WO2014097549A1 - Plasma generation device and cleaning device in which plasma generation device is used - Google Patents

Abstract

A plasma generation device (1), provided with: a plasma generator (10), a plasma power supply unit (2), and a gas supply unit (3). The plasma generator includes a partition part (12) for dividing the liquid housing unit (15) and the gas housing unit (14) from each other. The partition part has a gas channel (13) for guiding the gas supplied from the gas supply unit and housed in the gas housing unit to the liquid housing unit. The first electrode (18) is disposed in the gas housing unit and the second electrode (19) is disposed in the liquid housing unit. The plasma power supply unit generates a potential supplied to the first and second electrodes and sets the potential of the second electrode to a lower value than that of the potential of the first electrode. The second electrode is formed from a material, a material compound, or a material mixture that causes sputtering phenomenon.

Description

Plasma generator and cleaning apparatus using plasma generator

The present invention relates to a plasma generator and a cleaning device using the plasma generator.

A plasma generator used in a conventional cleaning device generates radicals or the like in the bubbles to modify the liquid by performing discharge in a liquid containing bubbles. Patent Document 1 discloses an example of a conventional plasma generator.

JP 2012-43769 A

The plasma generator generates a discharge by applying a high voltage between the first electrode disposed in the gas container and the second electrode disposed in the liquid container. The plasma generator generates plasma in a gas region in the liquid stored in the liquid storage unit. The plasma generator generates hydroxy radicals from water contained in a liquid and oxygen contained in a gas. The second electrode is disposed in a liquid containing water stored in the liquid storage portion, and the first electrode is disposed in gas. When the plasma generator is applied to a cleaning device for an electronic apparatus having a movable part, there is a possibility that a seizure phenomenon may occur due to purification of impurities in the movable part. For this reason, the user adds a lubricant to the liquid as the cleaning liquid stored in the liquid storage unit in order to suppress the seizure phenomenon. The user performs maintenance such as periodic replenishment of lubricant and replacement of cleaning liquid when using the cleaning apparatus. For this reason, the user feels troublesome in the cleaning apparatus using the conventional plasma generator. Moreover, the cleaning liquid containing the replaced lubricant is treated as waste water. Considering the environment, it is desirable to reduce the amount of lubricant used as much as possible.

The present invention was created based on the above background, and an object thereof is to provide a plasma generator and a cleaning device using the plasma generator that facilitate maintenance.

One embodiment of the present invention is a plasma generation apparatus including a plasma generation unit, a plasma power supply unit, and a gas supply unit. In the plasma generation apparatus, the plasma generation unit includes a liquid storage unit, a gas storage unit, a partition wall, a first electrode, and a second electrode. The liquid storage unit stores a liquid containing at least water. The gas storage unit stores gas. The partition wall includes a gas passage that separates the liquid container from the gas container and guides the gas stored in the gas container to the liquid container. The first electrode is disposed in the gas storage unit. The second electrode is disposed in the liquid storage portion so that at least a portion paired with the first electrode is in contact with the liquid in the liquid storage portion. The gas supply unit supplies the gas containing at least oxygen to the gas storage unit. The plasma power supply unit generates a potential to be supplied to the first electrode and the second electrode, and sets the potential of the second electrode to a value lower than the potential of the first electrode. The second electrode is formed of any one of a material causing a sputtering phenomenon, a material compound, and a material mixture.

In the plasma generating apparatus, the plasma power supply unit applies a predetermined voltage between the first electrode and the second electrode so that the potential of the second electrode is lower than the potential of the first electrode. A discharge is generated between the second electrode. The plasma generation unit generates plasma in a gas region in the liquid stored in the liquid storage unit. Thereby, a hydroxyl radical is generated from water contained in the liquid and oxygen contained in the gas. According to this configuration, the plasma generation unit can generate a discharge between the first electrode and the second electrode in a state where the influence of the electrical resistance of the liquid is suppressed. The second electrode emits fine particles by a sputtering phenomenon caused by discharge. The fine particles are diffused into the liquid stored in the liquid storage unit. According to this configuration, for example, when the object to be cleaned is disposed in the liquid container, the organic matter or the like attached to the object to be cleaned is decomposed by hydroxy radicals, and the fine particles emitted from the second electrode Can be attached to the object to be cleaned. For example, when the plasma generator is applied to a cleaning device for an electronic device having a movable part, fine particles can be attached to the movable part of the electronic device. For this reason, the frictional resistance of the movable part can be reduced, and the movement can be made smooth.

Preferably, in the plasma generating apparatus, the second electrode is formed of any one of silver, a silver compound, and a silver mixture as a material, a material compound, and a material mixture that cause a sputtering phenomenon.

Preferably, in the plasma generator, the second electrode is formed of any one of a material causing a sputtering phenomenon, a material compound, and a material mixture, and has at least a facing surface facing a gas passing through the gas passage. In addition, the surface roughness of the facing surface has a maximum height value greater than 10 μm.

Preferably, in the plasma generating apparatus, the second electrode has air permeability, and the gas stored in the gas storage unit passes through the second electrode and is supplied to the liquid storage unit.

Another aspect of the present invention is a cleaning apparatus including the above plasma generator. The cleaning device emits fine particles from the second electrode by the sputtering phenomenon and adheres to the target portion to be cleaned.

Preferably, the cleaning device is applicable to cleaning of a hair removal device, and the fine particles from the second electrode are attached to the cleaning target portion provided in the hair removal device.

Preferably, in the cleaning apparatus, the hair removal tool includes a blade portion having a sliding surface, and at least a part of the sliding surface prevents movement of the microparticles emitted from the second electrode. Placed in no position.

The plasma generator and the cleaning device using the plasma generator contribute to facilitating maintenance.

