WO2011152605A1 - Device for inspecting flat panel - Google Patents

Abstract

The present invention provides a device for inspecting a flat panel, wherein the invention: enables the light transmitted or reflected from the flat panel to be incident on the flat panel again by using a retro-reflecting plate; and forms an image by blocking, with a knife edge, the light irregularly reflected and refracted from a deformation unit of the flat panel, whereby the invention shows high sensitivity and is configured in goggles form so that an observer can wear the invention.

Description

Flat Panel Inspection Device

The present invention relates to a flat panel inspection apparatus for inspecting defective elements formed on the surface or inside of a flat panel to be inspected for opaque or transparent objects.

Those used in semiconductors, wafers, LCD panels, and painted iron plates for automobiles have a flat structure, and their defects have a great influence on the quality of the final product. Therefore, the process of inspecting their defects is a very important process in the production process, various inventions have been made for the inspection equipment.

 1 is a block diagram showing the overall configuration of Patent Publication No. 10-2006-0054835 (name of the invention: a method for inspecting a cell structure light related plate element for flat panel and its apparatus).

As shown in FIG. 1, the inspection apparatus for inspecting a flat panel is provided with a loading / unloading stage 51 and an inspection stage 52 of a panel having a flat panel structure, and moving means such as a carrier between both stages ( After the panel loaded on the loading / unloading stage 51 by 55 is moved to the inspection stage 52, the panel is aligned on the work table 53 and the image is transmitted through the panel when the backlight unit 54 is turned on. Acquired and processed by the camera to determine whether it is defective.

As described above, the invention disclosed in Korean Patent Laid-Open Publication No. 10-2006-0054835 occupies a very large installation space due to the large volume of the inspection system, is expensive, and cannot be worn by an individual, so the observer's naked eye can directly inspect whether the panel is defective. There is no problem.

The present invention is to overcome this problem, the problem of the present invention is to provide a test apparatus that can be manufactured small and low cost.

Another object of the present invention is to provide an inspection apparatus that can be made compact so that the observer can directly wear, and can accurately inspect the accurate flat panel.

A specific solution for solving the above problems is a flat plate for inspecting the flat panel by injecting light into the flat panel and retroreflecting the light transmitted through the flat panel or reflected from the flat panel to the flat panel by a retroreflective plate. A panel inspection apparatus, comprising: at least one light source for emitting light toward the flat panel; And an imaging lens group including at least one imaging lens provided between the flat panel and the imaging unit along an optical axis of light emitted from the light sources.

In addition, the invention further comprises a knife edge (knife edge) for blocking the incident light reflected or refracted by the deformation portion formed in the flat panel incident to the image forming portion.

In the present invention, the imaging unit is preferably a human eye or an area CCD.

In addition, in the present invention, the knife edge is provided at the second main point of the imaging lens group, the knife edge is preferably installed to be inclined to the optical axis to reflect light incident from the light source in parallel to the optical axis.

In the present invention, it is preferable that a half mirror is provided at the second main point of the imaging lens group to reflect the light incident from the light source to the flat panel.

In addition, in the present invention, the imaging lens group may be provided in plural on the optical axis, and further includes a knife edge installed at the second main point of the imaging lens group, wherein the knife edge receives light from the light source and is parallel to the optical axis. It is preferable to reflect the light and enter the flat panel.

In addition, another solution of the present invention is to retroreflect the light transmitted through the unit flat panel or reflected from the flat panel to the unit flat panel by a retroreflective plate when the unit flat panel having unit length is repeatedly moved. A flat panel inspection apparatus for inspecting the unit flat panel, comprising: at least one light source for emitting light to the unit flat panel; Detection means for detecting a movement period of the unit flat panel; An illumination control device for blinking the light sources in synchronization with the movement period detected by the detection means; At least one light source for emitting light toward the flat panel; An imaging lens group including at least one imaging lens disposed between the unit flat panel and the imaging units along an optical axis of light emitted from the light sources; It includes a knife edge for blocking the incident light reflected or refracted by the deformable portion formed in the unit flat panel incident on the image forming portion.

The present invention having the above problems and solving means is made in the form of goggles worn by the observer to be able to conveniently inspect the flat panel.

In addition, the present invention can remove the sparking phenomenon generated on the surface of the flat panel during the inspection of the transparent flat panel to accurately detect the deformation formed in the flat panel.

In addition, the present invention can increase the inspection speed and accuracy by reducing the imaging by the line unit and having a high gradient while forming the imaging by the area unit, and can reduce the fatigue of the observer.

1 is a block diagram showing the overall configuration of Patent Publication No. 10-2006-0054835 (name of the invention: a method for inspecting a cell structure light related plate element for flat panel and its apparatus).

2 is a block diagram of a first embodiment of the present invention.

