WO2012043682A1 - Hydrogen peroxide solution atomization device, sterilization substance generation device, gas generation device and isolator - Google Patents

Abstract

[Problem] To provide an atomization device capable of preventing distortion from occurring in a vibration plate during assembling to achieve higher-efficiency atomization of a hydrogen peroxide solution, a longer-life vibration plate, and more constant quality. [Solution] A hydrogen peroxide solution atomization device comprises a reservoir in which a hydrogen peroxide solution is retained, and an atomization unit which atomizes the hydrogen peroxide solution in the reservoir by ultrasonic vibration so that the hydrogen peroxide solution is discharged together with carrier gas, and is characterized in that the atomization unit is provided with an accommodation portion which retains therein propagation liquid for propagating the ultrasonic vibration, and the reservoir is provided with an opening which penetrates a bottom plate and communicates with the accommodation portion, a groove which is continuously formed around the opening in the outer surface of the bottom plate, an elastic seal member which is in contact with the bottom surface and inner peripheral surface close to the opening of the groove and is disposed so as to protrude from the outer surface of the bottom plate, a vibration plate which covers the opening and the groove, and a securing plate which presses and secures the vibration plate to the elastic seal member and the outer surface of the bottom plate so that the vibration plate seals the opening.

Description

Hydrogen peroxide water atomization device, sterilization substance generator, gas generator and isolator

The present invention relates to an atomizing device for hydrogen peroxide, a sterilizing substance generating device, a gas generating device, and an isolator.

In an isolator that performs a work on a biological material such as a human cell, a sterilization process is performed to make the work chamber as sterile as possible before the work. In this sterilization process, for example, gasified hydrogen peroxide solution is supplied into the working chamber to kill germs and the like existing in the working chamber. The applicant of the present application has applied for a sterilizing substance supply device that gasifies the hydrogen peroxide solution and supplies it into the working chamber of the isolator (patent application: Japanese Patent Application No. 2009-178085).

This sterilizing substance supply apparatus is provided with a cup for storing hydrogen peroxide water, an ultrasonic vibrator, and a heater. The liquid hydrogen peroxide water is atomized by ultrasonic vibration, and the atomized hydrogen peroxide water is heated by a heater. It is gasified by heating. When the hydrogen peroxide solution in the cup is exhausted, the ultrasonic vibrator is empty and damaged, so a container is placed under the cup to fill it with ultrasonic propagation material (for example, pure water). The sonic transducer is provided under the container so as to transmit the ultrasonic vibration to the hydrogen peroxide solution in the cup through the propagation material. And at the boundary between the bottom of the cup and the container filled with the propagating substance, it is sealed so that the propagating substance and hydrogen peroxide are not mixed, and the stainless steel thin plate is used to transmit the ultrasonic vibration efficiently. (Diaphragm) is attached. The ultrasonic vibration generated by the ultrasonic vibrator is transmitted through the propagation material, passes through the vibration plate and reaches the surface of the hydrogen peroxide solution, so that a water column stands there and promotes atomization.

The device uses an O-ring to maintain airtightness when installing the diaphragm. As shown in FIGS. 2A and 3A in the above patent application, an annular groove 2145 is cut in the bottom surface of the cup 214, an O-ring 2144 is fitted therein, and a diaphragm 2141 and a presser plate are provided thereon. The flat plates 2142 are overlapped and fixed with screws 2143. In such a configuration, the outer diameter of the annular groove 2145 and the width of the groove are usually set so that the O-ring contacts the wall surface on the outer peripheral side of the groove at the beginning of assembly.

JP 2010-169366 A

In such an atomizing device, when the screw is tightened and the diaphragm is pressed against the O-ring by a flat plate, the O-ring is elastically deformed and is in close contact with the bottom and outer peripheral surfaces of the groove and the diaphragm to be airtight. By the way, since the O-ring is pressed down and flattened at this time, the contact with the diaphragm moves away from the outer peripheral surface of the groove when the assembly is completed, that is, approaches the inside. Since the diaphragm is made of a very thin plate, when attached to the apparatus, the O-ring may be dragged to cause wrinkles or distortion. When wrinkles or distortion occur in the diaphragm, it is considered that the ultrasonic vibration is refracted or reflected, and the ultrasonic vibration is diffused and attenuated, which adversely affects the formation of water columns on the hydrogen peroxide surface. The speed of atomization was decreasing. In addition, the life of the diaphragm may be adversely affected. Since distortion generated in the diaphragm is generated during the work of assembling the diaphragm to the atomizer, the degree of the distortion varies depending on the individual apparatus, and it may be difficult to keep the quality of the atomizer constant.

In order to solve the above-mentioned problems, the atomization device of the present invention includes a storage unit in which hydrogen peroxide solution is stored, and the hydrogen peroxide solution so that the hydrogen peroxide solution in the storage unit is discharged together with a carrier gas. An atomizing unit for atomizing the ultrasonic vibration by ultrasonic vibration, wherein the atomizing unit includes a storage unit for storing a propagation liquid that propagates ultrasonic vibration, and the storage unit An opening that penetrates through the bottom plate and communicates with the housing portion, a groove that is continuously formed around the opening on the outer surface of the bottom plate, a bottom surface of the groove, and an inner peripheral surface near the opening, and An elastic seal member arranged so as to protrude from the outer surface of the bottom plate, a diaphragm covering the opening and the groove, and the diaphragm pressed against the outer surface of the elastic seal member and the bottom plate so as to seal the opening With fixing plate to fix Characterized by comprising a.

According to the atomization apparatus of the present invention, it is possible to prevent the diaphragm from being distorted during assembly. Further, the efficiency of atomization of the hydrogen peroxide solution can be increased, the life of the diaphragm can be extended, and the quality can be made constant.

It is a figure which shows the structural example of an isolator. It is a figure which shows the structural example of a sterilization gas production | generation apparatus. (A) is an exploded view of the storage part of the atomization apparatus concerning this embodiment, (b) is the figure which assembled the storage part of the atomization apparatus shown to (a). (A) is the photograph which image | photographed the storage part of the atomization apparatus concerning this embodiment from the ultrasonic transducer | vibrator side, (b) is the diaphragm fixed to the bottom face of the cup of the atomization apparatus of a comparison object with the screw. 4 is a photograph of the flat plate taken from the ultrasonic transducer side. In the atomization apparatus concerning this embodiment, and the atomization apparatus of a comparison object, it is a figure which shows the relationship between the elapsed time after starting atomization, and the atomization amount, respectively. (A) is an exploded view of the storage part of the atomization apparatus which concerns on 2nd Embodiment, (b) is the figure which assembled the storage part of the atomization apparatus shown to (a). (A) is the photograph which image | photographed the storage part of the atomization apparatus concerning 2nd Embodiment from the ultrasonic transducer | vibrator side, (b) is the vibration fixed to the bottom face of the cup of the atomization apparatus of a comparison object with the screw. It is the photograph which image | photographed the board and the flat plate from the ultrasonic transducer | vibrator side. (A) is an exploded view of the storage part of the atomization apparatus which concerns on 3rd Embodiment, (b) is the figure which assembled the storage part of the atomization apparatus shown to (a). It is a figure which shows the structure of 10 A of isolators which are one Embodiment of this invention. It is a side view of sterilization gas generator 33A. It is a figure which shows the outline | summary of the atomization apparatus 100A. It is a figure for demonstrating the change of the propagation water at the time of vibrating the ultrasonic transducer | vibrator 120A. It is a figure which shows the time change of the residual liquid of the cup 110A at the time of changing the distance D. FIG. It is a figure which shows the time change of the residual liquid of the cup 110A at the time of distance D = 6mm. It is a figure which shows the time change of the residual liquid when the water level H is higher than the bottom face of diaphragm 115A. It is a figure which shows the functional block implement | achieved by the microcomputer 73A. It is a flowchart which shows an example of the process which 73A of microcomputers implement. It is a figure which shows the structure of the general atomization apparatus 500. FIG. It is a figure which shows the structure of the isolator 10B which is one Embodiment of this invention. It is a side view of sterilization gas generator 33B. It is a figure which shows the functional block implement | achieved by the microcomputer 73B. It is a flowchart which shows an example of the process which the microcomputer 73B implements. It is a figure which shows an example of pressure P1, P2 measured when there is no hole in diaphragm 116B. It is a figure which shows an example of pressure P1, P2 measured when there is a hole in diaphragm 116B. It is a figure which shows the structural example in the case of directly pressurizing the space A of the sterilization gas generator 33B.

At least the following matters will become apparent from the description of the present specification and the accompanying drawings.
The first embodiment of the present invention will be described below. In addition, the atomization apparatus 100 which concerns on this invention is integrated in the isolator as the sterilization gas production | generation apparatus 20 in this embodiment. For this reason, an isolator will be described as an example.
In this specification, the hydrogen peroxide solution is an aqueous hydrogen peroxide solution in which hydrogen peroxide is dissolved in water. In the present embodiment, an aqueous solution containing 35% hydrogen peroxide is mainly used. Further, the generation of hydrogen peroxide gas does not generate pure hydrogen peroxide gas, but also includes a mixture of hydrogen peroxide and a mist of hydrogen peroxide water.

<Overall configuration of isolator>
As shown in FIG. 1, the isolator includes a work chamber 1, a gas supply unit 2, a gas discharge unit 3, a sterilization gas supply device 4, and a control unit 5.

The work chamber 1 is a portion that divides a work space for performing work in an aseptic environment, and is configured by a box-like member having a front door 6 on the front surface. The front door 6 is configured to be openable and closable from the outside. A work glove 7 is provided on the front door 6. The work glove 7 is inserted with an operator's arm when working in the work space 8.

A gas supply port 9 is provided on one side of the work chamber 1. A gas (for example, hydrogen peroxide gas as a sterilization gas) is supplied from the gas supply unit 2 through the gas supply port 9. Here, the gas supply port 9 is provided with a HEPA filter 10. For this reason, dust or the like contained in the gas from the gas supply unit 2 is captured by the HEPA filter 10, and only the gas is supplied to the work space 8.

A gas discharge port 11 is provided on the other side of the work chamber 1. The gas exhaust port 11 is also provided with a HEPA filter 10. For this reason, dust and the like are prevented from entering the work space 8 through the gas discharge port 11. The gas in the work space 8 is discharged from the gas discharge port 11. The discharged gas is sent to the gas discharge unit 3.

The gas supply unit 2 is a part that supplies gas to the work chamber 1. The gas supply unit 2 is provided with an intake port 12, a first three-way valve 13, and a fan 14.

The intake port 12 is a part that takes in air from the outside. The fan 14 sends the air taken in from the outside to the first three-way valve 13. The first three-way valve 13 is in communication with each of the sterilization gas supply device 4, the fan 14, and the work chamber 1. And a flow path is switched according to the control information from the control part 5. FIG.

Therefore, when the sterilization gas supply device 4 and the work chamber 1 are communicated with each other by the first three-way valve 13, hydrogen peroxide gas is supplied to the work chamber 1. On the other hand, when the fan 14 and the work chamber 1 are in communication with each other by the first three-way valve 13, air is supplied to the work chamber 1 by the operation of the fan 14. The fan 14 is switched between an operating state and a stopped state by a control signal from the control unit 5. In addition, the amount of gas delivered can be adjusted.

The gas discharge part 3 is a part for discharging the gas in the work chamber 1. The gas discharge unit 3 is provided with a second three-way valve 15, a sterilizing substance reduction processing unit 16, an exhaust port 17, and a fan 21. The second three-way valve 15 communicates with each of the gas discharge port 11, the fan 21, and the sterilizing substance reduction processing unit 16 of the work chamber 1. And a flow path is switched according to the control information from the control part 5. FIG. For example, the gas discharge port 11 and the sterilizing substance reduction processing unit 16 are communicated, or the gas discharge port 11 and the fan 21 are communicated.

The fan 21 supplies the gas from the gas discharge port 11 to the sterilization gas supply device 4 (sterilization gas generation device 20). For this reason, when the gas exhaust port 11 and the fan 21 are communicated and the sterilization gas supply device 4 and the work chamber 1 are communicated, the gas from the gas exhaust port 11 circulates in the isolator. Become.

The sterilization substance reduction processing unit 16 is provided between the second three-way valve 15 and the exhaust port 17, and the concentration of hydrogen peroxide (sterilization substance) in the gas sent through the second three-way valve 15 is determined. This is the part that performs the process of reducing. The sterilizing substance reduction processing unit 16 is made of, for example, a metal catalyst such as platinum or activated carbon. The sterilization substance reduction processing unit 16 is not limited to a metal catalyst or activated carbon as long as the concentration of hydrogen peroxide can be reduced. The exhaust port 17 is a part that discharges the gas after being processed by the sterilizing substance reduction processing unit 16 to the atmosphere.

The sterilization gas supply device 4 supplies hydrogen peroxide water by gasification. The sterilization gas supply device 4 includes a sterilization substance cartridge 18, a pump 19, and a sterilization gas generation device 20. The sterilizing substance cartridge 18 stores hydrogen peroxide water as a sterilizing substance. The pump 19 pumps up the hydrogen peroxide solution stored in the sterilizing substance cartridge 18 and sends it to the sterilizing gas generator 20. The pump 19 is constituted by a peristaltic pump, for example. The sterilization gas generator 20 generates hydrogen peroxide gas (sterilization gas) from the supplied hydrogen peroxide solution. The generated hydrogen peroxide gas is supplied to, for example, the first three-way valve 13. The sterilization gas generator 20 will be described in detail later.

