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WO2012018175A3 - 세리아계 연마재의 재생방법 - Google Patents

세리아계 연마재의 재생방법 Download PDF

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Publication number
WO2012018175A3
WO2012018175A3 PCT/KR2011/004612 KR2011004612W WO2012018175A3 WO 2012018175 A3 WO2012018175 A3 WO 2012018175A3 KR 2011004612 W KR2011004612 W KR 2011004612W WO 2012018175 A3 WO2012018175 A3 WO 2012018175A3
Authority
WO
WIPO (PCT)
Prior art keywords
ceria
based abrasive
organic acid
frit glass
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2011/004612
Other languages
English (en)
French (fr)
Other versions
WO2012018175A2 (ko
Inventor
강우규
김원열
송영춘
황광택
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ranco Co Ltd
Original Assignee
Ranco Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ranco Co Ltd filed Critical Ranco Co Ltd
Priority to JP2013520637A priority Critical patent/JP5530564B2/ja
Priority to CN201180037945.5A priority patent/CN103079764B/zh
Publication of WO2012018175A2 publication Critical patent/WO2012018175A2/ko
Publication of WO2012018175A3 publication Critical patent/WO2012018175A3/ko
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Treatment Of Sludge (AREA)

Abstract

본 발명은, 세리아계 연마재, 프릿 글래스, 연마패드 및 무기계 응집제를 포함하는 연마 폐기물에서 세리아계 연마재를 재생하는 방법에 있어서, 반응조에 상기 세리아계 연마재와 반응하여 염을 형성하지 않는 유기산 용액과 상기 연마 폐기물을 첨가하고 교반하여, 상기 유기산에 의한 산처리에 의하여 상기 무기계 응집제는 이온종으로 변화되고 상기 프릿 글래스 및 상기 연마패드는 부유되는 단계와, 부유된 상기 프릿 글래스 및 상기 연마패드를 제거하는 단계 및 세정 및 건조 공정을 수행하여 세리아계 연마재를 얻는 단계를 포함하며, 상기 유기산의 pH는 0.5∼6.0 범위인 것을 특징으로 하는 세리아계 연마재 재생방법에 관한 것이다. 본 발명에 의하면, 연마 폐기물에서 세리아계 연마재를 친환경적으로 재생할 수 있고, 고순도의 세리아계 연마재를 얻을 수 있으며, 수율이 매우 높다.
PCT/KR2011/004612 2010-08-03 2011-06-24 세리아계 연마재의 재생방법 Ceased WO2012018175A2 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013520637A JP5530564B2 (ja) 2010-08-03 2011-06-24 セリア系研磨材の再生方法
CN201180037945.5A CN103079764B (zh) 2010-08-03 2011-06-24 氧化铈系研磨材料的再生方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2010-0074846 2010-08-03
KR1020100074846A KR101225746B1 (ko) 2010-08-03 2010-08-03 세리아계 연마재의 재생방법

Publications (2)

Publication Number Publication Date
WO2012018175A2 WO2012018175A2 (ko) 2012-02-09
WO2012018175A3 true WO2012018175A3 (ko) 2012-04-12

Family

ID=45559891

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/004612 Ceased WO2012018175A2 (ko) 2010-08-03 2011-06-24 세리아계 연마재의 재생방법

Country Status (4)

