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WO2013018576A1 - Appareil de combustion de gaz d'échappement - Google Patents

Appareil de combustion de gaz d'échappement Download PDF

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Publication number
WO2013018576A1
WO2013018576A1 PCT/JP2012/068648 JP2012068648W WO2013018576A1 WO 2013018576 A1 WO2013018576 A1 WO 2013018576A1 JP 2012068648 W JP2012068648 W JP 2012068648W WO 2013018576 A1 WO2013018576 A1 WO 2013018576A1
Authority
WO
WIPO (PCT)
Prior art keywords
combustion
nozzle
exhaust gas
air
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2012/068648
Other languages
English (en)
Japanese (ja)
Inventor
山田　俊樹
功 鎌倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Publication of WO2013018576A1 publication Critical patent/WO2013018576A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details
    • F23D14/48—Nozzles
    • F23D14/58—Nozzles characterised by the shape or arrangement of the outlet or outlets from the nozzle, e.g. of annular configuration
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/20—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone
    • F23D14/22—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone with separate air and gas feed ducts, e.g. with ducts running parallel or crossing each other
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/26—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid with provision for a retention flame
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details
    • F23D14/48—Nozzles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D23/00—Assemblies of two or more burners
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/32—Incineration of waste; Incinerator constructions; Details, accessories or control therefor the waste being subjected to a whirling movement, e.g. cyclonic incinerators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/44—Details; Accessories
    • F23G5/48—Preventing corrosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN  A CARRIER GAS OR AIR 
    • F23C2201/00—Staged combustion
    • F23C2201/20—Burner staging
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2900/00—Special features of, or arrangements for burners using fluid fuels or solid fuels suspended in a carrier gas
    • F23D2900/00016—Preventing or reducing deposit build-up on burner parts, e.g. from carbon