The control part 5 is a part which electrically controls each part mentioned above. The control unit 5 includes, for example, a first three-way valve 13 and a fan 14 that the gas supply unit 2 has, a second three-way valve 15 and a fan 21 that the gas discharge unit 3 has, and a sterilization gas generation device that the sterilization gas supply device 4 has. 20 etc. are controlled.

Under the control of the control unit 5, for example, the hydrogen peroxide gas generated by the sterilization gas generator 20 is supplied to the work chamber 1 through the first three-way valve 13, and the hydrogen peroxide gas discharged from the work chamber 1 is supplied. It is also possible to circulate the system by sending it to the sterilization gas generator 20 side through the second three-way valve 15. And if hydrogen peroxide gas is circulated in the system, the system can be made aseptic environment. As described above, the aseptic environment refers to an environment that is almost dust-free and aseptic as long as it prevents the introduction of substances other than those necessary for work performed in the work chamber 1.

<About the sterilization gas generator 20>
Next, an example of the sterilization gas generator 20 will be described. As shown in the partial cross-sectional view of FIG. 2, the sterilization gas generation device 20 includes an atomization device 100 including a storage unit 30 and an atomization unit 40, and a gasification unit 50. FIG. 2 is a partial cross-sectional view of the sterilization gas generation apparatus 20 in which the configuration excluding the heater 52 of the gasification unit 50, which will be described later, is cut in the vertical direction.

The storage unit 30 is a part that stores the hydrogen peroxide solution supplied from the pump 19. The storage unit 30 closes the storage unit main body 31 in which the hydrogen peroxide solution is stored, and the opening 312 opened in the bottom plate 311 of the storage unit main body 31, and generates ultrasonic waves in the hydrogen peroxide solution in the storage unit main body 31. A vibration plate 32 that transmits vibration, and an elastic seal member 33 and a fixing plate 34 for fixing the vibration plate 32 to the storage unit main body 31 are provided. Details of the storage unit 30 will be described later.

The atomization unit 40 is a part that atomizes the hydrogen peroxide solution stored in the storage unit 30, and includes a storage unit 41 and an ultrasonic transducer 42. The accommodating portion 41 is a portion that accommodates the ultrasonic transducer 42 and the ultrasonic wave propagation liquid 43 and is a hollow cylindrical container having an opening on the upper surface. The accommodating portion 41 is made of a metal such as stainless steel or a resin. A circular plate-like partition plate 44 that partitions the inner space vertically is provided in the inner space of the accommodating portion 41.

The ultrasonic vibrator 42 is an element that generates ultrasonic vibrations, and is attached to the partition plate 44 in a state of being housed in the housing body 45. The operation of the ultrasonic transducer 42 is controlled according to control information from the control unit 5. For example, the control unit 5 controls the start and stop of vibration and the strength of vibration.

In the space above the partition plate 44 in the accommodating portion 41, the ultrasonic wave propagation liquid 43 is stored. In the present embodiment, water is used as the ultrasonic wave propagation liquid 43. The ultrasonic wave propagation liquid 43 is not limited to water and may be any liquid that can propagate ultrasonic vibrations. Through this ultrasonic wave propagation liquid 43, the ultrasonic vibration generated by the ultrasonic vibrator 42 is propagated to the vibration plate 32 of the reservoir 30.

When the ultrasonic vibrator 42 is operated in a state where the hydrogen peroxide solution is stored in the storage unit 30, the ultrasonic vibration is propagated to the vibration plate 32 through the ultrasonic propagation liquid 43, and further, the storage unit 30. The water column rises when it reaches the surface of the hydrogen peroxide solution, and the hydrogen peroxide solution is atomized.

Next, the gasification unit 50 will be described. The gasification part 50 is a part that gasifies the atomized hydrogen peroxide solution, and includes an inner cylinder part 51, an outer cylinder part 52, a gas introduction pipe 53, and the like, and is provided above the storage part 30. It has been.

The inner cylinder part 51 is comprised with the metal cylindrical member. The inner cylinder portion 51 of the present embodiment includes a stainless steel portion 51A made of a stainless steel member and an aluminum portion 51B made of an aluminum member that is connected to the lower side of the stainless steel portion 51A and is thinner than the stainless steel portion 51A. Including. The inner cylinder part 51 is attached in a state facing the vertical direction. In the attached state, the inner cylinder portion 51 is positioned such that the lower end portion 55 is at a height directly above the storage portion 30.

The heater 52 is a member that is heated by energization, and includes a columnar heating element 56 and heat conductive fins 57 attached around the heating element 56. That is, the heat from the heating element 56 is diffused by the fins 57. The heater 52 is disposed in the inner space of the inner cylinder portion 51. For example, it is arranged in a range of about 3/4 of the length of the inner cylinder portion 51 from the upper end side.

A flow path regulating plate 58 is attached between the heating element 56 of the heater 52 and the inner wall surface of the inner cylinder portion 51. The flow path regulating plate 58 is configured by a substantially semicircular metal plate in which a contact portion with the heating element 56 is cut out in a semicircular shape. The flow path regulating plate 58 is attached in a substantially horizontal direction so as to cover one half of the inner space of the inner cylinder portion 51. In addition, a plurality of flow path regulating plates 58 are alternately arranged with a predetermined interval in the vertical direction. For example, the flow path restriction plates 58 are arranged at regular intervals, or arranged so that the upper side is dense and the lower side is rough. Further, the heater 52 may be disposed so that the portion is dense and rougher on the lower side. The heater 52 is positioned in the inner space of the inner cylinder portion 51 by these flow path regulating plates 58. Further, a meandering passage through which gas passes is defined in the inner space of the inner cylinder portion 51 by the passage restriction plate 58, and heat generated by the heating element 56 is transmitted to the inner cylinder portion 51 through the passage restriction plate 58. Is done.

A pipe 59 is attached to the upper side surface of the inner cylinder portion 51. Through this pipe 59, hydrogen peroxide gas is discharged. Note that the temperature of the gas flowing through the pipe 59 is detected by a temperature sensor (not shown), and a detection signal is output to the control unit 5. Moreover, the upper end part 60 of the inner cylinder part 51 is formed in the flange shape, and is sealed in the airtight state by the inner side cover member 61 being attached.

The outer cylinder part 53 is configured by a metal cylindrical member having a diameter slightly larger than that of the inner cylinder part 51. The outer cylinder part 53 of this embodiment is comprised with the stainless steel pipe.

In the inner space of the outer cylinder part 53, an inner cylinder part 51 is arranged. That is, the outer tube portion 53 and the inner tube portion 51 constitute a double tube. As described above, the lower end portion 54 of the outer cylinder portion 53 is connected to the upper end portion of the storage portion 30 in an airtight state. The outer cylindrical portion 53 covers the inner cylindrical portion 51 in a range of about 4/5 of its length from the lower end. A pipe 62 is attached to the upper side surface of the outer cylinder portion 53. This pipe 62 is for introducing a carrier gas. That is, the carrier gas flows into the space between the outer cylinder portion 53 and the inner cylinder portion 51 (the gas flow path 63 for carrier gas) through the pipe 62. In the present embodiment, clean air is used as the carrier gas, and air is introduced into the pipe 62 by the rotation of the air supply fan (carrier gas supply fan).

Further, the upper end portion 65 of the outer cylinder portion 53 is formed in a flange shape, and is sealed in an airtight state by attaching a ring-shaped outer lid member 66. Further, a tube opening 64 for passing a drain tube through which the hydrogen peroxide solution flows is provided on the lower side surface of the outer cylinder portion 53. Note that the gap between the drain tube and the tube opening 64 is closed by the bushing. For this reason, the tube opening 64 is sealed in an airtight state.

As described above, the operation of the sterilization gas generation device 20 is controlled by the control signal from the control unit 5 to generate sterilization gas. In the sterilization gas generator 20, first, energization of the heater 52 (heating element 56) and rotation of the air supply fan are started by the control signal. As a result, heat generation from the heating element 56 and supply of carrier gas (air) are started. Further, the pump 19 is driven to supply a predetermined amount of the hydrogen peroxide solution in the sterilizing substance cartridge 18 to the storage unit 30.

The carrier gas flowing through the pipe 62 flows into the gas flow path 63 from the upper part of the outer cylinder portion 53 and flows downward through the gas flow path 63. That is, it flows along the outer peripheral surface of the inner cylinder portion 51. Since the heat from the heating element 56 is transmitted to the inner cylinder part 51 through the flow path regulating plate 58, the fins 57, and the air, the inner cylinder part 51 is heated. Heating the inner cylinder part 51 causes heat exchange with the carrier gas flowing along the outer peripheral surface of the inner cylinder part 51, and the temperature of the carrier gas rises.

The carrier gas changes the direction of flow at the position of the reservoir 30. That is, it wraps around at the lower end 55 of the inner cylinder part 51 and flows into the inner space of the inner cylinder part 51. And this inner space rises. Since the heat from the heating element 56 is released to the inner space of the inner cylinder portion 51 through the fins 57 of the heater 52, the temperature of the carrier gas rising in the inner space is further increased. In addition, the meandering flow path formed by the plurality of flow path regulating plates 58 is formed in the inner space of the inner cylinder portion 51, so that the moving distance of the carrier gas can be increased, and the temperature of the carrier gas can be reliably ensured. Can be raised.

When the temperature of the carrier gas discharged from the inner cylinder portion 51 reaches the vaporization temperature of the hydrogen peroxide solution, the driving of the ultrasonic vibrator 42 is started. As described above, the ultrasonic vibration generated by the ultrasonic vibrator 42 is propagated to the diaphragm 32 via the ultrasonic wave propagation liquid 43. Then, the hydrogen peroxide solution in the reservoir 30 is atomized by the ultrasonic vibration of the diaphragm 32.

The atomized hydrogen peroxide solution rises in the inner space of the inner cylinder part 51 along the flow of the carrier gas. At this time, since the carrier gas is heated while flowing through the gas flow path 63 and the inner space forms a meandering flow path, the atomized hydrogen peroxide solution is sufficiently discharged. It can be heated and reliably gasified. Further, since the carrier gas is preheated, it is possible to prevent the atomized hydrogen peroxide solution from adhering to the lower end portion 55 of the inner cylinder portion 51 and being liquefied.

Furthermore, in this embodiment, since the inner cylinder part 51 is comprised with aluminum with favorable heat conductivity, also in this point, carrier gas can be heated efficiently and hydrogen peroxide water can be gasified reliably. In addition, since the carrier gas is heated in advance, heat exchange occurs between the hydrogen peroxide solution stored in the storage unit 30 and the carrier gas, and the evaporation of the hydrogen peroxide solution is promoted.

<About the storage unit>
Next, an example of the storage unit 30 will be described with reference to the cross-sectional views of FIGS. In the storage unit 30, a fixing plate 34 is attached to the storage unit main body 31 by screwing screws 35 so that the diaphragm 32 is fixed via an elastic seal member 33. First, with reference to Fig.3 (a), each structure of the storage part 30 before the fixing plate 34 is attached to the storage part main body 31 is demonstrated.

The reservoir main body 31 is made of, for example, metal, and includes a concave portion 310 that is recessed in an inverted frustoconical shape on the inner surface. The inside of the reservoir main body 31 and the ultrasonic wave propagation liquid 43 are stored on the bottom surface of the concave portion 310. A circular opening 312 penetrating the bottom plate 311 is formed so as to communicate with the housing portion 41. Note that the inner diameter of the upper surface side of the recess 310 is substantially equal to the inner diameter of the outer cylinder part 53 of the gasification part 50 and is set larger than the diameter of the inner cylinder part 51.

An annular groove 313 is formed around the opening 312 on the outer surface of the bottom plate 311 of the storage unit main body 31. In addition, a plurality of screw holes are formed on the outer surface of the bottom plate 311 of the storage unit body 31 at a distance L, which will be described later, from the groove 313 toward the opposite side of the opening 312 and at equal intervals around the opening 312. 314 is formed. Inside the screw hole 314, a female screw that is screwed with the male screw of the screw 35 is formed.

The elastic seal member 33 (so-called O-ring) is disposed near the opening 312 in the groove 313 of the reservoir main body 31. The cross-sectional diameter (thickness) of the elastic seal member 33 is larger than the depth of the groove 313, and protrudes from the outer surface of the bottom plate 311 when arranged in contact with the bottom surface of the groove 313 and the inner peripheral surface near the opening 312. The elastic seal member 33 is an annular packing made of, for example, silicon rubber. Here, the inner diameter of the groove 313 (the diameter formed by the inner peripheral surface) is slightly larger than the inner diameter of the elastic seal member 33. Thereby, the elastic seal member 33 is disposed so as to be in close contact with the inner peripheral surface of the groove 313 by an elastic force. Further, the width of the groove 313 is larger than the thickness of the elastic seal member 33, and there is a gap between the outer peripheral surface of the groove 313 far from the opening 312 and the elastic seal member 33.

