WO2013078708A1 - Automatic optical detection method and automatic optical detection device - Google Patents
Automatic optical detection method and automatic optical detection device Download PDFInfo
- Publication number
- WO2013078708A1 WO2013078708A1 PCT/CN2011/083531 CN2011083531W WO2013078708A1 WO 2013078708 A1 WO2013078708 A1 WO 2013078708A1 CN 2011083531 W CN2011083531 W CN 2011083531W WO 2013078708 A1 WO2013078708 A1 WO 2013078708A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- image
- automatic optical
- light
- automatic
- liquid crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/29—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using visual detection
- G01N21/293—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using visual detection with colour charts, graduated scales or turrets
Definitions
- the present invention relates to an automatic optical detecting method, and more particularly to an automatic optical detecting method and an optical automatic detecting device applied to a Thin Film Transistor Liquid Crystal Display (TFT-LCD).
- TFT-LCD Thin Film Transistor Liquid Crystal Display
- the automatic optical inspection (AOI) system of the TFT-LCD industry uses the graphic contrast algorithm for detection, that is, through high-definition camera technology, image analog-to-digital conversion technology, data image processing analysis technology, and computer automation. Control techniques and test results statistics analyze the image.
- this system requires the use of expensive AOI equipment, which is costly.
- image contrast technology due to the use of image contrast technology, the amount of information generated by digital-to-analog conversion of images is larger, which has a greater negative impact on graphics processing.
- An automatic optical detection method comprising the following steps:
- each of the color lights has 256 gray scale levels.
- the gray level information corresponding to different regions of the image is acquired by using a reflected light method.
- the ash corresponding to different regions of the image is obtained by using a transmitted light method.
- Order information is obtained by using a transmitted light method.
- An automatic optical detection method for a liquid crystal substrate comprising the following steps:
- each of the color lights has 256 gray scale levels.
- the gray level information corresponding to different regions of the image is acquired by using a reflected light method.
- the gray scale information corresponding to different regions of the image is acquired by using a transmitted light method.
- the liquid crystal substrate comprises an array substrate and a color filter.
- different regions on the side of the color filter include a black matrix, interstitial particles, and a region i corresponding to the flat layer.
- An optical automatic detecting device comprising: a photographing device for acquiring gray scale information of an image of an object to be inspected, and an arithmetic module connected to the photographing device for receiving the gray scale information to generate an automatic optical detection standard image.
- the optical automatic detecting device further comprises a three primary color projection device.
- the above-mentioned automatic optical detection method is projected on the object to be inspected by the three primary colors of light and light, and the different areas of the object to be inspected are formed into images of different colors by the principle of spatial addition, and then the gray scale information of the image is acquired, and an automatic optical inspection is generated.
- Standard image In the case where a defect occurs in the same area, the gray-scale information of the place is abnormal, so it is only necessary to compare the automatic optical inspection standard image with the pre-stored reference pattern to find the image area of the gray-scale anomaly to find the defect and The location of the defect.
- the invention reduces the data volume and processing difficulty of the image processing unit and the statistical analysis unit, and reduces the reliability, accuracy, repeatability and speed of data acquisition, and the invention reduces the detection device. The requirements also help to reduce the input cost of the testing equipment. [Description of the Drawings]
- FIG. 1 is a schematic view showing an image formed by a reflected light method of a first preferred embodiment of the automatic optical detecting method of the present invention
- FIG. 2 is a schematic view showing an image formed by a transmitted light method of a first preferred embodiment of the automatic optical detecting method of the present invention
- FIG. 3 is a schematic diagram showing spatial superimposition imaging of three primary colors of the automatic optical detecting method of the present invention
- FIG. 4 is a schematic diagram of three primary color optical coordinates of the automatic optical detecting method shown in FIG.
- An optical automatic detecting apparatus of the present invention includes a photographing apparatus that acquires gray scale information of an image of an object to be inspected, and an arithmetic module that receives the gray scale information to generate an automatic optical detection standard image.
- the automatic optical detecting method of the optical automatic detecting device can be applied to the detection of a liquid crystal substrate, a surface mounted technology (SMT), or the like.
- the liquid crystal substrate to be applied is exemplified.
