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WO2013145471A1 - Method for manufacturing power module, and power module - Google Patents

Method for manufacturing power module, and power module Download PDF

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Publication number
WO2013145471A1
WO2013145471A1 PCT/JP2012/083041 JP2012083041W WO2013145471A1 WO 2013145471 A1 WO2013145471 A1 WO 2013145471A1 JP 2012083041 W JP2012083041 W JP 2012083041W WO 2013145471 A1 WO2013145471 A1 WO 2013145471A1
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WO
WIPO (PCT)
Prior art keywords
power module
substrate
wiring
solder
joining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2012/083041
Other languages
French (fr)
Japanese (ja)
Inventor
靖 池田
俊郎 手呂内
俊章 守田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
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Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of WO2013145471A1 publication Critical patent/WO2013145471A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Definitions

  • the present invention relates to a method for manufacturing a power module having a power semiconductor element such as IGBT (Insulated Gate Bipolar Transistor), and the power module.
  • a power semiconductor element such as IGBT (Insulated Gate Bipolar Transistor)
  • IGBT Insulated Gate Bipolar Transistor
  • Power modules such as IGBT modules are used for inverters that control high-power motors such as motors for electric railways, power generation, and electric / hybrid vehicles (EV / HEV).
  • EV / HEV electric / hybrid vehicles
  • Candidates for lead-free bonding materials to be applied to element joints that require heat resistance include Bi-based solder (approximately 260 ° C), Au-Sn solder (approximately 282 ° C), and Zn-Al-based solder (approximately 380 ° C). ° C).
  • Bi-based solder since Bi-based solder has low thermal conductivity, it is not suitable for joining semiconductor elements that generate a large current and generate a large amount of heat because of its heat dissipation. Moreover, since Au-20Sn contains Au as a main component, the material cost becomes high. Furthermore, Zn-Al solder has a strong oxide film and cannot secure wetting. As described above, each of the solders has a problem and cannot be used for general purposes.
  • a sintered Ag paste has been developed in which particles and particles are bonded in a solid state. Nano-order Ag fillers can be bonded at temperatures below the melting point of Ag, such as about 250-400 ° C.
  • Sintered Ag paste has high thermal conductivity and is advantageous for bonding power semiconductor devices that handle large currents. It has already been applied to a part of power modules for low power. A technique for joining semiconductor elements using such sintered Ag paste is disclosed in Non-Patent Document 1, for example.
  • Non-Patent Document 1 since the above-described joining needs to be performed in the atmosphere, there is a problem that the member to be joined is oxidized at the time of joining. That is, a general power module is assembled by bonding the semiconductor elements 1 and 2 to the ceramic substrate 5 as shown in FIG. 1, performing wire bonding 8, and then bonding the ceramic substrate 5 to the base 10. As shown in FIG. 2, the sintered Ag paste is coated with a protective film 12 in order to prevent aggregation of the nano-sized Ag filler 11. In order to decompose this protective film, it is essential to perform heat treatment at a temperature of 250 ° C. or higher in the atmosphere.
  • a ceramic substrate 5 in which the semiconductor elements 1 and 2 are joined with a sintered Ag paste as shown in FIG. It has a structure (with a spring 13 or the like) that is pressed through contact with conductive grease 14. For this reason, the ceramic substrate is not soldered to the base. However, in such a structure, the space between the ceramic substrate and the base is filled with grease, and metal bonding is not performed. Therefore, when applied to a power module for high-power electric railways, good heat dissipation cannot be obtained.
  • Non-Patent Document 1 it is also possible to simultaneously perform element bonding and ceramic substrate bonding by using a sintered Ag paste for both the semiconductor element bonding portion and the ceramic substrate bonding portion.
  • a sintered Ag paste for both the semiconductor element bonding portion and the ceramic substrate bonding portion.
  • Sintered Ag paste is difficult to suppress unbonded compared to solder, and it is difficult to obtain good bonding.
  • the present invention has been made in view of such a situation, and provides a lead-free joining technique that achieves both good heat dissipation and good jointability of a substrate joint.
  • the present invention uses a sintered Ag paste for semiconductor element bonding to perform high heat-resistant lead-free bonding, and uses Sn-based lead-free solder for the ceramic substrate bonding portion.
  • the power module manufacturing method includes a first bonding step of bonding a semiconductor element and a wiring provided on a substrate while oxidizing the Ag paste with a sintered Ag paste, After the first joining step, a reduction step for reducing the oxidation of the wiring on the substrate, and a second joining step for joining the reduced wiring on the substrate and the base with solder are included.
  • the power module manufactured by the above manufacturing method includes a semiconductor element, a substrate, a base, a porous Ag layer that bonds the semiconductor element and the substrate, and a solder joint that bonds the substrate and the base,
  • the porosity is 5% or more and less than 30%.
  • a semiconductor element is bonded to a ceramic substrate having a solid Cu wiring in the atmosphere using a sintered Ag paste, and after reduction treatment, the ceramic substrate is made of Sn-based solder as a base.
  • the power module By joining to the power module, it is possible to obtain a power module having high heat resistance, excellent heat dissipation, and easy joining.
  • Embodiments of the present invention relates to a power module in which a ceramic substrate having a semiconductor element and a solid Cu wiring 6 is joined with porous Ag, and the ceramic substrate is joined to a base with Pb-free solder (Sn-based solder). And a method for manufacturing the same.
  • FIG. 4 is a diagram showing a state where the semiconductor element 1 and the ceramic substrate 5 are bonded by porous Ag in the power module of the present embodiment.
  • the contraction ratios thereof are different, and stress is generated near the joint. If Ag becomes too dense (when the porosity of porous Ag is too small), Ag is harder than solder, so that the joint is too strong and stress is applied to the semiconductor element 1 too much. For this reason, the semiconductor element 1 is broken. On the other hand, if the porosity of Ag is too high, the reliability of the joint portion decreases. Specifically, when the porosity of the porous Ag joint portion is less than 5%, the elastic modulus of the Ag joint portion becomes high, stress buffering becomes difficult, and the semiconductor element may be destroyed by thermal shock. On the other hand, if the porosity of the porous Ag joint is 30% or more, cracks are likely to develop in the joint due to thermal shock, and the joint reliability may not be obtained.
  • Bonding temperature 250 ° C to 350 ° C is desirable. In order to increase the porosity to 30% or more when the temperature is less than 250 ° C., 10 MPa or more is required, but the semiconductor element 1 may be destroyed during bonding. On the other hand, when the temperature is higher than 350 ° C., the sintering rate is high and it becomes difficult to control the porosity of Ag.
  • Bonding time It is desirable that the heating rate is 30 ° C./min or less and the holding time is 1 to 30 min.
  • Pressurization Desirably 0.1 to 10 MPa.
  • the pressure is less than 0.1 MPa, the contact between the fillers in the sintered Ag paste cannot be secured, and it is difficult to increase the density of the sintering, so the porosity tends to be less than 30%.
  • the pressure is higher than 10 MPa, the semiconductor element may be destroyed.
  • the Sn-based solder 9 for joining the ceramic substrate 5 and the base 10
  • good joining with a void content of less than 2% can be obtained.
  • good and stable heat dissipation can be obtained by metal bonding between the ceramic substrate 5 and the base 10 by solder bonding.
  • AlSiC, Cu—Mo, Cu—C, Al—C composite material or the like can be used. Thereby, high reliability is obtained with respect to thermal fatigue.
  • the joining of the semiconductor element 1 and the ceramic substrate 5 is realized by Ag sintering, and the joining of the ceramic substrate 5 and the base 10 is realized by the Sn-based solder 9.
  • the reason why the two junctions are made different is that there is a relationship with the yield. That is, once the semiconductor element 1 is bonded to the ceramic substrate 5, it is inspected whether the bonded state is good one by one. If it is determined to be defective, it is excluded from the subsequent processes. Therefore, when bonding of the ceramic substrate 5 and the base 10 is performed using sintered Ag simultaneously with the bonding of the ceramic substrate 5 and the semiconductor element 1, if even one bonding failure occurs, it was used for bonding. All the members must be discarded, and the material is wasted and the manufacturing cost is increased.
  • the joining of the semiconductor element 1 and the ceramic substrate 5 is realized by Ag sintering, and after the inspection, the ceramic substrate 5 and the base 10 are solder-joined (joined in two stages) to maximize waste.
  • the limit is to prevent.
  • the semiconductor element 1 is bonded to the ceramic substrate 5 having the pure Cu wiring 6 with porous Ag, and the ceramic substrate 5 is bonded to the base 10 with Sn-based solder.
  • the periphery of each joint may be sealed with a hard resin (see 9 in FIG. 8).
  • the thermal expansion coefficient of the resin is desirably 10 ppm / K or more. This is because, when the thermal expansion coefficient of the resin is less than 10 ppm / k, the effect of suppressing crack propagation due to thermal shock at the element joint portion is reduced.
  • a particulate microstructure of 10 to 200 nm is formed on the surface of the Cu wiring portion of the ceramic substrate 5 having the solid Cu wiring 6.
  • This microstructure (unevenness) is a structure generated by reducing the Cu wiring oxidized by the sintering process. By doing in this way, adhesiveness with the gel or transfer molded hard resin can be improved, and the lifetime of a power module can be improved.
  • FIG. 6 is a diagram showing a particulate microstructure formed on the Cu wiring surface. Thereby, adhesiveness with sealing resin can be improved by the anchor effect by the unevenness
  • FIG. 6 is a diagram showing a particulate microstructure formed on the Cu wiring surface.
  • the solidus temperature of Sn-based solder is desirably 227 ° C. or higher.
  • solders that melt at a certain temperature and those that begin to melt at a certain temperature (solidus temperature) and continue to be mixed for a certain period of time and then become completely liquid at a certain temperature. is there.
  • a microstructure is generated on the surface of the Cu wiring portion of the ceramic substrate (FIG. 6).
  • Pb-free solder is a solder that does not get wet easily (solder that does not get wet immediately after melting but does not get wet unless it reaches a certain temperature: the temperature of the border that gets wet at around 227 ° C), and has a microstructure (unevenness) ), It is particularly difficult to wet when the surface is not flat. In this regard, it has been found that a solder having a high melting point has a stronger force to get wet with respect to unevenness. On the other hand, a solder having a low melting point starts to melt before reaching a high temperature.
  • the solder wetting force is weak, and it becomes easy to form a portion that cannot be completely wet on the unevenness, and voids (holes) are likely to be generated. It has been found by the inventors that the solidus temperature of the solder is 227 ° C. so that the generation of voids is 2% or less.
  • the Sn-based solder having a solidus temperature of 227 ° C. or higher can be Sn-3 to 10Cu (mass%), Sn-10Sb (mass%), or Sn.
  • FIG. 7 is a diagram showing an ultrasonic flaw detection image of a ceramic substrate bonding portion obtained when a ceramic substrate 5 having a solid Cu wiring 6 bonded with a semiconductor element with a sintered Ag paste is bonded with Sn-based solder. .
  • Sn-Pb eutectic melting point 183 ° C
  • Sn-3Ag-0.5Cu-5In solidus temperature 206 ° C
  • Sn-3Ag When bonding at ⁇ 0.5 Cu (melting point: 217 ° C.), 2% or more unbonded portion (void 21) due to non-wetting was formed in the bonded portion.
  • the power module according to the embodiment of the present invention includes (i) bonding the semiconductor element 1 in the atmosphere to the ceramic substrate 5 having the Cu solid wiring 6 with a sintered Ag paste, and (ii) Cu of the ceramic substrate 5. After reducing the oxidation of the solid wiring 6, (iii) the ceramic substrate 5 is joined to the base 10 with Sn solder 9.
  • the semiconductor element 1 is bonded to the ceramic substrate 5 having the solid Cu wiring 6 in the atmosphere, so that the protective film around the Ag filler is decomposed and a good sintered bonding is achieved. it can.
  • the Sn-based solder 9 is easily wetted to the ceramic substrate 5 and can be bonded with high reliability. Further, by reducing the Cu wiring 6 oxidized in the atmosphere, nano-order particles can be formed on the surface of the Cu wiring. This improves the adhesion with sealing with gel or hard resin.
  • the bonding temperature is preferably 250 to 350 ° C. At a temperature lower than 250 ° C., the sintering of the Ag filler is difficult to proceed, so the porosity of the Ag joint portion may be 30% or more. In addition, when joining at a temperature of 350 ° C.
  • the reduction conditions are preferably a hydrogen concentration of 3% or more (more preferably 4% or more) (remaining nitrogen but 100% hydrogen) and a reduction temperature of 250 ° C. to 350 ° C.
  • the reduction temperature is less than 250 ° C., the reduction rate is slow and a long time is required for the reduction.
  • the reduction temperature is set to 350 ° C. or higher, the sintering of Ag in the semiconductor element bonding portion proceeds, and the stress buffering ability may be reduced, leading to destruction of the semiconductor element 1.
  • the bonding strength between the ceramic substrate 5 and the sintered Ag paste is strengthened by performing partial plating of Au or Ag on the portion where the sintered Ag paste is supplied. And the reliability of the joint can be improved.
  • the atmosphere is replaced with the H2 reducing atmosphere without removing the substrate 6
  • the oxidized Cu wiring 6 is reduced.
  • restoration can be performed by one reflow process.
  • the number of steps can be reduced by one as compared with the case where the sintering type Ag paste bonding is performed in one reflow process and the Cu wiring 6 is reduced in the next process, and the assembly time can be shortened. Further, it is possible to avoid a risk that the ceramic substrate 5 is contaminated after the joining and the reduction.
  • the step of reducing the oxidation of the solid Cu wiring 6 of the ceramic substrate 5 may be performed by hydrogen plasma treatment.
  • the Cu wiring 6 can be oxidized and reduced by Ar + H2 and N2 + H2 plasma treatment of the Cu wiring of the ceramic substrate 5 oxidized by bonding with the sintered Ag paste. This also makes it possible to obtain a nano-order structure on the surface of the Cu wiring, as in the reflow process in an H2 reducing atmosphere.
  • a semiconductor element (IGBT1, diode 2) is bonded with sintered Ag paste on a ceramic substrate 5 brazed with Cu wiring on the upper surface of aluminum nitride and a Cu plate on the lower surface in the atmosphere at 300 ° C. for 20 minutes using a reflow furnace. Went. Then, without removing the ceramic substrate 5 from the reflow furnace, the atmosphere was replaced with a hydrogen reducing atmosphere, and the Cu stripped portion oxidized at 300 ° C. for 10 minutes was reduced. Thereafter, wire bonding 8 was performed, and the element-attached substrate was bonded to the base 10 with an Sn-based solder foil having a solidus temperature of 227 ° C. or higher shown in Table 1. Furthermore, after Cu terminals 17 were ultrasonically bonded onto the pure Cu h substrate wiring 6, a case 18 was attached, and the periphery of the bonded portion was sealed with a silicone resin 19, thereby producing a power semiconductor module.
  • the bonding portion was sealed with silicone resin, but even when sealing was performed with a transfer mold, the process before the sealing step was not changed, so that good bonding with little unbonding was achieved. It becomes possible.
  • the present invention is not limited to the above-described embodiment, and in the semiconductor product assembly process, after joining with a sintered Ag paste, solder joining can be applied to all products in the Cu portion.
  • the semiconductor element and the wiring provided on the substrate are joined to each other while the Ag paste is oxidized by the sintered Ag paste, and the oxidized substrate is mounted.
  • the reduced wiring and the base are joined with solder to produce a power module. Since the oxidized wiring is reduced in this manner, the wiring after the sintering process and the base can be soldered together, so that the heat dissipation in the manufactured power module is improved.
  • the sintered and bonded semiconductor elements and substrates are inspected.
  • joining is performed in two stages, sintered joining and solder joining, and the state of sintered joining is inspected before solder joining, so that waste of materials can be prevented to the maximum and manufacturing costs can be reduced. .
  • the above-mentioned Ag sintering joining is desirably performed at a joining temperature of 250 to 350 ° C., a heating rate of 30 ° C./min or less, a holding time of 1 to 30 min, and a pressurization of 0.1 to 10 MPa.
  • the porosity in porous Ag can be controlled to 5% or more and less than 30%.
  • a ceramic substrate having a solid Cu wiring and an Sn-based solder (solidus temperature is 227 ° C. or higher) are used.
  • Sn-based solder having a solidus temperature of 227 ° C. or higher the void ratio of the solder joint can be made less than 2%, and good solder joint can be realized.
  • it since it has a solder joint part with a void ratio of less than 2%, it becomes possible to provide a highly reliable power module having good heat dissipation.
  • Au or Ag plating may be applied to the portion where the sintered Ag paste on the solid Cu wiring is supplied. By doing so, the bonding strength between the ceramic substrate and the sintered type Ag can be increased.
  • the solid Cu wiring has a particulate microstructure generated on the surface by reduction after oxidation.
  • control lines and information lines indicate what is considered necessary for explanation, and not all control lines and information lines on the product are necessarily shown. All the components may be connected to each other.
  • the present invention is not limited to the embodiments as they are, and can be embodied by modifying the constituent elements without departing from the gist thereof in the implementation stage.
  • Various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the embodiments. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, constituent elements over different embodiments may be appropriately combined.

