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WO2011077555A1 - Support, carte de support et appareil d'essai de composant électronique - Google Patents

Support, carte de support et appareil d'essai de composant électronique Download PDF

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Publication number
WO2011077555A1
WO2011077555A1 PCT/JP2009/071619 JP2009071619W WO2011077555A1 WO 2011077555 A1 WO2011077555 A1 WO 2011077555A1 JP 2009071619 W JP2009071619 W JP 2009071619W WO 2011077555 A1 WO2011077555 A1 WO 2011077555A1
Authority
WO
WIPO (PCT)
Prior art keywords
socket
rubber sheet
plunger
housing
contact member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2009/071619
Other languages
English (en)
Japanese (ja)
Inventor
昌範 長島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to PCT/JP2009/071619 priority Critical patent/WO2011077555A1/fr
Priority to JP2011547166A priority patent/JPWO2011077555A1/ja
Priority to TW099139697A priority patent/TWI435505B/zh
Publication of WO2011077555A1 publication Critical patent/WO2011077555A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2407—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means
    • H01R13/2414—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means conductive elastomers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433—Sockets for IC's or transistors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2464—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the contact point
    • H01R13/2492—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the contact point multiple contact points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R12/00—Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
    • H01R12/70—Coupling devices
    • H01R12/71—Coupling devices for rigid printing circuits or like structures
    • H01R12/712—Coupling devices for rigid printing circuits or like structures co-operating with the surface of the printed circuit or with a coupling device exclusively provided on the surface of the printed circuit
    • H01R12/714—Coupling devices for rigid printing circuits or like structures co-operating with the surface of the printed circuit or with a coupling device exclusively provided on the surface of the printed circuit with contacts abutting directly the printed circuit; Button contacts therefore provided on the printed circuit
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R2201/00—Connectors or connections adapted for particular applications
    • H01R2201/20—Connectors or connections adapted for particular applications for testing or measuring purposes

