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WO2014073810A1 - Ionisateur optique - Google Patents

Ionisateur optique Download PDF

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Publication number
WO2014073810A1
WO2014073810A1 PCT/KR2013/009527 KR2013009527W WO2014073810A1 WO 2014073810 A1 WO2014073810 A1 WO 2014073810A1 KR 2013009527 W KR2013009527 W KR 2013009527W WO 2014073810 A1 WO2014073810 A1 WO 2014073810A1
Authority
WO
WIPO (PCT)
Prior art keywords
ray tube
electrode
connection part
wire
case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2013/009527
Other languages
English (en)
Korean (ko)
Inventor
김도윤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VSI Co Ltd
Original Assignee
VSI Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VSI Co Ltd filed Critical VSI Co Ltd
Publication of WO2014073810A1 publication Critical patent/WO2014073810A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/02—Electrical arrangements
    • H01J2235/023—Connecting of signals or tensions to or through the vessel
    • H01J2235/0233—High tension
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/025—X-ray tubes with structurally associated circuit elements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/02—Constructional details

Definitions

  • the present invention relates to an optical ionizer that can separate a lamp unit.
  • An optical ionizer is a device that neutralizes the static electricity present on the surface of an electrode by radiating X-rays generated in an X-ray tube toward the electrode and ionizing gas molecules around the electrode.
  • the X-ray tube of the optical ionizer includes a cathode and an anode, and the two electrodes are supported by being insulated from each other.
  • a typical X-ray tube is vacuumed inside an insulated container, and the anode and cathode are positioned to face each other in the vacuum container, so that X-rays generated in a direction perpendicular to the center axis of the anode and cathode are easily radiated.
  • An X-ray window is provided.
  • the potential difference applied between the anode and the cathode is called a tube voltage.
  • the conventional optical ionizer generating the light X-rays or the soft X-rays needs to periodically replace the portion generating the X-rays. This is because the X-ray generating part also runs out of life in the same vein as the part which generates X-rays wears out over time and the life of the bulb is worn out.
  • the conventional optical ionizer is manufactured in a form in which the position and angle of the head portion cannot be adjusted, which has a disadvantage in that the radiation angle of X-rays radiated to the whole body cannot be adjusted.
  • the technical problem to be achieved by the present invention is to adjust the X-ray radiation angle of the optical ionizer.
  • Another technical problem to be achieved by the present invention is to reduce the cost of replacing the head of the optical ionizer by replacing only the X-ray generator of the optical ionizer.
  • an optical ionizer is applied to an external voltage to attract electrons by using a potential difference of electrons, and an X-ray tube emitting X-rays by collision of electrons, and molding and wrapping an inlet of the X-ray tube.
  • a connection part having an electrode connection part and an angle adjusting part, a DC high voltage is generated by an external power source, and applies a voltage to the X-ray tube, and includes a high voltage generation part having at least one wire, and the high voltage through the at least one wire.
  • the hollow part has a cylindrical shape with an open upper surface, so that the connecting part is inserted and at least And a second case through which the screw for fixing the connection part to the insertion part is formed, the insert part having an inner electrode, and surrounding the outside of the high voltage generating part and the insert part to form a hole on one side. It is good.
  • the insertion portion may include a hole through which the screw penetrates on one side of the insertion portion.
  • the end portion of the connecting portion has a slope that gradually decreases in diameter.
  • the second case may further include a display window for displaying the life of the X-ray tube.
  • the second case may further include a connector connecting the second case to an external controller.
  • the at least one electrode is positioned to be perpendicular to the bottom surface of the inserting portion, the at least one electrode is a wire connection portion connected to the wire, a protrusion that abuts the first electrode connection portion or the second electrode connection portion of the connection portion, and the protrusion and Located between the wire connection portion is preferably provided with a spring for connecting or disconnecting the projection and the wire connection in accordance with the position change of the protrusion.