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Abstract

Provided is a lead-free bonding technique having both excellent heat radiation performance properties and a substrate bonding part with excellent bonding performanceproperties. A semiconductor element is bonded, using a sinter-type Ag paste, to a ceramic substrate having pure copper wiring (where the porous Ag layer has a porosity of 5% to less than 30%). Then, hydrogen reduction is performed, and the ceramic substrate is bonded to the base using an Sn-based solder having a solidus temperature equal to or greater than 227°C (fig. 8).

Description

パワーモジュールの製造方法、及びパワーモジュールPower module manufacturing method and power module

　本発明は、IGBT（Insulated Gate Bipolar Transistor）等のパワー半導体素子を有するパワーモジュールの製造方法、及びパワーモジュールに関する。 The present invention relates to a method for manufacturing a power module having a power semiconductor element such as IGBT (Insulated Gate Bipolar Transistor), and the power module.

　電鉄用、発電用、電気自動車/ハイブリッド自動車（EV/HEV）用モータ等、大出力モータを制御するインバータには、IGBTモジュール等のパワーモジュールが使用される。比較的電力の小さいHEV/EV用IGBTモジュールについては、Sn系はんだの適用により、近年鉛フリー化が進められつつある。 Power modules such as IGBT modules are used for inverters that control high-power motors such as motors for electric railways, power generation, and electric / hybrid vehicles (EV / HEV). In recent years, the use of Sn-based solder for HEV / EV IGBT modules with relatively low power has been becoming lead-free.

