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WO2013103198A1 - Appareil de récupération de particules ayant une partie filtre de liquide - Google Patents

Appareil de récupération de particules ayant une partie filtre de liquide Download PDF

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Publication number
WO2013103198A1
WO2013103198A1 PCT/KR2012/010455 KR2012010455W WO2013103198A1 WO 2013103198 A1 WO2013103198 A1 WO 2013103198A1 KR 2012010455 W KR2012010455 W KR 2012010455W WO 2013103198 A1 WO2013103198 A1 WO 2013103198A1
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WO
WIPO (PCT)
Prior art keywords
liquid
unit
particles
filter unit
particle recovery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2012/010455
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English (en)
Korean (ko)
Inventor
이상로
김윤환
김기훈
이원준
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SEP Inc
Original Assignee
SEP Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SEP Inc filed Critical SEP Inc
Publication of WO2013103198A1 publication Critical patent/WO2013103198A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
    • B01D47/021—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath by bubbling the gas through a liquid bath
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42—Auxiliary equipment or operation thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2247/00—Details relating to the separation of dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D2247/08—Means for controlling the separation process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2247/00—Details relating to the separation of dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D2247/10—Means for removing the washing fluid dispersed in the gas or vapours
    • B01D2247/107—Means for removing the washing fluid dispersed in the gas or vapours using an unstructured demister, e.g. a wire mesh demister

