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WO2013001982A1 - Corps cylindrique et pompe à vide - Google Patents

Corps cylindrique et pompe à vide Download PDF

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Publication number
WO2013001982A1
WO2013001982A1 PCT/JP2012/064221 JP2012064221W WO2013001982A1 WO 2013001982 A1 WO2013001982 A1 WO 2013001982A1 JP 2012064221 W JP2012064221 W JP 2012064221W WO 2013001982 A1 WO2013001982 A1 WO 2013001982A1
Authority
WO
WIPO (PCT)
Prior art keywords
hole
cylindrical body
hole filling
cylindrical rotating
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2012/064221
Other languages
English (en)
Japanese (ja)
Inventor
勉 高阿田
靖 前島
樺澤　剛志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Priority to JP2013522552A priority Critical patent/JP6126002B2/ja
Publication of WO2013001982A1 publication Critical patent/WO2013001982A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/90—Coating; Surface treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/95—Preventing corrosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced

Definitions

  • the present invention relates to a cylindrical body and a vacuum pump, and relates to a cylindrical body subjected to a corrosion-resistant surface treatment and a vacuum pump containing the cylindrical body.
  • turbo molecular pumps and thread groove pumps are frequently used to realize a high vacuum environment.
  • a structure that allows the vacuum pump to perform an exhaust function is housed in a casing forming an exterior body having an intake port and an exhaust port.
  • the structure that exhibits the exhaust function is roughly divided into a rotating part (rotor part) that is rotatably supported and a fixed part (stator part) fixed to the casing.
  • the rotating part is composed of a rotating shaft and a rotating body fixed to the rotating shaft, and rotor blades (moving blades) provided radially are arranged in multiple stages on the rotating body. .
  • stator blades (stator blades) are arranged in multiple stages alternately with respect to the rotor blades.
  • a motor for rotating the rotating shaft at high speed is provided, and when the rotating shaft rotates at high speed by the action of this motor, gas is sucked from the intake port due to the interaction between the rotor blade and the stator blade, and from the exhaust port. It is supposed to be discharged.
  • the rotating part is usually made of a metal such as aluminum or an aluminum alloy.
  • a cylindrical rotating part that rotates at a high speed is a lighter and stronger fiber-reinforced composite material (fiber-reinforced plastic material, Fiber Reinforced Plastics (hereinafter referred to as FRP material).
  • fibers used for the FRP material include aramid fibers (AFRP), boron fibers (BFRP), glass fibers (GFRP), carbon fibers (CFRP), and polyethylene fibers (DFRP).
  • Patent Document 1 discloses a holder made of a composite material of an organic base material based on a resin filled with reinforcing fibers such as glass fiber or carbon fiber, and continuously wound around a core by a filament winding method.
  • the Bexkart downstream rotor segment (5c) is described.
  • the fibers in the FRP material are held by the resin, but in the process of forming the cylindrical shape of the rotating part, a narrow gap is formed between the fibers and between the fiber layers (between the sheets in the sheet winding) as shown in FIG. 90 (hole, through hole) may be formed.
  • the gap 90 is structurally easy to be configured in the axial direction with respect to the width, and is thin enough that the resin cannot flow.
  • FIG. A long and narrow gap 90 (hole, through hole) was formed so as to be connected to the direction.
  • the resin of the FRP material for example, epoxy resin
  • the resin of the FRP material has a feature that it is easily corroded by halogen gas or the like.
  • the vacuum pump containing the cylindrical rotating part made of this FRP material is corrosive.
  • the gas for example, halogen gas
  • a corrosion-resistant surface treatment on the surface of the part (component) through which the gas flows.
  • a vacuum pump performs a corrosion-resistant surface treatment by electroless nickel plating.
  • Other examples include vapor deposition methods such as physical vapor deposition (PVD), chemical vapor deposition (CVD), sputtering, ion plating, and electrodeposition coating.
  • FIGS. 12 and 13 are views for explaining a conventional gap 90 formed between fibers or between fiber layers.
  • the FRP material is used for the cylindrical rotating portion, as shown in FIGS. 12 and 13, there are the following problems when performing the corrosion-resistant surface treatment 80 (for example, electroplating).
  • the gap 90 is formed from the end face of the FRP material. Therefore, when the corrosion-resistant surface treatment 80 (plating) is performed, a corrosion-resistant surface is formed in a deep portion of the gap 90 (that is, at the back of the hole). In some cases, the treatment 80 was not sufficiently performed, and the surface of the cylindrical rotating portion could not be completely plated. As a result, when corrosive gas has flowed in, corrosion may start from the back of the hole where the plating process was incomplete.
