WO2014009150A1 - Système pour réaliser des perçages ou des soudures au moyen d'un faisceau laser et d'un dispositif déflecteur de faisceau laser doté de deux scanneurs x/y - Google Patents
Système pour réaliser des perçages ou des soudures au moyen d'un faisceau laser et d'un dispositif déflecteur de faisceau laser doté de deux scanneurs x/y Download PDFInfo
- Publication number
- WO2014009150A1 WO2014009150A1 PCT/EP2013/063329 EP2013063329W WO2014009150A1 WO 2014009150 A1 WO2014009150 A1 WO 2014009150A1 EP 2013063329 W EP2013063329 W EP 2013063329W WO 2014009150 A1 WO2014009150 A1 WO 2014009150A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- unit
- arrangement according
- scanner
- laser beam
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
- B23K26/21—Bonding by welding
- B23K26/24—Seam welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
- B23K26/21—Bonding by welding
- B23K26/24—Seam welding
- B23K26/30—Seam welding of three-dimensional seams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/16—Composite materials, e.g. fibre reinforced
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/30—Organic material
- B23K2103/42—Plastics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
Definitions
- the invention relates to an arrangement for producing bores or welds by means of a laser beam or a plurality of laser beams in a 2D and / or 3D topology according to claim 1.
- Drilling, cutting or welding equipment in which holes or contours are cut or parts are cut out using bundled light energy in the form of a laser beam in a given sample are known.
- Recent applications in the field of laser-based drilling and cutting devices require the simultaneous drilling of several holes. This applies both to two-dimensional (2D) machining pieces, such as flat sheets, and to three-dimensional (3D) machining pieces, such as curved car doors or aircraft parts such as turbine covers.
- the distance between the drilling and cutting device and the machining piece may vary due to the shape of the machining piece or the arrangement of the part to be machined. If a maximum depth is to be observed for the holes to be produced, it is necessary at each machining time to know the distance between the drilling, cutting or welding device and the workpiece to be machined or the 2D or 3D topology.
- This z. B. be made before the processing of the workpiece surface scans, the data of the scanning process can be stored in a database.
- such a scanning or scanning process is associated with a long processing time, which greatly delays the entire processing process. Since the surface or arrangement of the parts to be machined can vary, it is necessary for this, upstream of the actual machining process, Scanning for each individual part to be machined so that the total processing time of a production line is unreasonably slowed down.
- the object of the invention is achieved by an arrangement for producing holes or welds by means of a laser beam or multiple laser beams according to the combination of features according to claim 1, wherein the dependent claims represent at least expedient refinements and developments.
- the arrangement according to the invention is based on at least one fiber laser source, a diagnostic unit and a laser beam deflecting device, wherein the laser beam deflecting device has two X / Y scanners.
- X / Y scanner in the present case scanning heads or Laserstrahlablenkvorraumen be referred to with two mirrors, which allow a deflection of the laser beam and the laser beams in both the X and Y direction of a coordinate system.
- the two X / Y scanners are connected in series, ie that one or more laser beam (s) first enter into a first X / Y scanner and are deflected therein in order to leave the first X / Y scanner within a second X / Y scanner to be redirected.
- the two X / Y scanners shown are thus connected in series, the X / Y scanner, which serves as the first deflection device in chronological order, is referred to as the first X / Y scanner and the X / Y scanner, which the Laser beam or the multiplicity of laser beams following it deflects, as second X / Y scanner is called.
- the series connection mentioned in this context does not exclude that between the two X / Y scanners still other components may be located.
- the aperture of the first X / Y scanner is expediently smaller than the aperture of the second X / Y scanner.
- the first X / Y scanner preferably has a relatively small aperture of 11-16 mm, whereas the second X / Y scanner has a larger aperture of at least 45-55 mm.
- a negative lens is disposed between the first X / Y scanner and the second X / Y scanner. These lenses break laser beams away from the optical axis, so by preceding deflection of the laser beam or beams in the first X / Y scanner and subsequent deflection of the laser beam or beams in the second X / Y scanner, the laser beam or beams can be positioned uniformly in the X, Y and Z direction and at the same time the penetration depth of the laser beam into the part to be machined can be controlled.
- the negative lens works in the present case as translator and serves the Nachposition réelle of the beam focus in the Z direction. After the negative lens, a beam expander is further provided. The negative lens or translator forms together with the Strahlaufweiter a telescope unit.
- a collimator unit In front of the X / Y scanner are a collimator unit and / or at least one wedge prism.
- the wedge prism which is also called wedge, a pendulum or spiral movement of the laser beam can be caused.
