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WO2012091282A2 - Haptic actuator using cellulose paper actuator film and method for manufacturing same - Google Patents

Haptic actuator using cellulose paper actuator film and method for manufacturing same Download PDF

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Publication number
WO2012091282A2
WO2012091282A2 PCT/KR2011/008567 KR2011008567W WO2012091282A2 WO 2012091282 A2 WO2012091282 A2 WO 2012091282A2 KR 2011008567 W KR2011008567 W KR 2011008567W WO 2012091282 A2 WO2012091282 A2 WO 2012091282A2
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WO
WIPO (PCT)
Prior art keywords
film
cellulose
actuator
haptic actuator
paper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2011/008567
Other languages
French (fr)
Korean (ko)
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WO2012091282A3 (en
Inventor
김상연
김재환
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Industry University Cooperation Foundation of Korea University of Technology and Education
Original Assignee
Industry University Cooperation Foundation of Korea University of Technology and Education
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020100137273A external-priority patent/KR101075263B1/en
Priority claimed from KR1020110059520A external-priority patent/KR101300287B1/en
Application filed by Industry University Cooperation Foundation of Korea University of Technology and Education filed Critical Industry University Cooperation Foundation of Korea University of Technology and Education
Publication of WO2012091282A2 publication Critical patent/WO2012091282A2/en
Publication of WO2012091282A3 publication Critical patent/WO2012091282A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/016—Input arrangements with force or tactile feedback as computer generated output to the user
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end

