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WO2014000592A1 - Fluidized bed without sieve plate and method for preparing boron trichloride - Google Patents

Fluidized bed without sieve plate and method for preparing boron trichloride Download PDF

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Publication number
WO2014000592A1
WO2014000592A1 PCT/CN2013/077478 CN2013077478W WO2014000592A1 WO 2014000592 A1 WO2014000592 A1 WO 2014000592A1 CN 2013077478 W CN2013077478 W CN 2013077478W WO 2014000592 A1 WO2014000592 A1 WO 2014000592A1
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Prior art keywords
bed
carrier gas
fluidized bed
sieve plate
reaction
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French (fr)
Chinese (zh)
Inventor
高远
朱刘
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First Rare Materials Co Ltd
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First Rare Materials Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/18Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
    • B01J8/1818Feeding of the fluidising gas
    • B01J8/1827Feeding of the fluidising gas the fluidising gas being a reactant
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B35/00Boron; Compounds thereof
    • C01B35/06Boron halogen compounds
    • C01B35/061Halides

Definitions

  • the present invention provides a fluidized bed without a sieve plate, comprising: a bed body; a carrier gas source for supplying a carrier gas from the lower portion of the bed body toward the upper portion of the bed body; a reaction gas supply device for supplying a reaction gas to the bed; a raw material supply device for supplying a powder raw material to the bed; a heating device for heating the bed; and a slag discharge port for discharging the reaction slag generated by the reaction in the bed; , connected to the bed, separating the substance reacted in the bed to obtain the final product.
  • the fluidized bed without the sieve plate further comprises: a reaction gas treatment device 9 for the reaction gas supply device 3
  • the reaction gas supplied to the bed 1 is subjected to dehydration drying and heating to increase the temperature.
  • the carrier gas of the carrier gas source 2 enters the direction of the carrier gas inlet 21 of the carrier gas guide 10 with respect to the carrier gas guide
  • the inner wall 103 at the position where the carrier gas inlet 21 is connected is inclined.
  • the method for preparing boron trichloride according to the second aspect of the present invention comprises the fluidized bed without the sieve plate according to the above aspect, wherein the preparation method of the boron trichloride comprises: passing the alkaline earth metal boride of the powder raw material
  • the raw material supply device 4 is filled in the bed 1 of the fluidized bed device without the sieve plate;
  • the carrier gas source 2 is turned on, and the carrier gas is introduced into the bed 1 of the fluidized bed device without the sieve plate, so that the powder raw material is
  • the bed 1 of the fluidized bed device without sieve plate is in a fluidized state;
  • the heating device 5 is turned on to heat the bed body 1, and after the temperature reaches a predetermined temperature, the reaction gas is supplied with anhydrous hydrogen chloride; after the reaction reaches a prescribed period of time , open and start the separation device 7 to obtain the desired boron trichloride.
  • the flow rate of the alkaline earth metal boride is 80 to 85 g/h, and the flow rate of anhydrous hydrogen chloride is 500 to 600 g/h.
  • the calcium boride is preferably calcium hexaboride.
  • the main substances in the reaction include: BC1 3 , carrier gas, hydrogen, BC1 3 , oxygen, nitrogen, Cl 2 , HC1 and the like, and calcium chloride slag and calcium boride.
  • carrier gas hydrogen
  • BC1 3 oxygen
  • nitrogen nitrogen
  • Cl 2 cyclopentadiene
  • HC1 cyclopentadiene
  • calcium chloride slag and calcium boride are preferably separated from other gases by a filter column composed of glass fibers to achieve gas-solid separation; in the gas separation device 72, preferably hot copper is used.
  • the main substances in the reaction are: BC1 3 , carrier gas, hydrogen, BC1 3 , oxygen, nitrogen, Cl 2 ,
  • the carrier gas The body is an inert gas.
  • the inert gas may be nitrogen, argon, helium or a mixed gas of two of them.
  • nitrogen is selected.
  • the flow rate is 0. 5m7h ⁇ 10 m7h.
  • the powdered calcium hexaboride having a particle diameter of 20 to 30 mesh is filled in the bed 1 of the fluidized bed without the sieve plate by the raw material supply device 4 at a flow rate of 80 g/h; the carrier gas source 2 is turned on, and the nitrogen gas is introduced into the absence of In the bed 1 of the fluidized bed of the sieve plate, the powdered calcium hexaboride is in a fluidized state in the bed 1 of the fluidized bed without the sieve plate; the heating device 5 is turned on to heat the bed 1 at a temperature After 550 ° C, 500 m / h flow rate into the bed 1 into the reaction gas treatment device 9 dehydration drying reaction of anhydrous hydrogen chloride, while continuously reducing the nitrogen flow to maintain the fluidized state of calcium boride, reaction lh; Thereafter, the separation device 7 is opened and started, and calcium chloride slag and calcium boride are separated by a filter column composed of glass fibers in the gas-solid separation device 71, and then oxygen and hydrogen
  • 100 ⁇ 120 mesh powder calcium hexaboride is filled into the bed 1 of the fluidized bed without sieve through the raw material supply device 4 at a flow rate of 85 g/h; the carrier gas source 2 is turned on, and the argon gas is introduced into the sieveless plate.
  • the powdered calcium hexaboride is in a fluidized state in the bed 1 of the fluidized bed without the sieve plate; the heating device 5 is turned on to heat the bed 1 at a temperature After 700 °C, the reaction gas of the dehydration and drying by the reaction gas treatment device 9 is introduced into the bed 1 at a flow rate of 600 g/h, and the flow rate of the argon gas is continuously lowered to maintain the fluidized state of the calcium boride. 5h; then opening and starting the separation device 7, separating the calcium chloride residue and the calcium boride by the filter column composed of the glass fiber in the gas-solid separation device 71, and then passing the oxygen through the hot carbon powder in the gas separation device 72.
  • the powdered magnesium boride of 180 ⁇ 200 mesh is filled into the bed 1 of the fluidized bed without the sieve plate through the raw material supply device 4 at a flow rate of 82 g/h; the carrier gas source 2 is opened, and the helium gas is introduced into the sieveless plate.
  • the powdered magnesium boride is in a fluidized state in the bed 1 of the fluidized bed without the sieve plate; the heating device 5 is turned on to heat the bed 1 after the temperature reaches 650 ° C.
  • the method for producing boron trichloride according to the present invention can obtain boron trichloride having a high purity.

