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WO2013066145A1 - Système microfluidique et procédé associé - Google Patents

Système microfluidique et procédé associé Download PDF

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Publication number
WO2013066145A1
WO2013066145A1 PCT/MY2012/000156 MY2012000156W WO2013066145A1 WO 2013066145 A1 WO2013066145 A1 WO 2013066145A1 MY 2012000156 W MY2012000156 W MY 2012000156W WO 2013066145 A1 WO2013066145 A1 WO 2013066145A1
Authority
WO
WIPO (PCT)
Prior art keywords
chamber
electrostatic
fluid
microfluidic device
curved sidewall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/MY2012/000156
Other languages
English (en)
Inventor
Hing Wah Lee
Chia Sheng Daniel Bien
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mimos Bhd
Original Assignee
Mimos Bhd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Bhd filed Critical Mimos Bhd
Publication of WO2013066145A1 publication Critical patent/WO2013066145A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0003Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005Lift valves
    • F16K99/0007Lift valves of cantilever type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40Static mixers
    • B01F25/42Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/431Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40Static mixers
    • B01F25/42Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/431Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor
    • B01F25/4317Profiled elements, e.g. profiled blades, bars, pillars, columns or chevrons
    • B01F25/43172Profiles, pillars, chevrons, i.e. long elements having a polygonal cross-section
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40Static mixers
    • B01F25/42Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/431Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor
    • B01F25/43197Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor characterised by the mounting of the baffles or obstructions
    • B01F25/431971Mounted on the wall
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/60Pump mixers, i.e. mixing within a pump
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30Micromixers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/71Feed mechanisms
    • B01F35/717Feed mechanisms characterised by the means for feeding the components to the mixer
    • B01F35/71805Feed mechanisms characterised by the means for feeding the components to the mixer using valves, gates, orifices or openings
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/75Discharge mechanisms
    • B01F35/754Discharge mechanisms characterised by the means for discharging the components from the mixer
    • B01F35/7547Discharge mechanisms characterised by the means for discharging the components from the mixer using valves, gates, orifices or openings
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502738Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by integrated valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • F04B43/046Micropumps with piezoelectric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0003Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0028Valves having multiple inlets or outlets
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0034Operating means specially adapted for microvalves
    • F16K99/0042Electric operating means therefor
    • F16K99/0051Electric operating means therefor using electrostatic means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/08Geometry, shape and general structure
    • B01L2300/0861Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0867Multiple inlets and one sample wells, e.g. mixing, dilution
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00Moving or stopping fluids
    • B01L2400/04Moving fluids with specific forces or mechanical means
    • B01L2400/0475Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
    • B01L2400/0481Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure squeezing of channels or chambers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00Moving or stopping fluids
    • B01L2400/06Valves, specific forms thereof
    • B01L2400/0633Valves, specific forms thereof with moving parts
    • B01L2400/0638Valves, specific forms thereof with moving parts membrane valves, flap valves

