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WO2014013735A1 - Sonde ultrasonore - Google Patents

Sonde ultrasonore Download PDF

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Publication number
WO2014013735A1
WO2014013735A1 PCT/JP2013/004374 JP2013004374W WO2014013735A1 WO 2014013735 A1 WO2014013735 A1 WO 2014013735A1 JP 2013004374 W JP2013004374 W JP 2013004374W WO 2014013735 A1 WO2014013735 A1 WO 2014013735A1
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WIPO (PCT)
Prior art keywords
layer
acoustic matching
acoustic
ultrasonic probe
layers
Prior art date
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Ceased
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PCT/JP2013/004374
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English (en)
Japanese (ja)
Inventor
孝悦 斉藤
仁 小澤
美有紀 小西
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Panasonic Corp
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Panasonic Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B06B1/067—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface which is used as, or combined with, an impedance matching layer
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/02—Mechanical acoustic impedances; Impedance matching, e.g. by horns; Acoustic resonators

Definitions

  • the present invention relates to an ultrasonic probe used for obtaining an ultrasonic image of a subject by applying ultrasonic waves to a subject such as a living body.
  • the ultrasonic diagnostic apparatus applies information to a living subject such as a human being or an animal, and displays a tomographic image of the in vivo tissue based on the reflected signal on the monitor, thereby providing information necessary for the diagnosis of the subject. I will provide a.
  • the user of the ultrasonic diagnostic apparatus uses an ultrasonic probe including a sensor that transmits an ultrasonic signal to the subject and receives an ultrasonic signal that is a reflected signal in the subject.
  • FIG. 10 is a schematic perspective view showing an example of an ultrasonic probe.
  • An ultrasonic probe 100 shown in FIG. 10 includes a plurality of piezoelectric elements 11 arranged to transmit and receive ultrasonic signals to and from a subject (not shown), and a front surface of the piezoelectric elements 11 on the subject side.
  • the lens 13 and the back surface load material 14 provided in the back surface on the opposite side to the acoustic matching layer 12 of the piezoelectric element 11 are provided.
  • Electrodes (not shown) are arranged on the front and back surfaces of the piezoelectric element 11, respectively.
  • An ultrasonic wave is generated by applying a voltage to the electrode and vibrating the piezoelectric element 11.
  • the piezoelectric element 11 is formed of a piezoelectric ceramic such as a PZT system, a single crystal such as PMN-PT, a composite piezoelectric material in which the material is combined with a polymer, a polymer piezoelectric material represented by PVDF, or the like. .
  • the piezoelectric element 11 converts the voltage into an ultrasonic wave and transmits it to the subject, receives the ultrasonic wave reflected in the subject and converts it into an electrical signal.
  • a plurality of piezoelectric elements 11 are arranged in the X-axis direction.
  • Such a plurality of arrangements of the piezoelectric elements 11 is a so-called “electronic scanning type” in which ultrasonic waves are electronically scanned.
  • This type of ultrasonic probe can deflect or focus an ultrasonic beam by phase control, and further electronically sequentially switch and scan a plurality of piezoelectric elements 11 to image an ultrasonic tomography in real time. To do.
  • an ultrasonic probe of a type in which a single piezoelectric element is mechanically scanned to image an ultrasonic tomography with almost no time difference.
  • the acoustic lens 13 plays a role of narrowing the ultrasonic beam in order to increase the resolution of the diagnostic image.
  • the acoustic lens 13 extends along the Y direction (direction orthogonal to the arrangement direction X of the piezoelectric elements 11) shown in FIG. 10 and is formed in a smooth convex shape in the Z direction.
  • the sound beam can be narrowed in the Y direction.
  • the acoustic lens 13 is an optional element and is provided as necessary.
  • the back load material 14 is coupled to and holds the piezoelectric element 11 and further attenuates unnecessary ultrasonic waves.
  • the back load material 14 is also an optional element and is provided as necessary.
  • the acoustic matching layer 12 is provided to prevent a reduction in sensitivity and resolution caused by the mismatch because the difference in acoustic impedance between the piezoelectric element 11 and the subject is large. In recent years, in order to achieve further higher resolution, studies have been made to increase the frequency bandwidth. As one of the methods, it can be considered that the acoustic matching layer provided on the subject side of the piezoelectric element is multi-layered into three or more layers (for example, refer to Patent Documents 1 and 2).
  • the material of the layer on the subject side of the multilayered acoustic matching layer is a thermosetting material produced by bridging polystyrene with divinylbenzene having an acoustic impedance of 2.44 megarails as shown in Patent Document 1.
  • LDPE low density polyethylene
  • the X-axis direction shown in FIG. 10 is the “(piezoelectric element) arrangement direction”
  • the Y-axis direction is the “(piezoelectric element) width direction”
  • the Z-axis direction is “(piezoelectric element)”. ) "Thickness direction”.
  • the acoustic matching layer has a multi-layered structure, not only the frequency characteristics are broadened, but also the frequency characteristics vary greatly depending on how the acoustic impedance value of the acoustic matching layer provided on the subject side is selected. Since the frequency characteristic greatly affects the resolution of the ultrasonic image, it is important how to select the acoustic impedance value of each layer of the acoustic matching layer and use a material that matches the selected value.
  • thermosetting material generated by cross-linked polystyrene with divinylbenzene is used as the material of the object side layer of the multilayered acoustic matching layer. Since the acoustic impedance of the layer provided on the subject side is large, the low frequency range is high, the frequency characteristics are rippled, and the pulse length is long. For this reason, even if the bandwidth can be increased, the resolution is remarkably reduced from a shallow region to a subject having frequency-dependent attenuation. Furthermore, the resolution decreases as the depth increases, making it difficult to obtain a high-resolution image.
  • An object of the present invention is to provide a high-quality ultrasonic probe capable of obtaining a high-resolution ultrasonic image.
  • the present invention includes a piezoelectric element having a first surface and a second surface, a first electrode connected to the first surface, a second electrode connected to the second surface, And an acoustic probe having a configuration in which a mixture of a resin and an elastomer is used for at least a part of the acoustic matching layer.
  • the acoustic matching layer may be composed of a plurality of layers, and at least a part of the acoustic matching layer may be a layer that is present at a position farthest from the piezoelectric element among the plurality of layers. Good.