Figure 3 is a block diagram for explaining the effect of the knife edge applied to the present invention. Figure 4 is a test subject to obtain a three-dimensional image in the image photographing apparatus according to the present invention Figure 5 is an optical system of a first embodiment of the present invention The configuration diagram shown.

6 is a configuration diagram illustrating the configuration of the second embodiment of the present invention.

7 is a configuration diagram illustrating the principle of a stroboscope applied in the second embodiment of the present invention.

8 is a configuration diagram illustrating a focusing shuriren effect applied to the third embodiment of the present invention.

9 is a configuration diagram of a third embodiment of the present invention.

10 is a configuration diagram illustrating a fourth embodiment of the present invention.

Fig. 11 is a block diagram for explaining a fifth embodiment of the present invention.

12 is a perspective view illustrating the effect of the present invention.

Fig. 13 is a perspective view of a fifth embodiment of the present invention.

14 is a perspective view of a sixth embodiment of the present invention.

15 is a light path diagram of a seventh embodiment of the present invention.

16 is a light path diagram of an eighth embodiment of the present invention.

17 is a light path diagram of a ninth embodiment of the present invention.

18 is a light path diagram of a ninth embodiment of the present invention.

19 is a perspective view of a tenth embodiment of the present invention.

20 is a perspective view of an eleventh embodiment of the present invention.

21 is a perspective view of a twelfth embodiment of the present invention.

Fig. 22 is a light path diagram of a thirteenth embodiment of the present invention.

(A) is a layout view of a point light source LED, (b) is a layout view of a line LED.

24A and 24B are diagrams showing the shape of a light source reflected by the partially total reflection mirror.

25 is a configuration diagram of a fourteenth embodiment of the present invention.

26 is a configuration diagram in which the fourteenth embodiment of the present invention is installed in the field.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

2 is a block diagram of a first embodiment of the present invention.

The inspection apparatus 100 of the first embodiment is a device capable of inspecting both the flat plate of the transparent body and the flat plate of the non-transparent body according to the installation position of the retroreflective plate 103. 2 is a state where the retroreflective plate 103 is installed to inspect the flat panel 101 of the opaque body. In the case of inspecting the flat panel of the transparent body, the retroreflective plate 103 is installed on the opposite side of the inspection apparatus 100 on the basis of the flat panel 101, and the flat panel 101 of the opaque body is inspected as shown in FIG. In this case, the flat panel 101 is installed to be inclined on the same side as the inspection apparatus 100.

2 is a configuration diagram for inspecting the flat panel 101 of the opaque body by the inspection apparatus 100. The inspection apparatus 100 is provided with light sources 105 and 106, and the light sources 105 and 106 are provided. The light irradiated onto the flat panel 101 is reflected by the flat panel 101 and is incident on the retroreflective plate 103.

Since the retroreflective plate 103 reflects the incident light back in the incident direction due to its characteristics, the light incident on the retroreflective plate 103 from the flat panel 101 is totally reflected back to the flat panel 101, and the flat panel All of the light reflected back from 101 is received by the inspection apparatus 100.

As described above, in the case where the incident light is re-reflected using the retroreflective plate 103, no loss of light occurs, and the flat panel 101 can be efficiently inspected even with the small light sources 105 and 106. .

3 is a configuration diagram for explaining the effect of the knife edge applied to the present invention.

As shown in FIG. 3A, when light is irradiated onto the screen 9 from a light source 25 that is a point light source, the brightness of the screen 9 is one unit. At this time, an abnormal state capable of changing the refractive index, for example, density deformation, foreign matter, deformation, etc. (hereinafter, referred to as “deformation portion”) changes the refractive angle. When the light irradiated from the light source 25 is refracted by the deformable part 11, since the light does not reach the position where the optical path (dotted line) meets when the deformable part 11 is not present, the dotted line on the screen 9 The reaching portion has a brightness of 0 units, and the portion where the light refracted by the deformable portion 11 reaches the screen 9 increases in brightness by 2 units.

As such, a small disturbance occurs in the optical path between the screen 9 and the light source 25 in which the image is formed, and thus the angle of the light is changed so that the image in which the light of the image and the light source 25 are not matched is directly shaded. Direct Shadow Image, which shows only the starting point of the change in the refraction of light, that is, the inflection point is dark.

The direct shaded image is changed into a 0 unit portion in which the brightness is sharply reduced and a 2 unit portion in which the brightness is sharply increased by the deforming unit 11, and thus a sharp difference in brightness between the bright and dark portions of the image occurs. The sharp difference in brightness between the bright and dark portions of the image emphasizes only the periphery of the deformable portion 11, so that clear three-dimensional information cannot be obtained. In other words, when the brightness is changed drastically, only the outline of the deformable portion 11 is obtained on the screen 9 since only a light amount gradient with respect to the boundary of the portion where the brightness changes abruptly can be obtained. As a result, it is impossible to obtain an image capable of reading a substantially three-dimensional shape of the deformable portion 11.

