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WO2013186179A3 - Vorrichtung und verfahren zur interferenzstrukturierung von proben unter verwendung von laserstrahlen; dergestalt strukturierte proben - Google Patents

Vorrichtung und verfahren zur interferenzstrukturierung von proben unter verwendung von laserstrahlen; dergestalt strukturierte proben Download PDF

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Publication number
WO2013186179A3
WO2013186179A3 PCT/EP2013/061931 EP2013061931W WO2013186179A3 WO 2013186179 A3 WO2013186179 A3 WO 2013186179A3 EP 2013061931 W EP2013061931 W EP 2013061931W WO 2013186179 A3 WO2013186179 A3 WO 2013186179A3
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WO
WIPO (PCT)
Prior art keywords
samples
laser
spatial direction
sample
way
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2013/061931
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English (en)
French (fr)
Other versions
WO2013186179A2 (de
Inventor
Andrés-Fabián LASAGNI
Teja Roch
Sebastian Eckhardt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Publication of WO2013186179A2 publication Critical patent/WO2013186179A2/de
Publication of WO2013186179A3 publication Critical patent/WO2013186179A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/355—Texturing

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

Die vorliegende Erfindung beschreibt eine Vorrichtung, sowie ein Verfahren und eine entsprechende Probenstruktur, zur Interferenzstrukturierung einer bevorzugt flächigen Probe (P) mit einem Laser (1), einer im Strahlengang des Lasers (1) positionierten Fokussieranordnung 2), mit der die Laserstrahlung (L)in einer ersten Raumrichtung (y) fokussiert in ein Probenvolumen (3), in dem die Probe (P) positionierbar ist oder positioniert ist, abbildbar ist, einer im Strahlengang des Lasers (1) angeordneten Auftrennanordnung (4), mit der die Laserstrahlung (L) in einer zweiten, zur ersten Raumrichtung (y) nicht parallelen, bevorzugt zur ersten Raumrichtung (y) orthogonalen Raumrichtung (x) mit zwei Strahlenbündeln (L1, L2) so auf das Probenvolumen (3) richtbar ist, dass die beiden Strahlenbündel (L1, L2) innerhalb des Probenvolumens (3) in einem Interferenzbereich (5) interferieren, und mindestens einer im Strahlengang des Lasers (1) positionierten Projektionsmaske (6).
PCT/EP2013/061931 2012-06-11 2013-06-10 Vorrichtung und verfahren zur interferenzstrukturierung von proben sowie dergestalt strukturierte proben Ceased WO2013186179A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012011343.9 2012-06-11
DE102012011343.9A DE102012011343B4 (de) 2012-06-11 2012-06-11 Vorrichtung zur Interferenzstrukturierung von Proben

Publications (2)

Publication Number Publication Date
WO2013186179A2 WO2013186179A2 (de) 2013-12-19
WO2013186179A3 true WO2013186179A3 (de) 2014-02-06

Family

ID=48782279

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2013/061931 Ceased WO2013186179A2 (de) 2012-06-11 2013-06-10 Vorrichtung und verfahren zur interferenzstrukturierung von proben sowie dergestalt strukturierte proben

Country Status (2)