Definitions

  • the present invention relates to an exhaust gas combustion apparatus, and even when exhaust gas is introduced from one or more process chambers and subjected to multi-burner treatment, the nozzle tip can be prevented from being clogged for a long period of time, and the exhaust gas can be maintained for a long operation period.
  • the present invention relates to a combustion apparatus.
  • CVD Chemical Vapor Deposition
  • the gas examples include silane (SiH 4 ), NH 3 , H 2 which are film forming material gases for semiconductor elements, liquid crystal panels, and solar cells, and when the inside of a sealed chamber such as a plasma CVD apparatus is cleaned with plasma, for example.
  • a sealed chamber such as a plasma CVD apparatus is cleaned with plasma
  • gaseous fluorides such as NF 3 , CF 4 , C 2 F 6 , SF 6 , CHF 3 , and CF 6 used as a cleaning gas
  • inert gases such as nitrogen (N 2 ).
  • a turbo molecular pump 3 and a dry pump 5 are connected in series to the process chamber 1 for evacuation in order to remove this harmful exhaust gas. Then, after the vacuum is drawn to some extent at the start of operation by the dry pump 5, the turbo molecular pump 3 is further evacuated to a required low pressure.
  • a case where the turbo molecular pump 3 is omitted is generally used.
  • the harmful exhaust gas output from the dry pump 5 is combusted and decomposed by the combustion device 7, then passes through the abatement device 9 and reaches the central scrubber 11. At this time, the exhaust gas is guided into the combustion device 7 and the abatement device 9 while being slightly depressurized by the central scrubber 11.
  • the combustion device 7 and the abatement device 9 may be configured as one device.
  • silica SiO 2
  • HF hydrofluoric acid
  • the combustion apparatus 7 has an exhaust gas combustion nozzle 23 attached to the upper part of the combustion chamber 21.
  • a bottom view of the exhaust gas combustion nozzle 23 is shown in FIG.
  • Exhaust gas such as silane gas is introduced from an exhaust gas nozzle 31 provided in the exhaust gas combustion nozzle 23. Then, the first combustion flame in an oxygen-deficient state is discharged from the first combustion nozzle 33, the pilot flame is always combusted in the second combustion nozzle 35, and the air supply nozzle 37 has a sufficient amount. Air is supplied.
  • the exhaust gas is not oxidized in this portion, and silica, which is a combustion oxide of silane gas, is used for the exhaust gas.
  • silica which is a combustion oxide of silane gas
  • the second combustion nozzle 35 maintains the state of a stable complete combustion flame during operation of the apparatus (no misfire occurs) by the fuel gas mixed with the theoretical air amount.
  • the exhaust gas such as silane gas is completely burned by sufficient combustion air from the air supply nozzle 37.
  • exhaust gas discharged from a plurality of process chambers 1 be processed together by a single combustion device 7 for the purpose of reducing capital investment costs.
  • process gases discharged from a plurality of process chambers are collectively processed by one exhaust gas combustion device 7, if these process gases are introduced into one combustion nozzle 23, a combustible gas (for example, : SiH 4 , NH 3 ) and combustion-supporting gas (eg, NF 3 ) are mixed to produce a mixed condensable product (eg, ammonium silicofluoride (NH 4 ) 2 SiF 6 ), and the exhaust gas nozzle 31 is There was a risk of blockage in the short term.
  • a combustible gas for example, : SiH 4 , NH 3
  • combustion-supporting gas eg, NF 3
  • the first combustion flame discharged from the first combustion nozzle 33 and the second combustion nozzle 35 adjacent to the first combustion nozzle 33 are discharged. This is probably because the second combustion flame is mixed by the influence of the air flow inside the combustion chamber and a sufficient oxygen-deficient region is not formed below the exhaust gas nozzle 31.
  • the present invention has been made in view of such conventional problems, and can prevent clogging of the nozzle tip over a long period of time even when exhaust gas is introduced from one or a plurality of process chambers and subjected to multi-burner treatment.
  • An object of the present invention is to provide an exhaust gas combustion apparatus that can maintain a long operation period.
  • the present invention includes a combustion chamber in which a plurality of exhaust gas nozzles into which exhaust gas is introduced from a process chamber are connected, a first combustion nozzle disposed on the outer periphery of the exhaust gas nozzle, A second combustion nozzle disposed on the outer periphery of the first combustion nozzle; and a wall portion of the combustion chamber located below the first combustion nozzle and the second combustion nozzle.
  • a first combustion flame discharged from the first combustion nozzle and a second combustion flame discharged from the second combustion nozzle are both reduced. It is a flame.
  • a mixed gas mixed at a fuel gas: air mixing (weight) ratio of 1: 3 to 1:12 is introduced from the first combustion nozzle, From the combustion nozzle of No. 2, a mixed gas mixed at a fuel gas: air mixing (weight) ratio of 1: 7 to 1:12 is introduced.
  • the first combustion flame from the first combustion nozzle and the second combustion flame from the second combustion nozzle cause the exhaust gas nozzle to An oxygen-deficient combustion zone is formed around the exhaust gas introduced into the combustion chamber.
  • the second combustion nozzle is formed with a large number of small-diameter nozzles, and the air supply nozzle is disposed below the oxygen-deficient combustion region, and the air supply nozzle The air introduced from is a swirling flow.
  • the exhaust oxide of the exhaust gas adheres to the tip portions of the exhaust gas nozzle, the first combustion nozzle, the second combustion nozzle, and the like. It is possible to eliminate clogging.
  • combustion oxide does not adhere to the peripheral wall of the combustion chamber, and can be efficiently dropped in the form of being collected at the center of the swirling flow.
  • the first combustion flame discharged from the first combustion nozzle and the second combustion flame discharged from the second combustion nozzle are both reducing flames.
  • a sufficient oxygen-deficient region is formed in the lower part of the exhaust gas nozzle.
  • the exhaust gas does not oxidize in the vicinity of the exhaust gas nozzle, and the combustion oxide of the exhaust gas adheres to the tip portions of the exhaust gas nozzle, the first combustion nozzle, the second combustion nozzle, and the like. There is no clogging.
  • FIG. 1 shows a configuration diagram of an embodiment of the present invention.
  • FIG. 1 is a longitudinal sectional view of the combustion chamber
  • FIG. 2 is a view taken along arrow A in FIG.
  • Six exhaust gas nozzles 43 are circumferentially arranged on the upper surface 41 of the combustion chamber 40.
  • An annular first combustion nozzle 45 is disposed around the exhaust gas nozzle 43, and a plurality of second combustion nozzles 47 are disposed around the outer periphery thereof.
  • the second combustion nozzle 47 is formed of a plurality of small diameter nozzles arranged around the first combustion nozzle 45 at appropriate intervals.
  • a mixed gas of fuel and air is introduced into the first combustion nozzle 45 from the first fuel / air introduction pipe 51 through the main fuel / air chamber 49.
  • a mixed gas of fuel and air is introduced into the second combustion nozzle 47 from a second fuel / air introduction pipe 55 via a pilot fuel / air chamber 53.
  • air supply nozzles 63 are configured in three steps in the height direction.
  • the air supply nozzle 63 is formed so as to be directed inward by a predetermined angle from the tangential direction of the cylindrical shape, and the air introduced from the air supply nozzle 63 is swirling along the inner side of the peripheral wall 61.
  • An air tank 67 is formed in a circumferential shape between the inner peripheral wall 61 and the outer wall 65, and air is introduced into the air tank 67 from an air introduction pipe 69.
  • Exhaust gas such as silane gas is introduced into each exhaust gas nozzle 43 from the process chamber 1.
  • a mixed gas of fuel gas and air is introduced from the first combustion nozzle 45, and this mixing (weight) ratio is 1: 3 to 1:12, which is a so-called reducing flame.
  • a mixed gas of fuel gas and air is also introduced from the second combustion nozzle 47, and this mixing (weight) ratio is 1: 7 to 1:12, which is also a reducing flame.
  • the combustion pattern at this time is shown in FIG.
  • the exhaust gas nozzles 43 are shown below the exhaust gas nozzles 43. A sufficient oxygen-deficient region is formed as shown in the reduction area.
  • the exhaust gas is not completely oxidized in this portion, and silica, which is a combustion oxide of silane gas, is used as the exhaust gas nozzle 43 and the first combustion nozzle 45. And it does not adhere to the tip of the second combustion nozzle 47 and clogging occurs.
  • the silica does not adhere to the inside of the peripheral wall 61 and falls in the form of being collected almost at the center of the swirling flow.
  • Example 1 in FIG. 4 the mixing (weight) ratio of the fuel (methane) gas and air mixed gas introduced from the second combustion nozzle 47 is 1:14 and the reducing flame effect is weak.
  • an experiment was conducted in the case of a reducing flame in which the mixing (weight) ratio of the fuel (methane) gas and air mixed gas introduced from the first combustion nozzle 45 was 1:11.
  • the secondary combustion air flow rate is 1,800 liters / min.
  • Example 2 the mixing (weight) ratio of the mixed gas of fuel (methane) gas and air introduced from the second combustion nozzle 47 as in Example 2 is changed to a case where the reducing flame effect is strong at 1:12, and The experiment was conducted without changing the mixing (weight) ratio of the mixed gas of fuel gas (methane) and air introduced from the first combustion nozzle 45 and the flow rate of the secondary combustion air.
  • the nozzle tip can be prevented from clogging for a long period of time. For this reason, a driving

