程度まで加熱する工程を経るため、α線を放出する210Po等の放射性元素が揮発し得る条件となり、放射されるα線量が低く抑えられると考えられる。また、α線の放出に関与する元素を含まないような純度の高いCuボールを使用することも考えられる。 In solder bumps having Cu balls, the refining of Cu goes through a process of heating Cu to about 1000 ° C., so that a radioactive element such as 210 Po that emits α rays can be volatilized, and the emitted α dose is It is thought that it can be kept low. It is also conceivable to use a Cu ball having a high purity that does not contain an element involved in the emission of α rays.
しかし、従来からのCu等の金属の精錬では、α線の放出に関与する元素を揮発により除去できるようにすることを考慮したものではない。また、純度の高い金属の使用はコストの上昇につながる。更に、放射されるα線量が低い材料を使用する場合、使用できる材料に制約が生じる。 However, conventional refining of metals such as Cu does not take into consideration that elements involved in the emission of α rays can be removed by volatilization. In addition, the use of high purity metal leads to an increase in cost. Furthermore, when a material with a low emitted α dose is used, there are restrictions on the materials that can be used.
本発明は、このような課題を解決するためになされたもので、放射線、特にα線の放射線量を抑えられるようにしたはんだ材料及びはんだ材料を使用して形成されたはんだ継手を提供することを目的とする。 The present invention has been made to solve such a problem, and provides a solder material capable of suppressing the radiation dose of radiation, particularly alpha rays, and a solder joint formed using the solder material. With the goal.
発明者らは、はんだ材料から放射されるα線量の許容値よりα線量が低い材料で、核層となる材料を被覆することで、核層から放射されるα線量の高低によらず、α線の放射を抑えることができることを見出した。 The inventors coated the material that becomes the core layer with a material whose α dose is lower than the allowable value of the α dose radiated from the solder material. It was found that radiation of lines can be suppressed.
本発明は、接合物と被接合物との間で間隔を確保する大きさを有した核層と、核層を被覆する被覆層とを備え、被覆層は、核層が非溶融である温度で溶融する融点を有し、凝固することで接合物と被接合物とを接合すると共に、核層、被覆層の内側に設けられる機能層と機能層の内側に設けられる核層の何れか、あるいは、核層と機能層の双方から放射される放射線を遮蔽する厚さを有する金属材料で構成されるはんだ材料である。また、本発明は、このはんだ材料を使用して形成されたはんだ継手である。 The present invention includes a core layer having a size that secures a gap between a bonded object and an object to be bonded, and a coating layer that covers the core layer, and the coating layer has a temperature at which the core layer is not melted. In addition to joining the object to be joined and the object to be joined by solidifying, the core layer, either the functional layer provided inside the coating layer and the core layer provided inside the functional layer, Or it is a solder material comprised with the metal material which has the thickness which shields the radiation radiated | emitted from both a nucleus layer and a functional layer. Moreover, this invention is the solder joint formed using this solder material.
本発明では、被覆層は、核層が非溶融である温度で溶融する融点を有し、凝固することで接合物と被接合物とを接合するSn単体、Snを含む合金材料、あるいはPbを非含有としたSnを含む合金材料、In単体、Inを含む合金材料の何れかで構成されることが好ましい。 In the present invention, the coating layer has a melting point that melts at a temperature at which the core layer is not melted, and solidifies Sn alone, an alloy material containing Sn, or Pb that joins the joined object and the object to be joined. It is preferably composed of any one of an alloy material containing Sn, a simple substance of In, and an alloy material containing In.
また、本発明では、Snを含む合金材料として、Snと、Cu、Ni、Ag、Bi、Pb、Al、Fe、Zn、In、Ge、Ga、Sb、Coのうち何れか1つ以上を含有する合金で被覆層が構成されることが好ましい。 In the present invention, as an alloy material containing Sn, Sn and one or more of Cu, Ni, Ag, Bi, Pb, Al, Fe, Zn, In, Ge, Ga, Sb, and Co are contained. It is preferable that the coating layer is made of an alloy that is used.
更に、本発明では、核層は、被覆層が溶融する温度で非溶融である融点を有したCu、Ni、Ag、Bi、Pb、Al、Sn、Fe、Zn、In、Ge、Sb、Co、Mn、Au、Si、Pt、Cr、La、Mo、Nb、Pd、Ti、Zr、Mgの金属単体、金属酸化物、金属混合酸化物、あるいは合金で構成されることが好ましい。 Further, in the present invention, the core layer is Cu, Ni, Ag, Bi, Pb, Al, Sn, Fe, Zn, In, Ge, Sb, Co having a melting point that is not melted at the temperature at which the coating layer melts. Mn, Au, Si, Pt, Cr, La, Mo, Nb, Pd, Ti, Zr, and Mg are preferably composed of a single metal, a metal oxide, a metal mixed oxide, or an alloy.
