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WO2011163302A1 - Processus de retrait sélectif d'une couche de revêtement - Google Patents

Processus de retrait sélectif d'une couche de revêtement Download PDF

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Publication number
WO2011163302A1
WO2011163302A1 PCT/US2011/041352 US2011041352W WO2011163302A1 WO 2011163302 A1 WO2011163302 A1 WO 2011163302A1 US 2011041352 W US2011041352 W US 2011041352W WO 2011163302 A1 WO2011163302 A1 WO 2011163302A1
Authority
WO
WIPO (PCT)
Prior art keywords
parts
area
removal
coating
partially removing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2011/041352
Other languages
English (en)
Inventor
Michael Ritzenhoff
Egbert Most
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seidel Inc
Original Assignee
Seidel Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seidel Inc filed Critical Seidel Inc
Priority to US13/806,219 priority Critical patent/US20130099422A1/en
Publication of WO2011163302A1 publication Critical patent/WO2011163302A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/48—After-treatment of electroplated surfaces
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/18—After-treatment, e.g. pore-sealing
    • C25D11/24—Chemical after-treatment
    • C25D11/246—Chemical after-treatment for sealing layers
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/022—Anodisation on selected surface areas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/34—Coated articles, e.g. plated or painted; Surface treated articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/08—Non-ferrous metals or alloys
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/08—Non-ferrous metals or alloys
    • B23K2103/10—Aluminium or alloys thereof
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon

Definitions

  • the present invention relates generally to methods and systems of removing a coaling or masking layer or an aluminum oxide layer from an area of a part, for the purpose of being able to combine individually desirable material properties on the same part.
  • Aluminum is well established in many industries as a base metal with a wide range of favorable material properties: It is light-weight, readily available, can easily be recycled, and can be deformed into nearly any shape without great effort in toolmg and machinery.
  • Typical aluminum alloys used for these applications include the materials covered in industry standards designated in 1000, 3000, 5000 and 6000 series aluminum alloys of varying grades of tempering (base hardness), but other alloys could also be considered for the application of the proposed process. These materials are commonly used in manufacturing applications in the form of coils in varying widths and thicknesses, where the efficiencies of continuous processing are advantageous, or sheets of various shapes and sizes, where smaller production volume and simplicity of handling are preferred.
  • aluminum can also be covered with a coating which can be colored in various ways.
  • One commonly applied process is the practice of anodizing the raw aluminum, to create a thin layer of very small pores of Aluminum Oxide, These pores will readily absorb certain dyes to provide a foil spectrum of colors, while, at the same time, forming a protective, wear-resistant surface due to the very high hardness of the Aluminum Oxide.
  • Commercial anodizing processes are designated as Type ⁇ or III anodizing defined in industry and military standards like MIL-A-8625 or MIL-STD-171.
  • conventional coatings with paints, lacquers or other coatings with special formulations have also been applied to achieve sufficient levels of hardness, wear resistance and color.
  • the present invention relates generally to a method of at least partially removing a coating or masking layer from an area of each of a plurality of parts, the method comprising the steps of:
  • the present invention relates generally to a method of at least partially removing an aluminum oxide layer from an area of each of a plurality of anodized aluminum parts, the method comprising the steps of:
  • the present invention relates generally to a method of at least partially removing a coating or masking layer from an area of a part, the method comprising the steps of:
  • the present invention relates generally to a method of at least partially removing an aluminum oxide layer from an area of an anodized aluminum part, the method comprising the steps of:
  • the present invention also relates generally to systems for removing a coating or masking layer or an aluminum oxide layer from an area of a part,
  • the present invention relates generally to a system for at least partially removing a coating or masking layer from an area of each of a plurality of parts, the system comprising:
  • the present invention relates generally to a system for at least partially removing an aluminum oxide layer from an area of each of a plurality of anodized aluminum parts, the system comprising:
  • the present invention relates generally to a system for at least partially removing a coating or masking layer from an area of a part, the system comprising:
  • the present invention relates generally to a system for at least partially removing an aluminum oxide layer from an area of an anodized aluminum part, the system comprising:
  • At least one removal device positioned for at least partially removing the aluminum oxide layer from the area of the anodized aluminum part.
  • the present invention relates to a method of at least partially removing at least one of a coating and a masking layer from an area of at least one part, the method comprising the steps of:
  • the present invention relates to a system for at least partially removing at least one of a coating and masking layer from an area of at least one part, the system comprising:
  • At least one removal device positioned for at least partially removing the at least one coating and masking layer from the area of the at least one part.
  • Fig. 1 shows a process flow diagram of a combined Anodizing and Finishing Line
  • Fig. 2 shows an Integrated Handling System to handle some of the movements of parts and components through the process
  • Fig. 3 shows the process flow diagram of the Removal Station in the Finishing Workcell where the actual removal process takes place
  • Fig. 4 shows the detailed parameters that need to be established and controlled for a successful Implementation of the removal process
  • Fig, 5 shows a first implementation example, where the part is acted on during the removal operation inside a Removal Workcell
  • Fig. 6 shows a second implementation example, where the part is in linear and rotary motion through the Removal Workcell during the removal process
  • Fig. 7 shows a third implementation example, where a plurality of removal systems act on a part inside the Removal Workcell
  • Fig, 8 shows a fourth implementation example, where a plurality of parts are acted on by a plurality of removal systems as they move through the Removal Workcell
  • One particularly favorable process to remove the aluminum oxide layer is by means of a laser device, for example used in engraving operations to apply graphics and patterns to suitable surfaces, including raw or anodized alummum.
  • a laser device for example used in engraving operations to apply graphics and patterns to suitable surfaces, including raw or anodized alummum.
  • These engraving lasers are commercially available, with modem controls that allow adjustments for the size and shape of the part, the size and depth of the area in which all or a portion (certain depth) of the aluminum oxide layer is to be removed, processing speeds, etc.
  • a manipulation of the parts themselves, the laser beam, or a combination of both may have to be employed.
  • One particularly beneficial implementation of this process is achieved in so-called rack- or belt-anodizing, where the parts, typically small sizes and/or large quantities, are oriented and aligned on fixtures to maximize process efficiency and provide the proper electrical contact during anodizing.
  • This process implementation is typically found in industries and applications like cosmetics, medical or pharmaceutical packaging, where large volumes, high quality standards and cost efficiencies are required.
  • the required pails handling volume in these applications can reach several hundred million parts per year. Since the parts are already aligned in a defined orientation, it is advantageous to implement the process step of removing controlled areas of the aluminum oxide after the completion of the anodizing process.
  • these parts are fairly thin, with thicknesses ranging from a few micrometers to one millimeter or more, which makes it desirable to minimize the need to handle the parts with the risk of damage to the shapes and surfaces.
  • the Finishing Workcell of the Removal Station is preferably set up to operate directly in-line with the Anodizing Line, but near-line or off-line implementations can also be
