[go: up one dir, main page]

WO2014083158A1 - Dispositif de balayage destiné à balayer un faisceau laser au sein d'un plan de travail - Google Patents

Dispositif de balayage destiné à balayer un faisceau laser au sein d'un plan de travail Download PDF

Info

Publication number
WO2014083158A1
WO2014083158A1 PCT/EP2013/075096 EP2013075096W WO2014083158A1 WO 2014083158 A1 WO2014083158 A1 WO 2014083158A1 EP 2013075096 W EP2013075096 W EP 2013075096W WO 2014083158 A1 WO2014083158 A1 WO 2014083158A1
Authority
WO
WIPO (PCT)
Prior art keywords
laser beam
scanning
working plane
scanning device
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2013/075096
Other languages
German (de)
English (en)
Inventor
Ingo Steiner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Focuslight Germany GmbH
Original Assignee
Limo Patentverwaltung GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Limo Patentverwaltung GmbH and Co KG filed Critical Limo Patentverwaltung GmbH and Co KG
Publication of WO2014083158A1 publication Critical patent/WO2014083158A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

Definitions

  • the present invention relates to a scanning device for scanning a laser beam in a working plane comprising optical
  • Wavefront transformation means which are designed so that they can influence the laser beam such that the laser beam after passing through the optical
  • Wavefront transforming means in at least one direction has a top-hat angle distribution, scanning means which are designed so that the laser beam in the working plane in two
  • the mean propagation direction of the laser radiation means the mean propagation direction of the laser radiation, especially if this is not a plane wave or at least partially divergent.
  • laser beam, light beam, sub-beam or beam is, unless expressly stated otherwise, not an idealized beam of geometric optics meant, but a real light beam, such as a laser beam with a Gaussian profile or a modified Gaussian profile or a top Hat profile, which has no infinitesimal small, but an extended beam cross-section.
  • top hat distribution or top hat intensity distribution or top hat profile is meant an intensity distribution that can be described, at least in one direction, essentially by a rectangular function (rect (x)).
  • real intensity distributions, the deviations from a rectangular function in the percentage range or inclined flanks can also be referred to as a top hat distribution or top hat profile.
  • Such scanning devices to date have scanning means with a first and a second deflection mirror, which are each rotatable about an axis of rotation by means of a galvanometer associated therewith.
  • Deflection mirror is preferably oriented orthogonal to the axis of rotation of the second deflection mirror.
  • a lens means is arranged in the beam path between the scanning means and the working plane, which can focus the laser beam in the working plane, wherein the laser beam is deflected in the working plane proportional to the scan angle ⁇ .
  • Scanning device is scanned, which has no gaussian profile, but a top hat profile. In many applications it is
  • the intensity profile of the laser beam in the working plane, at least in one direction, is a top Hat profile matches.
  • single-mode lasers are generally used as laser light sources.
  • Deflecting mirrors are only approximately met, so that it can - especially in a laser beam with top hat distribution - come to the above-mentioned impairments of the intensity distribution in the working plane.
  • the top hat profile does not remain in the working plane
  • the present invention makes it a task, a
  • a device for scanning a laser beam in a working plane is characterized in that the scanning means comprise precisely one mirror, which rotates about two axes of rotation, which are located in a pupil plane of the objective means in a common
  • Cutting pivot is rotatable.
  • the optical wavefront transformation means are designed so that they can influence the laser beam in such a way that the laser beam after passing through the optical waveguide
  • Wavefront transforming means in two directions has a top hat angle distribution.
  • the scanning device it is possible to scan the laser steel with top hat profile in two directions in the working plane such that the top hat profile remains at least substantially symmetrical in both directions.
  • the deformations of the top hat profile when scanning over a workpiece in the working plane can be significantly reduced compared to the prior art.
  • the actuator means may be piezoelectric. Piezoelectric actuator means allow a precise and rapid adjustment of the rotational angle of the mirror about the two axes of rotation.
  • Each of the piezoelectric actuator means in this embodiment may comprise one or more piezo elements to which the mirror is suspended.
  • Electromagnetic actuator means can also cause a precise and rapid adjustment of the rotational angles of the mirror about the two axes of rotation.
  • each of the electromagnetically-driven actuator means may include one or more
  • a lens of the objective means which is first in the beam path of the laser radiation, can have a distance of between 10 and 100 mm from the pupil plane of the objective means.
