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WO2014088155A1 - Solar cell and method for manufacturing same - Google Patents

Solar cell and method for manufacturing same Download PDF

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Publication number
WO2014088155A1
WO2014088155A1 PCT/KR2013/001287 KR2013001287W WO2014088155A1 WO 2014088155 A1 WO2014088155 A1 WO 2014088155A1 KR 2013001287 W KR2013001287 W KR 2013001287W WO 2014088155 A1 WO2014088155 A1 WO 2014088155A1
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Prior art keywords
light
solar cell
semiconductor layer
core
layer
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French (fr)
Korean (ko)
Inventor
박재근
이곤섭
백승욱
심재형
최민하
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Industry University Cooperation Foundation IUCF HYU
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Industry University Cooperation Foundation IUCF HYU
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/14Photovoltaic cells having only PN homojunction potential barriers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/02Use of particular materials as binders, particle coatings or suspension media therefor
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/56Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing sulfur
    • C09K11/562Chalcogenides
    • C09K11/565Chalcogenides with zinc cadmium
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/88Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing selenium, tellurium or unspecified chalcogen elements
    • C09K11/881Chalcogenides
    • C09K11/883Chalcogenides with zinc or cadmium
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/30Coatings
    • H10F77/306Coatings for devices having potential barriers
    • H10F77/311Coatings for devices having potential barriers for photovoltaic cells
    • H10F77/315Coatings for devices having potential barriers for photovoltaic cells the coatings being antireflective or having enhancing optical properties
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/40Optical elements or arrangements
    • H10F77/42Optical elements or arrangements directly associated or integrated with photovoltaic cells, e.g. light-reflecting means or light-concentrating means
    • H10F77/45Wavelength conversion means, e.g. by using luminescent material, fluorescent concentrators or up-conversion arrangements
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/52PV systems with concentrators
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells

Definitions

  • This invention relates to a solar cell. Specifically, It is related with the silicon solar cell which can improve efficiency, and its manufacturing method.
  • a solar cell is a kind of semiconductor device that converts solar energy directly into electrical energy and has a junction structure between a p-type semiconductor and an n-type semiconductor.
  • the basic structure is the same as that of a diode.
  • the present invention provides a solar cell and a method of manufacturing the same that can improve the efficiency.
  • the present invention provides a solar cell and a method of manufacturing the same that can improve efficiency by increasing the amount of visible light through energy down conversion.
  • the present invention provides a solar cell capable of increasing the amount of incident light by absorbing light having an ultraviolet wavelength through energy down conversion using quantum dots and emitting light having a visible wavelength, and absorbing it with visible light. It provides a manufacturing method.
  • a solar cell includes first and second semiconductor layers of different conductivity types; First and second electrodes respectively formed to contact the first and second semiconductor layers; And a conversion layer formed on the second semiconductor layer and absorbing light of a wavelength having a first energy and converting the light into a light having a lower second energy.
  • the first semiconductor layer may be formed by doping a semiconductor substrate with a first impurity of a first conductivity type, and at least one surface may be textured.
  • the second semiconductor layer may be formed by doping a second impurity of a second conductivity type to a predetermined depth of the first semiconductor layer.
  • the first and second semiconductor layers may include crystalline silicon.
  • the conversion layer converts light in an ultraviolet region to emit light in the visible region, and the first and second semiconductor layers absorb visible light and visible rays converted from ultraviolet rays by the conversion layer.
  • the conversion layer includes a core and a quantum dot including a shell surrounding the quantum dot, wherein the core is formed of any one selected from CdSe, InP, InAs, CuInS 2 , PbS, and PbTe, and any one of ZnS, ZnSe, and CdSe A shell is formed, wherein the core is formed of CdSe, and the shell may be formed of ZnS.
  • the wavelength of the conversion layer is adjusted according to the size of the core and shell.
  • the core may be formed in a size of 0.1 nm to 10 nm
  • the shell may be formed in a size of 8 nm to 20 nm.
  • the wavelength to be converted increases, and as the core size decreases, the wavelength to be converted may be reduced.
  • An anti-reflection film may be formed on the second semiconductor layer, the conversion layer may be formed on the anti-reflection film, and may further include a protective layer formed on the conversion layer.
  • An anti-reflection film may be formed on the second semiconductor layer so that the anti-reflection film is textured, and the conversion layer may be formed in a recess of the anti-reflection film.
  • the conversion layer may be formed on the second semiconductor layer, and an anti-reflection film may be formed to cover the conversion layer.
  • a method of manufacturing a solar cell includes forming a second semiconductor layer on one surface of a first semiconductor layer; Forming a first electrode on the other surface of the first semiconductor layer, and forming a second electrode in a predetermined region on the second semiconductor layer; And forming a conversion layer on the second semiconductor layer to absorb light of a wavelength having a first energy and convert the light into a light having a lower second energy.
  • the first and second semiconductor layers may form the second semiconductor layer by doping the first impurity to a semiconductor substrate and then doping the second semiconductor to a predetermined depth in the first semiconductor layer. can do.
  • the semiconductor substrate may include a crystalline substrate and an amorphous substrate.
  • the method may further include texturing at least one surface of the first semiconductor layer.
  • the method may further include forming an anti-reflection film between the second semiconductor layer and the conversion layer, and may further include forming an anti-reflection film on the conversion layer.
  • the conversion layer includes a core and a quantum dot including a shell surrounding the core.
  • Embodiments of the present invention form a quantum dot of the core / shell structure on the semiconductor layer, by absorbing the high energy in the ultraviolet region by using the quantum dot to energy down conversion (energy down conversion) to emit the visible light Thereby generating visible light. Therefore, the solar cell can increase the incident light by absorbing visible light converted from ultraviolet rays in addition to visible light, compared to the conventional method of absorbing only visible light. In addition, the efficiency can be improved by increasing the incident light.
  • FIG. 1 is a cross-sectional view of a solar cell according to an embodiment of the present invention.
  • FIG. 2 is a partially enlarged photograph of a solar cell according to an embodiment of the present invention.
  • 3 and 4 are cross-sectional views of solar cells according to other embodiments of the present invention.
  • 5 is a diagram showing energy according to the wavelength of sunlight.
  • 7 and 8 are graphs measuring the optical luminescence intensity and absorbance according to the structure of the quantum dot.
  • 9 and 10 are photographs and size distribution diagrams of morphology (morphology) according to the structure of the quantum dot.
  • 11, 12 and 13 is a graph measuring reflectivity after forming quantum dots of various structures at various concentrations.
  • 17 and 18 are graphs measuring photo-voltaic performance of a solar cell according to the structure of a quantum dot.
  • FIG. 1 is a cross-sectional view of a solar cell according to an embodiment of the present invention
  • Figure 2 is a partially enlarged photograph of a solar cell according to an embodiment of the present invention.
  • a solar cell includes a first semiconductor layer 110, a first electrode 120 formed on a rear surface of the first semiconductor layer 110, and a first semiconductor layer ( The second semiconductor layer 130 formed on the 110, the antireflection film 140 formed on the second semiconductor layer 130, the conversion layer 150 formed on the antireflection film 140, and the antireflection film 140 And the second electrode 160 connected to the second semiconductor layer 130 through a predetermined region of the conversion layer 150.
  • the first semiconductor layer 110 includes a semiconductor layer doped with a first impurity of a first conductivity type.
  • the first semiconductor layer 110 may use a semiconductor substrate, and may be formed by doping the semiconductor substrate with a first impurity of a first conductivity type.
  • a silicon substrate such as a single crystal silicon substrate or a polycrystalline silicon substrate can be used. That is, a silicon wafer can be used as a semiconductor substrate.
  • semiconductor substrates other than a silicon substrate can also be used.
  • the first impurity may be a p-type impurity or an n-type impurity
  • the p-type impurity includes a group III element such as boron (B), aluminum (Al), gallium (Ga), and the n-type impurity is phosphorus ( Group V elements such as P), arsenic (As), and antimony (Sb) may be included.
  • the first semiconductor layer 110 may be doped with a group III element such as boron or a group V element such as phosphorous on the single crystal silicon substrate. Meanwhile, in order to maximize absorption of light, the first semiconductor layer 110 may be textured, thereby improving the efficiency of the solar cell.
  • the anti-reflection film 140 formed on the first semiconductor layer 110 is also textured. Therefore, the incident light is not reflected and is not lost, and light absorption is increased through light scattering. At this time, the first semiconductor layer 110 is textured to form a pyramid or inverted pyramid structure on the surface, or to form a porous or uneven structure. In addition, the first semiconductor layer 110 may be formed by texturing a rear surface as well as an upper surface.
  • the first electrode 120 is formed on the rear surface of the first semiconductor layer 110.
  • the first electrode 120 is formed on the back surface of the first semiconductor layer 110 that is textured so that the surface is planarized.
  • the first electrode 120 may be formed of a material having excellent conductivity, for example, titanium (Ti), chromium (Cr), gold (Au), aluminum (Al), nickel (Ni), silver (Ag). It can form using metals, such as these, or these alloys.
  • the first electrode 120 may be formed as a single layer, or at least two or more layers may be laminated. In the present embodiment, the first electrode 120 may be formed using aluminum.
  • the second semiconductor layer 130 is formed on the first semiconductor layer 110.
  • the second semiconductor layer 130 includes a semiconductor layer doped with a second impurity of the second conductivity type.
  • the first impurity may be a p-type impurity or an n-type impurity.
  • each of the first and second semiconductor layers 110 and 130 should have opposite conductive characteristics to form a junction structure that may cause photoelectric effect when incident light is absorbed. Therefore, if the first semiconductor layer 110 is a p-type semiconductor layer doped with p-type impurities, the second semiconductor layer 130 should be an n-type semiconductor layer doped with n-type impurities.
  • the second semiconductor layer 130 since the first semiconductor layer 110 of the embodiment of the present invention uses a silicon substrate, the second semiconductor layer 130 may be formed by doping n-type impurities to a silicon substrate at a predetermined depth.
  • the anti-reflection film 140 is formed to lower reflectance of light incident on the first and second semiconductor layers 110 and 130.
  • the anti-reflection film 140 has a refractive index of 1.0 to 4.0 silicon nitride (SiNx), titanium oxide (TiO 2 ), aluminum oxide (Al 2 O 3 ), niobium oxide (Nb 2 O 5 ), magnesium oxide (MgO) , Silicon oxide (SiO 2 ) or the like. That is, the anti-reflection film 140 may be formed of oxide, nitride, or the like having a low refractive index. In addition, the anti-reflection film 140 may be formed in a single layer structure or may be formed in a multilayer structure.
  • the anti-reflection film 140 When the anti-reflection film 140 is formed in a multilayer structure, at least two layers having different refractive indices may be stacked. In this case, at least two layers may be alternately formed repeatedly. Meanwhile, since the anti-reflection film 140 is formed on the textured first semiconductor layer 110, the anti-reflection film 140 has a textured structure. As the anti-reflection film 140 is textured, incident light is not reflected and is not lost, and light absorption may be increased through light scattering.
  • the conversion layer 150 is formed on the anti-reflection film 140. That is, the conversion layer 150 is formed along the surface of the textured anti-reflection film 140.
  • the conversion layer 150 includes a plurality of quantum dots 151 adsorbed on the anti-reflection film 140.
  • the quantum dot 151 has a core / shell structure, and a shell is formed to surround the core.
  • the quantum dot 151 has a core formed of any one selected from CdSe, InP, CuInS 2 , PbS, and CdTe, and may be a shell made of any one selected from ZnS, ZnSe, and CdSe.
  • the quantum dot 151 may be formed in a core / shell structure using CdSe / ZnS.
  • CdSe / ZnS quantum dots can be synthesized by a hot injection method, which will be described below.
  • a predetermined amount of cadmium (Cd) raw material powder and zinc (Zn) raw material powder are introduced into a predetermined reactor maintaining room temperature.
  • CdO may be used as the cadmium raw material
  • zinc acetate may be used as the zinc raw material.
  • the solvent is introduced into the reactor in which the cadmium raw material and the zinc raw material are added.
  • the solvent may be used, for example, oleic acid (Oleic Acid) and octadecene (1-Octadecene).
  • the raw powder begins to melt in the solvent, for example, at a temperature of about 120 ° C.
  • the temperature of the reactor rises to about 150 ° C.
  • cadmium (Cd) ions and zinc (Zn) ions are generated and dissolved in acetate.
  • the acetate is then evaporated when the reactor is kept in vacuo, e.g. 30 minutes, to evaporate all the acetate.
  • CdSe / ZnS quantum dots are formed by rapidly injecting TPO (Trioctylphosohine) in which selenide (Se) and sulfur (S) are dissolved and maintaining the same for a predetermined time.
  • TPO Trioctylphosohine
  • the size of the quantum dot may be adjusted according to the retention time after TPO injection and the molar ratio of the mixed materials.
  • the synthesized quantum dot 151 of the core / shell structure may be formed by, for example, mixing with a dispersing agent such as chloroform at a predetermined ratio, being formed on the antireflection film 140 by a spin coating process, and then drying.
  • Quantum dots 151 of the core / shell structure have different amounts of adsorption on the antireflection film 140 according to the molar ratio mixed with the dispersant, and the characteristics of the solar cell are also different.
  • FIG. 2 (a) is a photograph of adsorption of quantum dots of CdSe / ZnS structure at a concentration of 0.3wt%
  • FIG. 2 (b) is a photograph of adsorption of quantum dots of CdSe / ZnS structure at a concentration of 1.0wt%. to be.
  • the quantum dots of the core / shell structure are well adsorbed on the ⁇ 111> textured surface, and as the concentration of the core / shell quantum dots is increased, the amount of adsorbed on the textured surface increases.
  • the quantum dot 151 of the core / shell structure absorbs light in the ultraviolet region to generate light in the visible region. That is, the quantum dot 151 of the core / shell structure generates light in the visible region by energy down conversion.
  • the quantum dot 151 absorbs the high energy in the ultraviolet region to lower the energy and recombines the visible light. Generates the light of the line.
  • the quantum dot 151 having the core / shell structure As the quantum dot 151 having the core / shell structure is formed, the visible light converted from ultraviolet rays in addition to the visible light is absorbed to increase incident light, thereby improving efficiency.
  • the quantum dot 151 is formed in a size of nm
  • the core is formed in a size of 0.1 nm to 10 nm
  • the shell is formed in a size larger than the core to surround the core, for example 8 nm to It may be formed in a size of 20 nm.
  • the color of the light generated by the conversion may be adjusted according to the size of the core.
  • green light may be generated when using a 2.9 nm CdSe core and a ZnS shell of 10.082 nm
  • red light may be generated when using a 4.7 nm CdSe core and a 8.989 nm ZnS shell. That is, as the size of the core becomes smaller, the energy band gap becomes larger to convert ultraviolet rays into short wavelength visible light, and as the size of the core becomes larger, the energy band gap becomes smaller to convert ultraviolet rays into long wavelength visible light. For example, if the ultraviolet ray is changed into visible light of the first wavelength by using the core of the first size, the ultraviolet ray may be changed into visible light of the second wavelength having a longer wavelength than the first wavelength by using the core larger than the first size. .
  • the core can be formed in a size that is larger than the size capable of converting ultraviolet light into visible light, for example, 0.1 nm or more.
  • the shell can be formed to a certain size or more that can wrap the core.
  • the shape of the quantum dot 151 may have a variety of shapes such as spheres, rods, wires, pyramids, cubes, and the like, although not particularly limited, it is preferable to have a spherical shape.
  • the second electrode 160 is formed to contact the second semiconductor layer 130. That is, the second electrode 160 is formed in contact with the exposed second semiconductor layer 130 by removing a predetermined region of the anti-reflection film 140 and the conversion layer 150. In this case, the second electrode 160 is partially formed in order to prevent incident light from being reduced by the second electrode 160.
  • the second electrode 160 may be formed of a material having excellent conductivity. For example, titanium (Ti), chromium (Cr), gold (Au), aluminum (Al), and nickel ( It can be formed using a metal material such as Ni), silver (Ag), or an alloy thereof.
  • the second electrode 160 may be formed as a single layer, or at least two or more layers may be stacked.
  • the second electrode 170 may be formed of the same material as the first electrode 120 or may be formed of a different material. In the present embodiment, the second electrode 160 may be formed of silver (Ag).
  • the conversion layer 150 may be formed on the second semiconductor layer 130, and an anti-reflection film 140 may be formed thereon.
  • the anti-reflection film 140 may function as a protective film for protecting the conversion layer 150.
  • a protective film can also be formed separately. That is, the conversion layer 150 may be formed on the anti-reflection film 140, and a protective film may be formed on the conversion layer 150.
  • the protective film may be formed of a transparent insulating material capable of transmitting light.
  • FIG. 4 may be formed only in a concave portion of the anti-reflection film 140 in which the conversion layer 150 is textured. That is, the conversion layer 150 may be filled in the concave portion of the anti-reflection film 140 to planarize the surface, and may be formed thicker than that to form the flat surface on the anti-reflection film 140.
  • embodiments of the present invention form a conversion layer having a core / shell structure, and use energy down conversion to absorb and absorb high energy in the ultraviolet region by using the conversion layer to reduce and recombine energy. Produces visible light. Therefore, the semiconductor layer can increase incident light by absorbing visible light converted from ultraviolet light in addition to visible light, thereby improving efficiency. In this way, the efficiency of the solar cell is improved by energy down conversion by the core / shell structure conversion layer in more detail.
  • 5 is a diagram showing energy according to the wavelength of sunlight, showing the spectrum of sunlight and the wavelength and energy (blue display) converted by the silicon solar cell.
  • 6 is a diagram illustrating an energy band gap of a quantum dot of a core / shell structure according to the present invention.
  • a conventional solar cell absorbs light having a wavelength of 1100 nm or less of visible light from sunlight emitting infrared light, visible light, and ultraviolet light to generate a photo current.
  • Conventional solar cells absorb visible light and convert it into a photocurrent, but there is a limit in the photocurrent generated because the ultraviolet light does not absorb and converts into a photocurrent.
  • the solar cell according to the present invention absorbs ultraviolet rays having a wavelength of 400 nm or less by applying quantum dots of a core / shell structure to lower the energy of ultraviolet rays and then recombine to generate visible light. This will be described in more detail as follows.
  • the nano-sized shell surrounds the nano-sized core, and as shown in FIG. 6, the energy band gap Eg of the shell is larger than the energy band gap Eg of the core.
  • the electrons are quantized outside the conduction energy band and the balance energy band of the core, and electron quantum levels of E1, E2, and E3 and hole quantum levels of H1, H2, and H3 are formed.
  • the shell's high energy bandgap (Eg) serves as an energy barrier for the quantized electrons and holes in the core.
  • the quantum dot of the core / shell structure absorbs ultraviolet rays, electrons in the H3 quantum level of the balance band of the core transition to the E3 quantum level of the high conduction band, as shown in FIG. 6. And electron and hole pairs. Afterwards, the electron and hole pairs move to lower quantum levels of electrons and holes, which are then transferred to the E2 and H2 quantum levels, and then, when electrons and holes in the E2 and H2 quantum levels are recombined, they emit visible light.
  • absorbing ultraviolet light with lower energy causes the electrons in the H2 quantum level of the balance band of the core to transition to the E2 quantum level of the high conduction band, and the electron and hole pair Will make Afterwards, the electron and hole pairs move to lower quantum levels of electrons and holes, respectively, and are transferred to the E1 and H1 quantum levels, and then, when electrons and holes in the E1 and H1 quantum levels are recombined, they emit visible light.
  • the wavelength of the visible light emitted depends on the energy band gap Eg of the core, and the energy band gap Eg of the core depends on the size of the core and the energy band gap Eg of the shell.
  • the quantum dot of the core / shell structure absorbs ultraviolet rays and then converts energy to emit visible light, and the visible light emitted from the quantum dot of the core / shell structure is absorbed by the surface of the semiconductor layer, thereby shorting current of the silicon solar cell.
  • the circuit current can be increased to improve the power conversion efficiency of the solar cell.
  • quantum dots of various concentrations of core / shell structures are adsorbed onto the surface of the layer textured by ⁇ 111> by spin coating, followed by surface reflectance and light emission intensity. Photo luminescence, external quantum efficiency, photovoltaic performance, and the like were measured.
  • CdSe quantum dots consist of only 4.7 nm cores
  • CdSe / ZnS quantum dots consist of 2.89 nm CdSe cores, 10.092 nm ZnS shells, and 4.91 nm CdSe cores and 8.969 nm ZnS shells.
  • Example 1 of the present invention consists of a 2.89 nm CdSe core and 10.092 nm ZnS shell
  • Example 2 of the present invention consists of a 4.91 nm CdSe core and 8.969 nm ZnS shell.
  • the wavelengths of the light emitted by the respective quantum dots were measured. That is, visible light and ultraviolet rays of 254 nm and 365 nm wavelength were irradiated.
  • CdSe quantum dots emit light of 578nm wavelength
  • CdSe / ZnS quantum dots of Example 1 emits light of 562nm
  • CdSe / ZnS quantum dots of Example 2 emits light of 603nm wavelength Able to know.
  • the color of the light emitted by the CdSe quantum dots emits red light when irradiated with visible light, and emits red light that is slightly different depending on the wavelength when irradiated with ultraviolet light.
  • the CdSe / ZnS quantum dots of Example 1 emit green light when both visible and ultraviolet rays are irradiated.
  • the red light is emitted when the visible light is irradiated, and the red light is slightly different depending on the wavelength when the ultraviolet light is irradiated. From this, it can be seen that the quantum dot absorbs light and emits visible light through energy down conversion.
  • the surface of the silicon nitride antireflection film textured with ⁇ 111> was spin-coated at various concentrations and irradiated with ultraviolet rays at a wavelength of 254 nm, and then illuminance of the emitted light was measured.
  • CdSe quantum dots it is difficult to find the concentration dependence of the quantum dots as the emission illuminance is below the detection limit.
  • the CdSe / ZnS quantum dots of Example 1 the light emission illuminance increases as the concentration of the quantum dots increases.
  • the quantum dot of the core / shell structure absorbs light in the ultraviolet region and then emits light in the visible region by energy down conversion.
  • the emission of visible light of different colors according to the size of the core the light emission intensity increases as the concentration increases.
  • 7 and 8 are graphs measuring the intensity and absorbance of photo luminescence (hereinafter referred to as PL) according to the structure of quantum dots.
  • 7 and 8 (a) shows the PL intensity and absorbance according to the concentration of the CdSe quantum dots
  • Figure 7 and 8 (b) shows the concentration of the CdSe / ZnS quantum dots emitting green light PL intensity and absorbance are shown
  • FIG. 7 and FIG. 8C show PL intensity and absorbance according to the concentration of CdSe / ZnS quantum dots emitting red light.
  • a CdSe quantum dot detected a light emission peak at 575 nm
  • a CdSe / ZnS quantum dot emitting green light detected a light emission peak at 542 nm and 583 nm.
  • CdSe / ZnS quantum dots emitting light detected a light emission peak at 607 nm.
  • the PL intensity is 0.5 wt%
  • the CdSe / ZnS quantum dot emitting green light is about 20,000 (arb, unit)
  • the CdSe / ZnS quantum dot emitting red light is about 3000
  • the CdSe quantum dot is about 600 is shown, respectively.
  • CdSe / ZnS quantum dots emitting green light exhibit the highest PL intensity.
  • Absorbance shown in Figure 8 was measured by using a quantum dot UV-vis equipment.
  • CdSe quantum dots have an absorption peak at 559 nm, 483 nm, and 266 nm. This is because there is a discontinuous quantum energy level above and below the conduction band and the balance band of CdSe, and the absorption peaks are absorbed because the light is absorbed by these discontinuous quantum energy levels. exist.
  • the degree of absorption increases as the concentration increases.
  • the quantum dot of the core / shell structure such absorbance peaks are not confirmed, and it can be confirmed only that the wavelength region where light is absorbed increases as the concentration increases.
  • CdSe / ZnS quantum dots that emit green light have a larger energy bandgap due to the smaller size of the core (CdSe) because only light with higher energy than the energy bandgap of the core is absorbed. ), I.e., CdSe / ZnS quantum dots that begin to absorb at light with a wavelength below about 500 nm and emit red light begin to absorb at higher wavelengths (lower energy), that is, at wavelengths below 600 nm. You can see that.
  • the CdSe quantum dot absorbs light having a wavelength of about 250 nm to 560 nm, and emits light having a wavelength of 575 nm through energy down conversion.
  • CdSe / ZnS quantum dots that emit green light absorb light in the 250 nm to 500 nm wavelength region and emit light with 542 nm and 583 nm wavelengths through energy down conversion.
  • CdSe / ZnS quantum dots that emit red light absorb light with a wavelength of 250 nm to 600 nm and emit red light with a wavelength of 607 nm through energy down conversion.
  • 9 and 10 are TEM analysis of morphology according to the structure of a quantum dot and a distribution chart for each size.
  • (a) of the angle is a photograph and distribution of the CdSe quantum dot
  • (b) is a photograph and distribution of the quantum dot of the CdSe / ZnS structure that emits green light
  • (c) is a CdSe / ZnS structure that emits red light Photos and distribution maps of quantum dots.
  • the CdSe quantum dots have a size of about 4.7 nm and have an irregular shape.
  • the CdSe / ZnS quantum dots emitting green light have a size of 10.098 nm
  • the CdSe / ZnS quantum dots emitting red light have a size of 8.969 nm and have an irregular shape.
  • the size-by-size distribution according to the structure of the quantum dot shows that the size of the CdSe / ZnS quantum dots emitting green light is uniform and thus the dispersion is better than that of the CdSe quantum dots.
  • FIGS. 11 to 13 are graphs of reflectivity measured after forming quantum dots at various concentrations using a spin coating method on a silicon nitride anti-reflection film textured with ⁇ 111>.
  • FIGS. 11 to 13 (a) show reflectances according to the wavelengths of the ultraviolet and visible light regions, and (b) show reflectances according to the wavelengths of the ultraviolet light regions.
  • the concentration of the CdSe quantum dot increases as compared with the reference where the surface reflectance does not form the quantum dot in the ultraviolet region (200 nm to 450 nm). Increases. In particular, about 1 wt% CdSe quantum dots decrease from about 25% to about 17.5%. As shown in FIG. 12, when the CdSe / ZnS quantum dots emitting green light are coated, the surface reflectivity decreases from about 25% to 15% as the concentration of the quantum dots increases in the ultraviolet region. In addition, as shown in FIG.
  • 14, 15, and 16 are results of measuring external quantum efficiency (EQE) according to the structure of a quantum dot by using the IPCE equipment.
  • 14 to 16 (a) show the external quantum efficiency according to the wavelength of the ultraviolet and visible light region, (b) shows the external quantum efficiency according to the wavelength of the ultraviolet region.
  • the EQE data hardly changes. Although the quantum dots absorbed the light and the reflectance was reduced, it was confirmed that there was no change in the EQE data because the amount of light emitted was not enough.
  • the CdSe / ZnS quantum dots emitting green light and red light may increase efficiency between 300 nm and 500 nm, unlike CdSe quantum dots.
  • the silicon solar cell did not have good conversion efficiency at a wavelength of 300 nm to 500 nm, but it was confirmed that the efficiency of the silicon solar cell was increased by converting the light having a wavelength of 500 nm or more.
  • the conversion efficiency decreases as the concentration increases due to the decrease in reflectivity.
  • the efficiency is further increased because it is less than the light that is energy down-converted into ultraviolet light and converted into visible light.
  • FIG. 17 and 18 are graphs illustrating photo-voltaic performance of a solar cell in which quantum dots are formed on a surface of a silicon nitride antireflection film textured with ⁇ 111>.
  • FIG. 17 illustrates the short-circuit current density Jsc of the solar cell according to the concentration of the quantum dots
  • FIG. 18 illustrates the efficiency of the solar cell according to the concentration of the quantum dots.
  • 17 and 18, (a), (b) and (c) show the short-circuit current densities and efficiencies of CdSe quantum dots, CdSe / ZnS quantum dots emitting green light, and CdSe / ZnS quantum dots emitting red light, respectively. It is shown.
  • the short-circuit current density (Jsc) and power conversion efficiency (PCE) of the solar cell in which the CdSe quantum dots are formed do not increase compared to the reference in which the quantum dots are not formed. Did.
  • the short-circuit current density has a concentration of about 0.2 wt% of the quantum dot compared to the reference. After a sharp increase, after about 0.5wt%, it decreases slightly as the quantum dot concentration increases. However, at a concentration of about 0.2 wt%, the short-circuit current density is increased by about 2.2 mA / cm 2 compared to the reference, and thus it can be seen that the improvement is about 6.34%.
  • the short-circuit current density increases rapidly with respect to the reference to the concentration of the quantum dots by about 0.4 wt%. After about 0.5wt%, it decreases slightly as the concentration of quantum dots increases. However, at a concentration of about 0.4 wt%, the short-circuit current density is increased by 1.9 mA / cm 2 compared to the reference, and accordingly, it can be seen that the improvement is about 5.58%.
  • FIG. 18 shows that the short-circuit current density
  • the PCE increases as the concentration of the quantum dots increases to 0.4 wt%, increasing by 0.54% relative to the reference, and improving by about 3.8%.
  • the quantum dot concentration increases at 0.5 wt% or more, it is slightly decreased.
  • the PCE increase (0.91%) of solar cells with CdSe / ZnS quantum dots emitting green light is greater than the PCE (0.54%) of solar cells with CdSe / ZnS quantum dots emitting red light.