  • the life span is limited in the optical ionizer by inserting the connecting portion of the first portion into the insertion portion of the second portion to connect the first portion and the second portion, and vice versa by removing the connecting portion of the first portion from the insertion portion of the second portion. Only the X-ray generating unit can be replaced, thus reducing the cost of replacing the soft X-ray generating unit.
  • the insertion angle may be adjusted when the connecting portion of the first portion is inserted into the insertion portion of the second portion, thereby adjusting the soft X-ray radiation angle in the optical ionizer, thereby improving X-ray radiation efficiency.
  • FIG. 1 is a perspective view of an optical ionizer according to an embodiment of the present invention.
  • FIG. 2 is a front view of an optical ionizer according to an embodiment of the present invention.
  • FIG 3 is a left side view of an optical ionizer according to an embodiment of the present invention.
  • FIG. 4 is a right side view of an optical ionizer according to one embodiment of the present invention.
  • FIG. 5 is a cross-sectional view of a portion of an optical ionizer according to an embodiment of the present invention.
  • FIGS. 1 to 4 an optical ionizer according to an embodiment of the present invention will be described in detail.
  • the optical ionizer includes an X-ray tube 110 radiating X-rays and a silicon cap 120 covering a portion of the X-ray tube 110. ), A first case 100 surrounding the outside of the X-ray tube 110 and the silicon cap 120, and a connection part 30 penetrating one side of the first case 100 and connected to the silicon cap 120.
  • the first case 10 and the second case 200 having a hole into which the connection part 30 can be inserted at one side, and an insertion part which is located inside the second case 200 and the connection part 30 is inserted ( 250, a high voltage generator 260 located in the second case 200 and connected to the connection part 30 inserted into the insertion part 250, and a screw 210 positioned through one side of the second case 200.
  • a second portion 20 disposed on one side of the second case 200 and having a connector 230 for connecting the second case 200 to an external device.
  • the X-ray tube 110 located inside the first part 10 generates electrons, and attracts the generated electrons by the potential difference. At this time, the attracted electrons collide with each other to generate a soft X-ray. As described above, the X-ray tube 110 generates soft X-rays using electrons and emits the X-rays to the outside.
  • the X-ray tube 110 receives the voltage from the high voltage generator 260 located inside the second unit 20 to generate X-rays.
  • the silicon cap 120 is positioned to surround a portion of the X-ray tube 110.
  • the silicon cap 120 is positioned to surround the inlet of the X-ray tube 110 to prevent an electrical accident that may occur due to a high voltage applied from the high voltage generator 260 to the X-ray tube 110.
  • the silicon cap 120 is formed by molding the inlet portion of the X-ray tube 110 with silicon.
  • the silicon cap 120 is elastic and elastic to absorb vibrations applied from the outside to protect the X-ray tube 110 from vibrations.
  • the first case 100 of the first portion 10 includes one or more surfaces surrounding the outside of the X-ray tube 110 and the silicon cap 120. At this time, the first case 100 has at least one surface formed of a curved line.
  • the first case 100 corresponds to the shape of the X-ray tube 110 and the silicon cap 120. It is good to have a curved surface.
  • both sides of the first case 100 is configured in a plane.
  • One side of both sides of the first case 100 is located adjacent to the X-ray tube 110, the other side is located adjacent to the silicon cap 120.
  • one side of the first case 100 positioned to be adjacent to the X-ray tube 110 includes an output window 130.
  • the output window 130 positioned at one side of the first case 100 has a circular hole shape having a diameter corresponding to the diameter of the X-ray tube 110, and the X-rays output from the X-ray tube 110 are X-rays. ) Is emitted to the outside through the output window 130.
  • the bottom surface of the first case 100 is formed in a flat surface. At this time, the bottom surface of the first case 100 has a hole in the portion adjacent to the silicon cap 120.
  • connection part 30 penetrates and is located in a hole located at the bottom of the first case 100.
  • One end of the connection part 30 is connected to the silicon cap 120, and the other end of the connection part 30 is inserted and positioned inside the insertion part 250, and the first electrode connection part 310 and the second electrode connection part are positioned. 320, and an angle adjuster 330.
  • the first electrode connection part 310 and the second electrode connection part 320 are connected to the electrode when the connection part 30 is inserted into the insertion part 250 to receive a voltage.
  • the angle adjuster 330 is formed to be inclined to change the insertion angle of the connection part 30 when the connection part 30 is inserted into the insertion part 250.
  • the first portion 10 formed as described above is interpolated and coupled to the insertion portion 250 of the second portion 20 through the connection portion 30.