The schematic block diagram of the plasma generator in 1st Embodiment. The graph which shows the voltage value applied to the 1st electrode and 2nd electrode of the plasma generator in 1st Embodiment. (A) is a partial expanded sectional view which shows typically the one operation state of the plasma generator in 1st Embodiment, (b) is the partial expanded cross section which shows the state continued in the state shown to Fig.3 (a) typically. Figure. The partial expanded sectional view which shows typically the discharge | release state of the microparticles by the plasma generator in 1st Embodiment. The perspective view of the washing | cleaning apparatus in 2nd Embodiment. (A) is a perspective view of the hair removal instrument inserted in the washing | cleaning apparatus shown in FIG. 5, (b) is a schematic block diagram of the inner blade provided in a blade part, and an outer blade. FIG. 6 is a side cross-sectional view of the cleaning device shown in FIG. 5 with the hair removal tool shown in FIG. Sectional drawing which shows the cross-sectional structure of 7Z-7Z plane of FIG. The elements on larger scale which show the enlarged structure of the dashed-dotted line circle of FIG. (A) is a schematic block diagram of the plasma generator in 3rd Embodiment, (b) is a partial expanded sectional view which shows typically the discharge | release state of the microparticles by the plasma generator of FIG. 10 (a). (A) is a schematic block diagram of the plasma generator in 4th Embodiment, (b) is a partial expanded sectional view which shows typically the discharge | release state of the microparticles by the plasma generator of Fig.11 (a).

(First embodiment)
With reference to FIG. 1, the structure of the plasma generator 1 is demonstrated.

The plasma generation apparatus 1 includes a plasma generation unit 10, a plasma power supply unit 2, a gas supply unit 3, a first lead wire 4, a second lead wire 5, and a gas introduction pipe 6. The first lead wire 4 and the second lead wire 5 connect the plasma generation unit 10 and the plasma power source unit 2 to each other. The gas introduction pipe 6 connects the plasma generation unit 10 and the gas supply unit 3 to each other.

The plasma generation unit 10 includes a substantially cylindrical case member 11. The case member 11 is not limited to a cylindrical shape. The case member 11 may be configured in a rectangular tube shape, for example.

The case member 11 includes a partition wall portion 12 that divides the internal space vertically. The partition wall 12 is formed of ceramics, for example. A region on the upper side of the partition wall portion 12 in the internal space of the case member 11 forms a liquid storage portion 15 that stores the liquid 20 containing water. A region below the partition wall portion 12 in the internal space of the case member 11 forms a gas storage portion 14 that stores gas. The dimension of each side in the plane of the partition wall 12 is several centimeters. The thickness of the partition wall portion 12 is several hundred μm to several mm, and is set to an appropriate value according to the application. The case member 11 includes a gas introduction port 17 below the right side wall 11B. The gas introduction pipe 6 inserted into the gas introduction port 17 connects the gas storage part 14 and the gas supply part 3. The gas supply unit 3 supplies a gas containing at least oxygen to the gas storage unit 14.

The partition wall 12 includes a gas passage 13. The gas introduced from the gas supply unit 3 into the gas storage unit 14 is sent out into the liquid storage unit 15 through the gas passage 13 along the first movement direction 23.

The plasma generation unit 10 includes a ring-shaped sealing material 16 disposed at the outer peripheral end of the liquid storage unit 15. The sealing material 16 closes the gap between the case member 11 and the partition wall portion 12 and prevents the liquid 20 in the liquid storage portion 15 from leaking into the gas storage portion 14.

The hole diameter of the gas passage 13 is preferably in the range of 100 μm to 800 μm, and is set to a size that suppresses the liquid 20 stored in the liquid storage portion 15 from leaking into the gas storage portion 14 through the gas passage 13. Is done.

The plasma generator 10 includes a first electrode 18 disposed in the gas container 14 and a second electrode 19 disposed in the liquid container 15. The second electrode 19 is separated from the first electrode 18 by the partition wall 12. The second electrode 19 includes a portion (a surface that generates a discharge between the surface of the first electrode 18) and a pair that is paired with the first electrode 18, and at least this portion is the liquid 20 accommodated in the liquid accommodating portion 15. It arrange | positions in the liquid accommodating part 15 so that it may contact.

Each of the first electrode 18 and the second electrode 19 has a donut shape. The first electrode 18 is disposed on the surface of the partition wall portion 12 that partitions the gas accommodating portion 14 so that the central hole of the first electrode 18 communicates with the gas passage 13. The surface of the first electrode 18 is covered with a dielectric. As described above, at least a portion of the second electrode 19 that is paired with the first electrode 18 (a surface that generates discharge between the surface of the first electrode 18) is in contact with the liquid 20 in the liquid storage unit 15. It arrange | positions in the liquid accommodating part 15 like this. The second electrode 19 is disposed on the surface of the partition wall 12 that partitions the liquid storage unit 15 so that the central hole of the second electrode 19 communicates with the gas passage 13. That is, the first electrode 18 and the second electrode 19 are disposed concentrically on both surfaces of the partition wall portion 12. The second electrode 19 is disposed at a position closer to the gas passage 13 than the first electrode 18.

Thus, the doughnut-shaped first electrode 18 is disposed in the gas storage unit 14 so as not to contact the liquid 20 introduced into the liquid storage unit 15. On the other hand, the doughnut-shaped second electrode 19 (including at least a portion paired with the first electrode 18) is disposed in the liquid storage portion 15 so as to contact the liquid 20.

The first electrode 18 is electrically connected to the plasma power supply unit 2 through the second lead wire 5. The second electrode 19 is electrically connected to the plasma power supply unit 2 through the first lead wire 4. The plasma power supply unit 2 applies a predetermined voltage between the first electrode 18 and the second electrode 19.

FIG. 2 shows voltages applied to the first electrode 18 and the second electrode 19. The plasma generator 1 sets the potential of the second electrode 19 to a value lower than the potential of the first electrode 18.

The second electrode 19 is a material, a material compound, or the like that causes a sputtering phenomenon when a potential lower than that of the first electrode 18 is applied to the second electrode 19 and a discharge occurs between the first electrode 18 and the second electrode 19. And a material mixture.

For example, the second electrode 19 is formed of any one of silver, a silver compound, and a silver material mixture as a material that causes a sputtering phenomenon by electric discharge.