  • the present invention may be characterized in that only a layer that is present at a position farthest from the piezoelectric element among the plurality of layers is a layer in which a mixture is used.
  • the present invention may be characterized in that the resin is styrene or a styrene-methyl methacrylate copolymer.
  • the present invention may be characterized in that the elastomer is synthetic rubber or natural rubber.
  • the present invention may be characterized in that the synthetic rubber is butadiene.
  • the present invention may be characterized in that the acoustic matching layer is composed of a plurality of layers, and each acoustic impedance of the plurality of layers gradually decreases from a layer closer to the piezoelectric element to a layer farther away.
  • the present invention may be characterized in that the acoustic matching layer is composed of three layers.
  • At least a part of the acoustic matching layer is a layer that is present at a position farthest from the piezoelectric element among the three layers, and the acoustic impedance of at least a part of the acoustic matching layer is 1.9 to The value may be in the range of 2.3 megarails.
  • the acoustic matching layer is a layer that is present at a position farthest from the piezoelectric element among the three layers, the resin is styrene, the elastomer is butadiene, and is mixed with styrene.
  • the blending weight ratio of butadiene may be in the range of 3 to 29%.
  • the present invention may be characterized in that the acoustic matching layer is composed of four layers.
  • At least a part of the acoustic matching layers is a layer that is present at a position farthest from the piezoelectric element among the four layers, and an acoustic impedance of at least a part of the acoustic matching layers is 1.8 to The value may be in the range of 2.28 megarails.
  • the acoustic matching layer is a layer that is present at a position farthest from the piezoelectric element among the four layers, the resin is styrene, the elastomer is butadiene, and is mixed with styrene.
  • the blending weight ratio of butadiene may be in the range of 4 to 40%.
  • the present invention may be characterized in that the acoustic matching layer is composed of five layers.
  • At least a part of the acoustic matching layers is a layer that is present at a position farthest from the piezoelectric element among the five layers, and an acoustic impedance of at least a part of the acoustic matching layers is 1.6 to The value may be in the range of 1.8 megarails.
  • the acoustic matching layer is a layer that is present at a position farthest from the piezoelectric element among the five layers, the resin is styrene, the elastomer is butadiene, and is mixed with styrene.
  • the blending weight ratio of butadiene may be in the range of 40 to 68%.
  • the present invention may be characterized in that the conductive foil electrically connected to the first electrode is formed between the piezoelectric element and the acoustic matching layer.
  • the frequency characteristics and pulse having a wide band and a smooth shape are used.
  • a characteristic having a short length can be obtained.
  • 1 is a schematic sectional view showing an ultrasonic probe according to a first embodiment of the present invention.
  • 1 is a schematic perspective view showing an ultrasonic probe according to a first embodiment of the present invention.
  • the figure which shows the relationship between the acoustic impedance of a 3rd acoustic matching layer, a frequency ratio band, and a pulse length.
  • Diagram showing the relationship between the weight ratio of butadiene to styrene and acoustic impedance
  • Schematic perspective view showing an ultrasonic probe according to a second embodiment of the present invention The figure which shows the relationship between the acoustic impedance of a 4th acoustic matching layer, a frequency ratio band, and a pulse length.
  • FIG. 1 Schematic perspective view showing an ultrasonic probe according to a third embodiment of the present invention.
  • FIG. 1 is a schematic cross-sectional view showing the ultrasonic probe of the first embodiment.
  • FIG. 2 is a schematic perspective view showing the ultrasonic probe of the first embodiment.
  • the ultrasonic probe can be used by being electrically connected to the main body of the ultrasonic diagnostic apparatus via a cable when configuring the ultrasonic diagnostic apparatus.
  • the ultrasonic probe transmits and receives ultrasonic waves, converts the received waves into electric signals, and transmits them to the main body of the ultrasonic diagnostic apparatus.
  • An image is generated by the signal processing unit in the ultrasonic diagnostic apparatus, and the image is displayed on the display unit.
  • An ultrasonic probe 10 shown in FIG. 1 includes a piezoelectric element 1, a ground electrode 5, a signal electrode 6, a signal electrical terminal 7, a back load material 3, an acoustic matching layer 2, and an acoustic lens 4. Is provided.
  • the piezoelectric element 1 is formed of a piezoelectric ceramic such as a PZT system, a piezoelectric single crystal such as a PZN-PT or PMN-PT system, or a composite piezoelectric body in which the material is combined with a polymer, and transmits / receives ultrasonic waves.
  • the ground electrode 5 is provided on one surface of the piezoelectric element 1 by evaporating or sputtering gold or silver, or by baking silver. The ground electrode 5 is electrically connected to the one surface of the piezoelectric element 1.
  • the signal electrode 6 is opposite to the one surface of the piezoelectric element 1 provided with the ground electrode 5 by vapor deposition or sputtering of gold or silver, or by baking of silver. Provided on one side.
  • the signal electrode 6 is electrically connected to the other surface of the piezoelectric element 1.
  • the signal electrical terminal 7 is electrically connected to the signal electrode 6.
  • the back load material 3 physically holds the piezoelectric element 1 and attenuates unnecessary ultrasonic signals as necessary.
  • the acoustic matching layer 2 is provided on the ground electrode 5 of the piezoelectric element 1.
  • the acoustic matching layer 2 is composed of three layers (in FIG. 1, 2a, 2b, and 2c from the piezoelectric element 1 side, respectively).
  • each layer constituting the acoustic matching layer 2 is referred to as an “acoustic matching divided layer”.
  • the first acoustic matching division layer 2a, the second acoustic matching division layer 2b, and the third acoustic matching division layer 2c are laminated in this order from the piezoelectric element 1 side to the subject side. Yes.
  • the acoustic lens 4 is an optional element and is disposed on the acoustic matching layer 2. Further, in the example shown in FIG. 1, the piezoelectric element 1 and the acoustic matching layer 2 are individually divided, and the divided groove portions are made of silicone rubber or urethane rubber having a small acoustic coupling. The material is filled.
  • the piezoelectric element 1 When a voltage is applied to the ground electrode 5 and the signal electrode 6 from the main body of an ultrasonic diagnostic apparatus (not shown) to which the ultrasonic probe 10 is connected, the piezoelectric element 1 mechanically vibrates and generates ultrasonic waves. .
