WO2011074381A1 - Conveyance device for film substrate - Google Patents

Abstract

A conveyance device for a film substrate, capable of highly accurately adjusting the position of individual substrates which are conveyed respectively in the forward feed direction and in the reverse feed direction. A conveyance device for a film substrate, configured to convey the band-like film substrate (2) in a vertical position in which one end of the film substrate in the widthwise direction thereof positioned on the upper side. The conveyance device for a film substrate is provided with at least a pair of first grip rollers (6) which is disposed so as to sandwich the upper end of the film substrate (2), and also with a first angle adjustment mechanism (11) which can adjust the tilt direction and tilt angle of the first grip rollers in such a manner that the angle of the rotation axis of the first grip rollers (6) is adjusted so that the rotational direction of the first grip rollers (6) is directed above the conveyance direction.

Description

Film substrate transport device

The present invention relates to a film substrate transport apparatus in which a film substrate (hereinafter, referred to as a “substrate”) is disposed and transported in a vertical posture with one end upper side in the width direction.

An apparatus for producing a thin film laminate (hereinafter, referred to as "production apparatus") is used to form a photoelectric conversion layer or the like including a thin film photoelectric conversion element on the surface of a substrate. This manufacturing apparatus is configured such that the substrate is formed in an airtight state in the film forming chamber, and the substrate taken up by the unwinding core is further transferred to the film forming chamber in order to transport the substrate into the film forming chamber. After being sent out to pass through to the inside of the film forming chamber, they are wound up by the winding core.

With regard to the substrate transfer method of a film substrate transfer device (hereinafter referred to as a “transfer device”) mainly provided in such a manufacturing apparatus, the vertical direction is to arrange and transfer the substrate in the vertical posture with one end in the width direction There is a case where a lay transport method is adopted. The transport apparatus of this vertical transport system is excellent in that contamination of the substrate is prevented by the difficulty in depositing particles on the substrate surface, and the space of the manufacturing apparatus can be reduced by vertically placing the substrate. There is. On the other hand, since the substrate is mainly pulled and held between the unwinding core and the winding core, the substrate tends to sag downward by its own weight, and may also meander in the width direction. In such a case, positional deviation in the width direction of the substrate occurs, and the substrate is bent in the width direction. This deflection generates a stress concentration unevenly on the substrate to cause wrinkles, and the wrinkles deteriorate the characteristics of the thin film photoelectric conversion element or the like formed on the substrate, which is a problem.

Therefore, as in Patent Document 1, in the transport apparatus that transports the substrate in the forward direction, a structure is adopted in which a grip roller for adjusting the position of the substrate in the width direction is provided. In such a manufacturing apparatus, a plurality of paired grip rollers are provided to sandwich the upper end portion and the lower end portion of the substrate, and the grip roller on the upper end portion side is the upper side with respect to the substrate feeding direction. The grip roller on the lower end side is disposed to be inclined downward with respect to the forward feeding direction of the substrate.

In addition, an elastic body is provided on the outer peripheral surface of the grip roller for protecting the substrate and the like. However, if the elastic body is deteriorated due to wear or the like, the gripping force acting between the gripping roller and the substrate is reduced, and a sufficient lifting force for the substrate can not be obtained. Therefore, in Patent Document 1, in response to the deterioration of the elastic body, the gripping force is increased by increasing the force with which the pair of gripping rollers sandwiches the substrate (hereinafter referred to as "substrate gripping force"). .

JP, 2009-38276, A

However, in Patent Document 1, the grip roller on the upper end portion side is disposed to be inclined only upward with respect to the forward feeding direction of the substrate, and the grip roller on the lower end portion side is downwardly directed to the forward feeding direction of the substrate. The side is only tilted towards the side. Therefore, when the substrates are transported in both the forward feed direction and the reverse feed direction, these grip rollers can adjust the substrate transported in the forward feed direction with high accuracy, but the substrates transported in the reverse feed direction are high. It is difficult to adjust the position with accuracy.

Further, in Patent Document 1, when the substrate gripping force of the grip roller whose outer peripheral surface is an elastic body is increased, the elastic body on the outer peripheral surface is crushed, and the cross sectional shape of the outer peripheral surface changes into an elliptical shape, There is a possibility that the diameter of the grip roller may change. In such a case, it is difficult to move the substrate to a desired position because a desired gripping force can not be obtained and a sufficient force for lifting the substrate can not be obtained. Thus, the accuracy of the position adjustment of the substrate is reduced.