  • an object of the present invention is to provide a cylindrical body made of FRP material and having improved corrosion resistance, and a vacuum pump that includes the cylindrical body and has an extended life due to improved quality of corrosion-resistant surface treatment. .
  • the invention according to claim 1 is a cylindrical body made of a fiber reinforced composite material fixed to a rotor disposed in a vacuum pump, wherein the cylindrical body is filled in a hole formed in the manufacturing process.
  • a cylindrical body characterized in that is provided.
  • a corrosion-resistant surface treatment is performed after the hole filling treatment.
  • a corrosion-resistant surface treatment is performed before the hole filling treatment.
  • the cylindrical body according to the first, second, or third aspect wherein the hole filling process is a process of filling the hole with a hole filling agent.
  • the invention according to claim 5 provides the cylindrical body according to claim 4, wherein the hole filling agent is the same resin as that used in the fiber-reinforced composite material.
  • the invention according to claim 6 is characterized in that, in the hole filling process, the cylindrical body made of the fiber reinforced composite material is heated before the hole is filled with the hole filling agent.
  • Item 6 A cylindrical body according to Item 5 is provided.
  • the cylindrical body according to the fourth, fifth or sixth aspect wherein the hole filling agent has a shrinkage ratio of less than 5% due to curing.
  • the invention according to claim 8 is characterized in that the hole filling process is a process of melting the cylindrical body made of the fiber reinforced composite material.
  • a cylindrical body is provided.
  • the invention according to claim 9 provides the cylindrical body according to claim 8, wherein the fiber-reinforced composite material used for the cylindrical body is a thermoplastic resin.
  • the invention according to claim 10 provides the cylindrical body according to claim 8 or 9, wherein the hole filling process by the process of melting the cylindrical body is heated only at a portion to be filled.
  • the invention according to claim 11 is characterized in that the hole filling process by the process of melting the cylindrical body is a process of heating in a vacuum.
  • a cylindrical body is provided.
  • the invention according to claim 12 is characterized in that the hole filling process by the process of melting the cylindrical body is a process of heating by frictional heat.
  • a cylinder is provided.
  • a vacuum pump including a rotor, wherein the rotor includes a cylindrical body made of a fiber reinforced composite material, and the cylindrical body is any one of the first to twelfth aspects.
  • a vacuum pump characterized by being a cylindrical body according to claim 1.
  • the present invention it is possible to provide a cylindrical body made of FRP material and improved in corrosion resistance, and a vacuum pump whose life is extended by improving the quality of the corrosion-resistant surface treatment.
  • a hole (gap) formed in the manufacturing process of the cylindrical rotating portion is filled in with respect to the cylindrical rotating portion (cylindrical body) manufactured of the FRP material.
  • a corrosion-resistant surface treatment is applied.
  • a hole filling process is performed on the hole formed in the cylindrical rotating part.
  • the hole is filled with resin using painting, embedding, or melting (heating process). Further, a masking process is performed as necessary on a portion where the resin should not be applied or a portion where it is not desired to apply the resin.
  • FIG. 1 is a diagram illustrating a schematic configuration example of a turbo molecular pump 1 including a cylindrical rotating part 9b manufactured by FRP according to the first embodiment of the present invention.
  • 1 shows a cross-sectional view of the turbo molecular pump 1 in the axial direction.
  • a casing 2 that forms an exterior body of the turbo molecular pump 1 has a substantially cylindrical shape, and constitutes a casing of the turbo molecular pump 1 together with a base 3 provided at a lower portion (exhaust port 6 side) of the casing 2. is doing.
  • the gas transfer mechanism which is a structure which makes the turbo molecular pump 1 exhibit an exhaust function is accommodated. This gas transfer mechanism is roughly divided into a rotating part that is rotatably supported and a fixed part that is fixed to the casing.
  • An inlet 4 for introducing gas into the turbo molecular pump 1 is formed at the end of the casing 2.
  • a flange portion 5 is formed on the end surface of the casing 2 on the intake port 4 side so as to project to the outer peripheral side.
  • the base 3 is formed with an exhaust port 6 for exhausting gas from the turbo molecular pump 1.
