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WO2013129069A1 - Source de rayons x et dispositif d'exposition aux rayons x - Google Patents

Source de rayons x et dispositif d'exposition aux rayons x Download PDF

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Publication number
WO2013129069A1
WO2013129069A1 PCT/JP2013/052910 JP2013052910W WO2013129069A1 WO 2013129069 A1 WO2013129069 A1 WO 2013129069A1 JP 2013052910 W JP2013052910 W JP 2013052910W WO 2013129069 A1 WO2013129069 A1 WO 2013129069A1
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WO
WIPO (PCT)
Prior art keywords
life
ray irradiation
ray
ray tube
output unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2013/052910
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English (en)
Japanese (ja)
Inventor
典正 小杉
直樹 奥村
竜弥 仲村
澄 藤田
岡田　知幸
秋臣 鵜嶋
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Hamamatsu Photonics KK
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Hamamatsu Photonics KK
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Publication date
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Publication of WO2013129069A1 publication Critical patent/WO2013129069A1/fr
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08—Electrical details
    • H05G1/26—Measuring, controlling or protecting

Definitions

  • the present invention relates to an X-ray irradiation source and an X-ray irradiation apparatus.
  • an X-ray irradiation apparatus including a plurality of X-ray irradiation units (X-ray irradiation sources) having an X-ray tube that generates X-rays has been disclosed (for example, see Patent Document 1).
  • Such an X-ray irradiation apparatus is used, for example, as a static elimination apparatus that generates an ion gas by irradiating a gas such as air with an X-ray to neutralize an object.
  • X-ray irradiation apparatuses as static elimination apparatuses are used in a wide range of fields including the manufacture of ICs (integrated circuits), LCDs (liquid crystal display devices), and PDPs (plasma display panels).
  • the X-ray tube used in such an X-ray irradiation apparatus has a lifetime. For this reason, it is necessary to replace the X-ray tube which has reached the end of its life as needed. In order to replace the lifetime of the X-ray tube without overlooking it, it is effective to add means for informing the outside of the lifetime of the X-ray tube.
  • the X-ray tube of which X-ray irradiation unit is to be replaced is identified at the work site. I can't. Even if the X-ray tube (or X-ray irradiation unit) is recorded for replacement before it is turned off, it is not easy to identify it at the work site. Therefore, the replacement work of the X-ray tube becomes complicated.
  • the present invention has been made to solve the above problems, and provides an X-ray irradiation source and an X-ray irradiation apparatus capable of reliably reporting the life of an X-ray tube regardless of the power supply status from a power source.
  • the purpose is to provide.
  • An X-ray irradiation apparatus includes an X-ray tube that generates X-rays, a life detection circuit that detects the life of the X-ray tube, and a display circuit that displays externally that the life is detected by the life detection circuit
  • the life detection circuit has a life notification output unit that supplies power to the display circuit when the life is detected, and the display circuit is supplied from the life notification output unit. It has a light emitting element that emits light by electric power, and a capacitor that is connected in parallel to the light emitting element and that receives electric power supplied from the life notification output unit and stores the electric power.
  • an X-ray irradiation source when the life of the X-ray tube is detected by the life detection circuit, power is supplied to the life display circuit by the life notification output unit, and the light emitting element emits light to the outside. The life of the X-ray generation source is notified. Further, in this X-ray irradiation source, the capacitor is charged by receiving the power supplied from the life notification output unit. Therefore, even when the X-ray irradiation source is turned off, the light emission of the light emitting element is continued by the electric power stored in the capacitor, so that the life of the X-ray tube can be reliably notified.
  • the electric power stored in the capacitor can be prevented from being discharged through the life detection circuit after the X-ray irradiation source is turned off, and the light emitting element can emit light reliably.
  • an output terminal for external connection is further provided, and the life notification output unit supplies power to the display circuit and outputs a life notification signal regarding the life of the X-ray tube to the output terminal.
  • an external device having means for notifying the life can be connected to the output terminal, and the life of the X-ray tube can be notified through the external device.
  • a rectifying element that allows current to flow in one direction from the life notification output unit to the output terminal.
  • a rectifying element that allows current to flow in one direction from the life notification output unit to the output terminal.
  • the life detection circuit preferably compares the value of the drive current of the X-ray tube with a preset threshold value, and detects the life of the X-ray tube based on the magnitude relationship between the value of the drive current and the threshold value. . It is also preferable that the life detection circuit compares the value of the driving voltage of the X-ray tube with a preset threshold and detects the life of the X-ray tube based on the magnitude relationship between the value of the driving voltage and the threshold. . In this case, the lifetime of the X-ray tube can be clearly detected based on a uniform standard.
  • the life detection circuit further includes a non-life notification output unit that supplies power to the display circuit when the life of the X-ray tube is not detected, and the display circuit is supplied from the non-life notification output unit. It is preferable to further include a light emitting element that emits light by electric power. In this case, when the life of the X-ray tube is not detected, the driving of the X-ray tube can be notified by the light emitting element that emits light with the power supplied from the non-life notification output unit.