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Abstract

The present invention provides a solar cell comprising: first and second semiconductor layers which have different conductive forms; first and second electrodes which are respectively formed so as to come into contact with the first and second semiconductor layers; and a conversion layer which is formed on the second semiconductor layer, and which absorbs light of a wavelength having first energy and converts the light into light of a wavelength having second energy that is lower than the first energy. Thus, the present invention can improve efficiency by absorbing visible light and visible light converted from ultraviolet light.

Description

태양 전지 및 그 제조 방법Solar cell and manufacturing method thereof

본 발명은 태양 전지에 관한 것으로, 특히 효율을 향상시킬 수 있는 실리콘 태양 전지 및 그 제조 방법에 관한 것이다.TECHNICAL FIELD This invention relates to a solar cell. Specifically, It is related with the silicon solar cell which can improve efficiency, and its manufacturing method.

태양 전지(Solar Cell)는 태양 광 에너지를 직접 전기 에너지로 변환시키는 반도체 소자의 일종으로서 p형 반도체와 n형 반도체의 접합(junction) 구조를 가지며, 그 기본 구조는 다이오드와 동일하다고 할 수 있다.A solar cell is a kind of semiconductor device that converts solar energy directly into electrical energy and has a junction structure between a p-type semiconductor and an n-type semiconductor. The basic structure is the same as that of a diode.

이러한 태양 전지의 성능은 광 에너지를 전기 에너지로 변화하는 효율에 따라 크게 좌우된다. 따라서, 태양 전지의 효율을 증가시키기 위한 연구가 많이 진행되고 있으며, 그중 하나의 방법으로서 광이 입사되는 부분을 텍스처링하여 빛의 흡수를 최대화하는 방법이 있다. 이러한 텍스처링은 광 산란을 통해 광 흡수율을 증가시킨다.The performance of such solar cells is highly dependent on the efficiency of converting light energy into electrical energy. Therefore, a lot of research is being conducted to increase the efficiency of solar cells, and one of them is a method of maximizing absorption of light by texturing a portion where light is incident. This texturing increases the light absorption through light scattering.

그러나, 텍스처링에 의해서도 입사광의 양을 더 이상 증가시키기 어렵다. 따라서, 입사광의 양을 증가시키고 그에 따라 효율을 향상시킬 수 있는 방안이 요구된다.However, it is difficult to further increase the amount of incident light even by texturing. Therefore, there is a need for a method capable of increasing the amount of incident light and thereby improving efficiency.

본 발명은 효율을 향상시킬 수 있는 태양 전지 및 그 제조 방법을 제공한다.The present invention provides a solar cell and a method of manufacturing the same that can improve the efficiency.

본 발명은 에너지 다운 컨버전(energy down conversion)을 통하여 가시광선의 양을 증가시켜 효율을 향상시킬 수 있는 태양 전지 및 그 제조 방법을 제공한다.The present invention provides a solar cell and a method of manufacturing the same that can improve efficiency by increasing the amount of visible light through energy down conversion.

본 발명은 양자점을 이용한 에너지 다운 컨버전(energy down conversion)을 통하여 자외선 파장의 광을 흡수하여 가시광선 파장의 광을 방출하고, 이를 가시광선과 함께 흡수함으로써 입사광의 양을 증가시킬 수 있는 태양 전지 및 그 제조 방법을 제공한다.The present invention provides a solar cell capable of increasing the amount of incident light by absorbing light having an ultraviolet wavelength through energy down conversion using quantum dots and emitting light having a visible wavelength, and absorbing it with visible light. It provides a manufacturing method.

본 발명의 일 양태에 따른 태양 전지는 서로 다른 도전형의 제 1 및 제 2 반도체층; 상기 제 1 및 제 2 반도체층에 접촉되도록 각각 형성된 제 1 및 제 2 전극; 및 상기 제 2 반도체층 상에 형성되며, 제 1 에너지를 갖는 파장의 광을 흡수하여 이보다 낮은 제 2 에너지를 갖는 파장의 광으로 변환하는 변환층을 포함한다.A solar cell according to an aspect of the present invention includes first and second semiconductor layers of different conductivity types; First and second electrodes respectively formed to contact the first and second semiconductor layers; And a conversion layer formed on the second semiconductor layer and absorbing light of a wavelength having a first energy and converting the light into a light having a lower second energy.

상기 제 1 반도체층은 반도체 기판에 제 1 도전형의 제 1 불순물을 도핑하여 형성되며, 적어도 일 면이 텍스처링 처리될 수 있다.The first semiconductor layer may be formed by doping a semiconductor substrate with a first impurity of a first conductivity type, and at least one surface may be textured.

상기 제 2 반도체층은 상기 제 1 반도체층의 소정 깊이로 제 2 도전형의 제 2 불순물을 도핑하여 형성될 수 있다.The second semiconductor layer may be formed by doping a second impurity of a second conductivity type to a predetermined depth of the first semiconductor layer.

상기 제 1 및 제 2 반도체층은 결정질 실리콘을 포함할 수 있다.The first and second semiconductor layers may include crystalline silicon.

상기 변환층은 자외선 영역의 광을 변환시켜 가시광선 영역의 광을 방출하고, 상기 제 1 및 제 2 반도체층은 가시광선과 상기 변환층에 의해 자외선으로부터 변환된 가시광선을 흡수한다.The conversion layer converts light in an ultraviolet region to emit light in the visible region, and the first and second semiconductor layers absorb visible light and visible rays converted from ultraviolet rays by the conversion layer.

상기 변환층은 코어와, 이를 감싸는 쉘을 포함하는 양자점을 포함하고, 상기 양자점은 CdSe, InP, InAs, CuInS2, PbS 및 PbTe로부터 선택된 어느 하나로 코어가 형성되고, ZnS, ZnSe 및 CdSe의 어느 하나로 쉘이 형성되는데, 상기 코어는 CdSe로 형성되고, 상기 쉘은 ZnS로 형성될 수 있다.The conversion layer includes a core and a quantum dot including a shell surrounding the quantum dot, wherein the core is formed of any one selected from CdSe, InP, InAs, CuInS 2 , PbS, and PbTe, and any one of ZnS, ZnSe, and CdSe A shell is formed, wherein the core is formed of CdSe, and the shell may be formed of ZnS.

상기 변환층은 상기 코어 및 쉘의 사이즈에 따라 변환되는 파장이 조절된다.The wavelength of the conversion layer is adjusted according to the size of the core and shell.

상기 코어는 0.1㎚ 내지 10㎚의 사이즈로 형성되고, 상기 쉘은 8㎚ 내지 20㎚의 사이즈로 형성될 수 있다. 또한, 코어 사이즈가 증가할수록 변환되는 파장은 증가하고, 코어 사이즈가 감소할수록 변환되는 파장은 감소될 수 있다.The core may be formed in a size of 0.1 nm to 10 nm, the shell may be formed in a size of 8 nm to 20 nm. In addition, as the core size increases, the wavelength to be converted increases, and as the core size decreases, the wavelength to be converted may be reduced.

상기 제 2 반도체층 상에 반사 방지막이 형성되고, 상기 변환층이 상기 반사 방지막 상에 형성될 수 있고, 상기 변환층 상에 형성된 보호층을 더 포함할 수 있다.An anti-reflection film may be formed on the second semiconductor layer, the conversion layer may be formed on the anti-reflection film, and may further include a protective layer formed on the conversion layer.

상기 제 2 반도체층 상에 반사 방지막이 형성되어 상기 반사 방지막은 텍스처링되고, 상기 반사 방지막의 오목부 내에 상기 변환층이 형성될 수 있다.An anti-reflection film may be formed on the second semiconductor layer so that the anti-reflection film is textured, and the conversion layer may be formed in a recess of the anti-reflection film.

상기 변환층은 상기 제 2 반도체층 상에 형성되고, 상기 변환층을 덮도록 반사 방지막이 형성될 수 있다.The conversion layer may be formed on the second semiconductor layer, and an anti-reflection film may be formed to cover the conversion layer.

본 발명의 다른 양태에 따른 태양 전지의 제조 방법은 제 1 반도체층의 일면 상에 제 2 반도체층을 형성하는 단계; 상기 제 1 반도체층의 타면 상에 제 1 전극을 형성하고, 상기 제 2 반도체층 상의 소정 영역에 제 2 전극을 형성하는 단계; 및 상기 제 2 반도체층 상에 제 1 에너지를 갖는 파장의 광을 흡수하여 이보다 낮은 제 2 에너지를 갖는 파장의 광으로 변환하는 변환층을 형성하는 단계를 포함한다.According to another aspect of the present invention, a method of manufacturing a solar cell includes forming a second semiconductor layer on one surface of a first semiconductor layer; Forming a first electrode on the other surface of the first semiconductor layer, and forming a second electrode in a predetermined region on the second semiconductor layer; And forming a conversion layer on the second semiconductor layer to absorb light of a wavelength having a first energy and convert the light into a light having a lower second energy.

상기 제 1 및 제 2 반도체층은, 반도체 기판에 제 1 불순물을 도핑하여 상기 제 1 반도체층을 형성한 후 상기 제 1 반도체층에 소정 깊이로 제 2 불순물을 도핑하여 상기 제2 반도체층을 형성할 수 있다.The first and second semiconductor layers may form the second semiconductor layer by doping the first impurity to a semiconductor substrate and then doping the second semiconductor to a predetermined depth in the first semiconductor layer. can do.

상기 반도체 기판은 결정질 기판 및 비정질 기판을 포함할 수 있다.The semiconductor substrate may include a crystalline substrate and an amorphous substrate.

상기 제 1 반도체층의 적어도 일면을 텍스처링 처리하는 단계를 더 포함한다.The method may further include texturing at least one surface of the first semiconductor layer.

상기 제 2 반도체층과 변환층 사이에 반사 방지막을 형성하는 단계를 더 포함할 수 있고, 상기 변환층 상에 반사 방지막을 형성하는 단계를 더 포함할 수 있다.The method may further include forming an anti-reflection film between the second semiconductor layer and the conversion layer, and may further include forming an anti-reflection film on the conversion layer.

상기 변환층은 코어와, 상기 코어를 감싸는 쉘을 포함하는 양자점을 포함한다.The conversion layer includes a core and a quantum dot including a shell surrounding the core.

본 발명의 실시 예들은 반도체층 상에 코어/쉘 구조의 양자점을 형성하고, 양자점을 이용하여 자외선 영역의 높은 에너지를 흡수하여 에너지를 다운시켜 가시광선으로 방출하는 에너지 다운 컨버전(energy down conversion)에 의해 가시광선의 광을 생성한다. 따라서, 태양 전지는 가시광선만을 흡수하는 종래에 비해 가시광선에 더해 자외선으로부터 변환된 가시광선을 흡수함으로써 입사광을 증가시킬 수 있다. 또한, 입사광이 증가함으로써 효율을 향상시킬 수 있다.Embodiments of the present invention form a quantum dot of the core / shell structure on the semiconductor layer, by absorbing the high energy in the ultraviolet region by using the quantum dot to energy down conversion (energy down conversion) to emit the visible light Thereby generating visible light. Therefore, the solar cell can increase the incident light by absorbing visible light converted from ultraviolet rays in addition to visible light, compared to the conventional method of absorbing only visible light. In addition, the efficiency can be improved by increasing the incident light.

도 1은 본 발명의 일 실시 예에 따른 태양 전지의 단면도.1 is a cross-sectional view of a solar cell according to an embodiment of the present invention.

도 2는 본 발명의 일 실시 예에 따른 태양 전지의 부분 확대 사진.2 is a partially enlarged photograph of a solar cell according to an embodiment of the present invention.

도 3 및 도 4는 본 발명의 다른 실시 예들에 따른 태양 전지의 단면도.3 and 4 are cross-sectional views of solar cells according to other embodiments of the present invention.

도 5는 태양광의 파장에 따른 에너지를 도시한 도면.5 is a diagram showing energy according to the wavelength of sunlight.

도 6은 본 발명에 따른 코어/쉘 구조의 양자점의 에너지 밴드갭.6 is an energy bandgap of a quantum dot of a core / shell structure according to the present invention;

도 7 및 도 8은 양자점의 구조에 따른 광 루미네선스 강도 및 흡광도를 측정한 그래프.7 and 8 are graphs measuring the optical luminescence intensity and absorbance according to the structure of the quantum dot.

도 9 및 도 10은 양자점의 구조에 따른 모폴로지(morphology)를 분석한 사진 및 사이즈별 분포도.9 and 10 are photographs and size distribution diagrams of morphology (morphology) according to the structure of the quantum dot.

도 11, 도 12 및 도 13은 다양한 구조의 양자점을 다양한 농도로 형성한 후 반사도를 측정한 그래프.11, 12 and 13 is a graph measuring reflectivity after forming quantum dots of various structures at various concentrations.

도 14, 도 15 및 도 16은 양자점의 구조에 따른 외부 양자 효율를 측정한 그래프.14, 15 and 16 are graphs of the external quantum efficiency measured according to the structure of the quantum dot.

도 17 및 도 18은 양자점의 구조에 따른 태양 전지의 광전(photo-voltaic) 성능을 측정한 그래프.17 and 18 are graphs measuring photo-voltaic performance of a solar cell according to the structure of a quantum dot.

이하, 첨부된 도면을 참조하여 본 발명의 실시 예를 상세히 설명하기로 한다. 그러나, 본 발명은 이하에서 개시되는 실시 예에 한정되는 것이 아니라 서로 다른 다양한 형태로 구현될 것이며, 단지 본 실시 예들은 본 발명의 개시가 완전하도록 하며, 통상의 지식을 가진 자에게 발명의 범주를 완전하게 알려주기 위해 제공되는 것이다.Hereinafter, with reference to the accompanying drawings will be described an embodiment of the present invention; However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various forms, and only the embodiments are intended to complete the disclosure of the present invention and to those skilled in the art. It is provided for complete information.