Definitions

  • the present invention relates to a haptic actuator and a manufacturing method thereof, and more particularly to a haptic actuator using a cellulose paper actuator film and a manufacturing method thereof.
  • Haptics is a technology that makes the user feel the sense of touch, power, and movement through the keyboard, mouse, joystick, and touch screen, which are the input devices of the user.
  • the word comes from the Greek adjective haptesthai, which means “touching.” It is also called computer tactile technology.
  • haptic technology that is developed to satisfy it is a haptic technology that delivers touch and power.
  • Haptic technology is used in touch screens of computers and the like.
  • haptic devices and haptic renderings can be widely applied to various fields including medical simulators, aircraft and fighter simulators, vehicle simulators, and game simulators.
  • haptic devices are expected to be installed as well as monitors and speakers used as output devices of computers.
  • research on haptic technology will be very active because of its great economic potential in connection with the leisure industry.
  • the conventional haptic device is difficult to be applied to a visual display such as a monitor or liquid crystal due to its large size and thick thickness.
  • the transparency is low, it cannot be applied on the visual display device, and there is a limit to be embedded inside the device.
  • a component such as a polymer (polymer) used in the haptic device has a problem that becomes a source of environmental pollution.
  • the present invention has been proposed to solve the above problems of the conventionally proposed methods, comprising a cellulose paper actuator film having a piezoelectric phenomenon and a metal electrode for applying electricity to the paper actuator film, thereby manufacturing in a thin film form It is an object of the present invention to provide a haptic actuator using a cellulose paper actuator film, which is capable of high transparency and capable of generating a displacement of a size sufficient to stimulate the sensory receptors of the skin depending on the electricity applied.
  • Another object of the present invention is to provide a haptic actuator using a cellulose paper actuator film that is environmentally friendly and human-friendly by using cellulose which is an environmentally friendly material.
  • the present invention by manufacturing a haptic actuator by including a cellulose thin film as the lower plate and the operating portion, a cellulose-based, which can be manufactured in a thin thin film form and can be manufactured on a visual display device with high transparency
  • a haptic actuator by including a cellulose thin film as the lower plate and the operating portion, a cellulose-based, which can be manufactured in a thin thin film form and can be manufactured on a visual display device with high transparency
  • Another object of the present invention is to provide a method for manufacturing a film-type haptic actuator.
  • It is characterized in that it comprises a metal electrode located on the upper surface of the paper actuator film.
  • Located on the lower surface of the paper actuator film may further comprise a metal film in the form of a thin film.
  • the metal electrode Preferably, the metal electrode, the metal electrode, and
  • An angle of 40 to 50 ° may be achieved with the cellulose fiber direction of the paper actuator film.
  • the paper actuator film and the metal film are preferably identical to the paper actuator film and the metal film.
  • the metal electrode Preferably, the metal electrode, the metal electrode, and
  • the paper actuator film Preferably, the paper actuator film,
  • the paper actuator film is plural,
  • the metal electrode may be located on a top surface of the plurality of paper actuator films.
  • step (2) (4) forming a support by partially removing the photoresist applied in step (2);
  • step (1) Preferably, in step (1),
  • the lower plate can be a cellulose thin film.
  • It may be a cellulose acetate thin film prepared by the rotary coating method.
  • step (2) the ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇
  • the photoresist may be applied to 90 ⁇ 110 ⁇ m.
  • step (3) the step (3)
  • An exposure process may be performed using a photomask of a lattice or line pattern in pixels.
  • the operation part may be attached onto the formed adhesive layer.
  • the haptic actuator using the cellulose paper actuator film provided in the present invention, by including a cellulose paper actuator film having a piezoelectric phenomenon and a metal electrode for applying electricity to the paper actuator film, it is possible to manufacture in a thin thin film form and transparency Is high, and depending on the electricity applied, it is possible to generate a displacement of a size that can sufficiently stimulate the sensory receptors of the skin.
  • the haptic actuator by including the cellulose thin film as the lower plate and the operating unit, it is possible to manufacture a haptic actuator that can be manufactured in a thin thin film form and can be applied on the visual display device with high transparency.
  • FIG. 1 illustrates a haptic actuator using a cellulose paper actuator film according to an embodiment of the present invention.
  • FIG. 2 is a cross-sectional view of a haptic actuator using a cellulose paper actuator film according to an embodiment of the present invention.
  • FIG 3 is a cross-sectional view of a haptic actuator using a cellulose paper actuator film according to another embodiment of the present invention.
  • FIG. 4 is a diagram illustrating a configuration of a system for experimenting with a haptic actuator using a cellulose paper actuator film according to an embodiment of the present invention.
  • FIG. 5 is a view showing the bending displacement of the haptic actuator using a cellulose paper actuator film according to an embodiment of the present invention.
  • FIG. 6 is a diagram illustrating a comparison of frequency and displacement according to a standardized actuator length in a haptic actuator using a cellulose paper actuator film according to an embodiment of the present invention.
  • FIG. 7 is a view showing a flow of a manufacturing method of a cellulose-based film-type haptic actuator according to an embodiment of the present invention.
  • FIG. 8 is a diagram illustrating a haptic actuator manufactured by a method for manufacturing a cellulose-based film-type haptic actuator according to an embodiment of the present invention.
  • Figure 9 is a view showing the side of the cellulose acetate thin film prepared by a rotation coating method in the manufacturing method of the cellulose-based film-type haptic actuator according to an embodiment of the present invention.
  • FIG. 10 is a view showing a process according to the flow of the manufacturing method of the cellulose-based film-type haptic actuator according to an embodiment of the present invention.
  • haptic actuator 110 paper actuator film
  • the haptic actuator 100 using the cellulose paper actuator film 110 may include a paper actuator film 110 and a metal electrode 120.
  • the metal film 130 may further include an adhesive 140.
  • the haptic actuator 100 using the cellulose paper actuator film 110 is the main material, applying electricity to the paper actuator film 110 It can be configured to include a metal electrode 120 for generating a displacement.
  • the detailed configuration of the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention will be described in detail.
  • the paper actuator film 110 may be made of cellulose in a thin film form with a piezoelectric phenomenon. Since cellulose is known to have a piezoelectric effect, it can be used as the paper actuator film 110 because it causes an electrical polarization phenomenon when stress is applied.
  • the paper actuator film 110 of the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention may be formed of cellulose acetate, the cellulose acetate has a piezoelectric effect than pure cellulose Can be better than Cellulose is an eco-friendly material that can be manufactured in a thin form and is inexpensive. It is also environmentally friendly and human-friendly.
  • the metal electrode 120 is a component for generating displacement by applying electricity to the paper actuator film 110 and is positioned on an upper surface of the paper actuator film 110 and may be in the form of a metal thin film.
  • the metal electrode 120 may be an electrode made of gold (Au) serving as a thermal evaporator.
  • Au gold
  • the metal electrode 120 may form an angle of 40 to 50 ° with the fiber direction of the paper actuator film 110, and the metal electrode 120 may have an angle of about 45 ° with the cellulose fiber direction in the paper actuator film 110. When arranged to achieve, there may be the largest piezoelectric effect.
  • the metal film 130 is positioned on the lower surface of the paper actuator film 110 and may be in the form of a metal film.
  • it may be a thin stainless steel film, preferably a thickness of about 8 ⁇ 15 ⁇ m.
  • the adhesive 140 is attached to the paper actuator film 110 and the metal film 130 and electrically connected thereto, and may include silver (Ag).
  • the silver adhesive 140 may be coated in a silk screen manner to form a flat coating layer on the paper actuator film 100.
  • the silver adhesive 140 may be coated to a certain thickness and a physical force may be applied to the paper actuator and the metal film 130 to strongly adhere to each other.
  • the silver adhesive 140 may serve as a kind of electrode.
  • FIG. 2 is a cross-sectional view of the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention.
  • Figure 2 is an electron microscope, a cross-sectional view of the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention, the dotted line indicates the boundary between each layer.
  • the haptic actuator 100 using a cellulose paper actuator film 110 according to an embodiment of the present invention a cellulose paper actuator film (Cellulose EAPap) 110, silver paste (Silver paste) 140, and the metal membrane 130 may be layered in order.
  • the metal electrode 120 may be located on the other surface of the cellulose paper actuator film 110 without the silver adhesive 140.
  • FIG. 3 is a cross-sectional view of the haptic actuator 100 using the cellulose paper actuator film 110 according to another embodiment of the present invention.
  • Figure 3 is an electron microscope, a cross-sectional view of the haptic actuator 100 using a cellulose paper actuator film 110 according to another embodiment of the present invention, a light colored line form is a silver adhesive 140 layer And the darker area represents the cellulose paper actuator film 110 layer.
  • the haptic actuator 100 using the cellulose paper actuator film 110 according to another embodiment of the present invention may have a plurality of paper actuator films 110, and each paper actuator film ( The 110 may be coated with an adhesive 140 containing silver each to be attached and electrically connected to each other.
  • the metal electrode 120 may be located on the top surface of the plurality of paper actuator films 110.
  • the haptic actuator 100 using the cellulose paper actuator film 110 according to another embodiment of the present invention when a plurality of paper actuator films 110 are stacked, the displacement of the haptic actuator 100 when electricity is applied May appear amplified.
  • FIG. 4 is a diagram illustrating a configuration of a system for experimenting with a haptic actuator 100 using a cellulose paper actuator film 110 according to an embodiment of the present invention.
  • a function generator and an amplifier system were used to test the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention.
  • the displacement generated in the haptic actuator 100 may be measured through a laser displacement sensor.
  • the displacement generated in the haptic actuator 100 of the present invention was measured as electricity was applied using the system shown in FIG.
  • the longitudinal direction is 1
  • the width direction is 2
  • the thickness direction is 3
  • d 31 shown in FIG. 4 generates displacements in 3 and 1 directions. Indicates that
  • FIG. 5 is a view showing the bending displacement of the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention. 5, the displacement according to the applied frequency is shown, and the experiment was performed while varying the voltage to 7 ⁇ 35V, and partly enlarged.
  • the haptic actuator 100 used in this experiment was 60 mm in length. As shown in FIG. 5, peaks were observed at 0.1 Hz, 10 Hz and 40 Hz, respectively. In addition, as shown in Figure 5, the maximum displacement of 75 ⁇ m at 35V, 10Hz.
  • the tactile disc (Merkel's disk) responds to forces or displacements at 0.4 to 3 kHz, and the Meissner corpuscle can be activated at frequencies of 2 to 40 kHz.
  • the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention is sufficient to stimulate the tactile disc and the Meister body at 14V or higher. Through this, the present invention can fully function as a haptic actuator, and it can be confirmed that its utilization is high.
  • FIG. 6 is a view showing a comparison of the frequency and displacement according to the standardized actuator length in the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention. As shown in FIG. 6, as the length of the haptic actuator 100 of the present invention was reduced, the peak of resonance increased quadratically, while the displacement decreased nonlinearly.
  • FIG. 7 is a flow chart illustrating a method of manufacturing a cellulose-based haptic actuator according to an embodiment of the present invention.
  • the manufacturing method of the cellulose-based film-type haptic actuator according to an embodiment of the present invention may be performed on a substrate, and first, a lower plate in the form of a thin film may be attached to the upper surface of the substrate.
  • the lower plate may be a cellulose thin film.
  • a photoresist is formed on the upper surface of the lower plate, an exposure process is performed using a photomask, and then the photoresist is partially removed to form a support.
  • an operating part made of a cellulose thin film whose shape is deformed according to an applied electrical signal on the support a cavity can be formed between the lower plate and the operating part while the support is connected and supported between the lower plate and the operating part.
  • By removing the substrate after attaching the operation portion it is possible to manufacture a film-type haptic actuator manufactured according to an embodiment of the present invention.
  • the haptic actuator manufactured according to the method for manufacturing a cellulose-based haptic actuator according to an embodiment of the present invention includes a lower plate 10, an operation unit 20, and a support 30. It may be configured to include, and may further comprise an electrode (50).
  • the haptic actuator manufactured by the present invention by including a lower plate 10, the operation unit 20 and the support 30, between the lower plate 10 and the operation unit 20
  • the cavity 40 can be formed.
  • the electrostatic force is induced in the cavity 40
  • the thickness of the cavity 40 is changed according to the type and size of the induced electrostatic force
  • the operating part 20 is changed in accordance with the thickness change of the cavity 40. It is characterized by being deformed.
  • the repulsive force is induced in the cavity 40, the cavity 40 expands to convexly deform the operating part 20, and when the attraction force is induced, the cavity 40 is compressed to deform the operating part 20 concavely.
  • the operation unit 20 may be made of a thin film based on cellulose that can change its shape according to the cavity 40 to be expanded or compressed, so that the user can feel the deformation state of the cavity 40.
  • the electrode 50 serves to apply electricity from the outside, and may be composed of a pair of electrodes 50 as shown in FIG. 8.
  • the electrode 50 may be made of an electrically conductive metal such as gold, but the metal component may be adjusted in consideration of the unit cost.
  • the electrodes 50 are disposed on the upper surfaces of the lower plate 10 and the operation unit 20, but the electrodes 50 may be disposed on the lower surfaces of the lower plate 10 and the upper surfaces of the operation unit 20, respectively.
  • the arrangement of the electrodes 50 may be changed as much as necessary.
  • the TAXEL module which is a tactile input / output device
  • the power consumption is low and small, It is necessary to have enough strength and deformation to feel the touch.
  • the cellulose that can be used as the lower plate 10 and the operation unit 20 has more holes than other materials and can easily hold electric charges, the cellulose can be accumulated inside to generate vibration force by using electrostatic force. have.
  • cellulose is a natural polymer material having very high transparency and flexible mechanical properties, and is environmentally and human-friendly, and has a piezoelectric effect, an ion transfer effect, and the like, which can be applied to various functional sensors.
  • cellulose not only produces a large deformation even under a low voltage of 10V or less, but also has a great advantage in the application of a mobile device because power consumption is lower than 300 kW.
  • cellulose acetate is a cellulose-based material consisting of an amorphous structure.
  • Cellulose acetate has the advantages of low cost of raw materials, easy molding, and high electrostatic properties.
  • the cellulose acetate is composed of an amorphous structure, the recovery ability is excellent when using the electrostatic effect compared to pure regenerated cellulose with residual polarization.
  • the cellulose acetate thin film may be prepared in the form of a transparent thin film by a rotary coating method. Since cellulose acetate is generally manufactured in a fiber form by spinning, a rotary coating method may be applied to produce a transparent thin film having a certain strength. In other words, by dissolving cellulose acetate powder in acetone with high purity to form a cellulose acetate solution, the solution is repeatedly applied and solidified several times in a rotary applicator to obtain a cellulose acetate thin film having excellent transparency and high surface flatness. . In this case, a cellulose acetate solution in which cellulose acetate powder is dissolved in acetone by about 15 wt% may be used.
  • FIG. 9 is a view showing the side of the cellulose acetate thin film prepared by a rotation coating method in the manufacturing method of the cellulose-based film-type haptic actuator according to an embodiment of the present invention.
  • FIG. 9 is a photograph taken by a scanning microscope, in which cellulose acetate particles are very evenly and densely distributed, and have a porous sponge structure including a fine air layer. It can be confirmed that it can be produced.
  • FIGS. 7, 8 and 10 are views showing a process according to the flow of the manufacturing method of the cellulose-based film-type haptic actuator according to an embodiment of the present invention.
  • FIGS. 7, 8 and 10 it will be described in detail with respect to the manufacturing method of the cellulose-based haptic actuator according to an embodiment of the present invention.
  • the lower plate 10 may be attached to the upper surface of the substrate 80.
  • the cellulose-based haptic actuator according to an embodiment of the present invention is manufactured in the form of a thin and transparent film by attaching a plate of a very thin film form, and thus may be manufactured on the substrate 80 to facilitate the manufacture.
  • the substrate 80 may be a silicon wafer that is widely used as a substrate 80 for making an integrated circuit or the like.
  • the lower plate 10 attached on the substrate 80 may be a cellulose thin film.
  • the lower plate 10 may be in the form of a thin film, it is preferable to use a flexible polymer material having excellent transparency.
  • the lower plate 10 may be a cellulose thin film excellent in electrostatic properties similarly to the operation unit 20, and more preferably may be a cellulose acetate thin film manufactured in the form of a transparent thin film by a rotation coating method.
  • the photoresist 35 may be applied to the upper surface of the lower plate 10. Applying photoresist 35 is for forming support 30, as shown in FIG. 8.
  • the photoresist 35 is a mixture of a polymer and a photosensitizer.
  • the photoresist 35 refers to a material whose chemical properties are changed by light, and solubility in a specific solvent is greatly changed when exposed to light.
  • the photoresist 35 may be coated with 90 ⁇ m to 110 ⁇ m. Since the photoresist 35 to be applied in step S200 serves as a support 30, it should maintain a height that can sufficiently support the operation of the attraction force induced in the cavity 40 of about 90 ⁇ 110 ⁇ m It is preferable to form in thickness.
  • an exposure process may be performed using the photomask 60.
  • the photomask 60 may be a grid or line pattern in units of pixels. That is, the pattern of the photomask 60 is in the form of a desired support 30, placed on the photoresist 35 applied in step S200 and exposed to light so that the pattern of the photomask 60 remains as it is. To be transferred to.
  • the photomask 60 having a grid or line pattern in a pixel unit to provide a haptic sensation to the user may be used to allow the user to feel fine tactile sensations.
  • the size of the pixel is preferably a size that can be recognized by the user, it can be various, such as 0.1 ⁇ 20mm depending on the application.
  • step S400 the photoresist 35 applied in step S200 may be partially removed to form the support 30. Since the chemical properties are changed when the photoresist 35 is exposed to light, the support 30 may be formed using a lithography technique using the photoresist 35. The support 30 is formed according to the shape of the photomask 60 of step S300. The part that is partially removed in step S400 becomes a cavity 40 later, and the user can feel the touch by the electrostatic force induced in this part.
  • the adhesive layer 70 may be formed on the support 30.
  • the adhesive layer 70 is for attaching the support 30 and the operation unit 20, and should not damage the support 30 or the operation unit 20.
  • the adhesive layer 70 may be formed of polyvinyl acetate.
  • the operation unit 20 may be attached onto the support 30 formed in step S400, and may be attached to each other by the adhesive layer 70 formed in step S500. Since the operation unit 20 can change the shape according to the electrical signal, the user can feel the touch according to the deformation of the operation unit 20.
  • the cavity 40 is formed between the lower plate 10 and the operation part 20.
  • the operation unit 20 may be a cellulose thin film that can be modified in shape according to an electrical signal, and more preferably, may be a cellulose acetate thin film having high transparency and easy charging.
  • the cellulose acetate thin film produced by the rotary coating method is high transparency and easy to charge can be used as an operating part can provide an effective haptic.
  • step S700 the substrate 80 of step S100 may be removed.
  • the substrate 80 is required to facilitate the process, and by removing the substrate 80, a cellulose-based haptic actuator having a very high transparency and a thin film form may be manufactured.
  • the cellulose-based haptic actuator manufactured according to the manufacturing method as described above, as well as the vibration force that can be generated by the holes of the cellulose, as well as the electrostatic force can be accumulated and eliminated a lot of charges by making a larger hole The vibration force by can be maximized.
  • the cellulose thin film as the operating portion can be bent up and down by the electrostatic force by the large hole in this way, it can be utilized as an effective haptic actuator by generating force as well as vibration force.