However, the material of the second electrode 19 is not limited to silver, a silver compound, or a silver material mixture. Platinum, gold, copper, titanium, iron, or the like can be used as a material that causes a sputtering phenomenon by discharge. Alternatively, other materials may be used.

Next, the operation of the plasma generator 1 and the method for generating hydroxy radicals will be described.

The method for releasing ozone, hydroxy radicals, and the like into the liquid 20 includes a gas supply step, a bubble growth step, a hydroxy radical generation step, and a bubble release step.

In the gas supply step, the gas supply unit 3 supplies a gas containing oxygen to the gas storage unit 14. The gas supplied to the gas storage unit 14 is pumped to the liquid storage unit 15 via the gas passage 13. The gas supply unit 3 sends a gas containing oxygen based on air having a flow rate of about 0.01 L / min to 1.0 L / min to the gas storage unit 14 through the gas introduction pipe 6. At this time, the pressure for feeding the gas is set in the order of about ^{0.0098MPa ~ 0.49MPa (0.1kgf / cm 2} ~ 5kgf / cm 2). The gas supply flow rate is controlled by a generally known means such as a flow rate control provided in the gas supply unit 3.

When the gas supply unit 3 supplies gas to the gas storage unit 14, the gas storage unit 14 is in a positive pressure state of about 0.11 MPa to 0.59 MPa (1.1 kgf / cm ² to 6 kgf / cm ² ). . When the gas container 14 is in a positive pressure state, the gas container 14 forms a gas flow along the first movement direction 23 toward the liquid container 15 via the gas passage 13. Moreover, when the gas accommodating part 14 will be in a positive pressure state, the gas accommodating part 14 suppresses that the liquid 20 accommodated in the liquid accommodating part 15 leaks into the gas accommodating part 14 from the gas channel 13.

3 (a) and 3 (b) show the state of the liquid 20 and gas near the open end 13A of the gas passage 13 facing the liquid storage portion 15. FIG.

As shown in FIG. 3A, in the bubble growth step, the gas storage unit 14 supplies a gas containing oxygen to the liquid storage unit 15, and fine gas containing oxygen at the open end 13 </ b> A of the gas passage 13. Bubbles 24 are grown.

In the hydroxy radical generation step, the plasma power supply unit 2 applies a predetermined voltage between the first electrode 18 and the second electrode 19. The plasma power supply unit 2 preferably applies a voltage having a power of about 1 W to 100 W and enabling glow discharge under atmospheric pressure. The plasma power supply unit 2 includes a generally known voltage control unit that controls a voltage applied between the first electrode 18 and the second electrode 19. The plasma power supply unit 2 sets the potential of the second electrode 19 to a value lower than the potential of the first electrode 18. The plasma power supply unit 2 applies a potential lower than the potential of the first electrode 18 to the second electrode 19, thereby causing a gas having an atmospheric pressure or higher pressure between the first electrode 18 and the second electrode 19. Causes a discharge in the atmosphere.

The technology for generating plasma under atmospheric pressure has been reported, for example, in the literature “Sachiko Okazaki,“ Atmospheric pressure glow discharge plasma and its application ”, review lecture: 20th JSPFannual Meeting”.

The plasma generation unit 10 is a gas region in the liquid 20 stored in the liquid storage unit 15 by discharge between the surface of the first electrode 18 in contact with the gas and the surface of the second electrode 19 in contact with the liquid. A plasma is generated. The plasma is remarkably generated in the gas region in the vicinity of the gas-liquid interface between the bubble 24 and the liquid 20 that is being grown at the opening end 13 </ b> A of the gas passage 13. The plasma generation unit 10 generates plasma at the opening end 13A of the gas passage 13, thereby generating ozone, hydroxy radicals, or the like by water contained in the liquid or oxygen contained in the gas.

As described above, the plasma generation unit 10 generates a plasma by generating a potential difference in the vicinity of the gas-liquid interface between the liquid 20 stored in the liquid storage unit 15 and the bubbles 24. The plasma generation unit 10 generates more ozone, hydroxy radicals, and the like by generating a potential difference in the vicinity of the gas-liquid boundary surface between the bubble 24 and the liquid 20 at the opening end 13A of the gas passage 13 where hydroxy radicals are easily generated. To do. In addition, the plasma generation unit 10 generates ozone, hydroxy radicals, and the like not only in the bubbles 24 near the opening end 13 </ b> A of the gas passage 13 facing the liquid 20 but also in the bubbles 24 sent out to the liquid storage unit 15.

The ozone and hydroxy radicals thus generated are sent out to the liquid storage unit 15 along with the gas flow along the first movement direction 23.

In the bubble releasing step, the plasma generating unit 10 causes the bubbles 24 containing hydroxy radicals or the like to be sheared from the partition wall 12 and released into the liquid 20 by the flow of the liquid 20 stored in the liquid storage unit 15.

3B, the liquid 20 stored in the liquid storage unit 15 moves in the liquid storage unit 15 along the flow indicated by the second movement direction 25. When the liquid 20 hits the growing bubble 24, the flow of the liquid 20 acts on the bubble 24 as a shearing force. The bubbles 24 are released from the open end 13 </ b> A of the gas passage 13 into the liquid 20.

Since the bubbles 24 released into the liquid 20 are fine bubbles, they are diffused to every corner of the liquid 20 without being immediately released into the atmosphere. A part of the diffused fine bubbles 24 is easily dissolved in the liquid 20. When the bubbles 24 are dissolved in the liquid 20, the ozone concentration of the liquid 20 rises at a stretch as the ozone contained in the bubbles 24 is dissolved.

The literature “Masayoshi Takahashi,“ Improvement of water environment by microbubbles and nanobubbles ”, Aquanet, 2004.6” usually shows that fine bubbles containing ozone and various radicals are often negatively charged. Has been reported.

Other portions of the negatively charged bubbles 24 are easily adsorbed by organic substances, oils and fats, dyes, proteins, bacteria, etc. contained in the liquid 20. The organic matter or the like in the liquid 20 is decomposed by ozone dissolved in the liquid 20 or various radicals, ozone contained in the bubbles 24 adsorbed on the organic matter, or various radicals.

