WO2013179776A1 - Ultrasonic vibration device, method for producing ultrasonic vibration device, and ultrasonic medical apparatus - Google Patents

Description

Ultrasonic vibration device, method of manufacturing ultrasonic vibration device, and ultrasonic medical device

The present invention relates to an ultrasonic vibration device that excites ultrasonic vibration, a method for manufacturing the ultrasonic vibration device, and an ultrasonic medical apparatus.

Recently, an ultrasonic medical device equipped with an ultrasonic transducer is known. An ultrasonic medical device using an ultrasonic transducer in this way is, for example, an ultrasonic vibration (surgical) device as disclosed in JP 2009-291776 or JP 2010-167084. is there.

These conventional ultrasonic medical devices include an ultrasonic transducer (transducer) that converts electrical energy into mechanical action (ultrasonic vibration) and a handle assembly that treats the affected area using the ultrasonic vibration. Is provided. The handle assembly has a waveguide (ultrasonic transmission probe). The proximal end portion of the ultrasonic transmission probe is connected to the ultrasonic transducer. An end effector as a treatment portion is provided at the tip of the ultrasonic transmission probe. The ultrasonic vibration output from the ultrasonic transducer is transmitted to the end-effector via the ultrasonic transmission probe, and the affected part is treated by the ultrasonic vibration.

By the way, in an ultrasonic vibrator as described in JP-A-2009-291776 or JP-A-2010-167084, piezoelectric material plates and electrode plates are alternately arranged in the axial direction. The electrode plate has a negative electrode plate and a positive electrode plate that are alternately arranged in an axial (vertical) direction that forms the longitudinal direction. A plurality of electrode plates of the same polarity are sequentially connected and electrically connected by a bridging portion. By applying a drive voltage to the negative electrode plate and the positive electrode plate, a drive voltage is applied to the piezoelectric material plate to generate ultrasonic vibration, and the entire vibrator is ultrasonically vibrated in the axial direction. Yes.

However, conventional ultrasonic transducers have a structure in which a plurality of piezoelectric material plates and a plurality of electrode plates are stacked so as to overlap each other in the axial direction of the ultrasonic transducers. The nature was bad.

Therefore, the present invention has been made in view of the above circumstances, and an object of the present invention is to reduce the complexity of assembly and improve productivity, and an ultrasonic vibration device having the configuration described above. A manufacturing method and an ultrasonic medical apparatus using the ultrasonic device are provided.

An ultrasonic vibration device according to an aspect of the present invention is disposed so that a piezoelectric material block in which a plurality of piezoelectric material plates and a plurality of electrode layers are stacked and integrated, and the piezoelectric material block are sandwiched from both ends in the stacking direction. Two metal bodies, and a current-carrying portion attached to a side portion of the piezoelectric material block so that the positive electrodes and the negative electrodes of the plurality of electrode layers are electrically connected to each other.

The ultrasonic vibration device manufacturing method according to one aspect of the present invention includes a piezoelectric material block obtained by stacking and integrating a plurality of piezoelectric material plates and a plurality of electrode layers, and sandwiching the piezoelectric material block from both ends in the stacking direction. Two metal bodies arranged in such a manner, and a current-carrying portion mounted on the side of the piezoelectric material block so that the positive electrodes and the negative electrodes of the plurality of electrode layers are electrically connected to each other, A method for manufacturing an ultrasonic vibration device comprising: forming a metal film on a plurality of piezoelectric material wafers; laminating the plurality of piezoelectric material wafers and joining the opposing metal films together A step of drilling a plurality of through holes in the plurality of integrated piezoelectric material wafers, and a plurality of the piezoelectric material wafers integrated so that the through holes are in the center. Comprising the steps of cutting the piezoelectric material block number, the.

Also, an ultrasonic medical device according to an aspect of the present invention is arranged so that a plurality of piezoelectric material plates and a plurality of electrode layers are stacked and integrated, and the piezoelectric material block is sandwiched from both ends in the stacking direction. And a current-carrying portion mounted on the side of the piezoelectric material block so that the positive electrodes and the negative electrodes of the plurality of electrode layers are electrically connected to each other. An ultrasonic vibration device; and a probe tip portion that transmits ultrasonic vibration generated by the ultrasonic device and treats living tissue.