  • the ultrasonic waves generated by the piezoelectric element 1 propagate through the acoustic matching layer 2 and are transmitted to the subject.
  • the piezoelectric element 1 receives a reflected wave from the subject.
  • An ultrasound probe of an ultrasound diagnostic apparatus that uses a living body as a subject is a reflection that is directly contacted with the living body or indirectly through an ultrasound propagation medium, and transmits ultrasonic waves to the living body and is reflected from the living body. It is a so-called sensor that receives waves again.
  • the signal received by the ultrasonic probe is processed by the main body of the ultrasonic diagnostic apparatus, and the image displayed on the monitor is used for diagnosis and the like.
  • a material having an acoustic impedance in the range of 8 to 20 megarails is used.
  • the material include glass such as silicon, quartz, and fused quartz, free-cutting ceramics, or graphite filled with metal powder.
  • a material having an acoustic impedance in the range of 3 to 8 megarails is used for the second acoustic matching division layer 2b.
  • the material is, for example, graphite or an epoxy resin in which an epoxy resin is filled with a filler such as a metal or an oxide.
  • the third acoustic matching divided layer 2c provided at the position farthest from the piezoelectric element 1 in the acoustic matching layer 2 is a mixture of at least two kinds of materials including an elastomer material, for example, an elastomer material mixed with a resin material.
  • an elastomer material for example, an elastomer material mixed with a resin material.
  • the material is used and the acoustic impedance has a value in the range of 1.9 to 2.3 megarails.
  • a mixture in which an elastomer material is mixed with a resin material includes a copolymer of the resin material and the elastomer.
  • the acoustic impedance of each acoustic matching divided layer decreases in order from the layer close to the piezoelectric element 1 toward the layer close to the subject.
  • the third acoustic matching division layer 2c is made of a mixture containing an elastomer material, it has high adhesiveness. Moreover, since the material of the 3rd acoustic matching division
  • FIG. 3 is a diagram illustrating the relationship between the acoustic impedance of the third acoustic matching division layer 2c, the pulse length, and the frequency ratio band.
  • the horizontal axis of the graph shown in FIG. 3 indicates the acoustic impedance (unit: megarails) of the third acoustic matching division layer 2c.
  • the vertical axis on the left side of the graph represents the pulse length (unit: ⁇ s), and the vertical axis on the right side represents the frequency ratio band (bandwidth / center frequency) (unit: percent).
  • the center frequency of the ultrasonic wave is set to 7.5 MHz
  • the acoustic impedance of the back load material 3 is 7 megarails
  • the piezoelectric element 1 is equivalent to PZT-5H with PZT-based piezoelectric ceramics.
  • the first acoustic matching divided layer 2a is made of a free-cutting ceramic having an acoustic impedance of 13 megarails
  • the second acoustic matching divided layer 2b is made of an epoxy resin filled with metal powder having an acoustic impedance of 4 megarails.
  • the frequency ratio band and the pulse length were calculated in a configuration in which the acoustic impedance of the third acoustic matching divided layer 2c located closest to the subject was varied in the range of 1.6 to 2.6 megarails.
  • Each thickness of the first to third acoustic matching division layers 2a, 2b, and 2c was set to 0.25 wavelength.
  • the frequency ratio band is indicated by a solid line with a value of ⁇ 6 dB
  • the pulse length is indicated with a broken line at values of ⁇ 6 dB, ⁇ 20 dB, and ⁇ 40 dB.
  • the pulse length value is relatively large when the acoustic impedance is less than 1.9 megarails and greater than 2.3 megarails.
  • the pulse length value becomes relatively large when the acoustic impedance becomes a value smaller than 1.7 megarails. The smaller the pulse length, the higher the resolution and the better. Therefore, it is important to reduce the pulse length to improve the resolution.
  • the frequency ratio band is desirably 90% or more.
  • the frequency ratio band is 90% or more when the acoustic impedance of the third acoustic matching division layer 2c is 1.75 megarails or more and 2.4 megarails or less.
  • the frequency ratio band is large and the pulse length is short. This indicates that the shape of the frequency characteristic of the ultrasonic wave is smooth and close to the shape of a normal distribution.
  • the acoustic impedance of the third acoustic matching division layer 2c is preferably in the range of 1.9 megarails or more and 2.3 megarails or less. .
  • FIG. 4 is a graph showing the relationship between the weight ratio of butadiene to styrene and acoustic impedance.
  • the horizontal axis of the graph shown in FIG. 4 shows the value of the mixed filling weight ratio (unit: percent) in which butadiene is blended with styrene. That is, a value of 0 on the horizontal axis indicates 100% styrene, and a value of 100 indicates 100% butadiene.
  • shaft of the same graph shows acoustic impedance (a unit is Megarails).
  • the acoustic impedance of 100% styrene (value of 0 on the horizontal axis) is 2.42 megarails
  • the acoustic impedance of 100% butadiene (value of 100 on the horizontal axis) is 1.37. Megarails.
  • the acoustic impedance of the mixture is 2.25 (sound speed is 2165 m / sec.) And 2.17 (sound speed is 2107 m / sec.), Respectively. ), 2.07 (sound speed is 2028 m / sec.), 1.87 (sound speed is 1853 m / sec.) Megarails.
  • acoustic impedance shows the value computed from the density x sound speed by measuring the density and sound speed of the produced material at 25 degreeC.
  • Weight of butadiene mixed with styrene when used for the third acoustic matching divided layer 2c which is in the range of 1.9 to 2.3 megarails, which is a preferable range of the acoustic impedance of the third acoustic matching divided layer 2c. Since the ratio is in the range of 3 to 29%, it is preferable to mix butadiene with styrene at a filling weight ratio in this range.
  • a mixture of styrene and butadiene has the advantage that it can be easily formed into a film of any thickness in the same way as a method of forming a resin material into a film, and can be manufactured with extremely large amounts with high accuracy. Can be lowered. Moreover, since butadiene is mixed, the adhesiveness is better than that of styrene alone, and a high-quality ultrasonic probe can be obtained.
  • the acoustic matching layer 2 having a three-layer structure as a material for the third acoustic matching divided layer 2c provided on the subject side, a mixture of styrene and butadiene mixed at an arbitrary filling weight ratio is used.