The hydroxy radical has a relatively large energy of about 120 kcal / mol, for example. The energy of the hydroxy radical is the double bond between the nitrogen atom and the nitrogen atom (N = N), the double bond between the carbon atom and the carbon atom (C = C), and the double bond between the carbon atom and the nitrogen atom. More than the binding energy (˜100 kcal / mol) including (C═N). For this reason, organic substances composed of bonds such as nitrogen and carbon are easily cleaved and decomposed by hydroxy radicals. Since ozone, hydroxy radicals, and the like that contribute to the decomposition of such organic substances have no persistence such as chlorine and disappear with time, they are also environmentally friendly substances.

The second electrode 19 disposed in the liquid storage unit 15 is formed of any one of silver, a silver compound, and a silver material mixture, and the second electrode 19 generates a discharge between the electrodes at a lower potential than the first electrode 18. Sometimes, the second electrode 19 emits silver microparticles.

The state of the liquid 20 and the gas in the vicinity of the opening end 13A of the gas passage 13 will be described with reference to FIG.

When the second electrode 19 is at a lower potential than the first electrode 18 and a discharge occurs between the first electrode 18 and the second electrode 19, a sputtering phenomenon occurs on the second electrode 19, and the second electrode 19 Silver fine particles 19B are ejected from one portion 19C. The silver microparticles 19 </ b> B protruding from the second electrode 19 due to the sputtering phenomenon are diffused into the liquid 20 accommodated in the liquid accommodating portion 15. At this time, since the second electrode 19 is disposed closer to the gas passage 13 than the first electrode 18, the second electrode 19 is efficiently sputtered. Therefore, the fine particles 19B can be efficiently released.

The plasma generator 1 has the following effects.

(1) The plasma generator 1 includes a plasma generator 10, a plasma power supply unit 2, and a gas supply unit 3. The plasma generation unit 10 includes a gas storage unit 14 and a liquid storage unit 15 that are partitioned by a partition wall 12 in the internal space of the case member 11. The gas storage unit 14 includes a first electrode 18. On the other hand, the liquid storage unit 15 includes a second electrode 19. The second electrode 19 includes a portion that is paired with the first electrode 18, and is disposed in the liquid storage portion 15 so that at least this portion is in contact with the liquid. The second electrode 19 is formed of any one of silver, a silver compound, and a silver material mixture. The plasma power supply unit 2 applies a predetermined voltage between the first electrode 18 and the second electrode 18 so that the potential of the second electrode 19 is lower than the potential of the first electrode 18, and A discharge is generated between the two electrodes 19. The plasma generation unit 10 generates plasma in a gas region in the liquid 20 accommodated in the liquid storage unit 15, and generates hydroxy radicals from water contained in the liquid 20 and oxygen contained in the gas. According to this configuration, the plasma generation unit 10 can generate a discharge between the first electrode 18 and the second electrode 19 while suppressing the influence of the electric resistance of the liquid 20. The second electrode 19 emits silver fine particles 19B by a sputtering phenomenon caused by discharge. The fine particles 19 </ b> B are diffused into the liquid 20 stored in the liquid storage unit 15. When the object to be cleaned is disposed in the liquid storage unit 15, the plasma generator 1 generates plasma to generate ozone and radicals that decompose organic substances and the like attached to the object to be cleaned. Further, the plasma generator 1 attaches silver fine particles 19B generated by sputtering of the second electrode 19 to the object to be cleaned. For this reason, when the plasma generator 1 is applied to a cleaning device for an electronic device having a movable part, the silver fine particles 19B can be adhered to the movable part of the electronic device. For this reason, the frictional resistance of the movable part can be reduced, and the movement can be made smooth.
(Second Embodiment)
The cleaning apparatus 30 of the second embodiment uses the plasma generator 1 of the first embodiment. Note that part or all of the description of the plasma generator 1 is omitted.

The configuration of the cleaning device 30 will be described with reference to FIG.

A cleaning device 30 as a cleaning device for the hair removal tool 100 (see FIG. 6) includes an opening 31 into which the hair removal tool 100 is inserted. The cleaning apparatus 30 includes an operation unit 42, a display unit 43, and a ventilation window 44 on the front surface of the housing 40. The housing 40 includes a stand portion 41 on the back surface. The stand portion 41 includes a contact member 45 on the inner surface that defines the opening 31. The cleaning device 30 includes a tank 50 that stores a liquid as a cleaning liquid on the back surface of the housing 40. The user inserts the object to be cleaned into the opening 31.

Referring to FIGS. 6 (a) and 6 (b), the configuration of the hair removal tool 100 as the object to be cleaned will be described.

A hair removal tool 100 shown in FIG. 6A includes a grip part 101 and a head part 102. The grip part 101 includes an operation switch 103. The user operates the operation switch 103 to control the operation of the hair removal tool 100. The head part 102 includes a blade part 104. The blade portion 104 includes, for example, two outer blades 105.

Hereinafter, the direction extending from the grip portion 101 to the head portion 102 is defined as the front direction in the front-rear direction. The direction in which the two outer blades 105 are provided side by side is the up-down direction, and the direction perpendicular to the up-down direction and the front-rear direction is the left-right direction.

The outer blade 105 is curved so as to protrude forward and is formed in an inverted U shape. The outer blade 105 has a large number of slits (blade holes).

As shown in FIG. 6B, the blade portion 104 includes an inverted U-shaped inner blade 106 that follows the curvature of the outer blade 105 inside the outer blade 105. The inner blade 106 reciprocates in the left-right direction using the driving force generated by the power source provided in the hair removal tool 100.