Country Link
JP (1) JP5530564B2 (ko)
KR (1) KR101225746B1 (ko)
CN (1) CN103079764B (ko)
WO (1) WO2012018175A2 (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101411926B1 (ko) * 2012-06-05 2014-06-26 주식회사 랜코 세리아계 연마재 폐기물을 재활용한 산화세륨의 제조방법
JP5943529B2 (ja) * 2012-09-13 2016-07-05 エルジー・ケム・リミテッド セリア含有廃研磨材の再生方法
WO2014042430A1 (ko) * 2012-09-13 2014-03-20 주식회사 엘지화학 세리아 함유 폐연마재의 재생 방법
WO2014042431A1 (ko) * 2012-09-14 2014-03-20 주식회사 엘지화학 세리아 함유 폐연마재의 재생 방법
WO2014042494A1 (ko) * 2012-09-17 2014-03-20 주식회사 엘지화학 세리아 함유 폐연마재의 재생 방법
CN104619806A (zh) * 2012-09-17 2015-05-13 株式会社Lg化学 含氧化铈废磨料的再生方法
CN102936461B (zh) * 2012-11-14 2014-07-30 内蒙古科技大学 一种富铈稀土抛光粉及其制备方法
SG11201507820WA (en) * 2013-04-09 2015-10-29 Dowa Eco System Co Ltd Method for manufacturing regenerated cerium oxide-based abrasive particles, and regenerated particles
KR101486439B1 (ko) * 2013-04-15 2015-01-27 한국세라믹기술원 세리아계 연마재 폐기물을 재활용한 탄산세륨의 제조방법
JP5967246B2 (ja) * 2015-04-03 2016-08-10 信越化学工業株式会社 酸化セリウムの回収方法
JP6803981B2 (ja) * 2017-06-01 2020-12-23 日揮触媒化成株式会社 ナノバブル含有無機酸化物微粒子およびそれを含む研磨剤

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10216554A (ja) * 1997-02-13 1998-08-18 Hitachi Ltd 研磨方法
JP2004211013A (ja) * 2003-01-08 2004-07-29 Mitsui Chemicals Inc 研磨材及びその製造方法
JP2005014187A (ja) * 2003-06-27 2005-01-20 Mitsui Mining & Smelting Co Ltd セリウム系研摩材のリサイクル方法
JP2008034827A (ja) * 2006-06-26 2008-02-14 Nippon Valqua Ind Ltd 化学的機械研磨材のリサイクル方法及びその装置
KR20080036816A (ko) * 2006-10-24 2008-04-29 동우 화인켐 주식회사 디스플레이용 유리패널의 연마를 위한 폐연마재의 재생방법

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000109793A (ja) 1998-10-02 2000-04-18 Daido Steel Co Ltd 研磨剤の再生方法
JP3072151U (ja) * 2000-03-30 2000-10-06 三倉物産株式会社 無機研磨剤廃液の再生処理装置
JP2003019669A (ja) * 2001-07-09 2003-01-21 Asahi Glass Co Ltd 研磨材スラリーのフィルタリング方法
JP2003205460A (ja) * 2002-01-15 2003-07-22 Speedfam Co Ltd 酸化セリウム系研磨剤再生方法
CN1194060C (zh) * 2003-07-24 2005-03-23 南开大学 再生稀土抛光粉的制备方法
JP4729428B2 (ja) * 2006-04-07 2011-07-20 Ａｇｃセイミケミカル株式会社 セリウム系研磨剤の再生方法
JP4580433B2 (ja) 2008-04-14 2010-11-10 野村マイクロ・サイエンス株式会社 研磨用スラリーの再生方法
WO2011099197A1 (ja) * 2010-02-15 2011-08-18 三井金属鉱業株式会社 セリウム系研摩材の再生方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10216554A (ja) * 1997-02-13 1998-08-18 Hitachi Ltd 研磨方法
JP2004211013A (ja) * 2003-01-08 2004-07-29 Mitsui Chemicals Inc 研磨材及びその製造方法
JP2005014187A (ja) * 2003-06-27 2005-01-20 Mitsui Mining & Smelting Co Ltd セリウム系研摩材のリサイクル方法
JP2008034827A (ja) * 2006-06-26 2008-02-14 Nippon Valqua Ind Ltd 化学的機械研磨材のリサイクル方法及びその装置
KR20080036816A (ko) * 2006-10-24 2008-04-29 동우 화인켐 주식회사 디스플레이용 유리패널의 연마를 위한 폐연마재의 재생방법

Also Published As

Publication number Publication date
JP5530564B2 (ja) 2014-06-25
KR20120021478A (ko) 2012-03-09
CN103079764B (zh) 2015-07-15
CN103079764A (zh) 2013-05-01
WO2012018175A2 (ko) 2012-02-09
JP2013536091A (ja) 2013-09-19
KR101225746B1 (ko) 2013-02-15

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