  • the capacitor is preferably an electric double layer capacitor. In this case, the storage efficiency of the capacitor is increased. For this reason, a lot of electric power is stored in the capacitor in a short time, and the light emitting element can emit light for a longer time after the X-ray irradiation source is turned off.
  • An X-ray irradiation apparatus includes an X-ray tube that generates X-rays, a life detection circuit that detects the life of the X-ray tube, and a display circuit that displays externally that the life is detected by the life detection circuit
  • an X-ray irradiation apparatus comprising a controller having a control circuit for controlling the X-ray irradiation source, wherein the life detection circuit displays a display circuit when the life is detected.
  • the display circuit has a light emitting element that emits light by the power supplied from the life notification output section, and is connected in parallel to the light emitting element and supplied from the life notification output section. And a capacitor for receiving and storing the received electric power.
  • an X-ray irradiation apparatus when the life of the X-ray tube is detected by the life detection circuit, power is supplied to the life display circuit by the life notification output unit, and the light emitting element emits light to the outside. The life of the X-ray tube is notified. Further, in this X-ray irradiation apparatus, the capacitor is charged by receiving the power supplied from the life notification output unit. Therefore, even when the power of the X-ray irradiation apparatus is turned off, the light emission of the light emitting element is continued by the electric power stored in the capacitor, so that the life of the X-ray tube can be reliably notified. Thereby, even after the power of the X-ray irradiation apparatus is turned off, it is possible to identify which X-ray tube of which X-ray irradiation source is the replacement target.
  • the X-ray irradiation source and the X-ray irradiation apparatus According to the X-ray irradiation source and the X-ray irradiation apparatus according to the present invention, it is possible to reliably report the life of the X-ray tube regardless of the power supply state from the power source.
  • FIG. 1 is a perspective view showing an embodiment of an X-ray irradiation apparatus including an X-ray irradiation unit (X-ray irradiation source) according to the present invention. It is a block diagram which shows the functional component of the X-ray irradiation apparatus shown in FIG. It is a perspective view of the X-ray irradiation unit shown in FIG. It is a top view of the X-ray irradiation unit shown in FIG. It is a V-line arrow line view in FIG.
  • FIG. 6 is a view taken along line VI in FIG. 4.
  • FIG. 5 is a sectional view taken along line VII-VII in FIG. 4.
  • FIG. It is a schematic circuit diagram of the X-ray irradiation apparatus shown in FIG. It is a circuit diagram of the X-ray irradiation unit shown in FIG. It is a flowchart which shows the operation
  • FIG. 1 is a perspective view showing an embodiment of an X-ray irradiation apparatus including an X-ray irradiation unit (X-ray irradiation source) according to the present invention.
  • the X-ray irradiation apparatus 1 shown in the figure is installed in a clean room or the like in a production line that handles, for example, large glass, and is configured as a photoionizer (light irradiation type neutralization apparatus) that neutralizes large glass by irradiation with X-rays. ing.
  • the X-ray irradiation apparatus 1 includes a plurality of X-ray irradiation units (X-ray irradiation sources) 3 that irradiate X-rays, a controller 4 that controls the X-ray irradiation units 3, and a rail that holds the X-ray irradiation units 3 side by side.
  • the member 2 is provided.
  • the rail member 2 has a channel portion 2a having a substantially U-shaped cross section, and flange portions 2b and 2b protruding laterally from both ends in the width direction of the channel portion 2a.
  • the rail member 2 is made of, for example, metal, and has a sufficient strength to hold the plurality of X-ray irradiation units 3.
  • the plurality of X-ray irradiation units 3 are arranged along the longitudinal direction of the rail member 2 so as to have a desired interval, for example, an equal interval.
  • An object to be neutralized is disposed on the X-ray emission surface M1 (described later) side of the X-ray irradiation unit 3.
  • the length of the rail member 2, the number of the X-ray irradiation units 3, the arrangement interval, and the like are appropriately changed according to the size, number, and shape of the object.
  • FIG. 2 is a block diagram showing functional components of the X-ray irradiation apparatus 1.
  • the controller 4 has a control circuit 23 for controlling the X-ray irradiation unit 3.
  • the control circuit 23 can be externally connected to the X-ray irradiation unit 3 and the like through an input / output terminal 24.
  • the power supplied to each X-ray irradiation unit 3 is constant, and supply power control such as feedback control for adjusting the irradiation conditions of each X-ray irradiation unit 3 is not performed.
  • the X-ray irradiation unit 3 includes an X-ray tube 6 that generates X-rays, a high-voltage generation module 21 that boosts a voltage supplied from a power supply circuit 23a (described later), an X-ray tube 6 and a high-voltage generation module 21. And a driving circuit 15 for driving.