Definitions

  • the present invention relates to a particle recovery device having a liquid filter unit, and more particularly, to a particle recovery device that is easy to replace the filter unit, minimizes the maintenance cost, and significantly improved particle recovery rate.
  • the particle recovery device is a device for recovering the particles used during the process, and is installed in a state connected with a process chamber in which a coating process using metal or ceramic powder is typically performed.
  • the process is performed after the process chamber is processed. It is used to recover (for recycling or disposal) particles in powder form that are discharged out of the chamber.
  • Such a particle recovery device requires a configuration of a filter unit for filtering the particles to be recovered.
  • a replaceable type network filter was used as the configuration of the filter unit.
  • Particle recovery apparatus having a liquid filter unit according to an embodiment of the present invention, it is a problem to be able to replace the conventional network filter used for particle recovery.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention is to make it easy to replace the filter unit for collecting the particles.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention by using a liquid such as water (H 2 O) to recover the particles can significantly lower the maintenance cost of the particle recovery device. To make it work.
  • a liquid such as water (H 2 O)
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention, as a problem to be able to significantly improve the recovery rate of particles compared to conventional filters.
  • a particle recovery device having a liquid filter unit according to an embodiment of the present invention is to solve the problem that it is possible to remarkably improve the recovery rate of the particles by continuously forming a plurality of liquid filter unit.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention, it is a problem to be able to select the type of liquid used for the recovery of particles according to the type of particles to be recovered.
  • the liquid filter unit for receiving a liquid for filtering the particles (filtering);
  • An inlet pipe for introducing particles into the liquid in a state in which a portion of the liquid is accommodated in the liquid filter unit;
  • a recovery unit for recovering the liquid contained in the liquid filter unit;
  • a pump connection part for connecting the vacuum pump to the liquid filter part.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention, while the inside of the liquid filter unit is maintained in a vacuum through the pump connection portion, the particles are introduced into the liquid from the inlet pipe. It is done.
  • the particle recovery device having a liquid filter unit is characterized in that the pump connection portion comprises a liquid check valve or a liquid trap to prevent the liquid from being transferred to the vacuum pump.
  • the particle recovery device having a liquid filter unit is connected to the recovery unit, characterized in that it further comprises a particle extraction unit for extracting the particles from the liquid delivered through the recovery unit do.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention, the liquid filter unit, the liquid supply unit for supplying the liquid; And it characterized in that it comprises a liquid heating unit for heating the liquid.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention, the liquid filter unit, the liquid storage unit for storing a plurality of liquids; A liquid selection unit for selecting a liquid suitable for particles to be filtered out of the plurality of liquids; A liquid amount measuring unit measuring an amount of the liquid supplied therein; And a control unit for controlling the liquid supply unit, the liquid storage unit, the liquid selection unit, and the liquid amount measuring unit.
  • the particle recovery device having a liquid filter unit is characterized in that the inlet pipe includes a liquid trap or a liquid check valve for preventing the liquid from being transferred to the reverse.
  • the particle recovery device having a liquid filter unit is characterized in that the particles are powder particles having a size of 0.01 to 100 micrometers ( ⁇ m).
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention
  • the inlet pipe is characterized in that the particles are delivered from the process chamber.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention is characterized in that a plurality of the liquid filter unit is formed.
  • the liquid filter unit includes a first liquid filter unit, a second liquid filter unit and a filter connecting portion for connecting the first and second liquid filter unit
  • the inlet pipe is partially immersed in the liquid of the first liquid filter part
  • the filter connecting pipe is immersed in the liquid of the second liquid filter part without being immersed in the liquid of the first liquid filter part. It is done.
  • Particle recovery device having a liquid filter unit according to an embodiment of the present invention, it is possible to replace the conventional network filter used for particle recovery, in particular installed between the process chamber and the vacuum pump for particle recovery in the process chamber It can replace the expensive network filter.
  • the particle recovery device having a liquid filter unit can facilitate replacement of the filter unit for collecting the particles.
  • disassembly or separation of the device is not necessary as in the replacement of the conventional network filter, and the effect of replacing the filter unit may be obtained only by replacing the liquid serving as the filter.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention, by using a liquid such as water (H 2 O) rather than an expensive network filter to maintain the particle recovery device The cost can be significantly lowered.
  • a liquid such as water (H 2 O)