Definitions

  • the present invention relates to a microfluidic device. More particularly, relates to integration and miniaturization of various fluid manipulation components, particularly a multichannel planar pumping unit, a valve and a mixer onto a single chip for microfluidic applications such as clinical genome analysis, macromolecules separation, enzymatic assays, cell-based assays and any operation that involves a minute volume of fluid samples.
  • Microfluidic systems are well known for manipulating and analysis of fluid samples at sub-millimeter scale. To date, intensive investigations and studies have been conducted to miniaturize and integrate various components su ⁇ ch as pumps, ' valves, filters, mixers, and heater on a single device for a variety of biological and chemical applications. These include drug discovery and development, gene sequencing, immunoassays, in vitro fertilization, and peptide analysis.
  • microfluidic systems that are integrated with various manipulation components on a single device, as understood, provides not only the ease of manipulation of fluids within micrometer-sized channels precisely, they also offers several advantages such as low sample volumes, low chemical consumption, ' fast response time, multiple simultaneous assays, and portability. Furthermore, such microfluidic systems provide a platform for a complete on- chip analysis, where sample preparation, pre-treatment , analytical reaction, detection and results, can be performed within the systems.
  • microfluidic pump includes a pumping chamber positioned between an inlet and an outlet; a plurality of moveable fingers positioned in a wall of said pumping chamber, said fingers being arranged in a row along said wall; and a plurality of thermal bend actuators, each actuator being associated with a respective finger such that actuation of said thermal bend actuator causes movement of said respective finger into said pumping chamber, wherein said pump is configured to provide a peristaltic pumping action in said pumping chamber via movement of said fingers.
  • CMOS circuitry that is- configured to either provide a valve action, a mixing action or a pumping action in the device, by altering an actuation sequence of the finger actuators.
  • This disclosed microfluidic system suffers from several limitations.
  • This single inlet and outlet microfluidic device does not allow parallel introduction and simultaneous or subsequent loading of multiple fluid samples into the device. Contamination of fluid samples to be tested or analyzed in the device is often resulted due to a single input channel is used. For example, during a cleaning process, a cleaning solution would have to be introduced through the same inlet port as the sample to be analyzed, and it thus contaminates the sample in the inlet port. Accordingly, it is the primary object of the present invention to overcome the aforementioned drawbacks.
  • the present invention provides a microfluidic device that allows multiple fluid samples to be independently introduced into the device, and thereby preventing contamination of the fluid samples.
  • It is another object of the present invention to provide a miniaturized microfluidic system comprises a multichannel planar pump unit having a pair of electrostatic-driven membrane electrode for manipulating fluid flow and plurality of mixer structures integrated in the pumping chamber thereof.
  • a microfluidic device having a planar pumping unit integrated with a plurality of mixer structures and a pair of electrostatic- driven membrane electrodes that can be served as fluid flow control valves.
  • said microfluidic device comprises a pumping unit having a pump chamber includes an upper wall, a bottom wall, a first curved sidewall having at least two inlets and a second curved sidewall having at least two outlets, wherein the first curved sidewall and the second curved sidewall are placed in an opposing manner; at least two inflow fluid channels connected to said at least two inlets of the pump chamber for introduction of fluids into the chamber; at least two outflow fluid channels connected to said at least two outlets of the pump chamber for withdrawal of fluid from the chamber; a plurality of mixer structures provided within the cavity of the pump chamber for homogenization of fluids; and a pair of electrostatic-driven membrane electrodes (35a, 35b) disposed within the chamber and configured to manipulate fluid flow in the device
  • Figure 1 illustrates a cross-sectional view
  • microfluidic device of a preferred embodiment accordance to the present invention.
  • Figure 2a-2d illustrates the fluid manipulation process adopted by a microfluidic device of a preferred embodiment with accordance to the present invention.
  • FIG. 1 illustrates a cross-sectional view of microfluidic device (10) constructed in accordance to a preferred embodiment of the present invention.
  • Said microfluidic device (10) includes a planar pumping unit having a pump chamber (15) connected to at least two inflow fluid channels
  • the plurality of mixer structures (25) described herein may be constructed in any configuration and of any materials that assists in enhancing interfacial area between the fluids to be mixed and/or expediting the homogenization of fluids within the chamber (15) .
  • Non-limiting example of mixer structures (25) includes a parallel-plate mixer, a Y- mixer, a planar-type mixer, a spiral-shaped mixer, a circular-shaped mixer and a serpentine type mixer.
  • the plurality of mixer structures (25) have a configuration that is in-plane with the pumping unit.
  • the pump chamber (15) includes an upper wall (15a), a bottom wall (15b), a first curved sidewall (15c) having at least two inlets (30a) and a second curved sidewall (15d) having at least two outlets (30b) .