  • the transfer of parts and components between stations and workcells may be manual or automatic, or a combination thereof.
  • a plurality of parts are assembled onto a titanium or aluminum rack in a defined orientation, to be processed in a combined Anodizing and Finishing Line, see Fig. 1.
  • the parts are aligned closely next to each other to maximize process efficiency.
  • One such rack could have dimensions of e.g. 500mm x 500mm, and hold up to 1200 or more parts of a diameter of 10mm or less.
  • Such rack could consist of a plurality of clamping strips being loaded off-line with an integrated handling system, see Fig. 2, with a certain number of the parts, e.g. 40 on each strip; the au tomated loading system could install e.g. 30 of these clamping strips onto said rack in a discrete operation.
  • Another commonly applied system is to install these strips on a belt, where the belt is used to carry the strips through the tanks of the anodizing process in a continuous operation.
  • the integrated handling system in Fig. 2 could include an automated visual inspection system to check for dimensional tolerances and other quality defects in the raw parts being supplied to the system.
  • a plurality of such racks could then be transferred to a larger frame that can hold 14 or more of these racks per side, totaling 33,000 parts or more to be processed simultaneously or on a continuous belt system in a suitable anodizing line.
  • the racks are manually or automatically unloaded from the frames, and transferred to an automatic unloading system, see Fig. 2, where the aforementioned clamping strips are disengaged from the racks or transport belt, and the anodized parts from each strip are automatically undamped and transferred into a set of tracks or other means that maintain alignment and spacing of the parts, while the empty strips are returned within the automatic loading/unloading system to be reloaded with a set of new parts, to be sent into the anodizing process.
  • the parts are automatically transferred into a workcell station, see Fig. 3, where the actual process of removing a portion of the anodizing layer is performed.
  • Fig. 3 where the actual process of removing a portion of the anodizing layer is performed.
  • These areas of desired removal could be located on either of the surfaces of flat parts, or the "inside” and/or “outside” surfaces of a wide variety of shapes of hollow parts. These surfaces could be substantially flat, or curved to a certain degree.
  • the finishing workcell could consist of one or a plurality of devices to perform the removal operation, see Fig. 4, aligned in a matter so as to engage in certain defined areas to make up the entirety of the removed surface area defined by the application, namely those areas where the hardness of the anodized layer would interfere with the desired deformability of the underlying aluminum.
  • Fig. 4 outl ines some of the parameters of the process and the parts that need to be controlled for a successful implementation of the removal process.
  • the source of the energy for the removal process can be either continuous over larger areas (e.g. a chemical reaction) or focused at discrete locations , like using a waterjet, grit- blast or laser application. The interaction of this energy can therefore be concurrent in nature, like a semi-continuous sweep over larger areas, or discrete and highly localized, like in a dot-matrix pattern.
  • One embodiment of such removal is to expose the required areas of each part in front of the removal device in a rotational motion around one or more of its axes, see Fig. 5.
  • a cup-shaped part moves in and out of the workstation before and after the removal process.
  • the part rotates in a defined position in front of a first and a second removal systems, where the first removal system may be focused to remove the areas on the outside of the part and the portion of the rim areas exposed to it, while the second removal system is focused on removing the inside areas and the remaining exposed rim areas.
  • the angle of incidence may range between from 90 degrees to the surface of removal down to 45 degrees or l ess.
  • One successful implementation for a small and narrow part was achieved with angles of incidence of abou t 60 degrees from the surfaces of the part,
  • Another embodiment of the invention limits the motion of each part to the movement through the workcell in Fig. 6, and the removal systems follow each part on its path by controlling the direction of the energy of the removal system.
  • commercial laser systems include this "tracing" feature by controlling the beam direction by means of optical lenses and mirror systems as a standard feature.
  • the translatory and rotational motions are synchronized with the controls for the removal systems, so that the removal systems always focus and point at the apex of the parts.
  • the removal parameters are chosen so that the removal time is short enough to maintain the required energy densities to avoid the need to adjust the focus of the removal systems as the part moves through the removal zone of the workcell.
  • a sensor triggers the start of the removal systems, and the linear velocities and part spacing are optimized to match the jump time for the removal system to move their focus to the next part that enters the removal zone after the removal process for the preceding part is finished as it exits the removal zone.
  • This process could also equally be performed by a single removal system, switching between the desired areas of remo val, as described in the preceding paragraph.
  • Another embodiment would be to employ a plurality of removal devices in the workcell according to Fig. 7, each aligned independently to remove only a defined partial area, the sum of these partial areas adding up to comprise the total area to be removed.
  • the trade-off between these two approaches lies in the investment and operational cost of the number of removal stations included in the removal system, in relation to the achievable removal rate for each removal device and hence the overall system throughput for the entire process, hi the shown application example, five removal systems are arranged along the path of the parts through the workcelL Four removal systems are designated to act on the outside and inside of the cup-shaped part shown as an illustration, while a fifth removal system in this example is designated solely to act on the rim area of the part, to ensure adequate removal by maintaining an optimal angle of incident on the surface to be removed.
  • Each of the four removal systems acting on the perimeter of the part is set up to act on a segment of the total circumferential area, covering 90 degrees or one-fourth of the total circumferences of the respective inside and outside areas, plus a small area of overlap between the segments.
  • the width of this area of overlap depends on the accuracy of the focusing and positioning controls of the chosen removal systems and can range from under one millimeter to several millimeters. In one successful implementation, an area of overlap between the removal systems of one millimeter was implemented,