According to the present invention described above, an ultrasonic vibration device configured to improve productivity by reducing the complexity of assembly, a method of manufacturing the ultrasonic vibration device, and an ultrasonic wave using the ultrasonic device A medical device can be provided.

Sectional drawing which shows the whole structure of the ultrasonic medical device of 1 aspect of this invention The figure which shows the schematic structure of the whole vibrator unit same as the above Sectional drawing which shows the whole structure of the ultrasonic medical device of the other aspect same as the above The perspective view showing the configuration of the ultrasonic transducer The flowchart showing the manufacturing procedure of the ultrasonic transducer Same perspective view showing a piezoelectric material wafer The perspective view which shows the piezoelectric material wafer which formed the metal film into the same The perspective view which shows the several piezoelectric material wafer laminated | stacked similarly A perspective view showing a laminated wafer in which a plurality of piezoelectric material wafers are laminated. The perspective view which shows the state which drilled the several through-hole in the laminated wafer similarly The perspective view which shows the state which cut out the laminated wafer same as the above A perspective view showing the piezoelectric material block The exploded perspective view showing the laminated vibrator unit The exploded perspective view which shows the state which mounts an electrode on the piezoelectric material block of a laminated vibrator unit similarly Side view showing the laminated vibrator unit The flowchart which shows the manufacturing procedure of the ultrasonic transducer of the modification The exploded perspective view which shows the state which mounts an electrode to the piezoelectric material block of the laminated vibrator unit of a modification similarly The perspective view which shows the laminated vibrator unit of a modification same as the above The perspective view which shows the structure of the electrode substrate of a modification same as the above The perspective view which shows the back surface of the electrode substrate of a modification same as the above The exploded perspective view which shows the state which mounts an electrode substrate to the piezoelectric material block of the laminated vibrator unit of a modification similarly The perspective view which shows the laminated vibrator unit in which the electrode substrate of the modification was mounted similarly

Hereinafter, the present invention will be described with reference to the drawings. In the following description, the drawings based on each embodiment are schematic, and the relationship between the thickness and width of each part, the thickness ratio of each part, and the like are different from the actual ones. It should be noted that the drawings may include portions having different dimensional relationships and ratios between the drawings.

(Ultrasonic medical device)
1 is a cross-sectional view showing an overall configuration of an ultrasonic medical device according to one aspect of the present invention, FIG. 2 is a diagram showing an overall schematic configuration of the transducer unit, and FIG. 3 is an overall ultrasonic medical device according to another embodiment. FIG. 4 is a perspective view showing the configuration of the ultrasonic transducer, FIG. 5 is a flowchart showing the manufacturing procedure of the ultrasonic transducer, FIG. 6 is a perspective view showing a piezoelectric material wafer, and FIG. 7 is a metal film. 8 is a perspective view showing a plurality of piezoelectric material wafers to be laminated, FIG. 9 is a perspective view showing a laminated wafer in which a plurality of piezoelectric material wafers are laminated, and FIG. 11 is a perspective view showing a state in which a plurality of through-holes are drilled in a laminated wafer, FIG. 11 is a perspective view showing a state in which the laminated wafer is cut out, FIG. 12 is a perspective view showing a piezoelectric material block, and FIG. 13 is a laminated vibrator unit. FIG. 14 is an exploded perspective view showing the laminated vibrator unit. FIG. 15 is a side view showing a laminated vibrator unit, FIG. 16 is a flowchart showing a manufacturing procedure of a modified ultrasonic vibrator, and FIG. 17 is a modified example. FIG. 18 is a perspective view showing a modified multilayer vibrator unit, and FIG. 19 is a perspective view showing a configuration of an electrode substrate according to the modification. 20 is a perspective view showing the back surface of the modified electrode substrate, FIG. 21 is an exploded perspective view showing a state in which the electrode substrate is mounted on the piezoelectric material block of the multilayer vibrator unit of the modified example, and FIG. 22 is an electrode of the modified example. It is a perspective view which shows the laminated vibrator unit with which the board | substrate was mounted.

An ultrasonic medical device 1 shown in FIG. 1 includes a vibrator unit 3 having an ultrasonic vibrator 2 that mainly generates ultrasonic vibrations, and a handle unit 4 that treats the affected area using the ultrasonic vibrations. Is provided.