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  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
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  • Spectroscopy & Molecular Physics (AREA)
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Abstract

A haptic actuator using a cellulose paper actuator film provided by the present invention comprises a cellulose paper actuator film having piezo electricity and a metal electrode for impressing electricity on the paper actuator film, enabling manufacturing thereof in the shape of a thin film, high transparency, and generation of a displacement having a size that can sufficiently stimulate the sensory receptors of the skin according to the impressed electricity. Also, the method for manufacturing a cellulose-based film-type haptic actuator proposed by the present invention includes a cellulose thin film as a lower plate and an actuating unit when manufacturing the haptic actuator, thereby enabling the manufacturing thereof in the shape of a thin film, and high transparency, which enables manufacturing of a haptic actuator that can be applied on a visual display device.

Description

셀룰로오스 종이 작동기 필름을 이용한 햅틱 액추에이터 및 그 제조 방법Haptic actuator using cellulose paper actuator film and method of manufacturing the same

본 발명은 햅틱 액추에이터 및 그 제조 방법에 관한 것으로서, 보다 구체적으로는 셀룰로오스 종이 작동기 필름을 이용한 햅틱 액추에이터 및 그 제조 방법에 관한 것이다.The present invention relates to a haptic actuator and a manufacturing method thereof, and more particularly to a haptic actuator using a cellulose paper actuator film and a manufacturing method thereof.

햅틱스(Haptics)란 컴퓨터의 기능 가운데 사용자의 입력 장치인 키보드와 마우스, 조이스틱, 터치스크린 등을 통해 촉각과 힘, 운동감 등을 느끼게 하는 기술을 말한다. 그리스어로 ‘만지는’이라는 뜻의 형용사 ‘haptesthai’에서 온 말로서, 컴퓨터 촉각기술이라고도 한다.Haptics is a technology that makes the user feel the sense of touch, power, and movement through the keyboard, mouse, joystick, and touch screen, which are the input devices of the user. The word comes from the Greek adjective haptesthai, which means "touching." It is also called computer tactile technology.

기존의 컴퓨터 기술은 인간과 컴퓨터가 정보를 주고받는 데 시청각 정보가 주로 이용되었다. 그러나 사용자는 가상현실을 통해 더욱 구체적이고 실감나는 정보를 원하게 되고, 이를 충족시키기 위해 개발된 것이 촉각과 힘까지 전달하는 햅틱 기술이다. 햅틱 기술은 컴퓨터의 터치스크린 등에도 이용되는 기술이며, 이밖에 햅틱 장치와 햅틱 렌더링은 의료 시뮬레이터와 항공기 및 전투기 시뮬레이터, 차량 시뮬레이터, 게임 시뮬레이터를 비롯한 여러 분야에 폭넓게 응용될 수 있다. 앞으로는 현재 컴퓨터의 출력 장치로 쓰이는 모니터, 스피커와 더불어 햅틱 장치도 기본으로 장착되어 갈 전망이다. 또한 여가 산업과 연계하면 그 경제적 잠재력이 매우 크기 때문에 햅틱 기술에 대한 연구가 매우 활발해질 것으로 보인다.Conventional computer technology mainly uses audiovisual information to exchange information with humans and computers. However, the user wants more specific and realistic information through virtual reality, and the haptic technology that is developed to satisfy it is a haptic technology that delivers touch and power. Haptic technology is used in touch screens of computers and the like. In addition, haptic devices and haptic renderings can be widely applied to various fields including medical simulators, aircraft and fighter simulators, vehicle simulators, and game simulators. In the future, haptic devices are expected to be installed as well as monitors and speakers used as output devices of computers. In addition, it is expected that research on haptic technology will be very active because of its great economic potential in connection with the leisure industry.

그러나 종래의 햅틱 장치는 그 크기가 크고 두께가 두꺼워서 모니터나 액정 등 시각 디스플레이에 적용하기에는 어려움이 있다. 또한, 투명도가 낮아서 시각 디스플레이 장치 위에 적용할 수 없고, 장치 내부에 내장시켜야 하는 한계가 있다. 또한, 햅틱 장치에 사용되는 폴리머(polymer)와 같은 성분은 환경오염의 원인 물질이 되는 문제가 있다.However, the conventional haptic device is difficult to be applied to a visual display such as a monitor or liquid crystal due to its large size and thick thickness. In addition, the transparency is low, it cannot be applied on the visual display device, and there is a limit to be embedded inside the device. In addition, a component such as a polymer (polymer) used in the haptic device has a problem that becomes a source of environmental pollution.

본 발명은 기존에 제안된 방법들의 상기와 같은 문제점들을 해결하기 위해 제안된 것으로서, 압전 현상이 있는 셀룰로오스 종이 작동기 필름과 종이 작동기 필름에 전기를 인가시키기 위한 금속 전극을 포함함으로써, 얇은 박막 형태로 제조가 가능하고 투명도가 높으며, 인가되는 전기에 따라서 피부의 감각 수용기를 충분히 자극시킬 수 있는 크기의 변위를 생성할 수 있는, 셀룰로오스 종이 작동기 필름을 이용한 햅틱 액추에이터를 제공하는 것을 그 목적으로 한다.The present invention has been proposed to solve the above problems of the conventionally proposed methods, comprising a cellulose paper actuator film having a piezoelectric phenomenon and a metal electrode for applying electricity to the paper actuator film, thereby manufacturing in a thin film form It is an object of the present invention to provide a haptic actuator using a cellulose paper actuator film, which is capable of high transparency and capable of generating a displacement of a size sufficient to stimulate the sensory receptors of the skin depending on the electricity applied.

또한, 본 발명은, 친환경 소재인 셀룰로오스를 사용함으로써 환경 친화적이고 인체 친화적인, 셀룰로오스 종이 작동기 필름을 이용한 햅틱 액추에이터를 제공하는 것을 또 다른 목적으로 한다.Another object of the present invention is to provide a haptic actuator using a cellulose paper actuator film that is environmentally friendly and human-friendly by using cellulose which is an environmentally friendly material.

뿐만 아니라, 본 발명은, 셀룰로오스 박막을 하판 및 작동부로 포함하여 햅틱 액추에이터를 제조함으로써, 얇은 박막 형태로 제조가 가능하고 투명도가 높아 시각 디스플레이 장치 위에 적용이 가능한 햅틱 액추에이터를 제조할 수 있는, 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법을 제공하는 것을 또 다른 목적으로 한다.In addition, the present invention, by manufacturing a haptic actuator by including a cellulose thin film as the lower plate and the operating portion, a cellulose-based, which can be manufactured in a thin thin film form and can be manufactured on a visual display device with high transparency Another object of the present invention is to provide a method for manufacturing a film-type haptic actuator.

상기한 목적을 달성하기 위한 본 발명의 특징에 따른 셀룰로오스 종이 작동기 필름을 이용한 햅틱 액추에이터는,Haptic actuator using a cellulose paper actuator film according to a feature of the present invention for achieving the above object,

압전 현상이 있는 박막 형태의 셀룰로오스 종이 작동기 필름; 및A cellulose paper actuator film in the form of a thin film having a piezoelectric phenomenon; And

상기 종이 작동기 필름의 상면에 위치하는 금속 전극을 포함하는 것을 그 구성상의 특징으로 한다.It is characterized in that it comprises a metal electrode located on the upper surface of the paper actuator film.

바람직하게는,Preferably,

상기 종이 작동기 필름의 하면에 위치하며 박막 형태의 금속 막을 더 포함할 수 있다.Located on the lower surface of the paper actuator film may further comprise a metal film in the form of a thin film.

바람직하게는, 상기 금속 전극은,Preferably, the metal electrode,

상기 종이 작동기 필름의 셀룰로오스 섬유 방향과 40~50°의 각도를 이룰 수 있다.An angle of 40 to 50 ° may be achieved with the cellulose fiber direction of the paper actuator film.

바람직하게는, 상기 종이 작동기 필름과 상기 금속 막은,Preferably, the paper actuator film and the metal film,

은을 포함하는 접착제에 의해 서로 결합될 수 있다.It may be bonded to each other by an adhesive including silver.

바람직하게는, 상기 금속 전극은,Preferably, the metal electrode,

금일 수 있다.May be gold

바람직하게는, 상기 종이 작동기 필름은,Preferably, the paper actuator film,

셀룰로오스 아세테이트로 형성된 종이 작동기 필름일 수 있다.Paper actuator film formed from cellulose acetate.

바람직하게는,Preferably,

상기 종이 작동기 필름은 복수이며,The paper actuator film is plural,

각각 은을 포함하는 접착제에 의해 코팅되어 서로 부착되고 전기적으로 연결되며,Each coated with an adhesive comprising silver, attached to and electrically connected to each other,

상기 금속 전극은 상기 복수의 종이 작동기 필름의 최상면에 위치할 수 있다.The metal electrode may be located on a top surface of the plurality of paper actuator films.

상기한 목적을 달성하기 위한 본 발명의 또 다른 특징에 따른 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법은,Method for producing a cellulose-based film-type haptic actuator according to another feature of the present invention for achieving the above object,

(1) 기판 윗면에 박막 형태의 하판을 부착하는 단계;(1) attaching a lower plate in the form of a thin film on the upper surface of the substrate;

(2) 상기 하판의 윗면에 포토레지스트를 도포하는 단계;(2) applying a photoresist on the upper surface of the lower plate;

(3) 포토마스크를 이용하여 노광 공정을 수행하는 단계;(3) performing an exposure process using a photomask;

(4) 상기 단계 (2)에서 도포된 포토레지스트를 부분적으로 제거하여 지지대를 형성하는 단계;(4) forming a support by partially removing the photoresist applied in step (2);

(5) 상기 단계 (4)에서 형성된 지지대 위에 인가되는 전기 신호에 따라 그 형태가 변형되는 셀룰로오스 박막으로 구성되는 작동부를 부착하는 단계; 및(5) attaching an operation part composed of a cellulose thin film whose shape is modified in accordance with an electrical signal applied on the support formed in step (4); And

(6) 상기 단계 (1)의 기판을 제거하는 단계를 포함하는 것을 그 구성상의 특징으로 한다.(6) It is characterized by its structural features including the step of removing the substrate of step (1).