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Treating Waste Gases (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)

Description

无筛板的流化床及三氯化硼的制备方法  Fluidized bed without sieve plate and preparation method of boron trichloride

技术领域 Technical field

本发明涉及材料合成领域, 更具体而言涉及一种无筛板的流化床及一种 三氯化硼的制备方法。 背景技术  The present invention relates to the field of material synthesis, and more particularly to a fluidized bed without a sieve plate and a method for preparing boron trichloride. Background technique

三氯化硼可用在硅半导体器件的扩散、 离子注入、 干法蚀刻和制造太阳 能电池元件等工艺过程; 也可用作生产光导纤维的基础材料以及苯乙烯聚合 反应中的催化剂, 还用于铝、 锌、 镁和铜合金的提纯过程, 以从熔融金属中 除去氮化物、 碳化物和氧化物; 用作铝、 铁、 锌、 钨和蒙乃尔等合金的焊接 焊剂; 三氯化硼还用于熄灭热处理炉内的镁火和火箭推进剂上; 可作为制取 乙硼垸、 耐高温金属硼化物等的中间体和热解氮化硼。  Boron trichloride can be used in processes such as diffusion, ion implantation, dry etching, and fabrication of solar cell components in silicon semiconductor devices; it can also be used as a base material for the production of optical fibers and as a catalyst in the polymerization of styrene, and also for aluminum. , zinc, magnesium and copper alloys are purified to remove nitrides, carbides and oxides from molten metals; as soldering fluxes for alloys such as aluminum, iron, zinc, tungsten and monel; boron trichloride is also used It is used to extinguish the magnesium fire and rocket propellant in the heat treatment furnace; it can be used as an intermediate for preparing ethyl borohydride, high temperature resistant metal boride, and pyrolytic boron nitride.

目前三氯化硼的制备主要有两种工艺体系, 一种是采用熔融盐浴的体 系,如美国专利 US2, 097, 482、 US3, 019, 089、 US3, 152, 869、 US4, 125, 590等, 即先将含硼的盐转化为碳化硼, 该过程通常经过将硼盐制成氧化硼, 再和碳 反应生成烧结的碳化硼块, 最后与氯气反应生成三氯化硼, 硼的氧化物与碳 反应生成碳化硼的过程需要较高的温度, 一般在 800 °C以上; 另一种采用有 筛板的流化床体系, 如加拿大专利 CA 632713用氧化硼、 碳粉和氯气通过流 化床在 600 °C条件下反应制备三氯化硼, 该方法控制过程比较复杂, 产率低, 虽然降低了反应温度, 但有剧毒副产物光气 C0C12 产生, C0C12沸点为 8. 2 °C, 与 BC13 的 12. 5 °C非常接近, 给下一步分离提纯带来困难, 并且熔融的 原料很容易堵塞筛板孔, 需要定期清理, 导致生成产无法连续进行。 。 发明内容 At present, the preparation of boron trichloride mainly has two kinds of process systems, one is a system using a molten salt bath, such as US Patent Nos. 2, 097, 482, US 3, 019, 089, US 3, 152, 869, US 4, 125, 590. Etc., that is, the boron-containing salt is first converted into boron carbide. The process is usually carried out by forming a boron salt into boron oxide, reacting with carbon to form a sintered boron carbide block, and finally reacting with chlorine gas to form boron trichloride, boron oxidation. The process of reacting carbon with carbon to form boron carbide requires a higher temperature, generally above 800 °C; the other uses a fluidized bed system with a sieve plate, such as Canadian patent CA 632713 with boron, carbon and chlorine through the flow The catalytic bed is prepared at 600 ° C to prepare boron trichloride. The control process is complicated and the yield is low. Although the reaction temperature is lowered, the phosgene by-product C0C12 is produced, and the boiling point of C0C1 2 is 8.2. °C, very close to 12.5 °C of BC1 3 , which makes it difficult to separate and purify the next step, and the molten raw material is easy to block the sieve plate holes, which needs to be cleaned regularly, resulting in continuous production. . Summary of the invention

鉴于现有技术存在的问题, 本发明的目的在于提供一种无筛板的流 化床及三氯化硼的制备方法, 其能克服现有技术中的筛板堵塞。  In view of the problems of the prior art, it is an object of the present invention to provide a fluidized bed without sieve plates and a method for preparing boron trichloride which overcomes the clogging of the sieve plates in the prior art.

本发明的另一目的在于一种三氯化硼的制备方法, 其解决了反应过 程产生难分离杂质气体光气。 Another object of the present invention is a method for preparing boron trichloride, which solves the reaction The process produces phosgene which is difficult to separate impurity gases.

为了实现上述目的, 在第一方面, 本发明提供了一种无筛板的流化 床, 包括: 床体; 载体气体源, 从床体的下部朝床体的上部向床体提供 载体气体; 反应气体供给装置, 向床体提供反应气体; 原料供给装置, 向床体提供粉体原料; 加热装置, 对床体进行加热; 排渣口, 将床体内 的反应生成的反应渣排出; 分离装置, 连接于床体, 将床体反应后的物 质进行分离, 以获得最终产品。  In order to achieve the above object, in a first aspect, the present invention provides a fluidized bed without a sieve plate, comprising: a bed body; a carrier gas source for supplying a carrier gas from the lower portion of the bed body toward the upper portion of the bed body; a reaction gas supply device for supplying a reaction gas to the bed; a raw material supply device for supplying a powder raw material to the bed; a heating device for heating the bed; and a slag discharge port for discharging the reaction slag generated by the reaction in the bed; , connected to the bed, separating the substance reacted in the bed to obtain the final product.