도 1은 본 발명의 일 실시 예에 따른 태양 전지의 단면도이고, 도 2는 본 발명의 일 실시 예에 따른 태양 전지의 부분 확대 사진이다.1 is a cross-sectional view of a solar cell according to an embodiment of the present invention, Figure 2 is a partially enlarged photograph of a solar cell according to an embodiment of the present invention.

도 1을 참조하면, 본 발명의 일 실시 예에 따른 태양 전지는 제 1 반도체층(110)과, 제 1 반도체층(110)의 후면에 형성된 제 1 전극(120)과, 제 1 반도체층(110) 상에 형성된 제 2 반도체층(130)과, 제 2 반도체층(130) 상에 형성된 반사 방지막(140)과, 반사 방지막(140) 상에 형성된 변환층(150)과, 반사 방지막(140) 및 변환층(150)의 소정 영역을 통하여 제 2 반도체층(130)과 연결된 제 2 전극(160)을 포함한다.Referring to FIG. 1, a solar cell according to an embodiment of the present invention includes a first semiconductor layer 110, a first electrode 120 formed on a rear surface of the first semiconductor layer 110, and a first semiconductor layer ( The second semiconductor layer 130 formed on the 110, the antireflection film 140 formed on the second semiconductor layer 130, the conversion layer 150 formed on the antireflection film 140, and the antireflection film 140 And the second electrode 160 connected to the second semiconductor layer 130 through a predetermined region of the conversion layer 150.

제 1 반도체층(110)은 제 1 도전형의 제 1 불순물이 도핑된 반도체층을 포함한다. 여기서, 제 1 반도체층(110)은 반도체 기판을 이용할 수 있으며, 반도체 기판에 제 1 도전형의 제 1 불순물을 도핑하여 형성할 수 있다. 반도체 기판으로는 단결정 실리콘 기판, 다결정 실리콘 기판 등의 실리콘 기판을 이용할 수 있다. 즉, 반도체 기판으로는 실리콘 웨이퍼를 이용할 수 있다. 물론, 실리콘 기판 이외의 반도체 기판을 이용할 수도 있다. 또한, 제 1 불순물은 p형 불순물 또는 n형 불순물일 수 있는데, p형 불순물은 붕소(B), 알루미늄(Al), 갈륨(Ga) 등의 Ⅲ족 원소를 포함하며, n형 불순물은 인(P), 비소(As), 안티몬(Sb) 등의 V족 원소를 포함할 수 있다. 예를 들면, 제 1 반도체층(110)은 단결정 실리콘 기판에 붕소 등의 Ⅲ족 원소가 도핑될 수 있고, 인 등의 V족 원소가 도핑될 수도 있다. 한편, 광의 흡수를 최대화하기 위해 제 1 반도체층(110)은 텍스처링(texturing)될 수 있고, 그에 따라 태양 전지의 효율을 향상시킬 수 있다. 즉, 제 1 반도체층(110)이 텍스처링 처리됨으로써 제 1 반도체층(110) 상에 형성되는 반사 방지막(140) 또한 텍스처링되어 형성된다. 따라서, 입사한 광이 반사되지 않아 손실되지 않고, 광 산란을 통해 광 흡수율을 증가시킨다. 이때, 제 1 반도체층(110)은 표면에 피라미드 또는 역피라미드 구조가 형성되거나, 다공성 또는 요철 구조가 형성되도록 텍스처링된다. 또한, 제 1 반도체층(110)은 상면 뿐만 아니라 후면도 텍스처링되어 형성될 수 있다.The first semiconductor layer 110 includes a semiconductor layer doped with a first impurity of a first conductivity type. Here, the first semiconductor layer 110 may use a semiconductor substrate, and may be formed by doping the semiconductor substrate with a first impurity of a first conductivity type. As the semiconductor substrate, a silicon substrate such as a single crystal silicon substrate or a polycrystalline silicon substrate can be used. That is, a silicon wafer can be used as a semiconductor substrate. Of course, semiconductor substrates other than a silicon substrate can also be used. In addition, the first impurity may be a p-type impurity or an n-type impurity, the p-type impurity includes a group III element such as boron (B), aluminum (Al), gallium (Ga), and the n-type impurity is phosphorus ( Group V elements such as P), arsenic (As), and antimony (Sb) may be included. For example, the first semiconductor layer 110 may be doped with a group III element such as boron or a group V element such as phosphorous on the single crystal silicon substrate. Meanwhile, in order to maximize absorption of light, the first semiconductor layer 110 may be textured, thereby improving the efficiency of the solar cell. That is, since the first semiconductor layer 110 is textured, the anti-reflection film 140 formed on the first semiconductor layer 110 is also textured. Therefore, the incident light is not reflected and is not lost, and light absorption is increased through light scattering. At this time, the first semiconductor layer 110 is textured to form a pyramid or inverted pyramid structure on the surface, or to form a porous or uneven structure. In addition, the first semiconductor layer 110 may be formed by texturing a rear surface as well as an upper surface.

제 1 전극(120)은 제 1 반도체층(110)의 후면에 형성된다. 예를 들어, 제 1 전극(120)은 표면이 평탄화되도록 텍스처링된 제 1 반도체층(110) 후면에 형성된다. 이러한 제 1 전극(120)은 전도성이 우수한 물질로 형성될 수 있는데, 예를 들어 티타늄(Ti), 크롬(Cr), 금(Au), 알루미늄(Al), 니켈(Ni), 은(Ag) 등의 금속 또는 이들의 합금을 이용하여 형성할 수 있다. 또한, 제 1 전극(120)은 단일층으로 형성할 수 있고, 적어도 두층 이상을 적층 형성할 수도 있다. 본 실시 예에서 제 1 전극(120)은 알루미늄을 이용하여 형성할 수 있다.The first electrode 120 is formed on the rear surface of the first semiconductor layer 110. For example, the first electrode 120 is formed on the back surface of the first semiconductor layer 110 that is textured so that the surface is planarized. The first electrode 120 may be formed of a material having excellent conductivity, for example, titanium (Ti), chromium (Cr), gold (Au), aluminum (Al), nickel (Ni), silver (Ag). It can form using metals, such as these, or these alloys. In addition, the first electrode 120 may be formed as a single layer, or at least two or more layers may be laminated. In the present embodiment, the first electrode 120 may be formed using aluminum.

제 2 반도체층(130)은 제 1 반도체층(110) 상에 형성된다. 이러한 제 2 반도체층(130)은 제 2 도전형의 제 2 불순물이 도핑된 반도체층을 포함한다. 여기서, 제 1 불순물은 p형 불순물 또는 n형 불순물일 수 있다. 그런데, 제 1 및 제 2 반도체층(110, 130)은 입사광이 흡수되면 광전 효과를 유발할 수 있는 접합 구조를 형성하기 위해 각각 서로 반대되는 도전 특성을 가져야 한다. 따라서, 제 1 반도체층(110)이 p형 불순물이 도핑된 p형 반도체층이라면, 제 2 반도체층(130)은 n형 불순물이 도핑된 n형 반도체층이어야 한다. 그런데, 본 발명의 실시 예의 제 1 반도체층(110)은 실리콘 기판을 이용하므로 제 2 반도체층(130)은 실리콘 기판에 소정 깊이로 n형 불순물을 도핑하여 형성할 수 있다.The second semiconductor layer 130 is formed on the first semiconductor layer 110. The second semiconductor layer 130 includes a semiconductor layer doped with a second impurity of the second conductivity type. Here, the first impurity may be a p-type impurity or an n-type impurity. However, each of the first and second semiconductor layers 110 and 130 should have opposite conductive characteristics to form a junction structure that may cause photoelectric effect when incident light is absorbed. Therefore, if the first semiconductor layer 110 is a p-type semiconductor layer doped with p-type impurities, the second semiconductor layer 130 should be an n-type semiconductor layer doped with n-type impurities. However, since the first semiconductor layer 110 of the embodiment of the present invention uses a silicon substrate, the second semiconductor layer 130 may be formed by doping n-type impurities to a silicon substrate at a predetermined depth.

반사 방지막(140)은 제 1 및 제 2 반도체층(110, 130)으로 입사되는 광의 반사율을 낮추기 위해 형성한다. 이러한 반사 방지막(140)은 굴절율이 1.0∼4.0인 실리콘 나이트라이드(SiNx), 티타늄 옥사이드(TiO2), 알루미늄 옥사이드(Al2O3), 니오븀 옥사이드(Nb2O5), 마그네슘 옥사이드(MgO), 실리콘 옥사이드(SiO2) 등을 이용하여 형성할 수 있다. 즉, 반사 방지막(140)은 굴절율이 낮은 옥사이드, 나이트라이드 등으로 형성될 수 있다. 또한, 반사 방지막(140)은 단일층 구조로 형성할 수 있으며, 다층 구조로 형성할 수도 있다. 반사 방지막(140)을 다층 구조로 형성하는 경우 굴절률이 다른 적어도 두 층을 적층하여 형성할 수도 있다. 이때, 적어도 두 층을 교대로 반복하여 형성할 수도 있다. 한편, 반사 방지막(140)은 텍스처링된 제 1 반도체층(110) 상에 형성되므로 텍스처링(texturing)된 구조로 형성된다. 반사 방지막(140)이 텍스처링됨으로써 입사한 광이 반사되지 않아 손실되지 않고, 광 산란을 통해 광 흡수율을 증가시킬 수 있다.The anti-reflection film 140 is formed to lower reflectance of light incident on the first and second semiconductor layers 110 and 130. The anti-reflection film 140 has a refractive index of 1.0 to 4.0 silicon nitride (SiNx), titanium oxide (TiO 2 ), aluminum oxide (Al 2 O 3 ), niobium oxide (Nb 2 O 5 ), magnesium oxide (MgO) , Silicon oxide (SiO 2 ) or the like. That is, the anti-reflection film 140 may be formed of oxide, nitride, or the like having a low refractive index. In addition, the anti-reflection film 140 may be formed in a single layer structure or may be formed in a multilayer structure. When the anti-reflection film 140 is formed in a multilayer structure, at least two layers having different refractive indices may be stacked. In this case, at least two layers may be alternately formed repeatedly. Meanwhile, since the anti-reflection film 140 is formed on the textured first semiconductor layer 110, the anti-reflection film 140 has a textured structure. As the anti-reflection film 140 is textured, incident light is not reflected and is not lost, and light absorption may be increased through light scattering.