- the fabrication process of the TFT-LCD includes an array process (Array) and a color filter process (Color Filter, CF, color filter), and the patterns in the array process and the color film process are multi-layered, and each layer of the pattern is It is different.
- Array array process
- CF color filter process
- the patterns of different regions on the CF side are different.
- the black matrix (BM), the interstitial particles (PS), and the flat layer (Over Coat) have different sizes and heights. .
- the automatic optical detecting method of the present invention takes an example of detecting a color filter of a liquid crystal panel, and includes the following steps:
- A1 Shade projection step.
- the three primary colors are projected onto the color filter, and the light is spatially superimposed to make the images into images of different colors, and a new color is formed where the rays overlap each other.
- the spatially superimposed image has red, blue, and green Color, yellow, white, fuchsia and blue-green, etc., in which yellow, white, purple, and blue-green are formed by superimposing light.
- a series of intermediate colors can be obtained where the light is superimposed, such as red-orange, orange-red, orange, orange, yellow-orange, yellow, yellow-green, green-yellow, and the like.
- green light is mixed with blue light
- the background can present a series of intermediate colors between green and blue.
- the blue light is mixed with the red light to obtain a series of intermediate colors between blue and red.
- the red light and the green light are mixed to obtain a yellow color
- the green light and the blue light are mixed to obtain a blue color.
- the color light projection may be performed by a reflection method or a transmission method; the gray scale has 256 levels, that is, each gray scale information is data for one byte. See Figure 1 for the image effect of the reflection method.
- the image quality formed by the reflected light method is softer, brighter and more scattered.
- the image effect of the transmission method is shown in Figure 2.
- the image formed by the transmitted light method is rich in transition and delicate. , soft, and with three-dimensional changes.
- A2 The grayscale information corresponding to different regions of the image is obtained by the high-definition camera, and an automatic optical inspection standard image of the color filter is generated according to the grayscale information.
- the automatic optical detection method can also be used in the SMT field to perform quality monitoring and inspection on solder paste printing, placement machine mounting, reflow soldering, wave soldering and the like in the SMT production process. For example, it is possible to detect less tin, tin or misalignment of the solder paste.
- the automatic optical detection method of the present invention uniformly projects the three primary color light (R/G/B) light on the formed image, and uses the spatial addition principle to obtain a standard image, thereby reducing the cost of using the AOI device.
- the data volume and processing difficulty of the image processing unit and the statistical analysis unit are reduced, which is beneficial to the reliability, accuracy, repeatability and speed of data acquisition.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nonlinear Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Liquid Crystal (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
一种自动光学检测方法和光学自动检测设备 Automatic optical detecting method and optical automatic detecting device
【技术领域】 [Technical Field]
本发明涉及一种自动光学检测方法, 尤其是一种应用于薄膜晶体管液晶显 示器( Thin Film Transistor Liquid Crystal Display, TFT-LCD )的自动光学检测方 法和光学自动检测设备。 The present invention relates to an automatic optical detecting method, and more particularly to an automatic optical detecting method and an optical automatic detecting device applied to a Thin Film Transistor Liquid Crystal Display (TFT-LCD).
【背景技术】 【Background technique】
目前, TFT-LCD行业的自动光学检查 (Automatic Optical Inspection, AOI) 系统均采用图形对比算法进行检测, 即通过高清晰度的摄像技术、 图像的模数 转换技术、 数据图像处理分析技术、 计算机自动化控制技术以及检测结果统计 对图像进行分析。 然而该系统需要使用价格昂贵的 AOI设备, 成本较高; 同时 由于采用图像对比技术, 使得图像的数模转换产生的信息量更大, 对图形处理 产生较大负面影响。 At present, the automatic optical inspection (AOI) system of the TFT-LCD industry uses the graphic contrast algorithm for detection, that is, through high-definition camera technology, image analog-to-digital conversion technology, data image processing analysis technology, and computer automation. Control techniques and test results statistics analyze the image. However, this system requires the use of expensive AOI equipment, which is costly. At the same time, due to the use of image contrast technology, the amount of information generated by digital-to-analog conversion of images is larger, which has a greater negative impact on graphics processing.
【发明内容】 [Summary of the Invention]
鉴于上述状况, 有必要提供一种筒单且成本较低的自动光学检测方法和光 学自动检测设备。 In view of the above, it is necessary to provide an automatic optical inspection method and an optical automatic inspection apparatus which are simple and low in cost.