The present invention has been made in view of such circumstances, and its object is to provide a film substrate capable of adjusting the position of each of the substrates transported in both the forward feed direction and the reverse feed direction with high accuracy. It is in providing a conveying apparatus.

In order to solve the problems, the film substrate transport apparatus of the present invention is a film substrate transport apparatus which arranges and transports a strip-shaped film substrate in a vertical posture with one end on the upper side in the width direction, At least a pair of first grip rollers disposed so as to sandwich the upper end portion of the film substrate, and the rotation shaft angle of the first grip roller makes the rotation direction of the first grip roller upward with respect to the transport direction A first angle adjustment mechanism is provided to adjust the inclination direction and the inclination angle of the first grip roller so that it can be inclined to the side.

In the film substrate transport apparatus according to the present invention, at least a pair of second grip rollers disposed so as to sandwich the lower end portion of the film substrate, and the rotation axis angle of the second grip roller is the second grip And a second angle adjusting mechanism capable of adjusting the inclination direction and the inclination angle of the second grip roller so that the rotation direction of the roller can be inclined downward with respect to the transport direction. There is.

The film substrate transport apparatus according to the present invention further includes detection means for detecting the height position of the width direction end of the film substrate, and the first grip is detected when the detection means detects positional deviation of the film substrate. The roller and / or the second grip roller is controlled by the first angle adjusting mechanism and / or the second angle adjusting mechanism to be inclined in an inclination direction corresponding to the transport direction of the film substrate .

In the film substrate transport device of the present invention, the first angle adjustment mechanism and / or the second angle adjustment mechanism may be used to correct the positional deviation of the substrate, and / or the first grip roller and / or the second It is controlled to change the inclination angle of the 2 grip rollers.

According to the film substrate transport apparatus of the present invention, the following effects can be obtained.
The film substrate conveying apparatus according to the present invention is a film substrate conveying apparatus for arranging and conveying a strip-shaped film substrate in a vertical posture with one end on the upper side in the width direction, and the upper end of the film substrate At least a pair of first grip rollers disposed in a sandwiching manner, and the rotation angle of the first grip roller can be inclined so that the rotation direction of the first grip roller is on the upper side with respect to the transport direction And a first angle adjustment mechanism that makes it possible to adjust the inclination direction and the inclination angle of the first grip roller.
Further, at least a pair of second grip rollers disposed so as to sandwich the lower end portion of the film substrate, and the rotation angle of the second grip roller makes the rotation direction of the second grip roller downward. And a second angle adjusting mechanism for adjusting an inclination direction and an inclination angle of the second grip roller so as to be able to be inclined.
Furthermore, a detection means for detecting the height position of the width direction end of the film substrate is further provided, and when the detection means detects the positional deviation of the film substrate, the first grip roller and / or the second A grip roller is controlled to be inclined in an inclination direction corresponding to the transport direction of the film substrate by the first angle adjustment mechanism and / or the second angle adjustment mechanism.
Therefore, highly accurate position adjustment is possible with respect to both the film substrate transported in the forward feeding direction and the reverse feeding direction.

In the film substrate transport device of the present invention, the first angle adjustment mechanism and / or the second angle adjustment mechanism may be used to correct the positional deviation of the substrate, and / or the first grip roller and / or the second The control is performed so as to change the inclination angle of the second grip roller. For example, the gripping force of the first grip roller is reduced due to the wear of the first grip roller, and the force for lifting the film substrate If the inclination of the first grip roller is increased, the amount of movement of the film substrate in the width direction can be increased to correct the positional adjustment of the film substrate. Therefore, it is possible to prevent an excessive load from being applied to the film substrate without increasing the force for sandwiching the film substrate by the first grip roller. On the other hand, when the grip force of the first grip roller becomes too high due to variation or the like and the force for lifting the film substrate becomes too large, the film substrate can be made by reducing the inclination of the first grip roller. The positional adjustment of the film substrate can be corrected by reducing the amount of movement in the width direction of the film substrate. Therefore, it is possible to prevent the positional adjustment accuracy of the film substrate from being lowered.