  • the rotating part is provided on the shaft 7 which is a rotating shaft, the rotor 8 disposed on the shaft 7, a plurality of rotor blades 9a provided on the rotor 8, and the exhaust port 6 side (screw groove type pump part). It is comprised from the cylindrical rotation part 9b.
  • the shaft 7 and the rotor 8 constitute a rotor part.
  • Each rotor blade 9a is composed of blades extending radially from the shaft 7 at a predetermined angle from a plane perpendicular to the axis of the shaft 7.
  • the cylindrical rotating portion 9 b is formed of a cylindrical member having a cylindrical shape concentric with the rotation axis of the rotor 8.
  • a motor unit 20 for rotating the shaft 7 at a high speed is provided in the middle of the shaft 7 in the axial direction, and is included in the stator column 10. Further, on the intake port 4 side and the exhaust port 6 side with respect to the motor portion 20 of the shaft 7, radial magnetic bearing devices 30 and 31 for supporting the shaft 7 in a radial direction (radial direction) in a non-contact manner, a shaft 7 is provided with an axial magnetic bearing device 40 for supporting the shaft 7 in the axial direction (axial direction) in a non-contact manner.
  • a fixing portion is formed on the inner peripheral side of the housing.
  • the fixed portion includes a plurality of fixed blades 50 provided on the intake port 4 side (turbo molecular pump portion), a thread groove spacer 60 provided on the inner peripheral surface of the casing 2, and the like.
  • Each fixed wing 50 is composed of a blade that is inclined by a predetermined angle from a plane perpendicular to the axis of the shaft 7 and extends from the inner peripheral surface of the housing toward the shaft 7.
  • the fixed wings 50 at each stage are separated and fixed by a spacer 70 having a cylindrical shape.
  • the fixed blades 50 and the rotary blades 9a are alternately arranged and formed in a plurality of stages in the axial direction.
  • a spiral groove is formed on the surface facing the cylindrical rotating portion 9b.
  • the thread groove spacer 60 faces the outer peripheral surface of the cylindrical rotating part 9b with a predetermined clearance, and when the cylindrical rotating part 9b rotates at a high speed, the gas compressed by the turbo molecular pump 1 is converted into the cylindrical rotating part. It is sent out to the exhaust port 6 side while being guided by a screw groove (spiral groove) with the rotation of 9b. That is, the thread groove is a flow path for transporting gas.
  • the screw groove spacer 60 and the cylindrical rotating portion 9b are opposed to each other with a predetermined clearance to constitute a gas transfer mechanism that transfers gas through the screw groove.
  • the direction of the spiral groove formed in the thread groove spacer 60 is the direction toward the exhaust port 6 when the gas is transported in the spiral groove in the rotational direction of the rotor 8. Further, the depth of the spiral groove becomes shallower as it approaches the exhaust port 6, and the gas transported through the spiral groove is compressed as it approaches the exhaust port 6. As described above, the gas sucked from the intake port 4 is compressed by the turbo molecular pump unit, and further compressed by the thread groove type pump unit, and discharged from the exhaust port 6.
  • process gases such as halogen gas, fluorine gas, chlorine gas, or bromine gas
  • corrosion-resistant surface treatments such as electroless nickel plating are applied to the locations (components) where the gas comes into contact to prevent corrosion due to the gas. Applied.
  • FIG. 2 shows a conceptual diagram of the cylindrical rotating part 9b according to the first embodiment of the present invention, which has been subjected to the corrosion-resistant surface treatment 80 after the hole filling process.
  • the resin 1000 or the like is used for the hole (gap 90) formed in the cylindrical rotating part 9b made of FRP material.
  • a corrosion-resistant surface treatment 80 such as electroless nickel plating is performed.
  • the hole filling process a method of filling a hole formed in the cylindrical rotating portion 9b with a resin will be described in more detail in (A) to (C).
  • FIG. 3 is a diagram for explaining a hole filling method (A) using painting according to the first embodiment of the present invention.
  • a cylindrical rotating part manufactured by FRP using a liquid coating agent 1004 having a low viscosity and a coating tool 1002 for coating the coating agent 1004.
  • the gap 90 (hole) on the surface of 9b is filled.
  • various methods such as spray painting by spraying, painting by brush, or dip coating (dip coating) by a dip coater are conceivable.
  • the coating agent 1004 material for filling a hole
  • a material generally used for coating can be used as the coating agent 1004 (material for filling a hole).
