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WO2012113361A1 - Capteur inductif - Google Patents

Capteur inductif Download PDF

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Publication number
WO2012113361A1
WO2012113361A1 PCT/DE2011/000178 DE2011000178W WO2012113361A1 WO 2012113361 A1 WO2012113361 A1 WO 2012113361A1 DE 2011000178 W DE2011000178 W DE 2011000178W WO 2012113361 A1 WO2012113361 A1 WO 2012113361A1
Authority
WO
WIPO (PCT)
Prior art keywords
inductive sensor
sensor according
electrical conductor
coil
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2011/000178
Other languages
German (de)
English (en)
Inventor
Jörg GROSS
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balluff GmbH
Original Assignee
Balluff GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balluff GmbH filed Critical Balluff GmbH
Priority to DE112011104961.7T priority Critical patent/DE112011104961B8/de
Priority to PCT/DE2011/000178 priority patent/WO2012113361A1/fr
Publication of WO2012113361A1 publication Critical patent/WO2012113361A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
    • H03K17/945—Proximity switches
    • H03K17/95—Proximity switches using a magnetic detector
    • H03K17/952—Proximity switches using a magnetic detector using inductive coils
    • H03K17/9522—Proximity switches using a magnetic detector using inductive coils with a galvanically isolated probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2053—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
    • H03K17/945—Proximity switches
    • H03K17/95—Proximity switches using a magnetic detector
    • H03K17/9505—Constructional details
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
    • H03K17/945—Proximity switches
    • H03K17/95—Proximity switches using a magnetic detector
    • H03K17/952—Proximity switches using a magnetic detector using inductive coils
    • H03K2017/9527—Details of coils in the emitter or receiver; Magnetic detector comprising emitting and receiving coils