변환층(150)은 반사 방지막(140) 상에 형성된다. 즉, 변환층(150)은 텍스처링된 반사 방지막(140)의 표면을 따라 형성된다. 이러한 변환층(150)은 반사 방지막(140) 상에 흡착된 복수의 양자점(151)을 포함한다. 양자점(151)은 코어(core)/쉘(shell) 구조로 형성되는데, 코어를 둘러싸도록 쉘이 형성된다. 이러한 양자점(151)은 CdSe, InP, CuInS2, PbS 및 CdTe로부터 선택된 어느 하나로 코어가 형성되고, ZnS, ZnSe 및 CdSe로부터 선택된 어느 하나로 쉘이 될 수 있다. 바람직하게, 양자점(151)은 CdSe/ZnS를 이용하여 코어/쉘 구조로 형성할 수 있다. 한편, CdSe/ZnS 양자점은 핫 인젝션(hot injection) 방법으로 합성할 수 있는데, 이를 설명하면 다음과 같다. 먼저, 상온을 유지하는 소정의 반응기 내에 카드뮴(Cd) 원료 분말과 징크(Zn) 원료 분말을 일정량 투입한다. 카드뮴 원료로는 CdO를 이용할 수 있고, 징크 원료로는 징크 아세테이트(Zinc Acetate)를 이용할 수 있다. 이렇게 카드뮴 원료와 징크 원료가 투입된 반응기 내에 솔벤트를 투입한다. 여기서, 솔벤트는 예를 들어 올레익 에시드(Oleic Acid)와 옥타데센(1-Octadecene)을 이용할 수 있다. 이어서, 반응기의 온도를 상승시키면 예를 들어 약 120℃의 온도에서 원료 분말이 솔벤트에 녹기 시작한다. 반응기의 온도가 약 150℃로 상승하면 카드뮴(Cd) 이온과 징크(Zn) 이온이 생성되어 아세테이트(Acetate) 내에 용해된 상태가 된다. 그리고, 반응기를 진공 상태로 유지하면 아세테이트가 증발하는데, 예를 들어 30분 정도 유지하여 아세테이트를 모두 증발시킨다. 그리고, 반응기의 온도를 예를 들어 310℃ 정도로 상승시킨 후 셀레나이드(Se)와 황(S)이 용해된 TPO(Trioctylphosohine)를 반응기 내에 빠르게 주입하여 일정 시간 유지하면 CdSe/ZnS 양자점이 형성된다. 이때, TPO 주입 후 유지 시간, 그리고 혼합되는 물질의 몰비에 따라 양자점의 사이즈가 조절될 수 있다. 이렇게 합성된 코어/쉘 구조의 양자점(151)은 예를 들어 클로로포름 등의 분산제에 소정의 비율로 혼합되고 스핀 코팅 등의 공정으로 반사 방지막(140) 상에 형성된 후 건조시킴으로써 형성할 수 있다. 코어/쉘 구조의 양자점(151)은 분산제에 혼합된 몰비에 따라 반사 방지막(140) 상에 흡착되는 양이 달라지고, 태양 전지의 특성도 달라지게 된다. 예를 들어, 도 2(a)는 CdSe/ZnS 구조의 양자점을 0.3wt%의 농도로 흡착시킨 사진이고, 도 2(b)는 CdSe/ZnS 구조의 양자점을 1.0wt%의 농도로 흡착시킨 사진이다. 도시된 바와 같이 코어/쉘 구조의 양자점은 <111> 텍스쳐링된 표면에 잘 흡착되어 있고 코어/쉘 양자점의 농도가 증가하면 <111> 텍스처링된 표면 위에 흡착된 양이 증가함을 알 수 있다. 이러한 코어/쉘 구조의 양자점(151)은 자외선 영역의 광을 흡수하여 가시광선 영역의 광을 생성한다. 즉, 코어/쉘 구조의 양자점(151)은 에너지 다운 컨버전(energy down conversion)에 의해 가시광선 영역의 광을 생성하는데, 자외선 영역의 높은 에너지를 흡수하여 에너지를 다운시키고 재결합(recombination)에 의해 가시광선의 광을 생성한다. 이렇게 코어/쉘 구조의 양자점(151)이 형성됨으로써 가시광선에 더해 자외선으로부터 변환(conversion)된 가시광선이 흡수됨으로써 입사광을 증가시킬 수 있고, 그에 따라 효율을 향상시킬 수 있다. 한편, 양자점(151)은 ㎚의 사이즈로 형성되는데, 코어가 예를 들어 0.1㎚∼10㎚의 사이즈로 형성되고, 쉘은 코어를 감싸도록 코어보다 큰 사이즈로 형성되며, 예를 들어 8㎚∼20㎚의 사이즈로 형성될 수 있다. 그리고, 코어의 사이즈에 따라 변환되어 생성되는 광의 색이 조절될 수 있다. 예를 들어, 2.9㎚의 CdSe 코어와 10.082㎚의 ZnS 쉘을 이용하는 경우 그린 광을 생성하고, 4.7㎚의 CdSe 코어와 8.989㎚의 ZnS 쉘을 이용하는 경우 레드 광을 생성할 수 있다. 즉, 코어의 사이즈가 작아질수록 에너지 밴드갭이 커져 자외선을 단파장의 가시광선으로 변환시키고, 코어의 사이즈가 커질수록 에너지 밴드갭이 작아져 자외선을 장파장의 가시광선으로 변환시킬 수 있다. 예컨데, 제 1 사이즈의 코어를 이용하여 자외선을 제 1 파장의 가시광선으로 변화시키면, 제 1 사이즈보다 큰 코어를 이용하면 자외선을 제 1 파장보다 장파장의 제 2 파장의 가시광선으로 변화시킬 수 있다. 따라서, 코어는 자외선을 가시광선으로 변환시킬 수 있는 사이즈 이상, 예를 들어 0.1㎚ 이상의 사이즈로 형성할 수 있다. 그리고, 쉘은 코어를 감쌀 수 있는 일정 사이즈 이상으로 형성할 수 있다. 한편, 양자점(151)의 형상은 구, 로드, 와이어, 피라미드, 입방체 등 다양한 형상을 가질 수 있고, 특별히 제한되는 것은 아니지만, 구 형상을 갖는 것이 바람직하다. The conversion layer 150 is formed on the anti-reflection film 140. That is, the conversion layer 150 is formed along the surface of the textured anti-reflection film 140. The conversion layer 150 includes a plurality of quantum dots 151 adsorbed on the anti-reflection film 140. The quantum dot 151 has a core / shell structure, and a shell is formed to surround the core. The quantum dot 151 has a core formed of any one selected from CdSe, InP, CuInS 2 , PbS, and CdTe, and may be a shell made of any one selected from ZnS, ZnSe, and CdSe. Preferably, the quantum dot 151 may be formed in a core / shell structure using CdSe / ZnS. Meanwhile, CdSe / ZnS quantum dots can be synthesized by a hot injection method, which will be described below. First, a predetermined amount of cadmium (Cd) raw material powder and zinc (Zn) raw material powder are introduced into a predetermined reactor maintaining room temperature. CdO may be used as the cadmium raw material, and zinc acetate may be used as the zinc raw material. In this way, the solvent is introduced into the reactor in which the cadmium raw material and the zinc raw material are added. Here, the solvent may be used, for example, oleic acid (Oleic Acid) and octadecene (1-Octadecene). Then, when the temperature of the reactor is increased, the raw powder begins to melt in the solvent, for example, at a temperature of about 120 ° C. When the temperature of the reactor rises to about 150 ° C., cadmium (Cd) ions and zinc (Zn) ions are generated and dissolved in acetate. The acetate is then evaporated when the reactor is kept in vacuo, e.g. 30 minutes, to evaporate all the acetate. In addition, after raising the temperature of the reactor to about 310 ° C., for example, CdSe / ZnS quantum dots are formed by rapidly injecting TPO (Trioctylphosohine) in which selenide (Se) and sulfur (S) are dissolved and maintaining the same for a predetermined time. In this case, the size of the quantum dot may be adjusted according to the retention time after TPO injection and the molar ratio of the mixed materials. The synthesized quantum dot 151 of the core / shell structure may be formed by, for example, mixing with a dispersing agent such as chloroform at a predetermined ratio, being formed on the antireflection film 140 by a spin coating process, and then drying. Quantum dots 151 of the core / shell structure have different amounts of adsorption on the antireflection film 140 according to the molar ratio mixed with the dispersant, and the characteristics of the solar cell are also different. For example, FIG. 2 (a) is a photograph of adsorption of quantum dots of CdSe / ZnS structure at a concentration of 0.3wt%, and FIG. 2 (b) is a photograph of adsorption of quantum dots of CdSe / ZnS structure at a concentration of 1.0wt%. to be. As shown, it can be seen that the quantum dots of the core / shell structure are well adsorbed on the <111> textured surface, and as the concentration of the core / shell quantum dots is increased, the amount of adsorbed on the textured surface increases. The quantum dot 151 of the core / shell structure absorbs light in the ultraviolet region to generate light in the visible region. That is, the quantum dot 151 of the core / shell structure generates light in the visible region by energy down conversion. The quantum dot 151 absorbs the high energy in the ultraviolet region to lower the energy and recombines the visible light. Generates the light of the line. As the quantum dot 151 having the core / shell structure is formed, the visible light converted from ultraviolet rays in addition to the visible light is absorbed to increase incident light, thereby improving efficiency. On the other hand, the quantum dot 151 is formed in a size of nm, the core is formed in a size of 0.1 nm to 10 nm, for example, the shell is formed in a size larger than the core to surround the core, for example 8 nm to It may be formed in a size of 20 nm. In addition, the color of the light generated by the conversion may be adjusted according to the size of the core. For example, green light may be generated when using a 2.9 nm CdSe core and a ZnS shell of 10.082 nm, and red light may be generated when using a 4.7 nm CdSe core and a 8.989 nm ZnS shell. That is, as the size of the core becomes smaller, the energy band gap becomes larger to convert ultraviolet rays into short wavelength visible light, and as the size of the core becomes larger, the energy band gap becomes smaller to convert ultraviolet rays into long wavelength visible light. For example, if the ultraviolet ray is changed into visible light of the first wavelength by using the core of the first size, the ultraviolet ray may be changed into visible light of the second wavelength having a longer wavelength than the first wavelength by using the core larger than the first size. . Therefore, the core can be formed in a size that is larger than the size capable of converting ultraviolet light into visible light, for example, 0.1 nm or more. And, the shell can be formed to a certain size or more that can wrap the core. On the other hand, the shape of the quantum dot 151 may have a variety of shapes such as spheres, rods, wires, pyramids, cubes, and the like, although not particularly limited, it is preferable to have a spherical shape.

제 2 전극(160)은 제 2 반도체층(130)과 접촉되도록 형성된다. 즉, 제 2 전극(160)은 반사 방지막(140) 및 변환층(150)의 소정 영역이 제거되어 노출된 제 2 반도체층(130)과 접촉되어 형성된다. 이때, 제 2 전극(160)에 의해 입사광이 줄어드는 것을 방지하기 위해 제 2 전극(160)은 부분적으로 형성된다. 제 2 전극(160)은 제 1 전극(120)과 마찬가지로 전도성이 우수한 물질로 형성될 수 있는데, 예를 들어 티타늄(Ti), 크롬(Cr), 금(Au), 알루미늄(Al), 니켈(Ni), 은(Ag) 등의 금속 물질 또는 이들의 합금을 이용하여 형성할 수 있다. 또한, 제 2 전극(160)은 단일층으로 형성되거나, 적어도 두층 이상이 적층 형성될 수도 있다. 여기서, 제 2 전극(170)은 제 1 전극(120)과 동일 물질로 형성할 수도 있고, 다른 물질로 형성할 수도 있다. 본 실시 예에서는 제 2 전극(160)이 은(Ag)으로 형성될 수 있다.The second electrode 160 is formed to contact the second semiconductor layer 130. That is, the second electrode 160 is formed in contact with the exposed second semiconductor layer 130 by removing a predetermined region of the anti-reflection film 140 and the conversion layer 150. In this case, the second electrode 160 is partially formed in order to prevent incident light from being reduced by the second electrode 160. Like the first electrode 120, the second electrode 160 may be formed of a material having excellent conductivity. For example, titanium (Ti), chromium (Cr), gold (Au), aluminum (Al), and nickel ( It can be formed using a metal material such as Ni), silver (Ag), or an alloy thereof. In addition, the second electrode 160 may be formed as a single layer, or at least two or more layers may be stacked. Here, the second electrode 170 may be formed of the same material as the first electrode 120 or may be formed of a different material. In the present embodiment, the second electrode 160 may be formed of silver (Ag).

도 3 및 도 4는 본 발명의 다른 실시 예들에 따른 태양 전지의 단면도이다. 도 3에 도시된 바와 같이 제 2 반도체층(130) 상에 변환층(150)이 형성되고 그 상부에 반사 방지막(140)이 형성될 수 있다. 반사 방지막(140)은 변환층(150)을 보호하는 보호막으로서 기능할 수 있다. 물론, 보호막을 별도로 형성할 수도 있다. 즉, 반사 방지막(140) 상에 변환층(150)이 형성되고, 변환층(150) 상부에 보호막이 형성될 수 있다. 이 경우, 보호막은 광 투과가 가능한 투명 절연성 물질로 형성될 수 있다. 또한, 도 4는 도시된 바와 같이 변환층(150)이 텍스처링된 반사 방지막(140)의 오목한 부분에만 형성될 수 있다. 즉, 변환층(150)은 반사 방지막(140)의 오목한 부분에 채워져 표면을 평탄하게 할 수 있고, 그보다 더 두껍게 형성되어 반사 방지막(140) 상에 평탄하게 형성될 수도 있다.3 and 4 are cross-sectional views of solar cells according to other embodiments of the present invention. As illustrated in FIG. 3, the conversion layer 150 may be formed on the second semiconductor layer 130, and an anti-reflection film 140 may be formed thereon. The anti-reflection film 140 may function as a protective film for protecting the conversion layer 150. Of course, a protective film can also be formed separately. That is, the conversion layer 150 may be formed on the anti-reflection film 140, and a protective film may be formed on the conversion layer 150. In this case, the protective film may be formed of a transparent insulating material capable of transmitting light. In addition, FIG. 4 may be formed only in a concave portion of the anti-reflection film 140 in which the conversion layer 150 is textured. That is, the conversion layer 150 may be filled in the concave portion of the anti-reflection film 140 to planarize the surface, and may be formed thicker than that to form the flat surface on the anti-reflection film 140.

상기한 바와 같이 본 발명의 실시 예들은 코어/쉘 구조의 변환층을 형성하고, 변환층을 이용하여 자외선 영역의 높은 에너지를 흡수하여 에너지를 다운시키고 재결합하는 에너지 다운 컨버전(energy down conversion)에 의해 가시광선의 광을 생성한다. 따라서, 반도체층은 가시광선에 더해 자외선으로부터 변환된 가시광선이 흡수함으로써 입사광을 증가시킬 수 있고, 그에 따라 효율을 향상시킬 수 있다. 이렇게 코어/쉘 구조의 변환층에 의한 에너지 다운 컨버전에 의해 태양 전지의 효율이 향상되는 것을 보다 상세하게 설명하면 다음과 같다.As described above, embodiments of the present invention form a conversion layer having a core / shell structure, and use energy down conversion to absorb and absorb high energy in the ultraviolet region by using the conversion layer to reduce and recombine energy. Produces visible light. Therefore, the semiconductor layer can increase incident light by absorbing visible light converted from ultraviolet light in addition to visible light, thereby improving efficiency. In this way, the efficiency of the solar cell is improved by energy down conversion by the core / shell structure conversion layer in more detail.

도 5는 태양광의 파장에 따른 에너지를 도시한 도면으로서, 태양광의 스펙트럼과 실리콘 태양 전지에 의해 변환되는 파장 및 에너지(파란색 표시)를 나타낸 것이다. 또한, 도 6은 본 발명에 따른 코어/쉘 구조의 양자점의 에너지 밴드갭을 도시한 도면이다.5 is a diagram showing energy according to the wavelength of sunlight, showing the spectrum of sunlight and the wavelength and energy (blue display) converted by the silicon solar cell. 6 is a diagram illustrating an energy band gap of a quantum dot of a core / shell structure according to the present invention.