On the other hand, as shown in (b) of FIG. 3, the Schlieren Image using the knife edge 13 according to the present invention does not cause a sharp difference in brightness between the lightest and darkest parts. Do not.

As shown in FIG. 3B, a light source 25, which is a point light source, is positioned at the left focal point of the field lens 15, and light emitted from the light source 25 is transferred to the field lens 15. The screen 9 is irradiated through the right focal point. If there is a deformable portion 11 between the field lens 15 and the right focus of the field lens 15, the path of light passing through the deformable portion 11 is refracted from the normal path (dotted line) and the knife edge located at the right focus. It is blocked by 13 and terminated without being formed on the screen 9.

In addition, when it is assumed that the intensity of light emitted from the light source 25 of FIG. 3B is the same as that of light emitted from the light source 25 of FIG. 3A, in FIG. Since only half of the light passing through the field lens 15 by the knife edge 13 reaches the screen 9, the brightness at each point on the screen 9 in FIG. 3A is 1 unit. The brightness at each point of the screen 9 in 3 (b) is 0.5 unit. In FIG. 3A, the light refracted by the deformable part 11 reinforces the brightness of another point on the screen 9 by two units. In FIG. 3B, the light refracted by the deformable part 11 is refracted by the deformable part 11. The light is blocked by the knife edge 13 so as not to reinforce the other points of the screen 9.

That is, in the case where the deformation part 11 is not shown in FIG. 3B, the deformation part 11 is located at a position where a dotted line, which is a normal path through which light reaches the screen 9, reaches the screen 9. If present, the light is not entered by the knife edge 13 so that it has zero brightness, and the other points on the screen 9 maintain 0.5 brightness. As a result, when some rays are blocked by using the knife edge 13 as shown in FIG. 3 (b), since the change value of the brightness on the screen 9 by the deformable portion 11 becomes small, the brightness of the brightness on the screen 9 is reduced. Gradients can be extracted.

Therefore, when the knife edge 13 is used as shown in FIG. 3 (b), the image of the inspection object as well as the contour of the inspection object can obtain a clear image having a three-dimensional shape with a gradient. As such, when a portion of the optical path is blocked by using the knife edge 13 on the focal plane where the light source 25 gathers, the intensity of light amount with respect to the defects on the surface or inside of the inspection object is changed according to the change in the angular gradient of the optical path. Is sensitive to the Schlieren Effect.

4 is a view showing a principle of quantifying the reflected light from the inspection object to obtain a three-dimensional image in the imaging apparatus according to the present invention.

First, FIG. 4 illustrates a path of reflected light when the deformed portion 39 of the convex surface of the flat panel 101 passes through the viewer's view. The flat panel 101 has a visual range of (a), (b). ), (C), (D), (E) pass in the order, and for convenience of explanation, when the CCD is installed where the observer's eye is located, the state of (A) is the light reflected from the retroreflective plate 31. In the non-deformed CCD image B reflected by the non-deformed portion 39, the average brightness is obtained, and in the graph C of the brightness, it has the same intensity value as the intermediate brightness.

In addition, the state of (b) indicates a state in which light incident from the retroreflective plate 103 is refracted at the front of the deformable portion 39 and blocked by the knife edge 13. In this case, the image of the darkest portion of the image B is It is picked up and has the lowest intensity in graph C.

In addition, in the state of (c), since the light incident from the retroreflective plate 103 is reflected in the plane of the top portion of the deformable portion 39, the deformed portion 39 is not blocked by the knife edge 13. Similar to the non-existent state, image B has a medium brightness and has a medium intensity value in graph C.

In addition, the state of (D) indicates a state in which light incident from the retroreflective plate 103 is reflected from the rear portion of the deformable portion 39 and overlaps with other light rays so that reinforcement of the light occurs. In this case, the value of the intensity of the brightness of the graph C is also best formed.

In addition, the state of (e) is the state which the deformation | transformation part 39 passed, and will have an image and a graph similar to the state of (a) for the first time.

As such, the light reflected from the flat panel 101 and re-reflected from the retroreflective plate 103 is collected back to the reflective position of the flat panel 101, reflected back from the flat panel 101, and imaged by the CCD. Even if there is vibration or the inclined portion 101, a clear image can be obtained. In addition, when the light reflected from the retroreflective plate 103 is irregularly reflected by the deformable portion 39, the reflected light reflected by the deformable portion 39 and the reflected light that is irregularly reflected by the deformable portion 39 may cause reinforcement and cancellation. Only the reinforcement occurs because the light being canceled is blocked by the knife edge 13.