  • a last in the beam path of the laser radiation lens of the lens means have a distance between 100 to 1000 mm from the working plane.
  • the objective means is an F-theta objective means.
  • the objective means can fulfill an F-theta function, so that the beam height in the working plane depends directly on the scan angle and not on its tangent.
  • the objective means as an F-theta objective means, it is advantageously possible to have a relatively large in the work plane, Plan to produce area that is exposed to the laser radiation.
  • a telecentric F-theta objective means is advantageously capable of keeping the focus of the laser beam in the working plane in the entire scan area.
  • Another advantage of a telecentric F-theta objective means is that it can keep the laser beam orthogonal to the scan area of the working plane. This effect is particularly advantageous when a laser beam incident obliquely to the working plane is undesirable in the application, as is the case, for example, in numerous applications in material processing in which the laser beam preferably does not obliquely strike a workpiece arranged in the working plane should.
  • Fig. 1 is a schematic side view of a scanning device
  • FIG. 1 a Cartesian coordinate system is shown in FIG. 1, which defines the x direction, the y direction, which in the present case extends into the plane of the drawing, and the z direction.
  • the scanning device includes optical
  • Wavefront transformation means 3 which are designed so that they influence the laser beam 1 in such a way and can cause a transformation of the Gaussian profile of the laser beam 1 in such a way that the laser beam 1 after passing through the optical
  • Wavefront transformation means 3 has a top hat angle distribution.
  • the wavefront transformation means 3 comprise in a manner known per se not explicitly shown optical means
  • Transformation interfaces that can cause such a transformation of the profile of the laser beam 1, so that the laser beam. 1 after passing through the transformation interfaces has the desired top hat angle distribution.
  • the scanning device furthermore has scanning means which are located behind the beam path of the laser beam 1 behind the beam path
  • Wavefront transformation means 3 are arranged.
  • the scanning means comprise a rotatable mirror 5 and controllable (off
  • actuator means 7, 8 which are coupled to the rotatable mirror 5.
  • the actuator means 7, 8 are able to rotate the rotatable mirror 5 about two mutually orthogonal axes of rotation, thereby the laser beam 1 in the below
  • a first axis of rotation of the mirror 5 preferably extends parallel to the x-axis and a second axis of rotation preferably extends parallel to the y-axis.
  • the scanning device comprises an objective means 4, which is arranged in the beam path of the laser beam 1 between the mirror 5 and the working plane 2.
  • the lens means 4 comprises a plurality of lens means 40, 41, 42, 43, which are arranged one behind the other in the beam path of the laser beam 1.
  • the objective means 4 may preferably be designed as F-theta objective means. This means that the objective means 4 can fulfill an F-theta function, so that the beam height in the working plane 2 depends directly on the scanning angle and not on its tangent.
  • the F-theta objective means is capable of keeping the focus of the laser beam 1 in the working plane 2 in the entire scan field.
  • the lens means 4 thus does not work jet imaging. Consequently, due to the Fourier transformation of the wavefront of the laser beam 1, no image plane exists.
  • the F-theta objective means may also be telecentric in an advantageous variant.
  • a telecentric F-theta lens means is also advantageously able to control the focus of the laser beam 1 in the entire scan area in the
  • arranged workpiece incident laser beam 1 is undesirable, as for example in numerous applications in the
  • the rotatable mirror 5 is arranged in the beam path of the scanning device, that the intersection of its two axes of rotation and thus that pivot point 9 by which the mirror 5 can rotate effectively, in the pupil plane 6 of the lens means 4 is located.
  • the actuator means 7, 8 may be designed piezoelectrically and comprise one or more piezo elements on which / the mirror 5 is suspended and which can cause the rotational movement of the mirror 5 about the two axes of rotation. Alternatively, the
  • Actuator 7, 8 also be formed electromagnetically and electromagnetic coils include, which are formed and coupled to the mirror 5 so that they can cause the rotational movement of the mirror 5 about the two axes of rotation.
  • Pupillenebene 6 of the lens means 4 may in particular the
  • the remaining residual distortion for a particular scan angle about the first axis of rotation should be identical (or at least nearly identical) to the distortion at identical scanning angle about the second axis of rotation.
  • Typical distances between the pivot point 9 of the mirror 5 (and thus the pupil plane 6) and the plane of the first lens 40 in the beam path of the objective means 4 are typically about 10 to 100 mm.
  • Typical working distances between the lens surface of the last lens 43 in the beam path of the objective means 4 and the working plane 2 are in the range of 100 to 1000 mm.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