Definitions

  • the present invention relates to a socket used for testing an electronic component such as a semiconductor integrated circuit element (hereinafter referred to as DUT), and a socket board and an electronic component testing apparatus including the socket.
  • DUT semiconductor integrated circuit element
  • the problem to be solved by the present invention is to provide a socket, a socket board, and an electronic component testing apparatus capable of reducing the cost by reducing the number of components.
  • a socket according to the present invention includes a single member, a contact member that contacts a terminal of an electronic device under test, a housing that holds the contact member, and is elastically deformable. And a conductive elastic member that is interposed between the contact member and the pad of the wiring board and electrically connects the contact member and the pad.
  • the conductive elastic member may be in direct contact with the pad of the wiring board.
  • the contact member may be held by the housing so as to be movable relative to the housing along the longitudinal direction of the contact member.
  • the contact member includes a front end portion that contacts the terminal of the electronic device under test, a rear end portion that contacts the conductive elastic member, the front end portion, and the rear end portion.
  • a body portion positioned between the housing, the housing holding the body portion, a first through-hole into which the tip portion is inserted, and the rear end portion being inserted. And a second through hole.
  • the main body may have an outer diameter larger than that of the first through hole and the second through hole.
  • the conductive elastic member may be an anisotropic conductive rubber sheet having a rubber sheet and metal particles embedded in the rubber sheet.
  • the conductive elastic member may be an anisotropic conductive rubber sheet having a rubber sheet and a thin metal wire embedded in the rubber sheet.
  • the conductive elastic member may be a metal spring.
  • a socket board according to the present invention is characterized by having the above-described socket and a wiring board having a pad arranged so as to correspond to the plunger.
  • An electronic component testing apparatus includes a test head having the socket board, a tester to which the test head is electrically connected, and a handler for pressing the electronic device under test against a socket of the socket board. And.
  • the stroke is secured by the conductive elastic member, and the contact member is constituted by a single member. Therefore, the number of components of the socket can be reduced, and the cost of the socket can be reduced.
  • FIG. 1 is a schematic cross-sectional view showing the overall configuration of an electronic component testing apparatus according to an embodiment of the present invention.
  • FIG. 2 is a cross-sectional view showing the overall configuration of the socket in the embodiment of the present invention.
  • FIG. 3 is an exploded sectional view of the socket in the embodiment of the present invention, and is an enlarged view of a portion III in FIG.
  • FIG. 4 is a top view of the plunger of the socket shown in FIG.
  • FIG. 5 is a view showing an anisotropic conductive rubber sheet of the socket shown in FIG. 3, and is an enlarged cross-sectional view of a V portion.
  • FIG. 6 is a view showing a modification of the anisotropic conductive rubber sheet.
  • FIG. 1 is a schematic cross-sectional view showing the overall configuration of an electronic component testing apparatus according to an embodiment of the present invention.
  • FIG. 2 is a cross-sectional view showing the overall configuration of the socket in the embodiment of the present invention.
  • FIG. 3 is an exploded
  • FIG. 7 is a cross-sectional view showing a socket according to another embodiment of the present invention.
  • FIG. 8 is a diagram (part 1) illustrating an operation of the socket in the embodiment of the present invention.
  • FIG. 9 is a diagram (part 2) illustrating an operation of the socket according to the embodiment of the present invention.
  • FIG. 1 is a schematic cross-sectional view showing the overall configuration of an electronic component testing apparatus in the present embodiment.
  • the electronic component testing apparatus 1 in this embodiment includes a handler 2 for handling a DUT, a test head 4 that is electrically connected to the DUT during a test, and a DUT via the test head 4. And a tester body (main frame) 3 for transmitting a test signal to the DUT and executing a DUT test.
  • the electronic component testing apparatus 1 tests the electrical characteristics of the DUT in a state where high or low temperature stress is applied to the DUT, and classifies the DUT according to the test result.
  • a high fix (HIFIX: High : Fidelity Tester Access ⁇ ⁇ Fixture) 10 that relays the electrical connection between the DUT and the test head 4 is mounted on the top of the test head 4. Further, a socket board 15 on which a socket 20 is mounted is provided on the upper part of the HiFix 10.
  • the socket 20 faces the inside of the handler 2 through an opening 2 a formed in the handler 2, and the DUT transported in the handler 2 is pressed against the socket 20, and the socket 20 Are electrically connected to the DUT.
  • FIG. 1 only two sockets 20 are shown, but in actuality, a large number of sockets 20 such as 64 and 128 are provided.
  • a heat plate type or a chamber type can be used as the handler 2 .
  • FIG. 2 and 3 are cross-sectional views showing the socket in this embodiment
  • FIG. 4 is a top view of the plunger
  • FIG. 5 is a cross-sectional view of the anisotropic conductive rubber sheet