  • a characteristic in which the frequency bandwidth is wide and the pulse length is short that is, the frequency characteristic of the ultrasonic wave is close to a normal distribution. For this reason, an ultrasonic probe capable of obtaining a high-resolution ultrasonic image can be realized.
  • the case where the acoustic impedances of the first and second acoustic matching divided layers 2a and 2b are 13 megarails and 4 megarails, respectively.
  • the acoustic impedance of the first acoustic matching division layer 2a varies in the range of 8 to 20 megarails
  • the acoustic impedance of the second acoustic matching division layer 2b varies in the range of 3 to 8 megarails
  • the respective combinations As for the acoustic impedance of the third acoustic matching division layer 2c an optimum value is calculated.
  • the preferred acoustic impedance value of the third acoustic matching division layer 2c does not deviate significantly from the range of 1.9 to 2.3 megarails.
  • the configuration shown in FIG. 2 in which the piezoelectric elements 1 are arranged one-dimensionally has been described.
  • the present embodiment is applied to a two-dimensional array-type electronic scanning ultrasonic probe in which a plurality of the configurations are arranged.
  • the same effect can be obtained.
  • the three acoustic matching layers 2 corresponding to the piezoelectric element 1 are also divided into a plurality of pieces in the X-axis direction
  • the first and second acoustic matching divided layers 2a and 2b are divided into the third
  • the acoustic matching division layer 2c may be produced without being divided. Further, the same effect can be obtained even when applied to an ultrasonic probe of a single piezoelectric element.
  • the resin material is preferably a synthetic resin. Synthetic resins can be broadly classified into thermoplastic resins and thermosetting resins. As the thermosetting resin material, for example, phenol resin, epoxy resin, or urethane resin can be used.
  • the resin material is not limited to these resin materials as long as it is a material that can be mixed with the elastomer material in addition to the resin materials described above, but it is particularly preferable to use a thermoplastic material.
  • the thermoplastic resin material When producing a mixture of a resin material and an elastomer, the thermoplastic resin material can be made into a mixture in which an elastomer or the like is uniformly dispersed by a uniaxial or biaxial kneading extruder, and this mixture is extruded. Can be molded. For this reason, the material of the uniform acoustic characteristic with few dispersion
  • the present invention is not limited to this as long as it is an elastomer material that can create a mixture of a natural rubber or a synthetic rubber material with a resin material. . Note that it is more preferable to select an elastomer material having a small ultrasonic attenuation, such as butadiene. This is because the ultrasonic attenuation of the material when the mixture is made can be reduced.
  • the acoustic matching layer is preferably made of a material having a small ultrasonic attenuation.
  • the acoustic matching layer 2 having a three-layer structure has been described.
  • the acoustic impedance of the piezoelectric element 1 is made of a material having a low acoustic impedance, for example, a composite piezoelectric body of PZT piezoelectric ceramic and epoxy resin, and the acoustic impedance is about 15 megarails or less.
  • the acoustic matching layer 2 can be constituted by one layer or two layers, and a wide band can be realized.
  • a layer made of a mixture of a resin material and an elastomer material may be used for one or two acoustic matching layers.
  • FIG. 5 is a schematic perspective view showing the ultrasonic probe of the second embodiment.
  • the ultrasonic probe 20 of the second embodiment shown in FIG. 5 has the same configuration except for the configuration of the acoustic matching layer 2 provided in the ultrasonic probe 10 of the first embodiment shown in FIG. 1 and FIG.
  • Have The same components as those included in the ultrasound probe 10 of the first embodiment are denoted by the same reference numerals, and description thereof is omitted.
  • the ultrasonic probe 20 includes the piezoelectric element 1, the ground electrode 5, the signal electrode 6, the signal electrical terminal 7, the back load material 3 and the acoustic lens 4, and the acoustic matching layer 202, similar to the first embodiment. .
  • the piezoelectric element 1 and the acoustic matching layer 202 are individually divided, and a material such as silicone rubber or urethane rubber having a small acoustic coupling is formed in the divided groove portions. Filled.
  • the acoustic matching layer 202 is provided on the ground electrode 5 of the piezoelectric element 1.
  • the acoustic matching layer 202 is composed of four layers (202a, 202b, 202c, and 202d from the piezoelectric element 1 side in FIG. 5).
  • Each layer constituting the acoustic matching layer 202 is referred to as an “acoustic matching division layer”.
  • the first acoustic matching divided layer 202a, the second acoustic matching divided layer 202b, the third acoustic matching divided layer 202c, and the fourth acoustic matching are performed from the piezoelectric element 1 side to the subject side.
  • the divided layers 202d are stacked in this order.
  • a material having an acoustic impedance in the range of 15 to 25 megarails is used for the first acoustic matching division layer 202a.
  • the material is, for example, silicon single crystal, quartz, glass such as fused quartz, or free-cutting ceramics.
  • a material having an acoustic impedance in the range of 6 to 12 megarails is used for the second acoustic matching division layer 202b.
  • the material is, for example, graphite or an epoxy resin in which an epoxy resin is filled with a filler such as a metal or an oxide.
  • a material having an acoustic impedance in the range of 3 to 5 megarails is used for the third acoustic matching division layer 202c.
  • the material is, for example, graphite, a resin material, or an epoxy resin in which an epoxy resin is filled with a filler such as a metal or an oxide.
  • the fourth acoustic matching division layer 202d provided at the position farthest from the piezoelectric element 1 in the acoustic matching layer 202 is a mixture of at least two kinds of materials including an elastomer material, for example, an elastomer material mixed with a resin material.
  • the material is used and the acoustic impedance has a value in the range of 1.8-2.28 megarails.
  • a mixture in which an elastomer material is mixed with a resin material includes a copolymer of the resin material and the elastomer.
  • the acoustic impedance of each acoustic matching divided layer decreases in order from the layer close to the piezoelectric element 1 toward the layer close to the subject.
  • the fourth acoustic matching divided layer 202d is made of a mixture containing an elastomer material, and thus has high adhesiveness. Moreover, since the material of the 4th acoustic matching division
  • FIG. 6 is a diagram illustrating the relationship between the acoustic impedance of the fourth acoustic matching division layer 202d, the pulse length, and the frequency ratio band.
  • the horizontal axis of the graph shown in FIG. 6 indicates the acoustic impedance (unit: megarails) of the fourth acoustic matching division layer 202d.