また、核層は、被覆層が溶融する温度で非溶融である樹脂材料、炭素材料、あるいはセラミックスで構成されることが好ましい。 The core layer is preferably composed of a resin material, a carbon material, or a ceramic that is not melted at a temperature at which the coating layer melts.
更に、被覆層は、核層、核層と機能層の何れか、あるいは、核層と機能層の双方から放射されるα線を遮蔽して、被覆層を透過したα線量を0.0200cph/cm2以下とする厚さを有すると共に、被覆層から放射されるα線量を0.0200cph/cm2以下とした金属材料で構成されることが好ましい。また、被覆層から放射されるα線量は、更なる高密度実装でのソフトエラーを抑制する観点から、好ましくは0.0020cph/cm2以下であり、より好ましくは0.0010cph/cm2以下である。更に、被覆層の厚さは、1μm以上1000μm以下で構成されることが好ましい。 Furthermore, the coating layer shields α rays radiated from either the core layer, the core layer and the functional layer, or both the core layer and the functional layer, and the α dose transmitted through the coating layer is 0.0200 cph / cm. It is preferably made of a metal material having a thickness of 2 or less and an α dose emitted from the coating layer of 0.0200 cph / cm 2 or less. Further, the α dose emitted from the coating layer is preferably 0.0020 cph / cm 2 or less, more preferably 0.0010 cph / cm 2 or less, from the viewpoint of suppressing soft errors in further high-density mounting. Furthermore, the thickness of the coating layer is preferably 1 μm or more and 1000 μm or less.
本発明では、被覆層自体から放射される放射線であるα線が、はんだ材料から放射されるα線量の許容値以下で、かつ、被覆層が、核層、被覆層の内側に設けられる機能層と機能層の内側に設けられる核層の何れか、あるいは、核層と機能層の双方から放射されるα線を遮蔽することができる厚さを有する構成とした。 In the present invention, the α-ray, which is the radiation emitted from the coating layer itself, is less than or equal to the allowable value of the α dose emitted from the solder material, and the coating layer is provided inside the core layer and the coating layer. And a thickness that can block α-rays radiated from either the core layer provided inside the functional layer or both the core layer and the functional layer.
これにより、本発明では、はんだ材料から放射されるα線量を所定の許容値以下に抑えることができ、α線に起因するソフトエラーの発生を抑えることができる。また、α線に起因するソフトエラーの発生を抑えた構成で、従来α線量を低減することが困難であった材料も核層として使用できるようになり、核層を構成する材料の選択の幅を広げることができる。 Thus, in the present invention, the α dose emitted from the solder material can be suppressed to a predetermined allowable value or less, and the occurrence of soft errors due to α rays can be suppressed. In addition, materials that have previously been difficult to reduce the α dose can be used as a nucleus layer with a configuration that suppresses the occurrence of soft errors due to α rays, and the range of selection of materials that constitute the nucleus layer Can be spread.
<本実施の形態のはんだボールの構成例>
図1は、本実施の形態のはんだボールの一例を示す断面図、図2は、本実施の形態のはんだボールの使用状態であるはんだ継手の一例を示す断面図で、本発明のはんだ材料の実施の形態として、はんだボールを例に説明する。
<Configuration Example of Solder Ball of this Embodiment>
FIG. 1 is a cross-sectional view showing an example of a solder ball according to the present embodiment, and FIG. 2 is a cross-sectional view showing an example of a solder joint in a use state of the solder ball according to the present embodiment. As an embodiment, a solder ball will be described as an example.