  • the second part 20 will be described in more detail with reference to FIGS. 1 to 4.
  • the second case 200 of the second part 20 has a hexahedral shape, and the second case 200 includes an insertion part 250.
  • One end of the insertion part 250 having a cylindrical shape having a hollow and upper surface is connected to one side of the second case 200, and the other end of the insertion part 250 is inside the second case 200.
  • one surface of the second case 200 to which the insertion unit 250 is connected includes a hole to have a diameter corresponding to the diameter of the insertion unit 250. Therefore, when the connecting portion 30 of the first portion 10 is inserted into a hole formed in one surface of the second case 200, the connecting portion 30 is inserted into the insertion portion 250.
  • the screw 210 is located on the other side of the second case 200 adjacent to one surface of the second case 200 where the insertion unit 250 is located.
  • the screw 210 is positioned to penetrate the second case 200, and a hole through which the screw 210 can penetrate is formed in one side of the insertion part 250. Therefore, the end of the screw 210 passes through the second case 200 and the insertion part 250 to be positioned inside the insertion part 250.
  • one surface of the second case 200 through which the screw 210 passes and the screw 210 are positioned perpendicular to each other.
  • the surface of the insertion portion 250 through which the screw 210 and the screw 210 are positioned perpendicular to each other is inserted into the insertion part 250, and is connected to the connection part 30 located in the insertion part 250. Touches.
  • One end of the screw 210 protruding toward the outer surface of the second case 200 may be protruded outward from the second case 200 or may be inserted into the second case 200 inwardly by the external force. .
  • the screw 210 when the screw 210 is inserted into the second case 200 by receiving an external force, the end of the screw 210 penetrates through the insertion part 250 and is positioned inside the insertion part 250 to connect the connection part. (30) is reached.
  • the screw 210 which contacts the connecting portion 30 is further inserted into the second case 200 due to the force applied from the outside, the screw 210 is the connecting portion 30 located inside the inserting portion 250.
  • the connection part 30 located inside the insertion part 250 is positioned in a fixed state inside the insertion part 250 due to the screw 210.
  • the high voltage generator 260 positioned inside the second unit 20 receives power from the outside, and boosts the applied power to a high voltage to generate a high voltage.
  • the high voltage generator 260 generates a DC voltage and transmits the generated DC voltage to the X-ray tube 110.
  • the high voltage generator 260 includes one or more wires, and transfers the high voltage generated by the high voltage generator 260 to the X-ray tube 110 using the wires.
  • a structure for transmitting the high voltage generated by the high voltage generator 260 to the X-ray tube 110 will be described in more detail with reference to FIG. 5.
  • FIG. 5 is a cross-sectional view of a portion of the optical ionizer according to an embodiment of the present invention.
  • the connection part 30 is inserted into the insertion part 250.
  • the screw 210 passes through the hole formed in one side of the second case 200 and the hole formed in one side of the insertion part 250, so that one end of the screw 210 is inserted into the insertion part 250.
  • the connection part 30 is fixed to the surface of the connection part 30 to be positioned.
  • first electrode 410, the second electrode 420, and the third electrode 430 are positioned on the bottom of the insertion part 250 having a cylindrical shape so as to be perpendicular to the bottom of the insertion part 250.
  • the first to third electrodes 410, 420, and 430 are separately located.
  • each end of the first wire 261, the second wire 262, and the third wire 263 branched from the high voltage generator 260 is connected to the high voltage generator 260, and the other end thereof is It is located inside the insertion unit 250.
  • the first to third wires 261, 262, and 263 are positioned inside the insertion unit 250 by penetrating the bottom surface of the insertion unit 250, and the first to third wires 261, 262, and 263 are The high voltage generated by the high voltage generator 260 is transferred.
  • first wire 261 is connected to the first electrode 410
  • second wire 262 is connected to the second electrode 420
  • third wire 263 is connected to the third electrode 430, respectively.
  • the first and third electrodes 410 to 430 include protrusions 413, 423, and 433, springs 412, 422, and 432, and wire connectors 411, 421, and 431, respectively.
  • the first electrode 410 having the first protrusion 413, the first spring 412, and the first wire connection part 411 is connected to the bottom surface of the insertion part 250, thereby inserting the insertion part ( 250) located inside.