  • Yet another embodiment would allow the single or multiple removal systems to switch focus between multiple parts, as these move through the workcell in parallel paths, see Fig. 8, to further increase throughput performance.
  • a continuous stream of parts is arranged in parallel paths of defined spacing in the indicated x- and y-directions.
  • the parts are moved through the workcell in x-direction, and the removal systems are sequentially controlled to act on defined areas of the parts in each track along the y-direction, as the parts move along their respective defined paths through the workcelL Implementations of the above described process were successfully perfomied by using commercial laser removal devices.
  • These devices can be of C0 2 , Nd:YAG, Nd: YV 0 4 , Yb:fiber or other base design to create a laser beam.
  • Power control can be accomplished using mode-locked or Q-switched technique.
  • a Yb:fiber based, pulse switched laser system is used.
  • the applications advantageously use laser devices with wavelengths in the range from 300— 1200nm.
  • Particularly successful was the application in the infrared range of around 1062nm, which is especially suitable for the range of colors in the dye used in the anodizing process, as well as compatible with the relevant material properties of both the base aluminum and the aluminum oxide of the anodizing layer.
  • Average power levels of the laser systems of 5W to 750W are suitable to perform the operation successfully. A level of 20-30W is adequate, however, higher power levels will allow to reduce the cycle time and result in higher system throughput and overall performance.
  • the laser beam is directed and focused on each of the removal surfaces for optimum removal quality, and the combination of available process control parameters adj usted in relation to the number and relative position of "dots" removed with each pulse to achieve complete removal of the anodizing layer across the entire defined surface area.
  • focal distance 160mm and a laser beam focus diameter of 70 ⁇ .
  • Other combinations of focal distance (in the range between 100 - 500mm) and beam focus diameters (between 10 and 1 ⁇ ) may be employed, depending on the particular system properties and selected operation parameters of the selected laser system, especially those of the optical lenses and mirrors employed in the beam path and the particular properties of the layer of material to be removed.
  • the pulse repetition rate can be set to 100kHz or higher, typically in a range from 25-lOOGkHz, depending on the particulars of the selected laser system; operating modes can be of the "modulated or “continuous wave” mode form or a combination thereof.
  • the pulse duration can be in the order of magnitude of nanoseconds or less, depending on the beam focus diameter, system power and other specifics of the selected laser system and the material to be removed; typically, the pulse width can range from less than lOps to 700ns or more,
  • the maximum required pulse energy can range between 25 and 250 ⁇ , depending on the selected laser application control settings that result in the best removal rate and quality.
  • the parts may- pass through a final automated inspection system, where parts are deemed “pass” or "fail”, based on defined acceptance criteria.
  • the passing parts are transferred to an automated packaging station, while the failing parts are collected to be reviewed and reused or recycled as standard aluminum recyclable material.
  • the means to provide the required energy to remove the anodizing layer are not limited to employing the highly focused energy of laser systems, which generally have the ad van tage of being commercially avai lable and very precise in the controls of their operating parameters.
  • suitable, with little concern for less quality in the result of the layer removal are removal systems based on the mechanical energy of water-jets (with or without the addition of abrasive media) or abrasive blasting (e.g.
  • silica sand or aluminum oxide as abrasive medium in a controlled stream of high-pressure air or other gases), provided the stability in part position and orientati on can be maintained against the impact of the media, or the chemical energy of certain material removal processes, as long as the residue of the process can. be adequately captured and disposed of.
  • the above removal process is not limited to the removal of the hard aluminum oxide layer obtained after the anodizing process.
  • the removal process can also be successfully employed to solve the above described challenge of removing a masking layer, which may have been introduced and applied onto the raw metal prior to the anodizing process, to protect certain areas from being anodized in the first place. If the masking is detrimental to the final use of the parts and must be removed in a controlled manner, the above described methods can be applied to remove such a layer of masking material in very much the same fashion as described above to remove the anodizing layer in those exact same areas.
  • the above described processes can be equally successful when implemented at smaller scales of volume and productivity, e.g. at a lab level down to processing only a single part, or volumes of only a few hundred or tho usand parts per ran cycle, if the cost of the implementation can be justifi ed. it is equally implied that the removal of layers of insufficient ductility is not limited to layers of aluminum oxide created in an anodizing process. Other layers of coatings, like paints, lacquers and specially formulated coatings based on various chemical substrates and compounds can equally be removed taking advantage of the benefits of the above described processes, provided the process and operational parameters are adequately adjusted to match the properties of such materials.
  • One example of such applications include pre-lacquered or pre-anodized sheet or coil materials, with anodized layers on one or both sides, to achieve a match in the desired color for the application.
  • Another example is the anodizing in a bulk process, where parts of sufficient stiffness to withstand the mechanical stresses encountered in bulk applications are anodized in large batches, with a trade-off in color consistency and anodizmg quality.
  • the above described processes can be applied on parts of any shape or size, small or large, thin walls or thicker parts made from bar stock. Castings or otherwise machined parts, in quantities down to single prototypes, can be successfully processed, where localized, defined areas of an. applied coating need to be removed, for purposes of improved ductility or other reasons.
  • removal processes and systems described herein can be used for removing coating or masking layers and/or oxide layers from other materials, including for example, various metal alloys, including aluminum alloys, steel, including stainless steel, brass, and other similar materials.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Laser Beam Processing (AREA)