바람직하게는, 상기 단계 (1)에서는,Preferably, in step (1),

상기 하판을 셀룰로오스 박막으로 할 수 있다.The lower plate can be a cellulose thin film.

더욱 바람직하게는, 상기 하판 및 작동부는,More preferably, the lower plate and the operation unit,

셀룰로오스 아세테이트 박막일 수 있다.Cellulose acetate thin film.

더더욱 바람직하게는, 상기 하판 및 작동부는,Even more preferably, the lower plate and the operating portion,

상기 회전 도포법에 의해 제조된 셀룰로오스 아세테이트 박막일 수 있다.It may be a cellulose acetate thin film prepared by the rotary coating method.

바람직하게는, 상기 단계 (2)에서는,Preferably, in step (2),

상기 포토레지스트를 90~110㎛로 도포할 수 있다.The photoresist may be applied to 90 ~ 110㎛.

바람직하게는, 상기 단계 (3)에서는,Preferably, in step (3),

픽셀 단위의 격자 또는 라인 패턴의 포토마스트를 이용하여 노광 공정을 수행할 수 있다.An exposure process may be performed using a photomask of a lattice or line pattern in pixels.

바람직하게는,Preferably,

상기 단계 (4)에서 형성된 지지대 위에 접착층을 형성하는 단계를 더 포함하며,Further comprising the step of forming an adhesive layer on the support formed in the step (4),

상기 단계 (5)에서는,In the step (5),

상기 형성된 접착층 위에 상기 작동부를 부착할 수 있다.The operation part may be attached onto the formed adhesive layer.

본 발명에서 제공하고 있는 셀룰로오스 종이 작동기 필름을 이용한 햅틱 액추에이터에 따르면, 압전 현상이 있는 셀룰로오스 종이 작동기 필름과 종이 작동기 필름에 전기를 인가시키기 위한 금속 전극을 포함함으로써, 얇은 박막 형태로 제조가 가능하고 투명도가 높으며, 인가되는 전기에 따라서 피부의 감각 수용기를 충분히 자극시킬 수 있는 크기의 변위를 생성할 수 있다.According to the haptic actuator using the cellulose paper actuator film provided in the present invention, by including a cellulose paper actuator film having a piezoelectric phenomenon and a metal electrode for applying electricity to the paper actuator film, it is possible to manufacture in a thin thin film form and transparency Is high, and depending on the electricity applied, it is possible to generate a displacement of a size that can sufficiently stimulate the sensory receptors of the skin.

또한, 본 발명에 따르면, 친환경 소재인 셀룰로오스를 사용함으로써 환경 친화적이고 인체 친화적일 수 있다.In addition, according to the present invention, by using cellulose that is an environmentally friendly material can be environmentally friendly and human-friendly.

뿐만 아니라, 본 발명에 따르면, 셀룰로오스 박막을 하판 및 작동부로 포함하여 햅틱 액추에이터를 제조함으로써, 얇은 박막 형태로 제조가 가능하고 투명도가 높아 시각 디스플레이 장치 위에 적용이 가능한 햅틱 액추에이터를 제조할 수 있다.In addition, according to the present invention, by manufacturing the haptic actuator by including the cellulose thin film as the lower plate and the operating unit, it is possible to manufacture a haptic actuator that can be manufactured in a thin thin film form and can be applied on the visual display device with high transparency.

도 1은 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름을 이용한 햅틱 액추에이터를 도시한 도면.1 illustrates a haptic actuator using a cellulose paper actuator film according to an embodiment of the present invention.

도 2는 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름을 이용한 햅틱 액추에이터의 단면을 도시한 도면.2 is a cross-sectional view of a haptic actuator using a cellulose paper actuator film according to an embodiment of the present invention.

도 3은 본 발명의 다른 실시예에 따른 셀룰로오스 종이 작동기 필름을 이용한 햅틱 액추에이터의 단면을 도시한 도면.3 is a cross-sectional view of a haptic actuator using a cellulose paper actuator film according to another embodiment of the present invention.

도 4는 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름을 이용한 햅틱 액추에이터를 실험하기 위한 시스템의 구성을 도시한 도면.4 is a diagram illustrating a configuration of a system for experimenting with a haptic actuator using a cellulose paper actuator film according to an embodiment of the present invention.

도 5는 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름을 이용한 햅틱 액추에이터의 휨 변위를 도시한 도면.5 is a view showing the bending displacement of the haptic actuator using a cellulose paper actuator film according to an embodiment of the present invention.

도 6은 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름을 이용한 햅틱 액추에이터에서, 표준화된 액추에이터 길이에 따른 주파수와 변위를 비교하여 도시한 도면.6 is a diagram illustrating a comparison of frequency and displacement according to a standardized actuator length in a haptic actuator using a cellulose paper actuator film according to an embodiment of the present invention.

도 7은 본 발명의 일실시예에 따른 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법의 흐름을 도시한 도면.7 is a view showing a flow of a manufacturing method of a cellulose-based film-type haptic actuator according to an embodiment of the present invention.

도 8은 본 발명의 일실시예에 따른 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법에 의해 제조된 햅틱 액추에이터를 도시한 도면.8 is a diagram illustrating a haptic actuator manufactured by a method for manufacturing a cellulose-based film-type haptic actuator according to an embodiment of the present invention.

도 9는 본 발명의 일실시예에 따른 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법에서 회전 도포법에 의해 제조된 셀룰로오스 아세테이트 박막의 측면을 도시한 도면.Figure 9 is a view showing the side of the cellulose acetate thin film prepared by a rotation coating method in the manufacturing method of the cellulose-based film-type haptic actuator according to an embodiment of the present invention.

도 10은 본 발명의 일실시예에 따른 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법의 흐름에 따른 공정을 도시한 도면.10 is a view showing a process according to the flow of the manufacturing method of the cellulose-based film-type haptic actuator according to an embodiment of the present invention.

<부호의 설명><Description of the code>

10: 하판 20: 작동부10: lower plate 20: operating part

30: 지지대 35: 포토레지스트30: support 35: photoresist

40: 공동 50: 전극40: cavity 50: electrode

60: 포토마스크 70: 접착층60: photomask 70: adhesive layer

80: 기판80: substrate

100: 햅틱 액추에이터 110: 종이 작동기 필름100: haptic actuator 110: paper actuator film

120: 금속 전극 130: 금속 막120: metal electrode 130: metal film

140: 접착제140: adhesive

S100: 기판 윗면에 하판을 부착하는 단계S100: attaching the lower plate to the upper surface of the substrate

S200: 하판의 윗면에 포토레지스트를 도포하는 단계S200: applying photoresist on the upper surface of the lower plate

S300: 포토마스크를 이용하여 노광 공정을 수행하는 단계S300: performing an exposure process using a photomask

S400: 도포된 포토레지스트를 부분적으로 제거하여 지지대를 형성하는 단계S400: forming a support by partially removing the applied photoresist

S500: 지지대 위에 접착층을 형성하는 단계S500: forming an adhesive layer on the support

S600: 지지대 위에 작동부을 부착하는 단계S600: Attaching the Actuator on a Support

S700: 기판을 제거하는 단계S700: removing the substrate

이하, 첨부된 도면을 참조하여 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자가 본 발명을 용이하게 실시할 수 있도록 바람직한 실시예를 상세히 설명한다. 다만, 본 발명의 바람직한 실시예를 상세하게 설명함에 있어, 관련된 공지 기능 또는 구성에 대한 구체적인 설명이 본 발명의 요지를 불필요하게 흐릴 수 있다고 판단되는 경우에는 그 상세한 설명을 생략한다. 또한, 유사한 기능 및 작용을 하는 부분에 대해서는 도면 전체에 걸쳐 동일한 부호를 사용한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. However, in describing the preferred embodiment of the present invention in detail, if it is determined that the detailed description of the related known function or configuration may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be omitted. In addition, the same reference numerals are used throughout the drawings for parts having similar functions and functions.

덧붙여, 명세서 전체에서, 어떤 부분이 다른 부분과 ‘연결’ 되어 있다고 할 때, 이는 ‘직접적으로 연결’ 되어 있는 경우뿐만 아니라, 그 중간에 다른 소자를 사이에 두고 ‘간접적으로 연결’ 되어 있는 경우도 포함한다. 또한, 어떤 구성요소를 ‘포함’ 한다는 것은, 특별히 반대되는 기재가 없는 한 다른 구성요소를 제외하는 것이 아니라 다른 구성요소를 더 포함할 수 있다는 것을 의미한다.In addition, throughout the specification, when a part is 'connected' to another part, it is not only 'directly connected' but also 'indirectly connected' with another element in between. Include. In addition, the term "comprising" a certain component means that the component may further include other components, except for the case where there is no contrary description.

도 1은 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)를 도시한 도면이다. 도 1에 도시된 바와 같이, 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)는, 종이 작동기 필름(110) 및 금속 전극(120)을 포함하여 구성될 수 있으며, 금속 막(130) 및 접착제(140)를 더 포함하여 구성될 수 있다.1 is a diagram illustrating a haptic actuator 100 using a cellulose paper actuator film 110 according to an embodiment of the present invention. As shown in FIG. 1, the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention may include a paper actuator film 110 and a metal electrode 120. The metal film 130 may further include an adhesive 140.

즉, 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)는, 셀룰로오스 기반의 종이 작동기 필름(110)이 주된 재료로서, 종이 작동기 필름(110)에 전기를 인가하여 변위를 발생시키기 위한 금속 전극(120)을 포함하여 구성될 수 있다. 이하에서는, 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)의 세부적인 구성에 대하여 상세히 설명하도록 한다.That is, the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention, the cellulose-based paper actuator film 110 is the main material, applying electricity to the paper actuator film 110 It can be configured to include a metal electrode 120 for generating a displacement. Hereinafter, the detailed configuration of the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention will be described in detail.