本実施の形態のはんだボール1Aは、図1に示すように、所望の直径を有した球状の核層2Aと、核層2Aを被覆するはんだ層3Aを備える。はんだ継手12Aは、図2に示すように、接合物である半導体チップ10の電極10aと、被接合物であるプリント基板11の導電性ランド11aとの間に配置される。
As shown in FIG. 1, the
はんだボール1Aは、最外層を構成するはんだ層3Aが加熱により溶融し、溶融したはんだ層3Aが凝固することではんだ継手12Aを形成し、電極10aと導電性ランド11aを接合する。はんだ継手12Aは、はんだ層3Aによって被覆された核層2Aで、半導体チップ10とプリント基板11との間隔を確保する。
In the
核層2Aは、はんだ層3Aの融点Tm1で非溶融である融点Tm2(Tm2>Tm1)を有した金属材料、あるいは樹脂材料で構成される。核層2Aとして金属材料を選択した場合には、はんだ層3Aの融点Tm1より高い融点Tm2を有した金属材料として、例えば、Cu、Ni、Ag、Bi、Pb、Al、Sn、Fe、Zn、In、Ge、Sb、Co、Mn、Au、Si、Pt、Cr、La、Mo、Nb、Pd、Ti、Zr、Mg等の金属単体、金属酸化物、金属混合酸化物、あるいは合金で構成される。また、核層2Aは、上述したこれら金属材料に、添加元素としてP等を加えても良い。
The
核層2Aは、半導体チップ10の電極10aと、プリント基板11の導電性ランド11aとを接合したはんだ層3Aに被覆された状態で、電極10aと導電性ランド11aとの間に介在して、半導体チップ10とプリント基板11との間隔を確保する直径を有する。
The
はんだ層3Aは被覆層の一例で、核層2Aの融点Tm2より低い融点Tm1を有した金属材料で構成される。はんだ層3Aは、はんだ層3A自体の融点Tm1以上の温度で、かつ、核層2Aの融点Tm2より低い温度での加熱で溶融し、凝固することで、半導体チップ10の電極10aとプリント基板11の導電性ランド11aとを接合する。
The
また、はんだ層3Aは、はんだボール1A及びはんだ継手12Aから放射される放射線であるα線の放射を抑えるため、はんだ層3A自体から放射されるα線が所定値以下の金属材料で構成される。更に、はんだ層3Aは、核層2Aから放射されるα線を遮蔽して、はんだボール1A及びはんだ継手12Aから放射されるα線量を所定の許容値以下に抑えることができる厚さを有する。
Further, the
はんだ層3Aは、上述した条件を満たす金属材料として、例えば、Sn単体、Sn系の合金材料、あるいはPbを非含有としたSn系の合金材料、In単体、In系の合金材料で構成される。はんだ層3Aは、Sn系の合金材料として、Sn-Ag-Cu、Sn-Ag、Sn-Cu、Sn-Bi、Sn-In、Sn-Pb等で構成される。また、はんだ層3Aは上述したこれら合金に、他の元素を添加した合金で構成される。はんだ層3Aは、上述所望の金属材料で、核層2Aの表面にめっきによる層を形成して構成される。
The
はんだボール1A及びはんだ継手12Aでは、はんだボール1A及びはんだ継手12Aから放射されるα線量の許容値As1に対して、核層2Aから放射されるα線量As2と、はんだ層3Aから放射されるα線量As3が、許容値As1より共に低ければ、はんだボール1A及びはんだ継手12Aから放射されるα線量は許容値As1以下に抑えられる。
In the
一方、核層2Aから放射されるα線量As2が、はんだボール1A及びはんだ継手12Aから放射されるα線量の許容値As1より大きくても、核層2Aから放射されるα線をはんだ層3Aで遮蔽することで、はんだボール1A及びはんだ継手12Aから放射されるα線量を許容値As1以下に抑えることができる。
On the other hand, even if the α dose As2 emitted from the
そこで、はんだ層3Aは、はんだ層3A自体から放射されるα線量As3が、はんだボール1A及びはんだ継手12Aから放射されるα線量の許容値As1以下の金属材料で構成される。
Therefore, the
また、はんだ層3Aは、核層2Aから放射されるα線量As2が、はんだボール1A及びはんだ継手12Aから放射されるα線量の許容値As1より大きい場合であっても、核層2Aから放射されるα線を遮蔽することで、はんだボール1A及びはんだ継手12Aから放射されるα線量を許容値As1に抑えることができる厚さで構成される。
Also, the
ここで、はんだ層3Aは、溶融及び凝固することで、半導体チップ10の電極10aとプリント基板11の導電性ランド11aとを接合可能で、凝固後であっても、核層2Aを被覆して、核層2Aから放射されるα線を遮蔽し得る厚さで構成される。
Here, by melting and solidifying the
また、凝固後のはんだ層3Aが厚くなると、核層2Aから放射されるα線を遮蔽する効果が向上する一方、半導体チップ10とプリント基板11との間隔に影響を及ぼす。このため、はんだ層3Aは、半導体チップ10とプリント基板11との間隔を、凝固後のはんだ層3Aで被覆された核層2Aにより確保し得る厚さで構成される。
In addition, when the solidified
核層2Aをはんだ層3Aで被覆したはんだボール1A及びはんだ継手12Aでは、はんだ層3A自体から放射されるα線が、はんだボール1A及びはんだ継手12Aから放射されるα線量の許容値以下で、かつ、はんだ層3Aが、核層2Aから放射されるα線を遮蔽して、はんだボール1A及びはんだ継手12Aから放射されるα線量を所定の許容値以下に抑えることができる厚さを有する構成とすれば、α線に起因するソフトエラーの発生を抑えることができる。また、核層として使用できる材料の選択の幅を広げることができる。
In the
これにより、α線の放射が抑えられ、接合物と被接合物との間隔を確保する等、所望の特性を有したはんだボール1Aを、安価に提供できる。
This makes it possible to provide the
<本実施の形態のはんだボールの変形例>