Country Link
DE (1) DE102012011343B4 (de)
WO (1) WO2013186179A2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015215743B4 (de) * 2015-08-18 2023-03-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Kennzeichnungselement auf einer Oberfläche eines Bauteils
DE102016106065A1 (de) 2016-04-04 2017-10-05 Erich Utsch Ag Verfahren zur Herstellung eines retroreflektierenden Kfz-Kennzeichenschilds, retroreflektierendes Kfz-Kennzeichenschild sowie Vorrichtung zur Durchführung des Verfahrens
DE102017001658A1 (de) * 2017-02-21 2018-08-23 Precitec Gmbh & Co. Kg Vorrichtung zur materialbearbeitung mit einem laserstrahl entlang einer bearbeitungsrichtung und verfahren zur materialbearbeitung mit einem laserstrahl
JP6955684B2 (ja) * 2017-03-09 2021-10-27 株式会社リコー 光加工装置、及び光加工物の生産方法
DE102017205889B4 (de) * 2017-04-06 2020-07-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Anordnung und Verfahren zur Laserinterferenzstrukturierung einer Probe
DE102017206968B4 (de) 2017-04-26 2019-10-10 4Jet Microtech Gmbh & Co. Kg Verfahren und Vorrichtung zum Herstellen von Riblets
DE102017211511A1 (de) 2017-07-06 2019-01-10 Technische Universität Dresden Laserstrukturierte Elektroden- und Werkstückoberflächen für das Widerstandspunktschweißen
DE102017215025A1 (de) 2017-08-28 2019-02-28 Robert Bosch Gmbh Vorrichtung und Verfahren zur Formung von Laser-Strahlung für eine Materialbearbeitung
DE102018200036B3 (de) 2018-01-03 2019-01-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Anordnung zur direkten Laserinterferenzstrukturierung
DE102018204250B4 (de) * 2018-03-20 2023-10-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Laserstrahlschneiden von Werkstücken
DE102019206976B3 (de) * 2019-05-14 2020-11-12 Trumpf Laser Gmbh Optisches System zum Erzeugen zweier Laserfokuslinien sowie Verfahren zum gleichzeitigen Bearbeiten zweier einander gegenüberliegender, paralleler Werkstückseiten eines Werkstücks
DE102020203027A1 (de) 2020-03-10 2021-09-16 Carl Zeiss Smt Gmbh Verfahren zum herstellen eines optischen systems
CN115356896B (zh) * 2022-07-22 2025-08-26 华南师范大学 一种基于激光直写一步制备双环形结构的系统及方法
CN115570271B (zh) * 2022-09-26 2025-04-18 西安交通大学 一种基于高重频飞秒激光倾斜抛光碳化硅陶瓷的方法
EP4594044A1 (de) * 2022-11-09 2025-08-06 SurFunction GmbH Verfahren zur herstellung eines werkzeugs, werkzeug, verfahren zur bearbeitung eines werkstücks, werkstück
DE102023202888A1 (de) 2023-03-29 2024-10-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Infrarotstrahler und Verfahren zum Herstellen eines Infrarotstrahlers
DE102023004808A1 (de) 2023-11-23 2024-11-28 Mercedes-Benz Group AG Vorrichtung und Verfahren zur Oberflächenbearbeitung rotationssymmetrischer Bauteile

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5072091A (en) * 1989-04-03 1991-12-10 The Local Government Of Osaka Prefecture Method and apparatus for metal surface process by laser beam
JP2006110587A (ja) * 2004-10-14 2006-04-27 Canon Inc レーザー干渉加工方法および装置
DE102009060924A1 (de) * 2009-12-18 2011-06-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 80686 Struktur enthaltend einen Festschmierstoff (Festschmierstoffstruktur), insbesondere für eine vakuumtribologische Anwendung ausgebildete Festschmierstoffstruktur, und Herstellungsverfahren derselben
EP2596899A2 (de) * 2011-11-24 2013-05-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung Vorrichtung und Verfahren zur Interferenzstrukturierung von flächigen Proben

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US6641268B2 (en) * 2001-02-28 2003-11-04 Massachusetts Institute Of Technology Interferometric projection system
US7459241B2 (en) * 2003-09-22 2008-12-02 Seagate Technology Llc Rotary apertured interferometric lithography (RAIL)
US7952803B2 (en) * 2006-05-15 2011-05-31 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7684014B2 (en) * 2006-12-01 2010-03-23 Asml Holding B.V. Lithographic apparatus and device manufacturing method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5072091A (en) * 1989-04-03 1991-12-10 The Local Government Of Osaka Prefecture Method and apparatus for metal surface process by laser beam
JP2006110587A (ja) * 2004-10-14 2006-04-27 Canon Inc レーザー干渉加工方法および装置
DE102009060924A1 (de) * 2009-12-18 2011-06-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 80686 Struktur enthaltend einen Festschmierstoff (Festschmierstoffstruktur), insbesondere für eine vakuumtribologische Anwendung ausgebildete Festschmierstoffstruktur, und Herstellungsverfahren derselben
EP2596899A2 (de) * 2011-11-24 2013-05-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung Vorrichtung und Verfahren zur Interferenzstrukturierung von flächigen Proben

Also Published As

Publication number Publication date
DE102012011343A1 (de) 2013-12-12
WO2013186179A2 (de) 2013-12-19
DE102012011343B4 (de) 2017-05-18

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