Abstract

La présente invention se rapporte à un procédé consistant à retirer au moins partiellement un revêtement et/ou une couche de masquage d'une zone d'au moins une pièce, comprenant les étapes consistant à orienter la ou les pièces; et à retirer la zone du revêtement et/ou de la couche de masquage de la ou des pièces à l'aide d'au moins un dispositif de retrait. Selon un mode de réalisation préféré, le procédé comprend une pluralité de pièces, l'orientation de la pluralité de pièces et le retrait de la zone du revêtement et/ou de la couche de masquage de chaque pièce de la pluralité de pièces à l'aide d'une pluralité de dispositifs de retrait. L'invention se rapporte également à un système destiné à retirer au moins partiellement un revêtement et/ou une couche de masquage d'une zone d'au moins une pièce. Selon un mode de réalisation préféré, le ou les dispositifs de retrait sont des lasers.
PCT/US2011/041352 2010-06-23 2011-06-22 Processus de retrait sélectif d'une couche de revêtement Ceased WO2011163302A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US13/806,219 US20130099422A1 (en) 2010-06-23 2011-06-22 Process for Selectively Removing a Coating Layer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US35776210P 2010-06-23 2010-06-23
US61/357,762 2010-06-23

Publications (1)

Publication Number Publication Date
WO2011163302A1 true WO2011163302A1 (fr) 2011-12-29

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* Cited by examiner, † Cited by third party
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DE102014218595A1 (de) * 2014-09-16 2016-03-17 Volkswagen Aktiengesellschaft Verfahren zum zumindest teilweisen Entfernen einer Mischoxid- bzw. Oxidschicht von einer Oberfläche eines intermetallischen Aluminid und/oder Aluminiumlegierung umfassenden Körpers
GB201917790D0 (en) * 2019-12-05 2020-01-22 Coated Metallic Tech Limited Protective coatings for metals

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US5736709A (en) * 1996-08-12 1998-04-07 Armco Inc. Descaling metal with a laser having a very short pulse width and high average power
US5997388A (en) * 1997-08-11 1999-12-07 Micron Electronics, Inc. Apparatus for removing marks from integrated circuit devices
US6424670B1 (en) * 2000-02-17 2002-07-23 Universal Laser Systems, Inc. Apparatus and method for making laser sources and laser platforms interchangeable and interfaceable
US6602430B1 (en) * 2000-08-18 2003-08-05 Micron Technology, Inc. Methods for finishing microelectronic device packages
US20050020087A1 (en) * 2003-04-24 2005-01-27 Hermann Wagner Method and apparatus for removing an edge region of a layer applied to a substrate and for coating a substrate and a substrate
US20080092806A1 (en) * 2006-10-19 2008-04-24 Applied Materials, Inc. Removing residues from substrate processing components

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JP2518107B2 (ja) * 1992-03-20 1996-07-24 チャーチ・アンド・ドゥワイト・カンパニー・インコーポレイテッド 研磨性被膜除去剤とその使用方法
US6485576B1 (en) * 1996-11-22 2002-11-26 Taiwan Semiconductor Manufacturing Co., Ltd. Method for removing coating bead at wafer flat edge
US6297550B1 (en) * 1998-04-01 2001-10-02 Lsi Logic Corporation Bondable anodized aluminum heatspreader for semiconductor packages
WO2001060568A1 (fr) * 2000-02-14 2001-08-23 Sadler Love & Associates, Inc. Procede et appareil de decalaminage du metal
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Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5736709A (en) * 1996-08-12 1998-04-07 Armco Inc. Descaling metal with a laser having a very short pulse width and high average power
US5997388A (en) * 1997-08-11 1999-12-07 Micron Electronics, Inc. Apparatus for removing marks from integrated circuit devices
US6424670B1 (en) * 2000-02-17 2002-07-23 Universal Laser Systems, Inc. Apparatus and method for making laser sources and laser platforms interchangeable and interfaceable
US6602430B1 (en) * 2000-08-18 2003-08-05 Micron Technology, Inc. Methods for finishing microelectronic device packages
US20050020087A1 (en) * 2003-04-24 2005-01-27 Hermann Wagner Method and apparatus for removing an edge region of a layer applied to a substrate and for coating a substrate and a substrate
US20080092806A1 (en) * 2006-10-19 2008-04-24 Applied Materials, Inc. Removing residues from substrate processing components

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