The diaphragm 32 is formed of a stainless steel thin plate having a thickness of about 20 μm, for example. This diaphragm 32 is arrange | positioned so that the opening 312 of the storage part main body 31 and the groove | channel 313 in which the elastic seal member 33 is arrange | positioned may be covered. Further, in the vibration plate 32 arranged in this manner, a through hole 320 through which the screw 35 is inserted is formed at a position corresponding to the screw hole 314 of the storage unit main body 31.

The fixed plate 34 is a metal plate member having a thickness of about 2 mm, for example, and is disposed so as to face the bottom plate 311 of the storage unit main body 31 with the vibration plate 32 interposed therebetween. In the fixed plate 34 arranged in this manner, a through hole 340 for exposing the diaphragm 32 is formed at a position corresponding to the opening 312 of the reservoir main body 31. The through hole 340 has the same size (diameter) as the opening 312. Therefore, when the fixed plate 34 is attached, the elastic seal member 33 is pressed with the diaphragm 32 interposed therebetween. Further, in the fixing plate 34, a through hole 341 through which the screw 35 is inserted is formed at a position corresponding to the screw hole 314 of the storage unit main body 31.

Next, with reference to FIG. 3 (b), the structure of the reservoir 30 in which the fixing plate 34 is attached to the reservoir main body 31 will be described.

As described above, the elastic seal member 33, the vibration plate 32, and the fixed plate 34 are arranged on the outer surface of the bottom plate 311 in the storage unit main body 31, so that the through holes 320 and 341 concentric with the screw hole 314 are formed. On the other hand, the screw 35 is inserted. The fixing plate 34 is fixed to the outer surface of the bottom plate 311 in the storage portion main body 31 together with the vibration plate 32 and the elastic seal member 33 by screwing and tightening the male screw of the screw 35 to the female screw of the screw hole 314. . As a result, the fixing plate 34 presses and fixes the diaphragm 32 against the elastic seal member 33 and the bottom plate 311. As a result, the diaphragm 32 seals the opening 312. At that time, a portion of the elastic seal member 33 protruding from the bottom plate 311 is pressed against the fixed plate 34 via the diaphragm 32, so that the elastic seal member 33 moves from the inner peripheral surface of the groove 313 toward the outer peripheral surface. Elastically deforms to spread. That is, the elastic seal member 33 having a circular cross section is deformed and flattened when pressed from above and below. At this time, since the elastic seal member 33 is in close contact with the inner peripheral surface of the groove 313, the elastic seal member 33 is deformed while expanding outward. The elastic seal member 33 applies a stress F to the diaphragm 32 in the direction from the center of the opening 312 to the outside (the direction indicated by the arrow in FIG. 3B) by the frictional force. This stress F becomes a force, that is, tension toward the outer side of the diaphragm 32 from the center to the entire circumference, so that tension is applied to the diaphragm 32 to suppress wrinkles and distortion. For this reason, when attaching the diaphragm 32 to the storage part main body 31, it can prevent that a distortion arises in the part facing the opening 312 of the diaphragm 32. FIG.

The distance L between the groove 313 and the screw hole 314 is, for example, a plane where the diaphragm 32 is fixed to the outer surface of the bottom plate 311 so that the portion facing the opening 312 of the diaphragm 32 has no wrinkles or distortion. As shown, the portion opposite to the opening 312 with the groove 313 as a boundary is a distance at which the stress F can be sufficiently absorbed. That is, the longer the distance L, the smaller the stress per unit area on the opposite side of the opening 312 from the groove 313 in the diaphragm 32, and the easier it is to absorb the stress F.

The storage part main body 31 assembled in this way is attached so as to enter into the accommodating part 41 of the atomizing part 40 as shown in FIG. Accordingly, the lower part of the storage unit body 31 including the diaphragm 32 is immersed in the ultrasonic wave propagation liquid 43 in the storage unit 41.

<Comparison of characteristics of atomizer>
Here, referring to FIGS. 4 (a), (b) and FIG. 5, the atomization device 100 according to the present embodiment and the cup as shown in FIGS. 2A and 3A in the patent application described in the background art. When the diaphragm 2141 is fixed to the bottom surface of 214, the characteristics of the atomizer when the diaphragm 2141 is distorted (hereinafter referred to as a comparison target atomizer) are compared. 4A is a photograph of the storage unit 30 taken from the ultrasonic transducer 42 side in the atomization apparatus 100 according to this embodiment, and FIG. 4B is an atomization apparatus to be compared. 4 is a photograph of the diaphragm 2141 and the flat plate 2142 fixed to the bottom surface of the cup 214 by screws 2143 from the ultrasonic transducer side. FIG. 5 shows the relationship between the elapsed time from the start of atomization of the atomizer 100 shown in FIG. 4A and the amount of decrease in the amount of hydrogen peroxide water, and FIG. It is a figure which shows the relationship between the elapsed time after starting atomization of the atomization apparatus of the comparison object shown, and the amount of reduction of hydrogen peroxide water with a broken line.

As shown in FIGS. 4A and 4B, the diaphragm 32 of the atomizing device 100 according to the present embodiment has a planar shape in which wrinkles and distortion are further suppressed as compared with the atomizing device to be compared. It has become. Moreover, as shown in FIG. 5, in the atomization apparatus 100 which concerns on this embodiment, it is confirmed that about 20 g of hydrogen peroxide water is atomized in about 6 minutes, and in the atomization apparatus of a comparison object, about It was confirmed that 20 g of hydrogen peroxide was atomized in about 11 minutes. Therefore, in the atomization apparatus 100 which concerns on this embodiment, it was confirmed that hydrogen peroxide solution can be atomized more efficiently.

<Summary>
As described above, the atomization apparatus 100 according to this embodiment includes at least the storage unit 30 in which the hydrogen peroxide solution is stored, and the hydrogen peroxide solution in the storage unit 30 so that the hydrogen peroxide solution is discharged together with the carrier gas. An atomizing section 40 for atomizing water by ultrasonic vibration, the atomizing section 40 includes a storage section 41 for storing the ultrasonic wave propagation liquid 43, and the storage section 30 penetrates the bottom plate 311 and stores the storage section. 41, an opening 312 communicating with 41, a groove 313 continuously formed around the opening 312 on the outer surface of the bottom plate 311, a bottom surface of the groove 313 and an inner peripheral surface near the opening 312, and protrudes from the outer surface of the bottom plate 311. The elastic seal member 33 arranged in this manner, the diaphragm 32 covering the opening 312 and the groove 313, and the diaphragm 32 is pressed against the outer surfaces of the elastic seal member 33 and the bottom plate 311 so as to seal the opening 312. It is sufficient a fixing plate 34 to be constant.

According to this atomization apparatus 100, when assembling the storage unit 30, the diaphragm 32 can be fixed to the outer surface of the bottom plate 311 while applying a stress F to the diaphragm 32. Therefore, the diaphragm 32 can be kept in a uniform plane. it can.

Therefore, it is possible to prevent the diaphragm 32 from being distorted while keeping the quality of each assembly of the atomizer 100 constant. Thus, it can be expected that the atomization speed of the hydrogen peroxide solution is improved and the life of the diaphragm 32 is extended.

Further, in the above-described atomizing apparatus 100, the groove 313 is an annular groove, and the elastic seal member 33 is an annular packing, and adheres to the inner peripheral surface of the groove 313 near the opening 312 against elastic force. To do. According to the atomizing device 100, the elastic seal member 33, which is an annular packing, can apply the stress F more uniformly from the center of the portion facing the opening 312 of the diaphragm 32 toward the outer edge. For this reason, the part facing the opening 312 of the diaphragm 32 can be made into a more uniform planar shape. Further, since the fixing plate 34 and the like can be attached to the outer surface of the bottom plate 311 in a state where the elastic seal member 33 is in close contact with the groove 313, the assembling of the storage unit 30 can be facilitated.

Further, in the above-described atomizing apparatus 100, the fixed plate 34 is a single plate having a shape that exposes a portion facing the opening 312 of the diaphragm 32, and is screwed to the bottom plate 311 around the groove 313. According to this atomization apparatus 100, the ultrasonic vibration from the atomization part 40 can be more reliably transmitted to the part facing the opening 312 of the diaphragm 32. Further, the fixing plate 34 is attached to the bottom plate 311 by screwing the male screw of the screw 35 and the female screw of the screw hole 314 formed in the bottom plate 311, so that the diaphragm 32 is more attached to the outer surface of the bottom plate 311. It can be fixed reliably and easily.

Further, in the above-described atomizing apparatus 100, the fixed plate 34 is screwed to the bottom plate 311 via the diaphragm 32 around the groove 313. According to the atomizing device 100, the screw 35 is inserted into the through hole 321 provided in the vibration plate 32, so that the vibration plate 32 can be more reliably fixed to the outer plate 311.

In the above-described atomizing apparatus 100, the fixed plate 34 has a size that covers the diaphragm 32. According to this atomization apparatus 100, the fixing plate 34 can be attached to the bottom plate 311 so that the vibration plate 32 is sandwiched between the fixing plate 34 and the outer surface of the bottom plate 311. It can be more securely fixed to the outer surface.

Further, in the above-described atomizing device 100, the distance L between the position where the fixing plate 34 is screwed to the bottom plate 311 and the groove 313 is an elastic seal when the diaphragm 32 is fixed to the outer surface of the bottom plate 311. The stress that deforms the member 33 in the direction of the outer peripheral surface of the groove 313 opposite to the opening 312 is set to a distance that the diaphragm 32 can absorb. According to the atomization device 100, the portion of the diaphragm 32 that faces the opening 312 can be more reliably formed into a uniform plane.

The embodiment described above is for facilitating understanding of the present invention, and is not intended to limit the present invention. The present invention can be changed and improved without departing from the gist thereof, and the present invention includes equivalents thereof.

In the atomization apparatus 100 described above, the screw 32 is screwed into the screw hole 314 via the through holes 320 and 341, whereby the diaphragm 32 is fixed to the outer surface of the outer plate 311 by the fixing plate 34. However, the present invention is not limited to this. For example, the diaphragm 32 may be fixed to the outer surface of the outer plate 311 by attaching the fixing plate 34 with an adhesive. In addition, a locking hole may be provided on the outer surface of the outer plate 311 instead of the screw hole 314, and a claw portion that is locked to the locking hole may be provided on the fixing plate 34. Thus, the claw portion of the fixing plate 34 is locked in the locking hole of the outer plate 311, and the fixing plate 34 is attached to the outer plate 311, so that the diaphragm 32 is fixed to the outer surface of the outer plate 311. Also good.

In the above-described atomizing apparatus 100, the diaphragm 32 has the through hole 320 formed at a position corresponding to the screw hole 314. That is, the diameter of the diaphragm 32 is longer than the distance between the screw holes 314 facing each other with the opening 312 interposed therebetween. However, it is not particularly limited to this, and the diameter of the diaphragm 32 may be longer than the diameter of the annular groove 313.

=== Second Embodiment ===
Hereinafter, a second embodiment of the present invention will be described. In addition, since the whole structure of an isolator and the structure of the principal part of a sterilization gas production | generation apparatus are the same as 1st Embodiment, description is abbreviate | omitted.

<About the storage unit>
The storage part 30 of 2nd Embodiment is demonstrated with reference to sectional drawing of Fig.6 (a), (b). In FIG. 6, the same components as those shown in FIG. 3 are denoted by the same reference numerals, and the description thereof is omitted.

An annular groove 313 is formed around the opening 312 on the outer surface of the bottom plate 311 of the storage unit main body 31. On the outer surface of the bottom plate 311, the inner side (opening 312 side) of the groove 313 is a first outer surface 315, and the outer side (opposite side of the opening 312) of the groove 313 is a second outer surface 316. The first outer surface 315 is recessed by, for example, about 0.2 mm from the second outer surface 316, and a first step L1 is formed between the first outer surface 315 and the second outer surface 316. In the second outer surface 316, a plurality of screw holes 314 are formed around the opening 312 so as to be equidistant, for example. Inside this screw hole 314, a female screw that is screwed with the male screw of the screw 35 is formed.

The elastic seal member 33 is disposed on the outer peripheral surface of the groove 313 opposite to the opening 312 so as to protrude from the outer surface of the bottom plate 311. The elastic seal member 33 is an annular packing made of, for example, silicon rubber.

The diaphragm 32 is formed of a stainless steel thin plate having a thickness of about 20 μm, for example. This diaphragm 32 is arrange | positioned so that the opening 312 of the storage part main body 31 and the groove | channel 313 in which the elastic seal member 33 is arrange | positioned may be covered. Further, in the vibration plate 32 arranged in this manner, a through hole 320 through which the screw 35 is inserted is formed at a position corresponding to the screw hole 314 of the storage unit main body 31.

The fixed plate 34 is a metal plate member and is disposed so as to face the bottom plate 311 of the storage unit main body 31 with the vibration plate 32 interposed therebetween. In the fixed plate 34 arranged in this way, a surface facing the first outer surface 315 of the storage unit body 31 is a first facing surface 342 and a surface facing the second outer surface 316 is a second facing surface 343. The thickness of the second opposing surface 343 portion of the fixed plate 34 is, for example, about 2 mm. The thickness of the first facing surface 342 portion of the fixed plate 34 is about 0.2 mm thicker than the thickness of the second facing surface 343 portion. That is, on the surface of the fixed plate 34 facing the outer surface of the bottom plate 311, the first facing surface 342 protrudes from the second facing surface 343, and the second step M 1 corresponding to the first step L 1 is formed. In the present embodiment, the thickness of the portion facing the groove 313 on the surface facing the bottom plate 311 of the fixed plate 34 is, for example, about 2 mm, similar to the second facing surface 343 portion.

