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WO2011089990A1 - Method for manufacturing display device - Google Patents

Method for manufacturing display device Download PDF

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Publication number
WO2011089990A1
WO2011089990A1 PCT/JP2011/050630 JP2011050630W WO2011089990A1 WO 2011089990 A1 WO2011089990 A1 WO 2011089990A1 JP 2011050630 W JP2011050630 W JP 2011050630W WO 2011089990 A1 WO2011089990 A1 WO 2011089990A1
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WO
WIPO (PCT)
Prior art keywords
glass substrate
display device
glass
film
conductive polymer
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
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PCT/JP2011/050630
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French (fr)
Japanese (ja)
Inventor
榮 西山
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NSC Co Ltd
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NSC Co Ltd
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Publication date
Application filed by NSC Co Ltd filed Critical NSC Co Ltd
Priority to CN2011800156156A priority Critical patent/CN102822729A/en
Priority to KR1020127022178A priority patent/KR101401678B1/en
Publication of WO2011089990A1 publication Critical patent/WO2011089990A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/32Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with synthetic or natural resins
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00Etching, surface-brightening or pickling compositions
    • C09K13/04Etching, surface-brightening or pickling compositions containing an inorganic acid
    • C09K13/08Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00Apparatus or processes specially adapted for manufacturing conductors or cables
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2204/00Glasses, glazes or enamels with special properties
    • C03C2204/08Glass having a rough surface
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/30Aspects of methods for coating glass not covered above
    • C03C2218/31Pre-treatment
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00Materials and properties
    • G02F2202/02Materials and properties organic material
    • G02F2202/022Materials and properties organic material polymeric
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00Materials and properties
    • G02F2202/16Materials and properties conductive
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00Materials and properties
    • G02F2202/22Antistatic materials or arrangements

Definitions

  • the present invention relates to a method for manufacturing a display device in which a light-transmitting conductive film is provided on the surface of a glass substrate.
  • the liquid crystal display device is configured by enclosing a liquid crystal between a laminated glass substrate composed of a pair of glass substrates.
  • a configuration is known in which charging is prevented by providing a conductive film on the surface of the glass substrate (for example, Patent Document 1).
  • ITO indium tin oxide
  • the transparent electrode is formed by a sputtering method.
  • indium constituting the ITO is not only a rare metal, but there is a problem that not only a waste material is generated in the target material (ITO) as long as the sputtering method is employed.
  • the antistatic film on the surface of the exposed glass substrate exposed to the user is not required to have a resistivity as low as that of the transparent electrode, and it is sufficient to exhibit conductivity that can prevent charging. .
  • the present invention has been made in view of the above problems, and an object thereof is to provide a method for manufacturing a display device in which a conductive film is provided on a glass substrate without using a sputtering method.
  • a method for manufacturing a display device is such that an etching solution is brought into contact with the surface of a glass substrate for a display device so that the arithmetic average roughness Ra of the glass surface is 0.7 nm to 70 nm.
  • the total light transmittance is 87% or more in a glass substrate having a thickness of 0.5 mm.
  • the arithmetic average roughness Ra of the glass surface is set to 0.7 nm to 70 nm in the chemical polishing step, it is possible to achieve reliable adhesion with the conductive polymer.
  • Ra ⁇ 0.7 nm and the glass surface is too flat, the adhesion of the conductive film by the conductive polymer is deteriorated, and in the adhesion test, there is a defect that it is easily peeled off by ethanol or the like.
  • Ra> 70 nm and the glass surface is too rough clear display characteristics cannot be maintained as a display device.
  • a conductive polymer is applied to the glass surface to form a conductive film of 400 to 1200 ⁇ / sq.
  • the glass substrate after the film forming step is set to a surface resistivity of 1000 ⁇ / sq or less.
  • the HAZE rate of the glass substrate after the film forming step is set to less than 1.5% when evaluated with a glass substrate having a thickness of 0.5 mm.
  • the HAZE rate means diffuse transmittance / total light transmittance ⁇ 100, and is a value specified based on JISJK 7136.
  • the film thickness of the conductive polymer is preferably set to 100 nm to 250 nm.
  • the glass substrate of the present invention is preferably made of alkali-free glass, but more preferably should be made of aluminosilicate glass.
  • the conductive polymer polyacetylene, polythiophenes and the like are preferably used, but more preferably, a polythiophene-based conductive polymer should be used.
  • the etching solution of the present invention is not particularly limited as long as the glass surface is moderately roughened, but preferably 0.5 to 3 wt% hydrofluoric acid, 0 to 10 wt% hydrochloric acid, 0 to 5 wt% Consists of sulfuric acid.
  • the display device of the present invention is preferably a liquid crystal display device, and the conductive polymer is formed on the exposed surface of the laminated glass substrate.
  • a conductive film can be formed on a glass substrate without using a sputtering method, and an antistatic film can be formed at low cost.
  • the arithmetic average roughness Ra of the glass plate after chemical polishing is changed.
  • an etching solution comprising 0.5 to 3% by weight hydrofluoric acid, 0 to 10% by weight hydrochloric acid, 0 to 5% by weight sulfuric acid and the remaining water is used.
  • the chemical polishing step of several minutes (1-2 minutes), it was found that it is preferable to etch the glass surface by about 5 ⁇ m (single side: 2.5 ⁇ m).
  • the total light transmittance, the surface resistivity, and the HAZE rate of the three groups of glass plates that have been subjected to the chemical polishing process set under the above conditions are as follows. It was. Here, the transmittance was measured based on JIS K 7361-1 using a spectral colorimeter SD-5000 (Nippon Denshoku Industries Co., Ltd.). The HAZE rate was measured based on JIS K 7136 using a turbidimeter NDH5000 (Nippon Denshoku Industries Co., Ltd.). The surface resistance was measured based on JIS K 7194 using Loresta MCP-T250 (Mitsubishi Chemical).