  • a trunk line 22 is connected to the drive circuit 15, and the trunk line 22 is externally connected to other X-ray irradiation units 3, the controller 4, and the like by input / output terminals 7 and 8 provided at both ends thereof. Is possible.
  • the input / output terminal 8 of one X-ray irradiation unit 3 is adjacent to another X-ray irradiation via a flexible relay cable 25.
  • the input / output terminal 7 of the unit 3 is detachably connected.
  • the X-ray irradiation units 3 are similarly connected to each other up to the distal X-ray irradiation unit 3, while the input / output terminal 24 of the controller 4 is connected to the proximal X-ray irradiation unit via the relay cable 25.
  • 3 is detachably connected to the input / output terminal 7.
  • the trunk wiring 22 of each X-ray irradiation unit 3 is connected in series to the control circuit 23, and the drive circuit 15 of each X-ray irradiation unit 3 is connected in parallel to the control circuit 23.
  • the value of the voltage input from the input / output terminal 7 of one X-ray irradiation unit 3 is equal to the value of the voltage output from the input / output terminal 8. Further, the voltage value output from the input / output terminal 8 of one X-ray irradiation unit 3 and the input value from the input / output terminal 7 of another X-ray irradiation unit 3 electrically connected to the one X-ray irradiation unit 3. And the value of the voltage output from the input / output terminal 8 of the X-ray irradiation unit 3 are equal.
  • the X-ray irradiation units 3 can be electrically connected to each other, and it is not necessary to connect each X-ray irradiation unit 3 to the control circuit 23 of the controller 4 including the power supply circuit 23a described later. For this reason, the number of X-ray irradiation units 3 can be increased or decreased without complicating the wiring.
  • the X-ray irradiation units 3 and the X-ray irradiation units 3 and the controller 4 are detachably connected via the relay cable 25, the number of units can be easily increased or decreased. Further, by adjusting the length of the relay cable 25 or bending the relay cable 25, it is easy to adjust the interval between units and change the arrangement.
  • FIG. 3 is a perspective view of the X-ray irradiation unit shown in FIG.
  • FIG. 4 is a plan view of the X-ray irradiation unit shown in FIG. 5 is a view taken along the arrow V in FIG. 4
  • FIG. 6 is a view taken along the arrow VI in FIG. 4
  • FIG. 7 is a cross-sectional view taken along the line VII-VII in FIG.
  • each X-ray irradiation unit 3 includes the above-described X-ray tube 6, drive circuit 15, high voltage, and the like in a substantially rectangular parallelepiped housing 5 made of stainless steel, aluminum, or the like.
  • the generator module 21, the input / output terminal 7, the input / output terminal 8, and the like are accommodated.
  • the housing 5 constitutes a shield against a physical impact on the X-ray irradiation unit 3 or electromagnetic noise.
  • the housing 5 includes a substantially rectangular wall portion 5a and a wall portion 5b facing each other, a pair of side wall portions 5c and 5d positioned on the short side of the wall portion 5a and the wall portion 5b, and a wall portion 5a. , 5b and a pair of side wall portions 5e, 5f facing each other.
  • a long opening 5g extending in the long side direction of the wall 5a is formed in the wall 5a.
  • the X-ray tube 6 is disposed at a position corresponding to the opening 5g (see FIG. 3). X-rays generated in the X-ray tube 6 are emitted to the outside of the housing 5 through the opening 5g serving as the X-ray emission part W1. That is, the outer surface of the wall portion 5a is an X-ray emission surface M1 including an X-ray emission portion W1 from which X-rays generated in the X-ray tube 6 are emitted.
  • the outer surface of the wall 5b is a back surface M2 that faces the X-ray emission surface M1.
  • the outer surfaces of the side walls 5c and 5d are a pair of side surfaces M3 and M4 that intersect the X-ray emission surface M1 and face each other.
  • the outer surfaces of the side wall portions 5e and 5f are a pair of side surfaces M5 and M6 that intersect the X-ray emission surface M1 and face each other.
  • An opening 5h is formed in the side wall 5c.
  • the input / output terminal 7 is arranged at a position corresponding to the opening 5h (see FIG. 5).
  • the input / output terminal 7 opens to the outside of the housing 5 through the opening 5h.
  • An opening 5j is formed in the side wall 5d.
  • an input / output terminal 8 is arranged at a position corresponding to the opening 5j (see FIG. 6).
  • the input / output terminal 8 opens to the outside of the housing 5 through the opening 5j. In this way, the input / output terminal 7 and the input / output terminal 8 are opened at the side surfaces M3 and M4 of the housing 5 intersecting the X-ray emission surface M1 of the housing 5, respectively.