Definitions

  • the invention is based on an inductive sensor according to the preamble of the independent claim.
  • CONFIRMATION COPY pronounced sensitivity in the direction of the target, ie in the detection direction of the inductive sensor, and at the same time as possible no sensitivity to an electromagnetically active material in his
  • inductive sensor in which two coils are connected as excitation coils and a receiving coil is provided, the same problem occurs. Also in this case, electrically conductive or magnetizable material in the region of the inductive sensor should have as little influence as possible on the measurement result and ultimately on the achievable safe detection range.
  • an alignment of a magnetic field can be achieved by means of an eddy current shield, which encloses a coil system in the shape of a cup.
  • This solution has two significant disadvantages. On the one hand, a considerable wall thickness of the eddy current shielding is required for a sufficient shielding effect, which is difficult to accommodate in small designs. On the other hand, the eddy current shield causes a distortion of the excitation field symmetry, so that the suppression of the exciter field can no longer be ensured by a differential arrangement of detection coils.
  • US Pat. No. 6,057,683 describes an inductive sensor which has an exciter coil which is arranged within an electrically conductive sensor housing.
  • the sensor housing is designed as a field concentrator, which has a slotted cylinder wall and a slotted bottom.
  • the invention has for its object to provide an inductive sensor with the largest possible detection range.
  • the arrangement of at least one eddy-current-carrying conductor in the spool lenan extract of the invention leads to a bundling of the exciter field, without further stress radial space of the sensor housing.
  • magnetic field can be shaped such that substantially only one orthogonal to the axial sensor direction spanned surface of substantially axial flux density components with positive and negative amplitudes is interspersed.
  • the magnetic flux is bundled by the at least one eddy currents leading conductor in a comparable manner in the direction of the target to be detected, as determined by the known ferromag netic
  • Fluxing devices is achieved, but without their disadvantages, which are particularly in the influence of external magnetic fields.
  • the absence of break-prone ferrite flux conductors also increases mechanical robustness.
  • the measures according to the invention enable the realization of a sensor housing of the inductive sensor with a small housing diameter.
  • the achievable field concentration is advantageous for a flush installation of the inductive sensor according to the invention in a sensor holder.
  • the measures according to the invention furthermore make it possible to minimize the sensitivity of the overall system to electromagnetically active objects in the immediate vicinity of the inductive sensor.
  • the at least one eddy currents leading conductor is to be designed such that the eddy currents distributed over the circumference of the at least one exciter coil, resulting in extinction of the exciter field in individual areas. This requirement is achieved by the realization of the electrical conductor with the leading in the circumferential direction of the exciting coil at least two each an eddy current areas.
  • FIG. 2 shows an isometric view of eddy current-carrying regions of the electrical conductor
  • FIG. 5 shows an isometric view of the underside of the two-part eddy current conductor shown in FIG. 4,
  • FIG. 7 shows an isometric view of the upper side of a one-piece conductor, which is arranged in a housing and carries eddy currents according to an alternative embodiment
  • FIG. 8 shows an isometric view of the underside of the conductor shown in FIG. 7,
  • FIG. 11 shows an isometric view of the top side of the conductor carrying eddy currents shown in FIG. 10,
  • FIG. 13 shows a sectional view of a two-part eddy-current-carrying conductor according to yet another embodiment
  • FIG. 16 shows a further embodiment of an inductive sensor according to the invention with two coils.
  • FIG. 1 shows a sectional view through an inductive sensor 10 according to the invention with two electrical conductors 12, each of which contains a plurality of regions 16a, 16b, 16c which, in the presence of an excitation field, each lead to an eddy current.
  • the inductive sensor 10 contains a coil arrangement 18, which in the exemplary embodiment shown comprises an exciter coil 20 and two detection coils 22, 24.
  • an eddy currents leading conductor 12 is disposed in front of and an eddy currents of leading conductors 12 behind the excitation coil 20.
  • the protective cover 38 is realized as a metallic, ie electrically conductive protective cover 38.
  • the inductive sensor 10 provides a switching signal obtained by means of an electronic circuit, not shown in more detail, when a target 40 located within a detection range A is detected.
  • an alternating magnetic field is generated by means of the at least one exciter coil 20, which in the detection direction 26 of the inductive
  • the target 40 must have magnetic field-influencing properties, so that a change of the magnetic field can occur on the basis of the voltage induced in at least one detection coil 22, 24, which is evaluated.
  • the inductive sensor 10 can be operated as a gradiometer.
  • the coil arrangement 18 with the three coils 20, 22, 24 is to be tuned in such a way that the two detection coils 22, 24 are adjusted without the presence of a target 40 and no difference signal occurs.
  • the reverse function is also realizable, so that the gradiometer is matched with the present target 40 in the switching point.
  • a target 40 within the detection area A results in a difference of the induced voltages due to the difference in the distance of the detection coils 22, 24 from the target 40, which is detected and evaluated.
  • a suppression of the field of excitation with respect to the detection coil 24 in front of the detection direction 26 also results from the fact that the positive and negative axial flux density components of the exciter field alternating over the circumference of the coil arrangement 18 are integrated over the cross section of the front detection coil 24 , largely cancel.
  • the flux density component passing through the front detection coil 24 and resulting from the influence of the target 40 is distributed coaxially.
  • a directional separation between the exciter field and the field reaction of the target 40 to be detected results, so to speak.
  • the rear detection coil 22, as seen in the detection direction 26, can be dispensed with in principle.
  • a corresponding embodiment will be shown in more detail below in connection with FIG. 16.
  • An increase in the detection range A of the inductive sensor 10 is achieved by the inventively provided at least one electrical conductor 12, the at least two circumferentially arranged in the circumferential direction of the exciter coil 20 areas 16a, 16b, 16c, which in the presence of an exciter field each carry an eddy current.
  • leading conductors 12 may be present in the inductive sensor 10 according to the invention, which is preferably arranged in front of the at least one exciter coil 20 with respect to the detection direction 26.
  • the eddy-current-carrying conductor 12 may also be positioned behind the at least one exciter coil 20.
  • an eddy current of leading conductors 12 in the detection direction 26 in front of the excitation coil 20 and a further eddy current of leading conductors 12 are arranged behind the exciter coil 20 by way of example.
  • the at least one eddy currents leading conductor 12 leads in the circumferential direction of the inductive sensor 10 to alternately oppositely directed magnetic flux density components, which largely cancel out in the vicinity of the inductive sensor 10 outside the sensor housing 28, so that the resulting magnetic field is at least approximately zero.
  • electromagnetically active material in the outer region of the inductive sensor 10 according to the invention can not affect the magnetic flux in the at least one detection coil 22, 24.
  • the sensitivity in the detection direction 26 can be significantly increased, so that the Detection area A is larger.
  • the optimization can be done in terms of both the amount of the field and its phase.
  • the protective cover 38 is realized with electrically conductive material, the alternating directions of the axial flux density components that enforce the protective cover 38 cause the influence of the detection signal by the eddy currents induced by the excitation field in the protective cover 38 to be comparatively small.