  • a resin or glass particle not containing fibers can be coated. That is, various coating agents 1004 can be selected in view of the plating process performed after the hole filling process, and can be used according to the purpose and situation.
  • various coating agents 1004 can be selected in view of the plating process performed after the hole filling process, and can be used according to the purpose and situation.
  • (1) Modification 1 In the hole-filling processing method according to the first modification of the first embodiment of the present invention, as the resin 1000 used for the hole-filling process, a material resin, that is, a resin used for the FRP material forming the cylindrical rotating portion 9b, A similar resin is used.
  • the resin used for the FRP forming the cylindrical rotating portion 9b is an epoxy resin
  • the resin 1000 used for the hole filling process is also configured to use the epoxy resin.
  • strength of the cylindrical rotation part 9b can be acquired because resin fills the hole (gap 90) formed in the cylindrical rotation part 9b.
  • FIG. 4 is a view for explaining a masking 1006 according to the third modification of the first embodiment of the present invention, and shows a view in which the inner and outer circumferences other than the end face are masked 1006 in the cylindrical rotating portion 9b.
  • the first embodiment of the present invention after the cylindrical rotating part 9b is manufactured by FRP, hole filling processing is performed on the cylindrical rotating part 9b using the resin 1000. Unevenness is formed on the surface by the applied resin 1000. On the other hand, in order to obtain dimensional accuracy, the unevenness needs to be processed. Therefore, it is desirable that the range in which the unevenness is formed, that is, the range in which the resin 1000 is applied is suppressed to the minimum necessary. .
  • Modification 5 generally, the lower the viscosity of the resin, the shorter the time required for the resin to enter the gap, so that the working efficiency is improved.
  • the viscosity of the resin 1000 used for the hole filling process is too low, the resin 1000 does not efficiently remain in the vicinity of the surface of the hole and may not function as a hole filling agent. Therefore, in the hole filling processing method according to the fifth modification of the first embodiment of the present invention, a resin material having a viscosity enough to stay near the surface of the hole (gap 90) formed in the cylindrical rotating portion 9b is used. Make the configuration. Specifically, it is preferably about 1 to 100 [Pa ⁇ s] depending on the resin used.
  • the resin 1000 used for the hole-filling process is heated during the above-described hole-filling processes according to the first to fifth modifications.
  • the heating temperature is preferably about 40 ° C. because it is easy to handle.
  • the viscosity is reduced to about half even by heating at the above temperature. With this configuration, the viscosity of the resin used for the hole filling process can be reduced to a desired viscosity, so that the resin can easily enter the gap 90 formed in the cylindrical rotating portion 9b and efficiently.
  • a hole filling process can be performed.
  • FIG. 5 is a view for explaining a hole filling method using capillary action according to the first embodiment of the present invention.
  • FIG. 5A is an enlarged view of the ⁇ portion in FIG.
  • the resin 1000 is sucked into the gap 90 portion by capillary action.
  • Modification 7 (Modification related to dip coating)
  • the portion immersed in the resin tank 1001 during the hole filling process in the cylindrical rotating part 9b is the lower part in the axial direction of the cylindrical rotating part 9b (that is, the exhaust port 6). Side).
  • the resin 1000 is brought into contact with only the end surface of the cylindrical rotating portion 9b or a desired range on the end surface side, not the entire cylindrical rotating portion 9b (the entire surface).
  • the resin 1000 used for the hole filling process is applied to the end face of the cylindrical rotating part 9b or only on the end face side. 9b surface treatment etc.) can be reduced.
  • FIG. 6 is a view for explaining a hole filling method (A-2) using gas contraction according to the first embodiment of the present invention.
  • a cylindrical rotating part 9b manufactured by FRP is placed in a resin tank 1001 containing a liquid resin 1000 that is not solidified. Is immersed (soaked) perpendicularly to the resin surface.
  • the end surface of the lower part in the axial direction of the cylindrical rotating part 9b is immersed in (contacts) the resin 1000, and the entire cylindrical rotating part 9b is immersed in the resin 1000. Not configured.
  • the hole filling process for the lower end face the hole filling process for the other end face (end face in the axial direction) is performed. Note that either side of the hole filling process may be performed first.