  • the relay cable 25 connected to the input / output terminal 8 is difficult to extend in the X-ray emission direction. For this reason, it is possible to prevent the relay cable 25 from interfering with X-ray emission. Moreover, since it can connect with the relay cable 25 along the direction where the X-ray emission part W1 extends, it is easy to form an elongate irradiation area
  • the input / output terminal 7 and the input / output terminal 8 are connectors such as a mini USB, for example.
  • a life display window 5k is further formed on the side wall 5c, and a life display LED 9 which is a light emitting element is disposed inside the housing 5.
  • the life display LED 9 is an element that generates visible light when the life of the X-ray tube 6 is detected, as will be described later.
  • the life display LED 9 emits visible light to the outside of the housing 5 from the life display window 5k.
  • the housing 5 is arranged so that the back surface M2 faces the rail member 2 and the facing direction of the pair of side surfaces M3 and M4 is along the rail member 2, and is attached to the rail member 2 via the two joint members 10. It has been. Thereby, since the long side of the X-ray emission surface M1 of the housing 5 and the rail member 2 are parallel, the spread of the X-ray irradiation apparatus 1 in the width direction of the rail member 2 is suppressed, and space saving is achieved. be able to. Moreover, since the facing direction of the side surfaces M3 and M4 is along the extending direction of the rail member 2, the input / output terminals 7 and the input / output terminals 8 of the adjacent X-ray irradiation units 3 face each other.
  • the X-ray irradiation unit 3 and the relay cable 25 are alternately arranged along the extending direction of the rail member 2, the number of X-ray irradiation units 3 can be easily increased and decreased, and the width direction of the rail member 2 can be increased. Thus, the spread of the X-ray irradiation apparatus 1 can be suppressed and space saving can be achieved.
  • Each joint member 10 is made of an insulating material having elasticity such as resin.
  • Each joint member 10 has a main body portion 10b that is substantially the same length as the rail member 2 and has a rectangular cross section, and claw portions 10a and 10a formed at both ends of the main body portion 10b.
  • the main body 10b is fixed to the rear surface M2 with screws or the like, and the claws 10a, 10a are engaged with the ends of the flanges 2b, 2b of the rail member 2 by utilizing the elasticity, so that the X-ray irradiation unit 3 is detachably attached to the rail member 2 and slidably attached to the rail member 2.
  • the rail member 2 made of metal may be transmitted with electrical noise due to an external factor and may be transmitted to the housing 5.
  • the rail member 2 and the housing 5 are connected to each other by the joint member 10 made of an insulating material.
  • the electrical connection between the rail member 2 and the housing 5 is prevented from being transmitted. Therefore, the operation of the X-ray irradiation unit 3 can be stabilized.
  • the joint member 10 is further attached between the X-ray irradiation units 3 and 3, and the intermediate portion of the relay cable 25 connecting the X-ray irradiation units 3 and 3 is connected to the rail member 2 by the joint member 10. It may be bound.
  • the relay cable 25 is held in the vicinity of the rail member 2, and the relay cable 25 can be more reliably prevented from interfering with the X-ray irradiation to the static elimination object. it can.
  • the substrate 11 on which the X-ray tube 6 and the drive circuit 15 are mounted and the substrate 12 on which the high voltage generation module 21 is mounted are parallel to the wall portion 5 a and the wall portion 5 b. Is arranged.
  • the substrates 11 and 12 are arranged in order from the wall 5a side to the wall 5b side.
  • the substrates 11 and 12 are fixed to each other via a spacer 13, and the substrate 12 is fixed to the wall portion 5 b via a spacer 14.
  • the X-ray tube 6 includes a filament 17 that generates an electron beam and a grid 18 that accelerates the electron beam in a vacuum vessel 16.
  • the vacuum vessel 16 includes a wall portion 16a located on the wall portion 5a side, a wall portion 16b located on the substrate 11 side and facing the wall portion 16a, and a side wall portion 16c along the outer edge of the wall portion 16a and the wall portion 16b. have.
  • the filament 17 is disposed on the wall portion 16b side, and the grid 18 is disposed between the wall portion 16a and the filament 17.
  • An opening 16d is formed in the wall portion 16a.
  • a window material 19 made of a material having good X-ray transparency and conductivity, such as beryllium, silicon, or titanium, is closely fixed so as to seal the opening 16d. It is the exit window W2.
  • a target 20 is formed on at least a portion of the inner surface of the window material 19 corresponding to the opening 16d.
  • the target 20 is made of tungsten or the like, for example, and generates X-rays in response to the incident electron beam.
  • the X-ray tube 6 is arranged on the substrate 11 so that the X-ray emission window W2 is located within the range of the opening 5g (X-ray emission part W1) of the housing 5, and the drive circuit 15 is arranged around the X-ray tube 6. Has been.
  • the electron beam from the filament 17 drawn out by the grid 18 is accelerated toward the target 20 and enters the target 20.
  • X-rays are generated.
  • the generated X-rays pass through the X-ray exit window W2 and exit to the outside of the vacuum vessel 16, and further exit to the outside of the housing 5 through the opening 5g (X-ray exit portion W1). In this way, X-rays are emitted from the X-ray irradiation unit 3.