  • the vertical axis on the left side of the graph represents the pulse length (unit: ⁇ s), and the vertical axis on the right side represents the frequency ratio band (bandwidth / center frequency) (unit: percent).
  • the center frequency of the ultrasonic wave is set to 7.5 MHz
  • the acoustic impedance of the back load material 3 is 7 megarails
  • the piezoelectric element 1 is PZT-based piezoelectric ceramics corresponding to PZT-5H.
  • the first acoustic matching division layer 202a is made of a free-cutting ceramic having an acoustic impedance of 17 megarails
  • the second acoustic matching division layer 202b is made of an epoxy resin filled with metal powder having an acoustic impedance of 8 megarails.
  • the third acoustic matching divided layer 202c is made of epoxy resin filled with metal powder having an acoustic impedance of 3.8 megarails, and the acoustic impedance of the fourth acoustic matching divided layer 202d located closest to the subject is 1.
  • Luth length was calculated.
  • the thickness of the first acoustic matching division layer 202a was 0.27 wavelength
  • the thickness of each of the second to fourth acoustic matching division layers 202b, 202c, 202d was 0.25 wavelength.
  • the value of the frequency ratio band at ⁇ 6 dB is indicated by a solid line
  • the pulse length is indicated by a broken line at values of ⁇ 6 dB, ⁇ 20 dB, and ⁇ 40 dB.
  • the frequency ratio band is desirably 90% or more.
  • the frequency ratio band is 90% or more when the acoustic impedance of the fourth acoustic matching division layer 202d is 1.6 megarails or more and 2.28 megarails or less.
  • the frequency ratio band is more preferably 95% or more, and the acoustic impedance of the fourth acoustic matching division layer 202d in this case is 1.65 megarails or more and 2.07 megarails or less.
  • the frequency ratio band is large and the pulse length is short. This indicates that the shape of the frequency characteristic of the ultrasonic wave is smooth and close to the shape of a normal distribution.
  • the acoustic impedance of the fourth acoustic matching divided layer 202d is preferably in the range of 1.8 megarails to 2.28 megarails. Furthermore, the acoustic impedance of the fourth acoustic matching division layer 202d is more preferably in the range of 1.8 megarails to 2.07 megarails.
  • the mixing ratio when a mixture of styrene which is a resin material and butadiene which is one of synthetic rubber materials is used as the material of the fourth acoustic matching divided layer 202d will be described with reference to FIG.
  • Load weight of butadiene mixed with styrene when used for the fourth acoustic matching divided layer 202d which is in the range of 1.8 to 2.28 megarails, which is a preferable range of acoustic impedance of the fourth acoustic matching divided layer 202d. Since the ratio is in the range of 4 to 40%, it is preferable to mix butadiene with styrene at a filling weight ratio in this range. Further, it is more preferable if the filling weight ratio is in the range of 5 to 40%.
  • a mixture of styrene and butadiene has the advantage that it can be easily formed into a film of any thickness in the same way as a method of forming a resin material into a film, and can be manufactured with extremely large amounts with high accuracy. Can be lowered. Moreover, since butadiene is mixed, the adhesiveness is better than that of styrene alone, and a high-quality ultrasonic probe can be obtained.
  • the frequency of the four-layer structure shown in FIG. There is also a region where the ratio band is large and the frequency ratio band is 100% or more.
  • the frequency bandwidth As described above, as the number of layers constituting the acoustic matching layer increases, it is possible to increase the frequency bandwidth, which tends to be a desirable characteristic for realizing high resolution.
  • the acoustic matching layer 202 having a four-layer structure as a material of the fourth acoustic matching divided layer 202d provided on the subject side, a mixture of styrene and butadiene mixed at an arbitrary filling weight ratio is used.
  • a characteristic in which the frequency bandwidth is wide and the pulse length is short that is, the frequency characteristic of the ultrasonic wave is close to a normal distribution. For this reason, an ultrasonic probe capable of obtaining a high-resolution ultrasonic image can be realized.
  • the acoustic impedances of the first acoustic matching divided layer 202a, the second acoustic matching divided layer 202b, and the third acoustic matching divided layer 202c are 17 megarails, 8 megarails, and 3.8 megarails, respectively.
  • the acoustic impedances of the first acoustic matching divided layer 202a, the second acoustic matching divided layer 202b, and the third acoustic matching divided layer 202c are 17 megarails, 8 megarails, and 3.8 megarails, respectively.
  • the acoustic impedance of the first acoustic matching division layer 202a varies in the range of 15 to 25 megarails
  • the acoustic impedance of the second acoustic matching division layer 202b varies in the range of 6 to 12 megarails
  • the third acoustic matching division When the acoustic impedance of the layer 202c fluctuates in the range of 3 to 5 megarails, the optimum value of the acoustic impedance of the fourth acoustic matching division layer 202d is calculated for each combination.
  • the preferred acoustic impedance value of the fourth acoustic matching splitting layer 202d does not deviate significantly from the range of 1.8-2.28 megarails.
  • the configuration shown in FIG. 5 in which the piezoelectric elements 1 are arranged one-dimensionally has been described.
  • the present embodiment is applied to a two-dimensional array-type electronic scanning ultrasonic probe in which a plurality of the configurations are arranged.
  • the same effect can be obtained.
  • the four acoustic matching layers 202 corresponding to the piezoelectric element 1 are also divided into a plurality of pieces in the X-axis direction, the first, second, and third acoustic matching divided layers 202a, 202b, and 202c are divided.
  • the fourth acoustic matching divided layer 202d may be manufactured without being divided. Further, the same effect can be obtained even when applied to an ultrasonic probe of a single piezoelectric element.
  • the resin material is preferably a synthetic resin. Synthetic resins can be broadly classified into thermoplastic resins and thermosetting resins. As the thermosetting resin material, for example, phenol resin, epoxy resin, or urethane resin can be used.
  • the resin material is not limited to these resin materials as long as it is a material that can be mixed with the elastomer material in addition to the resin materials described above, but it is particularly preferable to use a thermoplastic material.