종이 작동기 필름(110)은, 압전 현상이 있는 박막 형태의 셀룰로오스로 된 것일 수 있다. 셀룰로오스는 압전 효과가 있는 것으로 알려져 있어서, 응력이 가해지면 전기적 분극 현상을 일으키기 때문에 종이 작동기 필름(110)으로 사용될 수 있다. 특히, 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)의 종이 작동기 필름(110)은, 셀룰로오스 아세테이트로 형성될 수 있는데, 셀룰로오스 아세테이트는 순수한 셀룰로오스보다 압전 효과가 보다 뛰어날 수 있다. 셀룰로오스는 친환경 소재로서 얇은 형태로 제조가 가능하고 가격이 저렴할 뿐 아니라, 환경 친화적이고 인체 친화적이다.The paper actuator film 110 may be made of cellulose in a thin film form with a piezoelectric phenomenon. Since cellulose is known to have a piezoelectric effect, it can be used as the paper actuator film 110 because it causes an electrical polarization phenomenon when stress is applied. In particular, the paper actuator film 110 of the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention, may be formed of cellulose acetate, the cellulose acetate has a piezoelectric effect than pure cellulose Can be better than Cellulose is an eco-friendly material that can be manufactured in a thin form and is inexpensive. It is also environmentally friendly and human-friendly.

금속 전극(120)은, 종이 작동기 필름(110)에 전기를 인가함으로써 변위를 발생시키기 위한 구성으로서, 종이 작동기 필름(110)의 상면에 위치하며, 금속 박막의 형태일 수 있다. 금속 전극(120)은, 열 증발기 역할을 하는 금(Au)으로 된 전극일 수 있다. 금속 전극(120)은, 종이 작동기 필름(110)의 섬유 방향과 40~50°의 각도를 이룰 수 있는데, 금속 전극(120)이 종이 작동기 필름(110)에서 셀룰로오스 섬유 방향과 약 45° 정도를 이루도록 배치될 때, 가장 큰 압전 효과가 있을 수 있다.The metal electrode 120 is a component for generating displacement by applying electricity to the paper actuator film 110 and is positioned on an upper surface of the paper actuator film 110 and may be in the form of a metal thin film. The metal electrode 120 may be an electrode made of gold (Au) serving as a thermal evaporator. The metal electrode 120 may form an angle of 40 to 50 ° with the fiber direction of the paper actuator film 110, and the metal electrode 120 may have an angle of about 45 ° with the cellulose fiber direction in the paper actuator film 110. When arranged to achieve, there may be the largest piezoelectric effect.

금속 막(130)은, 종이 작동기 필름(110)의 하면에 위치하며, 금속으로 된 막 형태일 수 있다. 특히, 얇은 스테인레스 스틸 막으로 할 수 있으며, 바람직하게는 8~15㎛ 정도의 두께일 수 있다.The metal film 130 is positioned on the lower surface of the paper actuator film 110 and may be in the form of a metal film. In particular, it may be a thin stainless steel film, preferably a thickness of about 8 ~ 15㎛.

접착제(140)는, 종이 작동기 필름(110)과 금속 막(130)을 부착하고 서로 전기적으로 연결하기 위한 것으로서, 은(Ag)을 포함할 수 있다. 은 접착제(140)는, 종이 작동기 필름(100) 위에 평평한 코팅층을 이루도록 하기 위하여 실크 스크린 방식으로 코팅될 수 있다. 은 접착제(140)가 일정한 두께로 코팅되고 종이 작동기와 금속 막(130)이 서로 강하게 부착할 수 있도록 물리적인 힘을 가할 수도 있다. 그밖에, 은 접착제(140)는 일종의 전극 역할을 할 수도 있다.The adhesive 140 is attached to the paper actuator film 110 and the metal film 130 and electrically connected thereto, and may include silver (Ag). The silver adhesive 140 may be coated in a silk screen manner to form a flat coating layer on the paper actuator film 100. The silver adhesive 140 may be coated to a certain thickness and a physical force may be applied to the paper actuator and the metal film 130 to strongly adhere to each other. In addition, the silver adhesive 140 may serve as a kind of electrode.

도 2는 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)의 단면을 도시한 도면이다. 도 2는 전자 현미경으로, 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)의 단면을 촬영한 것이며, 점선은 각 층 사이의 경계를 표시한 것이다. 도 2에 도시된 바와 같이, 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)는, 셀룰로오스 종이 작동기 필름(Cellulose EAPap)(110), 은 접착제(Silver paste)(140), 및 금속 막(Metal membrane)(130)이 순서대로 층을 이룰 수 있다. 금속 전극(120)은 셀룰로오스 종이 작동기 필름(110)에서 은 접착제(140)가 없는 타면에 위치할 수 있다.2 is a cross-sectional view of the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention. Figure 2 is an electron microscope, a cross-sectional view of the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention, the dotted line indicates the boundary between each layer. As shown in Figure 2, the haptic actuator 100 using a cellulose paper actuator film 110 according to an embodiment of the present invention, a cellulose paper actuator film (Cellulose EAPap) 110, silver paste (Silver paste) 140, and the metal membrane 130 may be layered in order. The metal electrode 120 may be located on the other surface of the cellulose paper actuator film 110 without the silver adhesive 140.

도 3은 본 발명의 다른 실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)의 단면을 도시한 도면이다. 도 3은 전자 현미경으로, 본 발명의 다른 실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)의 단면을 촬영한 것이며, 밝은 색의 선 형태를 가진 것은 은 접착제(140) 층이고, 어두운 영역은 셀룰로오스 종이 작동기 필름(110) 층을 나타낸다. 도 3에 도시된 바와 같이, 본 발명의 다른 실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)는, 종이 작동기 필름(110)을 복수로 할 수 있으며, 각 종이 작동기 필름(110)은 각각 은을 포함하는 접착제(140)에 의해 코팅되어 서로 부착되고 전기적으로 연결될 수 있다. 이때, 금속 전극(120)은 복수의 종이 작동기 필름(110)의 최상면에 위치할 수 있다. 본 발명의 다른 실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)와 같이, 여러 개의 종이 작동기 필름(110)을 쌓게 되면, 전기가 인가되었을 때 햅틱 액추에이터(100)의 변위가 증폭되어 나타날 수 있다.3 is a cross-sectional view of the haptic actuator 100 using the cellulose paper actuator film 110 according to another embodiment of the present invention. Figure 3 is an electron microscope, a cross-sectional view of the haptic actuator 100 using a cellulose paper actuator film 110 according to another embodiment of the present invention, a light colored line form is a silver adhesive 140 layer And the darker area represents the cellulose paper actuator film 110 layer. As shown in FIG. 3, the haptic actuator 100 using the cellulose paper actuator film 110 according to another embodiment of the present invention may have a plurality of paper actuator films 110, and each paper actuator film ( The 110 may be coated with an adhesive 140 containing silver each to be attached and electrically connected to each other. In this case, the metal electrode 120 may be located on the top surface of the plurality of paper actuator films 110. Like the haptic actuator 100 using the cellulose paper actuator film 110 according to another embodiment of the present invention, when a plurality of paper actuator films 110 are stacked, the displacement of the haptic actuator 100 when electricity is applied May appear amplified.

이하에서는, 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)의 효과를 실험을 통해 입증하고자 한다. 그러나, 하기의 실험들이 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)의 권리 범위를 어떤 식으로든 제한하는 것은 아니다.Hereinafter, the effect of the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention will be demonstrated through experiments. However, the following experiments do not in any way limit the scope of the haptic actuator 100 using the cellulose paper actuator film 110 according to one embodiment of the invention.

도 4는 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)를 실험하기 위한 시스템의 구성을 도시한 도면이다. 도 4에 도시된 바와 같이, 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)를 실험하기 위해, 함수 발생기와 증폭기 시스템을 이용하였다. 햅틱 액추에이터(100)에서 발생한 변위는 레이저 변위 센서를 통해 측정할 수 있다. 도 4에 도시된 시스템을 이용하여 전기가 인가됨에 따라 본 발명의 햅틱 액추에이터(100)에 발생하는 변위를 측정하였다. 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름(110)에서는, 길이방향을 1, 폭 방향을 2, 두께 방향을 3이라 하고, 도 4에 도시된 d31은 3과 1 방향으로 변위가 발생한다는 것을 나타낸다.4 is a diagram illustrating a configuration of a system for experimenting with a haptic actuator 100 using a cellulose paper actuator film 110 according to an embodiment of the present invention. As shown in FIG. 4, to test the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention, a function generator and an amplifier system were used. The displacement generated in the haptic actuator 100 may be measured through a laser displacement sensor. The displacement generated in the haptic actuator 100 of the present invention was measured as electricity was applied using the system shown in FIG. In the cellulose paper actuator film 110 according to the embodiment of the present invention, the longitudinal direction is 1, the width direction is 2, the thickness direction is 3, and d 31 shown in FIG. 4 generates displacements in 3 and 1 directions. Indicates that

도 5는 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)의 휨 변위를 도시한 도면이다. 도 5에는 인가된 주파수에 따른 변위가 도시되었으며, 7~35V로 전압을 바꾸어가며 실험하였고, 일부를 확대하여 도시하였다. 이 실험에 사용된 햅틱 액추에이터(100)의 길이는 60㎜이었다. 도 5에 도시된 바와 같이, 0.1㎐, 10㎐, 40㎐에서 각각 피크가 관측되었다. 또한, 도 5에 도시된 바와 같이, 35V, 10㎐에서 최대 75㎛의 변위를 나타내었다.5 is a view showing the bending displacement of the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention. 5, the displacement according to the applied frequency is shown, and the experiment was performed while varying the voltage to 7 ~ 35V, and partly enlarged. The haptic actuator 100 used in this experiment was 60 mm in length. As shown in FIG. 5, peaks were observed at 0.1 Hz, 10 Hz and 40 Hz, respectively. In addition, as shown in Figure 5, the maximum displacement of 75㎛ at 35V, 10Hz.

사람이 피부를 통해 감각을 느끼는 주된 기관 중, 촉각 원판(Merkel's disk)은 0.4~3㎐에서의 힘 또는 변위에 반응하고, 마이스너 소체(Meissner corpuscle)는 2~40㎐의 주파수에서 활성화될 수 있다. 도 5에 도시된 바와 같이, 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)는, 14V 이상에서는 이러한 촉각 원판과 마이스터 소체를 자극하기에 충분하다. 이를 통해 본 발명이 햅틱 액추에이터로서 충분히 작용할 수 있고, 그 활용도가 높음을 확인할 수 있다.Among the main organs that humans sense through the skin, the tactile disc (Merkel's disk) responds to forces or displacements at 0.4 to 3 kHz, and the Meissner corpuscle can be activated at frequencies of 2 to 40 kHz. . As shown in FIG. 5, the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention is sufficient to stimulate the tactile disc and the Meister body at 14V or higher. Through this, the present invention can fully function as a haptic actuator, and it can be confirmed that its utilization is high.