  • FIG. 8 is a schematic circuit diagram of the X-ray irradiation apparatus shown in FIG.
  • the control circuit 23 includes a power supply circuit 23a, a control signal transmission circuit 23b, a life notification signal reception circuit 23c, and a notification circuit 23d.
  • the power supply circuit 23 a supplies power toward the drive circuit 15.
  • the control signal transmission circuit 23b transmits a control signal instructing to drive and stop the X-ray tube 6.
  • the life notification signal receiving circuit 23 c receives a life notification signal regarding the life of the X-ray tube 6.
  • the notification circuit 23d visually displays the fact that the life notification signal reception circuit 23c has received the life notification signal using a light emitting element such as an LED or a screen display, or audibly displays a warning sound or the like. To do.
  • the power supply circuit 23a, the control signal transmission circuit 23b, and the life notification signal reception circuit 23c are connected to the input / output terminal 24, respectively.
  • the trunk wiring 22 of the X-ray irradiation unit 3 has a pair of power transmission lines 22a, 22a, a control signal line 22b, and a life notification signal line 22c.
  • the power transmission lines 22a and 22a transmit power to the drive circuit 15. For example, one functions as a high-voltage line that supplies 24V, and the other functions as a ground line that supplies 0V.
  • the control signal line 22b transmits the control signal transmitted from the control signal transmission circuit 23b to the drive circuit 15.
  • the life notification signal line 22c transmits a life notification signal related to the life of the X-ray tube 6 to the life notification signal receiving circuit 23c. Both ends of the power transmission line 22a, the control signal line 22b, and the life notification signal line 22c are connected to the input / output terminal 7 and the input / output terminal 8, respectively.
  • the relay cable 25 has a pair of power transmission relay lines 25a and 25a, a control signal relay line 25b, and a life notification signal relay line 25c.
  • the power transmission relay line 25a connects the power transmission lines 22a or the power transmission line 22a and the power supply circuit 23a.
  • the control signal relay line 25b connects the control signal lines 22b or the control signal line 22b and the control signal transmission circuit 23b.
  • the life notification signal relay line 25c connects the life notification signal lines 22c to each other or the life notification signal line 22c and the life notification signal receiving circuit 23c.
  • FIG. 9 is a circuit diagram of the X-ray irradiation unit shown in FIG.
  • the drive circuit 15 of the X-ray irradiation unit 3 includes a drive control circuit 15a, a life detection circuit 15b, and a display circuit 15c.
  • the drive control circuit 15a is connected to the power transmission line 22a and the control signal line 22b. Power for driving the X-ray tube 6 is supplied from the power transmission line 22a to the drive control circuit 15a.
  • the drive control circuit 15a receives a control signal from the control signal line 22b and controls driving and stopping of the X-ray tube 6.
  • the life detection circuit 15b includes an operational amplifier circuit 31 and a comparison circuit 32.
  • the operational amplifier circuit 31 includes an input unit 31a and an output unit 31b, amplifies the voltage input to the input unit 31a, and outputs the amplified voltage from the output unit 31b.
  • a target current (drive current) indicating the amount of electrons incident on the target 20 is used for life determination.
  • the target current can be used for determining the lifetime.
  • the target current from the X-ray tube 6 flows through a path connecting the X-ray tube 6 and the life detection circuit 15b, and a resistor 33 is disposed in the path, and is proportional to the target current at both ends of the resistor 33. A voltage is generated. A voltage generated at both ends of the resistor 33 is input to the input unit 31a. Thereby, a voltage proportional to the target current of the X-ray tube 6 is output from the output unit 31b.
  • the comparison circuit 32 has a pair of input units 32a and 32b and a pair of output units 32c and 32d, compares the voltage input to the input unit 32a with the voltage input to the input unit 32b, and according to the comparison result.
  • the output voltage is output from the output units 32c and 32d. Specifically, when the voltage input to the input unit 32a is equal to or lower than the voltage input to the input unit 32b, the voltage of the output unit 32d is set to 0V, and a voltage higher than 0V is output from the output unit 32c. . When the voltage input to the input unit 32a is higher than the voltage input to the input unit 32b, the voltage of the output unit 32c is set to 0V, and a voltage higher than 0V is output from the output unit 32d.
  • the voltage of the output unit 31b of the operational amplifier circuit 31 is input to the input unit 32a of the comparison circuit 32.
  • a preset voltage is input to the input unit 32b.
  • a voltage proportional to the target current of the X-ray tube 6 is compared with a preset voltage. That is, the value of the target current of the X-ray tube 6 is compared with a preset threshold value, and the lifetime of the X-ray tube 6 is detected based on the magnitude relationship between the value of the target current of the X-ray tube 6 and the threshold value. .
  • the lifetime of the X-ray tube 6 can be clearly detected.