Further, in the fixed plate 34, a through hole 340 that exposes the diaphragm 32 is formed at a position corresponding to the opening 312 of the storage body 31, and a screw 35 is inserted at a position corresponding to the screw hole 314. A through hole 341 is formed.

Next, with reference to FIG. 6B, the structure of the reservoir 30 in which the fixing plate 34 is attached to the reservoir main body 31 will be described.

As described above, the elastic seal member 33, the vibration plate 32, and the fixed plate 34 are arranged on the outer surface of the bottom plate 311 in the storage unit main body 31, so that the through holes 320 and 341 concentric with the screw hole 314 are formed. On the other hand, the screw 35 is inserted. Then, the fixing plate 34 includes the vibration plate 32 and the elastic seal member so that the first step L1 and the second step M1 are fitted by screwing and tightening the male screw of the screw 35 to the female screw of the screw hole 314. 33 is fixed to the outer surface of the bottom plate 311 in the reservoir main body 31. As a result, the fixed plate 34 presses and fixes the diaphragm 32 against the elastic seal member 33 and the bottom plate 311. As a result, the diaphragm 32 seals the opening 312. At this time, the diaphragm 32 has a portion sandwiched between the first outer surface 315 and the first opposing surface 342 and a portion sandwiched between the second outer surface 316 and the second opposing surface 343. For this reason, the diaphragm 32 is bent by the height of the first step L1 and the second step M1, and the elastic force of the elastic seal member 33 is applied to the diaphragm 32 in the vertical direction. As a result, stress F1 is applied to the portion of the diaphragm 32 facing the opening 312 in the direction from the center of the opening 312 toward the outer edge (the direction indicated by the arrow in FIG. 6B). Therefore, by fixing the diaphragm 32 to the storage unit main body 31 with the fixing plate 34, it is possible to prevent distortion from occurring in a portion facing the opening 312 of the diaphragm 32. That is, the surface of the diaphragm 32 that transmits ultrasonic vibrations to the hydrogen peroxide solution stored in the storage unit main body 31 can be made flat.

Note that, in a state where the fixing plate 34 is attached to the storage portion main body 31, a portion protruding from the bottom plate 311 of the elastic seal member 33 is pressed against the fixed plate 34 via the vibration plate 32, and thus the elastic seal member 33 Is deformed against the elastic force so as to spread from the outer peripheral surface of the groove 313 toward the inner peripheral surface near the opening 312. That is, the elastic seal member 33 is less likely to be deformed by a force applied in a direction from the inner peripheral surface of the groove 313 toward the outer peripheral surface. For this reason, for example, when the pressure inside the reservoir main body 31 is higher than the pressure outside the reservoir main body 31, the elastic seal member 33 moves in the direction from the inner peripheral surface side to the outer peripheral surface side of the groove 313. Even if a force is applied, deformation of the elastic seal member 33 can be prevented, and the opening 312 can be efficiently sealed through the diaphragm 32.

<Comparison of characteristics of atomizer>
Here, referring to FIGS. 7 (a), (b) and FIG. 5, the atomizer 100 according to the present embodiment and the cup as shown in FIGS. 2A and 6A in the patent application described in the background art. When the diaphragm 2141 is fixed to the bottom surface of 214, the characteristics of the atomizer when the diaphragm 2141 is distorted (hereinafter referred to as a comparison target atomizer) are compared. 7A is a photograph of the storage unit 30 taken from the ultrasonic transducer 42 side in the atomization apparatus 100 according to this embodiment, and FIG. 7B is an atomization apparatus to be compared. 4 is a photograph of the diaphragm 2141 and the flat plate 2142 fixed to the bottom surface of the cup 214 by screws 2143 from the ultrasonic transducer side. Moreover, FIG. 5 shows the relationship between the elapsed time from the start of atomization of the atomization apparatus 100 shown in FIG. It is a figure which shows the relationship between the elapsed time after starting atomization of the atomization apparatus of the comparison object shown, and the amount of reduction of hydrogen peroxide water with a broken line.

As shown in FIGS. 7A and 7B, the diaphragm 32 of the atomizing device 100 according to the present embodiment has a planar shape in which wrinkles and distortion are further suppressed as compared with the atomizing device to be compared. It has become. Moreover, as shown in FIG. 5, in the atomization apparatus 100 which concerns on this embodiment, it is confirmed that about 20 g of hydrogen peroxide water is atomized in about 6 minutes, and in the atomization apparatus of a comparison object, about It was confirmed that 20 g of hydrogen peroxide was atomized in about 11 minutes. Therefore, in the atomization apparatus 100 which concerns on this embodiment, it was confirmed that hydrogen peroxide solution can be atomized more efficiently.

=== Third embodiment ===
Hereinafter, with reference to FIG. 8 (a), (b), the atomization apparatus which concerns on 3rd Embodiment of this invention is demonstrated. In FIG. 8, the same components as those shown in FIG. 6 are denoted by the same reference numerals, and the description thereof is omitted.

The atomization device according to the third embodiment includes a storage unit 36 in place of the storage unit 30 of the atomization device 100 described above, as shown in FIGS. The storage unit 36 includes a storage unit body 37 in place of the storage unit body 31 in the storage unit 30 described above, and includes a fixed plate 38 in place of the fixed plate 34. A fixing plate 38 is attached to the storage portion main body 37 by screwing of the screws 35 so that the diaphragm 32 is fixed via the elastic seal member 33. First, with reference to Fig.8 (a), the structure different from the storage part 30 among the structures of the storage part 36 before the fixing plate 38 is attached to the storage part main body 37 is mainly demonstrated.

The storage unit body 37 includes a bottom plate 319 in place of the above-described bottom plate 311 in the storage unit body 31, and the bottom plate 319 replaces the first outer surface 315 and the second outer surface 316 in the above-described bottom plate 311, respectively. 317 and a second outer surface 318 are provided. On the outer surface of the bottom plate 319, the first outer surface 317 is a surface inside the groove 313, and the second outer surface 318 is a surface outside the groove 313.

The first outer surface 317 protrudes from the second outer surface 318 by about 0.2 mm, for example, and a first step L2 is formed between the first outer surface 317 and the second outer surface 318. On the second outer surface 318, a plurality of screw holes 314 are formed around the opening 312 so as to be equidistant, for example.

The fixing plate 38 includes a first opposing surface 344 and a second opposing surface 345 instead of the first opposing surface 342 and the second opposing surface 343 of the fixing plate 34 described above. The first facing surface 344 is a surface facing the first outer surface 317 of the storage portion main body 37, and the second facing surface 345 is a surface facing the second outer surface 318 of the storing portion main body 37.

The thickness of the second facing surface 345 portion of the fixed plate 38 is, for example, about 2 mm. The thickness of the first facing surface 344 portion of the fixing plate 38 is about 0.2 mm thinner than the thickness of the second facing surface 345 portion. That is, on the surface of the fixed plate 38 facing the outer surface of the bottom plate 319, the first facing surface 344 is recessed from the second facing surface 345, and a second step M2 corresponding to the first step L2 is formed. In the present embodiment, the thickness of the portion facing the groove 313 on the surface facing the bottom plate 311 of the fixed plate 38 is, for example, about 2 mm, similar to the second facing surface 345 portion.

Next, with reference to FIG. 8B, the structure of the storage portion 36 in which the fixing plate 38 is attached to the storage portion main body 37 will be described.

As described above, the elastic seal member 33, the vibration plate 32, and the fixed plate 38 are disposed on the outer surface of the bottom plate 319 in the storage unit main body 37, so that the through holes 320 and 341 that are concentric with the screw hole 314 are formed. On the other hand, the screw 35 is inserted. Then, by fixing the male screw of the screw 35 to the female screw of the screw hole 314, the fixed plate 38 is fixed to the vibration plate 32 and the elastic seal member 33 so that the first step L2 and the second step M2 are fitted. And fixed to the outer surface of the bottom plate 319. As a result, the diaphragm 32 seals the opening 312. At this time, the elastic seal member 33 is elastically deformed, so that airtightness between the opening 312 and the diaphragm 32 is ensured. Further, the diaphragm 32 has a portion sandwiched between the first outer surface 317 and the first facing surface 344 and a portion sandwiched between the second outer surface 318 and the second facing surface 345. For this reason, the diaphragm 32 is bent by the height of the first step L2 and the second step M2, so that the portion of the diaphragm 32 facing the opening 312 is directed from the center of the opening 312 toward the outer edge (FIG. 8B). ) In the direction indicated by the arrow). Therefore, by fixing the diaphragm 32 to the reservoir main body 37 with the fixing plate 38, it is possible to prevent distortion from occurring in the portion of the diaphragm 32 that faces the opening 312. That is, the surface of the diaphragm 32 that transmits ultrasonic vibrations to the hydrogen peroxide solution stored in the storage unit main body 37 can be made flat.

In the storage portion 36 according to the third embodiment, the elastic seal member 33 is arranged on the outer peripheral surface of the groove 313 opposite to the opening 312, but is not particularly limited thereto. For example, the elastic seal member 33 may be disposed so that the diameter of the ring is slightly smaller than the diameter of the groove 313 and is in close contact with the inner peripheral surface of the groove 313 against the elastic force. Accordingly, the fixing plate 38 and the like can be attached to the outer surface of the bottom plate 319 in a state where the elastic seal member 33 is in close contact with the groove 313, so that the storage portion 36 can be easily assembled.

<Summary>
As described above, the atomization device 100 according to the second embodiment (the atomization device according to the third embodiment) includes at least the storage unit 30 (36) in which the hydrogen peroxide solution is stored and the storage unit 30 (36). An atomizing unit 40 for atomizing the hydrogen peroxide solution by ultrasonic vibration so that the hydrogen peroxide solution in the inside is discharged together with the carrier gas, and the atomizing unit 40 stores the ultrasonic vibration propagation liquid 43. The storage portion 30 (36) is provided continuously with the opening 312 passing through the bottom plate 311 (319) and communicating with the storage portion 41, and around the opening 312 on the outer surface of the bottom plate 311 (319). The groove 313, the elastic seal member 33 disposed in the groove 313 so as to protrude from the outer surface of the bottom plate 311 (319), the diaphragm 32 covering the opening 312 and the groove 313, and the opening 312 of the diaphragm 32. Expose the opposite part In this state, the diaphragm 32 has an elastic seal member 33 and a fixing plate 34 (38) fixed to the outer surface of the bottom plate 311 (319) so as to seal the opening 312. The outer surface of the bottom plate 311 (319) is The first step surface L1 (L2) is provided between the first outer surface 315 (317) inside the groove 313 and the second outer surface 316 (318) outside the groove 313, and the fixing plate 34 (38) The surface facing the bottom plate 311 (319) has a second step M1 (M2) corresponding to the first step L1 (L2) so that the fixed plate 34 (38) is fitted to the bottom plate 311 (319). It only has to be.

According to the atomization device 100 according to the second embodiment (the atomization device according to the third embodiment), when the storage unit 30 (36) is assembled, the first step L1 (L2) and the second step M1 ( The fixing plate 34 (38) and the bottom plate 311 (319) are fitted via the diaphragm 32 by M2). Accordingly, the stress F1 (F2) is applied to the portion of the diaphragm 32 facing the opening 312 in a direction from the center of the opening 312 toward the outer edge, and thus is maintained in a uniform plane. Therefore, it is possible to prevent the diaphragm 32 from being distorted while keeping the quality of each atomizing device 100 assembled constant. As a result, it is possible to improve the atomization speed of the hydrogen peroxide solution and extend the life of the diaphragm 32.

Moreover, in the atomization apparatus 100 which concerns on 2nd Embodiment mentioned above, the outer surface of the baseplate 311 has the level | step difference in which the 1st outer surface 315 was depressed rather than the 2nd outer surface 316 as the 1st level | step difference L1, and the elastic sealing member 33 is provided. Is disposed on the outer peripheral surface of the groove 313 opposite to the opening 312, and the facing surface of the fixing plate 34 facing the bottom plate 311 is a first facing surface that is the facing surface of the first outer surface 315 as the second step M 1. 342 has a step that protrudes beyond the second facing surface 343 that is the facing surface of the second outer surface 316.

According to this atomizing device 100, it is possible to prevent the occurrence of distortion at the portion of the diaphragm 32 facing the opening 312 and improve the atomization speed of the hydrogen peroxide solution. Quality can be kept constant. Further, since the elastic seal member 33 is fixed by the fixing plate 34 in a state of being elastically deformed so as to spread from the outer peripheral surface of the groove 313 toward the inner peripheral surface, the elastic seal member 33 can be efficiently prevented from being deformed and opened. 312 can be sealed efficiently.

In the atomization apparatus according to the third embodiment described above, the outer surface of the bottom plate 319 has a step in which the first outer surface 317 protrudes from the second outer surface 318 as the first step L2, and the bottom plate of the fixed plate 38 The surface facing 319 is a step where the first facing surface 344 that is the facing surface to the first outer surface 317 is recessed from the second facing surface 345 that is the facing surface to the second outer surface 318 as the second step M2. Have.