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention can significantly improve the recovery rate of particles compared to the conventional filters, it can exhibit an effect close to 100% recovery rate. Therefore, the particle recovery rate can be maximized, and when the particle recovery device is installed in the vacuum equipment, the pump can be completely protected by preventing the particles from being introduced into the vacuum pump during the recovery process.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention may further improve the recovery rate of particles by constituting a plurality of liquid filter units continuously.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention, since the type of the liquid used for the recovery of particles can be selected according to the type of particles to be recovered, it performs an efficient function for a variety of particles can do.
  • the particle recovery device having a liquid filter unit may further include a configuration for heating the liquid serving as a filter to prevent the occurrence of condensation.
  • FIG. 1 is a view showing the configuration of a particle recovery device having a liquid filter according to an embodiment of the present invention.
  • FIG. 2 is a view showing the configuration of a particle recovery device having a liquid filter according to another embodiment of the present invention.
  • FIG 3 is a view showing that the particle recovery device is installed in connection with the process chamber and the vacuum pump according to an embodiment of the present invention.
  • FIG. 4 is a view showing the configuration of a particle recovery device having a plurality of liquid filters according to an embodiment of the present invention.
  • FIGS. 1 to 2 a particle recovery apparatus including a liquid filter unit according to embodiments of the present invention will be described with reference to FIGS. 1 to 2.
  • a particle recovery apparatus including a liquid filter may include a liquid filter unit 100 accommodating a liquid for filtering particles, and the liquid filter unit accommodated in the liquid filter unit.
  • a liquid filter unit 100 accommodating a liquid for filtering particles
  • the liquid filter unit accommodated in the liquid filter unit In a state in which a part is submerged in the liquid, an inlet pipe 200 for introducing particles into the liquid, a recovery part 300 for recovering the liquid of the liquid filter part, and connected to the recovery part, and are transferred through the recovery part.
  • It may include a particle extraction unit 400 for extracting the particles from the liquid, the pump connection unit 510 for connecting a vacuum pump to the liquid filter unit.
  • the liquid filter unit 100 is configured to filter particles introduced from the inlet pipe 200 and is configured to accommodate a liquid 110 serving as a filter. .
  • the liquid filter unit 100 is used to filter the particles introduced by using the liquid 110, preferably serves as a filter (filter) through the action of precipitating the incoming particles in the liquid (110). Can be done.
  • the liquid 110 may be variously configured according to the type of particles to be introduced, in particular, in consideration of the solubility or specific gravity of the particles to be introduced, may be composed of a liquid 110 that can precipitate the particles. have.
  • the incoming particles are particles such as aluminum oxide (Al 2 O 3 ) or silica (silica) used in the coating process
  • the liquid (110) as water (H 2 O) having a specific gravity less than these particles. ) So that the particles can be precipitated.
  • the liquid filter unit 100 may be configured to include a liquid supply unit 120 for supplying the liquid 110, wherein the liquid The supply unit 120 is a component for supplying the liquid 110 for filtering the particles into the liquid filter unit 100. Therefore, through the liquid supply unit 120, the liquid filter unit can receive a new liquid for each new process, the effect of filter replacement is achieved by this liquid replacement operation.
  • the liquid filter unit 100 may further include a liquid heating unit 111 such as a heater for heating the liquid 110.
  • the liquid heating unit 111 may include the liquid 110. Heating serves to prevent condensation that may occur in the liquid filter unit 100. Specifically, when low temperature air or gas is introduced through the inlet pipe 200, the liquid 110 is cooled, and condensation may occur on the outer wall of the liquid filter unit 100. The heating unit 111 heats the liquid 110 to prevent such condensation.
  • the inflow pipe 200 refers to a configuration for introducing particles to be recovered into the liquid filter unit 100.
  • the inlet pipe 200 is preferably configured to be connected to the process chamber 600 (also connected to other devices), the process chamber 600 through the connection with the process chamber 600 Particles generated according to the process of) can be delivered to the liquid filter unit 100.
  • particles generated in the process of coating, deposition, etc. may be delivered to the liquid filter unit 100, preferably, the powder particles of 0.01 to 100 micrometers ( ⁇ m) size is the liquid filter unit 100 Can be delivered to.
  • the inlet pipe 200 may be preferably configured to be partially locked to the liquid 110 included in the liquid filter unit 100, and through this configuration, the liquid 110 serving as a filter. To deliver the particles directly.
  • the inlet pipe 200 may include a configuration of the liquid trap 210 or the liquid check valve 220 inside the inlet pipe 200, and through the above configuration, the liquid of the liquid filter unit 100 may be configured.
  • the liquid trap 210 blocks the movement of the liquid and passes only air and gas, and the liquid check valve 220 is To prevent backflow of the liquid).
  • the back of the liquid 110 through the liquid trap 210 made of a material for blocking the liquid check valve 220 and the liquid 110 to selectively block the inlet pipe 200
  • the liquid check valve 220 may be selectively opened and closed to prevent reverse transmission of the water.
  • the liquid trap 210 may be made of a moisture barrier material such as a network filter or a cold filter (cold trap) to secondarily block the reverse transfer of water.
  • the inlet pipe 200 may be configured in various forms in addition to the shape of Figure 1, the material of the inlet pipe 200 is not limited to a particular kind.
  • the configuration of the external connection portion is not limited as shown in the drawings, variously in a position and method easy for those skilled in the art Can be connected.