  • Each inlet (30a) disposed through the first curved sidewall (15c) is connected to a corresponding inflow fluid channel (20a) for introduction of fluid into the chamber (15) .
  • each outlet (30b) disposed through the second curved sidewall (15d) directs fluid to exit from the chamber
  • first sidewall (15c) has a cross-section profile resembling an inverted "L"
  • second curved sidewall- (15d), in cross-section has a substantially "L” shaped profile
  • the second (15d) curved sidewalls may have a substantially “L” shaped an inverted “L” shaped, respectively, in the cross-section profile.
  • the pump chamber (15) further includes a pair of electrostatic-driven membrane electrodes that can be served as flow control valves for manipulating fluid flow in the device (10) .
  • Said pair of electrostatic-driven membrane electrodes include a first membrane electrode (35a) and a second membrane electrode (35b), that are spaced apart to one another and are in proximity to the inner surface of their respective sidewalls (15c, 15d) of the pump chamber (15).
  • These membrane electrodes (35a, 35b) are configured in such a manner that allows fluid flow in an open state and stops fluid flow in a closed state.
  • the open state and the closed state of the membrane electrodes (35a, 35b) in accordance to the preferred embodiment, is controlled by application of voltage.
  • the open state of these membrane electrodes (35a, 35b) is defined . by non-deformed or non-deflected state of the membrane electrode, and in other words, such electrode membrane is in its inactivated state with no voltage supply.
  • the membrane electrodes (35a, 35b) upon application of electrical voltage, will be deformed or deflected towards the curvature surface of the sidewalls (15c, 15d) so that they can seal the inlets (30a) and outlets (30b) of the sidewalls (15c, 15d) , and thereby preventing the flow of fluids from the inlets (30a) or out of the pump chamber (15).
  • each membrane electrode (35a, 35b) is controlled by a respective actuator.
  • the deflection angle of the membrane electrodes (35a, 35b) relative to the curvature surface of the sidewalls (15c, 15d) may be varied with different voltage applied thereto.
  • Inlets (30a) or outlets (30b) provided on the curved surface of the sidewalls (15c, 15d) may not be fully sealed if there is low voltage supplied. These unsealed inlets (30a) or outlets (30b) may thus allow fluids to flow from the inflow (20a) or through the outflow fluid channel (20b) that they communicate with.
  • fluids from different inflow channels (20a) can sequentially be introduced into the chamber (15) .
  • fluids from the pump chamber (15) are also allowed to exit the chamber (15) in a sequential manner through the unsealed outlets (30b).
  • the microfluidic device constructed in accordance to the preferred embodiment may allow multiple fluids from different fluid channels to be independently introduced into the chamber.
  • the pump chamber (15) is associated with a pumping structure for fluid pumping operations and such pumping structure may be operatively coupled with the membrane electrodes (35a, 35b) of the chamber (15) for fluid manipulation.
  • Said pumping structure can be driven by, includes but not limited to electrostatic, thermo-pneumatic, piezoelectric, bimetallic, and shape-memory type actuation. It is preferred that a diaphragm pump is employed as the pumping structure in the microfluidic device (10) of the present invention.
  • a second electrostatic-driven membrane electrode (35b) is actuated to a closed state while a first electrostatic-driven membrane electrode (35a) is actuated to a partially open state with a first inlet (30a') being unsealed for permitting a first fluid sample to flow from the connected first inflow fluid channel (20a') into the chamber (15).
  • a diaphragm pump associated with the chamber (15) is also manipulated to assist the first fluid sample from the unsealed first fluid channel (20a') to the chamber (15) .
  • the first electrostatic-driven membrane electrode (35a) is further actuated to unseal a second inlet (30a") for directing a second fluid sample therethrough into the chamber (15) containing the first fluid sample. Both fluid samples are subsequently homogenously mixed by the plurality of mixer structures (25) disposed within the chamber (15).
  • the second membrane electrode (35b) is then actuated to a fully open state, unsealing the outlets (30b), and in the same time, triggering the diaphragm pump to pump the mixture out of the chamber (15) to the outflow fluid channels (20b) through the outlets (30b). This fluid withdrawal operation is shown in Figure 2c.
  • Figure 2d illustrates the cleaning operation adopted by the microfluidic device (10) ⁇ in accordance to the preferred embodiment of the present invention.
  • the first electrostatic-driven membrane electrode (35a) is actuated to a fully open state.
  • Inlets (30a) provided on the first curved sidewalls are no longer sealed by said first membrane electrode (35a) .
  • Cleaning reagent is then introduced into the chamber (15) through the newly unsealed third inlet (20a"' ) . It should be understood that cleaning agent also can be introduced into the chamber (15) from the first (20a') and the second inlets (20") .
  • the diaphragm pump is triggered to reduce pressure in the chamber, resulting cleaning fluid to be introduced therein via the inlets (20a) . Subsequently, actuating the second membrane electrode (35b) to a fully open state and pumping the cleaning reagent out through the unsealed outlets (30b) by means of the diaphragm pump. Cleaning steps as above may be repeated until a desired level of cleaning is obtained. It should be understood that, upon completion of the cleaning, the first membrane electrode (35a) is actuated to its fully closed state, inhibiting cleaning reagent from entering the pump chamber (15) .