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Environmental & Geological Engineering (AREA)
  • Incineration Of Waste (AREA)

Abstract

L'invention concerne un appareil de combustion de gaz d'échappement permettant d'éviter une obstruction d'une extrémité de buse sur une longue période et de maintenir le fonctionnement sur une longue période même si le gaz d'échappement est introduit à partir d'une pluralité de chambres de traitement pour un traitement par brûleurs multiples. Du fait que la flamme du brûleur pilote délivrée par une seconde buse de combustion (47) et la flamme du brûleur principal délivrée par une première buse de combustion (45) sont des flammes réductrices, un espace suffisamment pauvre en oxygène est formé sous les buses de gaz d'échappement (43) sous la forme d'une zone réductrice. Il ne se produit pas dans cette partie d'oxydation complète du gaz d'échappement, de sorte qu'on évite que du silicium sous la forme d'oxyde de combustion de gaz de silane vienne se fixer sur les extrémités ou parties similaires de buses de gaz d'échappement (43), de la première buse de combustion (45) ou de la seconde buse de combustion (47) et les obstruent. Entre-temps, une buse d'arrivée d'air (63) disposée sous la zone réductrice fournit une quantité d'air suffisante pour une combustion complète de sorte que l'oxydation complète du gaz d'échappement se produit en un emplacement situé au-delà de la zone réductrice.
PCT/JP2012/068648 2011-07-29 2012-07-24 Appareil de combustion de gaz d'échappement Ceased WO2013018576A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011167606 2011-07-29
JP2011-167606 2011-07-29

Publications (1)

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WO2013018576A1 true WO2013018576A1 (fr) 2013-02-07

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WO (1) WO2013018576A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016080226A (ja) * 2014-10-15 2016-05-16 エドワーズ株式会社 除害装置
WO2018221021A1 (fr) * 2017-05-29 2018-12-06 カンケンテクノ株式会社 Procédé de détoxication par décompression de gaz d'échappement et dispositif associé

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6151945B2 (ja) 2013-03-28 2017-06-21 株式会社荏原製作所 除害機能付真空ポンプ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH109551A (ja) * 1996-06-19 1998-01-16 Osaka Oxygen Ind Ltd 排ガス燃焼方法及びその装置
JPH11218317A (ja) * 1997-11-21 1999-08-10 Ebara Corp 排ガス処理用燃焼器
JP2008540990A (ja) * 2005-05-05 2008-11-20 エドワーズ リミテッド ガス燃焼装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH109551A (ja) * 1996-06-19 1998-01-16 Osaka Oxygen Ind Ltd 排ガス燃焼方法及びその装置
JPH11218317A (ja) * 1997-11-21 1999-08-10 Ebara Corp 排ガス処理用燃焼器
JP2008540990A (ja) * 2005-05-05 2008-11-20 エドワーズ リミテッド ガス燃焼装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016080226A (ja) * 2014-10-15 2016-05-16 エドワーズ株式会社 除害装置
WO2018221021A1 (fr) * 2017-05-29 2018-12-06 カンケンテクノ株式会社 Procédé de détoxication par décompression de gaz d'échappement et dispositif associé
JPWO2018221021A1 (ja) * 2017-05-29 2019-11-07 カンケンテクノ株式会社 排ガスの減圧除害方法及びその装置

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Publication number Publication date
TW201312055A (zh) 2013-03-16

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