図3は、本実施の形態のはんだボールの変形例を示す断面図である。本実施の形態の変形例のはんだボール1Bは、所望の直径を有した球状の核層2Bと、核層2Bを被覆する1層以上の機能層4Bと、核層2B及び機能層4Bを被覆するはんだ層3Bを備える。
<Modified example of solder ball of this embodiment>
FIG. 3 is a cross-sectional view showing a modification of the solder ball of the present embodiment. A solder ball 1B according to a modification of the present embodiment includes a
核層2Bは、核層2Aと同様に、はんだ層3Bの融点で非溶融である融点を有した金属材料、あるいは樹脂材料で構成される。核層2Bは、金属材料であれば、例えば、Cu、Ni、Ag、Bi、Pb、Al、Sn、Fe、Zn、In、Ge、Sb、Co、Mn、Au、Si、Pt、Cr、La、Mo、Nb、Pd、Ti、Zr、Mg等の金属単体、金属酸化物、金属混合酸化物、あるいは合金、これら金属材料に、添加元素としてP等を加えた合金の何れかで構成される。
The
機能層4Bは、はんだ層3Bの融点で非溶融である融点を有した金属材料、あるいは樹脂材料で構成される。機能層4Bは、核層2Bの表面に、例えばNiによるめっき層を設けて構成される。なお、核層として樹脂材料を選択した場合には、はんだ層を形成するために、Ni等による下地めっき層が必須となることは従来どおりである。
The
はんだ層3Bは被覆層の一例で、核層2B及び機能層4Bの融点より低い融点を有した金属材料で構成される。はんだ層3Bは、はんだ層3B自体の融点以上の温度で、かつ、核層2B及び機能層4Bの融点より低い温度での加熱で溶融し、凝固することで、接合物と被接合物を接合する。
The
また、はんだ層3Bは、はんだボール1Bから放射される放射線であるα線の放射を抑えるため、はんだ層3B自体から放射されるα線が所定値以下の金属材料で構成される。更に、はんだ層3Bは、核層2Bあるいは機能層4B、または、核層2B及び機能層4Bから放射されるα線を遮蔽して、はんだボール1Bから放射されるα線量を所定の許容値以下に抑えることができる厚さを有する。
Also, the
はんだ層3Bは、上述した条件を満たす金属材料として、例えば、Sn-Ag-Cu、Sn-Ag、Sn-Cu、Sn-Bi、Sn-In、Sn-Pb等、または、これら合金に、他の元素を添加した合金で構成される。
The
はんだボール1Bでは、核層2Bの表面に、機能層4BとしてNiによるめっき層を設けることで、はんだ層3Bをめっきにより形成する工程で、核層2Bの表面に均一なはんだ層3Bを形成することができる。
In the solder ball 1B, by providing a plated layer of Ni as the
ここで、核層2Bあるいは機能層4B、または、核層2B及び機能層4Bから放射されるα線量が、はんだボール1Bから放射されるα線量の許容値より大きくても、核層2Bあるいは機能層4B、または、核層2B及び機能層4Bから放射されるα線をはんだ層3Bで遮蔽することで、はんだボール1Bから放射されるα線量を許容値以下に抑えることができる。
Here, even if the α dose emitted from the
そこで、はんだ層3Bは、はんだ層3B自体から放射されるα線量が、はんだボール1Bから放射されるα線量の許容値以下の金属材料で構成される。
Therefore, the
また、はんだ層3Bは、核層2Bあるいは機能層4B、または、核層2B及び機能層4Bから放射されるα線量が、はんだボール1Bから放射されるα線量の許容値より大きい場合であっても、核層2Bあるいは機能層4B、または、核層2B及び機能層4Bから放射されるα線を遮蔽することで、はんだボール1Bから放射されるα線量を許容値に抑えることができる厚さで構成される。
The
変形例のはんだボール1Bでは、核層2Bとはんだ層3Bに加えて、はんだ層3Bの内側に所定の機能層4Bを設けて多層構造とした。このような多層構造のはんだボール1Bでは、機能層4Bから放射されるα線量が、はんだボール1Bから放射されるα線量の許容値より大きい場合であっても、機能層4Bから放射されるα線をはんだ層3Bで遮蔽することができ、機能層として使用できる材料の制約を削減することができる。
In the solder ball 1B of the modified example, in addition to the
また、機能層4Bから放射されるα線量が、はんだボール1Bから放射されるα線量の許容値より小さい場合であれば、核層2Bから放射されるα線を、機能層4Bとはんだ層3Bで遮蔽することができる。
Further, if the α dose emitted from the
このように、多層構造のはんだボール1Bでは、はんだ層3B自体から放射されるα線が、はんだボール1Bから放射されるα線量の許容値以下で、かつ、はんだ層3Bが、核層2Bあるいは機能層4B、または、核層2B及び機能層4Bから放射されるα線を遮蔽して、はんだボール1Bから放射されるα線量を所定の許容値以下に抑えることができる厚さを有する構成とすれば、α線に起因するソフトエラーの発生を抑えることができる。また、核層及び機能層として使用できる材料の選択の幅を広げることができる。
As described above, in the solder ball 1B having the multilayer structure, the α ray emitted from the
これにより、α線の放射が抑えられ、接合物と被接合物との間隔を確保する等、所望の特性を有したはんだボール1Bを、安価に提供できる。 This makes it possible to provide solder balls 1B having desired characteristics, such as low radiation of α-rays and ensuring a space between the object to be bonded and the object to be bonded, at a low cost.