　一方、電鉄用の大電力を制御するパワーモジュールについては、素子接合部の耐熱性がSn系はんだでは得られないため、未だ鉛フリー化が困難な状況にある。現時点では、素子接合部に耐熱性の高い高鉛はんだが使用されることが多い。しかしながら、Pb成分が人体に悪影響を及ぼすことが指摘されるようになり、Pb入りはんだは大きな社会問題としてクローズ・アップされるとともに、EUのROHS（Restriction of Hazardous Substances Directive)指令に代表されるようにPbを含む有害物質の使用を法的に規制しようと言う動きが活発化している。このような背景から、大電力の電鉄用パワーモジュールについても、Pbフリー化が求められている。 On the other hand, for power modules that control high power for electric railways, it is still difficult to make lead-free because the heat resistance of element joints cannot be obtained with Sn-based solder. At present, high lead solder with high heat resistance is often used for element joints. However, it has been pointed out that the Pb component has an adverse effect on the human body, and solder containing Pb has been closed up as a major social problem and is represented by the EU's ROHS (Restriction of Hazardous Substances Directive) directive. There is a growing movement to legally regulate the use of harmful substances including Pb. Against this background, Pb-free is also required for power modules for high-power railways.

　耐熱性を必要とする素子接合部に適用するための鉛フリー接合材の候補としては、Bi系はんだ(約260℃)、Au-Snはんだ（約282℃）、Zn-Al系はんだ（約380℃）が挙げられる。 Candidates for lead-free bonding materials to be applied to element joints that require heat resistance include Bi-based solder (approximately 260 ° C), Au-Sn solder (approximately 282 ° C), and Zn-Al-based solder (approximately 380 ° C). ° C).

　しかしながら、Bi系はんだは熱伝導率が低いため、大電流を通電する発熱の大きい半導体素子の接合には、放熱性の面でデメリットとなり適しない。また、Au-20SnはAuを主成分とするため材料コストが高くなってしまう。さらに、Zn-Al系はんだは酸化膜が強固で濡れを確保できない。このように、上記はんだにはそれぞれ課題があり、汎用的には使用できない。 However, since Bi-based solder has low thermal conductivity, it is not suitable for joining semiconductor elements that generate a large current and generate a large amount of heat because of its heat dissipation. Moreover, since Au-20Sn contains Au as a main component, the material cost becomes high. Furthermore, Zn-Al solder has a strong oxide film and cannot secure wetting. As described above, each of the solders has a problem and cannot be used for general purposes.

　一方、上記の高融点はんだ以外の高耐熱の鉛フリー接合材として、粒子と粒子が固体のまま接合する焼結型のAgペーストが開発されている。ナノオーダーのAgフィラーを約250～400℃といったAgの融点以下の温度で接合することができる。焼結型のAgペーストは高熱伝導であり、大電流を扱うパワー半導体素子の接合に利点がある。既に、低電力用のパワーモジュールの一部に適用されている。このような焼結型Agペーストを用いる半導体素子の接合技術は、例えば非特許文献１に開示されている。 On the other hand, as a high heat-resistant lead-free bonding material other than the above high melting point solder, a sintered Ag paste has been developed in which particles and particles are bonded in a solid state. Nano-order Ag fillers can be bonded at temperatures below the melting point of Ag, such as about 250-400 ° C. Sintered Ag paste has high thermal conductivity and is advantageous for bonding power semiconductor devices that handle large currents. It has already been applied to a part of power modules for low power. A technique for joining semiconductor elements using such sintered Ag paste is disclosed in Non-Patent Document 1, for example.

Performance comparison of traditional packaging technologies to novel bond wire less all sintered power module：P.Beckedahl etc., PCIM2011,p247-252.Performance comparison of traditional packaging technologies to novel bond wire less all sintered power module: P.Beckedahl etc., PCIM2011, p247-252.

　しかしながら、非特許文献１に代表される従来技術では、上記接合を大気中で行う必要があるため、接合時に被接合部材が酸化してしまうという課題がある。つまり、一般的な、パワーモジュールは、図１のように半導体素子１及び２をセラミック基板５に接合した後、ワイヤボンディング８を行い、その後にセラミック基板５をベース１０に接合して組立てる。図２に示されるように、焼結型のAgペーストは、ナノサイズのAgフィラー１１の凝集を防ぐため、保護膜１２でコーティングされている。この保護膜を分解するには大気中で250℃以上の温度で熱処理することが必須となる。このため、焼結型のAgペーストを用いて、パワー半導体素子をCu無垢配線を有するセラミック基板に接合すると、Cu無垢配線が酸化してしまう。従って、セラミック基板をはんだで接合した場合に、セラミック基板のCu配線の酸化物がはんだの濡れを阻害するため、良好な接合が得られなくなる。 However, in the conventional technique represented by Non-Patent Document 1, since the above-described joining needs to be performed in the atmosphere, there is a problem that the member to be joined is oxidized at the time of joining. That is, a general power module is assembled by bonding the semiconductor elements 1 and 2 to the ceramic substrate 5 as shown in FIG. 1, performing wire bonding 8, and then bonding the ceramic substrate 5 to the base 10. As shown in FIG. 2, the sintered Ag paste is coated with a protective film 12 in order to prevent aggregation of the nano-sized Ag filler 11. In order to decompose this protective film, it is essential to perform heat treatment at a temperature of 250 ° C. or higher in the atmosphere. For this reason, when a power semiconductor element is joined to a ceramic substrate having a solid Cu wiring using a sintered Ag paste, the solid Cu wiring is oxidized. Therefore, when the ceramic substrate is joined with solder, the oxide of the Cu wiring of the ceramic substrate inhibits the wetting of the solder, so that good joining cannot be obtained.

　また、焼結型のAgペーストを半導体素子の接合に用いた従来技術の場合、図３のように、焼結型のAgペーストで半導体素子１及び２を接合したセラミック基板５を、ベース１０に導電性グリース１４を介して接触させて押し付ける構造（バネ１３等で）となっている。このため、セラミック基板をベースにはんだ接合していない。ただし、このような構造の場合、セラミック基板とベース間がグリースで充填され、金属接合がなされていないため、大電力の電鉄用パワーモジュールに適用した場合、良好な放熱性が得られない。 Further, in the case of the prior art using a sintered Ag paste for joining semiconductor elements, a ceramic substrate 5 in which the semiconductor elements 1 and 2 are joined with a sintered Ag paste as shown in FIG. It has a structure (with a spring 13 or the like) that is pressed through contact with conductive grease 14. For this reason, the ceramic substrate is not soldered to the base. However, in such a structure, the space between the ceramic substrate and the base is filled with grease, and metal bonding is not performed. Therefore, when applied to a power module for high-power electric railways, good heat dissipation cannot be obtained.

　さらに、非特許文献１のように、半導体素子接合部とセラミック基板接合部両方に焼結型のAgペーストを用いて、素子接合とセラミック基板接合を同時に行うことも可能である。ただし、その場合、素子に比べて大面積のセラミック基板を焼結型のAgペーストで接合する必要がある。焼結型のAgペーストははんだに比べて未接合の抑制が難しいため、良好な接合を得ることが難しくなる。 Furthermore, as in Non-Patent Document 1, it is also possible to simultaneously perform element bonding and ceramic substrate bonding by using a sintered Ag paste for both the semiconductor element bonding portion and the ceramic substrate bonding portion. However, in that case, it is necessary to join a ceramic substrate having a larger area than the element with a sintered Ag paste. Sintered Ag paste is difficult to suppress unbonded compared to solder, and it is difficult to obtain good bonding.

　また、セラミック基板のCu配線部にAu、Agめっき等を施し、酸化を抑制することも考えられるが、はんだ接合以外のワイヤボンディング工程や端子の超音波ボンディング工程が難しくなる恐れがある。 In addition, it is conceivable to suppress the oxidation by applying Au, Ag plating or the like to the Cu wiring portion of the ceramic substrate, but there is a possibility that the wire bonding process other than the solder bonding or the ultrasonic bonding process of the terminal becomes difficult.

　本発明はこのような状況に鑑みてなされたものであり、良好な放熱性と基板接合部の良好な接合性を両立する鉛フリー接合技術を提供するものである。 The present invention has been made in view of such a situation, and provides a lead-free joining technique that achieves both good heat dissipation and good jointability of a substrate joint.

　上記課題を解決するために、本発明は、焼結型のAgペーストを半導体素子接合に用いることで高耐熱な鉛フリー接合を行い、セラミック基板接合部にSn系の鉛フリーはんだを用いる。 In order to solve the above-mentioned problems, the present invention uses a sintered Ag paste for semiconductor element bonding to perform high heat-resistant lead-free bonding, and uses Sn-based lead-free solder for the ceramic substrate bonding portion.

　つまり、本発明によるパワーモジュール製造方法は、半導体素子と、基板の上に設けられた配線とを、焼結型のAgペーストによって当該Agペーストを酸化させながら接合する第１の接合工程と、第１の接合工程後に、基板の配線の酸化を還元する還元工程と、基板の還元された配線と、ベースとを、はんだで接合する第２の接合工程と、を含んでいる。 That is, the power module manufacturing method according to the present invention includes a first bonding step of bonding a semiconductor element and a wiring provided on a substrate while oxidizing the Ag paste with a sintered Ag paste, After the first joining step, a reduction step for reducing the oxidation of the wiring on the substrate, and a second joining step for joining the reduced wiring on the substrate and the base with solder are included.