The handle unit 4 includes an operation unit 5, an insertion sheath unit 8 including a long mantle tube 7, and a distal treatment unit 30. The proximal end portion of the insertion sheath portion 8 is attached to the operation portion 5 so as to be rotatable about the axis. The distal treatment section 30 is provided at the distal end of the insertion sheath section 8. The operation unit 5 of the handle unit 4 includes an operation unit main body 9, a fixed handle 10, a movable handle 11, and a rotary knob 12. The operation unit body 9 is formed integrally with the fixed handle 10.

A slit 13 through which the movable handle 11 is inserted is formed on the back side of the connecting portion between the operation unit main body 9 and the fixed handle 10. The upper part of the movable handle 11 extends into the operation unit main body 9 through the slit 13. A handle stopper 14 is fixed to the lower end of the slit 13. The movable handle 11 is rotatably attached to the operation unit main body 9 via a handle support shaft 15. The movable handle 11 is opened and closed with respect to the fixed handle 10 as the movable handle 11 rotates about the handle support shaft 15.

A substantially U-shaped connecting arm 16 is provided at the upper end of the movable handle 11. The insertion sheath portion 8 includes a mantle tube 7 and an operation pipe 17 that is inserted into the mantle tube 7 so as to be movable in the axial direction. A large diameter portion 18 having a diameter larger than that of the distal end portion is formed at the proximal end portion of the outer tube 7. The rotary knob 12 is mounted around the large diameter portion 18.

A ring-shaped slider 20 is provided on the outer peripheral surface of the operation pipe 19 so as to be movable along the axial direction. A fixing ring 22 is disposed behind the slider 20 via a coil spring (elastic member) 21.

Further, the proximal end portion of the grip portion 23 is connected to the distal end portion of the operation pipe 19 via an action pin so as to be rotatable. This gripping part 23 constitutes a treatment part of the ultrasonic medical device 1 together with the distal end part 31 of the probe 6. When the operation pipe 19 moves in the axial direction, the grip portion 23 is pushed and pulled in the front-rear direction via the action pin. At this time, when the operation pipe 19 is moved to the hand side, the grip portion 23 is rotated clockwise about the fulcrum pin via the action pin. As a result, the gripping portion 23 rotates in the direction approaching the distal end portion 31 of the probe 6 (the closing direction). At this time, the living tissue can be grasped between the single-opening type grasping portion 23 and the distal end portion 31 of the probe 6.

In such a state where the living tissue is gripped, power is supplied from the ultrasonic power source to the ultrasonic vibrator 2 to vibrate the ultrasonic vibrator 2. This ultrasonic vibration is transmitted to the tip 31 of the probe 6. And the treatment of the biological tissue currently hold | gripped between the holding part 23 and the front-end | tip part 31 of the probe 6 is performed using this ultrasonic vibration.

(Vibrator unit)
Here, the vibrator unit 3 will be described.
As shown in FIG. 2, the transducer unit 3 integrally assembles an ultrasonic transducer 2 and a probe 6 that is a rod-shaped vibration transmission member that transmits ultrasonic vibration generated by the ultrasonic transducer 2. It is a thing.

The ultrasonic vibrator 2 is provided with a horn 32 that amplifies the amplitude of the ultrasonic vibrator. The horn 32 is made of duralumin or a titanium alloy such as 6Al-4V (64Ti). The horn 32 is formed in a conical shape whose outer diameter becomes narrower toward the distal end side, and an outward flange 33 is formed on the base end outer peripheral portion. Here, the shape of the horn 32 is not limited to the conical shape, but may be an exponential shape in which the outer diameter decreases exponentially toward the tip side, or a step shape that gradually decreases toward the tip side. May be.

The probe 6 has a probe body 34 formed of a titanium alloy such as 64Ti. On the proximal end side of the probe main body 34, the ultrasonic transducer 2 connected to the horn 32 is disposed. In this way, the transducer unit 3 in which the probe 6 and the ultrasonic transducer 2 are integrated is formed. The probe 6 has a probe main body 34 and a horn 32 screwed together, and the probe main body 34 and the horn 32 are joined.

The ultrasonic vibration generated by the ultrasonic vibrator 2 is amplified by the horn 32 and then transmitted to the tip 31 side of the probe 6. The distal end portion 31 of the probe 6 is formed with a later-described treatment portion for treating living tissue.