<本発明のはんだ材料の他の変形例>
図4は、本発明のはんだ材料の他の変形例を示す断面図である。上述した各実施の形態では、はんだ材料として、球状のはんだボールを例に説明したが、図4に示すように、球状以外の形状、例えば、直方体状、あるいは立方体状の核層2Bを、1層以上の機能層4Bとはんだ層3Bで被覆する形状としてはんだ材料1Cを構成しても良い。また、機能層4Bを設けない構成としても良い。
<Other Variations of Solder Material of the Present Invention>
FIG. 4 is a cross-sectional view showing another modification of the solder material of the present invention. In each of the above-described embodiments, a spherical solder ball has been described as an example of the solder material. However, as shown in FIG. The
また、本発明のはんだ材料が球状のはんだボールとして使用される際は、はんだボールの直径は1~1000μmであることが好ましい。この範囲にあると、球状のはんだボールを安定して製造でき、また、端子間が狭ピッチである場合の接続短絡を抑制することができる。 In addition, when the solder material of the present invention is used as a spherical solder ball, the diameter of the solder ball is preferably 1 to 1000 μm. Within this range, spherical solder balls can be stably manufactured, and connection short-circuiting when the terminals are at a narrow pitch can be suppressed.
ここで、例えば、本発明に係るはんだボールの直径が1~300μm程度である場合、「はんだボール」の集合体は「はんだパウダ」と称されてもよい。ここに、「はんだパウダ」は、上述の特性を個々のはんだパウダが備えた、多数のはんだボールの集合体である。例えば、ソルダペースト中の粉末として配合されるなど、単一のはんだボールとは使用形態において区別される。同様に、はんだバンプの形成に用いられる場合にも、集合体として通常扱われるため、そのよう形態で使用される「はんだパウダ」は単一のはんだボールとは区別される。 Here, for example, when the diameter of the solder ball according to the present invention is about 1 to 300 μm, the assembly of “solder balls” may be referred to as “solder powder”. Here, the “solder powder” is an aggregate of a large number of solder balls, each of which has the above-mentioned characteristics. For example, it is distinguished in the form of use from a single solder ball, such as being formulated as a powder in solder paste. Similarly, when used for the formation of solder bumps, it is normally treated as an assembly, so the “solder powder” used in such a form is distinguished from a single solder ball.
核層2Aとして30ppmAgを添加して球状に形成したAg30ppm-Bi、はんだ層3AとしてSn100%を使用して、はんだ層3Aの厚さを異ならせて実施例のはんだボール1Aを作成し、はんだボール1Aから放射されるα線量を測定した。比較例として、はんだ層3Aを設けていない核層2Aから放射されるα線量を測定した。
Using 30 ppmAg as the
まず、実施例で使用したはんだボール1Aの作成方法について、本発明に係る核層2AとしてAg30ppm-Biボールを用い、はんだ層3Aをバレルめっき法を用いて形成してはんだボール1Aとする場合を例に説明する。
First, with respect to the method for producing the
本発明に係る核層2Aは、公知のアトマイズ法等により形成された球状のAg30ppm-Biボールを用いた。この用意したAg30ppm-Biボールに、本発明に係るはんだ層3Aの形成方法の一例としてバレルめっき法を用いた場合を以下に説明する。
As the
はんだめっき液は、次のように作成した。撹拌容器にめっき液調整に必要な水の1/3と、54重量%のメタンスルホン酸水溶液の全容量を入れ敷水とした。次に、錯化剤であるメルカプタン化合物の一例であるアセチルシステインを入れ溶解確認後、他の錯化剤である芳香族アミノ化合物の一例である2,2’-ジチオジアニリンを入れた。薄水色のゲル状の液体になったら速やかにメタンスルホン酸第一錫を入れた。次にめっき液に必要な水の2/3を加え、最後に界面活性剤の一例であるα-ナフトールポリエトキシレート(EO10モル)3g/Lを入れ、めっき液の調整は終了した。めっき液中のメタンスルホン酸の濃度が2.64mol/L、錫イオン濃度が0.337mol/Lであるめっき液を作成した。
The solder plating solution was prepared as follows. 1/3 of the water required for adjusting the plating solution and the total volume of 54% by weight methanesulfonic acid aqueous solution were placed in the stirring vessel as the groundwater. Next, acetylcysteine, which is an example of a mercaptan compound as a complexing agent, was added and confirmed for dissolution, and 2,2'-dithiodianiline, which was an example of an aromatic amino compound as another complexing agent, was then added. When it became a light blue gel-like liquid, stannous methanesulfonate was quickly added. Next, 2/3 of the necessary water was added to the plating solution, and finally α-naphthol polyethoxylate (
実施例1、実施例2及び比較例において、核層2Aの直径は350μmとした。実施例1では、はんだ層3Aの厚さを10μmとした。実施例1では、はんだ層3Aの厚さを10μmとすることで、はんだボール1Aの直径は370μmとなる。また、実施例2では、はんだ層3Aの厚さを30μmとした。実施例2では、はんだ層3Aの厚さを30μmとすることで、はんだボール1Aの直径は410μmとなる。
In Example 1, Example 2, and Comparative Example, the diameter of the
本発明の実施例1に示す直径350μmのAg30ppm-Biボールに膜厚(片側)10μmのSnはんだめっき被膜を形成する場合、約0.048クーロンの電気量を要する。 When an Sn solder plating film having a film thickness (one side) of 10 μm is formed on an Ag30ppm-Bi ball having a diameter of 350 μm shown in Example 1 of the present invention, an electric quantity of about 0.048 coulomb is required.
