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WO2011085726A2 - Ensemble ventilateur-filtre - Google Patents

Ensemble ventilateur-filtre Download PDF

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Publication number
WO2011085726A2
WO2011085726A2 PCT/DE2011/075000 DE2011075000W WO2011085726A2 WO 2011085726 A2 WO2011085726 A2 WO 2011085726A2 DE 2011075000 W DE2011075000 W DE 2011075000W WO 2011085726 A2 WO2011085726 A2 WO 2011085726A2
Authority
WO
WIPO (PCT)
Prior art keywords
fan
housing
air
filter unit
electric motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2011/075000
Other languages
German (de)
English (en)
Other versions
WO2011085726A3 (fr
Inventor
Tim Hofmann
Hermann Mauch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huerner-Funken GmbH
Original Assignee
Huerner-Funken GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huerner-Funken GmbH filed Critical Huerner-Funken GmbH
Priority to DE112011100240T priority Critical patent/DE112011100240A5/de
Publication of WO2011085726A2 publication Critical patent/WO2011085726A2/fr
Publication of WO2011085726A3 publication Critical patent/WO2011085726A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F1/00—Room units for air-conditioning, e.g. separate or self-contained units or units receiving primary air from a central station
    • F24F1/02—Self-contained room units for air-conditioning, i.e. with all apparatus for treatment installed in a common casing
    • F24F1/0328—Self-contained room units for air-conditioning, i.e. with all apparatus for treatment installed in a common casing with means for purifying supplied air
    • F24F1/035—Self-contained room units for air-conditioning, i.e. with all apparatus for treatment installed in a common casing with means for purifying supplied air characterised by the mounting or arrangement of filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0002—Casings; Housings; Frame constructions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F1/00—Room units for air-conditioning, e.g. separate or self-contained units or units receiving primary air from a central station
    • F24F1/0007—Indoor units, e.g. fan coil units
    • F24F1/0071—Indoor units, e.g. fan coil units with means for purifying supplied air
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2273/00—Operation of filters specially adapted for separating dispersed particles from gases or vapours
    • B01D2273/30—Means for generating a circulation of a fluid in a filtration system, e.g. using a pump or a fan