  • the entire cylindrical rotating portion 9b (the entire surface) may be immersed in the resin 1000. More specifically, in the hole filling method A-2 using gas contraction according to the first embodiment of the present invention, first, the cylindrical rotating portion 9b manufactured by FRP is heated (for example, about 100 to 150 ° C.). Next, the heated cylindrical rotating part 9b is put into the resin tank 1001 in which the resin 1000 having a lower temperature (for example, about 40 ° C.) than the heated cylindrical rotating part 9b is accumulated.
  • FIG. 6B before entering the resin tank 1001, air 1005 exists in the gap 90 formed in the cylindrical rotating portion 9b made of FRP.
  • the cylindrical rotating part 9b manufactured by FRP and the resin 1000 are brought into contact with each other with a temperature difference (the cylindrical rotating part 9b is immersed in the resin tank 1001), the cylindrical rotating part 9b manufactured by the FRP is formed.
  • the air 1005 existing in the gap 90 is cooled and contracts in volume.
  • the resin 1000 is sucked into the space formed by the contraction of the air 1005 as shown in FIG. In this way, the resin 1000 is injected into the gap 90 of the cylindrical rotating part 9b manufactured by FRP using gas contraction, thereby filling the hole (gap 90) formed in the cylindrical rotating part 9b. Can do.
  • Modification 8 Furthermore, in the hole-filling method (A-2) according to the first embodiment of the present invention, when the gas contraction is performed, the cylindrical rotating portion 9b is heated, while the resin 1000 used for the hole-filling process is a heated cylindrical shape. The temperature is lower than that of the rotating part 9b. Specifically, it is desirable to warm the cylindrical rotating part 9b to about 100 ° C. to 150 ° C. Further, it is desirable that the resin 1000 is kept at a room temperature to about 40 ° C. With this configuration, the air present in the gap 90 (hole) formed in the cylindrical rotating portion 9b is also warmed by heating the cylindrical rotating portion 9b. And the said warmed air is cooled by contacting with resin 1000 whose temperature is lower than the said air. By providing such a temperature difference, gas contraction can be efficiently performed in the gap 90 of the cylindrical rotating portion 9b.
  • FIG. 7 is a view for explaining a hole filling method (A-3) using vacuum impregnation according to the first embodiment of the present invention.
  • the cylindrical rotating part 9b manufactured by FRP is put in a vacuum furnace while being immersed in the resin tank 1001, and the cylindrical rotating Air and moisture in the gap 90 formed in the portion 9b are removed by vacuum.
  • the said vacuum furnace is made into an atmospheric condition (FIG. 7 (a)).
  • FIG. 7B is an enlarged view of the ⁇ portion in FIG. As shown in FIG.
  • the cylindrical rotating part 9b is immersed in the resin tank 1001, and the vacuum state is changed to the atmospheric state, so that the gap 90 formed in the cylindrical rotating part 9b and the gap are formed.
  • a large atmospheric pressure difference occurs between the surroundings of the 90 and the resin 1000 is sucked into the gap 90 by the atmospheric pressure difference.
  • the hole formed in the cylindrical rotating part 9b can be filled.
  • the end surface of the lower portion in the axial direction of the cylindrical rotating portion 9b is immersed in the resin 1000 as in the configuration of the modification 7 of the first embodiment of the present invention (contact). You can also do so.
  • the vacuum impregnation is performed separately on both the end faces.
  • the equipment for performing vacuum impregnation can be reduced in scale.
  • air or moisture in the gap 90 formed in the cylindrical rotating part 9b is removed by vacuum, and then the cylindrical rotating part 9b is removed from the resin tank 1001.
  • a dipping configuration is also possible.
  • FIG. 8 is a diagram for explaining a hole filling method (B) by embedding according to the first embodiment of the present invention.
  • the embedding tool 1003 the gap 90 on the surface of the cylindrical rotating part 9b manufactured by FRP is filled.
  • the resin 1000 was manufactured by FRP so as to fill the irregularities on the surface of the cylindrical rotating portion 9b manufactured by FRP. It pushes into the hole formed in the cylindrical rotation part 9b.
  • FIG. 8B it is possible to perform the hole embedding process for the hole formed in the cylindrical rotating part 9b manufactured by FRP.
  • FIG. 9 is a diagram for explaining a hole filling method (C) by melting according to the first embodiment of the present invention.
  • the cylindrical rotating part 9b is heat-treated in order to close the hole (gap 90) formed in the cylindrical rotating part 9b manufactured by FRP.
  • the inlet of the gap 90 formed in the cylindrical rotating portion 9b that is, the end surface in the axial direction of the cylindrical rotating portion 9b
  • FIG. 9A the inlet of the gap 90 formed in the cylindrical rotating portion 9b (that is, the end surface in the axial direction of the cylindrical rotating portion 9b) is melted at the same time.