また、本発明の実施例2に示す直径350μmのAg30ppm-Biボールに膜厚(片側)30μmのSnはんだめっき被膜を形成する場合、約0.16クーロンの電気量を要する。 In addition, when an Sn solder plating film having a film thickness (one side) of 30 μm is formed on an Ag30ppm-Bi ball having a diameter of 350 μm shown in Example 2 of the present invention, an amount of electricity of about 0.16 coulomb is required.
これらの電気量は、ファラディの電気分解の法則により下記式(1)により所望のはんだめっきの析出量を見積もり、電気量を算出して、算出した電気量となるように電流をめっき液に通電し、およびめっき液を流動させながらめっき処理を行う。めっき槽の容量はAg-Biボールおよびめっき液の総投入量に応じて決定することができる。 The amount of electricity is calculated by the following formula (1) according to Faraday's law of electrolysis, the desired amount of solder plating is estimated, the amount of electricity is calculated, and a current is passed through the plating solution so that the calculated amount of electricity is obtained. Then, the plating process is performed while flowing the plating solution. The capacity of the plating tank can be determined according to the total amount of Ag-Bi balls and plating solution.
w(g)=(I×t×M)/(Z×F)・・・式(1) W (g) = (I × t × M) / (Z × F) (1)
式(1)中、wは電解析出量(g)、Iは電流(A)、tは通電時間(秒)、Mは析出する元素の原子量(Snの場合、118.71)、Zは原子価(Snの場合は2価)、Fはファラディ定数(96500クーロン)であり、電気量Q(A・秒)は(I×t)で表される。 In formula (1), w is the amount of electrolytic deposition (g), I is the current (A), t is the energization time (seconds), M is the atomic weight of the deposited element (in the case of Sn, 118.71), and Z is the valence. (Sn is bivalent), F is a Faraday constant (96500 coulombs), and the quantity of electricity Q (A · sec) is represented by (I × t).
α線の測定は、JEDECに基づくガスフロー型の装置にて行った。サンプルは24時間PRガス中にて保管したものを使用し、サンプル面積は900cm2、測定時間は72時間とした。なお、最初の10時間は、空気中のα線量の誤差が生じるため、測定には使用しない。 The α ray was measured with a gas flow type apparatus based on JEDEC. The sample used was stored in PR gas for 24 hours, the sample area was 900 cm 2 , and the measurement time was 72 hours. The first 10 hours are not used for measurement because of an error in the α dose in the air.
α線量の測定結果を表1に示す。 The measurement results of α dose are shown in Table 1.
表1の比較例に示すように、はんだ層3Aを設けていない核層2Aから放射されるα線量は、0.0898cph/cm2であった。これに対して、核層2Aを被覆したはんだ層3Aの厚さを10μmとした実施例1では、はんだボール1Aから放射されるα線量は、0.0160cph/cm2であった。また、核層2Aを被覆したはんだ層3Aの厚さを30μmとした実施例2では、はんだボール1Aから放射されるα線量は、0.0107cph/cm2であった。
As shown in the comparative example in Table 1, the α dose emitted from the
以上の測定結果から、核層2Aをはんだ層3Aで被覆することで、はんだボール1Aから放射されるα線量が減少することが判った。そして、はんだ層3Aの厚さを増やすことで、はんだボール1Aから放射されるα線量が減少する傾向にあることが判った。
From the above measurement results, it was found that the α dose emitted from the
はんだボール1Aから放射されるα線量の許容値As1が0.0200cph/cm2程度である場合、核層2Aから放射されるα線量As2が、はんだボール1Aから放射されるα線量の許容値As1より大きい場合であっても、核層2Aを厚さ10μm以上のはんだ層3Aで被覆することで、はんだボール1Aから放射されるα線量を許容値As1(0.0200cph/cm2)以下に抑えられることが判った。
When the allowable value As1 of the α dose emitted from the
本発明は、BGAを適用した電子部品の実装で使用されるはんだボールに適用される。 The present invention is applied to solder balls used for mounting electronic parts to which BGA is applied.