  • the lifetime of the X-ray tube 6 is detected when the value of the target current of the X-ray tube 6 is equal to or less than the threshold value.
  • the threshold value is, for example, 70 to 90% of the rated value of the target current.
  • the voltage of the output unit 32d becomes 0V, and a voltage higher than 0V is output from the output unit 32c.
  • the voltage of the output unit 32c becomes 0V, and a voltage higher than 0V is output from the output unit 32d.
  • the display circuit 15 c includes a life display LED 9 that is a light emitting element, and a capacitor 28 connected in parallel to the life display LED 9. Both the cathode side of the life display LED 9 and the negative side of the capacitor 28 are grounded.
  • the capacitor 28 is an electric double layer capacitor.
  • the life display LED 9 and the capacitor 28 are connected to the output part 32c of the comparison circuit 32 via a diode 29 which is a rectifying element.
  • the diode 29 passes a current in one direction from the output unit 32c to the display circuit 15c.
  • the output unit 32c is a life notification output unit that supplies power to the display circuit 15c when the life of the X-ray tube 6 is detected.
  • the life display LED 9 generates visible light by the electric power supplied from the output unit 32c.
  • the capacitor 28 stores a part of the power supplied from the output unit 32c.
  • the output part 32c connected to the life display LED 9 and the capacitor 28 is further connected to the life notification signal line 22c of the trunk line 22 via the diode 30 which is a rectifying element.
  • the diode 30 passes a current in one direction from the output unit 32c to the life notification signal line 22c.
  • the voltage output from the output unit 32 c by the comparison circuit 32 is output to the life notification signal line 22 c as a life notification signal regarding the life of the X-ray tube 6.
  • FIG. 10 is a flowchart showing an operation procedure of the X-ray irradiation apparatus shown in FIG.
  • the control signal transmission circuit 23b of the controller 4 transmits a control signal instructing driving of the X-ray tube 6 (step S1), and the drive control circuits 15a of all the X-ray irradiation units 3 are processed.
  • the drive control circuit 15a drives the X-ray tube 6 via the high voltage generation module 21 in response to receiving the control signal.
  • all the X-ray irradiation units 3 start X-ray emission (step S3).
  • An object to be neutralized is disposed on the X-ray emission surface M1 side of the X-ray irradiation unit 3.
  • the X-ray irradiation unit 3 irradiates a gas such as air interposed between the X-ray irradiation unit 3 and the object with X-rays to generate an ion gas.
  • the object is neutralized by this ion gas.
  • the life detection circuit 15b compares the target current value of the X-ray tube 6 with a threshold value (step S4). When the target current of the X-ray tube 6 is higher than the threshold value, X-ray irradiation is continued. When the target current of the X-ray tube 6 is equal to or less than the threshold value, a voltage higher than 0 V is output from the output unit 32 c of the comparison circuit 32. Thereby, power is supplied to the display circuit 15c and a life notification signal is output (step S5).
  • the life display LED 9 When power is supplied to the display circuit 15c, the life display LED 9 emits light (step S6), and the capacitor 28 is charged (step S7).
  • the diode 30 prevents the power generated in the other X-ray irradiation units 3 from flowing into the display circuit 15c via the output unit 32c. Therefore, light emission of the life display LED 9 is prevented. Thereby, it is possible to notify an administrator or the like which X-ray irradiation unit 3 has transmitted the life notification signal.
  • the life notification signal receiving circuit 23c of the control circuit 23 receives the life notification signal via the life notification signal line 22c and the life notification signal relay line 25c (step S8).
  • the life notification signal is received by the life notification signal receiving circuit 23c, it is displayed by the notification circuit 23d that the life notification signal has been received (step S9). Thereby, it is possible to notify the manager or the like of the reception of the life notification signal through the controller 4.
  • step S10 When the power of the X-ray irradiation apparatus 1 is turned off to replace the X-ray tube 6 (step S10), the power stored in the capacitor 28 is discharged toward the life display LED 9 (step S11). The life display LED 9 continues to emit light (step S12). Thereby, even after the power of the X-ray irradiation apparatus 1 is turned off, it is possible to notify an administrator or the like which X-ray irradiation unit 3 has transmitted the life notification signal. At this time, since the power stored in the capacitor 28 is prevented from being discharged through the life detection circuit 15b by the diode 29, the power stored in the capacitor 28 is reliably supplied to the life display LED 9 to emit light. Can be made.
  • the capacitor 28 is an electric double layer capacitor and has high power storage efficiency, a large amount of power is accumulated in the capacitor 28 in a short time, and the light emission of the life display LED 9 can be continued for a longer time.
  • the life display LED 9 does not emit light because no electric power is accumulated in the capacitor 28.
  • the X-ray irradiation apparatus 1 when the life of the X-ray tube 6 is detected by the life detection circuit 15b, power is supplied to the display circuit 15c by the output unit 32c of the comparison circuit 32.