  • a method for melting the surface the end face of the cylindrical rotating portion 9b is brought into contact with a high temperature member such as a hot plate, and only the vicinity of the end face of the cylindrical rotating portion 9b is melted. In this method, the entire cylindrical rotating part 9b is not heated, but only the vicinity of the end face of the cylindrical rotating part 9b is heated, so that the entire cylindrical rotating part 9b is less likely to be distorted by heat.
  • a method for melting the surface there is a method using frictional heat.
  • the cylindrical rotating portion 9b is rotated and pressed against a fixed object, or the cylindrical rotating portion 9b is fixed and pressed against a rotating member, and melted by frictional heat.
  • the surface near the hole (gap 90) formed in the cylindrical rotating portion 9b manufactured by FRP is melted by heat treatment, and the melted surface is solidified. In this way, the melted portion can be closely adhered and hardened and bonded, and the hole formed in the cylindrical rotating portion 9b manufactured by FRP can be filled.
  • the turbo molecular pump 1 according to the first embodiment of the present invention realizes the quality improvement of the corrosion-resistant surface treatment 80 for the cylindrical rotating portion 9b formed of the fiber reinforced plastic material (FRP material). be able to.
  • the turbo molecular pump 1 according to the first embodiment and each of the modifications of the present invention is provided with the fiber-reinforced plastic material by disposing the cylindrical rotating part 9b made of the fiber-reinforced plastic material with improved corrosion resistance.
  • the performance is improved (particularly, the rotational speed is increased), and the cylindrical rotating part 9b Due to the improved corrosion resistance, it can continue to operate for a longer period of time.
  • FIG. 10 shows a conceptual diagram of a cylindrical rotating portion 9b that performs hole filling after the corrosion-resistant surface treatment 80 according to the second embodiment of the present invention.
  • the corrosion-resistant surface treatment 80 such as electroless nickel plating
  • the cylindrical rotating part 9b made of FRP.
  • a hole filling process is performed on the formed hole (gap 90).
  • the hole filling process since (A) to (C) and modifications (1) to (8) of the first embodiment described above can be applied, description thereof will be omitted.
  • the resin 1000 used for the hole filling process is desirably more resistant to corrosion than the base material (FRP).
  • FRP base material
  • the turbo molecular pump 1 according to the second embodiment of the present invention it is possible to improve the quality of the corrosion-resistant surface treatment 80 for the cylindrical rotating portion 9b formed of a fiber reinforced plastic material (FRP material). it can.
  • the turbo molecular pump 1 according to the second embodiment of the present invention is heavier than the fiber reinforced plastic material by disposing the cylindrical rotating part 9b made of the fiber reinforced plastic material with improved corrosion resistance.
  • the performance particularly the speeding up of the rotation speed
  • the corrosion resistance of the cylindrical rotating part 9b is improved. Therefore, it can continue to operate for a longer period than before.
  • the first embodiment, the second embodiment, and each modification of the present invention can be configured as (i) and (ii) below.
  • the hole filling processing methods (A) to (C) of the first embodiment can be combined. For example, after performing a hole filling process (a hole filling process method) using melting on the cylindrical rotating part 9b manufactured by FRP, a hole filling process (a hole filling process B) using a tool 1003 such as a spatula is further performed.
  • a hole filling process using dip coating (hole filling process A-3)
  • the cylindrical rotating part 9b is heated in the vacuum furnace, and the hole filling process using melting (hole filling method C) is performed.
  • Various combinations can be considered according to the situation and conditions.
  • the base material that is, cylindrical rotation
  • the cylindrical rotation formed of the fiber reinforced plastic material is configured by the configuration of each embodiment and each modification of the present invention described above.
  • the quality improvement of the corrosion-resistant surface treatment 80 for the portion 9b can be realized.
  • the turbo molecular pump 1 according to each embodiment and each modification of the present invention is provided with a cylindrical rotating portion 9b made of a fiber reinforced plastic material having improved corrosion resistance, thereby providing a fiber reinforced plastic material.
  • the performance particularly the rotating performance
  • the corrosion resistance of the cylindrical rotating part 9b is improved. Therefore, it can continue to operate for a longer period than before.

