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WO2011073767A2 - Dispositif et utilisation d'éléments fonctionnels comprenant un revêtement de diamant sur des couches intermédiaires recouvrant des substrats en tant qu'éléments fonctionnels présentant un revêtement de protection contre l'érosion par cavitation - Google Patents

Dispositif et utilisation d'éléments fonctionnels comprenant un revêtement de diamant sur des couches intermédiaires recouvrant des substrats en tant qu'éléments fonctionnels présentant un revêtement de protection contre l'érosion par cavitation Download PDF

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Publication number
WO2011073767A2
WO2011073767A2 PCT/IB2010/003240 IB2010003240W WO2011073767A2 WO 2011073767 A2 WO2011073767 A2 WO 2011073767A2 IB 2010003240 W IB2010003240 W IB 2010003240W WO 2011073767 A2 WO2011073767 A2 WO 2011073767A2
Authority
WO
WIPO (PCT)
Prior art keywords
layer
substrate
functional element
diamond
steel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IB2010/003240
Other languages
German (de)
English (en)
Other versions
WO2011073767A3 (fr
Inventor
Christoph Jung
Reinhard Sobotta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elma Hans Schmidbauer & Co KG GmbH
Original Assignee
Elma Hans Schmidbauer & Co KG GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elma Hans Schmidbauer & Co KG GmbH filed Critical Elma Hans Schmidbauer & Co KG GmbH
Publication of WO2011073767A2 publication Critical patent/WO2011073767A2/fr
Publication of WO2011073767A3 publication Critical patent/WO2011073767A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B3/00—Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D

Definitions

  • the invention relates to apparatus and / or a use of a multilayer functional element with a surface coating, wherein the functional element consists of a steel substrate and with a multi-layer covering the substrate.
  • the multilayer has at least one chemically bonded to the steel substrate intermediate layer z.
  • TiBN titanium boron nitride
  • Cr 3 C 2 , Cr 2 3C 6 chromium carbides
  • Ultrasound - in particular power ultrasound - coupled via ultrasound radiating surfaces in liquids can be used, among other things, to apply ultrasound and ultrasound-induced transient cavitation to objects in these liquids and thus to process their surfaces - eg. B. to clean, deburr, roughen or deliberately damage or even disintegrate.
  • Corresponding cleaning systems generally consist of trough-like formations, either surface areas (bottom, side walls) of the trough-like formations or special partial surfaces of the troughs (welded therein or by means of sealing frame screwed therein vibration plates) directly attached to their outer surfaces active ultrasonic transducer or suspended therein immersion vibrators active Have ultrasound transducer.
  • the ultrasonic transducers convert high-frequency electrical or magnetic alternating fields into mechanical oscillations, which are coupled into the liquid via the functional elements, that is to say the surface areas and special sub-areas of the trough-like formation or the immersion oscillator, as an ultrasound radiating surface.
  • transient cavitation is understood to mean a formation and a chaotic implosion of bubble-like transient cavities in liquids.
  • the transient bubbles also contain liquid vapor and gases dissolved in the surrounding liquid.
  • the ultrasound above certain ultrasound intensities (thresholds of the ultrasound intensity for transient ultrasound-induced cavitation) bubbles collapse chaotically by the action of the external and the positive sound pressure half-wave - it comes to implosions.
  • the resulting local shock waves and / or liquid microjets lead to damage in the vicinity, ie a few bubble radii of the imploding bubbles away, located surfaces of objects. There is a cavitation erosion of the object surfaces.
  • Coatings and materials with improved cavitation erosion resistance are available: special stainless steels, for example duplex steels or high-strength materials, for example Ti-AlV alloys. Hard chromium and other coatings on steels could delay but not prevent cavitation erosion.
  • the compound of a steel substrate is about at high temperatures to the substrate applied and partly eindif ⁇ sound chromium carbide interlayers (Cr 3 C 2 , Cr 2 3C 6 ) with a deposited by CVD-like coating diamond layer.
  • CVD stands for Chemical Vapor Deposition and refers to the deposition of a solid, amorphous, polycrystalline or monocrystalline layer on a substrate from the gas phase. Under the title "Well Adherent Diamond Coatings on Steel Substrates" it is shown that in a defined temperature range above the
  • Phase transformation of the steel substrate Diamond can be applied in a CVD process via the said intermediate layer to steel with good adhesion.