  • the life display LED 9 emits light
  • the life of the X-ray tube 6 is notified to the outside.
  • the capacitor 28 is charged by receiving part of the power supplied from the output unit 32c. Accordingly, when the power of the X-ray irradiation apparatus 1 is turned off, the life display LED 9 continues to emit light by the electric power stored in the capacitor 28, so that the notification of the life of the X-ray tube 6 can be continued.
  • FIG. 11 is a circuit diagram showing a modification of the X-ray irradiation unit 3.
  • tube voltage drive voltage
  • the tube voltage is a voltage applied between the filament 17 and the target 20 by the high voltage generation module 21.
  • a step-down circuit 35 is connected to the high voltage generation module 21, and the tube voltage is applied to the step-down circuit 35.
  • the step-down circuit 35 has two resistors 35a and 35b connected in series. The end of the step-down circuit 35 on the side of the resistor 35a is connected to the high voltage generation module 21, and the end of the step-down circuit 35 on the side of the resistor 35b is grounded.
  • the tube voltage is divided according to the ratio between the resistance value of the resistor 35a and the resistance value of the resistor 35b. As a result, the step-down circuit 35 steps down the tube voltage at a constant ratio and outputs the voltage from between the resistor 35a and the resistor 35b.
  • the ratio of decreasing the tube voltage is the ratio of the resistance value of the resistor 35b to the total value of the resistance value of the resistor 35a and the resistance value of the resistor 35b.
  • the resistance value of the resistor 35a is preferably higher than the resistance value of the resistor 35b.
  • the voltage output from the step-down circuit 35 is input to the input unit 31a of the operational amplifier circuit 31 instead of a voltage proportional to the target current.
  • the voltage of the output unit 31 b of the operational amplifier circuit 31 is input to the input unit 32 a of the comparison circuit 32.
  • a preset voltage is input to the input unit 32 b of the comparison circuit 32.
  • a voltage proportional to the tube voltage of the X-ray tube 6 is compared with a preset voltage. That is, the tube voltage value of the X-ray tube 6 is compared with a preset threshold value, and the life of the X-ray tube 6 is detected based on the magnitude relationship between the tube voltage value of the X-ray tube 6 and the threshold value. .
  • the life of the X-ray tube 6 is detected when the value of the tube voltage of the X-ray tube 6 is equal to or less than the threshold value.
  • the threshold value is, for example, 85 to 95% of the rated value of the tube voltage of the X-ray tube 6. Also according to this modification, the lifetime of the X-ray tube 6 can be clearly detected based on a uniform standard.
  • FIG. 12 is a circuit diagram showing another modification of the X-ray irradiation unit 3.
  • a non-life display LED 34 which is a light emitting element is added to the display circuit 15c.
  • the non-life display LED 34 is connected to the output unit 32 d of the comparison circuit 32.
  • the output unit 32d is a non-life notification output unit that supplies power to the display circuit 15c when the life of the X-ray tube 6 is not detected.
  • FIG. 13 is a flowchart showing an operation procedure of the X-ray irradiation apparatus configured to include the X-ray irradiation unit shown in FIG.
  • the life detection circuit 15b compares the target current value of the X-ray tube 6 with a threshold value (step S24). When the target current of the X-ray tube 6 is higher than the threshold value, power is supplied from the output unit 32d to the non-life display LED 34 (step S25), and the non-life display LED 34 emits light (step S26).
  • step S27 When the target current of the X-ray tube 6 is equal to or less than the threshold value, a voltage higher than 0V is output from the output unit 32c. Thereby, power is supplied to the display circuit 15c and a life notification signal is output (step S27). At this time, the voltage of the output unit 32d becomes 0V, and the light emission of the non-life display LED 34 is stopped. Subsequent steps S28 to S34 are the same as steps S6 to S12 described above.
  • the driving of the X-ray tube 6 can be notified to an administrator or the like.
  • FIG. 14 is a circuit diagram showing another modification of the X-ray irradiation unit 3.
  • two comparison circuits 32 are connected in parallel to each other, one of the comparison circuits 32 compares the value of the target current of the X-ray tube 6 with the first threshold value, and the other comparison circuit 32.
  • the target current value of the X-ray tube 6 is compared with a second threshold value higher than the first threshold value.
  • the comparison circuit 32 when the target current value of the X-ray tube 6 is equal to or lower than the first threshold value, the voltage of the output unit 32d becomes 0V and a voltage higher than 0V is output from the output unit 32c.
  • the voltage of the output unit 32c becomes 0V, and a voltage higher than 0V is output from the output unit 32d.
  • the voltage of the output unit 32d becomes 0V and a voltage higher than 0V is output from the output unit 32c.
  • the voltage of the output unit 32c becomes 0V and a voltage higher than 0V is output from the output unit 32d.