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Dispersion Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

Un dispositif microfluidique (10) comprend une unité de pompage comprenant un corps de pompe (15) comportant une paroi supérieure (15a), une paroi inférieure (15b), une première paroi latérale incurvée (15c) comportant au moins deux orifices d'admission (30a) et une seconde paroi latérale incurvée (15d) comportant au moins deux orifices d'évacuation (30b), la première paroi incurvée (15c) et la seconde paroi incurvée (15d) étant placées à l'opposé l'une de l'autre ; au moins deux conduits d'arrivée de fluide (20a) reliés audits orifices d'admission (30a) du corps de pompe (15) en vue de l'introduction de fluides dans le corps de pompe (15) ; au moins deux conduits de sortie de fluide (20b) reliés auxdits orifices d'évacuation (30b) du corps de pompe (15) en vue de l'évacuation du fluide présent dans le corps de pompe (15) ; une pluralité de structures de mélange (25) situées au sein de la cavité du corps de pompe (15) et destinées à homogénéiser les fluides ; et une paire d'électrodes membranaires à entraînement électrostatique (35a, 35b), disposées au sein du corps de pompe (15) et conçues pour modifier l'écoulement des fluides dans le dispositif.
PCT/MY2012/000156 2011-11-01 2012-06-28 Système microfluidique et procédé associé Ceased WO2013066145A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
MYPI2011005274 2011-11-01
MYPI2011005274A MY155726A (en) 2011-11-01 2011-11-01 A microfluidic system and method thereof

Publications (1)

Publication Number Publication Date
WO2013066145A1 true WO2013066145A1 (fr) 2013-05-10

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WO (1) WO2013066145A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018009222A1 (fr) * 2016-07-08 2018-01-11 Hewlett-Packard Development Company, L.P. Dispositif microfluidique pour mélange de fluides
EP3503985B1 (fr) * 2016-08-29 2022-09-28 Mott Corporation Mélangeur statique haute performance

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002022492A2 (fr) * 2000-09-14 2002-03-21 Mcnc Appareil a soupape electrostatique a membrane souple microelectromecanique et procedes de fabrication associes
US20020086149A1 (en) * 2000-12-28 2002-07-04 Swartz Lars E. Thin laminate film structure for electrostatic or magnetic applications and method for making same
WO2003076331A2 (fr) * 2002-03-08 2003-09-18 Universität Bremen Procede de fabrication de pieces micro-mecaniques et pieces ainsi fabriquees
DE10333741A1 (de) * 2003-07-23 2005-02-17 Festo Ag & Co.Kg Mikroventil mit elektrostatischem Antriebsprinzip
US20060076068A1 (en) * 2004-10-13 2006-04-13 Kionix Corporation Microfluidic pump and valve structures and fabrication methods
US20090317298A1 (en) 2008-06-20 2009-12-24 Silverbrook Research Pty Ltd Microfluidic System Comprising Microfluidic Pump, Mixer or Valve
WO2011122932A1 (fr) * 2010-03-29 2011-10-06 Mimos Berhad Micropompe plane à micromélangeurs passifs intégrés
WO2011133014A1 (fr) * 2010-04-19 2011-10-27 Mimos Berhad Micro-pompe plane comportant des micro-soupapes intégrées

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002022492A2 (fr) * 2000-09-14 2002-03-21 Mcnc Appareil a soupape electrostatique a membrane souple microelectromecanique et procedes de fabrication associes
US20020086149A1 (en) * 2000-12-28 2002-07-04 Swartz Lars E. Thin laminate film structure for electrostatic or magnetic applications and method for making same
WO2003076331A2 (fr) * 2002-03-08 2003-09-18 Universität Bremen Procede de fabrication de pieces micro-mecaniques et pieces ainsi fabriquees
DE10333741A1 (de) * 2003-07-23 2005-02-17 Festo Ag & Co.Kg Mikroventil mit elektrostatischem Antriebsprinzip
US20060076068A1 (en) * 2004-10-13 2006-04-13 Kionix Corporation Microfluidic pump and valve structures and fabrication methods
US20090317298A1 (en) 2008-06-20 2009-12-24 Silverbrook Research Pty Ltd Microfluidic System Comprising Microfluidic Pump, Mixer or Valve
WO2011122932A1 (fr) * 2010-03-29 2011-10-06 Mimos Berhad Micropompe plane à micromélangeurs passifs intégrés
WO2011133014A1 (fr) * 2010-04-19 2011-10-27 Mimos Berhad Micro-pompe plane comportant des micro-soupapes intégrées

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018009222A1 (fr) * 2016-07-08 2018-01-11 Hewlett-Packard Development Company, L.P. Dispositif microfluidique pour mélange de fluides
US11439963B2 (en) 2016-07-08 2022-09-13 Hewlett-Packard Development Company, L.P. Microfluidic device for fluid mixture
EP3503985B1 (fr) * 2016-08-29 2022-09-28 Mott Corporation Mélangeur statique haute performance

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