  • FIG. 6 is a modification of the anisotropic conductive rubber sheet.
  • FIG. 7 is a sectional view showing a socket in another embodiment.
  • the socket 20 in the present embodiment includes a large number of plungers 21 that come into contact with the solder balls 31 of the DUT 30, a housing 25 that holds the plungers 21, and between the plunger 21 and the circuit board 16. And an anisotropically conductive rubber sheet 28A interposed.
  • the plunger 21 has a substantially rod shape as a whole, and as shown in FIG. 3, a front end portion 22 that contacts the solder ball 31 of the DUT 30 and a rear end portion 24 that contacts the anisotropic conductive rubber sheet 28A.
  • the main body 23 is positioned between the front end 22 and the rear end 24.
  • this plunger 21 is comprised with the single member which consists of copper-type alloys, such as beryllium copper, for example.
  • the distal end portion 22 includes a cylindrical first small diameter portion 221 extending from the main body portion 23, and four protrusions 222 formed at the distal end of the first small diameter portion 221. ,have.
  • the four protrusions 222 are arranged at substantially equal intervals on the same circumference.
  • Each protrusion 221 has a conical shape with an acute apex, and can be in good contact with the solder ball 31 of the DUT 30.
  • the rear end portion 24 has a columnar second small diameter portion 241 extending from the main body portion 23 as shown in FIG.
  • a flat contact surface 242 that directly contacts the anisotropic conductive rubber sheet 28A is formed at the rear end of the second small diameter portion 241.
  • the main body 23 is located between the front end 22 and the rear end 24 and connects the front end 22 and the rear end 24.
  • the main body part 23 has an outer diameter larger than the first small diameter part 222 of the tip part 22, and a first step 223 is formed between the main body part 23 and the tip part 22.
  • the outer shape of the main body portion 23 is larger than the second small diameter portion 241 of the rear end portion 24, and a second step 243 is formed between the main body portion 23 and the rear end portion 24. Yes.
  • the housing 25 includes a bottomed rectangular tube-shaped housing body 26 and a lid body 27 that closes the opening 262 of the housing body 26.
  • the housing body 26 has a housing portion 261 that can house the body portion 23 of the plunger 21.
  • the upper end of the housing part 261 is closed by the bottom part 263.
  • the lower end of the accommodating portion 261 is an opening 262, and the opening 262 is also closed by the lid 27.
  • the bottom portion 263 of the housing body 26 includes a first through portion 265 that penetrates the bottom portion 263, a first counterbore portion 266 having an inner diameter larger than that of the first through portion 265, The 1st through-hole 264 which has is formed.
  • the first through holes 264 are arranged in a matrix, for example, on the bottom 23 of the housing body 26 so as to correspond to the solder balls 31 of the DUT 30.
  • the arrangement of the first through holes 264 in the housing 25 is set according to the arrangement of the DUT solder balls, and is not particularly limited to the above.
  • the first penetrating portion 265 has an inner diameter that is larger than the outer diameter of the distal end portion 22 of the plunger 21 and smaller than that of the main body portion 23.
  • the first counterbore part 266 has a larger inner diameter than the main body part 23 of the plunger 21. Therefore, the distal end portion 22 of the plunger 21 penetrates the first through portion 265 and protrudes from the housing 25, and the first step 223 of the plunger 21 can be locked to the first counterbore portion 266. .
  • the lid body 27 of the housing 25 also includes a second penetration part 272 that penetrates the lid body 27 and a second counterbore part 273 having an inner diameter larger than that of the second penetration part 272.
  • a hole 271 is formed.
  • the second through holes 271 are arranged in a matrix on the lid 27 so as to face the first through holes 264 and correspond to the solder balls 31 of the DUT 30.
  • the arrangement of the second through holes 271 in the housing 25 is also set according to the arrangement of the solder balls of the DUT and is not particularly limited to the above, similarly to the first through holes 265.
  • the second penetrating portion 272 has an inner diameter that is larger than the outer shape of the rear end portion 24 of the plunger 21 and smaller than that of the main body portion 23.
  • the second counterbore part 273 has a larger inner diameter than the main body part 23 of the plunger 21. Therefore, the rear end portion 24 of the plunger 21 penetrates the second through portion 272 and protrudes from the housing 25, and the second step 243 of the plunger 21 can be locked to the second counterbore portion 273. ing.
  • the housing 25 described above holds the plunger 21 as follows. That is, the front end portion 22 is inserted into the first through hole 264 of the housing body 26 and the rear end portion 24 is inserted into the second through hole 271 of the lid body 27 so that the opening 262 of the housing body 26 is covered with the lid. Fit the body 27 together. As a result, the main body portion 23 is sandwiched between the housing main body 26 and the lid body 27 and is accommodated in the accommodating portion 261, and the plunger 21 is held in the housing 25.
  • the plunger 21 can move slightly up and down relatively with respect to the housing 25. It has become.