  • the life is determined not to be determined based on the magnitude relationship with respect to the threshold value of one point, but to the threshold value of two points, that is, a predetermined range (for example, 70 to 130%) set for the rated value. Determination can be made.
  • the target current value is reduced.
  • the lifetime can be determined based on the fact that the value is below the first threshold.
  • the lifetime can be determined based on the fact that the value of the target current exceeds the second threshold value. . In this way, by determining the lifetime even when the target current increases abnormally, it is possible to prevent the problem that the power consumption of the X-ray tube 6 exceeds the capacity of the power supply circuit 23a and the rated operation cannot be performed.
  • the life detection circuit 15b has only a life that does not satisfy a predetermined driving condition due to wear of constituent members of the X-ray tube 6 due to long-term use. Rather than detecting it, the predetermined driving conditions are not affected by the failure due to unexpected damage during use, such as vacuum leakage of the X-ray tube 6 (vacuum vessel 16) or disconnection of the filament 17, regardless of the length of use period. It is also detected as a lifetime that it is not satisfied.
  • the life detection circuit 15b is used when the X-ray tube 6 has a defect from the beginning, or when the drive control circuit 15a or the high voltage generation module 21 of the X-ray irradiation unit 3 has a problem such as failure or deterioration.
  • the life detection circuit 15b can detect defects in the X-ray tube 6, the drive control circuit 15a, and the high-voltage generation module 21 in addition to detecting the life of the X-ray tube 6. Can be determined.
  • FIG. 15 shows an example in which the life display window 5k is formed on the side wall 5e.
  • FIG. 16 shows an example in which the life display window 5k is formed on the wall 5a.
  • feedback control of the supplied power is not performed.
  • the target current is monitored, and the grid voltage (applied voltage to the grid 18 (drive voltage) is maintained so as to keep the target current constant.
  • Drive voltage feedback control may be performed.
  • the life determination is performed based on the grid voltage, and a life notification signal is output when the grid voltage becomes equal to or higher than the threshold value.
  • the life notification signal may be output when any life is detected using both the drive current and the drive voltage for determination.
  • the output terminal 8 or the input / output terminal 24 and the input terminal 7 may be directly connected to each other without using the relay cable 25, and between the adjacent X-ray irradiation units 3 and the controller 3.
  • power, control signals, life notification signals, etc. may be transmitted by wireless means.
  • the power transmission line 22a may be left in the trunk line 22, the control signal line 22b and the life notification signal line 22c may be excluded, and the control signal and the life notification signal may be transmitted by wireless means.

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  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • X-Ray Techniques (AREA)
PCT/JP2013/052910 2012-03-02 2013-02-07 Source de rayons x et dispositif d'exposition aux rayons x Ceased WO2013129069A1 (fr)

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JP7091654B2 (ja) * 2017-12-26 2022-06-28 横河電機株式会社 Ｘ線式坪量測定装置
TWI842050B (zh) * 2022-08-11 2024-05-11 能資國際股份有限公司 外層地導電迴路架構的奈米碳管式軟ｘ射線靜電消除裝置

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JPH076859A (ja) * 1993-06-18 1995-01-10 Hamamatsu Photonics Kk 静電気除電装置および静電気除電方法
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JP2003051397A (ja) * 2001-08-06 2003-02-21 Toshiba Corp Ｘ線画像診断装置
WO2003092336A1 (fr) * 2002-04-24 2003-11-06 Hamamatsu Photonics K.K. Dispositif, systeme et procede d'acquisition d'etat de fonctionnement d'un tube a rayons x
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JPH0589995A (ja) * 1991-09-27 1993-04-09 Hitachi Medical Corp Ｘ線装置
JPH076859A (ja) * 1993-06-18 1995-01-10 Hamamatsu Photonics Kk 静電気除電装置および静電気除電方法
JP2002100498A (ja) * 2000-09-21 2002-04-05 Shimadzu Corp Ｘ線診断装置
JP2002127962A (ja) * 2000-10-25 2002-05-09 Miyata Ind Co Ltd 自転車用ダイナモライトシステム
JP2003051397A (ja) * 2001-08-06 2003-02-21 Toshiba Corp Ｘ線画像診断装置
WO2003092336A1 (fr) * 2002-04-24 2003-11-06 Hamamatsu Photonics K.K. Dispositif, systeme et procede d'acquisition d'etat de fonctionnement d'un tube a rayons x
JP2004276654A (ja) * 2003-03-13 2004-10-07 World Auto Kikaku:Kk 車両用照明装置
JP2006236934A (ja) * 2005-02-28 2006-09-07 Momo Alliance Co Ltd 照明装置
JP2007242287A (ja) * 2006-03-06 2007-09-20 Nagoya Electric Works Co Ltd Ｘ線出力器診断装置およびｘ線出力器診断方法

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TW201352070A (zh) 2013-12-16
TWI595806B (zh) 2017-08-11

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