The hair removal tool 100 moves the inner blade 106 in the left-right direction relative to the outer blade 105, so that the outer hair 105 and the inner blade 106 cooperate with each other in the hair inserted into the slit of the outer blade 105. And cut. That is, the inner blade 106 moves relative to the outer blade 105 in the left-right direction while the outer surface 106 </ b> A of the inner blade 106 is in sliding contact with the inner surface 105 </ b> A of the outer blade 105. The blade part 104 is an example of a sliding part. The outer surface 106A of the inner blade 106 and the inner surface 105A of the outer blade 105 each constitute a sliding surface 107. When the user cleans the hair removal tool 100, the user inserts the hair removal tool 100 into the opening 31 of the cleaning device 30 with the blade portion 104 facing downward.

With reference to FIG. 7, the structure of the washing | cleaning apparatus 30 in which the hair removal tool 100 was inserted is demonstrated.

The cleaning device 30 includes a plasma generation unit 10, a plasma power supply unit 2, a gas supply unit 3, a tray 60, a tank 50, an overflow unit 32, and a pump 70. The plasma generation unit 10, the plasma power supply unit 2, and the gas supply unit 3 form the plasma generation device 1.

The receiving tray 60 receives the head portion 102 of the hair removal tool 100 inserted through the opening 31. The tank 50 stores a liquid as a cleaning liquid. The overflow part 32 is communicated with the tray 60. The pump 70 circulates the liquid in the tank 50 through the cleaning device 30 through a circulation path described below. That is, the cleaning device 30 includes a cartridge 80, an on-off valve 33, and a circulation path for circulating the liquid. The cartridge 80 has a filter 81 that filters the liquid. The on-off valve 33 controls the airtight state in the tank 50.

The circulation path is formed from a liquid introduction path 91, a drain path 92, a first path 93, a second path 94, and a third path 95. The liquid introduction path 91 introduces the liquid stored in the tank 50 into the receiving tray 60. The drainage path 92 guides the liquid discharged from the tray 60 to the cartridge 80. The first path 93 guides the liquid discharged from the overflow part 32 to the cartridge 80. The second path 94 guides the liquid discharged from the cartridge 80 to the pump 70. The third path 95 guides the liquid delivered from the pump 70 to the tank 50. In addition, the on-off valve 33 is connected to the tank 50 through an airtight path 96.

Hereinafter, each component will be described.

The stand part 41 of the housing 40 abuts on the grip part 101 of the hair removal device 100 inserted from the opening 31 and holds the hair removal device 100 together with the receiving tray 60. A contact member 45 is provided on the inner surface of the stand portion 41. The contact member 45 detects that the hair removal device 100 is attached by contact with the back terminal 108 provided on the back surface of the grip portion 101 of the hair removal device 100. The contact member 45 contacts the back terminal 108 of the hair removal tool 100 and supplies a control signal and driving power to the hair removal tool 100.

The housing 40 includes a fan 34 above the front part. The fan 34 dries the head part 102 after washing the hair removal tool 100. The housing 40 includes a first connection port 46, a second connection port 47, and a third connection port 48 formed on the rear surface in contact with the tank 50. When the tank 50 is mounted on the housing 40, the first connection port 46, the second connection port 47, and the third connection port 48 are connected to the tank discharge port 51, the tank inflow port 52, and the tank provided in the tank 50, respectively. Each communicates with the vent 53. The first connection port 46 is connected to the liquid introduction path 91. The second connection port 47 is connected to the third path 95. The third connection port 48 is connected to the airtight path 96.

The tray 60 has a concave shape that follows the shape of the head portion 102 of the hair removal tool 100, and a through hole 62 is formed in the bottom wall portion. The plasma generator 10 is provided on the back side of the bottom wall of the tray 60. The liquid storage unit 15 of the plasma generation unit 10 communicates with the internal space of the tray 60 through the through hole 62. The internal space of the tray 60 is integrated with the liquid storage unit 15 of the plasma generation unit 10 to store a liquid as a cleaning liquid.

As shown in FIG. 8, the cleaning device 30 includes a heater 35 provided on the back side of the bottom wall portion of the tray 60. The heater 35 dries the head unit 102 in conjunction with the fan 34.

The overflow part 32 has an inlet connected to the tray 60 and an outlet connected to the first path 93. The first path 93 reaches the cartridge 80 from the outlet of the overflow part 32 through the relay port 61 provided in the rear part of the tray 60.

The tank 50 has the tank discharge port 51, the tank inlet 52, and the tank vent 53 on the front surface. The cleaning device 30 controls the liquid discharge from the tank discharge port 51 by opening and closing the tank vent 53. When the tank 50 is attached to the housing 40, the tank discharge port 51 is connected to the first connection port 46, and introduces the liquid stored in the tank 50 into the tray 60 through the liquid introduction path 91. The tank inflow port 52 is connected to the second connection port 47 and is connected to the delivery port 71 of the pump 70 through the third path 95. The tank vent 53 is connected to the third connection port 48 and is connected to the on-off valve 33 through the airtight path 96.

The cartridge 80 is a substantially box-like body in which a filter 81 is housed, and includes a cartridge inlet 82 at the top and a cartridge outlet 83 at the front. The cartridge 80 is detachably provided on the lower rear side of the housing 40. When the cartridge 80 is mounted on the housing 40, the cartridge inlet 82 is connected to the tray outlet 63 through the drainage path 92 and is connected to the outlet of the overflow portion 32 through the first path 93. The cartridge outlet 83 is connected to the suction port 72 of the pump 70 through the second path 94.

The operation of the cleaning device 30 will be described.

The user attaches the hair removal device 100 to the cleaning device 30 so that the hair removal device 100 is received by the receiving tray 60 with the head portion 102 facing downward.

In response to the user's operation on the operation unit 42, the cleaning device 30 introduces liquid from the tank 50 into the receiving pan 60 and the liquid storage unit 15 of the plasma generator 1 through the liquid introduction path 91. The gas supply unit 3 sends a predetermined flow rate of gas containing oxygen based on air into the gas storage unit 14 of the plasma generation unit 10. As a result, the gas storage unit 14 is in a positive pressure state, and a gas flow toward the liquid storage unit 15 through the gas passage 13 is formed.