It is a cross-sectional top view which shows typically the manufacturing apparatus of the thin film laminated body in 1st Embodiment of this invention. (A) is a cross-sectional plan view schematically showing the film formation chamber of FIG. 1 in an enlarged manner, and (b) is a cross-sectional view taken along the line CC of FIG. (A) is a schematic front view which shows an angle adjustment mechanism in case the rotating shaft of a grip roller is arrange | positioned along the width direction of a film board | substrate in 1st Embodiment of this invention, (b) is a figure. It is a schematic side view of the angle adjustment mechanism of 3 (a), and (c) is DD sectional drawing of FIG. 3 (a). (A) is a schematic front view which shows the angle adjustment mechanism which inclines a grip roller so that the position of the board | substrate conveyed in a forward direction may be adjusted in 1st Embodiment of this invention, (b), It is a D'-D 'sectional view of FIG. 4 (a). It is a schematic enlarged front view which shows the grip roller of Fig.4 (a). (A) is a schematic front view which shows the angle adjustment mechanism which inclines a grip roller so that the position of the board | substrate conveyed in a reverse feed direction may be adjusted in 1st Embodiment of this invention, (b) Fig. 7 is a cross-sectional view taken along the line D "-D" in FIG. It is a schematic enlarged front view which shows the grip roller of Fig.6 (a). FIG. 3 is a cross-sectional view taken along the line CC in FIG. 2A in the second embodiment of the present invention. It is a graph which shows the relationship between the inclination angle of a grip roller, and the force which lifts the film board | substrate of a grip roller.

First Embodiment
The film substrate transport apparatus according to the first embodiment of the present invention will be described below.
Referring to FIG. 1, in a thin film laminate manufacturing apparatus (hereinafter referred to as “manufacturing apparatus”) 1 including a film substrate conveying apparatus (hereinafter referred to as “carrier apparatus”), a belt-like film substrate (hereinafter referred to as While being arranged and transported in a vertical posture with one end on the upper side in the width direction, the thin film is formed on the surface of the substrate 2. In the first embodiment, the width direction of the substrate 2 is illustrated along the vertical direction, but the present invention is not limited to this.
In order to transport the substrate 2, the manufacturing apparatus 1 is provided with a winding chamber 3 for winding the substrate 2 and a winding chamber 4 for winding the substrate 2. As an example, six film forming chambers 5a to 5f are provided between the chamber 4 and the chamber 4. Further, the substrate 2 is fed in a direction of forward feeding from the unwinding chamber 3 to the winding chamber 4 (hereinafter, indicated by an arrow A in the drawing) and a reverse feeding direction from the winding chamber 4 to the unwinding chamber 3 (hereinafter, in the drawing , And can be transported. Further, a conveyance section between the unwinding chamber 3 and the film formation chamber 5a, a conveyance section between five adjacent film formation chambers, and a conveyance section between the winding chamber 4 and the film formation chamber 5f, As an example, one pair of first grip rollers 6 is provided.

Inside the unwinding chamber 3, an unwinding core 3 a capable of unwinding the wound substrate 2 is provided rotatably about a rotation axis along the width direction of the substrate 2. Further, in the inside of the unwinding chamber 3, for example, five rollers 3 b to 3 f are provided in the width direction of the substrate 2 downstream of the unwinding core 3 a in the forward direction. Provided so as to be rotatable about a rotational axis along the axis. The unwinding core 3a and the rollers 3b to 3f are configured to rotate the substrate 2 so as to be able to be transported in the forward feeding direction and the reverse feeding direction. In addition, the number of rollers for the conveyance drive of the board | substrate 2 shown in FIG. 1, tension control, etc. is an example and it is not limited to this, According to the specification of the manufacturing apparatus 1, it can change. It is also possible not to provide a roller for conveyance drive of substrate 2 and tension control.

Inside the winding chamber 4, a winding core 4 a configured to be able to wind the substrate 2 is provided rotatably about a rotation axis along the width direction of the substrate 2. Further, seven rollers 4b to 4h are provided inside the winding chamber 4 as an example for conveying drive of the substrate 2, tension control, etc., and the width of the substrate 2 on the upstream side of the winding core 4a in the forward direction. It is provided to be rotatable about a rotational axis along the direction. The winding core 4a and the rollers 4b to 4h are configured to rotate so as to be able to transport the substrate 2 in the forward feeding direction and the reverse feeding direction. In addition, the number of rollers for the conveyance drive of the board | substrate 2 shown in FIG. 1, tension control, etc. is an example and it is not limited to this, According to the specification of the manufacturing apparatus 1, it can change. It is also possible not to provide a roller for conveyance drive of substrate 2 and tension control.