一种自动光学检测方法, 该自动光学检测方法包括以下步骤: An automatic optical detection method, the automatic optical detection method comprising the following steps:
A: 色光投射步骤, 采用具有三原色光的灯光投射在待检的物件上, 光线经 过空间叠加形成具有不同色彩的图像; 获取所述图像的不同区域所对应的灰阶 信息, 根据灰阶信息生成所述物件的自动光学检查标准图像; A: a color light projection step, using light having three primary colors to be projected on the object to be inspected, and the light is superimposed by space to form an image having different colors; acquiring grayscale information corresponding to different regions of the image, generating according to grayscale information Automatic optical inspection standard image of the object;
B: 将所述自动光学检查标准图像跟预存的基准图像进行对比检测。 B: The automatic optical inspection standard image is compared with the pre-stored reference image.
优选的, 所述每一种色光均具有 256个灰阶等级。 Preferably, each of the color lights has 256 gray scale levels.
优选的, 所述步骤 A中, 采用反射光法获取所述图像不同区域所对应的灰 阶信息。 Preferably, in the step A, the gray level information corresponding to different regions of the image is acquired by using a reflected light method.
优选的, 所述步骤 A中, 采用透射光法获取所述图像不同区域所对应的灰 阶信息。 Preferably, in the step A, the ash corresponding to different regions of the image is obtained by using a transmitted light method. Order information.
一种液晶基板的自动光学检测方法, 该自动光学检测方法包括以下步骤: An automatic optical detection method for a liquid crystal substrate, the automatic optical detection method comprising the following steps:
A: 色光投射步骤, 采用具有三原色光的灯光投射在待检的液晶基板上, 光 线经过空间叠加形成具有不同色彩的图像; 获取所述图像的不同区域所对应的 灰阶信息, 根据灰阶信息生成所述液晶基板的自动光学检查标准图像; A: a color light projection step, using light having three primary colors of light projected onto the liquid crystal substrate to be inspected, the light is superimposed by space to form an image having different colors; acquiring grayscale information corresponding to different regions of the image, according to grayscale information Generating an automatic optical inspection standard image of the liquid crystal substrate;
B: 将所述自动光学检查标准图像跟预存的基准图像进行对比检测。 B: The automatic optical inspection standard image is compared with the pre-stored reference image.
优选的, 所述每一种色光均具有 256个灰阶等级。 Preferably, each of the color lights has 256 gray scale levels.
优选的, 所述步骤 A中, 采用反射光法获取所述图像不同区域所对应的灰 阶信息。 Preferably, in the step A, the gray level information corresponding to different regions of the image is acquired by using a reflected light method.
优选的, 所述步骤 A中, 采用透射光法获取所述图像不同区域所对应的灰 阶信息。 Preferably, in the step A, the gray scale information corresponding to different regions of the image is acquired by using a transmitted light method.
优选的, 所述液晶基板包括阵列基板和彩色滤光板。 Preferably, the liquid crystal substrate comprises an array substrate and a color filter.
优选的, 所述彩色滤光板侧的不同区域包括黑色矩阵、 间隙粒子和平坦层 对应的区 i或。 Preferably, different regions on the side of the color filter include a black matrix, interstitial particles, and a region i corresponding to the flat layer.
一种光学自动检测设备, 包括获取待检对象图像的灰阶信息的摄影装置, 以及与所述摄影装置信号连接, 用于接收所述灰阶信息生成自动光学检测标准 图像的运算模块。 An optical automatic detecting device, comprising: a photographing device for acquiring gray scale information of an image of an object to be inspected, and an arithmetic module connected to the photographing device for receiving the gray scale information to generate an automatic optical detection standard image.
优选的, 所述光学自动检测设备还包括三原色投射装置。 Preferably, the optical automatic detecting device further comprises a three primary color projection device.