　また、上記製造方法で製造されたパワーモジュールは、半導体素子と、基板と、ベースと、半導体素子と基板とを接合する多孔質のAg層と、基板とベースとを接合するはんだ接合部と、を有し、多孔質のAg層において、空隙率が５％以上３０％未満となっている。 The power module manufactured by the above manufacturing method includes a semiconductor element, a substrate, a base, a porous Ag layer that bonds the semiconductor element and the substrate, and a solder joint that bonds the substrate and the base, In the porous Ag layer, the porosity is 5% or more and less than 30%.

　本発明に関連する更なる特徴は、本明細書の記述、添付図面から明らかになるものである。また、本発明の態様は、要素及び多様な要素の組み合わせ及び以降の詳細な記述と添付される特許請求の範囲の様態により達成され実現される。 Further features related to the present invention will become apparent from the description of the present specification and the accompanying drawings. The embodiments of the present invention can be achieved and realized by elements and combinations of various elements and the following detailed description and appended claims.

　本明細書の記述は典型的な例示に過ぎず、本発明の特許請求の範囲又は適用例を如何なる意味に於いても限定するものではないことを理解する必要がある。 It should be understood that the descriptions in this specification are merely exemplary, and are not intended to limit the scope of the claims or the application of the present invention in any way.

　以上説明したように本発明によれば、焼結型のAgペーストにより半導体素子を大気中でCu無垢配線を有するセラミック基板で接合し、還元処理を行った後に、セラミック基板をSn系はんだでベースに接合することによって、高耐熱で放熱性に優れ、接合の容易なパワーモジュールを得ることができる。 As described above, according to the present invention, a semiconductor element is bonded to a ceramic substrate having a solid Cu wiring in the atmosphere using a sintered Ag paste, and after reduction treatment, the ceramic substrate is made of Sn-based solder as a base. By joining to the power module, it is possible to obtain a power module having high heat resistance, excellent heat dissipation, and easy joining.

従来のパワーモジュールの接合工程を模式的に示す図である。It is a figure which shows typically the joining process of the conventional power module. 焼結型のAgペーストのAgフィラーと保護膜を模式的に示す図である。It is a figure which shows typically the Ag filler and protective film of sintering type Ag paste. 半導体素子をAgで接合した従来のパワーモジュールの一例を示す断面図である。It is sectional drawing which shows an example of the conventional power module which joined the semiconductor element with Ag. 本発明の実施形態による、多孔質のAgで接合されている素子接合部の断面図である。It is sectional drawing of the element junction part joined by porous Ag by embodiment of this invention. 本発明の実施形態によるパワーモジュールの断面図である。It is sectional drawing of the power module by embodiment of this invention. 本発明の実施形態による、セラミック基板のCu無垢配線部の還元により形成した粒子状の微構造を示す図である。It is a figure which shows the particulate-form microstructure formed by the reduction | restoration of the Cu solid wiring part of a ceramic substrate by embodiment of this invention. 本発明の実施形態による、焼結型のAgペーストで半導体素子を接合したセラミック基板をベースに接合した接合部の超音波探傷像を示す図である。It is a figure which shows the ultrasonic inspection image of the junction part joined to the base the ceramic substrate which joined the semiconductor element with the sintering type Ag paste by embodiment of this invention. 本発明の実施形態による、半導体素子をAgで接合したパワーモジュールの一例を示した断面図である。It is sectional drawing which showed an example of the power module which joined the semiconductor element by Ag by embodiment of this invention.

　以下、添付図面を参照して本発明の実施形態について説明する。添付図面では、機能的に同じ要素は同じ番号で表示される場合もある。なお、添付図面は本発明の原理に則った具体的な実施形態と実装例を示しているが、これらは本発明の理解のためのものであり、決して本発明を限定的に解釈するために用いられるものではない。 Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the accompanying drawings, functionally identical elements may be denoted by the same numbers. The attached drawings show specific embodiments and implementation examples based on the principle of the present invention, but these are for understanding the present invention and are not intended to limit the present invention. Not used.

　本実施形態では、当業者が本発明を実施するのに十分詳細にその説明がなされているが、他の実装・形態も可能で、本発明の技術的思想の範囲と精神を逸脱することなく構成・構造の変更や多様な要素の置き換えが可能であることを理解する必要がある。従って、以降の記述をこれに限定して解釈してはならない。 This embodiment has been described in sufficient detail for those skilled in the art to practice the present invention, but other implementations and configurations are possible without departing from the scope and spirit of the technical idea of the present invention. It is necessary to understand that the configuration and structure can be changed and various elements can be replaced. Therefore, the following description should not be interpreted as being limited to this.

（１）本発明の実施形態
　本発明は、多孔質Agで半導体素子とCu無垢配線６を有するセラミック基板が接合され、セラミック基板がPbフリーはんだ（Sn系はんだ）でベースに接合されたパワーモジュール及びその製造方法を提供する。 (1) Embodiments of the present invention The present invention relates to a power module in which a ceramic substrate having a semiconductor element and a solid Cu wiring 6 is joined with porous Ag, and the ceramic substrate is joined to a base with Pb-free solder (Sn-based solder). And a method for manufacturing the same.

　＜多孔質Agによる接合＞
　図４は、本実施形態のパワーモジュールにおいて、多孔質Agによって半導体素子１とセラミック基板５とが接合されている状態を示す図である。 <Bonding with porous Ag>
FIG. 4 is a diagram showing a state where the semiconductor element 1 and the ceramic substrate 5 are bonded by porous Ag in the power module of the present embodiment.

　半導体素子１とセラミック基板５の間の熱膨張率に差があるので、それらの収縮率が異なり、接合部付近に応力が発生する。Agが緻密になりすぎると（多孔質Agの空隙率が小さすぎると）、Agははんだに比べて硬いため、接合部が強固過ぎて、応力が半導体素子１に掛かり過ぎてしまう。このため、半導体素子１が壊れてしまう。一方、Agの空隙率が高すぎると、接合部の信頼性が減少してしまう。具体的には、多孔質のAg接合部の空隙率が５％未満の場合、Ag接合部の弾性率が高くなり応力緩衝が難しくなり、半導体素子が熱衝撃により破壊する恐れがある。一方、多孔質のAg接合部の空隙率３０％以上となると、熱衝撃により接合部にクラック進展しやすくなり接合信頼性が得られない恐れがある。 Since there is a difference in the thermal expansion coefficient between the semiconductor element 1 and the ceramic substrate 5, the contraction ratios thereof are different, and stress is generated near the joint. If Ag becomes too dense (when the porosity of porous Ag is too small), Ag is harder than solder, so that the joint is too strong and stress is applied to the semiconductor element 1 too much. For this reason, the semiconductor element 1 is broken. On the other hand, if the porosity of Ag is too high, the reliability of the joint portion decreases. Specifically, when the porosity of the porous Ag joint portion is less than 5%, the elastic modulus of the Ag joint portion becomes high, stress buffering becomes difficult, and the semiconductor element may be destroyed by thermal shock. On the other hand, if the porosity of the porous Ag joint is 30% or more, cracks are likely to develop in the joint due to thermal shock, and the joint reliability may not be obtained.

　そこで、多孔質Agにおける空隙率（焼結型Agペーストの最適接合条件）は、５％以上３０未満にコントロールすることが重要である。このようにコントロールするためには、次のような条件で接合することが必要である。 Therefore, it is important to control the porosity in the porous Ag (optimum joining condition of the sintered Ag paste) to 5% or more and less than 30. In order to control in this way, it is necessary to join under the following conditions.

　接合温度：２５０℃～３５０℃とすることが望ましい。２５０℃未満の場合に空隙率３０％以上にするには、１０ＭＰａ以上が必要となるが、接合時に半導体素子１を破壊するおそれがある。一方、３５０℃より高いと、焼結速度が速くAgの空隙率の制御が難しくなってしまう。 Bonding temperature: 250 ° C to 350 ° C is desirable. In order to increase the porosity to 30% or more when the temperature is less than 250 ° C., 10 MPa or more is required, but the semiconductor element 1 may be destroyed during bonding. On the other hand, when the temperature is higher than 350 ° C., the sintering rate is high and it becomes difficult to control the porosity of Ag.

　接合時間：昇温速度３０℃／ｍｉｎ以下、保持時間１～３０ｍｉｎとすることが望ましい。 Bonding time: It is desirable that the heating rate is 30 ° C./min or less and the holding time is 1 to 30 min.

　加圧：０．１～１０ＭＰａとすることが望ましい。０．１ＭＰａ未満の場合、焼結型のAgペーストにおけるフィラー間の接点が確保できず、焼結の高密度化が難しいため、空隙率が３０％未満になりやすい。一方、１０ＭＰａより大きな加圧になると、半導体素子を破壊する恐れがある。 Pressurization: Desirably 0.1 to 10 MPa. When the pressure is less than 0.1 MPa, the contact between the fillers in the sintered Ag paste cannot be secured, and it is difficult to increase the density of the sintering, so the porosity tends to be less than 30%. On the other hand, if the pressure is higher than 10 MPa, the semiconductor element may be destroyed.

　以上のような条件下でAgペーストを焼結させると、空隙率５％～３０％の多孔質Agの接合部が得られる。そして、図４に示されるように、半導体素子１を多孔質のAg４で応力緩衝することで、信頼性の高い接合を得ることができる。 When the Ag paste is sintered under the above conditions, a porous Ag joint having a porosity of 5% to 30% is obtained. And as FIG. 4 shows, highly reliable joining can be obtained by stress-buffering the semiconductor element 1 with porous Ag4.