도 6은 본 발명의 일실시예에 따른 셀룰로오스 종이 작동기 필름(110)을 이용한 햅틱 액추에이터(100)에서, 표준화된 액추에이터 길이에 따른 주파수와 변위를 비교하여 도시한 도면이다. 도 6에 도시된 바와 같이, 본 발명의 햅틱 액추에이터(100)의 길이가 줄어듦에 따라, 공명의 피크는 2차 함수적으로 증가하였고, 반면에, 변위는 비선형적으로 감소하였다.6 is a view showing a comparison of the frequency and displacement according to the standardized actuator length in the haptic actuator 100 using the cellulose paper actuator film 110 according to an embodiment of the present invention. As shown in FIG. 6, as the length of the haptic actuator 100 of the present invention was reduced, the peak of resonance increased quadratically, while the displacement decreased nonlinearly.

도 7은 본 발명의 일실시예에 따른 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법의 흐름을 도시한 도면이다. 도 7에 도시된 바와 같이, 본 발명의 일실시예에 따른 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법은, 기판 윗면에 하판을 부착하는 단계(S100), 하판의 윗면에 포토레지스트를 도포하는 단계(S200), 포토마스크(Photo Mask)를 이용하여 노광 공정을 수행하는 단계(S300), 도포된 포토레지스트를 부분적으로 제거하여 지지대를 형성하는 단계(S400), 지지대 위에 작동부를 부착하는 단계(S600), 및 기판을 제거하는 단계(S700)를 포함하여 구현될 수 있으며, 지지대 위에 접착층을 형성하는 단계(S500)를 더 포함하여 구현될 수 있다.7 is a flow chart illustrating a method of manufacturing a cellulose-based haptic actuator according to an embodiment of the present invention. As shown in Figure 7, in the manufacturing method of the cellulose-based film-type haptic actuator according to an embodiment of the present invention, the step of attaching a lower plate on the upper surface (S100), applying a photoresist on the upper surface of the lower plate (S200), performing an exposure process using a photo mask (S300), partially removing the applied photoresist to form a support (S400), attaching an operation part on the support (S600) ), And removing the substrate (S700), and further including forming an adhesive layer on the support (S500).

즉, 본 발명의 일실시예에 따른 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법은, 기판 위에서 수행될 수 있는데, 먼저 기판 윗면에 박막 형태의 하판을 부착할 수 있다. 이때, 하판은 셀룰로오스 박막일 수 있다. 하판의 윗면에 지지대 역할을 할 포토레지스트를 도포하고, 포토마스크를 이용하여 노광 공정을 수행한 다음, 포토레지스트를 부분적으로 제거함으로써, 지지대를 형성하게 된다. 인가되는 전기 신호에 따라 그 형태가 변형되는 셀룰로오스 박막으로 구성되는 작동부를 지지대 위에 부착하게 되면, 하판과 작동부 사이를 지지대가 연결 및 지지하면서, 하판과 작동부 사이에 공동을 형성할 수 있다. 작동부 부착 후 기판을 제거함으로써, 본 발명의 일실시예에 따라 제조되는 필름형 햅틱 액추에이터를 제조할 수 있다.That is, the manufacturing method of the cellulose-based film-type haptic actuator according to an embodiment of the present invention may be performed on a substrate, and first, a lower plate in the form of a thin film may be attached to the upper surface of the substrate. In this case, the lower plate may be a cellulose thin film. A photoresist is formed on the upper surface of the lower plate, an exposure process is performed using a photomask, and then the photoresist is partially removed to form a support. By attaching an operating part made of a cellulose thin film whose shape is deformed according to an applied electrical signal on the support, a cavity can be formed between the lower plate and the operating part while the support is connected and supported between the lower plate and the operating part. By removing the substrate after attaching the operation portion, it is possible to manufacture a film-type haptic actuator manufactured according to an embodiment of the present invention.

도 8은 본 발명의 일실시예에 따른 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법에 의해 제조된 햅틱 액추에이터를 도시한 도면이다. 도 8에 도시된 바와 같이, 본 발명의 일실시예에 따른 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법에 따라 제조된 햅틱 액추에이터는, 하판(10), 작동부(20), 및 지지대(30)를 포함하여 구성될 수 있으며, 전극(50)을 더 포함하여 구성될 수 있다.8 is a diagram illustrating a haptic actuator manufactured by a method for manufacturing a cellulose-based film-type haptic actuator according to an embodiment of the present invention. As shown in FIG. 8, the haptic actuator manufactured according to the method for manufacturing a cellulose-based haptic actuator according to an embodiment of the present invention includes a lower plate 10, an operation unit 20, and a support 30. It may be configured to include, and may further comprise an electrode (50).

즉, 본 발명에 의해 제조된 햅틱 액추에이터는 도 8에 도시된 바와 같이, 하판(10), 작동부(20) 및 지지대(30)를 포함함으로써, 하판(10)과 작동부(20) 사이에 공동(40)을 형성할 수 있다. 외부에서 전기가 인가되면 공동(40)에 정전기력이 유도되며, 유도된 정전기력의 종류 및 크기에 따라 공동(40)의 두께가 변화되고, 공동(40)의 두께 변화에 따라 작동부(20)가 변형되는 것을 특징으로 한다. 이때, 공동(40)에 척력이 유도되면 공동(40)이 팽창하여 작동부(20)가 볼록하게 변형되고, 인력이 유도되면 공동(40)이 압축되어 작동부(20)가 오목하게 변형됨으로써, 공동(40)의 두께 변화에 따라 사용자가 촉각을 느끼도록 할 수 있는 것이다. 특히, 작동부(20)는 팽창 또는 압축되는 공동(40)에 따라 그 형태를 변형시킬 수 있는 셀룰로오스를 기반으로 하는 박막으로 구성함으로써 사용자가 공동(40)의 변형 상태를 느낄 수 있다.That is, the haptic actuator manufactured by the present invention, as shown in Figure 8, by including a lower plate 10, the operation unit 20 and the support 30, between the lower plate 10 and the operation unit 20 The cavity 40 can be formed. When electricity is applied from the outside, the electrostatic force is induced in the cavity 40, the thickness of the cavity 40 is changed according to the type and size of the induced electrostatic force, and the operating part 20 is changed in accordance with the thickness change of the cavity 40. It is characterized by being deformed. At this time, when the repulsive force is induced in the cavity 40, the cavity 40 expands to convexly deform the operating part 20, and when the attraction force is induced, the cavity 40 is compressed to deform the operating part 20 concavely. , According to the thickness change of the cavity 40, the user can feel the tactile. In particular, the operation unit 20 may be made of a thin film based on cellulose that can change its shape according to the cavity 40 to be expanded or compressed, so that the user can feel the deformation state of the cavity 40.

전극(50)은 외부로부터 전기를 인가하는 역할을 하며, 도 8에 도시된 바와 같이 한 쌍의 전극(50)으로 구성될 수 있다. 전극(50)은 금과 같이 전기가 잘 통하는 금속으로 구성될 수 있으나, 단가를 고려하여 금속 성분을 조절할 수 있다. 도 8에서는, 하판(10)과 작동부(20)의 윗면에 각각 전극(50)을 배치하였으나, 하판(10)의 아랫면, 작동부(20)의 윗면에 각각 전극(50)을 배치할 수도 있고, 용도 등에 따라 전극(50)의 배치는 얼마든지 변경될 수 있다.The electrode 50 serves to apply electricity from the outside, and may be composed of a pair of electrodes 50 as shown in FIG. 8. The electrode 50 may be made of an electrically conductive metal such as gold, but the metal component may be adjusted in consideration of the unit cost. In FIG. 8, the electrodes 50 are disposed on the upper surfaces of the lower plate 10 and the operation unit 20, but the electrodes 50 may be disposed on the lower surfaces of the lower plate 10 and the upper surfaces of the operation unit 20, respectively. In addition, the arrangement of the electrodes 50 may be changed as much as necessary.

한편, 본 발명의 일실시예에 따라 제조되는 셀룰로오스 기반의 필름형 햅틱 액추에이터를 다양한 분야, 특히 시-촉각 입출력 소자인 TAXEL 모듈에서 촉각 제시 장치로 활용하기 위해서는, 소모 전력이 낮고 소형이면서도, 사용자가 촉각을 느낄 수 있도록 충분한 힘과 변형을 가져야 하는 등의 특성이 요구된다.On the other hand, in order to utilize the cellulose-based film-type haptic actuator manufactured according to an embodiment of the present invention as a tactile presentation device in various fields, in particular, the TAXEL module, which is a tactile input / output device, the power consumption is low and small, It is necessary to have enough strength and deformation to feel the touch.

하판(10)과 작동부(20)로 사용될 수 있는 셀룰로오스는, 다른 물질보다 홀(hole)이 많아 전하를 쉽게 보유할 수 있기 때문에, 내부에 전하를 쌓아 정전기력을 이용하여 진동력을 발생시킬 수 있다. 또한, 셀룰로오스는 투명도가 매우 높고 유연한 기계적 특성을 지닌 자연 고분자 재료로서, 환경 및 인체 친화적이며, 압전 효과, 이온 전이 효과 등이 있어 다양한 기능성 센서로 응용할 수 있는 재료이다. 특히, 셀룰로오스는 10V 이하의 낮은 전압 하에서도 큰 변형을 만들어낼 뿐 아니라, 소모 전력이 300㎽ 이하로 낮아서 모바일 장치의 적용에 있어 큰 장점이 있다.Since the cellulose that can be used as the lower plate 10 and the operation unit 20 has more holes than other materials and can easily hold electric charges, the cellulose can be accumulated inside to generate vibration force by using electrostatic force. have. In addition, cellulose is a natural polymer material having very high transparency and flexible mechanical properties, and is environmentally and human-friendly, and has a piezoelectric effect, an ion transfer effect, and the like, which can be applied to various functional sensors. In particular, cellulose not only produces a large deformation even under a low voltage of 10V or less, but also has a great advantage in the application of a mobile device because power consumption is lower than 300 kW.