  • FIG. 2 shows an isometric view of an electrical conductor 12 used in the exemplary embodiment according to FIG. 1 with the regions 16a, 16b, 16c, 16d, which each lead to an eddy current in the presence of an exciter field.
  • the optimization of the magnetic field is preferably carried out on the basis of experiments or calculations which leads to a specification of the shape of the eddy-current-carrying conductor 12 and its geometrical arrangement in the inductive sensor 10.
  • the respective one eddy current leading portions 16a, 16b, 16c, 16d are characterized in particular by the respectively formed surface, which is penetrated by the field lines of the exciter field of the excitation coil 20.
  • the area of the eddy-current-carrying regions 16a, 16b, 16c, 16d effective in relation to the exciting field is to be matched to the desired intensity of the eddy currents.
  • the eddy currents cause caused field lines are directed opposite to the field lines of the exciter field.
  • the unspecified distances of an eddy-current-carrying conductor 12 to individual coils 20, 22, 24 can be varied.
  • the embodiment shown in FIG. 2 is cylindrical regions 16a, 16b, 16c, 16d, which have a predetermined thickness D. exhibit.
  • the eddy currents leading conductor 12 can also be replaced by a
  • FIG. 3 shows a field distribution 50 in a plan view in the direction of the protective cover 38 of the inductive sensor 10 according to the invention.
  • the reproduced field distribution 50 is based on eight regions 16 of an eddy-current-carrying conductor 12 which have eight partial regions 52 with respect to the circumference of the inductive sensor 10. in which the magnetic field with respect to the sensor axis 34 points perpendicularly out of the plane of the drawing and alternately corresponding to eight subregions 54, in which the magnetic field with respect to the sensor axis 34 perpendicular to the Pointing into the drawing plane. It is also essential that outside the dashed line indicated circumference 56 of the sensor housing 28 almost no magnetic field occurs more.
  • FIG. 4 shows an isometric view of the upper side of a two-part eddy-current-carrying conductor 12.
  • an inner first part 60 of the eddy-current-carrying conductor 12 and a radially adjacent inner part 60 an outer second part 62 of FIG Eddy currents leading conductor 12 is arranged.
  • the excitation coil 20 is positioned at least approximately in the radial direction at the transition between the inner first and outer second part 60, 62 of the eddy-current-carrying conductor 12.
  • the outer second part 62 of the eddy-current-carrying conductor 12 has, with respect to the circumferential direction, a plurality of rotationally symmetrically arranged regions 16a, 16b, 16c, 16d, which are bevelled with respect to the sensor axis 34, the bevels 64a, 64b, 64c, 64d in the detection direction 26 are inclined inwards to the front.
  • the inner first part 60 of the eddy-current-carrying conductor 12 has recesses 66a, 66b which lie opposite the segments 16a, 16b, 16c, 16d of the outer part 62.
  • the recesses 66a, 66b are chamfered in the radial sensor direction, wherein the bevels 68a, 68b correspond to the slopes 64a, 64b, 64c, 64d of the outer second part 62.
  • the bevels 68a, 68b are chamfered to the rear outside.
  • FIG. 5 shows an isometric view of the underside of the two-part eddy-current-carrying conductor 12 according to FIG. 4, matching parts of FIGS. 4 and 5 being denoted the same. This also applies to the following figures.
  • FIG. 6 shows a sectional view of the two-part eddy current-carrying conductor 12 according to FIGS. 4 and 5 with a view of the underside.
  • Figure 7 shows an isometric view of the top of a one-piece, arranged in the inner housing 30 eddy currents leading conductor 12.
  • the eddy currents leading conductor 12 is realized as an electrically conductive disk 70, which is positioned in the detection embodiment 26 seen in the embodiment shown in front of the exciting coil 20.
  • the disc 70 has channels 72 in the axial direction, which are provided in a radius which is greater than the radius of the excitation coil 20 and alternate with further, tilted to the axial direction of channels 74, which on the front side with respect to the detection direction 26 in a radius larger than the radius of the excitation coil 20, but on the side of the exciting coil 20 but have a radius which is smaller than the radius of the exciting coil 20.
  • the channels 72, 74 are arranged in the embodiment shown rotationally symmetrical with respect to the sensor axis 34.
  • the channels 72 and / or the tilted channels 74 may additionally be tilted in the tangential direction. Furthermore, the channels 72 and / or the tilted channels 74 may have a cross-section that is in relation to the Sensor direction 26 increases or decreases.
  • the axial channels 72 each form a region 16a, 16b.
  • the regions 16a, 16b are rotationally symmetrical with respect to the sensor axis 34 in the exemplary embodiment.
  • FIG. 8 shows an isometric view with a view of the underside of the eddy current 12 shown in FIG. 7
  • FIG. 9 shows a sectional view of a side view of the eddy current 12 shown in FIGS. 7 and 8.
  • FIG. 10 shows an isometric view of the underside of a two-part eddy-current-carrying conductor 12 according to a further embodiment.
  • the two parts 60, 62 of the eddy-current-carrying conductor 12 have wavy boundaries 80, 82 with respect to the circumferential direction.
  • the wave peaks of one part 60 of the eddy-current-carrying conductor 12 are opposite the troughs of the other part 62.
  • a balancing possibility for balancing the positive and negative axial flux density components can be created by the two parts 60, 62 being rotated against one another.
  • the wave-shaped boundaries 80, 82 in this case have a sawtooth-shaped course in a cylindrical sectional area.
  • the second outer part 62 preferably has slopes 84, in particular in the region of the wave crests, which are inclined inwards with respect to the detection direction 26. Accordingly, the first inner part 60 also have bevels 86 on its wave crests which are inclined outwards in relation to the detection direction 26.
  • Figure 1 1 shows an isometric view of the top of the eddy current conductor 12 shown in Figure 10 and Figure 12 shows a cross-sectional view of the eddy currents shown in Figures 10 and 11 leading conductor 12 in which the ramps 84, 86 stand out clearly.
  • FIG. 13 shows a sectional view of a two-part electrical conductor 12 with regions 16a, 16b, 16c, 16d, which in each case lead to an eddy current in the presence of an exciter field, according to yet another embodiment.
  • the at least one excitation coil 20 is arranged in a gap 90 between the inner and outer part 60, 62 of the electrical conductor 12.
  • the at least one excitation coil 20 can be arranged generally at the transition between the inner first and outer second part (60, 62) of the electrical conductor (12) viewed in the radial direction, so that the at least one exciter coil 20, as seen in the detection direction 26, also before or can be arranged behind the gap 90.
  • the at least one exciter coil 20 can be arranged according to an embodiment with appropriate isolation even within the electrical conductor 12. Another difference is that, according to the exemplary embodiment shown in FIG. 13, the outer part 62 of the electrical conductor 12 is integrated into the inner housing 30. With this measure, the
  • FIG. 14 shows an isometric view of the underside of the eddy current conductor 12 shown in FIG. 13, which provides a complete view of the at least one exciter coil 20 positioned in the gap 90.
  • Figure 15 shows an alternative embodiment of the inductive sensor 10 according to the invention with two eddy currents leading conductors 12 and three coils 20, 22, 24.
  • the structure corresponds essentially to the reproduced in Figure 1 structure, but the two eddy currents leading conductors 12 are designed differently.
  • the arranged between the excitation coil 20 and the rear detection coil 22 eddy currents leading conductor 12 is configured as shown in Figure 2, while arranged between the excitation coil 20 and the front detection coil 24 eddy currents leading conductor 12 as shown in Figures 10-12 configured is.
  • FIG. 16 shows a further embodiment of the inductive sensor 10 according to the invention, in which apart from the excitation coil 20 only one detection coil 24 positioned in the detection direction 26 and positioned in front of the exciter coil 20 is provided.
  • the eddy currents leading conductor 12 is disposed between the two coils 20, 24.
  • the eddy-current-carrying conductor 12 is configured as shown in FIGS. 10 to 12.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