　＜Cu無垢配線を有するセラミック基板＞
　Cu無垢配線６を有するセラミック基板５を用いることで、図５のようにパワーモジュールにCu端子１７を超音波ボンディングすることを容易にすることが可能となる。ただし、上述のように、Agペーストを焼結させて半導体素子１とセラミック基板５を接合させるため、Cu配線６が酸化してしまう。Cu端子１７を超音波接合するためにはCu配線６が無垢の状態でなければならないため、酸化したCu配線６を後述のように還元する必要がある。なお、Cu配線６がAu、Ag、Ni等のめっきが施されている場合、Cu端子１７の超音波接合に必要な接合エネルギーが大きくなり、セラミック基板５のセラミック部にダメージを与える恐れがある。このため、Cu配線６は無垢である方が良い。 <Ceramic board with pure Cu wiring>
By using the ceramic substrate 5 having the solid Cu wiring 6, it is possible to facilitate the ultrasonic bonding of the Cu terminal 17 to the power module as shown in FIG. However, since the Ag paste is sintered and the semiconductor element 1 and the ceramic substrate 5 are joined as described above, the Cu wiring 6 is oxidized. In order to ultrasonically bond the Cu terminal 17, the Cu wiring 6 must be in a solid state. Therefore, it is necessary to reduce the oxidized Cu wiring 6 as described later. When the Cu wiring 6 is plated with Au, Ag, Ni or the like, the bonding energy required for ultrasonic bonding of the Cu terminal 17 increases, and the ceramic portion of the ceramic substrate 5 may be damaged. . For this reason, it is better that the Cu wiring 6 is innocent.

　セラミック基板５とベース１０との接合にSn系はんだ９を用いることで、ボイド含有率２％未満の良好な接合が得られる。また、はんだ接合によりセラミック基板５とベース１０間が金属接合されることで良好で安定な放熱性が得られる。ベース１０にはAlSiCやCu－Mo、Cu－C、Al－C複合材等を用いることができる。これにより、熱疲労に対して高い信頼性が得られる。 By using the Sn-based solder 9 for joining the ceramic substrate 5 and the base 10, good joining with a void content of less than 2% can be obtained. Also, good and stable heat dissipation can be obtained by metal bonding between the ceramic substrate 5 and the base 10 by solder bonding. For the base 10, AlSiC, Cu—Mo, Cu—C, Al—C composite material or the like can be used. Thereby, high reliability is obtained with respect to thermal fatigue.

　＜焼結結合とはんだ結合を併用する理由＞
　本実施形態では、半導体素子１とセラミック基板５との接合をAg焼結によって実現し、セラミック基板５とベース１０との接合をSn系はんだ９によって実現している。このように２つの接合を異ならしめているのは、歩留まりとの関係があるからである。つまり、一旦半導体素子１をセラミック基板５に接合した後、１つ１つ接合状態が良好か検査される。ここで不良であると判断されるとその後のプロセスからは除かれてしまう。従って、セラミック基板５とベース１０との接合を、セラミック基板５と半導体素子１との接合と同時に、焼結Agを用いて行うと、１つでも接合に不具合が生じた場合、接合に用いた部材全てを廃棄しなければならず、材料を無駄にしてしまい製造コストも高くなってしまう。 <Reason for using sintered joint and solder joint together>
In the present embodiment, the joining of the semiconductor element 1 and the ceramic substrate 5 is realized by Ag sintering, and the joining of the ceramic substrate 5 and the base 10 is realized by the Sn-based solder 9. The reason why the two junctions are made different is that there is a relationship with the yield. That is, once the semiconductor element 1 is bonded to the ceramic substrate 5, it is inspected whether the bonded state is good one by one. If it is determined to be defective, it is excluded from the subsequent processes. Therefore, when bonding of the ceramic substrate 5 and the base 10 is performed using sintered Ag simultaneously with the bonding of the ceramic substrate 5 and the semiconductor element 1, if even one bonding failure occurs, it was used for bonding. All the members must be discarded, and the material is wasted and the manufacturing cost is increased.

　そこで、半導体素子１とセラミック基板５との接合をAg焼結によって実現し、検査後、セラミック基板５とベース１０とをはんだ接合させるようにして（２段階で分けて接合させる）、無駄を最大限防止するようにしている。 Therefore, the joining of the semiconductor element 1 and the ceramic substrate 5 is realized by Ag sintering, and after the inspection, the ceramic substrate 5 and the base 10 are solder-joined (joined in two stages) to maximize waste. The limit is to prevent.

　＜ハードレンジによる封止＞
　上述のように、多孔質のAgで半導体素子１は、Cu無垢配線６を有するセラミック基板５に接合され、セラミック基板５は、Sn系はんだでベース１０に接合されている。この場合、各接合部の周囲は、ハードレジン（図８の９参照）で封止するようにしても良い。 <Sealing with hard range>
As described above, the semiconductor element 1 is bonded to the ceramic substrate 5 having the pure Cu wiring 6 with porous Ag, and the ceramic substrate 5 is bonded to the base 10 with Sn-based solder. In this case, the periphery of each joint may be sealed with a hard resin (see 9 in FIG. 8).

　パワーモジュールにおける各接合部の周囲を、トランスファーモールドによりレジン封止することにより、熱衝撃発生時の多孔質Ag接合部およびSn系はんだ接合部のひずみを小さく抑えることが可能となり、パワーモジュールの寿命を向上することができる。このとき、レジンの熱膨張率は１０ppm/K以上であることが望ましい。レジンの熱膨張率が１０ppm/k未満の場合、素子接合部の熱衝撃によるクラック進展抑制効果が小さくなるからである。 By sealing the periphery of each joint in the power module with a transfer mold, it is possible to minimize the distortion of the porous Ag joint and Sn solder joint during thermal shock, and the life of the power module Can be improved. At this time, the thermal expansion coefficient of the resin is desirably 10 ppm / K or more. This is because, when the thermal expansion coefficient of the resin is less than 10 ppm / k, the effect of suppressing crack propagation due to thermal shock at the element joint portion is reduced.

　ここで、Cu無垢配線６を有するセラミック基板５のCu配線部表面には、１０～２００nmの粒子状の微構造が形成される。この微構造（凹凸）は、焼結処理によって酸化されたCu配線を還元することによって生成される構造である。このようにすることにより、ゲルやトランスファーモールドしたハードレジンとの密着性を良くし、パワーモジュールの寿命を向上することができる。 Here, a particulate microstructure of 10 to 200 nm is formed on the surface of the Cu wiring portion of the ceramic substrate 5 having the solid Cu wiring 6. This microstructure (unevenness) is a structure generated by reducing the Cu wiring oxidized by the sintering process. By doing in this way, adhesiveness with the gel or transfer molded hard resin can be improved, and the lifetime of a power module can be improved.

　図６は、Cu配線表面に形成した粒子状の微構造を示す図である。これにより、Cu粒子の凹凸によるアンカー効果、Cu配線６の表面面積の増加の効果により、封止樹脂との密着性を向上することができる。 FIG. 6 is a diagram showing a particulate microstructure formed on the Cu wiring surface. Thereby, adhesiveness with sealing resin can be improved by the anchor effect by the unevenness | corrugation of Cu particle | grains, and the effect of the increase in the surface area of Cu wiring 6. FIG.

　＜Sn系はんだの固相線温度＞
　Sn系はんだの固相線温度は、２２７℃以上であることが望ましい。はんだには、ある温度で一気に溶けてしまうものと、或る温度（固相線温度）で溶け始めて固体と液体が混ざった状態がある程度継続してから或る温度で完全に液体になるものがある。本実施形態では、上述のように、セラミック基板のCu配線部表面に微構造が生成されている（図６）。Pbフリーはんだは濡れにくいはんだ（溶けたからといって直ぐには濡れていかずにある程度の温度にならないと濡れていかないはんだ：２２７℃位が濡れていくボーダーの温度である）であり、微構造（凹凸）によって表面がフラットでない場合には特に濡れにくい。この点、融点が高いはんだの方が凹凸があるものに対して濡れようとする力が強いことが分かっている。一方、融点が低いはんだは高い温度に達するまでに溶け始めてしまう。このときのはんだの濡れの力は弱く、凹凸上では濡れきれない箇所ができ易くなり、ボイド（孔）が生成されやすくなってしまう。このボイドの生成が２％以下になるようにするためのはんだの固相線温度が２２７℃であることが発明者らの検討によって分かった。 <Solidus temperature of Sn-based solder>
The solidus temperature of Sn-based solder is desirably 227 ° C. or higher. There are solders that melt at a certain temperature and those that begin to melt at a certain temperature (solidus temperature) and continue to be mixed for a certain period of time and then become completely liquid at a certain temperature. is there. In the present embodiment, as described above, a microstructure is generated on the surface of the Cu wiring portion of the ceramic substrate (FIG. 6). Pb-free solder is a solder that does not get wet easily (solder that does not get wet immediately after melting but does not get wet unless it reaches a certain temperature: the temperature of the border that gets wet at around 227 ° C), and has a microstructure (unevenness) ), It is particularly difficult to wet when the surface is not flat. In this regard, it has been found that a solder having a high melting point has a stronger force to get wet with respect to unevenness. On the other hand, a solder having a low melting point starts to melt before reaching a high temperature. At this time, the solder wetting force is weak, and it becomes easy to form a portion that cannot be completely wet on the unevenness, and voids (holes) are likely to be generated. It has been found by the inventors that the solidus temperature of the solder is 227 ° C. so that the generation of voids is 2% or less.