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Organic Chemistry (AREA)
  • Liquid Crystal (AREA)
  • Manufacturing & Machinery (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Surface Treatment Of Glass (AREA)
  • Manufacturing Of Electric Cables (AREA)

Abstract

Disclosed is a method for manufacturing a display device, wherein a conductive film is provided on a glass substrate without using a sputtering method. The method has: a chemical polishing step wherein an etching liquid is brought into contact with the surface of the glass substrate for the display device, and the arithmetic average roughness (Ra) of the glass surface is set at 0.7 nm-70 nm; and a film-forming step wherein a conductive polymer is applied to the glass surface that has been subjected to the chemical polishing step, and the conductive film having a resistivity of 400-1200 Ω/sq is formed. The total light transmittance of the glass substrate after being subjected to the film-forming step is set at 87 % or more, said glass substrate having a thickness of 0.5 mm.

Description

表示装置の製造方法Manufacturing method of display device

 本発明は、ガラス基板の表面に透光性の導電膜を設けた表示装置の製造方法に関するものである。 The present invention relates to a method for manufacturing a display device in which a light-transmitting conductive film is provided on the surface of a glass substrate.

 液晶表示装置は、一対のガラス基板で構成された貼合せガラス基板の間に、液晶を封入して構成されている。そして、ガラス基板に静電気が帯電すると、液晶の表示動作に悪影響を与えることから、ガラス基板の表面に導電膜が設けることで帯電を防止する構成が知られている(例えば、特許文献1)。 The liquid crystal display device is configured by enclosing a liquid crystal between a laminated glass substrate composed of a pair of glass substrates. When static electricity is charged on the glass substrate, the display operation of the liquid crystal is adversely affected. Therefore, a configuration is known in which charging is prevented by providing a conductive film on the surface of the glass substrate (for example, Patent Document 1).

 ここで、導電膜としては、一般に、酸化インジウムスズ(ITO:Indium Tin Oxide)が使用され、透明電極はスパッタリング法によって成膜されている。 Here, as the conductive film, indium tin oxide (ITO) is generally used, and the transparent electrode is formed by a sputtering method.

特開平8-241626JP-A-8-241626

 しかしながら、ITOを構成するインジウムが希少金属であるだけでなく、スパッタリング法を採る限り、ターゲット材(ITO)に少なからず廃材が生じるという問題がある。 However, indium constituting the ITO is not only a rare metal, but there is a problem that not only a waste material is generated in the target material (ITO) as long as the sputtering method is employed.

 ここで、使用者に露出する露出側ガラス基板の表面の帯電防止膜については、透明電極ほどの低い抵抗率が要求されず、帯電を防止できる程度の導電性を発揮すれば足りると解される。 Here, it is understood that the antistatic film on the surface of the exposed glass substrate exposed to the user is not required to have a resistivity as low as that of the transparent electrode, and it is sufficient to exhibit conductivity that can prevent charging. .

 本発明は、上記の問題点に鑑みてなされたものであって、スパッタリング法を使用することなく、ガラス基板に導電膜を設ける表示装置の製造方法を提供することを目的とする。 The present invention has been made in view of the above problems, and an object thereof is to provide a method for manufacturing a display device in which a conductive film is provided on a glass substrate without using a sputtering method.