上述自动光学检测方法通过三原色光灯光均勾的投射在待检物件上, 通过 空间加法原理, 待检对象的不同区域形成不同颜色的图像, 然后获取所述图像 的灰阶信息, 生成自动光学检查标准图像。 在相同区域内出现缺陷处, 该处的 灰阶信息就会产生异常, 因此只需要将自动光学检查标准图像跟预先存储的基 准图案比较, 找出灰阶异常的图像区域就能找出缺陷以及该缺陷对应的位置。 本发明由于只需要处理图像的灰阶信息, 降低了图像处理单元及统计分析单元 的数据量及处理难度, 有利于数据采集可靠性、 精度、 重复性及速度的提高, 本发明降低了检测设备的要求, 也有利于降低检测设备的投入成本。 【附图说明】 The above-mentioned automatic optical detection method is projected on the object to be inspected by the three primary colors of light and light, and the different areas of the object to be inspected are formed into images of different colors by the principle of spatial addition, and then the gray scale information of the image is acquired, and an automatic optical inspection is generated. Standard image. In the case where a defect occurs in the same area, the gray-scale information of the place is abnormal, so it is only necessary to compare the automatic optical inspection standard image with the pre-stored reference pattern to find the image area of the gray-scale anomaly to find the defect and The location of the defect. The invention reduces the data volume and processing difficulty of the image processing unit and the statistical analysis unit, and reduces the reliability, accuracy, repeatability and speed of data acquisition, and the invention reduces the detection device. The requirements also help to reduce the input cost of the testing equipment. [Description of the Drawings]
图 1 是本发明自动光学检测方法的第一较佳实施例的反射光法形成的图像 示意图; 1 is a schematic view showing an image formed by a reflected light method of a first preferred embodiment of the automatic optical detecting method of the present invention;
图 2是本发明自动光学检测方法的第一较佳实施例的透射光法形成的图像 示意图; 2 is a schematic view showing an image formed by a transmitted light method of a first preferred embodiment of the automatic optical detecting method of the present invention;
图 3是本发明的自动光学检测方法的三原色空间叠加成像示意图; 图 4是图 3所示的自动光学检测方法的三原色光坐标示意图。 3 is a schematic diagram showing spatial superimposition imaging of three primary colors of the automatic optical detecting method of the present invention; and FIG. 4 is a schematic diagram of three primary color optical coordinates of the automatic optical detecting method shown in FIG.
【具体实施方式】 【detailed description】
下面结合附图和较佳的实施例对本发明作进一步说明。 The invention will now be further described with reference to the drawings and preferred embodiments.
本发明的一种光学自动检测设备, 包括获取待检对象图像的灰阶信息的摄 影装置, 以及接收所述灰阶信息生成自动光学检测标准图像的运算模块。 光学 自动检测设备的自动光学检测方法可应用于液晶基板、 表面贴装技术( Surface Mounted Technology, SMT )等产品的检测, 在本实施例中, 以应用于的液晶基 板中为例加以说明。 An optical automatic detecting apparatus of the present invention includes a photographing apparatus that acquires gray scale information of an image of an object to be inspected, and an arithmetic module that receives the gray scale information to generate an automatic optical detection standard image. The automatic optical detecting method of the optical automatic detecting device can be applied to the detection of a liquid crystal substrate, a surface mounted technology (SMT), or the like. In the present embodiment, the liquid crystal substrate to be applied is exemplified.
所述 TFT-LCD的制作过程包括阵列制程( Array )和彩膜制程( Color Filter, CF, 彩色滤光板), 在该阵列制程和彩膜制程中的图形均有多层组成, 各层图形 均有所不同。 以 CF制程为例, CF侧的不同区域图形均有所不同, 例如黑色矩 阵(Black matrix, BM )、 间隙粒子(PS )、 平坦层(Over Coat ) 的图形在尺寸 和高度上均有所不同。 The fabrication process of the TFT-LCD includes an array process (Array) and a color filter process (Color Filter, CF, color filter), and the patterns in the array process and the color film process are multi-layered, and each layer of the pattern is It is different. Taking the CF process as an example, the patterns of different regions on the CF side are different. For example, the black matrix (BM), the interstitial particles (PS), and the flat layer (Over Coat) have different sizes and heights. .