L'invention concerne un capteur inductif (10) ayant un agencement de bobines (18) qui comporte au moins une bobine excitatrice (20) et au moins une bobine de détection (22, 24), l'agencement de bobines (18) pouvant être affecté par une interaction électromagnétique avec un objectif à détecter (40). Le capteur inductif (10) selon l'invention est caractérisé en ce qu'il comporte un conducteur électrique (12) qui est placé dans le champ d'excitation de la ou les bobines excitatrices (20) et qui présente au moins deux parties (16a, 16b, 16c, 16d) dans la direction de la circonférence de la bobine excitatrice (20), lesquelles, en présence d'un champ d'excitation, conduisent chacune un courant de Foucault. Le ou les conducteurs électriques (12), avec les parties (16a, 16b, 16c, 16d) conduisant des courants de Foucault, amènent à une focalisation du champ magnétique alternatif produit par la ou les bobines excitatrices (20) si bien que, sensiblement, seule une surface disposée orthogonalement à la direction axiale du capteur est exposée à des composantes substantiellement axiales de densité de flux, d'amplitudes positives et négatives. On obtient ainsi une insensibilité élevée par rapport aux matériaux électromagnétiquement actifs en dehors du capteur inductif (10) selon l'invention et on assure une distance de détection (A) élevée.
PCT/DE2011/000178 2011-02-24 2011-02-24 Capteur inductif Ceased WO2012113361A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE112011104961.7T DE112011104961B8 (de) 2011-02-24 2011-02-24 Als Gradiometer ausgestalteter induktiver Sensor
PCT/DE2011/000178 WO2012113361A1 (fr) 2011-02-24 2011-02-24 Capteur inductif