The structures of the film forming chambers 5a to 5f will be described with reference to FIGS. 2 (a) and 2 (b). 2 (a) and 2 (b) show a state in which the substrate 2 is fed in the forward feeding direction (indicated by the arrow A), and the first grip roller 6 is fed in the forward feeding direction. It corresponds to the substrate 2. Inside the film forming chambers 5a to 5f, high voltage electrodes 7a to 7f and ground electrodes 8a to 8f are disposed to face each other, and the substrate 2 is provided with high voltage electrodes 7a to 7f and ground electrodes 8a to 8f. It is configured to pass between. The lengths along the width direction of the substrate 2 of the high voltage electrodes 7a to 7f and the ground electrodes 8a to 8f are respectively shorter than the width of the substrate 2, and the upper end portion and the lower end portion of the substrate 2 in the width direction The thin film laminated body is not formed into a film. A gas for film formation is supplied to the inside of the film formation chambers 5a to 5f. The insides of the film forming chambers 5a to 5f are configured to be capable of maintaining an airtight state. A thin film is formed on the substrate 2 when the substrate 2 is located between the high voltage electrodes 7a to 7f and the ground electrodes 8a to 8f in the film forming chambers 5a to 5f. Become. As a method of forming a film on the surface of the substrate 2, for example, it is conceivable to use a method such as chemical vapor deposition (CVD) or physical vapor deposition (PVD). The number of film forming chambers shown in FIG. 1 is an example and is not limited to this, and can be changed according to the specification of the manufacturing apparatus 1. In addition to the film formation chamber, a heating chamber for heating the substrate 2 may be provided.

In addition, the manufacturing apparatus 1 is provided with detection means 9 for detecting the position of the substrate 2 in the width direction. For example, the detection unit 9 may be configured to detect the position of the edge portion in the width direction of the substrate 2. Furthermore, the detection means 9 is preferably a non-contact sensor in particular, and may be, for example, a transmissive laser sensor, a reflective photosensor or the like. The detection means 9 is connected to the control means 10.

The pair of first grip rollers 6 is configured to be rotatable around the rotation shaft 6 a, and is disposed so as to sandwich the upper end portion of the substrate 2 between the adjacent film forming chambers. Therefore, the pair of first grip rollers 6 sandwich the portion of the substrate 2 on which the thin film laminate is not formed. The outer peripheral surface 6b of the first grip roller 6 may be formed of an elastic body. For example, as an elastic body, heat resistant rubber such as silicone rubber or fluoro rubber may be used. As another example, the outer peripheral surface 6b of the first grip roller 6 may be formed of a synthetic resin such as PTFE or polyimide, or may be formed of a material coated with stainless steel, iron, chrome or the like. Furthermore, the outer peripheral surface 6b of the first grip roller 6 may be formed of another material as long as predetermined performance such as protection of the substrate 2 and grip is obtained.

Such first grip roller 6 is configured to be adjustable in inclination. The first angle adjustment mechanism 11 for adjusting the inclination of the first grip roller 6 will be described with reference to FIGS. 3 (a) to 3 (c). In FIGS. 3A to 3C, the rotation axis 6a of the first grip roller 6 is adjusted by the first angle adjustment mechanism 11 to the neutral state in which the rotation axis 6a is arranged along the width direction of the substrate 2. There is. A roller shaft 6 c is disposed on the first grip roller 6 so as to extend upward from the upper end along the width direction of the substrate 2. The upper end of the roller shaft 6 c is rotatably attached to the roller attachment portion 12. In addition, a link 13 extending upward from the roller attachment portion 12 along the width direction of the substrate 2 is disposed. An engagement roller 14 is provided at the top of the link 13. A link mounting portion 13 a is provided on the link 13 at the middle in the width direction of the substrate 2 between the roller mounting portion 12 and the engagement roller 14. This link mounting portion 13 a corresponds to the link 13 on the surface of the substrate 2. It is configured to be rotatable around a link rotation shaft 13 b extending in the width direction with respect to the above, and is attached to the support portion 15. Therefore, the link 13 is rotatable with respect to the support portion 15. Further, biasing means 16 is disposed between the link 13 and the support portion 15 along the transport direction of the substrate 2. The biasing means 16 may be configured to be able to return the link 13 to the neutral position by using a coil spring, a plate spring, a torsion spring, a rubber member or the like.