本发明的自动光学检测方法以检测液晶面板的彩色滤光板为例, 包括如下 步骤: The automatic optical detecting method of the present invention takes an example of detecting a color filter of a liquid crystal panel, and includes the following steps:
A1 : 色光投射步骤。 将三原色光投射在彩色滤光板上, 光线利用空间加法 原理, 经过空间叠加使图像成为具有不同色彩的图像, 且在光线相互叠加的地 方形成了新的颜色。 如图 3 所示, 经过空间叠加后的图像具有红色、 蓝色、 绿 色、 黄色、 白色、 紫红色及蓝绿色等多种颜色, 其中黄色、 白色、 紫红色及蓝 绿色均为光线叠加后形成。 A1 : Shade projection step. The three primary colors are projected onto the color filter, and the light is spatially superimposed to make the images into images of different colors, and a new color is formed where the rays overlap each other. As shown in Figure 3, the spatially superimposed image has red, blue, and green Color, yellow, white, fuchsia and blue-green, etc., in which yellow, white, purple, and blue-green are formed by superimposing light.
当然, 通过改变三原色光的强度可以在光线叠加的地方获得一系列的中间 颜色, 例如红橙色、 橙红色、 橙色、 橙黄色、 黄橙色、 黄色、 黄绿色、 绿黄色 等等。 当绿色光与蓝色光混合时, 背景上可呈现一系列绿与蓝之间的各中间颜 色。 蓝色光与红色光混合, 可得一系列介于蓝与红之间的各中间颜色。 只要各 原色光比例调配得当, 则红色光与绿色光混合可得黄色, 绿色光与蓝色光混合 可得青色。 Of course, by changing the intensity of the three primary colors, a series of intermediate colors can be obtained where the light is superimposed, such as red-orange, orange-red, orange, orange, yellow-orange, yellow, yellow-green, green-yellow, and the like. When green light is mixed with blue light, the background can present a series of intermediate colors between green and blue. The blue light is mixed with the red light to obtain a series of intermediate colors between blue and red. As long as the proportions of the primary colors are properly matched, the red light and the green light are mixed to obtain a yellow color, and the green light and the blue light are mixed to obtain a blue color.
该步骤中色光投射可以采用反射法, 也可以采用透射法; 所述灰阶有 256 个等级,即每个灰阶信息对于一个字节的数据。采用反射法的图像效果参见图 1 , 经过反射光法处理形成的图像光质较为柔和、 光亮较为散射; 采用透射法的图 像效果参见图 2, 经过透射光法处理形成的图像层次过渡丰富、 细腻、 柔和, 且 带有立体变化。 In this step, the color light projection may be performed by a reflection method or a transmission method; the gray scale has 256 levels, that is, each gray scale information is data for one byte. See Figure 1 for the image effect of the reflection method. The image quality formed by the reflected light method is softer, brighter and more scattered. The image effect of the transmission method is shown in Figure 2. The image formed by the transmitted light method is rich in transition and delicate. , soft, and with three-dimensional changes.
A2: 通过高清摄像机获取上述图像的不同区域所对应的灰阶信息, 根据灰 阶信息生成所述彩色滤光板的自动光学检查标准图像。 A2: The grayscale information corresponding to different regions of the image is obtained by the high-definition camera, and an automatic optical inspection standard image of the color filter is generated according to the grayscale information.
B: 将所述自动光学检查标准图像跟预存的基准图像进行对比检测。 B: The automatic optical inspection standard image is compared with the pre-stored reference image.
可以理解, 该自动光学检测方法还可用于 SMT领域, 以在 SMT生产过程 中对锡膏印刷、 贴片机贴片、 回流焊接、 波峰焊接等相关工艺进行品质监控和 检测。 例如, 可以对锡膏的少锡、 多锡或偏位进行检测。 It can be understood that the automatic optical detection method can also be used in the SMT field to perform quality monitoring and inspection on solder paste printing, placement machine mounting, reflow soldering, wave soldering and the like in the SMT production process. For example, it is possible to detect less tin, tin or misalignment of the solder paste.
综上所述, 本案的自动光学检测方法通过三原色光( R/G/B )灯光均匀的投 射在所形成的图像上, 并利用空间加法原理获得标准的图像, 降低了使用 AOI 设备的成本, 同时降低了图像处理单元及统计分析单元的数据量及处理难度, 有利于数据采集可靠性、 精度、 重复性及速度的提高。 In summary, the automatic optical detection method of the present invention uniformly projects the three primary color light (R/G/B) light on the formed image, and uses the spatial addition principle to obtain a standard image, thereby reducing the cost of using the AOI device. At the same time, the data volume and processing difficulty of the image processing unit and the statistical analysis unit are reduced, which is beneficial to the reliability, accuracy, repeatability and speed of data acquisition.