L'invention concerne un dispositif de balayage qui est destiné à balayer un faisceau laser (1) au sein d'un plan de travail (2) et qui comprend des moyens optique de transformation de front d'onde (3) lesquels sont réalisés tels qu'ils peuvent influencer le faisceau laser (1) de manière à ce que le faisceau laser (1) présente, suite à son passage à travers les moyens optiques de transformation de front d'onde (3), dans au moins une direction une distribution angulaire rappelant un haut-de-forme (top hat), ledit dispositif comprenant en outre des moyens de balayage lesquels sont réalisés tels qu'ils permettent de déplacer le faisceau laser (1) au sein d'un plan de travail(2) dans deux directions spatiales, et un moyen d'objectif (4) lequel comporte un certain nombre de lentilles (40, 41, 42, 43) disposées les unes derrière les autres et lequel est disposé dans la trajectoire du faisceau laser (1) entre les moyens de balayage et le plan de travail (2) et lequel est réalisé tel qu'il permet de soumettre le faisceau laser (1) à une transformation de Fourrier en mettant en œuvre ladite distribution angulaire rappelant un haut-de-forme, les moyens de balayage comprenant exactement un miroir (5) pouvant pivoter autour de deux axes de rotation lesquels se coupent, au sein d'un plan de pupille (6) du moyen d'objectif (4), dans un point de rotation (9).
PCT/EP2013/075096 2012-11-29 2013-11-29 Dispositif de balayage destiné à balayer un faisceau laser au sein d'un plan de travail Ceased WO2014083158A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012111601.6 2012-11-29
DE201210111601 DE102012111601A1 (de) 2012-11-29 2012-11-29 Scanvorrichtung zum Scannen eines Laserstrahls in einer Arbeitsebene

Publications (1)

Publication Number Publication Date
WO2014083158A1 true WO2014083158A1 (fr) 2014-06-05

Family

ID=49683729

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2013/075096 Ceased WO2014083158A1 (fr) 2012-11-29 2013-11-29 Dispositif de balayage destiné à balayer un faisceau laser au sein d'un plan de travail

Country Status (2)

Country Link
DE (1) DE102012111601A1 (fr)
WO (1) WO2014083158A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110198794A (zh) * 2017-06-01 2019-09-03 大族激光科技产业集团股份有限公司 激光清洗镜头

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5719391A (en) * 1994-12-08 1998-02-17 Molecular Dynamics, Inc. Fluorescence imaging system employing a macro scanning objective
US20030102291A1 (en) * 2001-11-30 2003-06-05 Xinbing Liu System and method of laser drilling
US20060091120A1 (en) * 2002-11-06 2006-05-04 Markle David A Recycling optical systems and methods for thermal processing
WO2011017147A1 (fr) * 2009-08-05 2011-02-10 Corning Incorporated Système de lecteur optique indépendant de marqueurs et procédés avec balayage optique

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6816294B2 (en) * 2001-02-16 2004-11-09 Electro Scientific Industries, Inc. On-the-fly beam path error correction for memory link processing
DE102008029946A1 (de) * 2008-06-26 2009-12-31 Limo Patentverwaltung Gmbh & Co. Kg Scannvorrichtung für einen Laserstrahl

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5719391A (en) * 1994-12-08 1998-02-17 Molecular Dynamics, Inc. Fluorescence imaging system employing a macro scanning objective
US20030102291A1 (en) * 2001-11-30 2003-06-05 Xinbing Liu System and method of laser drilling
US20060091120A1 (en) * 2002-11-06 2006-05-04 Markle David A Recycling optical systems and methods for thermal processing
WO2011017147A1 (fr) * 2009-08-05 2011-02-10 Corning Incorporated Système de lecteur optique indépendant de marqueurs et procédés avec balayage optique