  • the first wire connector 411 is connected to the first wire 261 branched from the high voltage generator 260 to receive the voltage generated by the high voltage generator 260 and flowing through the first wire 261.
  • the first protrusion 413 is positioned to protrude from the first electrode 410, and the first protrusion 413 is positioned to contact the first electrode connector 310 of the connector 30.
  • the first protrusion 413 may be formed in a first manner. In the direction of the wire connection portion 411, the first spring 412 connected to the first protrusion 413 also enters the direction of the first wire connection portion 411.
  • One end of the first spring 412 is connected to the first wire connector 411, and the other end of the first spring 412 is positioned to be connected to the first protrusion 413.
  • the position of the first spring 412 connected to the first protrusion 413 also changes in response to the position change of the first protrusion 413.
  • the first spring 412 when the first protrusion 413 is inserted in the direction of the first wire connection part 411, the first spring 412 is also inserted in the direction of the first wire connection part 411.
  • the first spring 412 when the first protrusion 413 protrudes in the direction of the first electrode connector 310, the first spring 412 also protrudes in the direction of the first electrode connector 310.
  • first protrusion 413 and the spring 412 include a conductive material
  • the first wire connection part 411 is included.
  • the voltage applied to the first electrode connector 310 is transferred to the first electrode 310 via the first spring 412 and the first protrusion 413.
  • the voltage transmitted to the first electrode connector 310 of the connector 30 is transferred to the X-ray tube 110 via the connector 30 to supply a voltage to the X-ray tube 110.
  • the first wire connector 411 receives the voltage generated by the high voltage generator 260 through the first wire 261 as described above, the first electrode connector 411 is provided through the first electrode 410.
  • the voltage transmitted to the 310 is a voltage received from the high voltage generator 260 and the first wire 261.
  • the second electrode 420 connected to the bottom surface of the insertion part 250 will be described with reference to FIG. 5. As shown in FIG. 5, the second electrode 420 is positioned to face the first electrode 410 with the connection part 30 interposed therebetween.
  • the second electrode 420 includes a second wire connection part 421.
  • the second wire connector 421 is connected to the second wire 262 which is one of the wires branched from the high voltage generator 260.
  • the second electrode 420 includes a second spring 422 and a second protrusion 423, and the second protrusion 423 is positioned to contact the first electrode connection part 310 of the connection part 30. .
  • the second protrusion 423, the second spring 422, and the second wire connector 421 have the same function and role as each corresponding component positioned in the first electrode 410, the second electrode 420 The further description of the components of) is omitted.
  • the third electrode 430 of the connecting portion 30 It is formed to transfer a voltage to the second electrode connector 320.
  • the third electrode 430 is positioned to be connected to the bottom surface of the insertion part 250, and is connected to the third wire 263 of the wires branched from the high voltage generator 260.
  • the third wire 262 is connected to the third wire connection part 431 positioned on the third electrode 430.
  • the third wire connector 431 is connected to one end of the third spring 432, and the other end of the third spring 432 is connected to the third protrusion 433.
  • the third protrusion 433 is positioned to contact the second electrode connection part 320 of the connection part 30 inserted into the insertion part 250.
  • the second electrode connection part 320 of the connection part 30 is connected to the third electrode.
  • the third protrusion 433 enters the third wire connecting portion 431.
  • the connecting portion 30 is separated from the insertion portion 250, so that the second electrode connecting portion 320 is formed.
  • the third protrusion 433 is separated from the third protrusion 433 is protruded in the direction of the connecting portion (30).
  • the third protrusion 433 enters the direction of the third wire connector 431.
  • 432 also enters the third wire connection part 431, so that the second electrode connection part 320 and the third wire connection part 431 are electrically connected to each other.
  • the voltage transferred to the third electrode 430 through the third wire 263 is transferred to the second electrode connector 320.
  • the connection part 30 inserted into the insertion part 250 is disposed.
  • the insertion part 250 is fixedly positioned.
  • the voltage generated by the high voltage generator 260 includes the first to third wires 261, 262, and 263 and the first to third electrodes 410, 420, and 430. Are transmitted to the connection part 30 located inside the insertion part 250.