为了实现上述目的, 在第二方面, 本发明提供了一种三氯化硼的制 备方, 其采用上述第一方面所述的无筛板的流化床, 所述三氯化硼的制 备方法包括: 将粉末原料碱土金属硼化物通过原料供给装置填充在无筛 板的流化床的床体中; 开启载体气体源, 将载体气体通入到无筛板的流 化床的床体中, 使得粉末原料碱土金属硼化物在无筛板的流化床的床体 处于流化状态; 打开加热装置对床体进行加热, 在温度达到规定温度后, 通入反应气体无水氯化氢; 待反应达到规定段时间后, 打开并启动分离 装置, 以获得所需的三氯化硼。  In order to achieve the above object, in a second aspect, the present invention provides a preparation method of boron trichloride, which adopts the fluidized bed without sieve plate according to the above first aspect, and the preparation method of the boron trichloride The method comprises: filling the alkaline earth metal boride of the powder raw material into the bed of the fluidized bed without the sieve plate through the raw material supply device; opening the carrier gas source, and introducing the carrier gas into the bed of the fluidized bed without the sieve plate, The bed material of the alkaline earth metal boride of the powder raw material in the fluidized bed without the sieve plate is in a fluidized state; the heating device is turned on to heat the bed body, and after the temperature reaches the predetermined temperature, the reaction gas is supplied with anhydrous hydrogen chloride; After a specified period of time, the separation unit is opened and activated to obtain the desired boron trichloride.

本发明的有益效果如下。  The beneficial effects of the present invention are as follows.

采用无筛板的流化床, 在较低的温度下就可以反应, 降低了能耗; 本装置结构的改进解决了反应过程容易堵塞筛板孔的问题, 使得设备简 单, 易于操作, 反应可以连续进行, 提高了生产效率。 采用碱土金属硼 化物和氯化氢为原料, 解决了反应过程产生难分离杂质气体光气。 附图说明  The fluidized bed without sieve plate can react at lower temperature and reduce energy consumption. The improvement of the structure of the device solves the problem that the reaction process is easy to block the hole of the sieve plate, so that the device is simple, easy to operate, and the reaction can be Continuously, increasing production efficiency. The alkaline earth metal boride and hydrogen chloride are used as raw materials to solve the problem that the reaction process produces phosgene which is difficult to separate impurity gases. DRAWINGS

图 1 是根据本发明的无筛板的流化床的结构示意图;  Figure 1 is a schematic view showing the structure of a fluidized bed without a sieve plate according to the present invention;

图 2是根据本发明的无筛板的流化床的载体气体引导件和载体气体 入口结构关系的水平截面示意图;  Figure 2 is a horizontal cross-sectional view showing the relationship between a carrier gas guide and a carrier gas inlet structure of a fluidized bed without a sieve plate according to the present invention;

图 3是根据本发明的无筛板的流化床的载体气体引导件和载体气体 入口结构关系的竖向截面示意图; 其中, 附图标记说明如下 Figure 3 is a vertical cross-sectional view showing the relationship between a carrier gas guide and a carrier gas inlet structure of a fluidized bed without a sieve plate according to the present invention; Wherein, the reference numerals are as follows

1 床体 2 载体气体源 3 反应气体供给装置  1 bed body 2 carrier gas source 3 reaction gas supply device

4 原料供给装置 5 加热装置 6 排渣口  4 raw material supply device 5 heating device 6 slag discharge port

7 分离装置 71 气固分离装置 72 气气分离装置  7 Separation device 71 Gas-solid separation device 72 Pneumatic separation device

73 冷凝装置 9 反应气体处理装置  73 Condensing unit 9 Reactive gas treatment unit

10 载体气体引导件 101 斜部 103 内壁  10 carrier gas guide 101 bevel 103 inner wall

21 载体气体入口 A 竖向轴线  21 carrier gas inlet A vertical axis

具体实舫式 Concrete implementation

下面结合附图说明根据本发明的无筛板的流化床以及三氯化硼的制 备方法。 首先说明根据本发明第一方面的无筛板的流化床。  A fluidized bed of a sieveless plate and a method for preparing boron trichloride according to the present invention will be described below with reference to the accompanying drawings. First, a fluidized bed of a sieveless plate according to the first aspect of the present invention will be described.

如图 1 所示, 根据本发明的无筛板的流化床, 包括: 床体 1 ; 载体 气体源 2, 从床体 1 的下部朝床体 1 的上部向床体 1 提供载体气体; 反 应气体供给装置 3, 向床体 1提供反应气体; 原料供给装置 4, 向床体 4 提供粉体原料; 加热装置 5, 对床体 1进行加热; 排渣口 6, 将床体 1内 的反应生成的反应渣排出; 分离装置 7, 连接于床体 1, 将床体 1反应后 的物质进行分离, 以获得最终产品。  As shown in Fig. 1, a fluidized bed without a sieve plate according to the present invention comprises: a bed body 1; a carrier gas source 2, which supplies a carrier gas from the lower portion of the bed body 1 toward the upper portion of the bed body 1 to the bed body 1; The gas supply device 3 supplies the reaction gas to the bed 1; the raw material supply device 4 supplies the powder material to the bed 4; the heating device 5 heats the bed 1; the slag discharge port 6 and the reaction in the bed 1 The generated reaction slag is discharged; the separation device 7 is connected to the bed 1, and the substance reacted by the bed 1 is separated to obtain a final product.

在根据本发明所述的无筛板的流化床中, 优选地, 床体 1 的形状为 圆柱型。 优选地, 床体 1 的由高纯石英、 二氧化硅、 氮化硅制成或者涂 覆有所述材料的碳或碳化硅制成。  In the fluidized bed without a sieve plate according to the present invention, preferably, the shape of the bed 1 is a cylindrical shape. Preferably, the bed 1 is made of carbon or silicon carbide made of high purity quartz, silicon dioxide, silicon nitride or coated with said material.