  • the thermoplastic resin material When producing a mixture of a resin material and an elastomer, the thermoplastic resin material can be made into a mixture in which an elastomer or the like is uniformly dispersed by a uniaxial or biaxial kneading extruder, and this mixture is extruded. Can be molded. For this reason, the material of the uniform acoustic characteristic with few dispersion
  • the present invention is not limited to this as long as it is an elastomer material that can create a mixture of a natural rubber or a synthetic rubber material with a resin material. . Note that it is more preferable to select an elastomer material having a small ultrasonic attenuation, such as butadiene. This is because the ultrasonic attenuation of the material when the mixture is made can be reduced.
  • the acoustic matching layer is preferably made of a material having a small ultrasonic attenuation.
  • the material of the fourth acoustic matching divided layer 202d it has been described that two kinds of mixtures of styrene and butadiene are used as the material of the fourth acoustic matching divided layer 202d.
  • other materials such as fibrous materials when strength needs to be increased, and powders such as oxides are added when hardness is increased.
  • the same effect can be obtained if the acoustic impedance in the above range can be obtained.
  • FIG. 7 is a schematic perspective view showing the ultrasonic probe of the second embodiment.
  • the ultrasonic probe 30 of the third embodiment shown in FIG. 7 has the same configuration except for the configuration of the acoustic matching layer 2 provided in the ultrasonic probe 10 of the first embodiment shown in FIG. 1 and FIG.
  • Have The same components as those included in the ultrasound probe 10 of the first embodiment are denoted by the same reference numerals, and description thereof is omitted.
  • the ultrasonic probe 30 includes the piezoelectric element 1, the ground electrode 5, the signal electrode 6, the signal electrical terminal 7, the back load material 3 and the acoustic lens 4, and the acoustic matching layer 302, similar to the first embodiment. .
  • the piezoelectric element 1 and the acoustic matching layer 302 are divided individually, and a material such as silicone rubber or urethane rubber having a small acoustic coupling is formed in the divided groove portions. Filled.
  • the acoustic matching layer 302 is provided on the ground electrode 5 of the piezoelectric element 1.
  • the acoustic matching layer 302 includes five layers (302a, 302b, 302c, 302d, and 302e from the piezoelectric element 1 side in FIG. 7).
  • Each layer constituting the acoustic matching layer 302 is referred to as an “acoustic matching division layer”.
  • the first acoustic matching divided layer 302a, the second acoustic matching divided layer 302b, the third acoustic matching divided layer 302c, and the fourth acoustic matching are performed from the piezoelectric element 1 side to the subject side.
  • the division layer 302d and the fifth acoustic matching division layer 302e are stacked in this order.
  • a material having an acoustic impedance in the range of 15 to 25 megarails is used for the first acoustic matching division layer 302a.
  • the material is, for example, silicon single crystal, quartz, glass such as fused quartz, or free-cutting ceramics.
  • the second acoustic matching division layer 302b is made of a material having an acoustic impedance in the range of 8 to 14 megarails.
  • the material is, for example, graphite filled with metal or oxide, or epoxy resin filled with a filler such as metal or oxide in an epoxy resin.
  • the third acoustic matching division layer 302c is made of a material having an acoustic impedance in the range of 3 to 6 megarails.
  • the material is, for example, graphite, a resin material, or an epoxy resin in which an epoxy resin is filled with a filler such as a metal or an oxide.
  • the fourth acoustic matching division layer 302d is made of a material having an acoustic impedance in the range of 2 to 3 megarails.
  • the material is, for example, a resin material or a material obtained by mixing an elastomer material with a resin material.
  • the fifth acoustic matching divided layer 302e provided at the position farthest from the piezoelectric element 1 in the acoustic matching layer 302 is a mixture of at least two kinds of materials including an elastomer material, for example, a resin material mixed with an elastomer material.
  • the material is used and the acoustic impedance has a value in the range of 1.6 to 1.8 megarails.
  • a mixture in which an elastomer material is mixed with a resin material includes a copolymer of the resin material and the elastomer.
  • the acoustic impedance of each acoustic matching divided layer decreases in order from the layer close to the piezoelectric element 1 toward the layer close to the subject.
  • the fifth acoustic matching division layer 302e is made of a mixture containing an elastomer material, it has high adhesiveness. Moreover, since the material of the 5th acoustic matching division
  • FIG. 8 is a diagram illustrating the relationship between the acoustic impedance of the fifth acoustic matching division layer 302e, the pulse length, and the frequency ratio band.
  • the horizontal axis of the graph shown in FIG. 8 indicates the acoustic impedance (unit: megarails) of the fifth acoustic matching division layer 302e.
  • the vertical axis on the left side of the graph represents the pulse length (unit: ⁇ s), and the vertical axis on the right side represents the frequency ratio band (bandwidth / center frequency) (unit: percent).
  • the center frequency of the ultrasonic wave is set to 7.5 MHz
  • the acoustic impedance of the back load material 3 is 7 megarails
  • the piezoelectric element 1 is PZT-based piezoelectric ceramics corresponding to PZT-5H.
  • the first acoustic matching divided layer 302a is made of a free-cutting ceramic having an acoustic impedance of 23 megarails
  • the second acoustic matching divided layer 302b is made of an epoxy resin filled with metal powder having an acoustic impedance of 10 megarails.
  • the third acoustic matching divided layer 302c is made of an epoxy resin filled with metal powder having an acoustic impedance of 4.4 megarails
  • the fourth acoustic matching divided layer 302d is made of a resin material having an acoustic impedance of 2.3 megarails as an elastomer.
  • the fifth located closest to the subject side The frequency ratio band and the pulse length were calculated in a configuration in which the acoustic impedance of the acoustic matching division layer 302e was varied in the range of 1.5 to 2.3 megarails.
  • the thickness of the first acoustic matching division layer 302a was 0.28 wavelength, and the thickness of each of the second to fifth acoustic matching division layers 302b, 302c, 302d, and 302e was 0.25 wavelength.
  • the frequency ratio band is indicated by a solid line with a value of ⁇ 6 dB, and the pulse length is indicated with a broken line at values of ⁇ 6 dB, ⁇ 20 dB, and ⁇ 40 dB.
  • the pulse length value is relatively large when the acoustic impedance is greater than 1.8 megarails.
  • the value of the pulse length becomes relatively large when the acoustic impedance becomes a value smaller than 1.6 megarails and when the acoustic impedance becomes larger than 1.9 megarails. The smaller the pulse length, the higher the resolution and the better. Therefore, it is important to reduce the pulse length to improve the resolution.
  • the frequency ratio band is preferably 100% or more.