The plasma generation unit 10 is disposed in the liquid storage unit 15 and includes a second electrode 19 formed of any one of silver, a silver compound, and a silver material mixture. The plasma power supply unit 2 applies a predetermined voltage between the first electrode 18 and the second electrode 18 so that the potential of the second electrode 19 is lower than the potential of the first electrode 18, and A discharge is generated between the two electrodes 19. The plasma generation unit 10 is a gas region in the liquid 20 stored in the liquid storage unit 15 by discharge between the surface of the first electrode 18 in contact with the gas and the surface of the second electrode 19 in contact with the liquid. A plasma is generated. The plasma generator 1 generates plasma at the opening end 13A of the gas passage 13, thereby generating ozone, hydroxy radicals, or the like by water contained in the liquid or oxygen contained in the gas.

The generated ozone and various radicals are sent out into the liquid 20 stored in the liquid container 15 and the receiving tray 60 together with the gas flow described above. The gas storage unit 14 supplies a gas containing oxygen to the liquid storage unit 15 and grows fine bubbles 24 containing oxygen at the open end 13 </ b> A of the gas passage 13 facing the liquid storage unit 15. The grown bubbles 24 are released from the open end 13 </ b> A into the liquid 20 and diffuse to every corner of the liquid 20. The liquid 20 stored in the tray 60 and the liquid storage unit 15 of the plasma generation unit 10 has a function as a cleaning liquid in which ozone and various radicals are dissolved.

Further, the plasma generator 1 emits silver fine particles 19B from the second electrode 19 by a sputtering phenomenon. The released silver microparticles 19 </ b> B diffuse into the liquid 20 stored in the liquid storage unit 15. The liquid 20 stored in the saucer 60 and the liquid storage part 15 of the plasma generation part 10 has a function as a cleaning liquid containing fine silver particles 19B in which ozone and various radicals are dissolved.

With reference to FIG. 9, the structure of the plasma generation part 10 of the washing | cleaning apparatus 30 to which the plasma generator 1 was applied, and the blade part 104 of the hair removal tool 100 are demonstrated.

The sliding surface 107 of the blade portion 104 which is the sliding portion of the hair removal tool 100, that is, the inner surface 105 A of the outer blade 105 and the outer surface 106 A of the inner blade 106 are the first electrode 18 and the second electrode 19. At least in the vicinity of either one, it is disposed opposite to the plasma generation unit 10. In this case, at least a part of the sliding surface 107 is disposed to face the plasma generation unit 10 at a position that does not hinder the movement of the silver microparticles 19 </ b> B protruding from the second electrode 19.

The position where the movement of the silver microparticles 19B is not hindered means that the movement of the silver microparticles 19B protruding from the second electrode 19 is not hindered by a solid object such as a wall portion, and the silver microparticles 10B can slide. A position that can reach 107. Cleaning liquid, air, or the like as a liquid in contact with the second electrode 19 and the sliding surface 107 does not hinder the movement of the silver microparticles 19B.

The cleaning device 30 has the following effects.

(2) The cleaning device 30 includes the plasma generation unit 10, the plasma power supply unit 2, the gas supply unit 3, the tray 60, the tank 50, the overflow unit 32, and the pump 70. The plasma generation unit 10, the plasma power supply unit 2, and the gas supply unit 3 form the plasma generation device 1. The receiving tray 60 receives the head portion 102 of the hair removal tool 100 inserted through the opening 31. The tray 60 and the liquid storage unit 15 of the plasma generation unit 10 store a liquid as a cleaning liquid. The plasma generation unit 10 is disposed in the liquid storage unit 15 and includes a second electrode 19 formed of any one of silver, a silver compound, and a silver material mixture. The plasma power supply unit 2 applies a predetermined voltage between the first and second electrodes 18 and 19 so that the potential of the second electrode 19 is lower than the potential of the first electrode 18, A discharge is generated between the second electrode 19. The plasma generation unit 10 generates plasma in a gas region in the liquid 20 accommodated in the liquid storage unit 15, and generates hydroxy radicals from water contained in the liquid 20 and oxygen contained in the gas. The plasma generator 10 emits silver microparticles 19B from the second electrode 19 by a sputtering phenomenon. The generated ozone, various radicals, and silver microparticles 19 </ b> B are sent out into the liquid 20 stored in the liquid storage unit 15 and the receiving tray 60 together with the gas flow described above. The liquid 20 has a function as a cleaning liquid. According to this configuration, the liquid 20 having a function as a cleaning liquid is supplied to the head unit 102 as a target portion to be cleaned. For this reason, the organic matter or the like adhering to the head portion 102 is efficiently decomposed by ozone or radicals dissolved in the liquid 20 or ozone or radicals contained in the bubbles 24. Further, the cleaning device 30 causes the silver microparticles 19 </ b> B to adhere to the sliding surface 107 of the blade portion 104 of the hair removal tool 100. For this reason, the cleaning device 30 decomposes organic substances and the like attached to the head unit 102 and reduces friction of the sliding surface 107 to suppress wear. For this reason, the amount of lubricant added to the cleaning liquid, the number of times the cleaning liquid is replaced, and the number of times the cleaning liquid is replenished can be reduced to facilitate maintenance.

(Third embodiment)
The plasma generator 1 of 3rd Embodiment has a different structure in the following parts compared with the plasma generator 1 of 1st Embodiment, and has the same structure in another part. The components common to the plasma generator 1 of the first embodiment are denoted by the same reference numerals, and a part or all of the description is omitted.

The second electrode 19 of the plasma generator 1 of the first embodiment has a donut shape formed of any one of silver, a silver compound, and a silver material mixture. On the other hand, as shown in FIGS. 10A and 10B, the second electrode 26 of the plasma generator 1 of the third embodiment is formed of any one of silver, a silver compound, and a silver material mixture and at least It includes a facing surface 26A facing the gas passing through the gas passage 13, and the surface roughness of the facing surface 26A has a maximum height value greater than 10 μm.

The configuration of the plasma generation unit 10 of the third embodiment will be described with reference to FIGS. 10 (a) and 10 (b).