Therefore, by reducing the difference between the brightness of the reinforcement point and the offset point is made small to increase the sensitivity of the image to the deformable portion 39, to obtain a gradient of the intensity of the light to obtain a clear three-dimensional information about the image do.

The same effect is obtained even when the observer's eye is located at the CCD position, and the observer can recognize the deformable portion 39 three-dimensionally, thereby immediately detecting the deformable portion 39.

5 is a block diagram showing an optical system of a first embodiment of the present invention, Figure 6 is a block diagram illustrating the installation position of the knife edge in the first embodiment of the present invention.

In the inspection apparatus 100, an objective lens group 118 including two or more objective lenses 119 and 120 is installed on the alternative lens 110 and the alternative lens optical axis. The condenser lens 115 and the light source 105 are installed on the vertical line of the optical axis of the alternative lens 110 through two main points. Also, a second edge of the objective lens group 118 is provided with a knife edge 113 to block a part of the amount of light reflected from the flat panel 101 and directed toward the alternative lens 110. Increase the gradient of intencity of light reflected by the viewer so that the viewer can see it.

The second main point will be described with reference to FIG. 6. In general, in order to remove lens chromatic aberration and the like to improve lens performance, a plurality of lenses are overlapped rather than a single lens, and the center of the plurality of lenses is called a second principal point, that is, a position defining a focal length. Mainly adjust the amount of light coming in by placing the aperture in the second bar in the first embodiment, the knife edge 113 is provided in the second bar. The focal length of a lens group consisting of multiple lenses is the distance from the lens to the center point of the circle with respect to the lens surface, but the focal length of the camera lens is between the second principal point of the lens and the film surface when the lens is focused at infinity. It means the distance on the optical axis. Here, the second principal point is defined as the point where the water line meets the optical axis when the water line is drawn at the point where the extension line of the parallel ray incident to the lens and the line extending to the lens are refracted by the last lens and focused on the lens.

In addition, the inspection apparatus 100 is provided with two sets of optical systems installed on the optical axis of the observer's eyes, but because of the same configuration will be described with respect to one optical system.

The light emitted from the light source 105 is reflected to be emitted parallel to the optical axis of the observer's eye at the knife edge 113 which simultaneously serves as the partial total reflection mirror and the knife edge. At this time, the knife edge 113 is installed at the second main point of the objective lens group 118 and the focus of the condenser lens 115 to reflect the light of the incident light source 105 in parallel with the optical axis of the observer's eye. It is preferably installed so as to be inclined so as to be inclined so that the end portion is as closely as possible to the optical axis so as to perform the knife edge function.

 The light of the light source reflected by the knife edge 113 is incident and reflected on the flat panel 101 of the opaque body, and the light reflected by the flat panel 101 is retroreflected by the retroreflective plate 103 to the flat panel 101. Re-incident, the re-incident light is reflected by the flat panel 101 is directed to the observer's eye, a portion of the light irregularly reflected by the defective portion of the flat panel 101 is blocked by the knife edge 113 As a result, the observer can greatly detect the gradient of the amount of light so that the observer can easily detect the defective part in three dimensions. Therefore, the surface state of a transparent or reflective flat panel can be seen in detail.

In addition, although FIG. 5 illustrates a configuration in which the flat panel 101 is an opaque body, when the flat panel 101 is a transparent body, the retroreflective plate 103 is plated on the opposite side of the observer's eye based on the flat panel 101. When installed in parallel with the panel 101, the light transmitted through the flat panel 101 is reflected by the retroreflective plate 103 to be re-incident to the flat panel 101 to obtain the same effect.

FIG. 7 is a configuration diagram illustrating the configuration of the second embodiment of the present invention, and FIG. 8 is a configuration diagram illustrating the principle of a stroboscope applied in the second embodiment of the present invention.

In the second embodiment illustrated in FIG. 7, the flat panel 101 is a sample that may be used for printed matter, steel, paper, packaging, wire, etc., in which the same pattern is repeatedly printed at the same interval and cut by a post process. A unit of repetitive glyphs is defined as a unit flat panel.

In the second embodiment, since the unit flat panel repeatedly passes the observer's time when the unit flat panel is moved at a uniform speed, the time taken for a unit flat panel to pass at a fixed position in one cycle T is obtained. Correspondingly, the period of the unit flat panel can be detected by a period detecting means 203 such as an optical mouse that performs an encoder or a non-contact encoder, and the strobe lighting 201 is synchronized with this period. By controlling, the unit flat panel 101 moving at a constant speed can be inspected in a stationary state.

Since the configuration of the optical system is the same as in the first embodiment, the same reference numerals will be given to the same configuration, and description thereof will be omitted.