특히, 셀룰로오스 아세테이트(Cellulose Acetate)는 셀룰로오스를 주원료로 한 재료로써 비정질 구조로 이루어져 있다. 셀룰로오스 아세테이트는 원료의 단가가 저렴하고 성형이 쉬울 뿐 아니라 정전 특성에 높은 강점이 있다. 특히, 셀룰로오스 아세테이트는 비정질 구조로 이루어져 있기 때문에 잔류 분극이 존재하는 순수한 재생 셀룰로오스에 비해 정전 효과를 이용할 때 회복 능력이 뛰어나다.In particular, cellulose acetate (Cellulose Acetate) is a cellulose-based material consisting of an amorphous structure. Cellulose acetate has the advantages of low cost of raw materials, easy molding, and high electrostatic properties. In particular, since the cellulose acetate is composed of an amorphous structure, the recovery ability is excellent when using the electrostatic effect compared to pure regenerated cellulose with residual polarization.

셀룰로오스 아세테이트 박막은 회전 도포법에 의해 투명 박막 형태로 제조될 수 있다. 셀룰로오스 아세테이트는 일반적으로 방사법을 통해 섬유 형태로 제조되므로, 일정한 강도를 지닌 투명 박막 형태로 제조하기 위해서 회전 도포법이 적용될 수 있다. 즉, 셀룰로오스 아세테이트 분말을 순도가 높은 아세톤에 녹여 셀룰로오스 아세테이트 용액을 만들고, 이 용액을 회전 도포기에서 수회에 걸쳐 도포와 고형화 작업을 반복하면 투명도가 뛰어나고 표면의 편평도가 높은 셀룰로오스 아세테이트 박막을 얻을 수 있다. 이때, 셀룰로오스 아세테이트 분말을 아세톤에 15wt% 정도로 녹인 셀룰로오스 아세테이트 용액을 사용할 수 있다.The cellulose acetate thin film may be prepared in the form of a transparent thin film by a rotary coating method. Since cellulose acetate is generally manufactured in a fiber form by spinning, a rotary coating method may be applied to produce a transparent thin film having a certain strength. In other words, by dissolving cellulose acetate powder in acetone with high purity to form a cellulose acetate solution, the solution is repeatedly applied and solidified several times in a rotary applicator to obtain a cellulose acetate thin film having excellent transparency and high surface flatness. . In this case, a cellulose acetate solution in which cellulose acetate powder is dissolved in acetone by about 15 wt% may be used.

도 9는 본 발명의 일실시예에 따른 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법에서 회전 도포법에 의해 제조된 셀룰로오스 아세테이트 박막의 측면을 도시한 도면이다. 도 9는 주사현미경으로 촬영한 사진으로서, 셀룰로오스 아세테이트 입자가 매우 고르고 밀도 있게 분포되어 있으며, 미세한 공기층을 고루 포함하는 다공성 해면 구조로 되어 있어, 회전 도포법에 의해 대전 되기 쉬운 형태의 셀룰로오스 아세테이트 박막을 제조할 수 있음을 확인할 수 있다.Figure 9 is a view showing the side of the cellulose acetate thin film prepared by a rotation coating method in the manufacturing method of the cellulose-based film-type haptic actuator according to an embodiment of the present invention. FIG. 9 is a photograph taken by a scanning microscope, in which cellulose acetate particles are very evenly and densely distributed, and have a porous sponge structure including a fine air layer. It can be confirmed that it can be produced.

도 10은 본 발명의 일실시예에 따른 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법의 흐름에 따른 공정을 도시한 도면이다. 이하에서는, 도 7, 도 8 및 도 10을 참조하여, 본 발명의 일실시예에 따른 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법에 대해 상세하게 설명하도록 한다.10 is a view showing a process according to the flow of the manufacturing method of the cellulose-based film-type haptic actuator according to an embodiment of the present invention. Hereinafter, with reference to FIGS. 7, 8 and 10, it will be described in detail with respect to the manufacturing method of the cellulose-based haptic actuator according to an embodiment of the present invention.

단계 S100에서는, 기판(80) 윗면에 하판(10)을 부착할 수 있다. 본 발명의 일실시예에 따른 셀룰로오스 기반의 필름형 햅틱 액추에이터는, 매우 얇은 박막 형태의 판을 붙여서 얇고 투명한 필름 형태로 제조되므로, 제조를 원활하게 하기 위해 기판(80) 위에서 제조할 수 있다. 기판(80)은 집적 회로 등을 만드는 기판(80)으로 많이 사용되는 실리콘 웨이퍼(Silicon wafer)일 수 있다. 이때, 기판(80) 위에 부착하는 하판(10)은 셀룰로오스 박막일 수 있다.In step S100, the lower plate 10 may be attached to the upper surface of the substrate 80. The cellulose-based haptic actuator according to an embodiment of the present invention is manufactured in the form of a thin and transparent film by attaching a plate of a very thin film form, and thus may be manufactured on the substrate 80 to facilitate the manufacture. The substrate 80 may be a silicon wafer that is widely used as a substrate 80 for making an integrated circuit or the like. In this case, the lower plate 10 attached on the substrate 80 may be a cellulose thin film.

하판(10)은, 박막 형태일 수 있는데, 투명도가 뛰어난 유연 고분자 재료로 하는 것이 바람직하다. 특히, 하판(10)은 작동부(20)와 동일하게 정전 특성이 우수한 셀룰로오스 박막으로 할 수 있으며, 더욱 바람직하게는 회전 도포법에 의해 투명 박막 형태로 제조된 셀룰로오스 아세테이트 박막으로 할 수 있다.Although the lower plate 10 may be in the form of a thin film, it is preferable to use a flexible polymer material having excellent transparency. In particular, the lower plate 10 may be a cellulose thin film excellent in electrostatic properties similarly to the operation unit 20, and more preferably may be a cellulose acetate thin film manufactured in the form of a transparent thin film by a rotation coating method.

단계 S200에서는, 하판(10)의 윗면에 포토레지스트(35)를 도포할 수 있다. 포토레지스트(35)를 도포하는 것은 도 8에 도시된 바와 같은, 지지대(30)를 형성하기 위한 것이다. 포토레지스트(35)는 고분자와 감광제가 섞인 혼합물로서 빛에 의해 그 화학적인 성질이 변화하여, 빛에 노출을 시키면 특정 용매에 대한 용해도가 크게 바뀌는 재료를 뜻한다.In step S200, the photoresist 35 may be applied to the upper surface of the lower plate 10. Applying photoresist 35 is for forming support 30, as shown in FIG. 8. The photoresist 35 is a mixture of a polymer and a photosensitizer. The photoresist 35 refers to a material whose chemical properties are changed by light, and solubility in a specific solvent is greatly changed when exposed to light.

단계 S200에서는, 포토레지스트(35)를 90~110㎛로 도포할 수 있다. 단계 S200에서 도포하는 포토레지스트(35)는 지지대(30)의 역할을 하기 때문에, 공동(40)에 인력이 유도된 상태의 작동을 충분히 뒷받침할 수 있는 높이를 유지해야 하므로 90~110㎛ 정도의 두께로 형성하는 것이 바람직하다.In step S200, the photoresist 35 may be coated with 90 μm to 110 μm. Since the photoresist 35 to be applied in step S200 serves as a support 30, it should maintain a height that can sufficiently support the operation of the attraction force induced in the cavity 40 of about 90 ~ 110㎛ It is preferable to form in thickness.

단계 S300에서는, 포토마스크(60)를 이용하여 노광 공정을 수행할 수 있다. 이때, 포토마스크(60)는 픽셀 단위의 격자 또는 라인 패턴일 수 있다. 즉, 포토마스크(60)의 패턴을 원하는 지지대(30)의 형태대로 하고, 단계 S200에서 도포한 포토레지스트(35) 위에 놓고 빛에 노출시켜 포토마스크(60)의 패턴이 그대로 포토레지스트(35)에 옮겨지도록 하는 것이다. 본 발명에서는, 사용자에게 햅틱 감각을 제공하고자 하는 픽셀 단위의 격자 또는 라인 패턴을 가진 포토마스크(60)를 사용하여, 사용자가 미세한 촉각을 느낄 수 있도록 할 수 있다. 픽셀의 크기는 사용자가 인지할 수 있는 크기로 함이 바람직하며, 용도에 따라 0.1~20㎜ 등 다양하게 할 수 있다.In operation S300, an exposure process may be performed using the photomask 60. In this case, the photomask 60 may be a grid or line pattern in units of pixels. That is, the pattern of the photomask 60 is in the form of a desired support 30, placed on the photoresist 35 applied in step S200 and exposed to light so that the pattern of the photomask 60 remains as it is. To be transferred to. In the present invention, the photomask 60 having a grid or line pattern in a pixel unit to provide a haptic sensation to the user may be used to allow the user to feel fine tactile sensations. The size of the pixel is preferably a size that can be recognized by the user, it can be various, such as 0.1 ~ 20mm depending on the application.

단계 S400에서는, 단계 S200에서 도포된 포토레지스트(35)를 부분적으로 제거하여 지지대(30)를 형성할 수 있다. 포토레지스트(35)를 빛에 노출시키면 화학적 성질이 변화하게 되므로, 포토레지스트(35)를 이용한 식각(Lithography) 기술을 이용하여 지지대(30)를 형성할 수 있다. 지지대(30)는 단계 S300의 포토마스크(60)의 형태에 따라 형성되게 된다. 단계 S400에서 부분적으로 제거된 부분이 추후 공동(40)이 되며, 이 부분에 유도된 정전기력에 의해 사용자가 촉각을 느낄 수 있게 된다.In step S400, the photoresist 35 applied in step S200 may be partially removed to form the support 30. Since the chemical properties are changed when the photoresist 35 is exposed to light, the support 30 may be formed using a lithography technique using the photoresist 35. The support 30 is formed according to the shape of the photomask 60 of step S300. The part that is partially removed in step S400 becomes a cavity 40 later, and the user can feel the touch by the electrostatic force induced in this part.

단계 S500에서는, 지지대(30) 위에 접착층(70)을 형성할 수 있다. 접착층(70)은 지지대(30)와 작동부(20)를 부착하기 위한 것으로서, 지지대(30)나 작동부(20)를 훼손하지 않아야 한다. 접착층(70)은 폴리비닐 아세테이트(Polyvinyl Acetate)로 형성될 수 있다.In step S500, the adhesive layer 70 may be formed on the support 30. The adhesive layer 70 is for attaching the support 30 and the operation unit 20, and should not damage the support 30 or the operation unit 20. The adhesive layer 70 may be formed of polyvinyl acetate.