  • the recovery unit 300 is a configuration for recovering the liquid 110 of the liquid filter unit 100, and means a configuration for recovering the liquid 110 in which particles are precipitated by filtering.
  • the recovery unit 300 may be preferably configured in the form of a drain connected to the liquid filter unit 100 in the direction of gravity. Through such a configuration, the liquid may be used without a separate device or energy. The liquid 110 inside the filter unit 100 may be recovered.
  • the particle extraction unit 400 is connected to the recovery unit 300 receives the liquid 110 recovered through the recovery unit 300, and separates and extracts particles from the liquid 110 in which particles are precipitated. Means a configuration to recover.
  • the liquid 110 is water (H 2 O)
  • water may be removed by a drying process, and the particles precipitated through the drying process may be recovered and recycled.
  • the pump connection part 510 is configured to make a connection with the vacuum pump 500, and allows the vacuum pump 500 and the liquid filter part 100 to be connected to vacuum the inside of the liquid filter part 100. It is the configuration that plays the role of maintaining it.
  • the pump connection part 510 may be preferably configured to be not immersed in the liquid 110. In this state, the pump connection part 510 is connected to the vacuum pump 500 to maintain the inside of the liquid filter part 100 in a vacuum. To be possible.
  • the pump connection portion 510 may allow particles to be introduced from the inlet pipe 200 according to the pump operation of the vacuum pump 500.
  • the vacuum pump 500 is the liquid filter unit 100 As the air or gas inside the gas is sucked to form a vacuum state, the pressure of pressing the liquid 110 is lowered. Accordingly, suction force is induced in the inlet pipe 200 immersed in the liquid 110 so that the particles are introduced into the liquid ( It will flow into 110).
  • the pump connection part 510 may include a configuration of a liquid trap 520 or a liquid check valve (not shown) inside the pump connection part 510, through the configuration of the liquid filter part 100.
  • the liquid 110 may be prevented from being transferred to the vacuum pump 500 through the pump connection part 510.
  • the liquid check valve (not shown) capable of selectively blocking the pump connection part 510 and the liquid trap 520 made of a material blocking the liquid 110, the transfer of the liquid 110
  • the liquid check valve may be selectively blocked to open and close the transfer of water, and the liquid trap may be blocked.
  • 520 may be made of a moisture barrier material such as dry silica, sulfuric acid, calcium, and the like to secondarily block the transfer of water.
  • the pump connection portion 510 may be configured in various forms in addition to the embodiment of Figure 1, the formation position of the pump connection portion 510 itself may be variously configured.
  • the liquid filter unit 100 the liquid storage unit 140 for storing various types of liquid 110
  • the various types of Liquid selector 150 for selecting a liquid 110 suitable for particles to be filtered out of the liquid 110
  • a liquid amount measuring unit 132 for measuring the amount of liquid supplied into the liquid filter unit 100 and the liquid
  • the liquid storage unit 140 is configured to store a liquid 110 that can be used as a filter.
  • the liquid filter unit 100 stores various kinds of liquids 110 so that various types of liquids can be used. It may be made of a liquid (110).
  • the liquid selection unit 150 means a configuration for selecting a liquid 110 suitable for the target particles among the various types of filtering liquid 110 stored in the liquid storage unit 140, specifically, the liquid The liquid 110 suitable for filtering is selected from the storage 140, and the selected liquid 110 is transferred to the liquid supply part 120 to be supplied into the liquid filter part 100.
  • the selection of the filtering liquid 110 by the liquid selection unit 150 is determined in consideration of the solubility, specific gravity, and the like of the target particles and the liquid 110. 110). For example, when the incoming particles are particles such as aluminum oxide (Al 2 O 3 ) or silica (silica) used in the coating process, water (H 2 O) is selected as the liquid 110 to form particles. Can be precipitated.
  • the liquid amount measuring unit 132 is a component for measuring the amount of the liquid 110 supplied into the liquid filter unit 100, and may include a configuration of a visual display unit for visually providing the measured information. Can be.
  • control unit 130 is a configuration that can control the liquid supply unit, the liquid selection unit 150, the liquid storage unit 140, the liquid amount measuring unit 132, the configuration according to the selection It can be implemented in the form of a main controller for controlling them electronically, in this embodiment the configuration is controlled remotely integrated.
  • FIG. 3 looks at an example in which the particle recovery device according to an embodiment of the present invention operates.
  • Particle recovery apparatus having a liquid filter unit 100 may be installed between the process chamber 600 and the vacuum pump 500 as part of the vacuum equipment to perform the particle recovery operation.
  • the particle recovery device may be installed and operated between the process chamber 600 and the vacuum holding the finned vacuum pump 500 to perform a process such as deposition, coating, as shown in FIG.
  • the recovery device recovers particles generated during the deposition and coating processes of the process chamber 600.
  • the connection of the respective components, the inlet pipe 200 included in the particle recovery device according to an embodiment of the present invention is connected to the process chamber 600 and the inlet pipe 200 Is formed in a state submerged in the liquid 110 of the liquid filter unit 100.
  • a vacuum pump 500 is connected to the pump connection part 510 included in the particle recovery device, and the operation of the vacuum pump 500 directly affects the inside of the liquid filter part 100.