1A,1B・・・はんだボール、2A,2B・・・核層、3A,3B・・・はんだ層、4B・・・機能層 1A, 1B ... Solder balls, 2A, 2B ... Core layer, 3A, 3B ... Solder layer, 4B ... Functional layer
Claims (9)
前記核層を被覆する被覆層とを備え、
前記被覆層は、前記核層が非溶融である温度で溶融する融点を有し、凝固することで前記接合物と前記被接合物とを接合すると共に、前記核層、前記被覆層の内側に設けられる機能層と前記機能層の内側に設けられる前記核層の何れか、あるいは、前記核層と前記機能層の双方から放射されるα線を遮蔽して、前記被覆層を透過したα線量を0.0200cph/cm2以下とする厚さを有すると共に、前記被覆層から放射されるα線量を0.0200cph/cm2以下とした金属材料で構成される
ことを特徴とするはんだ材料。 A nucleus layer having a size that secures a gap between the bonded object and the bonded object;
A coating layer covering the core layer,
The covering layer has a melting point that melts at a temperature at which the core layer is not melted, and solidifies to join the joined article and the article to be joined. The α dose that has passed through the coating layer by shielding the α-rays radiated from either the functional layer provided and the core layer provided inside the functional layer, or both the core layer and the functional layer A solder material characterized by comprising a metal material having a thickness of 0.0200 cph / cm 2 or less and an α dose emitted from the coating layer of 0.0200 cph / cm 2 or less.
ことを特徴とする請求項1に記載のはんだ材料。 The coating layer has a melting point that melts at a temperature at which the core layer is not melted, and solidifies Sn alone, an alloy material containing Sn, or Pb to solidify the bonded object and the bonded object. 2. The solder material according to claim 1, wherein the solder material is composed of any one of an alloy material containing Sn that is not contained, an In simple substance, and an alloy material containing In.
ことを特徴とする請求項2に記載のはんだ材料。 The coating layer contains Sn and one or more of Sn, Cu, Ni, Ag, Bi, Pb, Al, Fe, Zn, In, Ge, Ga, Sb, and Co as an alloy material containing Sn. It is comprised with an alloy. The solder material of Claim 2 characterized by the above-mentioned.
ことを特徴とする請求項1~請求項3の何れか1項に記載のはんだ材料。 The core layer has Cu, Ni, Ag, Bi, Pb, Al, Sn, Fe, Zn, In, Ge, Sb, Co, Mn, Au having a melting point that is not melted at a temperature at which the coating layer melts. 1 to Claims, characterized in that it is composed of a single metal, a metal oxide, a mixed metal oxide, or an alloy of Si, Pt, Cr, La, Mo, Nb, Pd, Ti, Zr, and Mg. 4. The solder material according to any one of 3 above.
ことを特徴とする請求項1~請求項3の何れか1項に記載のはんだ材料。 The solder material according to any one of claims 1 to 3, wherein the core layer is made of a resin material that is not melted at a temperature at which the coating layer melts.
ことを特徴とする請求項1~請求項5の何れか1項に記載のはんだ材料。 The solder material according to any one of claims 1 to 5, wherein the coating layer has a thickness of 1 um to 1000 um.
ことを特徴とする請求項1~請求項6の何れか1項に記載のはんだ材料。 The solder material according to any one of claims 1 to 6, wherein an α dose emitted from the coating layer is 0.0020 cph / cm 2 or less.
ことを特徴とする請求項1~請求項6の何れか1項に記載のはんだ材料。 The solder material according to any one of claims 1 to 6, wherein an α dose emitted from the coating layer is 0.0010 cph / cm 2 or less.