- the disclosed device further comprises a coaxial autofocusing measurement unit, which coaxially emits a sensor beam through the second X / Y scanner onto the processing piece to detect the distance between the processing piece and the arrangement and, depending on the distance or the material thickness at the corresponding impact point of the sensor beam on the workpiece, the focus of the laser beam or the array of, for example, four or seven laser beams nachzuleit and control such that a desired hole depth is achieved or the material particularly gentle in the respective region of the processing piece to drill through.
- the arrangement therefore has a special optics with infinite Rayleigh length.
- the coaxial determination of the distance between the machining piece and the arrangement can be determined exactly at the machining point.
- the coaxial determination of the distance takes place centrally with respect to all the laser beams. Subsequently, for example, in a drilling process, an orthogonal pattern having a predetermined hole diameter and a predetermined hole depth is introduced at the measured processing point or around the measured point.
- the dynamic focus adjustment is performed by a compensation movement of the aforementioned negative lens.
- the coaxial autofocus surveying unit is expediently integrated into the diagnostic device.
- the coaxial autofocus surveying unit is, for example, an OCT unit or an OCT laser microscope, which performs optical coherence tomography.
- the tomography is based on a temperature-insensitive interferometry principle, which, for example, can also be used on opaque surfaces and at the same time can show the structure of the material to be processed.
- this imaging method is particularly advantageous in laser processing, since the light of the laser beam does not interfere with the imaging process. Also, a measurement within a welding point is possible. Furthermore, due to the 100 Hz - 200 kHz versions, an OCT laser microscope is characterized by particularly fast working times with regard to the measurement frequencies, so that the autofocusing process only takes a small amount of time with regard to the overall machining process. If, for example, carbon fiber materials are processed, with the aid of an OCT laser microscope egg ne high-resolution image of the workpiece to be machined or the already machined part are created.
- the fast dynamic readjustment of the laser beam focus can also be done on the basis of other measuring methods for detecting the distance between the workpiece and the exit point of the laser beam or the laser beams from the second X / Y scanner.
- This is z. B. by means of a time-of-flight measurement method or a triangulation method possible.
- the arrangement may accordingly have a time-of-flight unit, ie a time-of-flight camera, or a triangulation unit.
- the coaxial autofocusing surveying unit such.
- the OCT laser microscope the time-of-flight camera or the triangulation unit, an autofocusing unit.
- the fiber laser source may be an ultrashort pulse laser.
- so-called femtolaser with a seeder are preferably used here.
- the possible laser sources set out here are not an exhaustive list.
- the diagnostic unit has a 3D projection unit with at least one camera.
- the diagnostic unit has a plasma emission spectrometry unit.
- a plasma emission spectrometry unit On the basis of such a unit z. B. be recognized whether in a workpiece to be machined, which consists of several materials, but only portions of the workpiece to be processed with a selected material, portions of the workpiece with other material not to be machined in the focus area of the laser beam or the laser beams are, so a drilling or welding process can be interrupted as quickly as possible at this processing point.
- a turbine casing consists for example of a honeycomb structure made of aluminum, which are covered on both sides with a carbon fiber composite material, wherein holes are to be introduced into the carbon fiber composite material. However, it should be no replacement or Schica The aluminum structure comes so that a laser drilling process is interrupted when the laser beam hits aluminum. This can be detected by means of a plasma emission spectrometry unit.
- the laser beam deflecting device ie both X / Y scanners, can be attached to a positioning unit. It may be z. B. act a robot arm.
- the diagnostic unit and / or the fiber laser source are attached to the positioning unit together with the laser beam deflecting device, which, as already mentioned, is for example a robot arm.
- the diagnostic device with a reference point tracking unit, which detects reference points of the workpiece to be machined and geometrically in relation to the determined position of the reference point, for example, the course of a weld or the position of holes influenced.
- a reference point tracking unit or edge tracking unit monitors, for example, in a welding process in car doors, the outer edge of a car door to be applied
- the first X / Y scanner may be replaced by a single baffle. All other individual components of the arrangement according to the invention are consistent in this embodiment. Also variations regarding the number of possible wedge prisms are possible.
- the illustrated arrangement With the aid of the illustrated arrangement according to the invention it is possible in summary to operate a dynamic autofocusing and diagnostic process, which is not performed before or after the machining process but during the machining process, namely during the drilling of holes or the application of a weld.
- the illustrated arrangement always determines the current distance of the arrangement according to the invention or of the second X / Y scanner for a short time before carrying out the next machining process to the machining point with simultaneous accuracy of 10 - 20 pm.
- the negative lens is moved and the focus of the laser beam or the laser beams automatically adjusted.
- FIG. 3 shows a third embodiment of the invention with two wedge prisms
- Fig. 4 shows a fourth embodiment of the invention with a baffle plate
- Fig. 5 shows a fifth embodiment of the invention with a baffle and two wedge prisms.