As shown in FIG. 10A, the plasma generation unit 10 includes a second electrode 26 disposed in the liquid storage unit 15. As in the first embodiment, the second electrode 26 is desirably disposed at a position closer to the gas passage 13 than the first electrode 18. The second electrode 26 is, for example, a silver sintered body. The second electrode 26 is, for example, a silver sintered body having an average particle diameter of 100 μm and a density of 90%.

As shown in the enlarged view of FIG. 10B, the second electrode 26 as the silver sintered body has irregularities on the surface.

When a discharge occurs between the electrodes 18 and 26 in a state where a voltage lower than that of the first electrode 18 is applied to the second electrode 26, the surface unevenness of the second electrode 26 causes the electric field applied to the second electrode 26 to be localized. To be high. For this reason, the second electrode 26 emits many silver fine particles due to a sputtering phenomenon. The discharged silver microparticles are introduced into the liquid storage unit 15 along the gas flow along the first movement direction 23 formed by the gas storage unit 14.

For this reason, it is effective that the second electrode 26 has irregularities on the surface of the facing surface 26 </ b> A that faces the gas flow along the first movement direction 23. In this case, it is desirable that the surface roughness of the uneven surface has a maximum height value larger than 10 μm.

The plasma generator 1 of the third embodiment has the same effects as (1) exhibited by the plasma generator 1 of the first embodiment. That is, also in the third embodiment, by applying a potential lower than that of the first electrode 18 to the second electrode 26 to cause discharge, silver fine particles 19B are generated together with ozone, radicals, and the like to generate the liquid container 15. There is an effect that it can be introduced. Moreover, the plasma generator 1 has the following effects.

(3) The plasma generator 1 includes a plasma generator 10, a plasma power supply unit 2, and a gas supply unit 3. The plasma generation unit 10 includes a gas storage unit 14 and a liquid storage unit 15 in which the internal space of the case member 11 is partitioned by a partition wall 12. The plasma generation unit 10 includes a first electrode 18 disposed in the gas storage unit 14. The plasma generation unit 10 includes a second electrode 26 disposed in the liquid storage unit 15. The second electrode 26 is formed of any one of silver, a silver compound, and a silver material mixture, and includes at least a facing surface 26 </ b> A that faces a gas passing through the gas passage 13. The surface roughness of the facing surface 26A has a maximum height value greater than 10 μm. The plasma power supply unit 2 applies a predetermined voltage between the first electrode 18 and the second electrode 18 so that the potential of the second electrode 26 is lower than the potential of the first electrode 18, and A discharge is generated between the two electrodes 26. According to this configuration, when the plasma generator 10 generates plasma and generates hydroxyl radicals in the liquid 20, the second electrode 26 can release more silver fine particles 19 </ b> B. For this reason, when the plasma generation apparatus 1 arranges the object to be processed in the liquid storage unit 15, more silver fine particles 19 </ b> B can be attached to the object to be processed.

(4) The plasma generator 1 is applied to the cleaning device 30 of the hair removal tool 100. The plasma generation apparatus 1 includes a plasma generation unit 10, a plasma power supply unit 2, and a gas supply unit 3. The plasma generator 10 includes a first electrode 18 and a second electrode 26. The plasma power supply unit 2 applies a potential lower than that of the first electrode 18 to the second electrode 26 to cause discharge between the first electrode 18 and the second electrode 26. The second electrode 26 includes a facing surface 26 </ b> A that is formed of any one of silver, a silver compound, and a silver material mixture and faces at least a gas that passes through the gas passage 13. The surface roughness of the facing surface 26A has a maximum height value greater than 10 μm. The cleaning device 30 includes the plasma generator 1. At least a part of the sliding surface 107 of the blade portion 104 of the hair removal tool 100 is disposed opposite to the plasma generating portion 10 at a position that does not hinder the movement of the silver microparticles 19B protruding from the second electrode 26. According to this configuration, a large number of silver microparticles 19 </ b> B protruding from the second electrode 26 due to the sputtering phenomenon can be attached to the sliding surface 107 of the blade portion 104. For this reason, seizure can be suppressed even in cleaning of the hair removal tool 100 in which the frictional resistance of the sliding surface 107 is large and seizure is likely to occur.

(Fourth embodiment)
The plasma generator 1 of 4th Embodiment has a different structure in the following parts compared with the plasma generator 1 of 3rd Embodiment, and has the same structure in another part. The components common to the plasma generator 1 of the third embodiment are denoted by the same reference numerals, and a part or all of the description is omitted.

In the plasma generator 1 of the third embodiment, the second electrode 26 is composed of a silver sintered body. On the other hand, as shown in FIGS. 11A and 11B, in the plasma generator 1 of the fourth embodiment, the second electrode 27 is made of a porous metal having air permeability.

The configuration of the plasma generation unit 10 will be described with reference to FIGS.

As shown in FIG. 11A, the plasma generation unit 10 includes a second electrode 27 disposed in the liquid storage unit 15. As in the first embodiment, the second electrode 27 is desirably disposed at a position closer to the gas passage 13 than the first electrode 18. The second electrode 27 is made of, for example, a circular silver porous metal. The second electrode 27 is made of, for example, a silver porous metal having a filling rate of 10%. The second electrode 27 is disposed in the liquid storage portion 15 so as to cover the gas passage 13 formed in the partition wall portion 12.

As shown in the enlarged view of FIG. 11 (b), the gas flow along the first movement direction 23 formed in the gas accommodating portion 14 passes through the numerous holes of the second electrode 27 and the liquid accommodating portion. 15 is introduced.

When a discharge occurs between the electrodes 18 and 27 in a state where a potential lower than that of the first electrode 18 is applied to the second electrode 27, the second electrode 27 emits silver microparticles 19B due to a sputtering phenomenon. The released silver microparticles 19 </ b> B pass through the numerous holes of the second electrode 27 along the gas flow along the first movement direction 23 formed in the gas storage unit 14 and enter the liquid storage unit 15. be introduced.