  • the frequency ratio band is 100% or more when the acoustic impedance of the fifth acoustic matching division layer 302e is 2.07 megarails or less.
  • the frequency ratio band is large and the pulse length is short. This indicates that the shape of the frequency characteristic of the ultrasonic wave is smooth and close to the shape of a normal distribution.
  • the acoustic impedance of the fifth acoustic matching divided layer 302e is preferably in the range of 1.6 megarails to 1.8 megarails. Furthermore, the acoustic impedance of the fifth acoustic matching division layer 302e is more preferably in the range of 1.7 megarails to 1.8 megarails.
  • the mixing ratio when a mixture of styrene which is a resin material and butadiene which is one of synthetic rubber materials is used as the material of the fifth acoustic matching divided layer 302e will be described with reference to FIG.
  • Weight of butadiene mixed with styrene when used for the fifth acoustic matching divided layer 302e which is in the range of 1.6 to 1.8 megarails, which is a preferable range of acoustic impedance of the fifth acoustic matching divided layer 302e. Since the ratio is in the range of 40 to 68%, it is preferable to mix butadiene with styrene at a filling weight ratio in this range. Further, it is more preferable that the filling weight ratio is in the range of 40 to 55%.
  • a mixture of styrene and butadiene has the advantage that it can be easily formed into a film of any thickness in the same way as a method of forming a resin material into a film, and can be manufactured with extremely large amounts with high accuracy. Can be lowered. Moreover, since butadiene is mixed, the adhesiveness is better than that of styrene alone, and a high-quality ultrasonic probe can be obtained.
  • the frequency of the five-layer structure shown in FIG. A region with a large specific band and a frequency specific band of 100% or more can be obtained over a wide range.
  • the frequency bandwidth As described above, as the number of layers constituting the acoustic matching layer increases, it is possible to increase the frequency bandwidth, which tends to be a desirable characteristic for realizing high resolution.
  • the acoustic matching layer 302 having a five-layer structure as a material for the fifth acoustic matching division layer 302e provided on the subject side, a mixture of styrene and butadiene mixed at an arbitrary filling weight ratio is used.
  • a characteristic in which the frequency bandwidth is wide and the pulse length is short that is, the frequency characteristic of the ultrasonic wave is close to a normal distribution. For this reason, an ultrasonic probe capable of obtaining a high-resolution ultrasonic image can be realized.
  • the acoustic impedances of the first acoustic matching divided layer 302a, the second acoustic matching divided layer 302b, the third acoustic matching divided layer 302c, and the fourth acoustic matching divided layer 302d are 23 megarails, respectively.
  • the case of 10 megarails, 4.4 megarails, and 2.3 megarails is described.
  • the acoustic impedance of the first acoustic matching division layer 302a varies in the range of 15 to 25 megarails
  • the acoustic impedance of the second acoustic matching division layer 302b varies in the range of 8 to 14 megarails
  • the third acoustic matching division When the acoustic impedance of the layer 302c varies from 3 to 6 megarails and the acoustic impedance of the fourth acoustic matching division layer 302d varies in the range of 2 to 3 megarails, An optimum value is calculated for the acoustic impedance of the acoustic matching division layer 302e.
  • the preferred acoustic impedance value of the fifth acoustic matching division layer 302e does not deviate significantly from the range of 1.6 to 1.8 megarails.
  • the configuration shown in FIG. 7 in which the piezoelectric elements 1 are arranged one-dimensionally has been described.
  • the present embodiment is applied to a two-dimensional array-type electronic scanning ultrasonic probe in which a plurality of the configurations are arranged.
  • the same effect can be obtained.
  • the five acoustic matching layers 302 corresponding to the piezoelectric element 1 are also divided into a plurality of pieces in the X-axis direction, the first, second, third, and fourth acoustic matching divided layers are divided.
  • the fifth acoustic matching divided layer 302e may be produced without being divided. Further, the same effect can be obtained even when applied to an ultrasonic probe of a single piezoelectric element.
  • the resin material is preferably a synthetic resin. Synthetic resins can be broadly classified into thermoplastic resins and thermosetting resins. As the thermosetting resin material, for example, phenol resin, epoxy resin, or urethane resin can be used.
  • the resin material is not limited to these resin materials as long as it is a material that can be mixed with the elastomer material in addition to the resin materials described above, but it is particularly preferable to use a thermoplastic material.
  • the thermoplastic resin material When producing a mixture of a resin material and an elastomer, the thermoplastic resin material can be made into a mixture in which an elastomer or the like is uniformly dispersed by a uniaxial or biaxial kneading extruder or the like. Can be molded. For this reason, the material of the uniform acoustic characteristic with few dispersion
  • the present invention is not limited to this as long as it is an elastomer material that can create a mixture of a natural rubber or a synthetic rubber material with a resin material. . Note that it is more preferable to select an elastomer material having a small ultrasonic attenuation, such as butadiene. This is because the ultrasonic attenuation of the material when the mixture is made can be reduced.
  • the acoustic matching layer is preferably made of a material having a small ultrasonic attenuation.
  • the material of the fifth acoustic matching divided layer 302e it has been described that two kinds of mixtures of styrene and butadiene are used as the material of the fifth acoustic matching divided layer 302e.
  • other materials such as fibrous materials when strength needs to be increased, and powders such as oxides are added when hardness is increased.
  • the same effect can be obtained if the acoustic impedance in the above range can be obtained.
  • the acoustic impedance of the acoustic matching division layer provided closest to the subject side is increased as the number of layers constituting the acoustic matching layer increases. It can be seen that the acoustic impedance of the subject is approaching the value of 1.54 megarail.
  • FIG. 9 is a schematic perspective view showing the ultrasonic probe of the fourth embodiment.
  • the ultrasonic probe 40 according to the fourth embodiment shown in FIG. 9 further includes a conductor foil 8 in addition to the components included in the ultrasonic probe 20 according to the second embodiment shown in FIG.
  • the same components as those included in the ultrasonic probe 20 of the second embodiment are denoted by the same reference numerals, and description thereof is omitted.
  • a conductor foil 8 is formed on the surface of the ground electrode 5 provided on one surface of the piezoelectric element 1, and these are electrically connected. Furthermore, an acoustic matching layer 202 (acoustic matching division layers 202a, 202b, 202c, 202d from the piezoelectric element 1 side) is provided on the surface of the conductor foil 8.