- laser beams 2 initially emerge from a fiber bundle 1 in order to be guided through a collimation unit or collimation optics for the purpose of a parallel beam path.
- a collimation unit or collimation optics for the purpose of a parallel beam path.
- the collimator unit for example, four laser beams are guided in parallel.
- the four laser beams are guided into the first X / Y scanner 4 or laser head. Due to this, according to the laser beam image, it is possible to guide the individual laser beams not only in a circle but for example along a teardrop-shaped contour.
- a telescope unit 5 is arranged, wherein the telescope unit 5 consists of a translator or a negative lens 6 and a beam expander 7.
- the negative lens 6 can be shifted as shown by arrows.
- the diagnostic unit has, for example, a coaxial autofocusing unit, so that the distance between the arrangement and the workpiece 9 can be detected at any time during the laser processing process.
- the coaxial autofocusing unit transmits a sensor beam to the workpiece 9 through the second X / Y scanner 8 to detect the distance between the workpiece and the assembly.
- the focus of the laser beams is tracked and controlled so that a desired borehole depth is achieved.
- the aperture of the first X / Y scanner 4 is smaller than the aperture of the second X / Y scanner 8, so that the first X / Y scanner 4 as a small-aperture X / Y scanner and the second X / Y scanner 8 may be referred to as a large-aperture X / Y scanner of the inventive arrangement.
- a wedge prism 10 is additionally provided in addition to the components already shown in FIG.
- the wedge prism is located between the collimator unit 3 and the first X / Y scanner.
- the laser beams 2 are thus guided to the wedge prism or the wedge plate 10 after the collimator unit 3.
- the wedge plate 10 can rotate, so that the laser beams 2 can be deflected accordingly.
- a pendulum or helical movement of the laser beam can be caused.
- the second wedge plate 11 can also be rotatable so that the movement paths of the laser beams 2 are widened or enlarged on a round contour.
- the laser beams 2 emanating from a fiber bundle 1 are first guided to a collimator unit 3 and then guided parallel to a first wedge plate 10.
- the laser beams, four laser beams in the present case are guided to a deflection plate 12, where they are in turn directed in the direction of a telescope unit 5.
- the telescope unit 5 consists of a displaceable in an axis negative lens 6 and a beam-Avemweiter 7. Subsequently, the laser beams enter the large-aperture X / Y scanner 8, to then be deflected onto the workpiece 9, where they carry out the laser processing to be able to.
- deflection plate 12 that after a first wedge plate 10, a second wedge plate 11, which in turn can be rotated, is arranged. This is thus arranged between the first wedge plate 10 and the baffle plate 12 and causes an expansion of the movement paths of the oscillating moving laser beams. It is again referred to the respective representations of the laser beam images at the respective time when passing various components in the inventive arrangement.
- the deflector plate embodiments may also include a coaxial autofocus surveying unit, a diagnostic unit, etc. The attachments to a positioning unit is possible.
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102012212278.8A DE102012212278B4 (de) | 2012-07-13 | 2012-07-13 | Anordnung zum Erzeugen von Bohrungen oder Schweißnähten |
| DE102012212278.8 | 2012-07-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2014009150A1 true WO2014009150A1 (fr) | 2014-01-16 |
Family
ID=48703475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/EP2013/063329 Ceased WO2014009150A1 (fr) | 2012-07-13 | 2013-06-26 | Système pour réaliser des perçages ou des soudures au moyen d'un faisceau laser et d'un dispositif déflecteur de faisceau laser doté de deux scanneurs x/y |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE102012212278B4 (fr) |
| WO (1) | WO2014009150A1 (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105798467A (zh) * | 2014-12-30 | 2016-07-27 | 上海团结普瑞玛激光设备有限公司 | 激光焊接切割生产线 |