According to this atomizing device, it is possible to prevent the diaphragm 32 from being distorted, to improve the atomization speed of the hydrogen peroxide solution, and to keep the quality of each atomizing device assembled.

Further, in the atomizing device 100 according to the second embodiment described above (the atomizing device according to the third embodiment), the groove 313 is an annular groove, and the elastic seal member 33 is an annular packing. According to this atomization device, the stress F1 (F2) is more evenly distributed from the center of the portion facing the opening 312 of the diaphragm 32 toward the outer edge side by the annular groove 313 and the elastic seal member 33 which is an annular packing. Can be added. For this reason, the part facing the opening 312 of the diaphragm 32 can be made into a more uniform planar shape.

In the atomization apparatus 100 according to the second embodiment described above (the atomization apparatus according to the third embodiment), the fixed plate 34 (38) is a single plate, and the bottom plate 311 (319) around the groove 313. ). According to this atomization device, the ultrasonic vibration from the atomization unit 40 can be more reliably transmitted to the portion of the diaphragm 32 facing the opening 312. Further, the fixing plate 34 (38) is attached to the bottom plate 311 (319) by screwing the male screw of the screw 35 and the female screw of the screw hole 314 formed in the bottom plate 311 (319), so that the bottom plate 311 ( 319) can be more reliably and easily fixed to the outer surface.

Further, in the atomization device 100 according to the second embodiment described above (the atomization device according to the third embodiment), the fixed plate 34 (38) is disposed around the groove 313 via the diaphragm 32 and the bottom plate 311 (319). ). According to this atomization device, since the screw 35 is inserted into the through hole 321 provided in the diaphragm 32, the diaphragm 32 can be more reliably fixed to the bottom plate 311 (319).

The embodiment described above is for facilitating understanding of the present invention, and is not intended to limit the present invention. The present invention can be changed and improved without departing from the gist thereof, and the present invention includes equivalents thereof.

In the atomization apparatus 100 according to the second embodiment described above, the screw 35 is screwed into the screw hole 314 via the through holes 320 and 341, so that the fixing plate 34 a causes the outer surface of the bottom plate 311 to be fixed. Although the diaphragm 32 is fixed, it is not limited to this. For example, the diaphragm 32 may be fixed to the outer surface of the bottom plate 311 by attaching the fixing plate 34a with an adhesive. Further, a locking hole may be provided on the outer surface of the bottom plate 311 instead of the screw hole 314, and a claw portion that locks in the locking hole may be provided on the fixed plate 34a. Accordingly, the claw portion of the fixing plate 34 a is locked in the locking hole of the bottom plate 311, and the fixing plate 34 a is attached to the bottom plate 311, whereby the diaphragm 32 may be fixed to the outer surface of the bottom plate 311. This also applies to the fixed plate 38 and the bottom plate 319 in the atomization device according to the third embodiment described above.

Further, in the atomization apparatus 100 according to the second embodiment described above, the diaphragm 32 has the through hole 320 formed at a position corresponding to the screw hole 314. That is, the diameter of the diaphragm 32 is longer than the distance between the screw holes 314 facing each other with the opening 312 interposed therebetween. However, it is not particularly limited to this, and the diameter of the diaphragm 32 may be longer than the diameter of the annular groove 313. The same applies to the atomizing device according to the third embodiment described above.

=== Fourth Embodiment ===
A sterilization gas generation device, a medicine inhaler, and the like may be provided with a double chamber type atomization device that ultrasonically vibrates a liquid to be atomized stored in a storage unit (for example, Japanese Patent Application Laid-Open No. 2005-260707). 2005-172692). FIG. 18 is a diagram showing an example of a double chamber type atomizing apparatus 500.

In the atomization apparatus 500, a diaphragm 511 is attached to the bottom surface of the cup 510 that stores the liquid to be atomized. Moreover, since the water level of the propagation water that propagates ultrasonic waves is higher than the position of the bottom surface of the cup 510, the bottom surface of the cup 510 is immersed in the propagation water. When the ultrasonic vibrator 512 vibrates in such a state, the ultrasonic vibration is transmitted through the propagation water, passes through the diaphragm 511, reaches the liquid surface of the liquid in the cup 510, and transmits energy. However, the liquid in the cup 510 is atomized.

By the way, in the state where the bottom surface of the cup 510 is immersed in the propagation water, the liquid in the cup 510 can be atomized, but for example, the time for atomizing a predetermined amount of liquid may vary, and the liquid cannot be atomized stably. There is. This embodiment respond | corresponds to the said subject, and it aims at providing the atomization apparatus which can atomize a liquid stably.

FIG. 9 is a diagram showing a configuration of an isolator 10A according to an embodiment of the present invention. The isolator 10A is a device for the operator to perform cell operations in a sterilized environment, and includes a sterilization gas generation unit 20A, a supply device 21A, a work chamber 22A, a discharge device 23A, and a control device 24A. Is done. Sterilization is to kill microorganisms and make them as close to aseptic as possible. In this specification, so-called decontamination, sterilization, sterilization, and the like are also included. In addition, an aseptic environment is an environment that is almost aseptic, and the decontamination process is a process for realizing the aseptic environment.

The sterilization gas generation unit 20A includes a tank 30A, a pump 31A, a pipe 32A, and a sterilization gas generation device 33A.

The tank 30A stores a hydrogen peroxide solution (an aqueous solution in which hydrogen peroxide (H ₂ O ₂ ) is dissolved). The pump 31A pumps up the hydrogen peroxide solution from the tank 30A and supplies it to the sterilization gas generator 33A through the pipe 32A.
The sterilization gas generator 33A generates a hydrogen peroxide gas that is a sterilization gas from the supplied hydrogen peroxide solution, and supplies the hydrogen peroxide gas to the supply device 21A together with air that is a carrier gas. The details of the sterilization gas generator 33A will be described later.

The supply device 21A is a device that supplies the supplied hydrogen peroxide gas or air outside the isolator 10A to the working chamber 22A, and includes an electromagnetic valve 40A and a fan 41A.

The electromagnetic valve 40A supplies hydrogen peroxide gas or external air to the fan 41A based on the control of the control device 24A. The fan 41A supplies hydrogen peroxide gas or air supplied from the electromagnetic valve 40A to the work chamber 22A.

The working chamber 22A is a space for working cells, and the working chamber 22A is provided with air filters 50A and 51A, a door 52A, and a working glove 53A.

The air filter 50A is a filter for removing hydrogen peroxide gas supplied from the fan 41A or dust contained in the air. The air filter 51A is a filter for removing dust or the like contained in gas or the like discharged from the work chamber 22A. As the air filters 50A, 51A, for example, HEPA (High Efficiency Particulate Air) filters are used.

The door 52A is provided to be openable and closable on the front surface of the work chamber 10A in order to carry cells or the like into the work chamber 10A.

The work glove 53A is attached to an opening (not shown) provided in the door 52A so that an operator can work on cells and the like in the work chamber 22A with the door 52A closed. Note that the work chamber 22A is sealed when the door 52A is closed.

The discharge device 23A is a device for discharging a gas such as hydrogen peroxide gas or air from the work chamber 22A, and includes an electromagnetic valve 60A and a sterilization device 61A.

The electromagnetic valve 60A supplies the gas output from the air filter 51A to either the sterilization apparatus 61A or the sterilization gas generator 33A based on the control from the control apparatus 24A. When the output from the electromagnetic valve 60A is supplied to the sterilization gas generator 33A, the gas in the working chamber 22A is circulated.
The sterilization apparatus 61A includes a catalyst, detoxifies and sterilizes the gas output from the electromagnetic valve 60A, and outputs the gas to the outside of the isolator 10A.

The control device 24A is a device that controls each block of the isolator 10A, and includes an operation unit 70A, a display unit 71A, a storage device 72A, and a microcomputer 73A.

The operation unit 70A is an operation panel or the like for the user to set the operation of the isolator 10A. The operation result of the operation unit 70A is transmitted to the microcomputer 73A.
The display unit 71A is a display panel that displays an operation result of the operation unit 70A, a state of each block of the isolator 10A, and the like.
The storage device 72A stores program data executed by the microcomputer 73A and various data.

The microcomputer 73A implements various functions by executing the program data stored in the storage device 72A. For example, when an instruction for generating sterilizing gas is output from the operation unit 70A, the microcomputer 74 executes a predetermined program for generating sterilizing gas and controls the pump 31A and the like. Details of the microcomputer 73A will be described later.

== Details of Sterilization Gas Generator 33A ==
FIG. 10 is a side view of the sterilization gas generator 33A. In FIG. 10, some of the blocks are depicted in cross-sectional views. The sterilization gas generator 33A includes an atomizer 100A that atomizes hydrogen peroxide (liquid). The atomizing device 100A includes a cup 110A for storing hydrogen peroxide water, a storage container 111A for storing propagation water, and a lid member 112A.

The cup 110A (first storage portion) has openings on the upper side (+ Z direction) and the lower side (−Z direction). A diaphragm 115A is fixed to the opening 200A on the lower side of the cup 110A in a watertight manner with a bolt or the like so as to close the opening 200A. The diaphragm 115A is attached to the cup 110A so that the bottom surface (surface in the −Z direction) is horizontal.

On the bottom surface of the storage container 111A, the ultrasonic vibrator 120A for applying ultrasonic vibration to the propagation water is in a state in which the radiation direction is inclined at a predetermined angle (for example, 7 degrees) from the vertical upward horizontal direction. Is provided.

The water level sensor 121A (water level detection device) provided inside the storage container 111A is a sensor for detecting whether or not the water level of the propagation water is lower than a predetermined water level. For example, a float switch (not shown) ) And a relay (not shown). The water level sensor 121A and the microcomputer 73A correspond to a warning device. For convenience, the detailed configuration is omitted, but the water level sensor 121A outputs a signal indicating the detection result to the microcomputer 73A via a cable (not shown).

The lid member 112A is provided with an opening 210A into which the cup 110A is inserted and an inlet 220A into which propagation water is injected. The cup 110A is inserted into the opening 210A from above so as to close the opening 210A. The cup 110A is inserted into the opening 210A and then attached to the lid member with a bolt (not shown) or the like. A plug member 113A that opens or closes the inlet 220A is inserted into the inlet 220A. Further, when the lid member 112A in a state where the cup 110A is inserted into the opening 210A and the plug member 113A is inserted into the opening 220A is attached to the storage container 111A, the space where the propagation water of the storage container 111A is stored is sealed. Is done. The storage container 111A and the lid member 112A correspond to a second storage unit.

A supply pipe 140A for supplying hydrogen peroxide gas to the outside and a support member 150A for supporting the supply pipe 140A are provided on the upper side of the lid member 112A. The support member 150A includes a cylindrical member 151A installed on the upper surface of the lid member 112A, and a flange 152A provided on the upper surface of the cylindrical member 151A.

The diameter of the cylindrical member 151A is larger than the diameter of the cylindrical supply pipe 140A, and a port 153A through which carrier gas (air circulating through the working chamber 22A) is supplied to the −X side surface of the cylindrical member 151A. Is provided. The supply pipe 140A is penetrated through the center of the flange 152A while closing the opening on the upper surface of the cylindrical member 151A. Further, a port 154A is provided on the upper surface of the flange 152A for passing the pipe 32A to which hydrogen peroxide solution is supplied. The pipe 32A is fixed to the side surface of the supply pipe 140A so that hydrogen peroxide or the like can be supplied to the cup 110A through the port 154A and an opening provided on the side surface of the supply pipe 140A.

Further, on the upper side of the cup 110A, a heater 130A for heating and vaporizing the atomized hydrogen peroxide solution is provided. The hydrogen peroxide gas heated and gasified by the heater 130A is output from a port 141A provided in the supply pipe 140A together with the supplied carrier gas. The port 141A is connected to the electromagnetic valve 40A of the supply device 21A described above via a pipe. Thus, the hydrogen peroxide solution atomized by the cup 110A is supplied as hydrogen peroxide gas from the port 141A to the supply device 21A. The control device 24A and the atomizer 100A correspond to an atomizer, and the heater 130A and the supply pipe 140A correspond to a vaporizer.

== About the time change of the remaining liquid amount of the cup 110A ==
With reference to FIGS. 11 to 15, how the remaining liquid amount in the cup 110A changes when the atomizing device 100A is operated by changing the water level of the propagation water will be described.

Here, as shown in FIG. 11, the water level H of the propagation water is the height from the bottom surface (reference surface) of the storage container 111A to the water surface of the propagation water when the ultrasonic vibrator 120A is not vibrating. It is. Further, the distance D is the distance from the surface of the propagation water when the ultrasonic vibrator 120A is not vibrating to the bottom surface of the diaphragm 115A. Furthermore, the distance from the bottom surface (reference surface) of the storage container 111A to the bottom surface of the diaphragm 115A is a distance X (X = D + H). In the atomization apparatus 100A, the distance X is 20 mm (millimeters), for example. The storage container 111A has such a volume that the water level H becomes 20 mm (H = X, D = 0) when 500 mL (milliliter) of propagation water is injected, for example. For example, when an AC voltage of 48 V is supplied, the ultrasonic transducer 120A consumes 30 W of power and vibrates at a frequency of 1.6 to 1.7 MHz (ultrasonic frequency).