　固相線温度が２２７℃以上であるSn系はんだとしては、Sn－3～10Cu（mass%）あるいはSn-10Sb（mass%）、Snとすることができる。 The Sn-based solder having a solidus temperature of 227 ° C. or higher can be Sn-3 to 10Cu (mass%), Sn-10Sb (mass%), or Sn.

　図７は、焼結型のAgペーストで半導体素子を接合したCu無垢配線６を有するセラミック基板５をSn系はんだで接合した場合に得られるセラミック基板接合部の超音波探傷像を示す図である。各種Sn系はんだ９でベース１０に接合した超音波探傷像を見ると、Sn-Pb共晶（融点１８３℃）、Sn-3Ag-0.5Cu-5In（固相線温度２０６℃）、Sn-3Ag-0.5Cu（融点２１７℃）で接合した場合、接合部に未濡れによる２％以上の未接合部（ボイド２１）が形成した。特に、融点の低いSn-Pb共晶の場合、未接合部の割合が大きくなった。その一方、Sn-3～10Cu（固相線温度２２７℃）、Sn-10Sb（固相線温度２４０℃）、或いはSn（融点２３２℃）で接合した場合、未接合部が２％未満となり良好な接合が得られた。 FIG. 7 is a diagram showing an ultrasonic flaw detection image of a ceramic substrate bonding portion obtained when a ceramic substrate 5 having a solid Cu wiring 6 bonded with a semiconductor element with a sintered Ag paste is bonded with Sn-based solder. . Looking at the ultrasonic flaw detection images bonded to the base 10 with various Sn-based solder 9, Sn-Pb eutectic (melting point 183 ° C), Sn-3Ag-0.5Cu-5In (solidus temperature 206 ° C), Sn-3Ag When bonding at −0.5 Cu (melting point: 217 ° C.), 2% or more unbonded portion (void 21) due to non-wetting was formed in the bonded portion. In particular, in the case of Sn—Pb eutectic with a low melting point, the proportion of unbonded portions was increased. On the other hand, when joining with Sn-3 ~ 10Cu (solidus temperature 227 ° C), Sn-10Sb (solidus temperature 240 ° C), or Sn (melting point 232 ° C), the unjoined part is less than 2% and good A good bond was obtained.

　以上のことから、はんだの溶融する固相線温度が２２７℃以上であれば、焼結型のAgペーストで半導体素子１を接合したCu無垢配線６を有するセラミック基板５を良好に接合できると言える。 From the above, it can be said that if the solidus temperature at which the solder melts is 227 ° C. or higher, the ceramic substrate 5 having the solid Cu wiring 6 to which the semiconductor element 1 is bonded with the sintered Ag paste can be satisfactorily bonded. .

　＜パワーモジュールの製造方法１＞
　本発明の実施形態によるパワーモジュールは、（i）大気中で半導体素子１を、Cu無垢配線６を有するセラミック基板５に焼結型のAgペーストで接合した後、（ii）セラミック基板５のCu無垢配線６の酸化を還元してから、（iii）Sn系はんだ９でセラミック基板５をベース１０に接合する。 <Power Module Manufacturing Method 1>
The power module according to the embodiment of the present invention includes (i) bonding the semiconductor element 1 in the atmosphere to the ceramic substrate 5 having the Cu solid wiring 6 with a sintered Ag paste, and (ii) Cu of the ceramic substrate 5. After reducing the oxidation of the solid wiring 6, (iii) the ceramic substrate 5 is joined to the base 10 with Sn solder 9.

　焼結型のAgペーストを用いて、半導体素子１を、Cu無垢配線６を有するセラミック基板５に大気中で接合することで、Agフィラー周囲にある保護膜が分解されて良好な焼結接合ができる。 Using a sintered Ag paste, the semiconductor element 1 is bonded to the ceramic substrate 5 having the solid Cu wiring 6 in the atmosphere, so that the protective film around the Ag filler is decomposed and a good sintered bonding is achieved. it can.

　また、大気中の加熱によって酸化したCu配線を還元することによって、Sn系はんだ９がセラミック基板５に良好に濡れやすくなり、高信頼接合することができる。さらに、大気中で酸化したCu配線６を還元することによって、Cu配線表面にナノオーダーの粒子を形成することができる。これは、ゲルやハードレジンによる封止との密着性を向上する。このとき接合温度は２５０～３５０℃であることが望ましい。２５０℃未満の温度ではAgフィラーの焼結が進みにくいため、Ag接合部の空隙率が３０％以上になる恐れがある。また、３５０℃以上の温度で接合した場合、Agフィラーの焼結が進みすぎて、空隙率が5%未満となり応力緩衝能が低下するため、接合後の冷却時に部材間の熱膨張率差に起因する応力により半導体素子１が破壊する恐れがある。還元条件は、水素濃度３％以上（４％以上がより好ましい）（残り窒素であるが、水素１００％であっても良い）、還元温度２５０℃～３５０℃が望ましい。還元温度が２５０℃未満の場合、還元速度が遅くなり、還元に長時間を要する。一方、還元温度を３５０℃以上にした場合、半導体素子接合部のAgの焼結が進み、応力緩衝能が低減して半導体素子１の破壊に繋がる恐れがある。 In addition, by reducing the Cu wiring oxidized by heating in the atmosphere, the Sn-based solder 9 is easily wetted to the ceramic substrate 5 and can be bonded with high reliability. Further, by reducing the Cu wiring 6 oxidized in the atmosphere, nano-order particles can be formed on the surface of the Cu wiring. This improves the adhesion with sealing with gel or hard resin. At this time, the bonding temperature is preferably 250 to 350 ° C. At a temperature lower than 250 ° C., the sintering of the Ag filler is difficult to proceed, so the porosity of the Ag joint portion may be 30% or more. In addition, when joining at a temperature of 350 ° C. or higher, the sintering of the Ag filler proceeds too much, and the porosity becomes less than 5% and the stress buffering capacity decreases, so the difference in thermal expansion coefficient between members during cooling after joining There is a possibility that the semiconductor element 1 is destroyed by the stress caused by the stress. The reduction conditions are preferably a hydrogen concentration of 3% or more (more preferably 4% or more) (remaining nitrogen but 100% hydrogen) and a reduction temperature of 250 ° C. to 350 ° C. When the reduction temperature is less than 250 ° C., the reduction rate is slow and a long time is required for the reduction. On the other hand, when the reduction temperature is set to 350 ° C. or higher, the sintering of Ag in the semiconductor element bonding portion proceeds, and the stress buffering ability may be reduced, leading to destruction of the semiconductor element 1.

　＜パワーモジュールの製造方法２＞
　Cu無垢配線６を有するセラミック基板５において、焼結型のAgペーストを供給する部分にのみにAuあるいはAgめっきを施す工程を、半導体素子１を、Cu無垢配線６を有するセラミック基板５に焼結型のAgペーストで接合する工程の前に実行するようにしても良い。 <Power Module Manufacturing Method 2>
In the ceramic substrate 5 having the solid Cu wiring 6, the process of applying Au or Ag plating only to the portion to which the sintered Ag paste is supplied, and the semiconductor element 1 is sintered to the ceramic substrate 5 having the Cu pure wiring 6. It may be executed before the step of joining with the Ag paste of the mold.

　Cu無垢配線６を有するセラミック基板５において、焼結型Agペーストを供給する部分にAuもしくはAgの部分めっきを施すことによって、セラミック基板５と焼結型のAgペースト間の接合強度を強くすることができ、接合部の信頼性を向上することができる。 In the ceramic substrate 5 having the solid Cu wiring 6, the bonding strength between the ceramic substrate 5 and the sintered Ag paste is strengthened by performing partial plating of Au or Ag on the portion where the sintered Ag paste is supplied. And the reliability of the joint can be improved.

　＜パワーモジュールの製造方法３＞
　（i）大気中で半導体素子１を、Cu無垢配線６を有するセラミック基板５に焼結型のAgペーストで接合する工程と、（ii）セラミック基板のCu無垢配線６の酸化を還元する工程とを、リフロー炉内の大気雰囲気をH2還元雰囲気に置換することにより１回のリフロー工程で行うようにしても良い。 <Power Module Manufacturing Method 3>
(I) a step of bonding the semiconductor element 1 to the ceramic substrate 5 having the solid Cu wiring 6 in the atmosphere with a sintered Ag paste; and (ii) a step of reducing oxidation of the solid Cu wiring 6 on the ceramic substrate. May be performed in a single reflow process by replacing the atmospheric atmosphere in the reflow furnace with an H2 reducing atmosphere.

　セラミック基板５に焼結型のAgペーストで半導体素子１を接合するリフロー工程において、大気中で焼結型のAgペーストを接合した後に、基板６を取出さない状態で雰囲気をH2還元雰囲気に置換して酸化したCu配線６を還元する。これにより、１回のリフロー工程で接合と還元を行うことができる。１回のリフロー工程で焼結型のAgペースト接合、次の工程でCu配線６の還元を行う場合に比べて工程を１つ低減することができ、組立て時間を短縮できる。また、接合してから還元するまでにセラミック基板５が汚染する危険を回避することができる。 In the reflow process of bonding the semiconductor element 1 to the ceramic substrate 5 with the sintered Ag paste, after bonding the sintered Ag paste in the atmosphere, the atmosphere is replaced with the H2 reducing atmosphere without removing the substrate 6 Then, the oxidized Cu wiring 6 is reduced. Thereby, joining and reduction | restoration can be performed by one reflow process. The number of steps can be reduced by one as compared with the case where the sintering type Ag paste bonding is performed in one reflow process and the Cu wiring 6 is reduced in the next process, and the assembly time can be shortened. Further, it is possible to avoid a risk that the ceramic substrate 5 is contaminated after the joining and the reduction.