  • the air inside the liquid filter unit 100 is the vacuum pump 500.
  • the suction of the air by the vacuum pump 500 changes the inside of the liquid filter unit 100 to a vacuum and reduces the air pressure, accordingly inside the inlet pipe 200 contained in the liquid 110 Suction power is induced. Therefore, particles existing in the process chamber 600 are introduced into the liquid 110 through the inlet pipe 200, and the liquid 110 precipitates these particles to operate as a filter.
  • the particle recovery apparatus because the particles generated in the process chamber 600 is filtered through the liquid 110 can significantly increase the recovery rate of the particles.
  • the liquid 110 may be dried to recover particles close to 90 to 100%, thereby increasing the efficiency of particle recycling according to a significant increase in the recovery rate.
  • the number of particles flowing through the filter into the vacuum pump 500 may be significantly reduced to reduce the possibility of failure of the vacuum pump 500.
  • the liquid filter unit 100 may further include the liquid heating unit 111 for heating the liquid 110, and the condensation may be caused by the liquid heating unit 111. The phenomenon is prevented.
  • Particle recovery apparatus may include a plurality (two or more) of the liquid filter unit. Specifically, it may include a plurality of continuously connected liquid filter unit, it is possible to further improve the recovery rate of the particles by increasing the filterability of the particles through the plurality of liquid filter unit.
  • the particle recovery apparatus is connected to the first liquid filter unit 160, the second liquid filter unit 180 and the first, second liquid filter unit It may include a filter connecting portion 170 to.
  • the inlet pipe 200 for introducing the particles present in the process chamber 600 is connected to the first liquid filter unit 160, and preferably the inlet pipe to the liquid 162 of the first liquid filter unit. A part of the 200 may be configured to be locked.
  • the first liquid filter unit 160 and the second liquid filter unit 180 are connected through the filter connecting unit 170, the filter connecting unit 170 is the liquid 162 of the first liquid filter unit It is preferable that the liquid is immersed in the liquid 182 of the second liquid filter unit.
  • the second liquid filter unit 180 is connected to the vacuum pump 500 through the pump connection unit 510, in which the pump connection unit 510 is not immersed in the liquid 182 of the second liquid filter unit.
  • the configuration of the inlet pipe 200, the filter connecting portion 170, the pump connecting portion 510 is not limited to the embodiment of Figure 4, within the range easy to those skilled in the art. It can be configured in various forms.
  • the air of the second liquid filter unit 180 is sucked through the pump connection unit 510, the second liquid in accordance with this suction
  • suction force is induced to the filter connection unit 170.
  • the suction force induced in the filter connection unit 170 sucks the air of the first liquid filter unit 160 to change the inside of the first liquid filter unit 160 to a vacuum state, and thus the inflow.
  • Suction force is induced in the pipe (200).
  • particles are introduced from the process chamber 600 through the suction force induced in the inlet pipe 200, and the introduced particles are formed in the first liquid filter unit 160 or the second liquid filter unit 180. Filtering takes place through the process.
  • the number of the liquid filter unit that can be included in the particle recovery device according to an embodiment of the present invention is not limited to two as shown in the embodiment of Figure 4, it is also configured in the form of connecting three or more liquid filter unit continuously Can be.
  • the above-described salping, particle recovery device having a liquid filter unit according to an embodiment of the present invention can replace the conventional network filter used for particle recovery, in particular for the process of particle recovery in the process chamber 600 It is possible to replace the expensive network filter installed between the chamber 600 and the vacuum pump 500.
  • the particle recovery device having a liquid filter unit can facilitate replacement of the filter unit for collecting the particles. Specifically, it is not necessary to disassemble or separate the device as in the conventional network filter replacement, and the effect of replacing the filter unit may be obtained only by replacing the liquid serving as the filter.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention, by using a liquid such as water (H 2 O) rather than an expensive network filter to maintain the particle recovery device The cost can be significantly lowered.
  • a liquid such as water (H 2 O)
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention can significantly improve the recovery rate of particles compared to the conventional filters, it can exhibit an effect close to 100% recovery rate. Therefore, the particle recovery rate can be maximized, and when the particle recovery device is installed in the vacuum equipment, the pump can be protected by completely blocking the particles from flowing into the vacuum pump 500 during the recovery process.
  • the particle recovery device having a liquid filter unit according to an embodiment of the present invention may further improve the recovery rate of particles by constituting a plurality of liquid filter units continuously.
  • the particle recovery apparatus having a liquid filter unit according to one of the present invention can select the type of liquid used for the recovery of particles according to the type of particles to be recovered, thereby performing an efficient function for various particles. Can be.
  • the particle recovery device having a liquid filter unit may further include a configuration for heating the liquid serving as a filter to prevent the occurrence of condensation.
  • liquid filter unit 110 liquid
  • liquid heating part 120 liquid supply part
  • control unit 132 liquid amount measurement unit
  • liquid storage unit 150 liquid selection unit
  • first liquid filter unit 162 liquid of the first liquid filter unit
  • filter connection 171 liquid trap