In the second exemplary embodiment, the stole light 201 blinks in synchronization with the movement period of the unit flat panel of the flat panel 101 by the light control device 205, so that the stole light 201 may be stowed with respect to the unit flat panel as shown in FIG. By the principle of the lobescope, the observer sees still images.

In FIG. 8, when the eight-segmented rotating disk rotates at a uniform speed, the lighting device is turned on every time it returns to its original position, that is, in synchronization with one cycle, the observer does not recognize the rotating disk and the rotating disk. Will be recognized as stopped.

The second embodiment is characterized by the period detecting means 203, the stove illumination 201, and the period detecting means 203 for detecting a period synchronized with the position of the unit flat panel by the movement of the flat panel 101. It is composed of an illumination control device 205 which lights up the stove lighting 201 according to the detected period and the same optical system as in the first embodiment.

According to the second embodiment configured as described above, when the unit flat panel repeatedly passes through the viewer's view, the observer recognizes that the unit flat panel is in a stationary state and recognizes the deformation part three-dimensionally, thereby easily deforming the deformation part. The unit flat panel can be detected.

9 is a configuration diagram illustrating a focusing shuriren effect applied to the third embodiment of the present invention.

Light emitted by the surface light source 411 passes through the grid 413 on which the slits are formed at regular intervals, and passes through the cut-off grid 417 to be incident on the CCD 419.

At this time, when the deformable portion 415 for refracting light is positioned between the grid 413 and the cutoff grid 417, the refracted light is blocked by the cut off grid 417 so that the light is not incident to the CCD 419. The grid 417 has the same effect as the knife edge of the first embodiment. At this time, when the CCD 419 is not for acquiring a line scanned image but for acquiring an area scan image in an area form, the deformation unit 415 is not positioned on a specific line, but is randomly selected from the entire area scanned. Since it is placed in the area, the cut off grid 417 has the effect of installing the life edge in the entire area.

As such, the observer's eye into which the image of the wide area is input acts more like an area CCD than a line CCD, so that the flat panel is formed by a grid 413 and a cut-off grid 417 that form parallel light incident at regular intervals. Sensitivity to the deformation can be observed.

10 is a configuration diagram of a third embodiment of the present invention.

In the third embodiment, the grid light source 509 is provided with a grid type light source having slits formed at regular intervals at a position sufficiently far from the transparent flat panel 501 through which light is transmitted, and the light emitted from the grid light source 509 is flat. The panel 501 passes through the panel 501 to form a focal point by an imaging lens 503, and a cut-off grid 505 is installed at the focal position to overlap the light of the grid light source 509. In this case, the background of the CCD 507 is determined by a dark field and a bright field according to the degree of overlap, and the flat panel 501 is installed near the image forming lens 503. ) Is formed in the CCD 507.

When the deformation portion is present in the flat panel 501, when the density gradient is generated and the incoming light is refracted, the CCD 507 acquires an image containing information on defects or degrees of deformation due to a difference in sensitive contrast, and the CCD 507. When the observer's eye is placed at the position of the observer, the observer also finds a deformation having a sensitive contrast difference.

In FIG. 10, the grid light source 509 is provided with a surface light source on the rear surface, a band-shaped grid having a predetermined width Ho on the front surface of the surface light source, and a slit is formed between the grid and the surface light source. The emitted light is incident in parallel to the flat panel 501, and the cut-off grid 505 has a slit formed between the grid having a width Hi and the light passes therethrough. At this time, the grid width Hi of the cut-off grid 505 is geometrically shown to be smaller than the grid width Ho of the grid light source 509, but when the magnification of the imaging lens 503 is applied, the grid width Hi has the same size optically. As a result, the light of the grid light source 509 passes through the cut-off grid 505.

Fig. 11 is a block diagram for explaining a fourth embodiment of the present invention.

In the fourth embodiment, instead of the grid light source 509, in the third embodiment, a grid retroreflective plate 603 is provided in which a grid for absorbing incident light and a retroreflective plate for retroreflecting incident light are provided at regular intervals, and an imaging lens ( A total reflection partial mirror 605 is provided between the 503 and the cut-off grid 505, and the light emitted from the point light source 601 is incident on the total reflection partial mirror 605 through the condenser lens 607, and total reflection The light reflected by the partial mirror 605 is incident on the grid retroreflective plate 603 through the flat panel 501. Light incident on the grid of the grid retroreflective plate 603 is absorbed, and the light incident on the retroreflective plate is retroreflected to be incident again on the flat panel 501. The light directed to 501 acts the same as the grid light source 509 of the third embodiment.

The fourth embodiment can be manufactured inexpensively and at the same time by using a point light source and a grid type retroreflective plate as compared with the third embodiment requiring an expensive surface light source.

12 is a configuration diagram illustrating a fifth embodiment of the present invention.