  • the first to third wires 261, 262, and 263 are separated from each other and apply DC voltage generated by the high voltage generator 260 to the electrodes, the first electrode 410 and the second electrode ( Voltages of the same pole are applied to 420, and voltages of different poles are applied to the third electrode 430.
  • the polarities of the voltages applied to the first to third wires 261, 262, and 263 need not be determined in advance, and only the voltages are applied such that the polarities applied to the first and second wires 261 and 262 are the same.
  • the voltage applied to the third wire 263 may be applied such that the polarity is opposite to the polarity applied to the first wire 261 and the second wire 262.
  • One side of the second case 200 includes a display unit 220.
  • the display unit 220 measures the life of the first unit 10 and displays the measured life so as to be identified from the outside.
  • one side of the second case 200 has a connector 230 for connecting the second portion 20 to an external controller.
  • the high voltage generator 260 of the second unit 20 receives an external power source to generate a high voltage DC voltage.
  • the DC voltage generated by the high voltage generator 260 is transmitted to the connection part 30 positioned inside the insertion part 250 through the first to third wires 261, 262, and 263.
  • the voltage flowing through the first wire 261 and the second wire 262 is the first wire connecting portion 411 and the second electrode 420 of the first electrode 410 located in the insertion portion 250
  • the voltage is transmitted to the second wire connection part 421 and the voltage flowing through the third wire 263 is transmitted to the third wire connection part 431 of the third electrode 430 located in the insertion part 250.
  • the first wire connection part 411 and the second wire connection part 421 transmit the received voltage through the first spring 412 and the second spring 422, respectively. 423 respectively). Therefore, the first protrusion 413 and the second protrusion 423 positioned to abut on the first electrode connection part 310 of the connection part 30 inserted into the insertion part 250 transmit the voltage to the connection part 30. Done.
  • the third wire connection part 431 transfers the received voltage to the third protrusion part 433 through the third spring 432, and accordingly, the second of the connection part 30 inserted into the insertion part 250.
  • the third protrusion 433 positioned to be in contact with the electrode connector 320 transmits a voltage to the connector 30.
  • connection unit 30 that receives the voltage of the high voltage generator 260 through the wire and the electrode is connected to the X-ray tube 110 of the first unit 10, the voltage transmitted to the connection unit 30 is the X-ray tube 110. Is passed to.
  • the X-ray tube 110 generates X-rays by electron collision using a DC voltage received from the connection unit 30. X-rays generated in the X-ray tube 110 are emitted to the outside of the first portion 10 through the output window 130.
  • the first portion 10 of the first portion 10 inserted into the insertion portion 250 of the second portion 20 using the connection portion 30. Change the angle
  • connection part 30 fixedly inserted into the insertion part 250 through the screw 210 from the insertion part 250
  • the second case 200 and one side of the connection part 30 are penetrated.
  • the screw 210 is separated out of the second case 200.
  • the position of the connection part 30 inserted into the insertion part 250 can be easily changed. Then, by holding the first case 100 of the first portion 10 to adjust the angle to adjust the position of the first portion 10 to the angle to emit the X-rays through the output window 130.
  • the first case 100 may be angle-adjusted in all directions.
  • the position and angle of the first portion 10 can be adjusted, and thus the X-ray emission angle can be adjusted by changing only the angle of the first portion 10, which is a portion for irradiating X-rays without moving the optical ionizer mechanism itself. There is an effect.
  • the X-ray tube 110 needs to be replaced, in which case the first part (combined with the second portion 20) After the 10 is removed, the new first part 10 is coupled to the second part 20 to replace the worn X-ray tube 110.
  • the screw coupled to the side of the second case 200 Applying a force to (210) separates the screw 210 to the outside of the second case (200).
  • the connection part 30 coupled to the insertion part 250 of the second part 20 may be easily removed, and thus, the first part 10 may be held by the first case 100.
  • the screw 210 is inserted into the second case 200 and the insertion portion ( A force is applied to the screw 210 to penetrate 250 to adjust the position of the screw 210.
  • connection part 30 of the new first part 10 inserted into the insertion part 250 is fixed by the screw 210 in the insertion part 250, and thus the first part 10 to be replaced.
  • the operation of replacing the new first part 10 is completed.