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/DE2011/000178 WO2012113361A1 (fr) 2011-02-24 2011-02-24 Capteur inductif

Publications (1)

Publication Number Publication Date
WO2012113361A1 true WO2012113361A1 (fr) 2012-08-30

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ID=44625911

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2011/000178 Ceased WO2012113361A1 (fr) 2011-02-24 2011-02-24 Capteur inductif

Country Status (2)

Country Link
DE (1) DE112011104961B8 (fr)
WO (1) WO2012113361A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014116415A1 (de) * 2014-11-11 2016-05-12 Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG Gradiometer zur Bestimmung einer elektrischen Leitfähigkeit eines Mediums
CN106716837A (zh) * 2014-08-22 2017-05-24 巴鲁夫公司 具有集成设计的感应式接近度传感器
DE102018109507A1 (de) 2017-04-20 2018-10-25 Balluff Gmbh Printspulenvorrichtung

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US5248989A (en) 1988-02-04 1993-09-28 Unisan Ltd. Magnetic field concentrator
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DE102006040550A1 (de) * 2005-08-31 2007-03-01 Ifm Electronic Gmbh Induktiver Näherungsschalter
DE102006053222B4 (de) 2006-11-11 2009-01-29 Werner Turck Gmbh & Co. Kg Induktiver Näherungsschalter mit an einem Schirm befestigter Ergänzungsspule

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US3249857A (en) * 1961-10-20 1966-05-03 Schlumberger Prospection Borehole investigating apparatus having a support member and transducer means enclosed in a compressively stressed sleeve member
US3887865A (en) * 1974-02-15 1975-06-03 Magnetic Analysis Corp Eddy current testing apparatus using segmented monoturn conductive members
SU957016A1 (ru) * 1980-06-06 1982-09-07 Институт Прикладной Физики Ан Бсср Магнитоупругий преобразователь механических напр жений
US5248989A (en) 1988-02-04 1993-09-28 Unisan Ltd. Magnetic field concentrator
US6057683A (en) 1998-02-25 2000-05-02 Cashcode Company Inc. Induction sensor having conductive concentrator with measuring gap
DE102006040550A1 (de) * 2005-08-31 2007-03-01 Ifm Electronic Gmbh Induktiver Näherungsschalter
DE102006053222B4 (de) 2006-11-11 2009-01-29 Werner Turck Gmbh & Co. Kg Induktiver Näherungsschalter mit an einem Schirm befestigter Ergänzungsspule

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106716837A (zh) * 2014-08-22 2017-05-24 巴鲁夫公司 具有集成设计的感应式接近度传感器
US20170272071A1 (en) * 2014-08-22 2017-09-21 Balluff Gmbh Inductive proximity sensor of integrated design
US10298230B2 (en) * 2014-08-22 2019-05-21 Balluff Gmbh Inductive proximity sensor of integrated design
CN106716837B (zh) * 2014-08-22 2020-12-11 巴鲁夫公司 具有集成设计的感应式接近度传感器
DE102014116415A1 (de) * 2014-11-11 2016-05-12 Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG Gradiometer zur Bestimmung einer elektrischen Leitfähigkeit eines Mediums
DE102018109507A1 (de) 2017-04-20 2018-10-25 Balluff Gmbh Printspulenvorrichtung
DE102018109507B4 (de) * 2017-04-20 2025-07-17 Balluff Gmbh Printspulenvorrichtung

Also Published As

Publication number Publication date
DE112011104961A5 (de) 2013-11-21
DE112011104961B4 (de) 2023-11-16
DE112011104961B8 (de) 2024-01-04

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