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Abstract

L'invention porte sur une pompe à vide. Un but de cette invention consiste à créer un corps cylindrique formé de FRP (matière plastique renforcée de fibres) qui possède une résistance à la corrosion améliorée, ainsi qu'une pompe à vide qui comprend le corps cylindrique et qui présente une durée de vie allongée grâce à l'amélioration de la qualité du traitement de surface anticorrosion. Dans le mode de réalisation de cette invention, en ce qui concerne la partie cylindrique tournante formée de matière FRP, un traitement de bouchage des cavités est appliqué à une cavité (fente) qui s'est formée dans le processus de fabrication de la partie cylindrique tournante et après qu'un traitement de surface anticorrosion a été appliqué. En variante, le traitement de bouchage de la cavité est appliqué à la partie cylindrique tournante après que le traitement de surface anticorrosion a été appliqué. En tant que traitement de bouchage de la cavité, on utilise l'enduction, le noyage ou la fusion (traitement thermique) pour obstruer la cavité au moyen de résine.
PCT/JP2012/064221 2011-06-30 2012-05-31 Corps cylindrique et pompe à vide Ceased WO2013001982A1 (fr)

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JP2013522552A JP6126002B2 (ja) 2011-06-30 2012-05-31 円筒体の製造方法及び真空ポンプの製造方法

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JP2011-146396 2011-06-30

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US9433835B2 (en) 2013-04-01 2016-09-06 Acushnet Company Golf club head with improved striking face

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62153164A (ja) * 1985-12-27 1987-07-08 東邦レーヨン株式会社 炭素繊維強化炭素複合材料の製造法
JPH0291270A (ja) * 1988-09-08 1990-03-30 Kawasaki Steel Corp 耐酸化性炭素繊維強化炭素材料およびその製造方法
JPH0543364A (ja) * 1991-08-12 1993-02-23 Kawasaki Steel Corp 耐酸化性炭素繊維強化炭素複合材料及びその製造方法
JPH05124884A (ja) * 1991-11-01 1993-05-21 Nissan Motor Co Ltd 炭素繊維／炭素複合材
JP2004278512A (ja) * 2002-10-11 2004-10-07 Alcatel 複合材を用いたスカート（ｃｏｍｐｏｓｉｔｅｓｋｉｒｔ）を有するターボ／ドラッグポンプ
JP2005180265A (ja) * 2003-12-18 2005-07-07 Boc Edwards Kk 真空ポンプ
WO2008038591A1 (fr) * 2006-09-28 2008-04-03 Toray Industries, Inc. Procédé de fabrication d'une base préimprégnée composite, d'une base multicouche et d'une matière plastique renforcée de fibres

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5995113A (ja) * 1982-11-22 1984-06-01 Mitsubishi Electric Corp 繊維強化プラスチツクパイプ成形方法
JP4057101B2 (ja) * 1997-07-18 2008-03-05 株式会社 ケミックス 合成樹脂等真空含浸方法
JP2009285917A (ja) * 2008-05-28 2009-12-10 Mitsubishi Heavy Ind Ltd 複合材構造物の修理方法および複合材構造物
EP2361742B1 (fr) * 2008-11-18 2018-06-27 Mitsubishi Heavy Industries, Ltd. Équipement pour la fabrication d'un matériau composite et procédé de fabrication d'un matériau composite

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62153164A (ja) * 1985-12-27 1987-07-08 東邦レーヨン株式会社 炭素繊維強化炭素複合材料の製造法
JPH0291270A (ja) * 1988-09-08 1990-03-30 Kawasaki Steel Corp 耐酸化性炭素繊維強化炭素材料およびその製造方法
JPH0543364A (ja) * 1991-08-12 1993-02-23 Kawasaki Steel Corp 耐酸化性炭素繊維強化炭素複合材料及びその製造方法
JPH05124884A (ja) * 1991-11-01 1993-05-21 Nissan Motor Co Ltd 炭素繊維／炭素複合材
JP2004278512A (ja) * 2002-10-11 2004-10-07 Alcatel 複合材を用いたスカート（ｃｏｍｐｏｓｉｔｅｓｋｉｒｔ）を有するターボ／ドラッグポンプ
JP2005180265A (ja) * 2003-12-18 2005-07-07 Boc Edwards Kk 真空ポンプ
WO2008038591A1 (fr) * 2006-09-28 2008-04-03 Toray Industries, Inc. Procédé de fabrication d'une base préimprégnée composite, d'une base multicouche et d'une matière plastique renforcée de fibres

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