도 5에 도시된 바와 같이, 적외선, 가시광선 및 자외선을 방출하는 태양광으로부터 종래의 태양 전지는 가시광선의 1100㎚ 이하 파장의 광을 흡수하여 광 전류(photo current)를 생성한다. 종래의 태양 전지는 가시광선을 흡수하여 광 전류로 전환하지만, 자외선은 흡수하지 못하여 광 전류로 전환하지 못하기 때문에 발생되는 광 전류에 한계가 있다. 그러나, 본 발명에 따른 태양 전지는 코어/쉘 구조의 양자점을 적용함으로써 400㎚ 이하 파장의 자외선을 흡수하여 자외선의 에너지를 다운시킨 후 재결합하여 가시광선을 생성한다. 이에 대해 보다 자세히 설명하면 다음과 같다. 본 발명에 따른 코어/쉘 구조의 양자점은 나노 사이즈의 코어를 나노 사이즈의 쉘이 감싸고 있고, 도 6에 도시된 바와 같이 쉘의 에너지 밴드갭(Eg)이 코어의 에너지 밴드갭(Eg)보다 크다. 따라서, 코어의 컨덕션 에너지 밴드(conduction energy band)와 밸런스 에너지 밴드(valance energy band) 외부로 양자화되고, E1, E2, E3의 전자 양자 준위와 H1, H2, H3의 정공 양자 준위가 만들어진다. 또한, 쉘의 높은 에너지 밴드갭(Eg)은 코어의 양자화된 전자와 정공의 에너지 배리어(energy barrier)의 역할을 하게 된다. 이러한 코어/쉘 구조의 양자점이 자외선을 흡수하게 되면 도 6에 도시된 바와 같이 코어의 밸런스 밴드(valence band)의 H3 양자 준위에 있는 전자가 높은 컨덕션 밴드(conduction band)의 E3 양자 준위로 천이되고, 전자와 정공 쌍을 만들게 된다. 이후 전자와 정공 쌍이 각각 그보다 낮은 전자와 정공의 양자 준위로 이동하게 되어 E2와 H2 양자 준위로 전이된 후 E2와 H2 양자 준위에 있는 전자와 홀이 재결합(recombination)되면 가시광선을 방출하게 된다. 또한, 그것보다 낮은 에너지를 가지고 있는 자외선을 흡수하게 되면 코어의 밸런스 밴드(valence band)의 H2 양자 준위에 있는 전자가 높은 컨덕션 밴드(conduction band)의 E2 양자 준위로 천이되고, 전자와 정공 쌍을 만들게 된다. 이후 전자와 정공 쌍이 각각 그보다 낮은 전자와 정공의 양자 준위로 이동하게 되어 E1과 H1 양자 준위로 전이된 후 E1과 H1 양자 준위에 있는 전자와 홀이 재결합(recombination)되면 가시광선을 방출하게 된다. 이때, 방출되는 가시광선의 파장은 코어의 에너지 밴드갭(Eg)에 의존하고, 코어의 에너지 밴드갭(Eg)은 코어의 사이즈와 쉘의 에너지 밴드갭(Eg)에 의존한다. 코어/쉘 구조의 양자점에서 방출된 광은 <111>으로 텍스쳐된 층의 표면에 흡수되어 실리콘 태양 전지 내부에서 광 전류를 증가시킨다. 즉, 코어/쉘 구조의 양자점이 자외선을 흡수한 후 에너지를 변환하여 가시광선을 방출하고, 코어/쉘 구조의 양자점에서 방출된 가시광선이 반도체층 표면으로 흡수되어 실리콘 태양 전지의 단락 전류(short circuit current)를 증가시켜 태양 전지의 전력 변환 효율(power conversion efficency)을 향상시킬 수 있다.As shown in FIG. 5, a conventional solar cell absorbs light having a wavelength of 1100 nm or less of visible light from sunlight emitting infrared light, visible light, and ultraviolet light to generate a photo current. Conventional solar cells absorb visible light and convert it into a photocurrent, but there is a limit in the photocurrent generated because the ultraviolet light does not absorb and converts into a photocurrent. However, the solar cell according to the present invention absorbs ultraviolet rays having a wavelength of 400 nm or less by applying quantum dots of a core / shell structure to lower the energy of ultraviolet rays and then recombine to generate visible light. This will be described in more detail as follows. In the quantum dot of the core / shell structure according to the present invention, the nano-sized shell surrounds the nano-sized core, and as shown in FIG. 6, the energy band gap Eg of the shell is larger than the energy band gap Eg of the core. . Thus, the electrons are quantized outside the conduction energy band and the balance energy band of the core, and electron quantum levels of E1, E2, and E3 and hole quantum levels of H1, H2, and H3 are formed. In addition, the shell's high energy bandgap (Eg) serves as an energy barrier for the quantized electrons and holes in the core. When the quantum dot of the core / shell structure absorbs ultraviolet rays, electrons in the H3 quantum level of the balance band of the core transition to the E3 quantum level of the high conduction band, as shown in FIG. 6. And electron and hole pairs. Afterwards, the electron and hole pairs move to lower quantum levels of electrons and holes, which are then transferred to the E2 and H2 quantum levels, and then, when electrons and holes in the E2 and H2 quantum levels are recombined, they emit visible light. In addition, absorbing ultraviolet light with lower energy causes the electrons in the H2 quantum level of the balance band of the core to transition to the E2 quantum level of the high conduction band, and the electron and hole pair Will make Afterwards, the electron and hole pairs move to lower quantum levels of electrons and holes, respectively, and are transferred to the E1 and H1 quantum levels, and then, when electrons and holes in the E1 and H1 quantum levels are recombined, they emit visible light. At this time, the wavelength of the visible light emitted depends on the energy band gap Eg of the core, and the energy band gap Eg of the core depends on the size of the core and the energy band gap Eg of the shell. Light emitted from the quantum dots of the core / shell structure is absorbed by the surface of the <111> textured layer to increase the photocurrent inside the silicon solar cell. That is, the quantum dot of the core / shell structure absorbs ultraviolet rays and then converts energy to emit visible light, and the visible light emitted from the quantum dot of the core / shell structure is absorbed by the surface of the semiconductor layer, thereby shorting current of the silicon solar cell. The circuit current can be increased to improve the power conversion efficiency of the solar cell.

이를 증명하기 위해 다양한 농도의 코어/쉘 구조의 양자점을 스핀 코팅(spin coating) 방법으로 <111>으로 텍스쳐링된 층의 표면에 흡착시킨 후 표면 반사율(surface reflectance), 광 방출 강도(light emission intensity), 광 루미네선스(photo luminescence), 외부 양자 효율(external quantum efficiency), 광전 성능(photovoltaic performance) 등을 측정하였다. To prove this, quantum dots of various concentrations of core / shell structures are adsorbed onto the surface of the layer textured by <111> by spin coating, followed by surface reflectance and light emission intensity. Photo luminescence, external quantum efficiency, photovoltaic performance, and the like were measured.

양자점들의 구조에 따라 방출되는 광의 컬러 및 강도를 측정하였으며, 비교 예로서 CdSe 양자점과 본 발명의 실시 예들로서 서로 다른 사이즈의 CdSe/ZnS 구조의 양자점을 비교하였다. CdSe 양자점은 4.7㎚의 코어만으로 구성되고, CdSe/ZnS 양자점은 2.89㎚ CdSe 코어와 10.092㎚ ZnS 쉘, 그리고 4.91㎚ CdSe 코어와 8.969㎚ ZnS 쉘로 구성된다. 즉, 본 발명의 실시 예 1은 2.89㎚ CdSe 코어와 10.092㎚ ZnS 쉘로 이루어지고, 본 발명의 실시 예 2는 4.91㎚ CdSe 코어와 8.969㎚ ZnS 쉘로 이루어진다.The color and intensity of the light emitted according to the structure of the quantum dots were measured, and as a comparison example, CdSe quantum dots and quantum dots of CdSe / ZnS structures having different sizes were compared as embodiments of the present invention. CdSe quantum dots consist of only 4.7 nm cores, and CdSe / ZnS quantum dots consist of 2.89 nm CdSe cores, 10.092 nm ZnS shells, and 4.91 nm CdSe cores and 8.969 nm ZnS shells. That is, Example 1 of the present invention consists of a 2.89 nm CdSe core and 10.092 nm ZnS shell, and Example 2 of the present invention consists of a 4.91 nm CdSe core and 8.969 nm ZnS shell.

양자점들을 솔벤트에 용해시킨 후 서로 다른 파장의 광을 조사한 경우 각각의 양자점들이 방출하는 광의 파장을 측정하였다. 즉, 가시광선과 254㎚ 및 365㎚ 파장의 자외선을 각각 조사하였다. CdSe 양자점의 경우 578㎚ 파장의 광을 방출하고, 실시 예 1의 CdSe/ZnS 양자점의 경우 562㎚의 광을 방출하며, 실시 예 2의 CdSe/ZnS 양자점의 경우 603㎚ 파장의 광을 방출하는 것을 알 수 있다. 이들이 방출하는 광의 컬러는 CdSe 양자점의 경우 가시광선을 조사했을 때 레드 광을 방출하고, 자외선을 조사했을 때 파장에 따라 컬러가 다소 다른 레드 광을 방출한다. 또한, 실시 예 1의 CdSe/ZnS 양자점의 경우 가시광선과 자외선을 조사했을 때 모두 그린 광을 방출한다. 그리고, 실시 예 2의 CdSe/ZnS 양자점의 경우 가시광선을 조사했을 때 레드 광을 방출하고, 자외선을 조사했을 때 파장에 따라 컬러가 다소 다른 레드 광을 방출한다. 이로부터 양자점이 광을 흡수한 후 에너지 다운 컨버전을 통해 가시광선을 발광하는 것을 확인할 수 있다. When the quantum dots were dissolved in a solvent and irradiated with light of different wavelengths, the wavelengths of the light emitted by the respective quantum dots were measured. That is, visible light and ultraviolet rays of 254 nm and 365 nm wavelength were irradiated. CdSe quantum dots emit light of 578nm wavelength, CdSe / ZnS quantum dots of Example 1 emits light of 562nm, CdSe / ZnS quantum dots of Example 2 emits light of 603nm wavelength Able to know. The color of the light emitted by the CdSe quantum dots emits red light when irradiated with visible light, and emits red light that is slightly different depending on the wavelength when irradiated with ultraviolet light. In addition, the CdSe / ZnS quantum dots of Example 1 emit green light when both visible and ultraviolet rays are irradiated. In the case of the CdSe / ZnS quantum dots of Example 2, the red light is emitted when the visible light is irradiated, and the red light is slightly different depending on the wavelength when the ultraviolet light is irradiated. From this, it can be seen that the quantum dot absorbs light and emits visible light through energy down conversion.

<111>으로 텍스처링된 실리콘 나이트라이드 반사 방지막 표면에 양자점들을 다양한 농도로 스핀 코팅하고 254㎚ 파장의 자외선을 조사한 후 발광된 광들의 조도를 측정하였다. CdSe 양자점의 경우 발광 조도가 검출 한계(detection limit) 이하로서 양자점의 농도 의존성을 찾기 어렵다. 그러나, 실시 예 1의 CdSe/ZnS 양자점의 경우 발광 조도가 양자점의 농도가 증가하면 증가한다. 그런데, 실시 예 2의 CdSe/ZnS 양자점의 경우 발광 조도가 검출 한계 이하로서 양자점의 농도 의존성을 찾기 어렵다.The surface of the silicon nitride antireflection film textured with <111> was spin-coated at various concentrations and irradiated with ultraviolet rays at a wavelength of 254 nm, and then illuminance of the emitted light was measured. In the case of CdSe quantum dots, it is difficult to find the concentration dependence of the quantum dots as the emission illuminance is below the detection limit. However, in the case of the CdSe / ZnS quantum dots of Example 1, the light emission illuminance increases as the concentration of the quantum dots increases. However, in the case of the CdSe / ZnS quantum dots of Example 2, it is difficult to find the concentration dependence of the quantum dots as the emission illuminance is below the detection limit.

상기한 바와 같이 코어/쉘 구조의 양자점은 자외선 영역의 광을 흡수한 후 에너지 다운 컨버전에 의해 가시광선 영역의 광을 방출하는 것을 알 수 있다. 또한, 코어의 사이즈에 따라 다른 컬러의 가시광선을 방출하는 것을 알 수 있으며, 농도가 증가함에 따라 발광 조도가 증가함을 알 수 있다.As described above, it can be seen that the quantum dot of the core / shell structure absorbs light in the ultraviolet region and then emits light in the visible region by energy down conversion. In addition, it can be seen that the emission of visible light of different colors according to the size of the core, the light emission intensity increases as the concentration increases.

도 7 및 도 8은 양자점의 구조에 따른 광 루미네선스(photo luminescence: 이하 PL이라 함) 강도 및 흡광도를 각각 측정한 그래프이다. 여기서, 도 7 및 도 8의 (a)는 CdSe 양자점의 농도에 따른 PL 강도 및 흡광도를 도시한 것이고, 도 7 및 도 8의 (b)는 그린 광을 방출하는 CdSe/ZnS 양자점의 농도에 따른 PL 강도 및 흡광도를 도시한 것이며, 도 7 및 도 8의 (c)는 레드 광을 방출하는 CdSe/ZnS 양자점의 농도에 따른 PL 강도 및 흡광도를 도시한 것이다.7 and 8 are graphs measuring the intensity and absorbance of photo luminescence (hereinafter referred to as PL) according to the structure of quantum dots. 7 and 8 (a) shows the PL intensity and absorbance according to the concentration of the CdSe quantum dots, Figure 7 and 8 (b) shows the concentration of the CdSe / ZnS quantum dots emitting green light PL intensity and absorbance are shown, and FIG. 7 and FIG. 8C show PL intensity and absorbance according to the concentration of CdSe / ZnS quantum dots emitting red light.

PL 측정 결과 도 7에 도시된 바와 같이 CdSe 양자점은 575㎚에서 광 방출 피크(peak)가 검출되었고, 그린 광을 방출하는 CdSe/ZnS 양자점은 542㎚와 583㎚에서 광 방출 피크가 검출되었으며, 레드 광을 방출하는 CdSe/ZnS 양자점은 607㎚에서 광 방출 피크가 검출되었다. 0.5wt%의 양자점 농도에서 PL 강도(PL intensity)를 보면 그린 광을 방출하는 CdSe/ZnS 양자점은 약 20,000(arb,unit), 레드 광을 방출하는 CdSe/ZnS 양자점은 약 3000, CdSe 양자점은 약 600을 각각 나타낸다. 따라서, 그린 광을 방출하는 CdSe/ZnS 양자점이 가장 높은 PL 강도를 나타내고 있다.As a result of the PL measurement, as shown in FIG. 7, a CdSe quantum dot detected a light emission peak at 575 nm, and a CdSe / ZnS quantum dot emitting green light detected a light emission peak at 542 nm and 583 nm. CdSe / ZnS quantum dots emitting light detected a light emission peak at 607 nm. When the PL intensity is 0.5 wt%, the CdSe / ZnS quantum dot emitting green light is about 20,000 (arb, unit), the CdSe / ZnS quantum dot emitting red light is about 3000, and the CdSe quantum dot is about 600 is shown, respectively. Thus, CdSe / ZnS quantum dots emitting green light exhibit the highest PL intensity.