如图 1 所示, 在根据本发明所述的无筛板的流化床, 优选地, 所述 无筛板的流化床还包括: 反应气体处理装置 9, 用于对反应气体供给装置 3 供给到床体 1 的反应气体进行脱水干燥并加热升温。  As shown in Fig. 1, in the fluidized bed without a sieve plate according to the present invention, preferably, the fluidized bed without the sieve plate further comprises: a reaction gas treatment device 9 for the reaction gas supply device 3 The reaction gas supplied to the bed 1 is subjected to dehydration drying and heating to increase the temperature.

如图 1 所示, 在根据本发明所述的无筛板的流化床, 优选地, 所述 无筛板的流化床还包括: 载体气体引导件 10, 用于对载体气体源 2供给 到床体 1的载体气体进行引导。  As shown in Fig. 1, in the fluidized bed without a sieve plate according to the present invention, preferably, the fluidized bed without the sieve plate further comprises: a carrier gas guide 10 for supplying the carrier gas source 2 The carrier gas to the bed 1 is guided.

如图 1和图 2所示, 在根据本发明所述的无筛板的流化床, 优选地, 载体气体引导件 10 带有向床体 1 渐缩的斜部 101。 As shown in Figures 1 and 2, in the fluidized bed without a sieve plate according to the present invention, preferably, The carrier gas guide 10 has a slope 101 that tapers toward the bed 1.

如图 2 所示, 在根据本发明所述的无筛板的流化床, 优选地, 载体 气体源 2 的载体气体进入到载体气体引导件 10 的载体气体入口 21 的 方向相对载体气体引导件 10 的连接载体气体入口 21 的位置处的内壁 103 倾斜。  As shown in Fig. 2, in the fluidized bed without a sieve plate according to the present invention, preferably, the carrier gas of the carrier gas source 2 enters the direction of the carrier gas inlet 21 of the carrier gas guide 10 with respect to the carrier gas guide The inner wall 103 at the position where the carrier gas inlet 21 is connected is inclined.

如图 3 所示, 在根据本发明所述的无筛板的流化床, 优选地, 载体 气体源 2 的载体气体进入到载体气体引导件 10 的载体气体入口 21 的 方向相对载体气体引导件 10 的连接载体气体入口 21 的位置处的内壁 103 倾斜且在相对于床体 1 的竖向轴线 A 的平面内载体气体入口 21 的 方向相对该竖向轴线 A向上倾斜。  As shown in Fig. 3, in the fluidized bed without a sieve plate according to the present invention, preferably, the carrier gas of the carrier gas source 2 enters the direction of the carrier gas inlet 21 of the carrier gas guide 10 with respect to the carrier gas guide The inner wall 103 at the position of the connection carrier gas inlet 21 of 10 is inclined and inclined upward with respect to the vertical axis A in the direction of the carrier gas inlet 21 in the plane with respect to the vertical axis A of the bed 1.

如图 2 所示, 在根据本发明所述的无筛板的流化床, 优选地, 载体 气体入口 21 为至少两个, 其中至少一对载体气体入口 21 沿载体气体引 导件 10的内壁 103 相对设置。  As shown in Fig. 2, in the fluidized bed without a sieve plate according to the present invention, preferably, the carrier gas inlet 21 is at least two, wherein at least one pair of carrier gas inlets 21 are along the inner wall 103 of the carrier gas guide 10. Relative settings.

在根据本发明所述的无筛板的流化床中,优选地,所述分离装置 7包 括:  In the fluidized bed without a sieve plate according to the present invention, preferably, the separation device 7 comprises:

气固分离装置 71, 用于使床体 1反应后的物质中的气态物质和固态 物质分离;  a gas-solid separation device 71 for separating a gaseous substance and a solid substance in the substance after the reaction of the bed 1;

气气分离装置 72, 用于使床体 1反应后的物质中的多种气态物质分 离; 以及  a gas separation device 72 for separating a plurality of gaseous substances in the substance after the reaction of the bed 1;

冷凝装置 73, 通过冷凝获得所述最终产品。 优选地, 气固分离装置 The condensing device 73 obtains the final product by condensation. Preferably, the gas-solid separation device

71 采用 71 adopted

过滤方式, 优选采用玻璃纤维组成的过滤柱。 优选地, 气气分离装 置 72 可根据床体 1 反应后的物质中所含有的各种气体性质采取例如但 不限于化学反应或化学吸附方式来进行。冷凝装置 73可根据最终需要获 物质性质, 采用冷凝分离方式获得最终产品, 更优选地, 冷凝装置For the filtration method, a filter column composed of glass fibers is preferably used. Preferably, the gas separation device 72 can be carried out according to various gas properties contained in the substance after the reaction of the bed 1 by, for example, but not limited to, chemical reaction or chemical adsorption. The condensing device 73 can be obtained according to the final needs Material properties, using condensation separation to obtain the final product, more preferably, the condensing device

73 可采用列管式冷凝器。 73 A tubular condenser can be used.

其次说明根据本发明第二方面的三氯化硼的制备方法。  Next, a method of preparing boron trichloride according to the second aspect of the present invention will be described.

根据本发明第二方面的三氯化硼的制备方法采用上述第一方面的所 述的无筛板的流化床, 所述三氯化硼的制备方法包括: 将粉末原料碱土 金属硼化物通过原料供给装置 4填充在无筛板的流化床装置的床体 1中; 开启载体气体源 2, 将载体气体通入到无筛板的流化床装置的床体 1 中, 使得粉末原料在无筛板的流化床装置的床体 1 处于流化状态; 打开加热 装置 5 对床体 1进行加热, 在温度达到规定温度后, 通入反应气体无水 氯化氢; 待反应达到规定段时间后, 打开并启动分离装置 7, 以获得所需 的三氯化硼。  The method for preparing boron trichloride according to the second aspect of the present invention comprises the fluidized bed without the sieve plate according to the above aspect, wherein the preparation method of the boron trichloride comprises: passing the alkaline earth metal boride of the powder raw material The raw material supply device 4 is filled in the bed 1 of the fluidized bed device without the sieve plate; the carrier gas source 2 is turned on, and the carrier gas is introduced into the bed 1 of the fluidized bed device without the sieve plate, so that the powder raw material is The bed 1 of the fluidized bed device without sieve plate is in a fluidized state; the heating device 5 is turned on to heat the bed body 1, and after the temperature reaches a predetermined temperature, the reaction gas is supplied with anhydrous hydrogen chloride; after the reaction reaches a prescribed period of time , open and start the separation device 7 to obtain the desired boron trichloride.