단계 S600에서는, 단계 S400에서 형성된 지지대(30) 위에 작동부(20)를 부착할 수 있으며, 단계 S500에서 형성된 접착층(70)에 의해 서로 부착될 수 있다. 작동부(20)는 전기 신호에 따라 형태를 변형시킬 수 있기 때문에, 사용자가 작동부(20)의 변형에 따라 촉각을 느낄 수 있게 된다. 작동부(20)를 부착함으로써, 하판(10)과 작동부(20) 사이에는 공동(40)이 형성되게 된다. 작동부(20)는 전기 신호에 따라 그 형태가 변형될 수 있는 셀룰로오스 박막일 수 있으며, 더욱 바람직하게는 투명도가 높고 대전되기 쉬운 셀룰로오스 아세테이트 박막일 수 있다. 특히, 도 9에 도시된 바와 같이, 회전 도포법에 의해 제조된 셀룰로오스 아세테이트 박막은 투명도가 높고 대전되기 쉽기 때문에 작동부로 사용하면 효과적인 햅틱을 제공할 수 있다.In step S600, the operation unit 20 may be attached onto the support 30 formed in step S400, and may be attached to each other by the adhesive layer 70 formed in step S500. Since the operation unit 20 can change the shape according to the electrical signal, the user can feel the touch according to the deformation of the operation unit 20. By attaching the operation part 20, the cavity 40 is formed between the lower plate 10 and the operation part 20. The operation unit 20 may be a cellulose thin film that can be modified in shape according to an electrical signal, and more preferably, may be a cellulose acetate thin film having high transparency and easy charging. In particular, as shown in Figure 9, the cellulose acetate thin film produced by the rotary coating method is high transparency and easy to charge can be used as an operating part can provide an effective haptic.

단계 S700에서는, 단계 S100의 기판(80)을 제거할 수 있다. 기판(80)은 공정을 원활하게 하기 위해 필요한 것으로서, 기판(80)을 제거함으로써 투명도가 매우 높고 얇은 필름 형태를 가진 셀룰로오스 기반의 필름형 햅틱 액추에이터를 제조할 수 있다.In step S700, the substrate 80 of step S100 may be removed. The substrate 80 is required to facilitate the process, and by removing the substrate 80, a cellulose-based haptic actuator having a very high transparency and a thin film form may be manufactured.

전술한 바와 같은 제조 방법에 따라 제조된 셀룰로오스 기반의 필름형 햅틱 액추에이터는, 셀룰로오스가 가지고 있는 홀에 의해 발생할 수 있는 진동력 뿐 아니라, 더 큰 홀을 만들어서 전하를 많이 쌓았다가 없앴다가 할 수 있으므로 정전기력에 의한 진동력을 극대화할 수 있다. 또한, 이와 같이 큰 홀에 의한 정전기력에 의해 작동부인 셀룰로오스 박막이 상하로 휠 수 있으므로, 진동력 뿐 아니라 힘을 발생시켜 효과적인 햅틱 액추에이터로 활용될 수 있다.The cellulose-based haptic actuator manufactured according to the manufacturing method as described above, as well as the vibration force that can be generated by the holes of the cellulose, as well as the electrostatic force can be accumulated and eliminated a lot of charges by making a larger hole The vibration force by can be maximized. In addition, since the cellulose thin film as the operating portion can be bent up and down by the electrostatic force by the large hole in this way, it can be utilized as an effective haptic actuator by generating force as well as vibration force.

이상 설명한 본 발명은 본 발명이 속한 기술분야에서 통상의 지식을 가진 자에 의하여 다양한 변형이나 응용이 가능하며, 본 발명에 따른 기술적 사상의 범위는 아래의 특허청구범위에 의하여 정해져야 할 것이다.The present invention described above may be variously modified or applied by those skilled in the art, and the scope of the technical idea according to the present invention should be defined by the following claims.

Claims (13)

햅틱 액추에이터로서,As a haptic actuator, 압전 현상이 있는 박막 형태의 셀룰로오스 종이 작동기 필름; 및A cellulose paper actuator film in the form of a thin film having a piezoelectric phenomenon; And 상기 종이 작동기 필름의 상면에 위치하는 금속 전극을 포함하며,A metal electrode positioned on an upper surface of the paper actuator film, 상기 금속 전극은,The metal electrode, 상기 종이 작동기 필름의 셀룰로오스 섬유 방향과 40~50°의 각도를 이루는 것을 특징으로 하는, 셀룰로오스 종이 작동기 필름을 이용한 햅틱 액추에이터.Haptic actuator using a cellulose paper actuator film, characterized in that to form an angle of 40 ~ 50 ° with the cellulose fiber direction of the paper actuator film. 제1항에 있어서,The method of claim 1, 상기 종이 작동기 필름의 하면에 위치하며 박막 형태의 금속 막을 더 포함하는 것을 특징으로 하는, 셀룰로오스 종이 작동기 필름을 이용한 햅틱 액추에이터.The haptic actuator using a cellulose paper actuator film, characterized in that located on the lower surface of the paper actuator film and further comprising a metal film in the form of a thin film. 제1항에 있어서, 상기 종이 작동기 필름과 상기 금속 막은,The method of claim 1, wherein the paper actuator film and the metal film, 은을 포함하는 접착제에 의해 서로 결합되는 것을 특징으로 하는, 셀룰로오스 종이 작동기 필름을 이용한 햅틱 액추에이터.A haptic actuator using a cellulose paper actuator film, which is bonded to each other by an adhesive including silver. 제1항에 있어서, 상기 금속 전극은,The method of claim 1, wherein the metal electrode, 금인 것을 특징으로 하는, 셀룰로오스 종이 작동기 필름을 이용한 햅틱 액추에이터.A haptic actuator using a cellulose paper actuator film, characterized in that it is gold. 제1항에 있어서, 상기 종이 작동기 필름은,The method of claim 1, wherein the paper actuator film, 셀룰로오스 아세테이트로 형성된 종이 작동기 필름인 것을 특징으로 하는, 셀룰로오스 종이 작동기 필름을 이용한 햅틱 액추에이터.A haptic actuator using a cellulose paper actuator film, characterized in that it is a paper actuator film formed of cellulose acetate. 제1항에 있어서,The method of claim 1, 상기 종이 작동기 필름은 복수이며,The paper actuator film is plural, 각각 은을 포함하는 접착제에 의해 코팅되어 서로 부착되고 전기적으로 연결되며,Each coated with an adhesive comprising silver, attached to and electrically connected to each other, 상기 금속 전극은 상기 복수의 종이 작동기 필름의 최상면에 위치하는 것을 특징으로 하는, 셀룰로오스 종이 작동기 필름을 이용한 햅틱 액추에이터.The haptic actuator using a cellulose paper actuator film, characterized in that the metal electrode is located on the top surface of the plurality of paper actuator film. 햅틱 액추에이터의 제조 방법으로서,As a manufacturing method of a haptic actuator, (1) 기판 윗면에 박막 형태의 하판을 부착하는 단계;(1) attaching a lower plate in the form of a thin film on the upper surface of the substrate; (2) 상기 하판의 윗면에 포토레지스트를 도포하는 단계;(2) applying a photoresist on the upper surface of the lower plate; (3) 포토마스크를 이용하여 노광 공정을 수행하는 단계;(3) performing an exposure process using a photomask; (4) 상기 단계 (2)에서 도포된 포토레지스트를 부분적으로 제거하여 지지대를 형성하는 단계;(4) forming a support by partially removing the photoresist applied in step (2); (5) 상기 단계 (4)에서 형성된 지지대 위에 인가되는 전기 신호에 따라 그 형태가 변형되는 셀룰로오스 박막으로 구성되는 작동부를 부착하는 단계; 및(5) attaching an operation part composed of a cellulose thin film whose shape is modified in accordance with an electrical signal applied on the support formed in step (4); And (6) 상기 단계 (1)의 기판을 제거하는 단계를 포함하는 것을 특징으로 하는, 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법.(6) A method of manufacturing a cellulose-based haptic actuator, comprising the step of removing the substrate of step (1). 제7항에 있어서, 상기 단계 (1)에서는,The method according to claim 7, wherein in step (1), 상기 하판을 셀룰로오스 박막으로 하는 것을 특징으로 하는, 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법.Method for producing a cellulose-based film-type haptic actuator, characterized in that the lower plate is a cellulose thin film. 제8항에 있어서, 상기 하판 및 작동부는,The method of claim 8, wherein the lower plate and the operating unit, 셀룰로오스 아세테이트 박막인 것을 특징으로 하는, 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법.Method for producing a cellulose-based haptic actuator, characterized in that the cellulose acetate thin film. 제9항에 있어서, 상기 하판 및 작동부는,The method of claim 9, wherein the lower plate and the operating unit, 상기 회전 도포법에 의해 제조된 셀룰로오스 아세테이트 박막인 것을 특징으로 하는, 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법.Method for producing a cellulose-based film-type haptic actuator, characterized in that the cellulose acetate thin film produced by the rotary coating method. 제7항에 있어서, 상기 단계 (2)에서는,The method of claim 7, wherein in step (2), 상기 포토레지스트를 90~110㎛로 도포하는 것을 특징으로 하는, 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법.Method for producing a cellulose-based film-type haptic actuator, characterized in that for applying the photoresist 90 ~ 110㎛. 제7항에 있어서, 상기 단계 (3)에서는,The method of claim 7, wherein in step (3), 픽셀 단위의 격자 또는 라인 패턴의 포토마스트를 이용하여 노광 공정을 수행하는 것을 특징으로 하는, 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법.Method of manufacturing a cellulose-based film-type haptic actuator, characterized in that for performing the exposure process using a pixel or grating or line pattern of the photomask. 제7항에 있어서,The method of claim 7, wherein 상기 단계 (4)에서 형성된 지지대 위에 접착층을 형성하는 단계Forming an adhesive layer on the support formed in step (4) 를 더 포함하며,More, 상기 단계 (5)에서는,In the step (5), 상기 형성된 접착층 위에 상기 작동부를 부착하는 것을 특징으로 하는, 셀룰로오스 기반의 필름형 햅틱 액추에이터의 제조 방법.Method for manufacturing a cellulose-based film-type haptic actuator, characterized in that for attaching the operating portion on the formed adhesive layer.
PCT/KR2011/008567 2010-12-28 2011-11-10 Haptic actuator using cellulose paper actuator film and method for manufacturing same Ceased WO2012091282A2 (en)

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KR100678987B1 (en) * 2005-03-17 2007-02-06 인하대학교 산학협력단 Biomimetic Paper Actuator, Operation Method of Biomimetic Paper and Manufacturing Method of Biomimetic Paper

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