 上記の目的を達成するため、本発明に係る表示装置の製造方法は、表示装置用のガラス基板の表面にエッチング液を接触させて、ガラス表面の算術平均粗さRaを0.7nm~70nmに設定する化学研磨工程と、化学研磨工程後のガラス表面に導電性ポリマーを塗布して、400~1200Ω/sqの導電膜を形成する成膜工程と、を有し、成膜工程後のガラス基板の全光線透過率を、板厚0.5mmのガラス基板において87%以上とすることを特徴とする。 In order to achieve the above object, a method for manufacturing a display device according to the present invention is such that an etching solution is brought into contact with the surface of a glass substrate for a display device so that the arithmetic average roughness Ra of the glass surface is 0.7 nm to 70 nm. A glass substrate after the film-forming step, and a film-forming step in which a conductive polymer is applied to the glass surface after the chemical-polishing step to form a conductive film of 400 to 1200 Ω / sq. The total light transmittance is 87% or more in a glass substrate having a thickness of 0.5 mm.

 本発明では、化学研磨工程において、ガラス表面の算術平均粗さRaを0.7nm~70nmに設定するので、導電性ポリマーとの確実な接着性を達成することができる。これに対して、Ra<0.7nmであって、ガラス表面が平坦に過ぎると、導電性ポリマーによる導電膜の接着性が劣化し、密着試験において、エタノールなどで容易に剥がれる欠点が生じる。一方、Ra>70nmであって、ガラス表面が粗過ぎると、表示装置として鮮明な表示特性を維持することができない。 In the present invention, since the arithmetic average roughness Ra of the glass surface is set to 0.7 nm to 70 nm in the chemical polishing step, it is possible to achieve reliable adhesion with the conductive polymer. On the other hand, if Ra <0.7 nm and the glass surface is too flat, the adhesion of the conductive film by the conductive polymer is deteriorated, and in the adhesion test, there is a defect that it is easily peeled off by ethanol or the like. On the other hand, if Ra> 70 nm and the glass surface is too rough, clear display characteristics cannot be maintained as a display device.

 また、本発明の成膜工程では、ガラス表面に導電性ポリマーを塗布して、400~1200Ω/sqの導電膜を形成する。ここで、抵抗率は、体積抵抗率(Volume Resistivity:Ω・cm)ではなく、単位面積(cm)当たりの表面抵抗率(Surface Resistivity:Ω/sq)=体積抵抗率/膜厚である。液晶表示装置などの透明電極の場合には、5~4
0Ω/sq程度の表面抵抗値が要求されるが、帯電防止の用途では、400~1200Ω/sqでも十分である。但し、好ましくは、成膜工程後のガラス基板が、1000Ω/sq以下の表面抵抗率に設定される。
In the film forming step of the present invention, a conductive polymer is applied to the glass surface to form a conductive film of 400 to 1200 Ω / sq. Here, the resistivity is not volume resistivity (Volume Resistivity: Ω · cm) but surface resistivity (Surface Resistivity: Ω / sq) per unit area (cm 2 ) = volume resistivity / film thickness. In the case of transparent electrodes such as liquid crystal display devices, 5 to 4
A surface resistance value of about 0 Ω / sq is required, but 400 to 1200 Ω / sq is sufficient for antistatic applications. However, preferably, the glass substrate after the film forming step is set to a surface resistivity of 1000 Ω / sq or less.

 本発明では、成膜工程後のガラス基板のHAZE率が、板厚0.5mmのガラス基板で評価して1.5%未満に設定されるのが好ましい。ここで、HAZE率は、拡散透過率/全光透過率×100を意味し、JIS K 7136に基づいて特定される値である。 In the present invention, it is preferable that the HAZE rate of the glass substrate after the film forming step is set to less than 1.5% when evaluated with a glass substrate having a thickness of 0.5 mm. Here, the HAZE rate means diffuse transmittance / total light transmittance × 100, and is a value specified based on JISJK 7136.

 一般に、導電膜の膜厚が厚いほど、表面抵抗率が低下して導電性が高まるが、その反面、HAZE率が増加して透明性が低下する。そこで、この点を考慮して、導電性ポリマーの膜厚は、好ましくは、100nm~250nmに設定される。 Generally, the thicker the conductive film, the lower the surface resistivity and the higher the conductivity, but on the other hand, the HAZE ratio increases and the transparency decreases. In view of this point, the film thickness of the conductive polymer is preferably set to 100 nm to 250 nm.