  • the anisotropic conductive rubber sheet 28 ⁇ / b> A includes a rubber sheet 281 made of elastically deformable silicone rubber and the like, and a large number of metal particles 282 embedded in the rubber sheet 281. ing.
  • the metal particles 282 are aligned along the thickness direction of the rubber sheet 281, and the rows of the metal particles 282 are arranged at substantially equal pitches.
  • anisotropic conductive rubber sheet 28A examples include PCR (registered trademark) manufactured by JSR Corporation.
  • the metal particles 282 are conducted along the thickness direction, whereby the plunger 21 and the pad 17 of the wiring board 16 are electrically connected.
  • the elastic member such as a coil spring is eliminated and the plunger 21 is configured as a single member. Therefore, the anisotropic conductive rubber sheet 28A causes a dimensional error of the socket 20 and a height error of the solder ball 31 of the DUT 30. To absorb.
  • the inclusion between the plunger 21 and the pad 17 of the circuit board 16 is not particularly limited to the anisotropic conductive rubber sheet 28A as long as it has conductivity and elasticity.
  • an anisotropic conductive rubber sheet 28B as shown in FIG. 6 may be used instead of the anisotropic conductive rubber sheet 28A.
  • the anisotropic conductive sheet 28 ⁇ / b> B includes a rubber sheet 283 made of elastically deformable silicone rubber and the like, and a large number of fine metal wires 284 embedded in the rubber sheet 283.
  • the thin metal wires 284 are arranged at substantially equal pitches so as to be slightly inclined with respect to the thickness direction of the rubber sheet 283.
  • the plunger 21 and the pad 17 of the wiring board 16 are electrically connected via the fine metal wire 284.
  • an anisotropic conductive rubber sheet 28B for example, an MT type connector manufactured by Shin-Etsu Polymer Co., Ltd. can be exemplified.
  • the overstroke leads to damage of the anisotropic conductive sheets 28A, 28B and DUT 30, so that the vertical movement of the plunger 21 is mechanically limited or anisotropic at a position where the anisotropic conductive sheets 28A, 28B are not damaged. It is preferable to press the DUT 30 against the socket 20 with a load corresponding to an appropriate stroke of the conductive rubber sheets 28A and 28B.
  • a small metal coil spring 28C is interposed between the plunger 21 and the pad 17 of the wiring board 16, and the coil spring 28C is used.
  • the plunger 21 and the pad 17 may be electrically connected.
  • the socket board 15 in the present embodiment includes the socket 20 described above and the wiring board 16 on which the socket 20 is mounted.
  • the socket board 15 is assembled as follows. That is, the anisotropic conductive rubber sheet 28A is laminated on the wiring board 16, and the housing 25 containing the plunger 21 is placed on the anisotropic conductive rubber sheet 28A. At this time, the housing 25 is placed on the anisotropic conductive rubber sheet 28A so that the contact surface 242 of the plunger 21 faces the pad 17 on the wiring board 16 via the anisotropic conductive rubber sheet 28A. .
  • the housing 25 and the anisotropic conductive rubber sheet 28A laminated in this way are fixed to the wiring board 16 via the guide 18 using, for example, screws.
  • FIG 8 and 9 are diagrams showing the operation of the socket in the present embodiment.
  • the first step 223 of the plunger 21 is locked to the first counterbore 266 of the housing body 26 as shown in FIG.
  • the contact surface 242 of the plunger 21 protruding from the side presses the anisotropic conductive rubber sheet 28A.
  • the anisotropic conductive rubber sheet 28A is pressed between the plunger 21 and the pad 1, the plunger 21 and the pad 17 are electrically connected.
  • the plunger 21 is moved relative to the housing 25 by the pressing of the solder ball 31. Moving downward, the rear end 24 of the plunger 21 protrudes further from the housing 25. Due to the relative movement of the plunger 21, a dimensional error of the socket 20 and a height error of the solder ball 31 of the DUT 30 are allowed. The relative movement of the plunger 21 is absorbed by the compression of the anisotropic conductive rubber sheet 28A.
  • the test of the DUT 30 is executed when the tester 3 inputs and outputs a test signal to the DUT 30 via the test head 4 in a state where the solder ball 31 and the plunger 21 are in contact with each other.
  • the plunger 21 is constituted by a single member as securing the vertical stroke by the anisotropic conductive rubber sheet 28A. For this reason, the number of components of the socket 20 can be reduced, and the cost of the socket 20 can be reduced. In particular, this effect becomes particularly noticeable as the number of simultaneous measurements increases.
  • the general life of the socket is due to resistance deterioration due to solder adhesion, but in this embodiment, the entire socket 20 is not replaced, but only the plunger 21 and the housing 25 to which the solder is adhered are replaced. Since the anisotropic conductive sheet 28A can be used as it is, the cost of the socket 20 can be further reduced. At this time, since the plunger 21 is composed of a single cylindrical member having no elastic member such as a coil spring, the cost of the replacement part is particularly suppressed.
  • the anisotropic conductive rubber sheet 28A is brought into direct contact with the solder ball 31 of the DUT 30, contact and separation are repeated, so that the life of the anisotropic conductive rubber sheet 28A is remarkably shortened. Since the contact surface 242 of 21 is always in contact with the anisotropic conductive rubber sheet 28A and only the pressure fluctuates, the life of the anisotropic conductive rubber sheet 28A can be extended.

