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WO2011141725A3 - Système de pompage à vide - Google Patents

Système de pompage à vide Download PDF

Info

Publication number
WO2011141725A3
WO2011141725A3 PCT/GB2011/050651 GB2011050651W WO2011141725A3 WO 2011141725 A3 WO2011141725 A3 WO 2011141725A3 GB 2011050651 W GB2011050651 W GB 2011050651W WO 2011141725 A3 WO2011141725 A3 WO 2011141725A3
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum
foreline
arrangement
vacuum pump
pumping system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/GB2011/050651
Other languages
English (en)
Other versions
WO2011141725A2 (fr
Inventor
Michael Andrew Galtry
David Alan Turrell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to RU2012153250/06A priority Critical patent/RU2562899C2/ru
Priority to US13/695,916 priority patent/US20130071274A1/en
Priority to EP11712316.6A priority patent/EP2569541B1/fr
Priority to JP2013509615A priority patent/JP5822213B2/ja
Priority to CN201180023327.5A priority patent/CN103228922B/zh
Priority to KR1020127029491A priority patent/KR101825237B1/ko
Publication of WO2011141725A2 publication Critical patent/WO2011141725A2/fr
Anticipated expiration legal-status Critical
Publication of WO2011141725A3 publication Critical patent/WO2011141725A3/fr
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C14/00—Control of, monitoring of, or safety arrangements for, machines, pumps or pumping installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021—Systems for the equilibration of forces acting on the pump
    • F04C29/0035—Equalization of pressure pulses
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/18—Pressure

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

L'invention concerne un système de pompage à vide (10) pour vider une chambre à vide (12). Le système comprend : une pompe à vide (16); et une pluralité de conduites de refoulement primaire (22, 24) pour transporter un gaz vers la pompe à vide dans un premier étage de faible dépression (22) d'évacuation de chambre, un premier agencement de conduite de refoulement primaire pouvant être connecté pour transporter un gaz vers la pompe à vide, et dans un second étage à dépression élevée de l'évacuation de la chambre, un second agencement de conduite de refoulement primaire (22, 24) qui comprend une ou plusieurs conduites de refoulement primaire pouvant être connecté pour transporter un gaz vers la pompe à vide. Le second agencement de conduite de refoulement primaire présente une zone transversale totale pour transporter un fluide qui est plus grande que la zone transversale totale du premier agencement de conduite de refoulement primaire.
PCT/GB2011/050651 2010-05-11 2011-03-30 Système de pompage à vide Ceased WO2011141725A2 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
RU2012153250/06A RU2562899C2 (ru) 2010-05-11 2011-03-30 Система создания вакуума
US13/695,916 US20130071274A1 (en) 2010-05-11 2011-03-30 Vacuum pumping system
EP11712316.6A EP2569541B1 (fr) 2010-05-11 2011-03-30 Système de pompage à vide
JP2013509615A JP5822213B2 (ja) 2010-05-11 2011-03-30 真空ポンプ輸送システム
CN201180023327.5A CN103228922B (zh) 2010-05-11 2011-03-30 真空泵送系统
KR1020127029491A KR101825237B1 (ko) 2010-05-11 2011-03-30 진공 펌핑 시스템

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1007814.5 2010-05-11
GBGB1007814.5A GB201007814D0 (en) 2010-05-11 2010-05-11 Vacuum pumping system

Publications (2)

Publication Number Publication Date
WO2011141725A2 WO2011141725A2 (fr) 2011-11-17
WO2011141725A3 true WO2011141725A3 (fr) 2013-07-11

Family

ID=42315109

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2011/050651 Ceased WO2011141725A2 (fr) 2010-05-11 2011-03-30 Système de pompage à vide

Country Status (8)

Country Link
US (1) US20130071274A1 (fr)
EP (1) EP2569541B1 (fr)
JP (1) JP5822213B2 (fr)
KR (1) KR101825237B1 (fr)
CN (1) CN103228922B (fr)
GB (1) GB201007814D0 (fr)
RU (1) RU2562899C2 (fr)
WO (1) WO2011141725A2 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9366560B2 (en) 2013-08-01 2016-06-14 John Cacciola Detector for detecting a change in a fluid level and generating a digital signal
EP3137771B1 (fr) * 2014-05-01 2020-05-06 Ateliers Busch S.A. Méthode de pompage dans un système de pompage et système de pompes à vide
EP3198148B1 (fr) * 2014-09-26 2020-02-26 Ateliers Busch S.A. Système de pompage pour générer un vide et procédé de pompage au moyen de ce système de pompage
DE202015004596U1 (de) * 2015-06-26 2015-09-21 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem
JP2020090940A (ja) * 2018-12-07 2020-06-11 株式会社テクノス ドライ真空ポンプが真空チャンバーから放出される粉体により停止又は故障することを回避又は防止する方法及び加振装置
TWI684707B (zh) * 2019-02-27 2020-02-11 亞台富士精機股份有限公司 尾氣真空節能幫浦系統
GB2597503A (en) 2020-07-24 2022-02-02 Edwards Ltd A modular foreline system
GB2606392B (en) * 2021-05-07 2024-02-14 Edwards Ltd A fluid routing for a vacuum pumping system
CN115773219A (zh) * 2022-11-30 2023-03-10 三一硅能(株洲)有限公司 抽真空装置、镀膜设备及电池生产系统

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5228838A (en) * 1992-04-27 1993-07-20 Leybold Aktiengesellschaft Method for the evacuation of a low-vacuum chamber and of a HGH-vacuum chamber, as well as a high-vacuum apparatus for the practice thereof
EP1367260A2 (fr) * 2002-05-31 2003-12-03 The BOC Group plc Système de pompe à vide et méthode de contrôle dudit système

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01161836A (ja) * 1987-12-18 1989-06-26 Nec Corp 真空処理装置
US4850806A (en) * 1988-05-24 1989-07-25 The Boc Group, Inc. Controlled by-pass for a booster pump
JPH03116413U (fr) * 1990-03-13 1991-12-03
JP2990003B2 (ja) * 1993-12-14 1999-12-13 山形日本電気株式会社 高真空排気装置
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
DE19929519A1 (de) * 1999-06-28 2001-01-04 Pfeiffer Vacuum Gmbh Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage
US7695231B2 (en) * 2004-03-08 2010-04-13 Jusung Engineering Co., Ltd. Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
WO2009049317A2 (fr) 2007-10-11 2009-04-16 Earth To Air Systems, Llc Améliorations de conception de système dx avancée

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5228838A (en) * 1992-04-27 1993-07-20 Leybold Aktiengesellschaft Method for the evacuation of a low-vacuum chamber and of a HGH-vacuum chamber, as well as a high-vacuum apparatus for the practice thereof
EP1367260A2 (fr) * 2002-05-31 2003-12-03 The BOC Group plc Système de pompe à vide et méthode de contrôle dudit système

Also Published As

Publication number Publication date
EP2569541A2 (fr) 2013-03-20
CN103228922A (zh) 2013-07-31
KR101825237B1 (ko) 2018-02-02
KR20130092967A (ko) 2013-08-21
GB201007814D0 (en) 2010-06-23
RU2562899C2 (ru) 2015-09-10
JP5822213B2 (ja) 2015-11-24
CN103228922B (zh) 2016-10-26
RU2012153250A (ru) 2014-06-20
EP2569541B1 (fr) 2014-11-19
WO2011141725A2 (fr) 2011-11-17
US20130071274A1 (en) 2013-03-21
JP2013534987A (ja) 2013-09-09

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