 本発明のガラス基板は、無アルカリガラスで構成するのが好ましいが、より好ましくは、アルミノ珪酸塩ガラスで構成すべきである。また、導電性ポリマーとしては、ポリアセチレン、ポリチオフェン類などが好適に使用されるが、より好ましくは、ポリチオフェン系導電性ポリマーを使用すべきである。 The glass substrate of the present invention is preferably made of alkali-free glass, but more preferably should be made of aluminosilicate glass. As the conductive polymer, polyacetylene, polythiophenes and the like are preferably used, but more preferably, a polythiophene-based conductive polymer should be used.

 本発明のエッチング液は、ガラス表面が適度に荒れる組成であれば特に限定されないが、好ましくは、0.5~3重量%のフッ酸、0~10重量%の塩酸、0~5重量%の硫酸を含有して構成される。 The etching solution of the present invention is not particularly limited as long as the glass surface is moderately roughened, but preferably 0.5 to 3 wt% hydrofluoric acid, 0 to 10 wt% hydrochloric acid, 0 to 5 wt% Consists of sulfuric acid.

 なお、本発明の表示装置は、好ましくは、液晶表示装置であって、導電性ポリマーは、貼合せガラス基板の露出側の表面に成膜される。 The display device of the present invention is preferably a liquid crystal display device, and the conductive polymer is formed on the exposed surface of the laminated glass substrate.

 以上説明した本発明によれば、スパッタリング法を使用することなく、ガラス基板に導電膜を形成することができ、帯電防止膜を安価に成膜することができる。 According to the present invention described above, a conductive film can be formed on a glass substrate without using a sputtering method, and an antistatic film can be formed at low cost.

 以下、実施例を説明するが、特に本発明を限定するものではない。 Hereinafter, examples will be described, but the present invention is not particularly limited.

 <供試ガラス>
 100mm×100mm×0.6mmのアルミノ珪酸塩ガラスのガラス板を多数枚用意した。
<Test glass>
A large number of glass plates of 100 mm × 100 mm × 0.6 mm aluminosilicate glass were prepared.

 <作業手順>
(1)各ガラス板を水洗し、エッチング液で化学研磨した。なお、エッチング液として、各種の組成を用意し、研磨時間も適宜に変更した。
(2)各ガラス板を水洗した後、IPA(イソプロピルアルコール)に浸漬して置換処理を行い、ドライヤーで乾燥させた。
(3)ポリチオフェン系導電性ポリマーであるセプルジーダ(信越ポリマ)をガラス板の表面に塗布した。番線No6、No8、No10のバーコーターを使用して、120nm、160nm、200nm程度の膜厚に塗布した3グループを生成した。
(4)導電性ポリマー塗布後の乾燥は、乾燥炉150℃10分で実行した。
<Work procedure>
(1) Each glass plate was washed with water and chemically polished with an etching solution. In addition, various compositions were prepared as etching solutions, and the polishing time was also changed appropriately.
(2) After each glass plate was washed with water, it was immersed in IPA (isopropyl alcohol) for substitution treatment and dried with a dryer.
(3) Sepulzida (Shin-Etsu polymer), which is a polythiophene conductive polymer, was applied to the surface of the glass plate. Three groups applied to film thicknesses of about 120 nm, 160 nm, and 200 nm were generated using the bar coaters of No. 6, No. 8, and No. 10.
(4) Drying after applying the conductive polymer was performed in a drying furnace at 150 ° C. for 10 minutes.

 <結果評価>
(1)密着試験
 乾燥させたガラス板について、セロハンテープを使用して剥離試験を実施すると共に、各ガラス板の化学研磨後の算術平均粗さRaとの関係を検証した。
<Result evaluation>
(1) Adhesion test About the dried glass plate, while performing the peeling test using a cellophane tape, the relationship with arithmetic mean roughness Ra after chemical polishing of each glass plate was verified.

 その結果、算術平均粗さRa=0.7nm~70nm程度であれば、ガラスと導電膜との密着性が維持されることが確認された。 As a result, it was confirmed that the adhesion between the glass and the conductive film was maintained when the arithmetic average roughness Ra was about 0.7 nm to 70 nm.

 なお、エッチング液の組成と、研磨時間が変わると、化学研磨後のガラス板の算術平均粗さRaが変化し、一般に、研磨時間が長いほど、また、フッ酸濃度が濃いほど算術平均粗さRaが増加する。 When the composition of the etching solution and the polishing time are changed, the arithmetic average roughness Ra of the glass plate after chemical polishing is changed. Generally, the longer the polishing time is, and the higher the hydrofluoric acid concentration is, the arithmetic average roughness is. Ra increases.