The fourth embodiment is an apparatus for inspecting a flat panel which is a transparent body, while the fifth embodiment is an apparatus for inspecting a flat panel 101 which is an opaque body, and the same principle as that of the member of the fourth embodiment is applied.

The light of the point light source 411 is reflected in the total reflection partial mirror 407 inclined to the optical axis of the CCD 401 through the condensing lens 413 in parallel with the optical axis of the CCD 401, and in the total reflection partial mirror 407. The reflected light passes through the imaging lens 407 and is incident on the flat panel 101 to be reflected, then is incident on the grid retroreflective plate 405, and the light incident on the grid retroreflective plate 405 is The cut-off grid is re-reflected and re-entered into the flat panel 101 and re-reflected by the flat panel 101 to be installed at the focal length of the imaging lens 407 and the imaging lens 407. Passes through to form a background on the CCD 401. On the other hand, the image of the flat panel 101 is formed on the CCD 401 by the imaging lens 407.

In Fig. 10, the magnification M, the grid width Ho, Hi is determined by the following equations.

Equation 1

13 is a perspective view illustrating the effect of the present invention.

The flat panel inspection apparatus 100 of the present invention shown in FIG. 13 is a binocular inspection apparatus having a light source periodically blinking in the second embodiment.

Since the flat panel inspection apparatus 100 configured as described above uses the retroreflective plate 103, inspection is possible even with a small amount of light, and since both eyes are used, the observer can three-dimensionally identify the deformable portion, and at the same time concentrates a large area. can see.

In addition, it is possible to prevent the type of deformation part from disappearing or disappearing depending on the viewing angle of the reflective material surface inspection.

In addition, it is more portable than general strobe type inspection device, and can be usefully used to inspect the state of car painting, post-plating, etc. while changing the time freely.

14 is a perspective view of a fifth embodiment of the present invention.

In the inspection apparatus 100 of the first embodiment shown in FIG. 2, the retroreflective plate 103 is installed separately from the inspection apparatus 100, but the inspection apparatus 170 of the fifth embodiment recursively returns to the main body 171 of the inspection apparatus. The reflecting plate 173 is provided.

15 is a perspective view of a sixth embodiment of the present invention.

The inspection apparatus 180 of the sixth embodiment is provided with a retroreflective plate 183 installed on the inspection apparatus main body 181 and configured to inspect a small and fine flat panel.

 Since the operation principles of the fifth and sixth embodiments are the same as those of the first to fourth embodiments, detailed description thereof will be omitted.

16 is a light path diagram of a seventh embodiment of the present invention.

In the inspection apparatus 200 of the seventh exemplary embodiment, light incident from the light source 203 is reflected by the beam splitter 201, and the imaging lens 208 is incident on the flat panel 101 while serving as a projection lens. The light reflected by 101 is retroreflected by the retroreflective plate 205, re-entered by the flat panel 101, is reflected, and passes through the imaging lens 208 to be incident on the beam splitter 201. Light incident on the beam splitter 201 passes through the beam splitter 201 and is incident on the CCD 207 so that an image of the flat panel 101 is captured by the CCD 207.

At this time, the light of the light source 203 is incident perpendicularly to the plane of the beam splitter 201 as parallel light through the lens 204, and the grid 206 is formed on the plane of the beam splitter 201 where the light of the light source 203 is incident. ) Is formed or installed. In addition, a cut off grid 209 is formed or installed on a surface of the beam splitter 201 through which light is emitted to the CCD.

In the seventh embodiment configured as described above, light of the light source 203 passes through the grid 206 and is incident on the beam splitter 201. At this time, since the grid 206 passes through a slit between the grid surface and the grid surface so that light passes through the grid surface where light cannot pass, and the light passing through the grid 206 is light passing through the slit. Eventually, the light incident on the retroreflective plate 205 serves as a grid type retroreflective plate as shown in FIG. 16 even when the retroreflective plate 205 is a uniform reflective surface on which a grid is not formed. .

As such, the grid 306 is formed on the incident surface of the light source 203 of the beam splitter 201 so that the retroreflective plate 205 having the uniform reflective surface acts as if the grid is formed on the reflective surface.

17 is a light path diagram of an eighth embodiment of the present invention.

In the eighth embodiment, the cut-off grid 211 is formed or provided on the opposite surface of the imaging lens 208 of the beam splitter 201, and the rest of the configuration is the same as in the seventh embodiment.

The light emitted from the light source 203 is projected onto the retroreflective plate 205 through the image forming lens 208 which serves as a projection lens for projecting light when the grid 211 is illuminated through the condenser lens 206, The grid image is far away from the retroreflective plate 205 is formed as a grid image like a screen, and the grid image formed on the retroreflective plate is formed on the grid 211 through the image forming lens 208, wherein the grid 211 is By acting as a cut-off, the optical path is changed according to the surface state of the flat panel 101 to be inspected, thereby obtaining surface information.