도 8에 도시된 흡광도(Absorbance)는 양자점을 UV-vis 장비를 이용하여 측정하였다. CdSe 양자점은 559㎚, 483㎚ 및 266㎚에서 흡광도 피크(absorption peak)가 형성된다. 이는 CdSe의 컨덕션 밴드(conduction band)와 밸런스 밴드(valence band)의 위아래에서 불연속적인 양자 에너지 준위가 존재하고, 이러한 불연속적인 양자 에너지 준위에 의해 광 흡수가 이루어지기 때문에 흡광도 피크(absorption peak)들이 존재한다. 또한, 농도가 높아질수록 흡수되는 정도가 심해지는 것을 알 수 있다. 그러나, 코어/쉘 구조의 양자점의 경우 이러한 흡광도 피크(absorption peak)들이 확인되지 않고, 농도가 높아질수록 광이 흡수되는 파장 영역이 넓어지는 것만을 확인할 수 있다. 이러한 경향은 코어의 에너지 밴드갭보다 높은 에너지를 가진 광만이 흡수되기 때문에 그린 광을 방출하는 CdSe/ZnS 양자점은 코어(CdSe)의 사이즈가 작아 더 큰 에너지 밴드갭을 가지고 있어 더 낮은 파장(높은 에너지), 즉 약 500㎚ 이하의 파장을 가진 광에서 흡수가 시작되고 레드 광을 방출하는 CdSe/ZnS 양자점은 더 높은 파장(낮은 에너지)에서, 즉 600㎚ 이하의 파장을 가진 광에서 흡수가 시작되는 것을 확인할 수 있다.Absorbance shown in Figure 8 was measured by using a quantum dot UV-vis equipment. CdSe quantum dots have an absorption peak at 559 nm, 483 nm, and 266 nm. This is because there is a discontinuous quantum energy level above and below the conduction band and the balance band of CdSe, and the absorption peaks are absorbed because the light is absorbed by these discontinuous quantum energy levels. exist. In addition, it can be seen that the degree of absorption increases as the concentration increases. However, in the case of the quantum dot of the core / shell structure, such absorbance peaks are not confirmed, and it can be confirmed only that the wavelength region where light is absorbed increases as the concentration increases. This tendency is because CdSe / ZnS quantum dots that emit green light have a larger energy bandgap due to the smaller size of the core (CdSe) because only light with higher energy than the energy bandgap of the core is absorbed. ), I.e., CdSe / ZnS quantum dots that begin to absorb at light with a wavelength below about 500 nm and emit red light begin to absorb at higher wavelengths (lower energy), that is, at wavelengths below 600 nm. You can see that.

각 양자점들의 흡광도(absorbance)와 PL 강도를 비교하면 CdSe 양자점의 경우 약 250㎚∼560㎚ 파장을 가진 광들을 흡수하고, 에너지 다운 컨버전을 통해 575㎚ 파장을 가진 광을 방출한다. 그린 광을 방출하는 CdSe/ZnS 양자점은 250㎚∼500㎚ 파장 영역의 광을 흡수하며, 에너지 다운 컨버전을 통해 542㎚와 583㎚ 파장을 가진 광을 방출한다. 레드 광을 방출하는 CdSe/ZnS 양자점은 250㎚∼600㎚ 파장을 가진 광을 흡수하며 에너지 다운 컨버전을 통해 607㎚ 파장을 가진 레드 광을 방출한다.Comparing the absorbance and PL intensity of each quantum dot, the CdSe quantum dot absorbs light having a wavelength of about 250 nm to 560 nm, and emits light having a wavelength of 575 nm through energy down conversion. CdSe / ZnS quantum dots that emit green light absorb light in the 250 nm to 500 nm wavelength region and emit light with 542 nm and 583 nm wavelengths through energy down conversion. CdSe / ZnS quantum dots that emit red light absorb light with a wavelength of 250 nm to 600 nm and emit red light with a wavelength of 607 nm through energy down conversion.

도 9 및 도 10은 양자점의 구조에 따른 모폴로지(morphology)를 TEM 분석한 사진 및 사이즈별 분포도이다. 여기서, 각도의 (a)는 CdSe 양자점의 사진 및 분포도이고, (b)는 그린 광을 방출하는 CdSe/ZnS 구조의 양자점의 사진 및 분포도이며, (c)는 레드 광을 방출하는 CdSe/ZnS 구조의 양자점의 사진 및 분포도이다.9 and 10 are TEM analysis of morphology according to the structure of a quantum dot and a distribution chart for each size. Here, (a) of the angle is a photograph and distribution of the CdSe quantum dot, (b) is a photograph and distribution of the quantum dot of the CdSe / ZnS structure that emits green light, (c) is a CdSe / ZnS structure that emits red light Photos and distribution maps of quantum dots.

도 9에 도시된 바와 같이 CdSe 양자점은 사이즈가 4.7㎚ 정도이고 불규칙한 형태(irregular shape)을 가지고 있다. 그러나, 그린 광을 방출하는 CdSe/ZnS 양자점은 사이즈가 10.098㎚이며, 레드 광을 방출하는 CdSe/ZnS 양자점은 사이즈가 8.969㎚이고 불규칙한 형태를 가지고 있다. 또한, 도 10에 도시된 바와 같이 양자점의 구조에 따른 사이즈별 분포를 보면 그린 광을 방출하는 CdSe/ZnS 양자점의 사이즈가 균일하여 CdSe 양자점보다 합성 후 분산이 잘되어 있음을 알 수 있다. As shown in FIG. 9, the CdSe quantum dots have a size of about 4.7 nm and have an irregular shape. However, the CdSe / ZnS quantum dots emitting green light have a size of 10.098 nm, and the CdSe / ZnS quantum dots emitting red light have a size of 8.969 nm and have an irregular shape. In addition, as shown in FIG. 10, the size-by-size distribution according to the structure of the quantum dot shows that the size of the CdSe / ZnS quantum dots emitting green light is uniform and thus the dispersion is better than that of the CdSe quantum dots.

도 11, 도 12 및 도 13은 <111>으로 텍스처링된 실리콘 나이드라이드 반사 방지막 상에 스핀 코팅 방식을 이용하여 양자점을 다양한 농도로 형성한 후 반사도를 측정한 그래프이다. 여기서, 도 11 내지 도 13의 (a)는 자외선 및 가시광선 영역의 파장에 따른 반사도를 도시한 것이고, (b)는 자외선 영역의 파장에 따른 반사도를 도시한 것이다.11, 12 and 13 are graphs of reflectivity measured after forming quantum dots at various concentrations using a spin coating method on a silicon nitride anti-reflection film textured with <111>. Here, FIGS. 11 to 13 (a) show reflectances according to the wavelengths of the ultraviolet and visible light regions, and (b) show reflectances according to the wavelengths of the ultraviolet light regions.

도 11에 도시된 바와 같이, CdSe 양자점이 코팅된 경우 자외선 영역(200㎚∼450㎚)에서 표면 반사도(surface reflectance)가 양자점을 형성하지 않은 경우(reference)에 비하여 CdSe 양자점의 농도가 증가하수록 증가한다. 특히, 약 1wt% 농도의 CdSe 양자점의 경우 약 25%에서 약 17.5%까지 감소한다. 도 12에 도시된 바와 같이, 그린 광을 방출하는 CdSe/ZnS 양자점이 코팅된 경우 자외선 영역에서 양자점의 농도가 증가하면 표면 반사도가 약 25%에서 15%까지 감소한다. 또한, 도 13에 도시된 바와 같이, 레드 광을 방출하는 CdSe/ZnS 양자점이 코팅된 경우 자외선 영역에서 양자점 농도가 증가하면 표면 반사도가 약 25%에서 15%까지 감소한다. 이러한 결과들은 양자점들이 자외선 영역의 광을 흡수한다는 것을 나타낸다. 그러나, 자외선 이외의 영역(450nm∼1100nm)에서는 CdSe 양자점, 그린 광을 방출하는 CdSe/ZnS 양자점, 레드 광을 방출하는 CdSe/ZnS 구조의 양자점 모두 양자점의 농도가 증가하면 표면 반사도가 다소 증가한다. 그러나, 이는 자외선을 에너지 다운 컨버전되어 가시광선으로 변환되어 태양 전지로 흡수되는 광에 비해 적기 때문에 효율은 더 증가된다.As shown in FIG. 11, when the CdSe quantum dot is coated, the concentration of the CdSe quantum dot increases as compared with the reference where the surface reflectance does not form the quantum dot in the ultraviolet region (200 nm to 450 nm). Increases. In particular, about 1 wt% CdSe quantum dots decrease from about 25% to about 17.5%. As shown in FIG. 12, when the CdSe / ZnS quantum dots emitting green light are coated, the surface reflectivity decreases from about 25% to 15% as the concentration of the quantum dots increases in the ultraviolet region. In addition, as shown in FIG. 13, when the CdSe / ZnS quantum dots emitting red light are coated, when the quantum dot concentration increases in the ultraviolet region, the surface reflectivity decreases from about 25% to 15%. These results indicate that the quantum dots absorb light in the ultraviolet region. However, in the regions other than ultraviolet light (450 nm to 1100 nm), the surface reflectivity slightly increases as the concentration of quantum dots increases in both CdSe quantum dots, CdSe / ZnS quantum dots emitting green light, and CdSe / ZnS structures emitting red light. However, the efficiency is further increased because it is less than the light that is energy down-converted into ultraviolet light and converted into visible light.

도 14, 도 15 및 도 16은 IPCE 장비를 이용하여 양자점의 구조에 따른 외부 양자 효율(external quantum efficiency; EQE)를 측정한 결과이다. 여기서, 도 14 내지 도 16의 (a)는 자외선 및 가시광선 영역의 파장에 따른 외부 양자 효율을 도시한 것이고, (b)는 자외선 영역의 파장에 따른 외부 양자 효율을 도시한 것이다.14, 15, and 16 are results of measuring external quantum efficiency (EQE) according to the structure of a quantum dot by using the IPCE equipment. 14 to 16 (a) show the external quantum efficiency according to the wavelength of the ultraviolet and visible light region, (b) shows the external quantum efficiency according to the wavelength of the ultraviolet region.

도 14에 도시된 바와 같이, CdSe 양자점의 경우 EQE 데이터가 거의 변하지 않는 것을 확인할 수 있다. 이는 양자점이 광을 흡수하여 반사도가 감소하였지만, 발광하는 광의 양이 충분하지 못해 EQE 데이터에서는 변화가 없는 것을 확인할 수 있었다. 그러나, 도 15 및 도 16에 도시된 바와 같이, 그린 광 및 레드 광을 방출하는 CdSe/ZnS 양자점의 경우 CdSe 양자점과는 달리 300㎚∼500㎚ 사이에서 효율이 증가하는 것을 확인할 수 있다. 실리콘 태양 전지는 300㎚∼500㎚ 파장에서 변환 효율이 좋지 않았는데, 이 파장의 광을 500㎚ 이상의 광으로 변환하여 효율을 증가시킨 것을 확인할 수 있다. 반면, 500㎚∼1100㎚ 영역에서는 반사도의 감소로 인하여 농도가 증가할수록 변환 효율이 감소하는 것을 확인할 수 있다. 그러나, 이는 자외선을 에너지 다운 컨버전되어 가시광선으로 변환되어 태양 전지로 흡수되는 광에 비해 적기 때문에 효율은 더 증가된다.As shown in FIG. 14, in the case of the CdSe quantum dot, the EQE data hardly changes. Although the quantum dots absorbed the light and the reflectance was reduced, it was confirmed that there was no change in the EQE data because the amount of light emitted was not enough. However, as shown in FIGS. 15 and 16, the CdSe / ZnS quantum dots emitting green light and red light may increase efficiency between 300 nm and 500 nm, unlike CdSe quantum dots. The silicon solar cell did not have good conversion efficiency at a wavelength of 300 nm to 500 nm, but it was confirmed that the efficiency of the silicon solar cell was increased by converting the light having a wavelength of 500 nm or more. On the other hand, in the 500 nm to 1100 nm region, the conversion efficiency decreases as the concentration increases due to the decrease in reflectivity. However, the efficiency is further increased because it is less than the light that is energy down-converted into ultraviolet light and converted into visible light.

도 17 및 도 18은 <111>으로 텍스처링된 실리콘 나이트라이드 반사 방지막의 표면에 양자점이 형성된 태양 전지의 광전(photo-voltaic) 성능을 도시한 그래프이다. 도 17은 양자점의 농도에 따른 태양 전지의 단락 전류 밀도(Jsc)를 나타낸 것이고, 도 18는 양자점의 농도에 따른 태양 전지의 효율을 나타낸 것이다. 또한, 도 17 및 도 18의 (a), (b) 및 (c)는 각각 CdSe 양자점, 그린 광을 방출하는 CdSe/ZnS 양자점 및 레드 광을 방출하는 CdSe/ZnS 양자점의 단락 전류 밀도 및 효율을 나타낸 것이다. 17 and 18 are graphs illustrating photo-voltaic performance of a solar cell in which quantum dots are formed on a surface of a silicon nitride antireflection film textured with <111>. FIG. 17 illustrates the short-circuit current density Jsc of the solar cell according to the concentration of the quantum dots, and FIG. 18 illustrates the efficiency of the solar cell according to the concentration of the quantum dots. 17 and 18, (a), (b) and (c) show the short-circuit current densities and efficiencies of CdSe quantum dots, CdSe / ZnS quantum dots emitting green light, and CdSe / ZnS quantum dots emitting red light, respectively. It is shown.

도 17(a) 및 도 18(a)에 도시된 바와 같이 CdSe 양자점이 형성된 태양 전지의 단락 전류 밀도(Jsc) 및 전력 변환 효율(PCE)이 양자점이 형성되지 않은 기준(reference)에 비해 증가하지 않았다.As shown in FIGS. 17A and 18A, the short-circuit current density (Jsc) and power conversion efficiency (PCE) of the solar cell in which the CdSe quantum dots are formed do not increase compared to the reference in which the quantum dots are not formed. Did.

그러나, 그린 광을 방출하는 CdSe/ZnS 구조의 양자점이 형성된 태양 전지의 경우 도 17(b)에 도시된 바와 같이 단락 전류 밀도(Jsc)는 양자점의 농도가 약 0.2wt% 까지 기준(reference) 대비 급격히 증가하다가 약 0.5wt% 이후에는 양자점의 농도가 증가할수록 다소 감소한다. 그러나, 약 0.2wt%의 농도에서 기준에 비해 단락 전류 밀도가 2.2㎃/㎠ 정도 증가하며, 이에 따라 6.34% 정도 향상됨을 알 수 있다. 또한, 도 18(b)에 도시된 바와 같이 그린 광을 방출하는 CdSe/ZnS 양자점은 농도가 0.2wt%까지 증가하면 PCE가 기준(reference) 대비 약 0.91%가 증가하여 6.5% 정도 향상됨을 알 수 있다. 그러나, 그린 광을 방출하는 CdSe/ZnS 양자점은 농도가 0.3wt% 이상으로 증가하면 PCE가 감소한다. 이렇게 PCE가 0.3wt% 농도까지는 증가하는 것은 자외선을 흡수하여 에너지 다운 컨버전을 통해 방출되는 가시광선을 흡수하기 때문이며, 양자점의 농도가 0.3wt% 이상일 때에는 에너지 다운 컨버전 이외에 가시광선에서의 반사도(reflectance)가 증가하기 때문에 PCE가 감소한다.However, in the case of a solar cell having a CdSe / ZnS structure that emits green light, as shown in FIG. 17 (b), the short-circuit current density (Jsc) has a concentration of about 0.2 wt% of the quantum dot compared to the reference. After a sharp increase, after about 0.5wt%, it decreases slightly as the quantum dot concentration increases. However, at a concentration of about 0.2 wt%, the short-circuit current density is increased by about 2.2 mA / cm 2 compared to the reference, and thus it can be seen that the improvement is about 6.34%. In addition, as shown in FIG. 18B, when the concentration of CdSe / ZnS quantum dots emitting green light is increased to 0.2wt%, PCE increases by 0.91% compared to the reference, which is about 6.5%. have. However, CdSe / ZnS quantum dots emitting green light decrease in PCE when the concentration increases to 0.3 wt% or more. The increase in PCE up to 0.3 wt% is due to the absorption of ultraviolet rays and the absorption of visible light emitted through energy down conversion, and when the concentration of quantum dots is more than 0.3 wt%, the reflectance in visible light in addition to energy down conversion. Decreases the PCE.