以上所述, 仅是本发明的较佳实施例而已, 并非对本发明作任何形式上的 限制, 虽然本发明已以较佳实施例揭露如上, 然而并非用以限定本发明,任何熟 悉本专业的技术人员, 在不脱离本发明技术方案范围内,当可利用上述揭示的技 术内容做出些许更动或修饰为等同变化的等效实施例,但凡是未脱离本发明技术 The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Although the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the present invention. A skilled person can utilize the techniques disclosed above without departing from the scope of the present invention. Equivalent embodiment of the teachings to make a few changes or modifications to equivalent variations, but without departing from the teachings of the present invention
化与修饰,均仍属于本发明技术方案的范围内。 Both the modification and the modification are still within the scope of the technical solution of the present invention.
Claims
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/376,675 US20130141408A1 (en) | 2011-12-06 | 2011-12-06 | Automatic Optical Detection Method and Optical Automatic Detector |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110396157.7 | 2011-12-02 | ||
| CN201110396157.7A CN102520537B (en) | 2011-12-02 | 2011-12-02 | Automatic optical inspection method and automatic optical inspection equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2013078708A1 true WO2013078708A1 (en) | 2013-06-06 |
Family
ID=46291513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/CN2011/083531 Ceased WO2013078708A1 (en) | 2011-12-02 | 2011-12-06 | Automatic optical detection method and automatic optical detection device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN102520537B (en) |
| WO (1) | WO2013078708A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110597198A (en) * | 2019-08-30 | 2019-12-20 | 彩虹显示器件股份有限公司 | Quality control device, quality control system and quality control method for TFT substrate glass |
| CN113325001A (en) * | 2021-04-12 | 2021-08-31 | 浙江花园新能源有限公司 | Automatic distinguishing and detecting equipment and method for surface appearance flaws of copper foil |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102854195B (en) * | 2012-09-21 | 2014-08-20 | 京东方科技集团股份有限公司 | Method for detecting defect coordinates on color filter |
| CN102866520B (en) * | 2012-10-10 | 2015-12-09 | 深圳市华星光电技术有限公司 | A kind of method of smooth alignment liquid crystal display panel optical detection and checkout equipment thereof |
| CN103076344A (en) * | 2012-12-27 | 2013-05-01 | 深圳市华星光电技术有限公司 | Defect detection method and device for display panel |
| CN103698334B (en) * | 2013-10-25 | 2016-01-27 | 明基材料有限公司 | The pin hole Defect Detection system of barrier film and detection method thereof |
| CN104749801B (en) * | 2013-12-31 | 2019-09-20 | 研祥智能科技股份有限公司 | High Precision Automatic optical detecting method and system |
| CN104460104B (en) | 2014-12-26 | 2017-07-21 | 深圳市华星光电技术有限公司 | The method for determining the edge of color filter block and the overlapping region of black matrix |
| CN105954900A (en) * | 2016-07-08 | 2016-09-21 | 京东方科技集团股份有限公司 | Substrate detection method and substrate detection device |
| CN108279237A (en) * | 2018-01-02 | 2018-07-13 | 京东方科技集团股份有限公司 | A kind of Systems for optical inspection and detection method |
| TWI764179B (en) * | 2020-06-19 | 2022-05-11 | 財團法人紡織產業綜合研究所 | Textile detecting system and textile detecting method |
| CN112345452A (en) * | 2020-11-06 | 2021-02-09 | 罗建华 | Lamplight adjusting method, storage medium and system |
| CN116215066A (en) * | 2023-02-25 | 2023-06-06 | 杭州羽邦印务有限公司 | Production equipment and production method of anti-counterfeiting printed matter |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59153108A (en) * | 1983-02-22 | 1984-09-01 | Matsushita Electric Ind Co Ltd | Surface defect inspection method for specular objects |
| JP2009063301A (en) * | 2007-09-04 | 2009-03-26 | Nec Lcd Technologies Ltd | Color filter inspection apparatus and color filter inspection method |
| CN101676712A (en) * | 2008-09-16 | 2010-03-24 | 中茂电子(深圳)有限公司 | Optical detecting system and method thereof |
| CN102200519A (en) * | 2010-03-26 | 2011-09-28 | 郭上鲲 | Inspection system |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101839868A (en) * | 2009-03-10 | 2010-09-22 | 深圳市运英软件开发有限公司 | Illumination source for detecting SMT welding quality and detecting system |