The eighth embodiment configured as described above has the same effect as the seventh embodiment, but the structure is simple because the grid is installed or formed only on one side of the beam splitter 201.

18 is a light path diagram of a ninth embodiment of the present invention.

In the inspection apparatus of the ninth embodiment, except that the polarization filters 213 and 215 are installed between the beam split 201 and the CCD 207 between the light source 203 and the beam split 201, the inspection apparatus of FIG. The configuration is the same as in the eighth embodiment.

As such, the image formed on the CCD by providing the polarization filters 213 and 215 can acquire only the image of the surface of the flat panel 101, so that the internal image when the flat panel 101 is a transparent film. The superficial image may overlap with the surface image to prevent the plate surface and the image inside from being mixed.

19 is a perspective view of a tenth embodiment of the present invention.

The inspection apparatus 300 of the tenth embodiment includes a main body formed with a handle 312 and a lower body that can be mounted on the floor, and an optical device installed on the handle.

The inspection apparatus 300 includes two light sources 301 and 303 for emitting light to the flat panel, objective lens groups 305 and 307 respectively installed in the two barrels, and an alternative lens group ( 309) and 311, and the knife edge described in the first embodiment is provided inside the barrel.

In addition, the light sources 301 and 303 installed in the inspection apparatus 300 emit light into the barrel to form the same optical path as in the first embodiment, and the light emitted into the barrel is the objective lens through the condenser lens. It may be configured to be reflected from the knife edge provided in the second main point of the group 307, 309 to be irradiated to the flat panel through the barrel.

In addition, the inspection apparatus 300 shows a state in which the retroreflective plate is not installed, and the retroreflective plate should be inclined on the flat panel to be inspected. However, the retroreflective plate may be attached to the inspection apparatus 300 so that the light reflected from the flat panel is retroreflected by the retroreflective plate installed in the inspection apparatus 300 to be incident on the flat panel.

20 is a perspective view of an eleventh embodiment of the present invention.

In the eleventh embodiment, the light from the light source 803 is reflected by the half mirror 807 through the condenser lens 805, reflected by the opaque flat panel 809, and incident on the retroreflective plate 801, and recursively. The light retroreflected by the reflector 801 is reflected by the flat panel 809 to pass through the half mirror 807 to be incident to the observer's eye, and is a device for inspecting the flat panel by a simple configuration. .

21 is a perspective view of a twelfth embodiment of the present invention.

The twelfth embodiment applies the same configuration and principle except that the transparent flat panel 810 is used instead of the opaque flat panel 809 of the eleventh embodiment.

The light from the light source 803 is reflected by the half mirror 807, passes through the transparent flat panel 810, and is retroreflected by the retroreflective plate 801, and then passes through the transparent flat panel 810, and then the half mirror 807. Penetrates and enters the observer's eye.

FIG. 22 is an optical path diagram of a thirteenth embodiment of the present invention, FIG. 23 (a) is a layout view of a point light source LED, (b) is a layout view of a line LED, and FIGS. 24 (a) and (b) are partial views. It is a block diagram which shows the shape of the light source reflected by a total reflection mirror.

    The thirteenth embodiment shown in FIG. 22 uses the point light source LEDs in the light emitting form shown in FIG. 23A as the light source 901, or the line LEDs in the light emitting form shown in FIG. 23B. Then, it is reflected by the partial reflection mirror 905 through the condenser lens 903 and reflected from the opaque flat panel 917 to the retroreflective plate 919 through the objective lens 911, and from the retroreflective plate 919. The retroreflected light is passed through the partial total reflection mirror 905 through the objective lens 911 to pass through the objective lens 913 to be incident on the area CCD 915.

At this time, the form of the reflected light reflected by the partial reflection mirror 905 is the same as that of FIG. 24A when the light source of FIG. 23A is used, and FIG. 24B when the light source of FIG. 23B is used. The light is reflected in the form as described above and incident on the objective lens 911.

In this case, when the light source of FIG. 23 (a) is incident, the partially total reflection mirror 905 has the same shape as that of the light source, and the transmissive portion is formed like a lattice grid, and a rectangular reflective portion surrounded by the transmissive portion is formed. When the light source of FIG. 23B is incident, the transmissive portion and the reflective portion are formed in a line shape in the same shape as the light source to increase the gradient of the image.

25 is a configuration diagram of a fourteenth embodiment of the present invention.

In the fourteenth embodiment, the alternative lens 110 of the first embodiment is replaced by the transmission screen 114, and a wide area can be viewed through the transmission screen at a time, and the area of interest can be intensively identified as necessary. Effective for application

Since other components are the same as those in FIG. 5, the same reference numerals are used, and description thereof will be omitted.