在根据本发明所述的三氯化硼的制备方法中, 还可包括步骤: 在打 开并启动分离装置 7 的同时打开排渣口, 将床体 1 内的反应生成的反应 渣排出。  In the method for producing boron trichloride according to the present invention, the method may further include the steps of: opening the slag discharge port while opening and starting the separation device 7, and discharging the reaction slag formed by the reaction in the bed body 1.

在根据本发明所述的三氯化硼的制备方法中, 优选地, 所述碱土金 属硼化物为硼化钙或硼化镁, 其直径为 20〜200 目。  In the method for producing boron trichloride according to the present invention, preferably, the alkaline earth metal boride is calcium boride or magnesium boride, and has a diameter of 20 to 200 mesh.

在根据本发明所述的三氯化硼的制备方法中, 优选地, 反应气体无 水氯化氢在通入到床体 1 中之前经由反应气体处理装置 9进行脱水干燥 和加热升温。  In the method for producing boron trichloride according to the present invention, preferably, the reaction gas, water-free hydrogen chloride, is subjected to dehydration drying and heating and heating by the reaction gas treatment device 9 before being introduced into the bed 1.

在根据本发明所述的三氯化硼的制备方法中, 优选地, 反应过程温 度为 550 °C〜700 °C, 反应时间为 l〜2h。  In the method for producing boron trichloride according to the present invention, preferably, the reaction process temperature is 550 ° C to 700 ° C, and the reaction time is 1 to 2 h.

在根据本发明所述的三氯化硼的制备方法中, 优选地, 所述碱土金 属硼化物的流量为 80〜85g/h, 无水氯化氢的流量为 500〜600g/h。  In the method for producing boron trichloride according to the present invention, preferably, the flow rate of the alkaline earth metal boride is 80 to 85 g/h, and the flow rate of anhydrous hydrogen chloride is 500 to 600 g/h.

在根据本发明所述的三氯化硼的制备方法中, 优选地, 所述打开并 启动分离装置 7 以获得所需的三氯化硼包括使反应后的物质冷凝以获得 三氯化硼。 优选地, 冷凝温度为 -10 °C〜- 30 °C。 In the method for producing boron trichloride according to the present invention, preferably, the opening is Starting the separation device 7 to obtain the desired boron trichloride includes condensing the reacted material to obtain boron trichloride. Preferably, the condensation temperature is from -10 °C to - 30 °C.

在根据本发明所述的三氯化硼的制备方法中, 所述硼化钙优选为六 硼化钙。  In the method for producing boron trichloride according to the present invention, the calcium boride is preferably calcium hexaboride.

当所述碱土金属硼化物采用六硼化钙时, 反应方程式:  When the alkaline earth metal boride is calcium hexaboride, the reaction equation is:

CaB6+20HCl=6BCl3+CaCl2+10H2 CaB 6 +20HCl=6BCl 3 +CaCl 2 +10H 2

反应后的物质中主要有: BC13、 载气、 氢气、 BC13、 氧气、 氮气、 Cl2、 HC1等气体、 以及氯化钙渣和硼化钙等。 在气固分离装置 71中, 优选通 过由玻璃纤维组成的过滤柱将氯化钙渣和硼化钙与其他气体分离, 以实 现气固分离; 在气气分离装置 72中, 优选采用炽热的铜粉或碳粉等可以 分离出氧气和氢气, 通过碱性固体吸附材料可以除去 Cl2和 HC1 , 碱性固 体优选采用氢氧化钠或氢氧化钾; 在进行气固分离和气气分离之后, 在 冷凝装置 73 中, 通过控制冷凝装置的冷凝温度使 BC13 气体冷凝从而使 BC13 与载气分离, 载气从冷凝装置 73 中排出并回收。 优选地, 从冷凝 装置 73中排出的载气经过碱性溶液浸泡、烘干处理的活性炭填充柱处理 而进行回收, 以提高回收的载气的纯度。 优选地, 碱性溶液采用氢氧化 钠溶液或氢氧化钾溶液。 The main substances in the reaction include: BC1 3 , carrier gas, hydrogen, BC1 3 , oxygen, nitrogen, Cl 2 , HC1 and the like, and calcium chloride slag and calcium boride. In the gas-solid separation device 71, calcium chloride slag and calcium boride are preferably separated from other gases by a filter column composed of glass fibers to achieve gas-solid separation; in the gas separation device 72, preferably hot copper is used. Oxygen and hydrogen can be separated by powder or carbon powder, Cl 2 and HCl can be removed by alkaline solid adsorbent, and sodium or potassium hydroxide is preferably used for alkaline solid; after gas-solid separation and gas-gas separation, condensation In the device 73, the BC1 3 gas is condensed by controlling the condensation temperature of the condensing device to separate the BC1 3 from the carrier gas, and the carrier gas is discharged from the condensing device 73 and recovered. Preferably, the carrier gas discharged from the condensing device 73 is treated by an alkaline solution soaking and drying activated carbon packed column to recover the purity of the recovered carrier gas. Preferably, the alkaline solution is a sodium hydroxide solution or a potassium hydroxide solution.