An actuator 17 is disposed above the link 13. The actuator 17 includes an arm 18 disposed along the width direction with respect to the surface of the substrate 2. The tip 18 a of the arm 18 is engaged with an engagement roller 14 attached to the link 13. On the other hand, a rotating shaft 19 extending along the width direction of the substrate 2 is attached to the proximal end 18 b of the arm 18. The lower end of the rotating shaft 19 is attached to the proximal end 18 b of the arm 18, and the upper end of the rotating shaft 19 is attached to the drive source 20. Therefore, the arm 18 can be rotated by rotational driving of the drive source 20. The drive source 20 is supported by the support portion 15, and the drive source 20 of the actuator 17 is connected to the control means 10.

The operation of the manufacturing apparatus 1 in the first embodiment of the present invention will be described.
The transport and film formation of the substrate 2 in the manufacturing apparatus 1 will be described with reference to FIG. 1 again. In the unwinding chamber 3, the substrate 2 wound around the unwinding core 3a is unwound while being driven and guided by the rollers 3b to 3f. The substrate 2 exits the unwinding chamber 3 and is sequentially transported in the film forming chambers 5a to 5f along the forward feeding direction, and various thin films are formed on the surface of the substrate 2 in each of the film forming chambers 5a to 5f. Is deposited. The film-formed substrate 2 is conveyed into the winding chamber 4 and wound around the winding core 4a while being driven and guided by the rollers 4b to 4h. In addition, the substrate 2 is transported along the reverse feed direction, as needed.

The positional adjustment of the substrate 2 transported in the forward direction will be described with reference to FIGS. 4 (a), 4 (b) and 5. FIG. When the detection means 9 (see FIG. 2 (b)) detects a downward displacement of the substrate 2 transported in the forward direction, the detection means 9 controls the control means 10 (see FIG. 2 (b)) Send a signal to Next, the control means 10 sends a signal to the drive source 20 of the actuator 17, and this drive source 20 is controlled to rotate so as to move the tip 18a of the arm 18 in the reverse feed direction. At this time, the engagement roller 14 engaged with the tip 18a of the arm 18 also moves in the reverse feeding direction, and the link 13 rotates about the link rotation shaft 13b. As a result, the first grip roller 6, along the surface of the substrate 2, so as to direct the lower side of the first grip roller 6 in the forward direction, the inclination angle theta ₁ is inclined with respect to the width direction of the substrate 2 It will be That is, the first grip roller 6 is inclined upward with respect to the forward feeding direction of the substrate 2. In a state where the first grip roller 6 is tilted inclination angle theta _1, link 13 is biased to the first gripping roller 6 by the biasing means 16 so as to return to the neutral state.

The position adjustment of the substrate 2 transported in the reverse feed direction will be described with reference to FIGS. 6 (a), 6 (b) and 7. FIG. When the detection means 9 (see FIG. 2 (b)) detects a downward displacement of the substrate 2 transported in the reverse feed direction, the detection means 9 refers to the control means 10 (FIG. 2 (b)). Send a signal to). Next, the control means 10 sends a signal to the drive source 20 of the actuator 17, and the drive source 20 is controlled to rotate so as to move the tip 18a of the arm 18 in the forward direction. At this time, the engagement roller 14 engaged with the leading end 18a of the arm 18 also moves in the forward feeding direction, and the link 13 rotates around the link rotation shaft 13b. As a result, the first grip roller 6 has an inclination angle θ _{2 with} respect to the width direction of the substrate 2 so that the lower side of the first grip roller 6 faces the reverse direction along the surface of the substrate _2. It will be tilted. That is, the first grip roller 6 is inclined upward with respect to the reverse feeding direction of the substrate 2. Incidentally, in a state where the first grip roller 6 is tilted inclination angle theta _2, the link 13 is biased to the first gripping roller 6 by the biasing means 16 so as to return to the neutral state.

Here, as the grip force of the first grip roller 6 is reduced, a sufficient lift force can not be obtained, and the detection means 9 indicates that the substrate 2 after position correction is still shifted downward. when detecting, so as to increase the inclination angle theta ₁ or theta ₂ of the first gripping roller 6, the control unit 10 controls the drive source 20 of the actuator 17, the position adjustment of the substrate 2 is modified. On the other hand, when the detection means 9 detects that the substrate 2 after position correction has deviated to the upper side, the lifting force becomes high because the grip force of the first grip roller 6 is too high. so as to reduce the first angle of inclination theta ₁ or theta ₂ of the grip roller 6, the control unit 10 controls the drive source 20 of the actuator 17, the position adjustment of the substrate 2 is modified.