The plasma generator 1 of the fourth embodiment has the same effects as (1) exhibited by the plasma generator 1 of the first embodiment. That is, also in the fourth embodiment, by applying a potential lower than that of the first electrode 18 to the second electrode 27 to generate a discharge, silver fine particles 19B are generated together with ozone, radicals, and the like to generate the liquid container 15. There is an effect that it can be introduced. Moreover, the plasma generator 1 has the following effects.

(5) The plasma generator 1 includes a plasma generator 10, a plasma power supply unit 2, and a gas supply unit 3. The plasma generation unit 10 includes a gas storage unit 14 and a liquid storage unit 15 in which the internal space of the case member 11 is partitioned by a partition wall 12. The plasma generation unit 10 includes a first electrode 18 disposed in the gas storage unit 14. The plasma generation unit 10 includes a second electrode 27 disposed in the liquid storage unit 15. The second electrode 27 is formed of a silver porous metal having air permeability. The plasma power supply unit 2 applies a predetermined voltage between the first and second electrodes 18 and 27 so that the potential of the second electrode 27 is lower than the potential of the first electrode 18, and A discharge is generated between the two electrodes 27. According to this configuration, when the plasma generator 10 generates plasma and generates hydroxyl radicals in the liquid 20, the second electrode 27 can emit silver microparticles 19 </ b> B. The released silver microparticles 19 </ b> B are introduced into the liquid storage unit 15 through a large number of spaces (holes) in the second electrode 27. In this configuration, the plasma generator 1 can suppress the clogging of the gas passage 13 due to silicon, calcium, and the like deposited from the liquid stored in the liquid storage unit 15 by the second electrode 27. Therefore, the plasma generator 1 can stably generate hydroxy radicals and the like and release silver fine particles 19B.

(Other embodiments)
The plasma generation apparatus and the cleaning apparatus include embodiments other than the first to fourth embodiments. Hereinafter, modified examples of the first to fourth embodiments as other embodiments of the present plasma generating apparatus and the present cleaning apparatus will be described. The following modifications can be combined with each other.

-The plasma generator 1 of 1st Embodiment contains the partition part 12 as a partition part which has the gas channel | path 13. As shown in FIG. However, the partition wall portion and the gas passage 13 are not limited to the configuration shown in the first embodiment. For example, in the plasma generator 1 of a modification, a partition part is formed with a glass plate. In this case, for example, holes are formed in the glass plate by photolithography and etching. This hole functions as the gas passage 13. The hole diameter of the glass plate is a fine hole of about 1 μm to 10 μm. Alternatively, other materials may be used instead of the glass plate.

In the plasma generator 1 of the first embodiment, the gas supply unit 3 supplies gas in the atmosphere to the gas storage unit 14. However, the gas supplied by the gas supply part 3 is not restricted to the content shown by 1st Embodiment. For example, in the plasma generator 1 of the modification, the gas supply unit 3 supplies a gas having a different oxygen concentration from the atmosphere. Or the gas supply part 3 may have a gas species selection part. In this case, the gas type selection unit is configured to selectively supply one of the gas in the atmosphere and other types of gases.

-In the plasma generator 1 of 1st Embodiment, the partition part 12 as a partition part has the gas channel | path 13. As shown in FIG. However, the configuration of the partition wall portion and the gas passage 13 is not limited to the configuration shown in the first embodiment. For example, in the plasma generator 1 according to the modified example, the partition wall portion has a plurality of gas passages.

-The washing | cleaning apparatus 30 of 2nd Embodiment has the saucer discharge port 63 in the saucer 60. FIG. However, the configuration of the tray is not limited to the configuration shown in the second embodiment. For example, the cleaning device 30 according to the modified example forms a drain groove in the tray 60 and discharges the liquid from the drain passage 92.

-In the plasma generator 1 of 4th Embodiment, the 2nd electrode 27 is comprised with the porous metal which has air permeability. However, the configuration of the second electrode 27 is not limited to the configuration shown in the fourth embodiment. For example, in the modified plasma generator 1, the second electrode 27 is configured in a mesh shape.

Claims (7)

A plasma generator comprising a plasma generator, a plasma power supply, and a gas supply,
The plasma generator is
A liquid container for containing a liquid containing at least water;
A gas container for containing gas;
A partition wall having a gas passage for separating the liquid container and the gas container and guiding the gas stored in the gas container to the liquid container;
A first electrode disposed in the gas accommodating portion;
A second electrode disposed in the liquid container so that at least a portion paired with the first electrode is in contact with the liquid in the liquid container;
The gas supply unit supplies the gas containing at least oxygen to the gas storage unit,
The plasma power supply unit generates a potential to be supplied to the first electrode and the second electrode, and sets the potential of the second electrode to a value lower than the potential of the first electrode,
The second electrode is formed of any one of a material that causes a sputtering phenomenon, a material compound, and a material mixture.
Plasma generator. The second electrode is formed of any one of silver, a silver compound, and a silver mixture as a material, a material compound, and a material mixture that cause the sputtering phenomenon.
The plasma generator according to claim 1. The second electrode is formed of any one of a material that causes the sputtering phenomenon, a material compound, and a material mixture, and includes a facing surface facing at least a gas passing through the gas passage, and the surface roughness of the facing surface Has a maximum height value greater than 10 μm,
The plasma generator according to claim 1 or 2. The second electrode has air permeability, and the gas stored in the gas storage part passes through the second electrode and is supplied to the liquid storage part.
The plasma generator according to claim 1 or 2. A cleaning apparatus comprising the plasma generator according to any one of claims 1 to 4,
The cleaning device emits fine particles from the second electrode due to the sputtering phenomenon and adheres to the target portion to be cleaned.
Cleaning device. The cleaning apparatus is applicable to cleaning of a hair removal tool, and attaches the microparticles from the second electrode to the cleaning target part provided in the hair removal tool.
The cleaning apparatus according to claim 5. The hair removal tool includes a blade portion having a sliding surface,
At least a part of the sliding surface is disposed at a position that does not hinder the movement of the microparticles emitted from the second electrode.
The cleaning apparatus according to claim 6.

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