Further, two rubber linings 35 are attached to the outer peripheral surface of the probe main body 34 at intervals of a vibration node located in the middle of the axial direction at intervals formed by an elastic member in a ring shape. These rubber linings 35 prevent contact between the outer peripheral surface of the probe main body 34 and an operation pipe 19 described later. That is, when assembling the insertion sheath portion 8, the probe 6 as a transducer-integrated probe is inserted into the operation pipe 19. At this time, the rubber lining 35 prevents contact between the outer peripheral surface of the probe main body 34 and the operation pipe 19.

Further, the ultrasonic transducer 2 is electrically connected via an electric cable 36 to a power supply main body (not shown) that supplies a current for generating ultrasonic vibration. The ultrasonic vibrator 2 is driven by supplying electric power from the power supply main body to the ultrasonic vibrator 2 through the wiring in the electric cable 36. The vibrator unit 3 includes an ultrasonic vibrator 2 that generates ultrasonic vibrations, a horn 32 that amplifies the generated ultrasonic vibrations, and a probe 6 that transmits the amplified ultrasonic vibrations.

Note that the ultrasonic transducer 2 and the transducer unit 3 do not necessarily have to be accommodated in the operation unit main body 9 as shown in FIG. 1, for example, are accommodated in the operation pipe 19 as shown in FIG. May be. In the ultrasonic medical device 1 of FIG. 3, the electric cable 36 between the bending stop 52 of the ultrasonic transducer 2 and the connector 38 disposed at the base of the operation unit main body 9 is inserted into the metal pipe 37. Has been stored. Here, the connector 38 is not essential, and the electric cable 36 may be extended to the inside of the operation unit main body 9 and directly connected to the folding stop 52 of the ultrasonic transducer 2. The ultrasonic medical device 1 can improve the space saving in the operation unit main body 9 with the configuration as shown in FIG. The function of the ultrasonic medical device 1 in FIG. 3 is the same as that in FIG.

(Ultrasonic transducer)
Here, the ultrasonic transducer 2 as the ultrasonic vibration device of the present invention will be described below.
As shown in FIG. 4, the ultrasonic transducer 2 of the transducer unit 3 includes a horn 32 screwed into a probe main body 34 that is one of vibration transmission members in order from the tip, a laminated transducer unit 50, and a horn. And a cover body 51 that covers the laminated vibrator unit 50 from the base end of 32 to the electric cable 36.

Here, the laminated vibrator unit 50 includes a rectangular (quadrangular columnar) piezoelectric material block 41 in which four planes are formed around an axis in the front-rear direction, and a rectangular plate shape disposed before and after the piezoelectric material block 41. An insulating plate 43, a front mass 44 as a metal block body connected to the horn 32 and provided in front of the piezoelectric material block 41 via the insulating plate 43, and a rear side of the piezoelectric material block 41 via the insulating plate 43. And a back mass 45 as a metal block body provided on the side of the piezoelectric material block 41 and two electrode pieces 47 and 48 which are current-carrying portions electrically connected to the side portions of the piezoelectric material block 41.

A plurality of piezoelectric material blocks 41, here, five piezoelectric material plates 41a to 41e are laminated. On the front and back surfaces of these piezoelectric material plates 41a to 41e, for example, a first electrode layer 42a and a second electrode layer 42b in which a metal film such as gold is formed by vapor deposition or the like are formed. The first electrode layer 42a and the second electrode layer 42b are not limited to vapor deposition of a metal film, and may be a metal foil, a metal plate, or the like.

Further, the piezoelectric material block 41 has the piezoelectric material plates 41a to 41e arranged in the longitudinal direction so that the first electrode layer 42a and the second electrode layer 42b are electrically connected by facing each other (surface contact). They are stacked in the axial direction (front-rear direction). Thus, in the piezoelectric material block 41, a plurality of electrode layers 42 are formed by the first electrode layer 42a and the second electrode layer 42b in the front-rear direction and between the piezoelectric material plates 41a to 41e. The plurality of electrode layers 42 are configured as a positive electrode portion and a negative electrode portion alternately with respect to the front-rear direction.