한편, 레드 광을 방출하는 CdSe/ZnS 양자점이 형성된 태양 전지의 경우 도 18(b)에 도시된 바와 같이 단락 전류 밀도(Jsc)는 양자점의 농도가 약 0.4wt% 까지 기준(reference) 대비 급격히 증가하다가 약 0.5wt% 이후에는 양자점의 농도가 증가할수록 다소 감소한다. 그러나, 약 0.4wt%의 농도에서 기준에 비해 단락 전류 밀도가 1.9㎃/㎠ 정도 증가하며, 이에 따라 5.58% 정도 향상됨을 알 수 있다. 또한, 도 18(c)에 도시된 바와 같이 PCE는 양자점의 농도가 0.4wt%까지 증가하면 증가하여 기준(Reference) 대비 0.54% 증가하여 3.8% 정도 향상됨을 알 수 있다. 그러나, 0.5wt% 이상의 양자점 농도에서 양자점 농도가 증가하면 경미하게 감소한다. 따라서, 그린 광을 방출하는 CdSe/ZnS 양자점이 형성된 태양 전지의 PCE 증가(0.91%)가 레드 광을 방출하는 CdSe/ZnS 양자점이 형성된 태양 전지의 PCE(0.54%) 보다 크다.Meanwhile, in the case of a solar cell in which CdSe / ZnS quantum dots emit red light, as shown in FIG. 18 (b), the short-circuit current density (Jsc) increases rapidly with respect to the reference to the concentration of the quantum dots by about 0.4 wt%. After about 0.5wt%, it decreases slightly as the concentration of quantum dots increases. However, at a concentration of about 0.4 wt%, the short-circuit current density is increased by 1.9 mA / cm 2 compared to the reference, and accordingly, it can be seen that the improvement is about 5.58%. In addition, as shown in FIG. 18C, the PCE increases as the concentration of the quantum dots increases to 0.4 wt%, increasing by 0.54% relative to the reference, and improving by about 3.8%. However, as the quantum dot concentration increases at 0.5 wt% or more, it is slightly decreased. Thus, the PCE increase (0.91%) of solar cells with CdSe / ZnS quantum dots emitting green light is greater than the PCE (0.54%) of solar cells with CdSe / ZnS quantum dots emitting red light.

한편, 본 발명의 기술적 사상은 상기 실시 예에 따라 구체적으로 기술되었으나, 상기 실시 예는 그 설명을 위한 것이며, 그 제한을 위한 것이 아님을 주지해야 한다. 또한, 본 발명의 기술분야에서 당업자는 본 발명의 기술 사상의 범위 내에서 다양한 실시 예가 가능함을 이해할 수 있을 것이다.On the other hand, although the technical spirit of the present invention has been described in detail according to the above embodiment, it should be noted that the above embodiment is for the purpose of explanation and not for the limitation. In addition, those skilled in the art will understand that various embodiments are possible within the scope of the technical idea of the present invention.

Claims (23)

서로 다른 도전형의 제 1 및 제 2 반도체층;First and second semiconductor layers of different conductivity types; 상기 제 1 및 제 2 반도체층에 접촉되도록 각각 형성된 제 1 및 제 2 전극; 및First and second electrodes respectively formed to contact the first and second semiconductor layers; And 상기 제 2 반도체층 상에 형성되며, 제 1 에너지를 갖는 파장의 광을 흡수하여 이보다 낮은 제 2 에너지를 갖는 파장의 광으로 변환하는 변환층을 포함하는 태양 전지.And a conversion layer formed on the second semiconductor layer and configured to absorb light having a wavelength having a first energy and convert the light having a second wavelength having a lower energy. 제 1 항에 있어서, 상기 제 1 반도체층은 반도체 기판에 제 1 도전형의 제 1 불순물을 도핑하여 형성된 태양 전지.The solar cell of claim 1, wherein the first semiconductor layer is formed by doping a semiconductor substrate with a first impurity of a first conductivity type. 제 2 항에 있어서, 상기 제 1 반도체층은 적어도 일 면이 텍스처링 처리된 태양 전지.The solar cell of claim 2, wherein at least one surface of the first semiconductor layer is textured. 제 3 항에 있어서, 상기 제 2 반도체층은 상기 제 1 반도체층의 소정 깊이로 제 2 도전형의 제 2 불순물을 도핑하여 형성된 태양 전지.The solar cell of claim 3, wherein the second semiconductor layer is formed by doping a second impurity of a second conductivity type to a predetermined depth of the first semiconductor layer. 제 4 항에 있어서, 상기 제 1 및 제 2 반도체층은 결정질 실리콘을 포함하는 태양 전지.The solar cell of claim 4, wherein the first and second semiconductor layers comprise crystalline silicon. 제 5 항에 있어서, 상기 변환층은 에너지 다운 컨버전에 의해 자외선 영역의 광을 변환시켜 가시광선 영역의 광을 방출하는 태양 전지.The solar cell of claim 5, wherein the conversion layer converts light in an ultraviolet region by energy down conversion to emit light in a visible region. 제 6 항에 있어서, 상기 제 1 및 제 2 반도체층은 가시광선과 상기 변환층의 에너지 다운 컨버전에 의해 자외선으로부터 변환된 가시광선을 흡수하는 태양 전지.The solar cell of claim 6, wherein the first and second semiconductor layers absorb visible light converted from ultraviolet rays by energy down conversion of the visible light and the conversion layer. 제 6 항에 있어서, 상기 변환층은 코어와, 이를 감싸는 쉘을 포함하는 양자점을 포함하는 태양 전지.The solar cell of claim 6, wherein the conversion layer comprises a quantum dot including a core and a shell surrounding the conversion layer. 제 8 항에 있어서, 상기 양자점은 CdSe, InP, CuInS2, PbS 및 CdTe로부터 선택된 어느 하나로 코어가 형성되고, ZnS, ZnSe 및 CdSe로부터 선택된 어느 하나로 쉘이 형성되는 태양 전지.The solar cell of claim 8, wherein the quantum dot has a core formed with any one selected from CdSe, InP, CuInS 2 , PbS, and CdTe, and a shell is formed with any one selected from ZnS, ZnSe, and CdSe. 제 9 항에 있어서, 상기 코어는 CdSe로 형성되고, 상기 쉘은 ZnS로 형성되는 태양 전지.The solar cell of claim 9, wherein the core is formed of CdSe, and the shell is formed of ZnS. 제 9 항에 있어서, 상기 변환층은 상기 코어 및 쉘의 사이즈에 따라 변환되는 파장이 조절되는 태양 전지.The solar cell of claim 9, wherein the conversion layer has a wavelength that is converted according to the size of the core and the shell. 제 9 항에 있어서, 상기 코어는 0.1㎚ 내지 6㎚의 사이즈로 형성되고, 상기 쉘은 8㎚ 내지 20㎚의 사이즈로 형성되는 태양 전지.The solar cell of claim 9, wherein the core is formed in a size of 0.1 nm to 6 nm, and the shell is formed in a size of 8 nm to 20 nm. 제 6 항에 있어서, 상기 제 2 반도체층 상에 반사 방지막이 형성되고, 상기 변환층이 상기 반사 방지막 상에 형성된 태양 전지.The solar cell of claim 6, wherein an antireflection film is formed on the second semiconductor layer, and the conversion layer is formed on the antireflection film. 제 13 항에 있어서, 상기 변환층 상에 형성된 보호층을 더 포함하는 태양 전지.The solar cell of claim 13, further comprising a protective layer formed on the conversion layer. 제 6 항에 있어서, 상기 제 2 반도체층 상에 반사 방지막이 형성되어 상기 반사 방지막은 텍스처링되고, 상기 반사 방지막의 오목부 내에 상기 변환층이 형성된 태양 전지.The solar cell of claim 6, wherein an anti-reflection film is formed on the second semiconductor layer so that the anti-reflection film is textured, and the conversion layer is formed in a recess of the anti-reflection film. 제 6 항에 있어서, 상기 변환층은 상기 제 2 반도체층 상에 형성되고, 상기 변환층을 덮도록 반사 방지막이 형성된 태양 전지.The solar cell of claim 6, wherein the conversion layer is formed on the second semiconductor layer, and an antireflection film is formed to cover the conversion layer. 제 1 반도체층의 일면 상에 제 2 반도체층을 형성하는 단계;Forming a second semiconductor layer on one surface of the first semiconductor layer; 상기 제 1 반도체층의 타면 상에 제 1 전극을 형성하고, 상기 제 2 반도체층의 소정 영역 상에 제 2 전극을 형성하는 단계; 및Forming a first electrode on the other surface of the first semiconductor layer, and forming a second electrode on a predetermined region of the second semiconductor layer; And 상기 제 2 반도체층 상에 제 1 에너지를 갖는 파장의 광을 흡수하여 이보다 낮은 제 2 에너지를 갖는 파장의 광으로 변환하는 변환층을 형성하는 단계를 포함하는 태양 전지의 제조 방법.Forming a conversion layer on the second semiconductor layer to absorb light of a wavelength having a first energy and convert the light into a light having a lower second energy. 제 17 항에 있어서, 상기 제 1 및 제 2 반도체층은,The method of claim 17, wherein the first and second semiconductor layers, 반도체 기판에 제 1 불순물을 도핑하여 상기 제 1 반도체층을 형성한 후 상기 제 1 반도체층에 소정 깊이로 제 2 불순물을 도핑하여 상기 제2 반도체층을 형성하는 태양 전지의 제조 방법.And forming the second semiconductor layer by doping the first impurity to a semiconductor substrate to form the first semiconductor layer and then doping the first semiconductor layer with a second impurity to a predetermined depth. 제 18 항에 있어서, 상기 반도체 기판은 결정질 실리콘 기판을 포함하는 태양 전지의 제조 방법.The method of claim 18, wherein the semiconductor substrate comprises a crystalline silicon substrate. 제 18 항에 있어서, 상기 제 1 반도체층의 적어도 일면을 텍스처링 처리하는 단계를 더 포함하는 태양 전지의 제조 방법.19. The method of claim 18, further comprising texturing at least one surface of the first semiconductor layer. 제 19 항에 있어서, 상기 제 2 반도체층과 변환층 사이에 반사 방지막을 형성하는 단계를 더 포함하는 태양 전지의 제조 방법.20. The method of claim 19, further comprising forming an anti-reflection film between the second semiconductor layer and the conversion layer. 제 19 항에 있어서, 상기 변환층 상에 반사 방지막을 형성하는 단계를 더 포함하는 태양 전지의 제조 방법.20. The method of claim 19, further comprising forming an anti-reflection film on the conversion layer. 제 18 항에 있어서, 상기 변환층은 코어와, 상기 코어를 감싸는 쉘을 포함하는 양자점을 포함하는 태양 전지의 제조 방법.The method of claim 18, wherein the conversion layer comprises a quantum dot including a core and a shell surrounding the core.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106158389A (en) * 2016-07-16 2016-11-23 石河子大学 Titanium deoxid film structure that cadmium sulfoselenide and zinc sulfur selenide are modified and preparation method
CN115411125A (en) * 2022-08-01 2022-11-29 华为数字能源技术有限公司 Thin-film solar cell and preparation method thereof, photovoltaic module and power generation equipment

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102564214B1 (en) * 2020-12-22 2023-08-04 동아대학교 산학협력단 Uv detector and manufacturing method thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003079457A1 (en) * 2002-03-19 2003-09-25 Unisearch Limited Luminescence conversion and application to photovoltaic energy conversion
US20090050201A1 (en) * 2007-07-17 2009-02-26 The Research Foundation Of State University Of New York Solar cell
US20100167011A1 (en) * 2008-12-30 2010-07-01 Nanosys, Inc. Methods for encapsulating nanocrystals and resulting compositions
US20110126889A1 (en) * 2009-09-25 2011-06-02 Immunolight, Llc Up and down conversion systems for improved solar cell performance or other energy conversion
WO2012134992A2 (en) * 2011-03-31 2012-10-04 Dow Global Technologies Llc Light transmitting thermoplastic resins comprising down conversion material and their use in photovoltaic modules

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101030322B1 (en) * 2008-05-28 2011-04-20 (주)세현 Manufacturing method of solar cell
KR101142861B1 (en) * 2009-02-04 2012-05-08 엘지전자 주식회사 Solar cell and manufacturing method of the same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003079457A1 (en) * 2002-03-19 2003-09-25 Unisearch Limited Luminescence conversion and application to photovoltaic energy conversion
US20090050201A1 (en) * 2007-07-17 2009-02-26 The Research Foundation Of State University Of New York Solar cell
US20100167011A1 (en) * 2008-12-30 2010-07-01 Nanosys, Inc. Methods for encapsulating nanocrystals and resulting compositions
US20110126889A1 (en) * 2009-09-25 2011-06-02 Immunolight, Llc Up and down conversion systems for improved solar cell performance or other energy conversion
WO2012134992A2 (en) * 2011-03-31 2012-10-04 Dow Global Technologies Llc Light transmitting thermoplastic resins comprising down conversion material and their use in photovoltaic modules

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106158389A (en) * 2016-07-16 2016-11-23 石河子大学 Titanium deoxid film structure that cadmium sulfoselenide and zinc sulfur selenide are modified and preparation method
CN106158389B (en) * 2016-07-16 2017-12-22 石河子大学 Cadmium sulfoselenide and the titanium deoxid film structure and preparation method of zinc sulfur selenide modification
CN115411125A (en) * 2022-08-01 2022-11-29 华为数字能源技术有限公司 Thin-film solar cell and preparation method thereof, photovoltaic module and power generation equipment

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