| US9981357B2 (en) | 2015-06-22 | 2018-05-29 | Electro Scientific Industries, Inc. | Systems and methods for enabling automated motion control of a tool in a multi-axis machine tool |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014207789A1 (de) * | 2014-04-25 | 2015-10-29 | Siemens Aktiengesellschaft | Verfahren zur Herstellung einer Wärmedämmschicht an einem Bauteil |
| CN107442930A (zh) * | 2017-07-13 | 2017-12-08 | 华中科技大学 | 一种激光焦点动态加工方法及装置 |
| CN107243690A (zh) * | 2017-07-13 | 2017-10-13 | 华中科技大学 | 一种激光多焦点动态加工方法及系统 |
| DE102017010055A1 (de) | 2017-10-27 | 2019-05-02 | Lessmüller Lasertechnik GmbH | Laserstrahlschweißen von geometrischen Figuren mit OCT-Nahtführung |
| DE102018127649B4 (de) | 2018-03-06 | 2025-01-02 | Scansonic Mi Gmbh | Verfahren zum Laserschweißen mit stabilem Schmelzbad und Laserbearbeitungsvorrichtung |
| EP4091759A1 (fr) * | 2021-05-19 | 2022-11-23 | Boegli-Gravures S.A. | Dispositif et procédé de gravure optique d'un réseau de diffraction sur une pièce à usiner |
| DE102022127484A1 (de) | 2022-10-19 | 2024-04-25 | Precitec Gmbh & Co. Kg | Laserbearbeitungssystem mit Lidar-Sensor und Verfahren zum Durchführen eines Laserbearbeitungsprozesses mittels einem solchen |
| DE102022127449A1 (de) | 2022-10-19 | 2024-04-25 | Precitec Gmbh & Co. Kg | Laserbearbeitungskopf mit Lidar-Sensor |
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| GB1143138A (en) * | 1965-11-01 | 1969-02-19 | Hughes Aircraft Co | System for focusing laser energy |
| US20020153361A1 (en) * | 2000-08-29 | 2002-10-24 | Masahiko Sakamoto | Laser machining apparatus |
| JP2005254618A (ja) * | 2004-03-11 | 2005-09-22 | Toyota Motor Corp | 樹脂溶着装置 |
| US20070164005A1 (en) * | 2006-01-17 | 2007-07-19 | Yasushi Matsuda | Laser beam processing apparatus |
| JP2008173652A (ja) * | 2007-01-16 | 2008-07-31 | Aisin Seiki Co Ltd | バリ取り方法 |
| JP2012024808A (ja) * | 2010-07-23 | 2012-02-09 | Miyachi Technos Corp | スキャニング方式のレーザ加工装置 |
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| DE10157983C5 (de) * | 2001-11-27 | 2008-05-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Positionier- und/oder Laserbearbeitungsverfahren und Vorrichtung |
| TWI275439B (en) * | 2003-05-19 | 2007-03-11 | Mitsubishi Electric Corp | Laser processing apparatus |
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| WO2006037114A2 (fr) * | 2004-09-28 | 2006-04-06 | Hitachi Via Mechanics, Ltd | Production par laser a fibre de microtrous d'interconnexion perces par laser pour applications de perçage multicouche, de decoupage en des, de detourage ou de fraisage |
| JP4972289B2 (ja) * | 2005-04-19 | 2012-07-11 | 芝浦メカトロニクス株式会社 | レーザマーキング装置 |
| DE102007016444B4 (de) * | 2007-04-05 | 2024-08-22 | Precitec Optronik Gmbh | Bearbeitungseinrichtung |
| JP5011072B2 (ja) * | 2007-11-21 | 2012-08-29 | 株式会社ディスコ | レーザー加工装置 |
| CN102497952B (zh) * | 2009-07-20 | 2014-12-24 | 普雷茨特两合公司 | 激光处理头以及用于补偿激光处理头的聚焦位置的改变的方法 |
| JP5693705B2 (ja) * | 2010-03-30 | 2015-04-01 | イムラ アメリカ インコーポレイテッド | レーザベースの材料加工装置及び方法 |
-
2012
- 2012-07-13 DE DE102012212278.8A patent/DE102012212278B4/de active Active
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2013
- 2013-06-26 WO PCT/EP2013/063329 patent/WO2014009150A1/fr not_active Ceased
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| GB1143138A (en) * | 1965-11-01 | 1969-02-19 | Hughes Aircraft Co | System for focusing laser energy |
| US20020153361A1 (en) * | 2000-08-29 | 2002-10-24 | Masahiko Sakamoto | Laser machining apparatus |
| JP2005254618A (ja) * | 2004-03-11 | 2005-09-22 | Toyota Motor Corp | 樹脂溶着装置 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105798467A (zh) * | 2014-12-30 | 2016-07-27 | 上海团结普瑞玛激光设备有限公司 | 激光焊接切割生产线 |
| US9981357B2 (en) | 2015-06-22 | 2018-05-29 | Electro Scientific Industries, Inc. | Systems and methods for enabling automated motion control of a tool in a multi-axis machine tool |
| US10654141B2 (en) | 2015-06-22 | 2020-05-19 | Electro Scientific Industries, Inc | Multi-axis machine tool and methods of controlling the same |
| US11185957B2 (en) | 2015-06-22 | 2021-11-30 | Electro Scientific Industries, Inc | Multi-axis machine tool and methods of controlling the same |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102012212278A1 (de) | 2014-01-16 |
| DE102012212278B4 (de) | 2016-12-15 |
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