Definitions

  • the invention relates to a fan-filter unit for introducing air into
  • Clean rooms especially for use in or on clean room ceilings, with a housing and a fan arranged in this housing with a fan, an electric motor that drives the fan, an air supply into the housing, an air guide within the housing via the fan, an air discharge from the housing into the clean room and at least one filter for air filtration.
  • a pure or clean dream is a space in which the concentration of airborne particles is kept as low as necessary. Clean and clean rooms are needed for specialized manufacturing processes, especially in semiconductor manufacturing, where particles in ordinary ambient air would disrupt the patterning of integrated circuits in fractions of a micron.
  • fan-filter units for the ventilation of clean rooms.
  • grid ceilings there are specially designed boxes that house the fan-filter unit.
  • fan-filter units typically have a box-shaped housing, which is closed on the air outlet side by a HEPA filter, a HEPA filter, and on the opposite side, on the air inlet side, a pre-filter.
  • This is usually made of a metal or a Metal alloy existing housing, as well as at least partially made of metal inner components and / or components.
  • a fan is arranged, the fan wheel is designed as a radial fan.
  • an electric motor within the
  • EP 0 340 433 A discloses a module for the air supply for clean rooms.
  • the module has a high-performance filter in the lower area and a multi-chamber system and a fan in the upper area.
  • Electric motor is driven.
  • Such a device is used as a fan unit in air conditioning and ventilation systems and is with other units
  • the present invention is based on the object of disclosing a fan-filter unit, in particular with an electric motor arranged therein, which makes it possible to remove metallic particles or metal ions from the clean room
  • Air outlet and the fan made of plastic and the electric motor is arranged in an encapsulated plastic housing, no metallic particles or metal ions can flow from the air flow around components of the unit in the air stream, which is blown into the clean room. This makes it possible to significantly reduce the error rate in the manufacture of sensitive components or substrates and to reduce the reject rate.
  • the extracted air come in contact with metal or become contaminated with metal. This is particularly due to the solid plastic construction and the encapsulated plastic housing for the engine.
  • a possibly provided and at least partially necessary operative connection between the fan of the fan and the electric motor for transmitting the rotational movement in plastic is particularly preferably made, which may be formed, for example, by known fiber reinforcements durabler.
  • the electric motor directly to the fan of the fan direct connection of both components is possible, which in turn leads to the reduction of any sources of error.
  • plastic by the use of plastic as well
  • Encapsulation ensures that sufficient and even very efficient heat dissipation is guaranteed or becomes possible, so that the electric motor does not overheat.
  • the resulting heat of the electric motor can be removed via the air flow, since the transported air at least part of the encapsulation permanently on or flows around.
  • the electric motor is an external rotor electric motor, which in the
  • Fan wheel is arranged, wherein the rotor is connected to the fan and the stator is arranged with a receptacle on the housing, wherein the encapsulated plastic housing is formed on the rotor side by the fan as the upper capsule and on the stator side by the inclusion as a lower capsule, a very compact design is specified, which prevents contamination of the transported air with metal ions or metallic particles.
  • the unit of the radial fan and the outer rotor electric motor arranged in the center of the radially hollow radial fan inside forms a very compact, low-maintenance and durable drive fan unit within the fan-filter unit. This unit of radial fan and the
  • External rotor electric motor wherein the rotor of the external rotor electric motor is directly connected to the inner wall of the radial fan impeller, is balanced once before installation and then mounted.
  • the largely encapsulated drive fan unit namely encapsulated lateral surface and encapsulated
  • Deck surface of the external rotor electric motor only has to be encapsulated or sealed only by another side, namely the base surface.
  • another side namely the base surface.
  • the receptacle which can be designed as a kind of pan, serves as a lower capsule and as an abutment for the stator of the
  • the recording is in this case firmly connected to the housing.
  • the design of the radially manufactured fan wheel as the upper capsule represents the minimization of the encapsulation of the electric motor and a particularly preferred embodiment.
  • the transition between the upper and lower capsule is airtight sealed with a sliding seal.
  • sealing materials for example, Teflon-coated materials or ceramics are to be used, but at least durable and heat-resistant materials that a sufficient
  • Minimal gap has at least one further offset plastic splitter, which is designed as an air duct element, the risk of introducing particles of metallic type or of metal ions from the interior of the enclosure is further minimized.
  • a modified guide is produced in the region of the transition, so that any exiting particles would first have to overcome a barrier in order to get into the airflow.
  • a plurality of such offset plastic blanks alternately from the upper and lower capsule may be arranged to isolate the transition of the air flow further.
  • the plastic is polyethylene, polypropylene, polyvinyl chloride and / or polyvinylidene fluoride. It is advantageous if the material-specific property of the heat conductivity at about 0.2 to 0.25
  • W / mK is located.
  • An enhancement of the plastics by means of fibers is nevertheless advantageous, although not always essential.
  • Fig. 1 is a schematic spatial representation of the invention
  • Fan-filter unit in a half-open section through the center of the assembly.
  • Fig. 1 is a schematic perspective view of the fan-filter unit according to the invention in a half-open section through the middle of
  • the fan-filter unit 1 consists of a housing 2 with a
  • Air supply 21 and an air discharge 23 In this embodiment, a pre-filter 24 is arranged in the air supply 21, which takes over a pre-filtering of the supply air. In the air outlet 23 a Schwebstofffilter is arranged, which ensures a high-quality clean air result. Furthermore, a fan 3, which is driven by an external rotor electric motor 4, is located inside the housing 2. The external rotor electric motor 4 is arranged on a receptacle 26 which supports the external rotor motor 4 within the housing 2 in such a way that the air can flow past the external rotor electric motor 4 through the housing 2 coming from the air supply 21 and exit at the air outlet 23. The receptacle 26 is by means of a holder 261 on the Housing 2 arranged. The housing 2 is equipped on the inside with an optional insulation 27, which ensures appropriate sound insulation. The entire housing 2 is made on the luftangeströmten inside plastic. Preferably, the entire housing 2 is made of plastic. Likewise, the other air-inspired components, such as
  • Air supply 21, air outlet 23, and receptacle 26 and holder 261 made entirely of plastic.
  • Plastics which are particularly preferred for use include plastics such as polyethylene, polypropylene,
  • the fan 3 consists of a fan wheel 31.
  • the fan 31 comprises an upper part 313, a bottom part 312 and arranged therebetween
  • Air guiding elements 31 1 The fan 31 is made as a radial fan, wherein in the center of an interior is formed, in which the external rotor motor 4 is arranged. Here, the rotor of the external rotor motor 4 frictionally with the
  • Fan 31 is transmitted in radial fan design.
  • the receptacle 26 which is fixed by means of a holder 261 to the housing 2.
  • the entire fan 3, and the holder 261 and the receptacle 26 are made of plastic as described above.
  • the fan 3 is capable of transporting the air from the
  • a predetermined working pressure can be adjusted.
  • the air is supplied from the air supply 21 coming in the air flow direction X out to the air outlet 23 and transported.
  • an air guide 22 On the upstream side of the fan 3 is an air guide 22, which serves to better guide the air within the housing 2 and to focus in this case on the fan 3.
  • the air supply 22 is also made of a plastic.
  • the external rotor electric motor 4 is in an encapsulated
  • Plastic housing 5 The encapsulated plastic housing 5 comprises an upper capsule 51 and a lower capsule 52, which at a transition 53
  • the transition 53 is reduced to a minimum gap with the aid of an offset plastic splitter 54, the minimum gap being designed in accordance with the protection class IP44.
  • the embodiment of this embodiment is already sufficient in order not to contaminate the air flow.
  • An alternative possibility is the use of any bearing seals in the transition 53 of the encapsulated plastic housing. 5