ことを特徴とするはんだ継手。 A solder joint formed by using the solder material according to any one of claims 1 to 8.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015516356A JP5811307B2 (en) | 2013-06-28 | 2013-06-28 | Solder material and solder joint |
| PCT/JP2013/067829 WO2014207897A1 (en) | 2013-06-28 | 2013-06-28 | Solder material and solder joint |
| TW103122212A TWI623370B (en) | 2013-06-28 | 2014-06-27 | Solder material and solder joint |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2013/067829 WO2014207897A1 (en) | 2013-06-28 | 2013-06-28 | Solder material and solder joint |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2014207897A1 true WO2014207897A1 (en) | 2014-12-31 |
Family
ID=52141295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2013/067829 Ceased WO2014207897A1 (en) | 2013-06-28 | 2013-06-28 | Solder material and solder joint |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5811307B2 (en) |
| TW (1) | TWI623370B (en) |
| WO (1) | WO2014207897A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105033498A (en) * | 2015-07-21 | 2015-11-11 | 安徽江威精密制造有限公司 | Solder composition and preparation method for solder |
| CN107419182A (en) * | 2017-07-31 | 2017-12-01 | 安徽华众焊业有限公司 | A kind of welding wire of highly corrosion resistant is firm |
| US20220212294A1 (en) * | 2019-10-25 | 2022-07-07 | Senju Metal Industry Co., Ltd. | Core material, electronic component and method for forming bump electrode |
| JP7652725B2 (en) | 2015-03-03 | 2025-03-27 | 積水化学工業株式会社 | Conductive particles, method for producing conductive particles, conductive material, and connection structure |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107511603B (en) * | 2017-09-30 | 2019-08-09 | 北京康普锡威科技有限公司 | A kind of core-shell structure bimetal composite solder powder and its preparation method |
| CN109926756B (en) * | 2019-04-17 | 2021-04-02 | 湖北三环锻造有限公司 | Welding rod for brazing process |
| KR20220032918A (en) | 2020-09-08 | 2022-03-15 | 삼성전자주식회사 | Hybrid bonding structure and semiconductor device having the same |
| KR20220040307A (en) | 2020-09-23 | 2022-03-30 | 삼성전자주식회사 | Hybrid bonding structure, semiconductor device having the same and method of manufacturing semiconductor device |
| CN113399863B (en) * | 2021-06-25 | 2022-06-21 | 西安热工研究院有限公司 | Ni-Cu-Ag-Co welding wire for welding TA1-Q345 middle layer and preparation method thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1180852A (en) * | 1997-09-02 | 1999-03-26 | Mitsubishi Materials Corp | Method for producing low alpha dose tin |
| JPH11111885A (en) * | 1997-10-07 | 1999-04-23 | Sony Corp | Semiconductor device and manufacturing method thereof |
| JPH11330678A (en) * | 1998-05-11 | 1999-11-30 | Fujitsu Ltd | Solder joining method, circuit board, and electronic device using the circuit board |
| WO2004030428A1 (en) * | 2002-09-27 | 2004-04-08 | Neomax Materials Co., Ltd. | Solder-coated ball and method for manufacture thereof, and method for forming semiconductor interconnecting structure |
| JP2005036301A (en) * | 2003-06-23 | 2005-02-10 | Allied Material Corp | Fine metal sphere and method for producing the same |
| WO2007004394A1 (en) * | 2005-07-01 | 2007-01-11 | Nippon Mining & Metals Co., Ltd. | High-purity tin or tin alloy and process for producing high-purity tin |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0910986A (en) * | 1995-06-23 | 1997-01-14 | Senju Metal Ind Co Ltd | Metallic sphere for energizing in electronic parts |
| JP3924552B2 (en) * | 2003-06-16 | 2007-06-06 | シャープ株式会社 | Conductive ball and method for forming external electrode of electronic component using the same |
-
2013
- 2013-06-28 JP JP2015516356A patent/JP5811307B2/en active Active
- 2013-06-28 WO PCT/JP2013/067829 patent/WO2014207897A1/en not_active Ceased
-
2014
- 2014-06-27 TW TW103122212A patent/TWI623370B/en active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1180852A (en) * | 1997-09-02 | 1999-03-26 | Mitsubishi Materials Corp | Method for producing low alpha dose tin |
| JPH11111885A (en) * | 1997-10-07 | 1999-04-23 | Sony Corp | Semiconductor device and manufacturing method thereof |
| JPH11330678A (en) * | 1998-05-11 | 1999-11-30 | Fujitsu Ltd | Solder joining method, circuit board, and electronic device using the circuit board |
| WO2004030428A1 (en) * | 2002-09-27 | 2004-04-08 | Neomax Materials Co., Ltd. | Solder-coated ball and method for manufacture thereof, and method for forming semiconductor interconnecting structure |
| JP2005036301A (en) * | 2003-06-23 | 2005-02-10 | Allied Material Corp | Fine metal sphere and method for producing the same |
| WO2007004394A1 (en) * | 2005-07-01 | 2007-01-11 | Nippon Mining & Metals Co., Ltd. | High-purity tin or tin alloy and process for producing high-purity tin |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7652725B2 (en) | 2015-03-03 | 2025-03-27 | 積水化学工業株式会社 | Conductive particles, method for producing conductive particles, conductive material, and connection structure |
| CN105033498A (en) * | 2015-07-21 | 2015-11-11 | 安徽江威精密制造有限公司 | Solder composition and preparation method for solder |
| CN105033498B (en) * | 2015-07-21 | 2017-12-05 | 重庆市巴南区环美金属加工厂 | The preparation method of solder composition and solder |
| CN107419182A (en) * | 2017-07-31 | 2017-12-01 | 安徽华众焊业有限公司 | A kind of welding wire of highly corrosion resistant is firm |
| US20220212294A1 (en) * | 2019-10-25 | 2022-07-07 | Senju Metal Industry Co., Ltd. | Core material, electronic component and method for forming bump electrode |
| US11872656B2 (en) * | 2019-10-25 | 2024-01-16 | Senju Metal Industry Co., Ltd. | Core material, electronic component and method for forming bump electrode |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201527030A (en) | 2015-07-16 |
| JPWO2014207897A1 (en) | 2017-02-23 |
| JP5811307B2 (en) | 2015-11-11 |
| TWI623370B (en) | 2018-05-11 |
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