Second Embodiment
The manufacturing apparatus of the thin film laminated body in 2nd Embodiment of this invention is demonstrated below. The basic configuration of the thin film stack manufacturing apparatus according to the second embodiment is the same as the thin film stack manufacturing apparatus according to the first embodiment. The same elements as in the first embodiment will be described using the same reference numerals and names as in the first embodiment. Here, a configuration different from the first embodiment will be described.

As shown in FIG. 8, a pair of second grip rollers 6 ′ configured to further sandwich the lower end portion of the substrate 2 is provided. Similar to the first grip roller 6, the second grip roller 6 'has a rotating shaft 6a' and an outer peripheral surface 6b '. Further, although not shown, the second grip roller 6 'can be inclined along the outer circumferential surface 6b of the substrate 2 with the second grip roller 6' downward with respect to the transport direction. In addition, a second angle adjustment mechanism is provided which can adjust the tilt direction and the tilt angle so as to tilt in both the forward feeding direction and the reverse feeding direction with respect to the transport direction. The basic configuration of the second angle adjustment mechanism corresponds to the second grip roller 6 ′ and is similar to the first angle adjustment mechanism 11. Note that FIG. 8 shows a state in which the substrate 2 is sent in the forward feeding direction (indicated by the arrow A), and the second grip roller 6 ′ is the second corresponding to the substrate 2 sent in the forward feeding direction. The upper side of the grip roller 6 'is inclined in the forward feeding direction.

As described above, according to the first embodiment and the second embodiment of the present invention, the first and / or second grip rollers 6, 6 'are the first angle adjustment mechanism 11 and / or the second angle. The adjustment mechanism makes it possible to adjust the inclination direction and the inclination angle so as to incline in both the forward feed direction and the reverse feed direction in the transport direction of the substrate 2, so that the substrate 2 is transported in the forward feed direction and the reverse feed direction. The position can be adjusted with high accuracy for both

According to the first embodiment and the second embodiment of the present invention, for example, the grip force of the first grip roller 6 is reduced due to the wear of the first grip roller 6, and the force for lifting the substrate 2 is If the inclination of the first grip roller 6 is increased, the displacement of the substrate 2 in the width direction can be increased, and the positional adjustment of the substrate 2 can be corrected. Therefore, it is possible to prevent an excessive load from being applied to the substrate 2 without increasing the force for sandwiching the substrate 2 by the first grip roller 6. On the other hand, when the grip force of the first grip roller 6 is too high due to variation or the like and the force for lifting the substrate 2 is too large, the width of the substrate 2 can be reduced by decreasing the inclination of the first grip roller 6. The positional adjustment of the substrate 2 can be corrected by reducing the amount of movement of the direction. Therefore, the positional adjustment accuracy of the substrate 2 can be prevented from decreasing.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications and changes are possible based on the technical idea of the present invention.

As a first modification of the embodiment of the present invention, the first and / or second grip rollers 6, 6 'are configured to be able to adjust the force to hold the substrate 2 (hereinafter referred to as "substrate holding force"). It may be done. For example, as the grip force of the first grip roller 6 is reduced, a sufficient lifting force for the substrate 2 can not be obtained, and it is detected that the substrate 2 after position correction is still shifted downward. When 9 is detected, the control means 10 controls the pair of first grip rollers 6 so that the substrate gripping force of the pair of first grip rollers 6 is increased, and the position adjustment of the substrate 2 is corrected. It is also good. On the other hand, when the grip force of the first grip roller 6 is too high, the force for lifting the substrate 2 is high, and the detection means 9 detects that the substrate 2 after position correction is shifted upward. In this case, the control unit 10 may control the pair of first grip rollers 6 to correct the positional adjustment of the substrate 2 so as to reduce the substrate gripping force between the pair of first grip rollers 6. The same effect as the embodiment of the present invention can be obtained.