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  • Elimination Of Static Electricity (AREA)

Abstract

La présente invention concerne un ionisateur optique. Un tel ionisateur optique comprend : un tube à rayons X recevant tension externe, utilisant une différence de potentiel d'électrons pour attirer des électrons, et utilisant une collision d'électrons pour émettre des rayons X ; un capuchon de silicium étant moulé pour refermer l'entrée du tube à rayons X ; un premier boîtier renfermant l'extérieur du tube à rayons X et le capuchon de silicium, et ayant un trou rond sur un côté de celui-ci qui correspond au diamètre du tube à rayons X ; une unité de connexion connectée au capuchon de silicium et ayant une première partie de connexion d'électrode, une seconde partie de connexion d'électrode et une partie de réglage d'angle ; une unité de génération de tension élevée recevant une alimentation électrique externe pour générer une tension élevée de courant continu et appliquer une tension au tube à rayons X, et ayant au moins un fil électrique ; une unité d'insertion connectée à l'unité de génération de tension élevée par l'intermédiaire du ou des fils électriques, ayant une forme cylindrique qui est creuse à l'intérieur et ayant une surface supérieure ouverte, de telle sorte que l'unité de connexion est insérée dans celle-ci, et ayant au moins une électrode ; et un second boîtier renfermant les extérieurs de l'unité de l'unité de génération de tension élevée et l'unité d'insertion, et ayant un trou formé dans un côté de celui-ci et une vis traversant le trou de manière à fixer l'unité de connexion à l'unité d'insertion. Par conséquent, uniquement une partie tête comprenant le tube à rayons X peut être désassemblée et remplacée, de telle sorte que le coût mis en jeu dans le remplacement da la tête du ionisateur optique peut être réduit. Également, du fait que la position et l'angle de couplage de la partie tête comprenant le tube à rayons X peuvent être réglés, l'effet peut être réalisé d'être apte à régler l'angle d'émissions de rayons X.
PCT/KR2013/009527 2012-11-09 2013-10-24 Ionisateur optique Ceased WO2014073810A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2012-0126744 2012-11-09
KR1020120126744A KR101361795B1 (ko) 2012-11-09 2012-11-09 광 이오나이저

Publications (1)

Publication Number Publication Date
WO2014073810A1 true WO2014073810A1 (fr) 2014-05-15

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101609620B1 (ko) * 2014-04-29 2016-04-06 (주) 브이에스아이 이온화 장치
KR101735457B1 (ko) * 2015-05-18 2017-05-15 (주)선재하이테크 연 엑스선 튜브 모듈, 분기된 매체를 이용한 연 엑스선 조사 장치 및 탈부착형 연 엑스선 이오나이저

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005005172A (ja) * 2003-06-13 2005-01-06 Genesis Technology Inc 軟ｘ線照射装置及び半導体の組立装置並びに検査装置
KR20050003520A (ko) * 2003-06-27 2005-01-12 엘지.필립스 엘시디 주식회사 이오나이저 장치
KR100676527B1 (ko) * 2006-10-16 2007-01-30 (주)선재하이테크 연엑스선을 이용한 이오나이저 및 대전물체의 전하 제거방법
KR100823990B1 (ko) * 2007-03-19 2008-04-22 (주)선재하이테크 광 이오나이저

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005005172A (ja) * 2003-06-13 2005-01-06 Genesis Technology Inc 軟ｘ線照射装置及び半導体の組立装置並びに検査装置
KR20050003520A (ko) * 2003-06-27 2005-01-12 엘지.필립스 엘시디 주식회사 이오나이저 장치
KR100676527B1 (ko) * 2006-10-16 2007-01-30 (주)선재하이테크 연엑스선을 이용한 이오나이저 및 대전물체의 전하 제거방법
KR100823990B1 (ko) * 2007-03-19 2008-04-22 (주)선재하이테크 광 이오나이저

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