  • the increase in volume of the steel during the back-conversion ⁇ -> ⁇ during cooling at least partially compensates for the lower thermal contraction of the diamond during cooling, and thus the chemical adhesion produced at high temperatures by covalent bonding between the diamond and chromium carbide interlayers is retained.
  • stable diamond layer thicknesses in the single-digit ⁇ range were applied.
  • the covalent chemical bonds between the chromium carbides and diamond formed during CVD coating on the one hand and the anchoring of the intermediate chromium carbide layer with the chromium diffused into the steel substrate on the other hand can be used for the adhesion of the diamond layer.
  • the diamond layer itself provides the desired, well-adhering and very hard surface.
  • JC Bareiss, G. hackl, N. Popovska, SM Rosiwal, RF Singer “Surface and Coatings Technology", page 718, 201 (2006) discloses depositing a diamond layer by CVD on a titanium boron nitride (TiBN) interlayer on steel substrates
  • TiBN titanium boron nitride
  • the combination with a TiBN interlayer of a small layer thickness of about 6 ⁇ m and a diamond layer deposited thereon of 3.5 ⁇ m on the basis of 41 Cr4 in the temperature range described above produces an excellently adhering diamond layer which, compared with the prior art, has substantially better mechanical properties, in particular high hardness, for ultrasound-radiating surfaces,
  • the covalent chemical bonds between the boron nitride and the diamond in the case of the temperatures above the ⁇ - ⁇ phase transformation by means of CVD diamond deposition remain Cooled, since Lumenkuddling the steel in the re-conversion ⁇ -> ⁇ during cooling, the lower thermal contraction of the
  • the intermediate layers in both cases also fulfill the function of a diffusion barrier against the outdiffusion of iron and carbon into the steel substrate, which is known to be both poor in iron-catalyzed formation promote adhering graphite layers on the steel substrate surface.
  • a diamond layer can be deposited thereon, it does not sufficiently adhere to the steel substrate with the intermediate graphite layer.
  • both intermediate layers have thermal expansion coefficients between those z.
  • martensitic steel substrates ⁇ 1 2x10 “6 K “ 1
  • the diamond ((1-5) x10 6 K “1 ) between space and CVD process temperature.
  • EP 1 358 363 B1 discloses diamond coatings on reactor walls and processes for their production.
  • components of (plasma) vacuum process reactors for the treatment of semiconductors and as an object of the invention to improve the corrosion resistance of the surfaces of these components (reactor walls, substrate supports, gassing devices Heating elements, etc.) called by diamond or diamond-like coatings.
  • the object of the invention is to provide functional elements with a surface which undergoes no removal by ultrasound-induced cavitation erosion, at least at sufficiently good performance of the coating, and which at the same time is sufficiently resilient mechanically, statically and dynamically as, in particular, ultrasound radiating surface in liquids.
  • the solution is thus to provide and apply a multi-layered functional element with a surface coating, wherein the functional element comprises a steel substrate and on the steel substrate at least one applied by means of CVD or similar methods, with him chemically bonded intermediate layer and another layer, with the Intermediate layer is also chemically bonded, is provided - namely a diamond layer.
  • the functional elements as ultrasound radiating surfaces which have this structure of the multiple layering, have a significantly longer service life and, associated therewith, a higher service life.
  • a particular advantageous application of the invention is the functional element or Articles containing this multiple layering, namely a steel substrate with an intermediate layer z.
  • transient cavitation with shockwaves and micro-jets generated by imploding bubbles is considered as the cause causing cavitation erosion of the ultrasound radiating surface. Therefore, the mechanical stability of the diamond layer with its high compressive stress is in the foreground and it should be provided. Their strength is required, which with a suitable intermediate layer is above the ultrasound frequency-dependent threshold values of the mechanical energies released during the bubble implosion. Therefore, with regard to the invention, in particular its resistance to ultrasound-induced cavitation erosion of the solid surface at the interface is considered to be solid-liquid.
  • the use of a multilayer functional element with a surface coating is advantageously provided, wherein the functional element consists of a steel substrate and surface coating adjoining the steel substrate.
  • This surface coating comprises at least in part the layer-covering layer element, wherein the layer element comprises at least one intermediate layer chemically bonded to the substrate and finally a diamond layer chemically bonded to the outermost of the intermediate layers.