当所述碱土金属硼化物采用硼化镁时, 反应方程式:  When the alkaline earth metal boride is magnesium boride, the reaction equation:

MgB2 + 8HC1 = 2BC13 + MgCl2 + 4H2 MgB 2 + 8HC1 = 2BC1 3 + MgCl 2 + 4H 2

反应后的物质中主要有: BC13、 载气、 氢气、 BC13、 氧气、 氮气、 Cl2The main substances in the reaction are: BC1 3 , carrier gas, hydrogen, BC1 3 , oxygen, nitrogen, Cl 2 ,

HC1等气体、 以及氯化镁渣和硼化镁等。 对于分离装置 7 (气固分离装置 71、 气气分离装置 72、 冷凝装置 73 ) 的操作可与上面采用六硼化钙的方 式相同, 在此省略重复说明。 Gas such as HC1, magnesium chloride residue, magnesium boride, and the like. The operation of the separation device 7 (the gas-solid separation device 71, the gas separation device 72, and the condensing device 73) may be the same as that of the above-described calcium hexaboride, and the repeated description thereof will be omitted.

在根据本发明所述的三氯化硼的制备方法中, 优选地, 所述载体气 体为惰性气体。 所述惰性气体可为氮气、 氩气、 氦气或其中两种组成的 混合气体, 优选地, 选用氮气。 优选地, 其流量为 0. 5m7h〜10 m7h。 In the method for producing boron trichloride according to the present invention, preferably, the carrier gas The body is an inert gas. The inert gas may be nitrogen, argon, helium or a mixed gas of two of them. Preferably, nitrogen is selected. 5米7h〜10米7h。 Preferably, the flow rate is 0. 5m7h~10 m7h.

在根据本发明所述的三氯化硼的制备方法中, 优选地, 通入反应气 体无水氯化氢后将载体气体通入到无筛板的流化床的床体 1 中的流量调 低到维持碱土金属硼化物的流化状态的量。  In the method for preparing boron trichloride according to the present invention, preferably, the flow rate of the carrier gas into the bed 1 of the fluidized bed without the sieve plate after the reaction gas is supplied with anhydrous hydrogen chloride is lowered to The amount of fluidized state of the alkaline earth metal boride is maintained.

第三, 说明根据本发明三氯化硼的制备方法的实施例。  Third, an embodiment of a method for producing boron trichloride according to the present invention will be described.

实施例 1  Example 1

将粒径为 20〜30目的粉末六硼化钙通过原料供给装置 4以 80g/h流 量填充在无筛板的流化床的床体 1 中; 开启载体气体源 2, 将氮气通入 到无筛板的流化床的床体 1 中, 使得粉末六硼化钙在无筛板的流化床的 床体 1 处于流 10 化状态; 打开加热装置 5 对床体 1 进行加热, 在温度 达到 550 °C后, 以 500g/h流量向床体 1通入由反应气体处理装置 9进行 脱水干燥的反应气体无水氯化氢, 同时不断降低氮气流量以维持硼化钙 的流化状态, 反应 lh ; 之后打开并启动分离装置 7, 通过气固分离装置 71 中的玻璃纤维组成的过滤柱分离出氯化钙渣和硼化钙, 然后通过气气 分离装置 72 中炽热的铜粉将氧气和氢气除 15 去, 之后通过固态氢氧化 钠吸附剂除去 Cl2和 HC1 , 最后在采用列管式冷凝器的冷凝器 73中在 -10 °C下进行冷凝而得到无色三氯化硼, 从冷凝器 73排出的氮气采用经过氢 氧化钠溶液浸泡、 烘干处理的活性炭填充柱处理。 。 The powdered calcium hexaboride having a particle diameter of 20 to 30 mesh is filled in the bed 1 of the fluidized bed without the sieve plate by the raw material supply device 4 at a flow rate of 80 g/h; the carrier gas source 2 is turned on, and the nitrogen gas is introduced into the absence of In the bed 1 of the fluidized bed of the sieve plate, the powdered calcium hexaboride is in a fluidized state in the bed 1 of the fluidized bed without the sieve plate; the heating device 5 is turned on to heat the bed 1 at a temperature After 550 ° C, 500 m / h flow rate into the bed 1 into the reaction gas treatment device 9 dehydration drying reaction of anhydrous hydrogen chloride, while continuously reducing the nitrogen flow to maintain the fluidized state of calcium boride, reaction lh; Thereafter, the separation device 7 is opened and started, and calcium chloride slag and calcium boride are separated by a filter column composed of glass fibers in the gas-solid separation device 71, and then oxygen and hydrogen are removed by the hot copper powder in the gas separation device 72. 15 then, after removing the Cl 2 and HCl by a solid sodium hydroxide adsorbent, and finally condensing at -10 ° C in a condenser 73 using a tubular condenser to obtain colorless boron trichloride, from the condenser 73 exhausted nitrogen is passed through sodium hydroxide Soaking liquid, the drying process is filled with activated carbon column treatment. .