FIG. 12 is a diagram for explaining a change (experimental result) of propagation water when the ultrasonic vibrator 120A is vibrated when there is a gap between the bottom surface of the diaphragm 115A and the water surface of the propagation water. is there. When the ultrasonic vibrator 120A vibrates, ultrasonic vibration is applied to the propagation water, so that the surface of the propagation water rises and a water column is generated. In the present embodiment, the height of the water column reaches 30 mm to 50 mm without any obstacles. And since the generated water column contacts the diaphragm 115A, the ultrasonic vibration is propagated to the cup 110A, and the liquid stored in the cup 110A is atomized.

FIG. 13 is a diagram showing a change over time in the remaining liquid amount of the cup 110A when the gap, that is, the distance D is changed between the bottom surface of the diaphragm 115A and the water surface of the propagation water. In this case, for example, 25 g of pure water (hereinafter simply referred to as water) is put in the cup 110A in advance, and the vibration of the ultrasonic transducer 120A is started at a timing of 0 minutes. As shown in FIG. 13, in each case of D = 4, 6, and 8 mm, the residual liquid amount decreases in substantially the same manner. Further, the residual liquid amount at D = 10 mm is larger than the residual liquid amount at D = 4 mm until about 4 minutes. However, the remaining liquid amount of D = 10 mm after 4 minutes decreases to substantially the same amount as the residual liquid amount of D = 4 mm. On the other hand, the amount of remaining liquid at D = 12 mm is greater regardless of the elapsed time than the amount of remaining liquid at D = 4 mm and 10 mm. Therefore, for example, in the range of D = 4 to 10 mm, it can be seen that the water in the cup 110A is stably atomized. For example, when D = 2 mm or less, even if the ultrasonic vibrator 120A is not vibrating, the surface tension of the propagating water rises with a slight trigger due to the surface tension of the propagating water and contacts the bottom surface of the diaphragm 115A. . For this reason, in FIG. 13, the experimental result of D = 4 mm or more is shown.

FIG. 14 is a diagram showing the measurement result of the remaining liquid amount when 25 g of water is atomized five times with D = 6 mm, and FIG. 15 shows the water level H of the propagation water from the bottom surface of the diaphragm 115A. It is a figure which shows the change of the residual liquid amount when making it high and atomizing 25 g of water 5 times. In addition, FIG. 15 is equivalent to the result at the time of making water atomize on the conditions currently implemented conventionally.

In the case of D = 4 mm, the respective waveforms of the 5 times coincide well and the variation in the waveforms is smaller than when atomized under the conventional conditions. Furthermore, in the case of D = 4 mm, more water tends to be atomized than when atomized under conventional conditions. Here, for example, the case of D = 4 mm has been described as an example, but the same applies to the case of D = 6 to 10 mm. Thus, water can be atomized more stably by making a gap between the bottom surface of the diaphragm 115A and the water surface of the propagation water. In addition, if the diaphragm 115A is brought into contact with the original height of the water column at a height of about 10% to 30%, atomization can be performed more efficiently.

== Details of the microcomputer 73A ==
Here, functional blocks realized by the microcomputer 73A will be described. When a start instruction for generating hydrogen peroxide gas is input from the operation unit 70A, the microcomputer 73A executes a predetermined program and performs the functions of the warning unit 300A and the control unit 301A as shown in FIG. Realize.

The warning unit 300A (warning signal output unit) acquires the output of the water level sensor 121A when a start instruction is input. When the water level sensor 121A detects that the water level H of the propagation water is lower than the predetermined water level, the warning unit 300A outputs a warning signal to the display unit 71A. Further, when the water level sensor 121A detects that the water level H of the propagation water is higher than the predetermined water level, the warning unit 300A causes the control unit 301A to execute control for starting atomization.
The control unit 301A controls the sterilization gas generation unit 20A to start atomization based on the control of the warning unit 300A.

FIG. 17 shows an example of processing performed by the microcomputer 73A when hydrogen peroxide gas is generated. Further, the water level sensor 121A detects whether or not the water level H of the propagation water is lower than the water level H (H = 10 mm) when D = 10 mm, for example. Note that at the water level H when D = 10 mm, as illustrated in FIG. 13, the atomizing device 100 </ b> A can stably atomize the liquid in the cup 110 </ b> A.

First, the warning unit 300A acquires the detection result of the water level sensor 121A (S100A). When the propagation water level H is higher than a predetermined water level (H = 10 mm) (S100A: NO), the control unit 301A controls the sterilization gas generation unit 20A to start atomization (S101A).

On the other hand, when the water level H of the propagation water is lower than the predetermined water level (H = 10 mm) (S100A: YES), the warning unit 300A displays a warning indicating that the water level H is lowered on the display unit 71A, The control unit 301A stops the atomization operation (S102A).

Heretofore, the isolator 10A and the atomization apparatus 100A of the present embodiment have been described. In the atomization apparatus 100A, the water level H is set to the water level when D = 6 mm, for example. In such a case, since the water column contacts the diaphragm 115A, the hydrogen peroxide solution is atomized. Therefore, for example, as compared with the case where the water level of the propagation water is higher than the bottom surface of the diaphragm 115A and the bottom surface of the diaphragm 115A is immersed in the propagation water, the atomization device 100A stabilizes the hydrogen peroxide solution (liquid). Can be atomized.

Further, as illustrated in FIG. 13, when the water level H of the propagation water greatly decreases (when the distance D increases), the time for atomizing and reducing the hydrogen peroxide solution tends to increase. However, the microcomputer 73A outputs a warning signal when the water level H of the propagation water reaches a predetermined water level determined based on the change in the remaining liquid amount (for example, the water level H when D = 10 mm). Therefore, when a warning signal (for example, an alarm) is output, the user can inject the propagation water into the storage container 111A and raise the water level H. As a result, the atomization apparatus 100A can atomize the hydrogen peroxide solution stably again.

Moreover, when detecting whether the water level H of the propagation water is lower than a predetermined water level, for example, a water level meter may be used. Specifically, the microcomputer 73A may acquire the output of the water level meter in real time and determine whether or not the water level H is lower than a predetermined water level. However, as in the present embodiment, using the water level sensor 121A can configure the atomization device 100A at a lower cost than using a water level meter.

Further, when the warning signal is output, the display unit 71A displays a warning (information) indicating that the water level H of the propagation water is lower than a predetermined water level. For this reason, the user can grasp | ascertain that the water level H of propagation water fell reliably.

In addition, when the water level H of the propagation water is lower than the predetermined water level, the user can remove the plug member 113A and inject the propagation water from the inlet 220A. As a result, since the water level H of the propagation water rises, the atomizing device 100A can atomize the hydrogen peroxide solution stably. As described above, when 500 mL of propagation water is injected into the storage container 111A, the water level H becomes 20 mm. That is, in the storage container 111A, the water level H rises by 2 mm each time 50 mL of propagation water is injected. Therefore, the user can set the water level H to a desired value by injecting a predetermined amount of propagation water from the inlet 220A.

Moreover, the sterilization gas generator 33A can stably generate hydrogen peroxide gas by using the atomizer 100A.

In addition, the said Example is for making an understanding of this invention easy, and is not for limiting and interpreting this invention. The present invention can be changed and improved without departing from the gist thereof, and the present invention includes equivalents thereof.

For example, the diaphragm 115A is mounted horizontally on the cup 110A, but is not limited thereto. Even if the bottom surface of the diaphragm 115A is attached so as to be parallel to the surface of the ultrasonic transducer 120A that generates ultrasonic waves, the liquid to be atomized can be stably atomized.

In addition, the inlet 220A is provided in the lid member 112A. For example, the inlet 220A may be provided on the side surface of the storage container 111A. BR> B Especially in the atomizer 100A, the water level H of the propagation water is that of the diaphragm 115A. Since it is lower than the bottom surface, if the injection port is provided at a position higher than the bottom surface of the diaphragm 115A, leakage of the propagation water when injecting the propagation water can be prevented.

=== Fifth Embodiment ===
For example, in a sterilization gas generator or a drug inhaler equipped with a double chamber type atomization device shown in FIG. 18, via propagation water and a vibration plate on the bottom surface of the cup that stores the liquid to be atomized, Since the energy of ultrasonic vibration is transmitted to the liquid, the liquid in the cup is atomized.

Since the diaphragm is generally thin, if the atomizer is used for a long period of time, the diaphragm may crack and open a hole. In such a case, the liquid to be atomized leaks to the container side storing the propagation water. And the efficiency which atomizes a liquid will fall. Therefore, for example, an operator has to regularly observe the surface of the diaphragm and check whether there is a hole in the diaphragm.

The present embodiment addresses the above-described problem, and an object thereof is to provide a gas generator that can detect whether or not a hole is formed in the diaphragm without observing the surface of the diaphragm. .

FIG. 19 is a diagram showing a configuration of an isolator 10B according to an embodiment of the present invention. The isolator 10B is a device for performing work of cells and the like in a sterilized environment by an operator, and includes a sterilization gas generation unit 20B, a supply device 21B, a work chamber 22B, a discharge device 23B, and a control device 24B. Is done. Note that sterilization is to kill microorganisms and make them as close to aseptic as possible, but in this specification, so-called decontamination, sterilization, sterilization, and the like are also included. In addition, an aseptic environment is an environment that is almost aseptic, and the decontamination process is a process for realizing the aseptic environment.

The sterilization gas generation unit 20B includes a tank 30B, a pump 31B, a pipe 32B, a sterilization gas generation device 33B, and a pressure gauge 34B.
The tank 30B stores a hydrogen peroxide solution (an aqueous solution in which hydrogen peroxide (H ₂ O ₂ ) is dissolved).
The pump 31B pumps up the hydrogen peroxide solution from the tank 30B and supplies it to the sterilization gas generator 33B through the pipe 32B.

The sterilization gas generator 33B generates hydrogen peroxide gas, which is a sterilization gas, from the supplied hydrogen peroxide solution, and supplies it to the supply device 21B together with the carrier gas. Although details of the sterilization gas generator 33B will be described later, in the space A of the sterilization gas generator 33B, hydrogen peroxide water and a carrier gas are supplied to generate hydrogen peroxide gas. On the other hand, the space B is a sealed space in which propagation water for atomizing the hydrogen peroxide solution is stored. The pressure gauge 34B (pressure measuring device) measures the pressure P1 in the space B.

The supply device 21B is a device that supplies the supplied hydrogen peroxide gas or air outside the isolator 10B to the work chamber 22B, and includes an electromagnetic valve 40B and a fan 41B.

The electromagnetic valve 40B supplies hydrogen peroxide gas or external air to the fan 41B based on the control of the control device 24B. The fan 41B supplies hydrogen peroxide gas or air supplied from the electromagnetic valve 40B to the work chamber 22B.

The work chamber 22B is a space for performing work on biological materials such as cells, for example. The work chamber 22B includes air filters 50B and 51B, a door 52B, a work globe 53B, a compressor 54B, and a pressure gauge 55B. Is provided.

The air filter 50 is a filter for removing hydrogen peroxide gas supplied from the fan 41B or dust contained in the air. The air filter 51B is a filter for removing dust or the like contained in gas or the like discharged from the work chamber 22B. As the air filters 50B and 51B, for example, a HEPA (High Efficiency Particulate Air) filter is used.

The door 52B is provided to be openable and closable on the front surface of the work chamber 10B in order to carry cells or the like into the work chamber 10B.
The work glove 53B is attached to an opening (not shown) provided in the door 52B so that the worker can work on cells and the like in the work chamber 22B with the door 52B closed.

The compressor 54B (pressure adjusting device) compresses the air outside the isolator 10B and supplies the compressed air to the working chamber 22B via the opening 80B (third opening) provided in the working chamber 22B. The opening 80B is provided with an air filter (not shown) similar to the air filter 50B.
The pressure gauge 55B measures the pressure P2 in the space inside the work chamber 22B through an opening 81B (fourth opening) provided in the work chamber 22B.

The discharge device 23B is a device for discharging a gas such as hydrogen peroxide gas or air from the work chamber 22B, and includes an electromagnetic valve 60B and a sterilization apparatus 61B.

The electromagnetic valve 60B supplies the gas output from the air filter 51B to either the sterilization apparatus 61B or the sterilization gas generator 33B based on the control from the control device 24B. When the output from the electromagnetic valve 60B is supplied to the sterilization gas generator 33B, the gas in the working chamber 22B is circulated.
The sterilization apparatus 61B includes a catalyst, detoxifies and sterilizes the gas output from the electromagnetic valve 60B, and outputs the gas to the outside of the isolator 10B.

The control device 24B (determination device) is a device that controls each block of the isolator 10B, and includes an operation unit 70B, a display unit 71B, a storage device 72B, and a microcomputer 73B.

The operation unit 70B is an operation panel or the like for the user to set the operation of the isolator 10B. The operation result of the operation unit 70B is transmitted to the microcomputer 73B.
The display unit 71B is a display panel that displays the operation result of the operation unit 70B, the state of each block of the isolator 10B, and the like.
The storage device 72B stores program data executed by the microcomputer 73B and various data.

The microcomputer 73B implements various functions by executing the program data stored in the storage device 72B. For example, when an instruction for executing a leak check or an instruction for generating sterilization gas is output from the operation unit 70B, the microcomputer 73B executes a predetermined program according to the instruction to control the pump 31B and the like. To do. Details of the microcomputer 73B will be described later.