　＜パワーモジュールの製造方法４＞
　セラミック基板５のCu無垢配線６の酸化を還元する工程を、水素プラズマ処理により行うようにしても良い。 <Power Module Manufacturing Method 4>
The step of reducing the oxidation of the solid Cu wiring 6 of the ceramic substrate 5 may be performed by hydrogen plasma treatment.

　焼結型のAgペーストによる接合で酸化したセラミック基板５のCu配線を、Ar+H2、N2+H2プラズマ処理することによりCu配線６を酸化還元することができる。これによっても、H2還元雰囲気によるリフロー工程と同様にCu配線表面にナノオーダーの備構造を得ることができる。 The Cu wiring 6 can be oxidized and reduced by Ar + H2 and N2 + H2 plasma treatment of the Cu wiring of the ceramic substrate 5 oxidized by bonding with the sintered Ag paste. This also makes it possible to obtain a nano-order structure on the surface of the Cu wiring, as in the reflow process in an H2 reducing atmosphere.

　＜検査工程＞
（i）焼結型のAgペーストによる接合状態（未接合率）の検査
接合条件ごとにサンプルを抜取り、接合部の断面観察により、X線透過像を用いて、Ag部分の空隙率を確認する。未接合率（接合されていない領域の率）が５%以上の場合、発熱した半導体素子の放熱が悪くなり、素子の接合信頼性を損なう。所望の空隙率（Ag中に空孔がある率）が得られることを確認できれば、その条件で生産する。 <Inspection process>
(I) Inspection of bonding state (non-bonding rate) with sintered Ag paste Samples are extracted for each bonding condition, and the porosity of the Ag part is confirmed by X-ray transmission image by cross-sectional observation of the bonded portion . When the unbonded ratio (the ratio of the unbonded region) is 5% or more, the heat dissipation of the generated semiconductor element is deteriorated, and the bonding reliability of the element is impaired. If it can be confirmed that a desired porosity (a rate at which Ag has vacancies) can be obtained, production is performed under the conditions.

（ii）Cu無垢配線６における配線部の色を、目視により確認する。酸化による変色が残っている場合、第２の接合工程時にはんだによる未接合率が２%未満にならないおそれがある。 (Ii) The color of the wiring part in the Cu solid wiring 6 is confirmed visually. If discoloration due to oxidation remains, the unbonded rate due to solder may not be less than 2% during the second bonding step.

（２）実施例
　以下、本発明をパワー半導体モジュールに適用した実施例について、図８を用いて説明する。 (2) Embodiment Hereinafter, an embodiment in which the present invention is applied to a power semiconductor module will be described with reference to FIG.

　窒化アルミニウムの上面にCu配線、下面にCu板をロウ付けしたセラミック基板５上に、焼結型Agペーストで半導体素子(IGBT１、ダイオード２)を大気中、３００℃２０minでリフロー炉を用いて接合を行った。そして、セラミック基板５をリフロー炉から出さない状態で、大気雰囲気を水素還元雰囲気に置換して、３００℃１０minで酸化したCuむく部分を還元した。その後、ワイヤボンディング８を行い、素子付基板を表１に示す固相線温度２２７℃以上のSn系はんだ箔でベース１０に接合した。さらに、Cu無垢ｈ基板配線６上にCu端子１７を超音波接合した後、ケース１８を取付け、接合部周辺をシリコーン樹脂１９で封止することにより、パワー半導体モジュールを作製した。 A semiconductor element (IGBT1, diode 2) is bonded with sintered Ag paste on a ceramic substrate 5 brazed with Cu wiring on the upper surface of aluminum nitride and a Cu plate on the lower surface in the atmosphere at 300 ° C. for 20 minutes using a reflow furnace. Went. Then, without removing the ceramic substrate 5 from the reflow furnace, the atmosphere was replaced with a hydrogen reducing atmosphere, and the Cu stripped portion oxidized at 300 ° C. for 10 minutes was reduced. Thereafter, wire bonding 8 was performed, and the element-attached substrate was bonded to the base 10 with an Sn-based solder foil having a solidus temperature of 227 ° C. or higher shown in Table 1. Furthermore, after Cu terminals 17 were ultrasonically bonded onto the pure Cu h substrate wiring 6, a case 18 was attached, and the periphery of the bonded portion was sealed with a silicone resin 19, thereby producing a power semiconductor module.

　これらのパワーモジュールについて、セラミック基板接合部の接合状態をベース裏面側から、超音波探傷像により確認した。その結果を表１に示す。

Figure JPOXMLDOC01-appb-T000001
About these power modules, the joining state of the ceramic board | substrate junction part was confirmed from the base back surface side by the ultrasonic flaw detection image. The results are shown in Table 1.
Figure JPOXMLDOC01-appb-T000001

　表１において、セラミック基板接合部の未接合率が２%未満の場合を○、未接合率が２%以上の場合を×とした。実施例１乃至８の全てにおいて、未接合率が２%未満となり良好な接合が得られた。 In Table 1, the case where the unbonded rate of the ceramic substrate bonding portion was less than 2% was marked as ◯, and the case where the unbonded rate was 2% or more was marked as x. In all of Examples 1 to 8, the unbonded rate was less than 2%, and good bonding was obtained.

　本実施例は、接合部の封止をシリコーン樹脂により行ったが、封止をトランスファーモールドで行った場合にも、封止工程より前の工程は変わらないため、未接合の少ない良好な接合が可能となる。 In this example, the bonding portion was sealed with silicone resin, but even when sealing was performed with a transfer mold, the process before the sealing step was not changed, so that good bonding with little unbonding was achieved. It becomes possible.

　また、上記の実施形態に限定せず、半導体製品の組立工程において、焼結型のAgペーストで接合した後に、Cu部分にはんだ接合が全ての製品に適用することができる。 Also, the present invention is not limited to the above-described embodiment, and in the semiconductor product assembly process, after joining with a sintered Ag paste, solder joining can be applied to all products in the Cu portion.

（３）比較例
　上記の実施例１と同じ工程で同じ形状のパワー半導体モジュールを作製した。セラミック基板の接合に用いたはんだを表２に示す。

Figure JPOXMLDOC01-appb-T000002
(3) Comparative Example A power semiconductor module having the same shape was manufactured in the same process as in Example 1 above. Table 2 shows the solder used for joining the ceramic substrates.
Figure JPOXMLDOC01-appb-T000002

　比較例１乃至３の何れのはんだを用いた場合も、未接合率が２%以上となり良好な接合が得られなかった。 When any of the solders of Comparative Examples 1 to 3 was used, the unbonded rate was 2% or more, and good bonding was not obtained.

（４）まとめ
　本発明の実施形態によれば、半導体素子と、基板の上に設けられた配線とを、焼結型のAgペーストによって当該Agペーストを酸化させながら接合し、酸化した基板上の配線の酸化を還元した後、還元された配線とベースとをはんだで接合することにより、パワーモジュールを作製する。このように酸化した配線を還元するので、焼結工程後の配線とベースとをはんだ接合できるようになるので、作製したパワーモジュールにおける放熱性が良好となる。 (4) Summary According to the embodiment of the present invention, the semiconductor element and the wiring provided on the substrate are joined to each other while the Ag paste is oxidized by the sintered Ag paste, and the oxidized substrate is mounted. After reducing the oxidation of the wiring, the reduced wiring and the base are joined with solder to produce a power module. Since the oxidized wiring is reduced in this manner, the wiring after the sintering process and the base can be soldered together, so that the heat dissipation in the manufactured power module is improved.

　また、還元した後であって、はんだ接合前に、焼結接合された半導体素子及び基板を検査する。このように焼結接合とはんだ接合の２段階で接合を行い、はんだ接合前に焼結接合の状態を検査するので、材料の無駄を最大限防止し、製造コストを抑えることができるようになる。 In addition, after the reduction, and before soldering, the sintered and bonded semiconductor elements and substrates are inspected. In this way, joining is performed in two stages, sintered joining and solder joining, and the state of sintered joining is inspected before solder joining, so that waste of materials can be prevented to the maximum and manufacturing costs can be reduced. .

　上述のAg焼結接合は、接合温度が２５０～３５０℃、昇温速度が３０℃／ｍｉｎ以下、保持時間が１～３０ｍｉｎ、加圧が０．１～１０ＭＰａで実行することが望ましい。このようにすることにより、多孔質のAgにおける空隙率を５％以上３０％未満にコントロールすることができる。焼結接合部における空隙率を５％以上３０％未満とすることにより、接合の信頼性が高いパワーモジュールを提供することが可能となる。 The above-mentioned Ag sintering joining is desirably performed at a joining temperature of 250 to 350 ° C., a heating rate of 30 ° C./min or less, a holding time of 1 to 30 min, and a pressurization of 0.1 to 10 MPa. By doing in this way, the porosity in porous Ag can be controlled to 5% or more and less than 30%. By setting the porosity in the sintered joint to 5% or more and less than 30%, it is possible to provide a power module with high joining reliability.