26 is a configuration diagram in which the fourteenth embodiment of the present invention is installed in the field.

When the deformation part of the flat panel 101 is detected by the automatic inspection device 931, the warning light 937 is turned on. When the warning light 937 is turned on, the inspector 937 on the left side is the inspection device of the fourteenth embodiment. The flat panel 101 is inspected by the retroreflected light from the retroreflective plate 103 through 933, and the right examiner 939 passes through the retroreflective plate 103 ′ through the inspection device 935 of the fourteenth embodiment. The flat panel 101 is inspected by the retroreflected light at.

Claims (17)

A flat panel inspection apparatus for inspecting the flat panel by injecting light into the flat panel and retroreflecting the light transmitted through the flat panel or reflected from the flat panel to the flat panel by means of a retroreflective plate. At least one light source for emitting light toward the flat panel; And an imaging lens group including at least one imaging lens disposed between the flat panel and the imaging unit along an optical axis of light emitted from the light sources. The flat panel inspecting apparatus of claim 1, further comprising a knife edge that blocks light that is irregularly reflected or refracted by the deformable portion formed on the flat panel from being incident on the image forming portion. The flat panel inspection apparatus of claim 1, wherein the imaging unit is a human eye or an area CCD. The flat panel according to claim 2, wherein the knife edge is provided at a second main point of the imaging lens group, and the knife edge is inclined on the optical axis to reflect light incident from the light source in parallel to the optical axis. Inspection device. The flat panel inspecting apparatus of claim 1, wherein a half mirror is provided at a second main point of the imaging lens group to reflect light incident from the light source to the flat panel. The method of claim 1, wherein the imaging lens group is provided in the plurality of the optical axis, and further comprises a knife edge is provided on the second main point of the imaging lens group, the knife edge is received from the light source in parallel to the optical axis And reflecting the light and entering the flat panel. When unit flat panel panels having a unit length are periodically moved, the flat plate inspecting the unit flat panel by retroreflecting light transmitted through the unit flat panel or reflected from the flat panel to the unit flat panel by a retroreflective plate In the panel inspection device: At least one light source for emitting light to the unit flat panel; Detection means for detecting a movement period of the unit flat panel; An illumination control device for blinking the light sources in synchronization with the movement period detected by the detection means; At least one light source for emitting light toward the flat panel; An imaging lens group including at least one imaging lens disposed between the unit flat panel and the imaging units along an optical axis of light emitted from the light sources; And a knife edge for blocking light from being irregularly reflected or refracted by the deforming part formed on the unit flat panel from being incident on the image forming part. The retroreflective plate according to any one of claims 1 to 8, wherein the retroreflective plate is a grid type retroreflective plate formed by alternating reflection parts for retroreflecting light at angles incident in a space shape and grid portions for absorbing light in a space shape. The knife edge is a flat panel inspection apparatus, characterized in that the cut-off grid consisting of slits (slit) between the grid portion and the grid portion is installed in a floating shape so that light does not pass. The flat panel inspecting apparatus of claim 8, wherein the cut-off grid is installed at a focal point of the imaging lens group. 3. The beam splitter is disposed between the imaging lens group and the imaging unit. The beam splitter reflects light from the light source to form parallel light on the optical axis, and receives light incident from the imaging lens group. And a light-transmitting slit and an absorbing grid portion are alternately formed on the opposing surface of the beam splitter and the opposing surface of the beam splitter and the opposing surface of the beam splitter. The beam splitter is disposed between the imaging lens group and the imaging unit, and the beam splitter reflects light from the light source to form parallel light on the optical axis, and transmits light incident from the imaging lens group. And an incident surface of the beam splitter, wherein a slit for transmitting light and a grid portion for absorbing light are alternately repeatedly formed. The flat panel inspection apparatus according to claim 8 or 9, wherein polarizing plates are respectively provided between the light source and the beam splitter and between the image forming unit and the beam splitter. The flat panel inspecting apparatus according to any one of claims 1 to 7, wherein the retroreflective plate is provided in the flat panel inspecting apparatus. The flat panel inspection apparatus according to any one of claims 1 to 7, wherein the light source is arranged with a plurality of LEDs spaced apart from each other. The flat panel inspection apparatus according to any one of claims 1 to 7, wherein the light source is arranged with line LEDs spaced apart from each other. 15. The method of claim 14 or 15, wherein the condenser lens for condensing the light of the light source, and the total reflection mirror portion is formed only in the portion where the light collected by the condensing lens is reached, the remaining portion is further provided a partial total reflection mirror formed to transmit light Flat panel inspection apparatus characterized in that the.  The flat panel inspection apparatus according to claim 7, wherein the detection means is an encoder or an optical mouse.

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