| CN201707304U (en) * | 2010-06-08 | 2011-01-12 | 惠州市德赛西威汽车电子有限公司 | Device for automated optical inspection of surface of product |
-
2011
- 2011-12-02 CN CN201110396157.7A patent/CN102520537B/en not_active Expired - Fee Related
- 2011-12-06 WO PCT/CN2011/083531 patent/WO2013078708A1/en not_active Ceased
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59153108A (en) * | 1983-02-22 | 1984-09-01 | Matsushita Electric Ind Co Ltd | Surface defect inspection method for specular objects |
| JP2009063301A (en) * | 2007-09-04 | 2009-03-26 | Nec Lcd Technologies Ltd | Color filter inspection apparatus and color filter inspection method |
| CN101676712A (en) * | 2008-09-16 | 2010-03-24 | 中茂电子(深圳)有限公司 | Optical detecting system and method thereof |
| CN102200519A (en) * | 2010-03-26 | 2011-09-28 | 郭上鲲 | Inspection system |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110597198A (en) * | 2019-08-30 | 2019-12-20 | 彩虹显示器件股份有限公司 | Quality control device, quality control system and quality control method for TFT substrate glass |
| CN110597198B (en) * | 2019-08-30 | 2023-12-01 | 彩虹显示器件股份有限公司 | Quality control device, quality control system and quality control method for TFT substrate glass |
| CN113325001A (en) * | 2021-04-12 | 2021-08-31 | 浙江花园新能源有限公司 | Automatic distinguishing and detecting equipment and method for surface appearance flaws of copper foil |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102520537B (en) | 2015-02-11 |
| CN102520537A (en) | 2012-06-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2013078708A1 (en) | Automatic optical detection method and automatic optical detection device | |
| JP4428296B2 (en) | Display panel module and display device | |
| CN101251658A (en) | Display quality detection device and detection method | |
| TWI590725B (en) | Detecting device and detecting method of appearance of printed circuit board | |
| CN103792705B (en) | Detecting method and detecting device for detecting substrate defects | |
| TWI484164B (en) | Optical re - inspection system and its detection method | |
| CN102460106A (en) | Defect inspection method and defect inspection device for display panel | |
| CN104122264B (en) | Apparent flaws detecting system and method | |
| KR102632831B1 (en) | AI system for wafer defect detection | |
| WO2017202114A1 (en) | Method and apparatus for determining illumination intensity for inspection, and optical inspection method and apparatus | |
| CN102768017B (en) | Line width measuring device and method | |
| CN106770361A (en) | A kind of full-automatic screen optical detection apparatus and detection method | |
| TW201702581A (en) | Inspecting device and method for inspecting inspection target | |
| CN101443649A (en) | Surface inspection device | |
| JP2014142339A (en) | Inspection device | |
| CN104166250A (en) | A flat panel display panel uniformity detection method and system thereof | |
| KR20140067785A (en) | Apparatus for automatic inspection of the color difference mura for the display panel and method for the same | |
| TWI843820B (en) | Method of color inspection by using monochrome imaging with multiple wavelengths of light | |
| JP5326990B2 (en) | Application state inspection apparatus and method, and program | |
| CN102445324B (en) | Equipment and method for detecting color filter | |
| US20130141408A1 (en) | Automatic Optical Detection Method and Optical Automatic Detector | |
| CN213364197U (en) | A screen detection device | |
| TWI490463B (en) | Detecting method and detecting system for distinguishing the difference of two workpieces | |
| JP4197488B2 (en) | Polarizer pasting position inspection device | |
| JP2006145228A (en) | Nonuniformity defect detection method and apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WWE | Wipo information: entry into national phase |
Ref document number: 13376675 Country of ref document: US |
|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 11876813 Country of ref document: EP Kind code of ref document: A1 |
|
| NENP | Non-entry into the national phase |
Ref country code: DE |
|
| 122 | Ep: pct application non-entry in european phase |
Ref document number: 11876813 Country of ref document: EP Kind code of ref document: A1 |