 そこで、以上の傾向と、作業性とを考慮すると、0.5~3重量%のフッ酸、0~10重量%の塩酸、0~5重量%の硫酸、残り水からなるエッチング液を使用して、数分間(1~2分)の化学研磨工程において、ガラス表面を5μm(片面2.5μm)程度エッチングするのが好適であることを発見した。 Therefore, considering the above tendency and workability, an etching solution comprising 0.5 to 3% by weight hydrofluoric acid, 0 to 10% by weight hydrochloric acid, 0 to 5% by weight sulfuric acid and the remaining water is used. In the chemical polishing step of several minutes (1-2 minutes), it was found that it is preferable to etch the glass surface by about 5 μm (single side: 2.5 μm).

 (2)光学特性
 そこで、以上の条件に設定された化学研磨工程を経た3グループのガラス板について、全光線透過率透過率と、表面抵抗率と、HAZE率とを計測すると以下の通りであった。ここで、透過率は、分光色彩計SD-5000(日本電色工業)を使用して、JIS K 7361-1に基づいて計測した。また、HAZE率は、濁度計NDH5000(日本電色工業)を使用して、JIS K 7136に基づいて計測した。表面抵抗は、ロレスタMCP-T250(三菱化学)を使用し、JIS K 7194に基づいて計測した。

Figure JPOXMLDOC01-appb-T000001
(2) Optical characteristics Therefore, the total light transmittance, the surface resistivity, and the HAZE rate of the three groups of glass plates that have been subjected to the chemical polishing process set under the above conditions are as follows. It was. Here, the transmittance was measured based on JIS K 7361-1 using a spectral colorimeter SD-5000 (Nippon Denshoku Industries Co., Ltd.). The HAZE rate was measured based on JIS K 7136 using a turbidimeter NDH5000 (Nippon Denshoku Industries Co., Ltd.). The surface resistance was measured based on JIS K 7194 using Loresta MCP-T250 (Mitsubishi Chemical).
Figure JPOXMLDOC01-appb-T000001

Claims (7)

 表示装置用のガラス基板の表面にエッチング液を接触させて、ガラス表面の算術平均粗さRaを0.7nm~70nmに設定する化学研磨工程と、
 化学研磨工程後のガラス表面に導電性ポリマーを塗布して、400~1200Ω/sqの導電膜を形成する成膜工程と、を有し、
 成膜工程後のガラス基板の全光線透過率を、板厚0.5mmのガラス基板において87%以上とすることを特徴とする表示装置の製造方法。
A chemical polishing step in which an etching solution is brought into contact with the surface of a glass substrate for a display device to set the arithmetic average roughness Ra of the glass surface to 0.7 nm to 70 nm;
A film forming step of applying a conductive polymer on the glass surface after the chemical polishing step to form a conductive film of 400 to 1200 Ω / sq,
A method for manufacturing a display device, characterized in that a total light transmittance of a glass substrate after the film forming step is 87% or more in a glass substrate having a thickness of 0.5 mm.
 成膜工程後のガラス基板のHAZE率が、板厚0.5mmのガラス基板で1.5%未満である請求項1に記載の製造方法。 The manufacturing method according to claim 1, wherein the HAZE rate of the glass substrate after the film forming step is less than 1.5% for a glass substrate having a thickness of 0.5 mm.  前記導電性ポリマーの膜厚は、100nm~250nmである請求項1又は2に記載の製造方法。 The method according to claim 1 or 2, wherein the film thickness of the conductive polymer is 100 nm to 250 nm.  前記ガラス基板は、アルミノ珪酸塩ガラスで構成されている請求項1~3の何れかに記載の製造方法。 The method according to any one of claims 1 to 3, wherein the glass substrate is made of aluminosilicate glass.  ポリチオフェン系導電性ポリマーが使用される請求項1~4の何れかに記載の製造方法。 The production method according to any one of claims 1 to 4, wherein a polythiophene-based conductive polymer is used.  前記エッチング液は、0.5~3重量%のフッ酸、0~10重量%の塩酸、0~5重量%の硫酸を含有して構成されている請求項1~5の何れかに記載の製造方法。 6. The etching solution according to claim 1, wherein the etching solution contains 0.5 to 3 wt% hydrofluoric acid, 0 to 10 wt% hydrochloric acid, and 0 to 5 wt% sulfuric acid. Production method.  前記表示装置は、液晶表示装置であって、前記導電性ポリマーは、貼合せガラス基板の露出表面に成膜される請求項1~6の何れかに記載の製造方法。
 
The manufacturing method according to claim 1, wherein the display device is a liquid crystal display device, and the conductive polymer is formed on an exposed surface of a laminated glass substrate.
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