As a second modification of the embodiment of the present invention, the transport section between the unwinding chamber 3 and the film forming chamber 5a, the transport section between five adjacent film forming chambers, the winding chamber 4 and the film forming chamber The first and / or second grip rollers 6, 6 'may be provided in at least one of the conveyance sections between 5f, and the first and / or second grip rollers 6, 6' may be provided. The number of transport sections provided with 'can be varied to optimally position the substrate 2. In addition, the number of first and / or second grip rollers 6, 6 'provided in each conveyance section may be two or more. The same effect as the embodiment of the present invention can be obtained.

As a third modification of the embodiment of the present invention, a drive source for rotating the first and / or second grip rollers 6, 6 'instead of the roller mounting portion 12 is provided, the first and / or the first. The second grip rollers 6, 6 'may be configured to be rotatable by the drive source. Also, this drive source may be connected to the control means 10 to control the rotation of the first and / or second grip rollers 6, 6 '. The same effect as the embodiment of the present invention can be obtained.

[Example]
An example using the manufacturing apparatus 1 of the first embodiment of the present invention will be described. In the embodiment of the present invention, when the substrate gripping force between the pair of first grip rollers 6 is 4.4 N, 8.9 N or 16.3 N, the inclination angle θ ₁ or θ _{2 of} the first grip roller 6 Was changed between 0 ° and 8 °, a change in the lifting force F (hereinafter referred to as “lifting force”) of the pair of first grip rollers 6 was measured.

In FIG. 9, the relationship between the tilt angle θ ₁ or θ ₂ of the first grip roller 6 and the lifting force F of the substrate 2 of the first grip roller 6 is a solid line when the substrate gripping force is 4.4 N. A broken line Q indicates a case where the substrate holding force is 8.9 N, and a dashed dotted line R indicates a case where the substrate holding force is 16.3 N.

Referring to FIG. 9, it can be confirmed that the lifting force F is also proportionally increased when the inclination angle θ ₁ or θ ₂ is increased. For example, if it is intended to obtain a force F for lifting the substrate 2 of about 2N, the tilt angle θ ₁ or θ ₂ may be about 3.5 ° when the substrate holding force is 4.4N. When the substrate holding force is 8.9 N, the inclination angle θ ₁ or θ ₂ may be approximately 2 °. When the substrate gripping force is 16.3 N, the inclination angle θ ₁ or θ ₂ may be approximately 1 °. From the above, in the embodiment of the present invention, instead of increasing the substrate holding force in the first gripping roller 6 of the pair, by increasing the inclination angle theta ₁ or theta ₂ of the first gripping roller 6, lifting We could confirm the relationship that force F increases.

1 Production device for thin film laminate (production device)
2 Film substrate (substrate)
6 first grip roller 6 'second grip roller 6a, 6a' rotation shaft 6b, 6b 'outer peripheral surface 9 detection means 11 angle adjustment mechanism A, B, C, D, D', D '' arrow F lifting force θ ₁ , θ ₂ Inclination angle P Solid line Q Broken line R Dot-and-dash line

Claims (4)

A film substrate conveying apparatus for arranging and conveying a strip-shaped film substrate in a vertical posture with one end on the upper side in the width direction,
At least a pair of first grip rollers disposed so as to sandwich the upper end portion of the film substrate;
Inclination direction and inclination of the first grip roller so that the rotation axis angle of the first grip roller can be inclined so that the rotation direction of the first grip roller is on the upper side with respect to the transport direction And a first angle adjusting mechanism capable of adjusting the angle. At least a pair of second grip rollers disposed to sandwich the lower end portion of the film substrate;
Inclination direction and inclination of the second grip roller so that the rotation axis angle of the second grip roller can be inclined so that the rotation direction of the second grip roller is lower with respect to the conveyance direction The film substrate transport apparatus according to claim 1, further comprising: a second angle adjustment mechanism capable of adjusting the angle. It further comprises detection means for detecting the height position of the widthwise end of the film substrate,
When the detection means detects displacement of the film substrate, the first grip roller and / or the second grip roller are operated by the first angle adjustment mechanism and / or the second angle adjustment mechanism. The film substrate transport device according to claim 1, wherein the transport device is controlled to be inclined in a tilt direction corresponding to the transport direction of the film substrate. The first angle adjusting mechanism and / or the second angle adjusting mechanism change the inclination angle of the first grip roller and / or the second grip roller in order to correct the displacement of the substrate. The film substrate transport apparatus according to any one of claims 1 to 3, which is controlled as follows.

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