实施例 2  Example 2

将 100〜120 目的粉末六硼化钙通过原料供给装置 4 以 85g/h 流量 填充在无筛板的流化床的床体 1 中; 开启载体气体源 2, 将氩气通入到 无筛板的流化床的床体 1 中, 使得粉末六硼化钙在无筛板的流化床的床 体 1 处于流化状态; 打开加热装置 5 对床体 1 进行加热, 在温度达到 700 °C后, 以 600g/h 流量向床体 1 通入由反应气体处理装置 9 进行脱 水干燥的反应气体无水氯化氢, 同时不断降低氩气流量以维持硼化钙的 流化状态, 反应 1. 5h ; 之后打开并启动分离装置 7, 通过气固分离装置 71 中的玻璃纤维组成的过滤柱分离出氯化钙渣和硼化钙, 然后通过气气 分离装置 72中炽热的碳粉将氧气和氢气除去, 之后通过固态氢氧化钾吸 附剂除去 Cl2 和 HC1 ; 最后在采用列管式冷凝器的冷凝器 73 中在 -30 °C 下进行冷凝, 得到无色三氯化硼, 冷凝器 73排出的氩气回收, 从冷凝器 73排出的氮气采用经过氢氧化钾溶液浸泡、 烘干处理的活性炭填充柱处 理。 100~120 mesh powder calcium hexaboride is filled into the bed 1 of the fluidized bed without sieve through the raw material supply device 4 at a flow rate of 85 g/h; the carrier gas source 2 is turned on, and the argon gas is introduced into the sieveless plate. In the bed 1 of the fluidized bed, the powdered calcium hexaboride is in a fluidized state in the bed 1 of the fluidized bed without the sieve plate; the heating device 5 is turned on to heat the bed 1 at a temperature After 700 °C, the reaction gas of the dehydration and drying by the reaction gas treatment device 9 is introduced into the bed 1 at a flow rate of 600 g/h, and the flow rate of the argon gas is continuously lowered to maintain the fluidized state of the calcium boride. 5h; then opening and starting the separation device 7, separating the calcium chloride residue and the calcium boride by the filter column composed of the glass fiber in the gas-solid separation device 71, and then passing the oxygen through the hot carbon powder in the gas separation device 72. And hydrogen removal, followed by removal of Cl 2 and HCl by solid potassium hydroxide adsorbent; finally condensing at -30 ° C in a condenser 73 using a tubular condenser to obtain colorless boron trichloride, condenser The argon gas discharged from the stream 73 is recovered, and the nitrogen gas discharged from the condenser 73 is treated with an activated carbon packed column which is immersed in a potassium hydroxide solution and dried.

实施例 3  Example 3

将 180〜200 目的粉末硼化镁通过原料供给装置 4 以 82g/h 流量填 充在无筛板的流化床的床体 1 中; 开启载体气体源 2, 将氦气通入到无 筛板的流化床的床体 1中,使得粉末硼化镁在无筛板的流化床的床体 1处 于流化状态; 打开加热装置 5对床体 1进行加热, 在温度达到 650 °C后, 以 550g/h 流量向床体 1 通入由反应气体处理装置 9 进行脱水干燥的反 应气体无水氯化氢, 同时不断降低氦气流量以维持硼化钙的流化状态, 反应 2h; 之后打开并启动分离装置 7, 通过气固分离装置 71 中的玻璃 纤维组成的过滤柱分离出氯化镁渣和硼化镁, 然后通过气气分离装置 72 中炽热的碳粉将氧气和氢气除去, 之后通过固态氢氧化钾吸附剂除去 Cl2 和 HC1 ; 最后在采用列管式冷凝器的冷凝器 73 中在 -10 °C下进行冷凝而 得到无色三氯化硼, 从冷凝器 73 排出的氦气采用经过氢氧化钠溶液浸 泡、 烘干处理的活性炭填充柱处理。 The powdered magnesium boride of 180~200 mesh is filled into the bed 1 of the fluidized bed without the sieve plate through the raw material supply device 4 at a flow rate of 82 g/h; the carrier gas source 2 is opened, and the helium gas is introduced into the sieveless plate. In the bed 1 of the fluidized bed, the powdered magnesium boride is in a fluidized state in the bed 1 of the fluidized bed without the sieve plate; the heating device 5 is turned on to heat the bed 1 after the temperature reaches 650 ° C. The reaction gas anhydrous dehydrogenated by the reaction gas treatment device 9 was introduced into the bed 1 at a flow rate of 550 g/h, and the flow rate of the helium gas was continuously lowered to maintain the fluidized state of the calcium boride, and the reaction was carried out for 2 hours ; The separating device 7 separates magnesium chloride slag and magnesium boride by a filter column composed of glass fibers in the gas-solid separation device 71, and then removes oxygen and hydrogen through the hot carbon powder in the gas separation device 72, and then passes through solid state hydration. The potassium adsorbent removes Cl 2 and HCl; finally, condensation is carried out at -10 ° C in a condenser 73 using a tubular condenser to obtain colorless boron trichloride, and the helium gas discharged from the condenser 73 is subjected to hydrogen. Soaking in sodium oxide solution, A column filled with activated carbon dry treatment process.

最后说明实施例的检测结果。  Finally, the detection results of the examples will be described.

表 1 给出了实施例 1-3 的检测结果。 检测时, 对冷凝器 8 (采用列 管式冷凝器) 输入的气体进行检测。 检测手段采用傅里叶变换红外光谱 仪 (FTIR) 和紫外分析仪 (UV analyzer ) 。 Table 1 shows the test results of Examples 1-3. When testing, for condenser 8 (using column Tubular condenser) The incoming gas is tested. The detection method uses a Fourier transform infrared spectrometer (FTIR) and a UV analyzer.

表 1 实施例 1-3 的检测结果  Table 1 Test results of Examples 1-3

Figure imgf000011_0001
Figure imgf000011_0001

从表 1 可见, 本发明所述的三氯化硼的制备方法可以获得纯度高的 三氯化硼。  As seen from Table 1, the method for producing boron trichloride according to the present invention can obtain boron trichloride having a high purity.