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Ventilation (AREA)

Abstract

L'invention concerne un ensemble ventilateur-filtre servant à introduire de l'air dans des salles blanches, destiné en particulier à être utilisé dans ou sur des plafonds de salles blanches, ledit ensemble comprenant un carter ainsi qu'un ventilateur disposé dans ce dernier et équipé d'une roue, un moteur électrique entraînant cette dernière, un élément amenant l'air dans le carter, un élément guidant l'air à l'intérieur du carter au-dessus de la roue de ventilateur, un élément évacuant l'air du carter pour l'introduire dans la salle blanche et au moins un filtre servant à filtrer l'air.
PCT/DE2011/075000 2010-01-13 2011-01-10 Ensemble ventilateur-filtre Ceased WO2011085726A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE112011100240T DE112011100240A5 (de) 2010-01-13 2011-01-10 Ventilator-Filter-Einheit

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202010000030U DE202010000030U1 (de) 2010-01-13 2010-01-13 Ventilator-Filter-Einheit
DE202010000030.0 2010-01-13

Publications (2)

Publication Number Publication Date
WO2011085726A2 true WO2011085726A2 (fr) 2011-07-21
WO2011085726A3 WO2011085726A3 (fr) 2011-10-20

Family

ID=42055742

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2011/075000 Ceased WO2011085726A2 (fr) 2010-01-13 2011-01-10 Ensemble ventilateur-filtre

Country Status (2)

Country Link
DE (2) DE202010000030U1 (fr)
WO (1) WO2011085726A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014011063A1 (fr) 2012-07-12 2014-01-16 Sliwinski Bogdan Unité de traitement de l'air et système d'unités de traitement de l'air

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0340433A2 (fr) 1988-04-30 1989-11-08 BABCOCK-BSH AKTIENGESELLSCHAFT vormals Büttner-Schilde-Haas AG Module de tunnel pour créer une enceinte propre en technique à flux laminaire
DE4238595C2 (de) 1992-11-16 1996-04-11 Kessler & Luch Gmbh Modulare Lüftungseinheit mit integriertem Ventilator und angeschlossenem Filterrahmen, insbesondere für reinraumtechnische Zwecke
DE20301652U1 (de) 2003-02-03 2003-04-10 Tiegel, Dieter, 01454 Ullersdorf Lüftungsgerät
DE202005021077U1 (de) 2005-06-29 2007-02-22 Bartec Benke Gmbh Klimagerät zur Raumklimatisierung in explosionsgefährdeten Bereichen

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4411675A (en) * 1981-08-03 1983-10-25 Castella Pierre De Apparatus for the purification of gases
CH693424A5 (de) * 1999-05-05 2003-07-31 Colasit Ag Kunststoff Appbau Laufrad-Schaufel für einen Ventilator.
DE102005062523A1 (de) * 2005-12-19 2007-06-21 M+W Zander Holding Ag Filter-Ventilator-Einheit

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0340433A2 (fr) 1988-04-30 1989-11-08 BABCOCK-BSH AKTIENGESELLSCHAFT vormals Büttner-Schilde-Haas AG Module de tunnel pour créer une enceinte propre en technique à flux laminaire
DE4238595C2 (de) 1992-11-16 1996-04-11 Kessler & Luch Gmbh Modulare Lüftungseinheit mit integriertem Ventilator und angeschlossenem Filterrahmen, insbesondere für reinraumtechnische Zwecke
DE20301652U1 (de) 2003-02-03 2003-04-10 Tiegel, Dieter, 01454 Ullersdorf Lüftungsgerät
DE202005021077U1 (de) 2005-06-29 2007-02-22 Bartec Benke Gmbh Klimagerät zur Raumklimatisierung in explosionsgefährdeten Bereichen

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014011063A1 (fr) 2012-07-12 2014-01-16 Sliwinski Bogdan Unité de traitement de l'air et système d'unités de traitement de l'air

Also Published As

Publication number Publication date
DE112011100240A5 (de) 2012-12-06
WO2011085726A3 (fr) 2011-10-20
DE202010000030U1 (de) 2010-03-25

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