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
TEIPEL ANSGAR ET AL: "Beam shaping: top hat and customized intensity distributions for semiconductor manufacturing and inspection", OPTICAL MICROLITHOGRAPHY XXIV, SPIE, 1000 20TH ST. BELLINGHAM WA 98225-6705 USA, vol. 7973, no. 1, 17 March 2011 (2011-03-17), pages 1 - 15, XP060009248, DOI: 10.1117/12.879640 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110198794A (zh) * 2017-06-01 2019-09-03 大族激光科技产业集团股份有限公司 激光清洗镜头
CN110198794B (zh) * 2017-06-01 2022-02-18 大族激光科技产业集团股份有限公司 激光清洗镜头

Also Published As

Publication number Publication date
DE102012111601A1 (de) 2014-03-13

Similar Documents

Publication Publication Date Title
DE102014200633B3 (de) Bearbeitungsvorrichtung und -verfahren zur Laserbearbeitung einer Oberfläche
DE102013004869B4 (de) Verfahren zur Ausbildung einer Strukturierung an Oberflächen von Bauteilen mit einem Laserstrahl
DE102009021251A1 (de) Vorrichtung zur Formung von Laserstrahlung sowie Laservorrichtung mit einer derartigen Vorrichtung
DE102009045096A1 (de) Beleuchtungssystem mit einer Spiegelanordnung aus zwei Spiegeln
DE102015014143B4 (de) Verwendung einer optischen Einrichtung zur Ablenkung und Fokussierung von Laserstrahlung
EP2399158B1 (fr) Disposif pour homogeneisation de radiation laser
EP2972562A1 (fr) Dispositif d'homogénéisation d'un faisceau laser
EP3214477A2 (fr) Dispositif destiné à la formation de rayons laser
DE102013114083B4 (de) Vorrichtung zur Formung von Laserstrahlung
DE102016211811A1 (de) F-Theta-Objektiv und Scannervorrichtung damit
WO2014083158A1 (fr) Dispositif de balayage destiné à balayer un faisceau laser au sein d'un plan de travail
DE102022107324B4 (de) Laserbearbeitungskopf mit Auslenkvorrichtungen
EP3326021B1 (fr) Agencement et procédé pour la déviation bidimensionnelle de rayonnement optique
EP3011393B1 (fr) Dispositif de balayage
DE102016124408A1 (de) Vorrichtung zur Ablenkung und/oder Modulation einer Laserstrahlung, insbesondere einer Mehrzahl von Laserstrahlen
DE102005017014B4 (de) Verfahren zur Formung eines Beleuchtungslaserstrahls und Beleuchtungseinrichtung mit einem Laser
WO2022033923A1 (fr) Appareil pour générer une raie laser définie sur un plan de travail
DE102010011988B4 (de) Vorrichtung zur Bearbeitung eines Werkstückes mittels ablenkbarem Laserstrahl
DE102022000743B3 (de) Optische Einrichtung zur Ablenkung und Fokussierung von Laserstrahlung zur Lasermaterialbearbeitung und Verwendung zweier miteinander verbundener und angetrieben rotierender Polygonspiegel, eines Galvanometerscanners und einer Fokussieroptik
EP3312656B1 (fr) Dispositif de déplacement d'un rayon lumineux incident sur un axe optique
DE102013108066A1 (de) Vorrichtung zur Ablenkung eines Lichtstrahls
EP4125165B1 (fr) Dispositif de mise au point doté d'un plan image s'étendant parallèle ou continu par rapport à un plan cible
WO2014026713A1 (fr) Dispositif de formation de faisceau et dispositif à laser équipé d'au moins un dispositif de formation de faisceau
DE102024103742A1 (de) Optische Vorrichtung, optisches System und Verwendung der optischen Vorrichtung zur Bearbeitung einer Probe mittels interferierender Laserstrahlen
DE102013112502B4 (de) Verfahren und Anordnung zur Symmetrisierung eines Poynting-Fehlers eines aus mindestens zwei Strahlenbündeln durch Strahlumlenkung zusammengesetzten Laserstrahls

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 13799028

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 13799028

Country of ref document: EP

Kind code of ref document: A1