Claims

权 利 要 求 书 Claim 1. 一种无筛板的流化床, 包括:  1. A fluidized bed without a sieve plate, comprising: 床体 (1) ;  Bed body (1); 载体气体源(2), 从床体(1)的下部朝床体(1)的上部向床体(1) 提供载体气体;  a carrier gas source (2) for supplying a carrier gas from the lower portion of the bed (1) toward the bed (1) toward the upper portion of the bed (1); 反应气体供给装置 (3) , 向床体 (1) 提供反应气体;  a reaction gas supply device (3) for supplying a reaction gas to the bed (1); 原料供给装置 (4) , 向床体 (4) 提供粉体原料;  a raw material supply device (4) for supplying a powder raw material to the bed body (4); 加热装置 (5) , 对床体 (1) 进行加热;  a heating device (5) for heating the bed (1); 排渣口 (6) , 将床体 (1) 内的反应生成的反应渣排出;  a slag discharge port (6) for discharging the reaction slag generated by the reaction in the bed body (1); 分离装置 (7) , 连接于床体 (1) , 将床体 (1) 反应后的物质进行 分离, 以获得最终产品。  The separation device (7) is connected to the bed (1) to separate the reacted matter of the bed (1) to obtain the final product. 2. 根据权利要求 1所述的无筛板的流化床, 其特征在于, 所述无筛 板的流化床还包括: 载体气体引导件 (10) , 用于对载体气体源 (2) 供 给到床体 (1) 的载体气体进行引导。  2. The fluidized bed without a sieve plate according to claim 1, wherein the fluidized bed without the sieve plate further comprises: a carrier gas guide (10) for the carrier gas source (2) The carrier gas supplied to the bed (1) is guided. 3. 根据权利要求 2所述的无筛板的流化床, 其特征在于, 载体气体 引导件 (10) 带有向床体 (1) 渐缩的斜部 (101) 。  3. A sieveless fluidized bed according to claim 2, characterized in that the carrier gas guide (10) has a bevel (101) which tapers towards the bed (1). 4. 根据权利要求 2所述的无筛板的流化床, 其特征在于, 载体气体 源 (2) 的载体气体进入到载体气体引导件 (10) 的载体气体入口 (21) 的方向相对载体气体引导件 (10) 的连接载体气体入口 (21) 的位置处 的内壁 (103) 倾斜。  4. A sieveless fluidized bed according to claim 2, characterized in that the carrier gas of the carrier gas source (2) enters the carrier gas inlet (21) of the carrier gas guide (10) in the direction of the carrier The inner wall (103) of the gas guide (10) at the position where the carrier gas inlet (21) is connected is inclined. 5. 根据权利要求 2所述的无筛板的流化床, 其特征在于, 载体气体 源 (2) 的载体气体进入到载体气体引导件 (10) 的载体气体入口 (21) 的方向相对载体气体引导件 (10) 的连接载体气体入口 (21) 的位置处 的内壁 (103) 倾斜且在相对于床体 (1) 的竖向轴线 (A) 的平面内载体 气体入口 (21) 的方向相对该竖向轴线 (A) 向上倾斜。  5. The sieveless fluidized bed according to claim 2, characterized in that the carrier gas of the carrier gas source (2) enters the carrier gas inlet (21) of the carrier gas guide (10) in the direction of the carrier The inner wall (103) of the gas guide (10) at the position where the carrier gas inlet (21) is connected is inclined and in the direction of the carrier gas inlet (21) in the plane with respect to the vertical axis (A) of the bed (1) It is inclined upward with respect to the vertical axis (A). 6. 根据权利要求 4所述的无筛板的流化床, 其特征在于, 载体气体 入口 (21) 为至少两个, 其中至少一对载体气体入口 (21) 沿载体气体 引导件 (10) 的内壁 (103) 相对设置。 6. The sieveless fluidized bed according to claim 4, wherein the carrier gas The inlets (21) are at least two, wherein at least one pair of carrier gas inlets (21) are disposed opposite each other along the inner wall (103) of the carrier gas guide (10). 7. 一种三氯化硼的制备方法, 其采用如权利要求 1-6中任一项所述 的无筛板的流化床, 所述三氯化硼的制备方法包括:  A method for producing boron trichloride, which comprises the fluidized bed without a sieve plate according to any one of claims 1 to 6, wherein the preparation method of the boron trichloride comprises: 将粉末原料碱土金属硼化物通过原料供给装置 (4) 填充在无筛板的 流化床的床体 (1) 中;  The powder raw material alkaline earth metal boride is filled in the bed (1) of the fluidized bed without the sieve plate through the raw material supply device (4); 开启载体气体源(2),将载体气体通入到无筛板的流化床的床体(1) 中, 使得粉末原料碱土金属硼化物在无筛板的流化床的床体 (1) 处于流 化状态;  The carrier gas source (2) is turned on, and the carrier gas is introduced into the bed (1) of the fluidized bed without the sieve plate, so that the powder raw material alkaline earth metal boride is in the bed of the fluidized bed without the sieve plate (1) In a fluidized state; 打开加热装置 (5) 对床体 (1) 进行加热, 在温度达到规定温度后, 通入反应气体无水氯化氢;  Turn on the heating device (5) to heat the bed (1), and after the temperature reaches the specified temperature, pass the reaction gas anhydrous hydrogen chloride; 待反应达到规定段时间后, 打开并启动分离装置 (7) , 以获得所需 的三氯化硼。  After the reaction has reached a specified period of time, open and start the separation unit (7) to obtain the required boron trichloride. 8. 根据权利要求 7所述的三氯化硼的制备方法, 其特征在于, 还包 括步骤: 在打开并启动分离装置 (7) 的同时打开排渣口 (6) , 将床体 The method for preparing boron trichloride according to claim 7, further comprising the steps of: opening the slag discharge port (6) while opening and starting the separation device (7), and the bed body (1) 内的反应生成的反应渣排出。 (1) The reaction slag generated by the reaction inside is discharged. 9. 根据权利要求 7所述的三氯化硼的制备方法, 其特征在于, 反应 气体无水氯化氢在通入到床体 (1) 中之前进行脱水干燥和加热升温。  The method for producing boron trichloride according to claim 7, wherein the reaction gas anhydrous hydrogen chloride is subjected to dehydration drying and heating to be heated before being introduced into the bed (1). 10. 根据权利要求 7 所述的三氯化硼的制备方法, 其特征在于, 通 入反应气体无水氯化氢后将载体气体通入到无筛板的流化床的床体 (1) 中的流量调低到维持碱土金属硼化物的流化状态的量。  The method for preparing boron trichloride according to claim 7, wherein the carrier gas is introduced into the bed (1) of the fluidized bed without the sieve plate after the reaction gas is passed through anhydrous hydrogen chloride. The flow rate is reduced to the amount that maintains the fluidized state of the alkaline earth metal boride.
PCT/CN2013/077478 2012-06-28 2013-06-19 Fluidized bed without sieve plate and method for preparing boron trichloride Ceased WO2014000592A1 (en)

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