  • the signal electrical terminal 7, the piezoelectric element 1, the conductor foil 8, and the acoustic matching layer 202 (acoustic matching division layers 202 a, 202 b, 202 c, and 202 d) provided on the surface of the back load material 3 are joined together with an adhesive such as an epoxy resin. You may adhere and laminate.
  • a part of the back load material 3, the signal electrical terminal 7, the piezoelectric element 1, the conductor foil 8, and the acoustic matching layer 202 are divided into a plurality of pieces by a dicing saw or the like. Then, as shown in FIG.
  • the divided grooves may be filled with silicone rubber or urethane resin, and the acoustic lens 4 may be provided thereon as necessary.
  • the conductor foil 8 is preferably a metal such as a copper foil or an aluminum foil, but may be a conductor and is not limited to these materials.
  • the acoustic impedance of copper is about 44.6 megarails, which is larger than the acoustic impedance of the piezoelectric element 1 and the first acoustic matching divided layer 202a, and therefore acoustically mismatched. Affects frequency characteristics and sensitivity. For this reason, it is desirable that the thickness of the copper foil be as thin as possible, and if the thickness is about 1/40 wavelength or less, the influence is small and preferable.
  • the acoustic impedance of aluminum is about 17 megarails, which is a value close to the first acoustic matching division layer 202a. Therefore, the aluminum foil is one of the first acoustic matching division layers. It can function as a part. However, in order to use the aluminum foil itself as the first acoustic matching division layer 202a, it is difficult to perform division with a dicing saw or the like. For this reason, it is desirable to use the aluminum foil as the conductor foil 8 with a thickness that is less than or equal to the level at which it can be processed and divided.
  • the conductor foil 8 can be easily wired by soldering or the like by extending the conductor foil 8 in a shape larger than that of the piezoelectric element 1 and the acoustic matching layer 202.
  • the signal electrical terminal 7 is provided.
  • the piezoelectric element 1 can transmit and receive ultrasonic waves by applying a voltage to the conductor foil 8.
  • the acoustic matching layer does not need to consider electrical connection at all. Therefore, there is a great advantage that a material suitable for each layer can be freely selected from an acoustic viewpoint.
  • the material of the acoustic matching layer 202 can be any material of a conductor, a semiconductor, and an insulator, so that the selection range is widened.
  • the first acoustic matching division layer 202a is made of a material having an acoustic impedance in the range of 15 to 25 megarails.
  • the material is, for example, silicon single crystal, quartz, glass such as fused quartz, or free-cutting ceramics.
  • the second acoustic matching division layer 202b a material having an acoustic impedance in the range of 6 to 12 megarails is used.
  • the material is, for example, graphite or an epoxy resin in which an epoxy resin is filled with a filler such as a metal or an oxide.
  • a material having an acoustic impedance in the range of 3 to 5 megarails is used.
  • the material is, for example, graphite, a resin material, or an epoxy resin in which an epoxy resin is filled with a filler such as a metal or an oxide.
  • the fourth acoustic matching divided layer 202d provided on the most object side uses a mixture of at least two kinds of materials including an elastomer material, for example, a material in which an elastomer material is mixed with a resin material, and has an acoustic impedance of 1. It preferably has a value in the range of 8 to 2.28 megarails.
  • the acoustic matching layer having a four-layer structure has been described as an example, but the same effect can be obtained in the case of an acoustic matching layer having a three-layer structure or five or more layers.
  • the ultrasonic probe according to the present invention can be used in various medical fields for performing ultrasonic diagnosis of a subject such as a human body, and in industrial fields for the purpose of internal flaw detection of materials and structures.

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Abstract

Selon la présente invention, dans une sonde ultrasonore, en ayant utilisé un mélange d'une résine et d'un élastomère pour au moins une couche d'une pluralité de couches configurant une couche d'adaptation acoustique disposée sur un côté d'un élément piézoélectrique, des caractéristiques de fréquence de forme lisse et de bande large et des caractéristiques de longueur d'impulsion courte sont atteintes. Par suite, il est possible d'obtenir une image ultrasonore haute résolution.
PCT/JP2013/004374 2012-07-17 2013-07-17 Sonde ultrasonore Ceased WO2014013735A1 (fr)

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JP2012158347A JP2015188121A (ja) 2012-07-17 2012-07-17 超音波探触子

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Cited By (2)

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Publication number Priority date Publication date Assignee Title
US20190133553A1 (en) * 2016-04-26 2019-05-09 Koninklijke Philips N.V. Ultrasound device contacting
US10736606B2 (en) 2015-11-10 2020-08-11 Koninklijke Philips N.V. Acoustic window layer for an ultrasound array

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019088146A1 (fr) * 2017-11-01 2019-05-09 富士フイルム株式会社 Composition de résine pour couche d'adaptation acoustique, produit durci, feuille d'adaptation acoustique, sonde à ondes acoustiques, dispositif de mesure d'ondes acoustiques, procédé de production pour sonde à ondes acoustiques et ensemble de matériaux pour couche d'adaptation acoustique

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JP2004056504A (ja) * 2002-07-19 2004-02-19 Aloka Co Ltd 超音波探触子及びその製造方法
JP2006174991A (ja) * 2004-12-22 2006-07-06 Matsushita Electric Ind Co Ltd 超音波探触子
WO2007088772A1 (fr) * 2006-01-31 2007-08-09 Matsushita Electric Industrial Co., Ltd. Sonde à ultrason

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004056504A (ja) * 2002-07-19 2004-02-19 Aloka Co Ltd 超音波探触子及びその製造方法
JP2006174991A (ja) * 2004-12-22 2006-07-06 Matsushita Electric Ind Co Ltd 超音波探触子
WO2007088772A1 (fr) * 2006-01-31 2007-08-09 Matsushita Electric Industrial Co., Ltd. Sonde à ultrason

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10736606B2 (en) 2015-11-10 2020-08-11 Koninklijke Philips N.V. Acoustic window layer for an ultrasound array
US20190133553A1 (en) * 2016-04-26 2019-05-09 Koninklijke Philips N.V. Ultrasound device contacting
US11529120B2 (en) * 2016-04-26 2022-12-20 Koninklijke Philips N.V. Ultrasound device contacting

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