　本実施形態では、Cu無垢配線を有するセラミック基板と、Sn系はんだ（固相線温度が２２７℃以上）を用いている。固相線温度が２２７℃以上のSn系はんだを使用することにより、はんだ接合部のボイド率を２％未満とすることが可能となり、良好なはんだ接合を実現することができる。また、ボイド率が２％未満のはんだ接合部を有するので、良好な放熱性を有する信頼性の高いパワーモジュールを提供することが可能となる。 In this embodiment, a ceramic substrate having a solid Cu wiring and an Sn-based solder (solidus temperature is 227 ° C. or higher) are used. By using Sn-based solder having a solidus temperature of 227 ° C. or higher, the void ratio of the solder joint can be made less than 2%, and good solder joint can be realized. Moreover, since it has a solder joint part with a void ratio of less than 2%, it becomes possible to provide a highly reliable power module having good heat dissipation.

　さらに、Cu無垢配線上の焼結型のAgペーストを供給する部分にAuあるいはAgめっきを施すようにしても良い。このようにすることにより、セラミック基板と焼結型Agとの接合強度を強くすることができる。 Furthermore, Au or Ag plating may be applied to the portion where the sintered Ag paste on the solid Cu wiring is supplied. By doing so, the bonding strength between the ceramic substrate and the sintered type Ag can be increased.

　また、Cu無垢配線は、酸化後に還元されることによって表面に生成された粒子状の微構造を有している。このようにすることにより、封止樹脂との密着性に優れたパワーモジュールを提供することができるようになる。 Also, the solid Cu wiring has a particulate microstructure generated on the surface by reduction after oxidation. By doing in this way, the power module excellent in adhesiveness with sealing resin can be provided.

　上述の実施形態において、制御線や情報線は説明上必要と考えられるものを示しており、製品上必ずしも全ての制御線や情報線を示しているとは限らない。全ての構成が相互に接続されていても良い。 In the above-described embodiment, control lines and information lines indicate what is considered necessary for explanation, and not all control lines and information lines on the product are necessarily shown. All the components may be connected to each other.

　また、本発明は、実施形態そのままに限定されるものではなく、実施段階では、その要旨を逸脱しない範囲で構成要素を変形して具体化できる。また、実施形態に開示されている複数の構成要素の適宜な組み合わせにより、種々の発明を形成できる。例えば、実施形態に示される全構成要素から幾つかの構成要素を削除してもよい。さらに、異なる実施形態にわたる構成要素を適宜組み合わせてもよい。 Further, the present invention is not limited to the embodiments as they are, and can be embodied by modifying the constituent elements without departing from the gist thereof in the implementation stage. Various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the embodiments. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, constituent elements over different embodiments may be appropriately combined.

１・・・半導体素子（IGBT）
２・・・半導体素子（ダイオード）
３・・・はんだ
４・・・Ag接合材
５・・・セラミック基板
６・・・Cu無垢配線
７・・・セラミック（AlN）
８・・・ワイヤ
９・・・Sn系はんだ
１０・・・ベース
１１・・・Agフィラー
１２・・・保護膜
１３・・・バネ
１４・・・導電性グリース
１５・・・Ag
１６・・・孔
１７・・・Cu端子
１８・・・ケース
１９・・・封止樹脂
２１・・・未接合部 1 ... Semiconductor element (IGBT)
2 ... Semiconductor element (diode)
3 ... Solder 4 ... Ag bonding material 5 ... Ceramic substrate 6 ... Solid Cu wiring 7 ... Ceramic (AlN)
8 ... Wire 9 ... Sn solder 10 ... Base 11 ... Ag filler 12 ... Protective film 13 ... Spring 14 ... Conductive grease 15 ... Ag
16 ... Hole 17 ... Cu terminal 18 ... Case 19 ... Sealing resin 21 ... Unjoined part

Claims (13)

　半導体素子と、基板の上に設けられた配線とを、焼結型のAgペーストによって当該Agペーストを酸化させながら接合する第１の接合工程と、
　前記第１の接合工程後に、前記基板の配線の酸化を還元する還元工程と、
　前記基板の前記還元された配線と、ベースとを、はんだで接合する第２の接合工程と、
を含むことを特徴とするパワーモジュール製造方法。 A first joining step for joining the semiconductor element and the wiring provided on the substrate while oxidizing the Ag paste with a sintered Ag paste;
A reduction step of reducing oxidation of the wiring of the substrate after the first bonding step;
A second joining step of joining the reduced wiring of the substrate and the base with solder;
A power module manufacturing method comprising: 　請求項１において、
　前記還元工程の実施後であって、前記第２の接合工程の実施前に、前記接合された半導体素子及び前記基板を検査する検査工程を含むことを特徴とするパワーモジュール製造方法。 In claim 1,
A power module manufacturing method comprising: an inspection step of inspecting the bonded semiconductor element and the substrate after the reduction step and before the second bonding step. 　請求項１又は２において、
　前記基板は、セラミック基板であり、
　前記配線は、Cu配線であり、
　前記はんだはSn系はんだであることを特徴とするパワーモジュール製造方法。 In claim 1 or 2,
The substrate is a ceramic substrate;
The wiring is a Cu wiring,
The method for manufacturing a power module, wherein the solder is Sn-based solder. 　請求項３において、
　前記Cu配線上には、焼結型のAgペーストを供給する部分にAuあるいはAgめっきが施されており、
　さらに、前記第２の接合工程後に、前記配線の前記めっきを施されない部分に、ボンディングを行うボンディング工程を含むことを特徴とするパワーモジュール製造方法。 In claim 3,
On the Cu wiring, Au or Ag plating is applied to a portion for supplying a sintered Ag paste,
Furthermore, after the said 2nd joining process, the bonding process which bonds to the part which does not perform the said plating of the said wiring is included, The power module manufacturing method characterized by the above-mentioned. 　請求項１において、
　前記第１の接合工程は、接合温度が２５０～３５０℃、昇温速度が３０℃／ｍｉｎ以下、保持時間が１～３０ｍｉｎ、加圧が０．１～１０ＭＰａで実行されることを特徴とするパワーモジュール製造方法。 In claim 1,
The first bonding step is performed at a bonding temperature of 250 to 350 ° C., a temperature increase rate of 30 ° C./min or less, a holding time of 1 to 30 min, and a pressurization of 0.1 to 10 MPa. Power module manufacturing method. 　請求項３において、
　前記Sn系はんだの固相線温度が２２７℃以上であり、
　前記還元工程は、水素濃度が３％以上、還元温度が２５０～３５０℃で実行されることを特徴とするパワーモジュール製造方法。 In claim 3,
The solidus temperature of the Sn-based solder is 227 ° C. or higher,
The power module manufacturing method, wherein the reduction step is performed at a hydrogen concentration of 3% or more and a reduction temperature of 250 to 350 ° C. 　請求項２において、
　前記第１の接合工程は、酸化雰囲気のリフロー炉内で行われ、
　前記還元工程は、前記リフロー炉内で、還元雰囲気に置換して行われ、
　前記検査工程は、前記リフロー炉の外で行われる、
ことを特徴とするパワーモジュール製造方法。 In claim 2,
The first bonding step is performed in a reflow furnace in an oxidizing atmosphere,
The reduction step is performed in the reflow furnace by replacing with a reducing atmosphere,
The inspection step is performed outside the reflow furnace.
The power module manufacturing method characterized by the above-mentioned. 　請求項７において、
　前記第２の接合工程では、前記リフロー炉の外で、前記ベース、前記はんだ、前記基板の順で積層させ、前記リフロー炉内で、前記積層したベースと基板と基板とをはんだで接合することを特徴とするパワーモジュール製造方法。 In claim 7,
In the second joining step, the base, the solder, and the substrate are laminated in this order outside the reflow furnace, and the laminated base, the substrate, and the substrate are joined by solder in the reflow furnace. The power module manufacturing method characterized by these. 　請求項１乃至８の何れか１項において、
　前記還元工程が、水素プラズマ処理により行われることを特徴とするパワーモジュール製造方法。 In any one of Claims 1 thru | or 8,
The power module manufacturing method, wherein the reduction step is performed by hydrogen plasma treatment. 　半導体素子と、基板と、ベースを有するパワーモジュールであって、
　前記半導体素子と前記基板とを接合する多孔質のAg層と、
　前記基板と前記ベースとを接合するはんだ接合部と、を有し、
　前記多孔質のAg層において、空隙率が５％以上３０％未満であることを特徴とするパワーモジュール。 A power module having a semiconductor element, a substrate, and a base,
A porous Ag layer for joining the semiconductor element and the substrate;
A solder joint for joining the substrate and the base;
The power module, wherein the porous Ag layer has a porosity of 5% or more and less than 30%. 　請求項１０において、
　前記はんだ接合部は、固相線温度が２２７℃以上のSn系はんだで形成され、そのボイド率が２％未満であることを特徴とするパワーモジュール。 In claim 10,
The power module, wherein the solder joint is formed of Sn-based solder having a solidus temperature of 227 ° C. or higher, and a void ratio thereof is less than 2%. 　請求項１０又は１１において、
　前記基板はCu配線を有し、
　前記Cu配線は、酸化後に還元されることによって表面に粒子状の微構造を有することを特徴とするパワーモジュール。 In claim 10 or 11,
The substrate has Cu wiring;
The Cu module has a particulate microstructure on its surface by being reduced after oxidation. 　請求項１０乃至１２の何れか１項において、
　トランスファーモールドによりレンジ封止されていることを特徴とするパワーモジュール。 In any one of Claims 10 to 12,
A power module characterized by being range-sealed by a transfer mold.
PCT/JP2012/083041 2012-03-26 2012-12-20 Method for manufacturing power module, and power module Ceased WO2013145471A1 (en)

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