== Details of Sterilization Gas Generator 33B ==
FIG. 20 is a side view of the sterilization gas generator 33B. In FIG. 20, some of the blocks are drawn in a cross-sectional view. The sterilization gas generator 33B includes an atomizer 100B that atomizes hydrogen peroxide (liquid). The atomization device 100B includes a cup 110B that stores hydrogen peroxide, a storage container 111B that stores propagation water, and a lid member 112B.

The cup 110B (first storage portion) has openings on the upper side (+ Z direction) and the lower side (−Z direction). In the opening 200B (first opening) on the lower side of the cup 110B, a diaphragm 116B is watertightly fixed with bolts or the like so as to close the opening 200B. The diaphragm 116B is attached to the cup 110B so that the bottom surface (the surface in the −Z direction) is horizontal. Further, by attaching the diaphragm 116B to the cup 110B, a space A (first space) for storing the hydrogen peroxide solution is formed in the cup 110B.

An ultrasonic transducer 120B for applying ultrasonic vibration to the propagation water is provided on the bottom surface of the storage container 111B so that the radiation direction is inclined at a predetermined angle (for example, 7 degrees) from the vertical upward direction. ing. The propagation water propagates ultrasonic vibrations to the hydrogen peroxide solution in the cup 110B.

The lid member 112B is provided with an opening 210B into which the cup 110B is inserted, an inlet 220B into which propagation water is injected, and an opening 230B to which the pressure gauge 34B is attached.

The cup 110B is inserted into the opening 210B from above so as to close the opening 210B. The cup 110B is inserted into the opening 210B and then attached to the lid member with a bolt (not shown) or the like. A plug member 113B that opens or closes the inlet 220B is inserted into the inlet 220B. In the opening 230B (second opening), the pressure gauge 34B is connected via the flange 114B and the pipe 115B so that the pressure gauge 34B can measure the pressure P1 in the space B (second space) in which the propagation water is stored. It is attached. Therefore, the opening 220B is closed and the space B is sealed. Here, the storage container 111B and the lid member 112B correspond to a second storage part. The storage container 111B and the lid member 112B may be integrally formed.

A supply pipe 140B for supplying hydrogen peroxide gas to the outside and a support member 150B for supporting the supply pipe 140B are provided on the upper side of the lid member 112B. The support member 150B includes a cylindrical member 151B installed on the upper surface of the lid member 112B, and a flange 152B provided on the upper surface of the cylindrical member 151B.

The diameter of the cylindrical member 151B is larger than the diameter of the cylindrical supply pipe 140B, and a port 153B through which carrier gas (air circulating through the working chamber 22B) is supplied to the side surface on the −X side of the cylindrical member 151B. Is provided. The supply pipe 140B is penetrated through the center of the flange 152B while closing the opening on the upper surface of the cylindrical member 151B. Further, a port 154B is provided on the upper surface of the flange 152B for passing a pipe 32B to which hydrogen peroxide solution is supplied. The pipe 32B is fixed to the side surface of the supply pipe 140B so that hydrogen peroxide solution or the like can be supplied to the cup 110B through the port 154B and an opening provided on the side surface of the supply pipe 140B.

Further, a heater 130B for heating and vaporizing the atomized hydrogen peroxide solution is provided on the upper side of the cup 110B. The hydrogen peroxide gas heated and gasified by the heater 130B is output from a port 141B provided in the supply pipe 140B together with the supplied carrier gas. The port 141B is connected to the electromagnetic valve 40B of the supply device 21B described above via a pipe. Thus, the hydrogen peroxide solution atomized by the cup 110B is supplied as hydrogen peroxide gas from the port 141B to the supply device 21B. The heater 130B and the supply pipe 140B correspond to a vaporization unit. In the space A in which the hydrogen peroxide solution is stored, vaporized hydrogen peroxide gas is generated.

== About the channel ==
Here, for example, when a leak check process for confirming that the gas inside the isolator 10B does not leak to the outside is performed, FIG. This will be described with reference to FIG.

In the leak check process, the electromagnetic valve 40B supplies the hydrogen peroxide gas to the fan 41B, and the electromagnetic valve 60B supplies the gas output from the air filter 51B to the sterilization gas generator 33B. For this reason, the gas in the working chamber 22B circulates in the flow path A, for example, the space A → the electromagnetic valve 40B → the fan 41B → the working chamber 22B → the electromagnetic valve 60B → the space A of the sterilizing gas generator 33B. Further, when there is no leak in the flow path A, the space inside the flow path A, that is, the space A and the space inside the work chamber 22B are sealed. Therefore, for example, when the space inside the working chamber 22B is pressurized in the leak check process, the space A is also pressurized. Thus, the flow path A for pressurizing the space A is formed in the leak check process.

== Details of the microcomputer 73B ==
A functional block realized by the microcomputer 73B will be described. When an instruction to start a leak check process is input from the operation unit 70B, the microcomputer 73B executes a predetermined program, and as shown in FIG. 21, the control unit 300B, the measurement unit 301B, and the determination units 302B and 303B. Realize the function.

When the start instruction is input, the controller 300B controls the electromagnetic valves 40B and 60B so that the flow path through which gas or the like flows in the isolator 10B becomes the flow path A. Further, the control unit 300B controls the compressor 54B to pressurize the space inside the flow path A.
The measurement unit 301B controls the pressure gauge 34B to measure the pressure P1 in the space B. The measurement unit 301B controls the pressure gauge 55B to measure the pressure P2 in the space A.
The determination unit 302B determines whether or not a predetermined time (for example, time TA) has elapsed since the compressor 54B supplied compressed air to the inside of the work chamber 22B.
Based on the measurement results of the pressures P1 and P2, the determination unit 303B determines whether there is a leak in the flow path A and whether there is a hole in the diaphragm 116B provided between the space A and the space B. judge.

FIG. 22 shows an example of processing performed by the microcomputer 73B when the leak check process is executed. When the leak check process is executed, the level of the propagation water stored in the storage container 111B is lower than the bottom surface of the diaphragm 116B, for example, as shown in FIG.

First, the controller 300B controls the electromagnetic valve 40B so that the hydrogen peroxide gas is output to the fan 41B, and controls the electromagnetic valve 60B so that the gas from the working chamber 22B is supplied to the sterilization gas generator 33B. (S100B). As a result, the flow path A is formed in the isolator 10B.

The measuring unit 301B measures the pressures P1 and P2 before pressurization (S101B), and controls the compressor 54B to pressurize the space inside the flow path A (S102B). The determination unit 302B determines whether or not the predetermined time TA has elapsed since the compressor 54B began to supply compressed air (S103B). When the predetermined time TA has elapsed (S103B: YES), the measurement unit 301B measures the pressures P1 and P2 after pressurization (S104B).

Determination unit 303B determines whether or not the change in pressure P2 before and after pressurization is greater than or equal to a predetermined value PA (S105B). The predetermined value PA is, for example, a value of 60% of the difference between the pressure P2 before and after pressurization measured in a state where there is no leak in the flow path A. Then, the determination unit 303B determines that there is a leak in the flow path A when the change in the pressure P2, that is, the difference between the pressure P2 before and after pressurization is smaller than the predetermined value PA, and displays the determination result on the display unit 71B. (S106B). On the other hand, when the change in the pressure P2 is greater than the predetermined value PA, the determination unit 303B determines that there is no leak in the flow path A, and displays the determination result on the display unit 71B (S107B).

In addition, when the difference between the pressure P1 before and after pressurization is smaller than the predetermined value PA, that is, when the change in the pressure of the sealed space B is small, the determination unit 303B determines that there is no abnormality in the diaphragm 116B. The result is displayed on the display unit 71B (S109B). On the other hand, when the change in the pressure P1 of the space B is larger than the predetermined value PA, that is, when the change in the pressure of the space B that should be sealed is large, the determination unit 303B determines that the diaphragm 116B has an abnormality. The determination result is displayed on the display unit 71B (S110B).

FIG. 23 is a diagram showing an example of pressures P1 and P2 measured when the diaphragm 116B has no holes when the leak check process is performed, that is, in a state where the space B is sealed. Here, the flow path A is formed at a timing before time t0.

First, at time t0, the pressures P1 and P2 are measured (S101B). Then, for a predetermined period from time t2, the compressor 54B supplies compressed air to the inside of the work chamber 22B (S102B). For this reason, the pressure P2 increases and gradually decreases after the operation of the compressor 54B is stopped. Moreover, since the diaphragm 116B has no holes, the space B is sealed and the pressure P1 does not change.

At time t2 when a predetermined time TA has elapsed from time t1, the difference between before and after the pressure P2 is applied is larger than the predetermined value PA (S105B: YES). For this reason, it is determined that there is no leak in the flow path A, and a display indicating no leak is displayed on the display unit 71B (S107B). At time t2, the difference between before and after the pressure P1 is increased is smaller than the predetermined value PA (S108B: NO). Therefore, it is determined that there is no abnormality in diaphragm 116B, and that effect is displayed on display unit 71B (S109B). At time t3, for example, a valve (not shown) provided in the work chamber 22B is opened to reduce the pressurized pressure.

FIG. 24 is a diagram illustrating an example of pressures P1 and P2 measured when the diaphragm 116B has a hole when the leak check process is performed. Note that the timing from time t0 to t3 is the same as the timing described in FIG.

First, at time t0, the pressures P1 and P2 are measured (S101B). Then, for a predetermined period from time t2, the compressor 54B supplies compressed air to the inside of the work chamber 22B (S102B). For this reason, the pressure P2 increases and gradually decreases after the operation of the compressor 54B is stopped. Here, since the diaphragm 116B has a hole, the sealed state of the space B is not maintained, and the pressure P1 of the space B changes similarly to the pressure P2.

Then, at time t2 when a predetermined time TA has elapsed from time t1, the difference between before and after the pressurization of the pressure P2 is larger than the predetermined value PA (S105B: YES). For this reason, it is determined that there is no leak in the flow path A, and a display indicating no leak is displayed on the display unit 71B (S107B). At time t2, the difference between before and after the pressurization of the pressure P1 is larger than the predetermined value PA (S108B: YES). Therefore, it is determined that there is an abnormality in diaphragm 116B, and that effect is displayed on display unit 71B (S110B).

The isolator 10B of the present embodiment has been described above. Even when the space A of the sterilization gas generator 33B included in the isolator 10B is directly pressurized, the same effect as in the present embodiment can be obtained. Specifically, for example, as shown in FIG. 25, the opening of the port 141B is closed with a flange 400B, and the compressor 54B is attached to the port 153B via the flange 401B and the pipe 402B so that the space A can be pressurized. When the compressor 54B is operated to pressurize the space A, the pressure P1 in the space B changes depending on whether or not the diaphragm 116B has a hole. Therefore, in the sterilization gas generator 33B, it is possible to detect whether or not the diaphragm 116B has a hole without directly observing the diaphragm 116B.

In the isolator 10B, the space inside the flow path A is pressurized through the opening 80B of the work chamber 22B. In such a case, since the space A of the sterilization gas generator 33B is also pressurized, it is detected whether or not the diaphragm 116B has a hole by measuring the pressure P1 of the space B. Can do.

For example, when the diaphragm 116B has a hole, the pressure P1 increases when the flow path A is pressurized. For this reason, for example, based on only the pressure P1 measured at time t2, it may be determined whether or not there is a hole in the diaphragm 116B. However, since the determination unit 303B of the present embodiment determines based on the difference between the pressure P1 before and after pressurization, even if there is an offset in the pressure gauge 34B, the presence / absence of a hole is accurately determined. it can.

Further, when the difference between the pressure P1 before and after pressurization is larger than the predetermined value PA, the display unit 71B displays that there is an abnormality in the diaphragm 116B. For this reason, the operator can immediately recognize that the diaphragm 116B has a hole.

In general, the sterilization process in which the hydrogen peroxide solution is vaporized after being atomized is performed after the leak check process. In the present embodiment, the presence or absence of a hole in the diaphragm 116B is determined before the sterilization process in which the hydrogen peroxide solution is atomized is executed. For this reason, a sterilization process can be performed more safely.

In the isolator 10B, the pressure gauges 34B and 55B are provided. For example, the pressure is obtained by using an electromagnetic valve or the like that can switch between the opening 81B of the working chamber 22B and the opening 230B of the space B. The pressures P1 and P2 may be measured only by the total 34B. In such a case, the number of pressure gauges used in the isolator 10B can be reduced.

In addition, the said Example is for making an understanding of this invention easy, and is not for limiting and interpreting this invention. The present invention can be changed and improved without departing from the gist thereof, and the present invention includes equivalents thereof.

For example, even if propagation water is not stored in the storage container 111B, the presence or absence of a hole in the diaphragm 116B can be detected as in the present embodiment.

Also, the same effect as in the present embodiment can be obtained by using, for example, a differential pressure gauge that measures the difference between the atmospheric pressure and the pressure in the space B instead of the pressure gauge 55B.

Further, even when a pump (pressure adjusting device) that decompresses the space inside the flow path A is used instead of the compressor 54B, it is possible to detect the presence or absence of a hole in the diaphragm 116B.