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Connecting Device With Holders (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

L'invention porte sur un support (20) qui est composé d'un unique élément et qui comporte : un plongeur (21) qui vient en butée sur le globule de soudure (31) d'un dispositif à l'essai (30) ; un boîtier (25) qui reçoit le plongeur (21) ; et une feuille de caoutchouc conducteur anisotrope (28A) qui est élastiquement déformable est disposée entre le plongeur (21) et la pastille (17) d'une carte de câblage (16) et connecte électriquement le plongeur (21) et la pastille (17) l'un à l'autre.
PCT/JP2009/071619 2009-12-25 2009-12-25 Support, carte de support et appareil d'essai de composant électronique Ceased WO2011077555A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/JP2009/071619 WO2011077555A1 (fr) 2009-12-25 2009-12-25 Support, carte de support et appareil d'essai de composant électronique
JP2011547166A JPWO2011077555A1 (ja) 2009-12-25 2009-12-25 ソケット、ソケットボード、及び電子部品試験装置
TW099139697A TWI435505B (zh) 2009-12-25 2010-11-18 Plug connector, connector and electronic components test device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2009/071619 WO2011077555A1 (fr) 2009-12-25 2009-12-25 Support, carte de support et appareil d'essai de composant électronique

Publications (1)

Publication Number Publication Date
WO2011077555A1 true WO2011077555A1 (fr) 2011-06-30

Family

ID=44195116

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2009/071619 Ceased WO2011077555A1 (fr) 2009-12-25 2009-12-25 Support, carte de support et appareil d'essai de composant électronique

Country Status (3)

Country Link
JP (1) JPWO2011077555A1 (fr)
TW (1) TWI435505B (fr)
WO (1) WO2011077555A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180049425A (ko) * 2016-11-01 2018-05-11 솔브레인멤시스(주) 이방 도전성 시트
WO2020154313A1 (fr) * 2019-01-22 2020-07-30 Smiths Interconnect Americas, Inc. Douille pourvue d'une sonde à ressort
CN112881895A (zh) * 2021-02-07 2021-06-01 荀露 导电组件及测试装置
TWI803044B (zh) * 2021-11-05 2023-05-21 南亞科技股份有限公司 積體電路測試裝置及其測試方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003133023A (ja) * 2001-10-24 2003-05-09 Tokyo Cosmos Electric Co Ltd Ｉｃソケット
WO2004005944A1 (fr) * 2002-07-05 2004-01-15 Advantest Corporation Contact, support, plaque de support et appareil de test de composant electronique
JP2005283571A (ja) * 2004-03-02 2005-10-13 Jsr Corp 回路基板の検査装置並びに回路基板の検査方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0417282A (ja) * 1990-05-10 1992-01-22 Shibata Ind Co Ltd 異方導電性シートの製造方法
JP3691368B2 (ja) * 2000-08-04 2005-09-07 井上商事株式会社 プリント配線板の導通検査治具

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003133023A (ja) * 2001-10-24 2003-05-09 Tokyo Cosmos Electric Co Ltd Ｉｃソケット
WO2004005944A1 (fr) * 2002-07-05 2004-01-15 Advantest Corporation Contact, support, plaque de support et appareil de test de composant electronique
JP2005283571A (ja) * 2004-03-02 2005-10-13 Jsr Corp 回路基板の検査装置並びに回路基板の検査方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180049425A (ko) * 2016-11-01 2018-05-11 솔브레인멤시스(주) 이방 도전성 시트
WO2020154313A1 (fr) * 2019-01-22 2020-07-30 Smiths Interconnect Americas, Inc. Douille pourvue d'une sonde à ressort
CN112881895A (zh) * 2021-02-07 2021-06-01 荀露 导电组件及测试装置
TWI803044B (zh) * 2021-11-05 2023-05-21 南亞科技股份有限公司 積體電路測試裝置及其測試方法

Also Published As

Publication number Publication date
JPWO2011077555A1 (ja) 2013-05-02
TW201134030A (en) 2011-10-01
TWI435505B (zh) 2014-04-21

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