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WO2012067444A3 - 산화막이 형성된 도전성 필름 및 그 제조방법 - Google Patents

산화막이 형성된 도전성 필름 및 그 제조방법 Download PDF

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Publication number
WO2012067444A3
WO2012067444A3 PCT/KR2011/008802 KR2011008802W WO2012067444A3 WO 2012067444 A3 WO2012067444 A3 WO 2012067444A3 KR 2011008802 W KR2011008802 W KR 2011008802W WO 2012067444 A3 WO2012067444 A3 WO 2012067444A3
Authority
WO
WIPO (PCT)
Prior art keywords
conductive layer
film
producing same
oxide film
conductive film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2011/008802
Other languages
English (en)
French (fr)
Other versions
WO2012067444A2 (ko
Inventor
김지희
김정범
이정형
박민춘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LG Chem Ltd
Original Assignee
LG Chem Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LG Chem Ltd filed Critical LG Chem Ltd
Priority to CN201180055243.XA priority Critical patent/CN103210453B/zh
Priority to JP2013539763A priority patent/JP5818383B2/ja
Priority to EP11841789.8A priority patent/EP2629308B1/en
Publication of WO2012067444A2 publication Critical patent/WO2012067444A2/ko
Publication of WO2012067444A3 publication Critical patent/WO2012067444A3/ko
Priority to US13/894,928 priority patent/US9101059B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0296—Conductive pattern lay-out details not covered by sub groups H05K1/02 - H05K1/0295
    • H05K1/0298—Multilayer circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/138—Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/10—Semiconductor bodies
    • H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
    • H10F77/169—Thin semiconductor films on metallic or insulating substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/206—Electrodes for devices having potential barriers
    • H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/244—Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/50—Protective arrangements
    • G02F2201/501—Blocking layers, e.g. against migration of ions
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/16—Materials and properties conductive
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • H01B1/023—Alloys based on aluminium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • H01B1/026—Alloys based on copper
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Laminated Bodies (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Electroluminescent Light Sources (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

본 발명은 기재; 기재 위에 형성된 제1 도전층; 및 제1 도전층 위에 형성된 패턴화된 제2 도전층을 포함하며, 제2 도전층의 표면에는 산화막이 형성된 도전성 필름 및 그 제조방법에 관한 것으로서, 도전층의 급격한 산화로 인한 불량 내지 기재의 파손을 방지하고, 발광 균일도를 높일 수 있다.
PCT/KR2011/008802 2010-11-17 2011-11-17 산화막이 형성된 도전성 필름 및 그 제조방법 Ceased WO2012067444A2 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN201180055243.XA CN103210453B (zh) 2010-11-17 2011-11-17 形成有氧化膜的导电膜及其制造方法
JP2013539763A JP5818383B2 (ja) 2010-11-17 2011-11-17 酸化膜が形成された導電性フィルムを備える有機発光ダイオードディスプレイ及びその製造方法
EP11841789.8A EP2629308B1 (en) 2010-11-17 2011-11-17 Conductive film with an oxide film and method for producing same
US13/894,928 US9101059B2 (en) 2010-11-17 2013-05-15 Conductive film having oxide layer and method of manufacturing the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20100114642 2010-11-17
KR10-2010-0114642 2010-11-17

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US13/894,928 Continuation US9101059B2 (en) 2010-11-17 2013-05-15 Conductive film having oxide layer and method of manufacturing the same

Publications (2)

Publication Number Publication Date
WO2012067444A2 WO2012067444A2 (ko) 2012-05-24
WO2012067444A3 true WO2012067444A3 (ko) 2012-07-12

Family

ID=46084532

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/008802 Ceased WO2012067444A2 (ko) 2010-11-17 2011-11-17 산화막이 형성된 도전성 필름 및 그 제조방법

Country Status (7)

Country Link
US (1) US9101059B2 (ko)
EP (1) EP2629308B1 (ko)
JP (1) JP5818383B2 (ko)
KR (2) KR20120053480A (ko)
CN (1) CN103210453B (ko)
TW (1) TWI484571B (ko)
WO (1) WO2012067444A2 (ko)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5984570B2 (ja) 2012-08-09 2016-09-06 日東電工株式会社 導電性フィルム
KR101512236B1 (ko) * 2012-08-31 2015-04-16 주식회사 엘지화학 금속 구조체 및 이의 제조방법
CN105518065B (zh) * 2013-09-06 2020-03-10 索尔维特殊聚合物意大利有限公司 导电组件
KR101768286B1 (ko) 2013-11-27 2017-08-16 주식회사 엘지화학 전도성 구조체 전구체, 전도성 구조체 및 이의 제조방법
KR20160014553A (ko) * 2014-07-29 2016-02-11 주식회사 엘지화학 전도성 적층체 및 이의 제조방법
JP6251782B2 (ja) * 2016-08-02 2017-12-20 日東電工株式会社 導電性フィルム
CN106910780B (zh) * 2017-05-08 2020-12-11 京东方科技集团股份有限公司 薄膜晶体管及制造方法、阵列基板、显示面板、显示装置

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Also Published As

Publication number Publication date
WO2012067444A2 (ko) 2012-05-24
JP5818383B2 (ja) 2015-11-18
US9101059B2 (en) 2015-08-04
US20130248227A1 (en) 2013-09-26
CN103210453A (zh) 2013-07-17
EP2629308B1 (en) 2019-03-06
TWI484571B (zh) 2015-05-11
JP2014503381A (ja) 2014-02-13
EP2629308A4 (en) 2017-01-04
KR20150022964A (ko) 2015-03-04
TW201243969A (en) 2012-11-01
KR20120053480A (ko) 2012-05-25
EP2629308A2 (en) 2013-08-21
CN103210453B (zh) 2016-11-02

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