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Filtration Of Liquid (AREA)
PCT/KR2012/010455 2012-01-05 2012-12-05 Appareil de récupération de particules ayant une partie filtre de liquide Ceased WO2013103198A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2012-0001591 2012-01-05
KR1020120001591A KR101412080B1 (ko) 2012-01-05 2012-01-05 액체필터부를 구비한 입자회수장치

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20200384403A1 (en) * 2019-06-06 2020-12-10 Qolibri, Inc. Liquid filter apparatus for gas/solid separation for semiconductor processes
CN114011174A (zh) * 2021-10-26 2022-02-08 共享智能装备有限公司 一种具有防爆功能的除尘系统

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108430648B (zh) * 2015-12-09 2021-12-24 巴斯夫公司 用于溶液涂覆基材的系统和方法
KR102041751B1 (ko) * 2019-03-15 2019-11-27 윤병석 환기덕트 세척장치 및 환기덕트 세척방법

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WO1997025123A1 (fr) * 1996-01-11 1997-07-17 Harris Ronald B Separateur liquides/solides pouvant etre charge par aspiration
JPH11138437A (ja) * 1997-10-31 1999-05-25 Toshiba Ceramics Co Ltd スラリーからの微細粒子の回収装置
JP2005040686A (ja) * 2003-07-25 2005-02-17 Idemitsu Kosan Co Ltd 固体粒子の回収方法、および回収装置
KR100643342B1 (ko) * 2005-05-30 2006-11-10 삼성석유화학(주) 필터링 장치와 이를 이용한 고체성분 회수시스템 및회수방법

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JP4873383B2 (ja) * 2002-03-15 2012-02-08 株式会社 ワイ・エム・エス 集塵装置
KR100548888B1 (ko) * 2004-05-25 2006-02-09 조영서 먼지 연소형 집진기
JP2008073596A (ja) * 2006-09-20 2008-04-03 Watanabe Kaitai Kogyo Kk 空気中の粉塵を除去する装置、及び空気中の粉塵を除去する方法

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Publication number Priority date Publication date Assignee Title
WO1997025123A1 (fr) * 1996-01-11 1997-07-17 Harris Ronald B Separateur liquides/solides pouvant etre charge par aspiration
JPH11138437A (ja) * 1997-10-31 1999-05-25 Toshiba Ceramics Co Ltd スラリーからの微細粒子の回収装置
JP2005040686A (ja) * 2003-07-25 2005-02-17 Idemitsu Kosan Co Ltd 固体粒子の回収方法、および回収装置
KR100643342B1 (ko) * 2005-05-30 2006-11-10 삼성석유화학(주) 필터링 장치와 이를 이용한 고체성분 회수시스템 및회수방법

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20200384403A1 (en) * 2019-06-06 2020-12-10 Qolibri, Inc. Liquid filter apparatus for gas/solid separation for semiconductor processes
US11786858B2 (en) * 2019-06-06 2023-10-17 Edwards Vacuum Llc Liquid filter apparatus for gas/solid separation for semiconductor processes
CN114011174A (zh) * 2021-10-26 2022-02-08 共享智能装备有限公司 一种具有防爆功能的除尘系统

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KR20130080661A (ko) 2013-07-15
KR101412080B1 (ko) 2014-06-26

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