Each piezoelectric material plate 41a to 41e is not shown here, but a shaft member, which will be described later, connected to the front mass 44 and the back mass 45 by screwing or the like is inserted into the center, and the front mass 44 and the back mass 45 are connected. Thus, stress is applied from the front-rear direction to tighten and laminate. The front mass 44 and the back mass 45 are formed of geralumin (aluminum alloy such as A2024) or a titanium alloy such as 6Al-4V (64Ti). The shaft member may be integrated with one of the front mass 44 and the back mass 45 by being manufactured at the same time.

The two electrode pieces 47 and 48 that are current-carrying portions electrically connect the positive electrode portions or the negative electrode portions formed by the electrode layers 42 on the side portions of the piezoelectric material block 41, in this case, on two side surfaces that are substantially parallel to each other. Connect. The two electrode pieces 47 and 48 are electrically connected to the wirings 36a and 36b of the electric cable 36 by welding and bonding with solder or a conductive adhesive 49 at the rear end.

Note that the cover body 51 covering the laminated vibrator unit 50 has a fold stop 52 covering the wirings 36a and 36b of the electric cable 36 electrically connected to the two electrode pieces 47 and 48 at the base end portion. .

(Assembly procedure of ultrasonic transducer)
Next, the assembly procedure (manufacturing method) of the ultrasonic transducer 2 described above will be described below according to the routine (step S) of the flowchart of FIG.

First, a metal film 62 is formed on the front and back surfaces of the piezoelectric material wafer 61 of FIG. 6 by vapor deposition as shown in FIG. 7 (S1). The metal film 62 may be provided by attaching a metal foil, a metal plate, or the like to the front and back surfaces of the piezoelectric material wafer 61 as described above.

Next, the number of sheets according to the specifications of the desired ultrasonic transducer 2, here, as shown in FIG. 8, five piezoelectric material wafers 61 are stacked and bonded as shown in FIG. 9 (S 2). Then, as shown in FIG. 10, a plurality of through holes 46 are formed in the laminated wafer 63 in which the five piezoelectric material wafers 61 are laminated (S3).

After the hole machining, the piezoelectric material block 41 is cut out from the laminated wafer 63 as shown in FIG. 11 (S4). In this way, a plurality of piezoelectric material blocks 41 as shown in FIG. That is, it is possible to extract the piezoelectric material block 41 integrated with the plurality of piezoelectric material plates 41a to 41e being laminated. Here, the metal film 62 formed on the piezoelectric material wafer 61 constitutes each electrode layer 42 as a metal layer of the piezoelectric material block 41.

The shape of the piezoelectric material block 41 is adapted to the specifications of the ultrasonic transducer 2. Further, regarding the arrangement of the plurality of through holes 46 in step S3, a cutout arrangement (imposition) in which each through hole 46 is located at the center of one piezoelectric material block 41 on the piezoelectric material wafer 61 is determined in advance. , It is processed according to this.

Next, as shown in FIG. 13, the cut out piezoelectric material block 41 has two insulating plates 43 disposed on both end surfaces (front and rear ends) and shafts formed of an insulator in the through hole 46. The member 53 is inserted (S5). Each insulating plate 43 is also formed with a hole 43a through which the shaft member 53 is inserted. Note that threaded portions 53 a are threaded (tapped) at both end portions of the shaft member 53.

Then, the front mass 44 and the back mass 45, which are metal blocks, are screwed so that the piezoelectric material block 41 is sandwiched between the screw portions 53a at both ends of the shaft member 53 (S6). At this time, the front mass 44 and the back mass 45 are screwed so as to apply a tightening stress in the longitudinal axis direction (the front-rear stacking direction) that is the front-rear direction of the piezoelectric material block 41.

Incidentally, since the piezoelectric material plates 41a to 41e exhibit different vibration characteristics depending on the tightening stress, the desired tightening is performed on the piezoelectric material block 41 by, for example, monitoring the amount of torque so that the desired vibration characteristics are obtained. Add stress. A tapped screw hole (44a) is formed in the center of one end surface of the front mass 44 and the back mass 45.