In this embodiment, the compressor 54B is used as the pressure adjusting device. However, the fan 41B may be used as the pressure adjusting device instead of the compressor 54B. In this case, the space inside the channel A can be pressurized.

Further, instead of the pressure gauge 34B, for example, a hygrometer for measuring the humidity of the space B is provided. When the humidity measured by the hygrometer is reduced in the leak check process, it is determined that there is a hole in the diaphragm 116B. Also good.

Further, the compressor 54B may pressurize the flow path A through an opening (not shown) provided in the sterilization gas generator 33B.

DESCRIPTION OF SYMBOLS 1 ... Work room, 2 ... Gas supply part, 3 ... Gas discharge part, 4 ... Sterilization gas supply apparatus, 5 ... Control part, 6 ... Front door, 7 ... Work glove, 8 ... Work space, 9 ... Gas supply port , 10 ... HEPA filter, 11 ... Gas exhaust port, 12 ... Intake port, 13 ... First three-way valve, 14 ... Fan, 15 ... Second three-way valve, 16 ... Sterilization substance reduction processing unit, 17 ... Exhaust port, 18 ... Sterilization substance cartridge, 19 ... pump, 20 ... sterilization gas generator, 21 ... fan, 30 ... storage part, 31 ... storage part body, 32 ... vibration plate, 33 ... elastic seal member, 34, 34a, 38 ... fixed plate, 35 ... screw, 40 ... atomizing part, 41 ... accommodating part, 42 ... ultrasonic transducer, 43 ... ultrasonic wave propagation liquid, 44 ... partition plate, 45 ... container, 50 ... gasifying part, 51 ... inner cylinder part , 51A ... stainless steel part, 51B ... aluminum part, 52 ... heater, 53 ... outer cylinder part, 5 ... lower end part of outer cylinder part, 55 ... lower end part of inner cylinder part, 56 ... heating element, 57 ... fan, 58 ... flow path regulating plate, 59, 62 ... pipe, 60 ... upper end part of inner cylinder part, 61 ... Inner lid member, 64 ... opening for tube, 65 ... upper end portion of outer cylinder portion, 66 ... outer lid member, 100 ... misting device, 214 ... cup, 310 ... recess, 311 ... bottom plate, 312 ... opening, 313 ... groove 314, screw holes 320, 340, 321, through holes, 315, 317, first outer surface, 316, 318, second outer surface, 342, 344, first opposing surface, 343, 345, second opposing surface, 10A. ... Isolator, 20A ... Sterilization gas generation unit, 21A ... Supply device, 22A ... Work room, 23A ... Discharge device, 24A ... Control device, 30A ... Tank, 31A ... Pump, 32A ... Pipe, 33A ... Sterilization gas generation device, 40A , 60A ... Electric Valve, 41A ... Fan, 50A, 51A ... Air filter, 52A ... Door, 53A ... Glove, 61A ... Sterilization device, 70A ... Operating unit, 71A ... Display unit, 72A ... Storage device, 73A ... Microcomputer, 100A ... Atomization 110A ... cap, 111A ... storage container, 112A ... lid member, 113A ... plug member, 115A ... vibrating plate, 120A ... ultrasonic vibrator, 130A ... heater, 140A ... supply pipe, 141A, 153A, 154A ... port, 150A ... support member, 151A ... cylindrical member, 152A ... flange, 200A, 210A ... opening, 220A ... inlet, 300A ... warning part, 301A ... control part, 10B ... isolator, 20B ... sterilization gas generation unit, 21B ... Supply device, 22B ... work chamber, 23B ... discharge device, 24B ... control device, 30B ... tank, 31B ... Pump, 32B, 115B, 402B ... Pipe, 33B ... Sterilization gas generator, 40B, 60B ... Electromagnetic valve, 41B ... Fan, 50B, 51B ... Air filter, 52B ... Door, 53B ... Globe, 61B ... Sterilization processing device , 70B ... operation unit, 71B ... display unit, 72B ... storage device, 73B ... microcomputer, 100B ... atomization device, 110B ... cup, 111B ... storage container, 112B ... lid member, 113B ... plug member, 114B, 152B, 400B , 401B ... flange, 116B ... diaphragm, 120B ... ultrasonic transducer, 130B ... heater, 140B ... supply pipe, 141B, 153B, 154B ... port, 150B ... support member, 151B ... cylindrical member, 200B, 210B, 230B ... Opening part, 220B ... Inlet, 300B ... Control part, 301B ... Measurement part, 02B, 303B ... the determination unit

Claims (24)

A storage unit for storing the hydrogen peroxide solution, and an atomization unit for atomizing the hydrogen peroxide solution by ultrasonic vibration so that the hydrogen peroxide solution in the storage unit is discharged together with a carrier gas. In hydrogen peroxide water atomization equipment,
The atomization unit includes a storage unit that stores a propagation liquid that propagates ultrasonic vibrations,
The reservoir is
An opening penetrating the bottom plate and communicating with the accommodating portion;
A groove formed continuously around the opening in the outer surface of the bottom plate;
An elastic seal member arranged to contact the bottom surface of the groove and the inner peripheral surface near the opening and to protrude from the outer surface of the bottom plate;
A diaphragm covering the opening and the groove;
A fixing plate that is pressed against and fixed to the outer surfaces of the elastic seal member and the bottom plate so that the diaphragm seals the opening;
An atomizing device for hydrogen peroxide water, comprising: The groove is an annular groove,
2. The atomizing device for hydrogen peroxide solution according to claim 1, wherein the elastic seal member is an annular packing and is in close contact with an inner peripheral surface of the groove near the opening by an elastic force. 3. The fixed plate according to claim 1, wherein the fixed plate is a single plate having a shape exposing a portion facing the opening of the diaphragm, and is screwed to the bottom plate around the groove. The hydrogen peroxide water atomization apparatus as described. The hydrogen peroxide solution atomization apparatus according to claim 3, wherein the fixing plate is screwed to the bottom plate around the groove via the vibration plate. The hydrogen peroxide solution atomizing apparatus according to claim 3 or 4, wherein the fixed plate has a size covering the diaphragm. The distance between the position where the fixing plate is screwed to the bottom plate and the groove is such that the elastic seal member is opposite to the opening in the groove when the diaphragm is fixed to the outer surface of the bottom plate. The atomizing device for hydrogen peroxide solution according to claim 4 or 5, wherein the stress deformed in the direction of the outer peripheral surface on the side is set to a distance that can be absorbed by the diaphragm. A storage unit for storing the hydrogen peroxide solution, and an atomization unit for atomizing the hydrogen peroxide solution by ultrasonic vibration so that the hydrogen peroxide solution in the storage unit is discharged together with a carrier gas. In hydrogen peroxide water atomization equipment,
The atomization unit includes a storage unit that stores a propagation liquid that propagates ultrasonic vibrations,
The reservoir is
An opening penetrating the bottom plate and communicating with the accommodating portion;
A groove formed continuously around the opening in the outer surface of the bottom plate;
An elastic seal member disposed in the groove so as to protrude from the outer surface of the bottom plate;
A diaphragm covering the opening and the groove;
A fixed plate that presses and fixes the diaphragm to the outer surface of the bottom plate so that the diaphragm seals the opening in a state where the portion of the diaphragm facing the opening is exposed;
The outer surface of the bottom plate has a first step between a first outer surface inside the groove and a second outer surface outside the groove,
The hydrogen peroxide solution atomizing device is characterized in that a surface of the fixing plate facing the bottom plate has a second step corresponding to the first step so that the fixing plate is fitted to the bottom plate. . The outer surface of the bottom plate has, as the first step, a step in which the first outer surface is recessed from the second outer surface,
The elastic seal member is disposed on the outer peripheral surface of the groove opposite to the opening,
The surface of the fixed plate facing the bottom plate has, as the second step, a step in which the surface facing the first outer surface protrudes more than the surface facing the second outer surface. An atomizer for hydrogen peroxide water as described in 1. The outer surface of the bottom plate has, as a first step, a step in which the first outer surface protrudes from the second outer surface,
The surface of the fixed plate facing the bottom plate has a step difference in which the surface facing the first outer surface is recessed from the surface facing the second outer surface as a second step. The hydrogen peroxide atomization apparatus as described. The groove is an annular groove,
The atomizing device for hydrogen peroxide solution according to any one of claims 7 to 3, wherein the elastic seal member is an annular packing. The hydrogen peroxide solution atomizing apparatus according to any one of claims 7 to 4, wherein the fixing plate is a single plate and is screwed to the bottom plate around the groove. The hydrogen peroxide solution atomization apparatus according to claim 11, wherein the fixing plate is screwed to the bottom plate via the vibration plate around the groove. A diaphragm is attached to the bottom surface, and a first reservoir that stores liquid;
A second reservoir that stores propagation water that propagates ultrasonic vibrations;
An ultrasonic transducer that is installed on the bottom surface of the second reservoir and applies ultrasonic vibration to the propagation water;
With
The level of the propagation water when no ultrasonic vibration is given to the propagation water,
The water column generated by applying ultrasonic vibration to the propagating water is set to a water level at which the liquid is atomized by contacting the diaphragm.
An atomizer characterized by. An atomization device according to claim 13,
The level of the propagation water when no ultrasonic vibration is applied to the propagation water is determined based on a change in the amount of the liquid when the water column contacts the vibration plate and the liquid is atomized. A warning device for outputting a warning signal when the water level is lower than a predetermined level;
An atomizer characterized by. An atomization device according to claim 14,
The warning device is
A water level detection device for detecting whether or not the water level of the propagation water when ultrasonic vibration is not applied to the propagation water is lower than the predetermined water level;
A warning signal output unit that outputs the warning signal when it is detected that the water level of the propagation water when no ultrasonic vibration is applied to the propagation water is lower than the predetermined water level;
An atomizing device comprising: The atomization device according to claim 14 or 15,
When the warning signal is output, the display device further includes a display unit that displays information indicating that the water level of the propagation water when ultrasonic vibration is not applied to the propagation water is lower than the predetermined water level;
An atomizer characterized by. An atomization device according to any one of claims 13 to 16,
The second reservoir is
A storage container in which the ultrasonic vibrator is installed on a bottom surface and the propagation water is stored;
A lid that has an opening into which the first reservoir is inserted, and that seals a space in which the propagation water is stored when attached to the storage container in a state where the first reservoir is inserted into the opening. Members,
Including
In the storage container or the lid member,
An inlet is provided that is opened when the propagation water is injected into the storage container;
An atomizer characterized by. A diaphragm is attached to the bottom surface, and a first storage unit that stores hydrogen peroxide water;
A second reservoir that stores propagation water that propagates ultrasonic vibrations;
An ultrasonic transducer that is installed on the bottom surface of the second reservoir and applies ultrasonic vibration to the propagation water;
A vaporization unit that heats and atomizes the atomized hydrogen peroxide solution and outputs the same together with the supplied carrier gas;
With
The level of the propagation water when no ultrasonic vibration is given to the propagation water,
The water column generated by applying ultrasonic vibration to the propagating water is set to a level at which the hydrogen peroxide solution is atomized by contacting the diaphragm.
A sterilizing substance generator characterized by the above. A first storage section having a diaphragm attached to close the first opening provided on the bottom surface, storing liquid and having a first space sealed when pressurized or depressurized; ,
A vaporization unit that vaporizes the liquid atomized in the first storage unit;
Having a second space for storing propagation water that propagates ultrasonic vibrations, and a second opening, and sealing the second space together with the first storage when the second opening is closed; A second storage part having an ultrasonic transducer attached to the bottom surface;
A pressure adjusting device for pressurizing or depressurizing the first space;
A pressure measuring device that measures the pressure of the second space through the second opening;
A gas generator characterized by comprising: A first storage portion having a diaphragm attached to close the first opening provided on the bottom surface and having a first space for storing hydrogen peroxide solution, and atomized by the first storage portion A vaporization section that vaporizes the hydrogen peroxide solution; a second space that stores propagation water that propagates ultrasonic vibration; and a second opening. The first storage when the second opening is closed. A sterilizing substance generating device including a second reservoir that seals the second space together with a portion, and an ultrasonic transducer attached to a bottom surface; a flow path for pressurizing or depressurizing the first space;
A third opening that is provided in either the sterilizing substance generator or the flow path and seals the first space when closed;
A pressure adjusting device that pressurizes or depressurizes the first space through the third opening;
A pressure measuring device that measures the pressure of the second space through the second opening;
An isolator comprising: The isolator according to claim 20,
The pressure of the second space measured before the pressure of the first space is changed by the pressure adjusting device, and the second of the pressure measured after the pressure of the first space is changed by the pressure adjusting device. A determination device for determining whether or not a difference from the pressure in the space is greater than a predetermined pressure;
An isolator characterized by. The isolator according to claim 21,
When the determination device determines that the difference is greater than the predetermined pressure, the display device further includes a display unit that displays information indicating that the diaphragm has a hole;
An isolator characterized by. The isolator according to any one of claims 20 to 22,
The pressure regulator is
Pressurizing or depressurizing the first space before the hydrogen peroxide solution is atomized;
An isolator characterized by. The isolator according to any one of claims 20 to 23,
Provided in either the sterilizing substance generator or the flow path, and further provided with a fourth opening for sealing the first space when closed when the third opening is closed;
The pressure measuring device includes:
Measuring the pressure in the first space through the fourth opening;
An isolator characterized by.

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