Next, as shown in FIGS. 14 and 15, the electrode pieces 47 and 48 as current members for energizing the piezoelectric material plates 41 a to 41 e are energized by the electrode layers 42 as the metal layers of the piezoelectric material block 41. It is mounted (attached) so as to come into contact (S7). At this time, the electrode pieces 47 and 48 are fixed to different side surfaces formed on the plane of the piezoelectric material block 41 by conductive adhesion such as solder. Each of the electrode pieces 47, 48 includes a plurality of positive electrode portions and a plurality of negative electrode portions that are electrically connected to each other without short-circuiting between the positive electrode portions and the negative electrode portions of the plurality of electrode layers 42, In the figure, each of the three joining portions 47a to 47c and 48a to 48c is a long and thin metal plate bent into a concavo-convex shape. The joints 47a to 47c of the electrode piece 47 and the 48a to 48c of the electrode piece 48 are connected to each other between the positive electrode parts or the negative electrode parts of the electrode layer 42 on each of two substantially parallel side surfaces of the piezoelectric material block 41. Are alternately connected to the electrode layers 42 so as to be conductive.

By the way, the front mass 44 has a screw portion 44 b at one end on the front side, and this screw portion 44 b is screwed into a screw hole 32 a formed in the center on the base end side of the horn 32 and fixed to the horn 32. Is done. 14 and 15 show a state in which the horn 32 and the front mass 44 are joined, but the joining of the horn 32 and the front mass 44 by screwing is performed by the piezoelectric material block in step S7 described above. It may be performed either before or after the electrode pieces 47 and 48 are attached to the terminal 41.

Then, wirings 36a and 36b of the electric cable 36 are welded and joined to the rear ends of the electrode pieces 47 and 48 by solder or conductive adhesive 49, and as shown in FIG. A cover body 51 is assembled so as to cover the child unit 50.

In step S2 in FIG. 5, the piezoelectric material wafers 61 are bonded and laminated. However, the present invention is not limited to this. For example, based on step S2 ′ in FIG. You may let them.

Furthermore, the shaft member 53 may be formed of the same metal material as the front mass 44 and the back mass 45. When the shaft member 53 is formed of a metal material, the shaft member 53 is coated with an insulating coating so as not to contact the plurality of electrode layers 42 of the piezoelectric material block 41, or the shaft member 53 and the piezoelectric material block 41 are applied to the shaft member 53. The hole diameter of the through hole 46 and the diameter of the shaft member 53 are set so as to provide a clearance with the through hole 46 to be formed. The shaft member 53 may be configured so as to be integrated with one of the front mass 44 and the back mass 45.

From the above description, in the multilayer vibrator unit 50 of the present embodiment, the plurality of piezoelectric material plates 41a to 41e and the plurality of electrode layers 42 are stacked in the axial direction, and the electrodes of the respective piezoelectric material plates 41a to 41e. The layer 42 is bonded or metal-bonded to provide an integrated piezoelectric material block 41, and the two electrode pieces 47 and 48 are fixed to different side surfaces of the piezoelectric material block 41 formed on the plane, thereby improving manufacturing and assembling. There is an advantage of making it. That is, since the planar side surface is formed around the longitudinal axis (stacking direction) of the piezoelectric material block 41, the two electrode pieces 47 and 48 can be easily attached to the plurality of electrode layers 42 of the piezoelectric material block 41. Yes.

In the above-described embodiment, the two electrode pieces 47 and 48 have been described as being fixed to different side surfaces of the piezoelectric material block 41 in a planar shape. However, as shown in FIG. The productivity can be further improved by fixing the two electrode pieces 47 and 48 to the same side surface that is planar.

Further, as shown in FIGS. 19 and 20, the productivity can be further improved by using an electrode substrate 70 having a configuration in which two electrode pieces 47 and 48 are integrated.

Specifically, the electrode substrate 70 includes, for example, a flexible printed circuit board (FPC) 71, and two parallel conductive foils 72 and 73 that are patterned on the flexible printed circuit board 71 as current-carrying portions are disposed. The conductor foils 72 and 73 are provided with a plurality of electrical contacts 72a to 72c, which are fixed and electrically connected to the plurality of electrode layers 42 by solder or conductive adhesive 49 in the through-hole portions formed in the flexible printed circuit board 71. 73 a to 73 c are provided so as to be exposed on the back side of the flexible printed circuit board 71.

20 and FIG. 21, the flexible printed circuit board 71 is attached to only one surface of the piezoelectric material block 41 whose back side where the plurality of electrical contacts 72a to 72c and 73a to 73c are exposed is planar. At this time, the conductive foils 72 and 73 are alternately arranged so that the electrical contacts 72a to 72c and 73a to 73c are electrically connected to each other between the positive electrode portions or the negative electrode portions of the electrode layer 42 on one surface of the piezoelectric material block 41. Connected to the electrode layer 42.

Each of the conductor foils 72 and 73 has a terminal portion 74 to which the wirings 36a and 36b of the electric cable 36 are welded and joined by solder or a conductive adhesive 49 at the rear end portions thereof. ing. The electrode substrate 70 is not limited to the flexible printed circuit board 71 and may be a rigid substrate.

Furthermore, in the laminated vibrator unit 50 of the present embodiment, the piezoelectric material plates 41a to 41e are made of a single crystal that does not contain lead, such as lithium niobate (LiNbO3), which is easily damaged and difficult to process and handle. Even if it is formed from a material, there is an advantage that a plurality of piezoelectric material wafers 61 can be integrated by stacking, and drilling and cutting can be performed to reduce the processing difficulty of the piezoelectric material block 41 and extract it. Of course, the piezoelectric material plates 41a to 41e may be lead zirconate titanate (PZT). As a result, the laminated vibrator unit 50 according to the present embodiment can prevent a high cost due to a decrease in yield as compared to the conventional case, and has a configuration that leads to a cost reduction due to ease of manufacture.

The invention described in the above-described embodiment is not limited to the embodiment and modification examples, and various modifications can be made without departing from the scope of the invention in the implementation stage. Further, the above embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent elements.

For example, even if some constituent requirements are deleted from all the constituent requirements shown in the embodiment, the described requirements can be deleted if the stated problem can be solved and the stated effect can be obtained. The configuration can be extracted as an invention.

This application is filed on the basis of a priority claim based on Japanese Patent Application No. 2012-125005 filed in Japan on May 31, 2012, and the above contents include the description, claims, and It is cited in the drawing.

Claims (11)

A piezoelectric material block in which a plurality of piezoelectric material plates and a plurality of electrode layers are laminated and integrated;
Two metal bodies arranged to sandwich the piezoelectric material block from both ends in the stacking direction;
A current-carrying part mounted on the side of the piezoelectric material block so that the positive electrodes and the negative electrodes of the plurality of electrode layers are electrically connected to each other;
An ultrasonic vibration device comprising: 2. The ultrasonic vibration device according to claim 1, wherein the piezoelectric material block has a flat side surface on which the energization portion is disposed. The ultrasonic vibration device according to claim 1, wherein a plurality of the current-carrying parts are fixed to the plurality of side parts. 4. The ultrasonic vibration device according to claim 1, wherein a plurality of the current-carrying parts are fixed to the same side part. 5. 5. The ultrasonic vibration device according to claim 1, wherein the plurality of electrode layers are metal films formed on front and back surfaces of the plurality of piezoelectric material plates. The ultrasonic vibration device according to claim 1, wherein the plurality of piezoelectric material plates are a piezoelectric single crystal material. The ultrasonic vibration according to claim 1, further comprising insulating plates that prevent electrical short-circuiting between the two metal bodies at both ends of the piezoelectric material block in the stacking direction. device. The ultrasonic vibration device according to claim 1, further comprising a horn that amplifies a mechanical amplitude of the laminated vibrator. It is a manufacturing method of the ultrasonic vibration device according to any one of claims 1 to 8,
Forming a metal film on a plurality of piezoelectric material wafers;
Laminating the plurality of piezoelectric material wafers and bonding and integrating the opposing metal films; and
Drilling a plurality of through holes in the plurality of piezoelectric material wafers integrated;
Cutting out the plurality of piezoelectric material blocks from the plurality of piezoelectric material wafers integrated so that the through hole is in the center;
A method for manufacturing an ultrasonic transducer device, comprising: It is a manufacturing method of the ultrasonic vibration device according to any one of claims 1 to 8,
Forming a metal film on a plurality of piezoelectric material wafers;
Laminating the plurality of piezoelectric material wafers and joining and integrating the opposing metal films; and
Drilling a plurality of through holes in the plurality of piezoelectric material wafers integrated;
Cutting out the plurality of piezoelectric material blocks from the plurality of piezoelectric material wafers integrated so that the through hole is in the center;
A method for manufacturing an ultrasonic transducer device, comprising: The ultrasonic vibration device according to any one of claims 1 to 8,
A probe tip for treating a living tissue through transmission of ultrasonic vibration generated by the ultrasonic device;
An ultrasonic medical device comprising:

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