  • the suitability of the intermediate layer (s) for forming covalent chemical bonds with components in the steel substrate and with the diamond layer is provided.
  • the substrate material is a weldable, non-rusting martensitic carbonaceous chromium steel with ⁇ -> ⁇ phase conversion on cooling from the temperature range of the diamond coating.
  • a corresponding steel sheet can also be provided for this purpose.
  • the steel substrate material may be a chrome steel sheet of material no. 1 .41 1 6 or the designation DIN EN X50 CrMoV15.
  • Essential for the desired property, in particular in order to counteract the ultrasound-induced cavitation erosion, is the adhesion of the diamond layer, at least indirectly with respect to the substrate.
  • Swing plates require a sealing frame, with which they can be screwed with trough-like designs. Therefore, it is necessary to weld the frame, which is provided with bores for screwing, to the steel substrate in order to enable its fluid-tight connection to a cleaning trough.
  • the steel substrate as a so-called sonotrode with a multiple coating covering at least the ultrasound radiating surface and consisting of a combination of titanium boron nitride or chromium carbide intermediate layer with a diamond layer applied thereon.
  • the horn is designed as a steel substrate.
  • the front side is the ultrasound radiating surface of the multiple coating.
  • Figure 1 is a schematic side view of a part of a functional element together with an ultrasonic transducer and a part of the schematically indicated liquid.
  • FIG. 2 shows an enlarged view of the embodiment of the functional element according to FIG. 1 and according to FIG. 3, consisting of the substrate, the intermediate and diamond layer;
  • FIGS. 1 and 2 shows a schematic view of an ultrasonic horn, the part of which is immersed in the liquid to be sonicated and is often designed to be exchangeable, also referred to as sonotrode, with the substrate, the intermediate layer and the diamond layer according to FIGS. 1 and 2. Description of an embodiment
  • a functional element 1 is shown.
  • the functional element 1 serves to couple the sound generated by an ultrasonic transducer 2, which is directly connected to the functional element 1, into a liquid 4 present on the side of the functional element 1 facing away from the ultrasonic transducer 2.
  • the coupled sound (shown schematically in the form of sound propagation lines 5) propagates within the liquid 4.
  • transient cavitation represented by bubbles 6 is generated in the liquid 4, also near the sound-radiating surface, which is responsible for the cavitation erosion on this surface on the side facing the liquid 4.
  • FIG. 2 shows an enlarged illustration of the embodiment of the functional element 1 according to the invention.
  • the functional element 1 consists of the steel substrate 1 a and at least two layers, namely an intermediate layer 1 b and another layer, namely a diamond layer 1 c.
  • the substrate 1 a is a stainless martensitic chromium steel with ⁇ -> ⁇ phase conversion on cooling from the temperature range of the diamond coating, which is preferably weldable.
  • This illustrated functional element 1 with ultrasonic transducers 2 is used on a framed cutout on the bottom or on the side walls of a tub and screwed to it with the use of seals.
  • the functional element 1 in turn on a converted frame.
  • substrate 1 a is weldable, so that a corresponding frame with threaded holes can be tightly fixed.
  • the diamond layer 1 c is provided on the liquid-facing side.
  • This diamond layer 1 c is a very hard layer which is in direct contact with the liquid 4. It is itself of such high strength and adheres so well that the shock waves and micro-liquid jets of micro-implosions, which cause the bubbles 6, for example, ultrasound-induced transient cavitation, no damage to this layer 1 c so cause neither cracks nor their replacement.
  • this layer 1 c enters into a chemical and mechanical connection with the intermediate layer 1 b, wherein the intermediate layer 1 b consists of titanium boron nitride (TiBN).
  • This layer 1 b which can be produced by CVD deposition on the substrate 1 a, is also a thermal stress balancing link between the substrate 1 a and the diamond layer 1 c and avoids that damage by the different thermal expansion coefficients (cracks, flaking ) of steel substrate 1 a and diamond layer 1 c arise.
  • the substrate 1a preferably consists of chromium steel sheet, for example a substance with the active ingredient no .: 1 .41 16 (DIN EN X50 CrMoVI 5).
  • chromium steel sheet for example a substance with the active ingredient no .: 1 .41 16 (DIN EN X50 CrMoVI 5).
  • other carbon-containing martensitic chromium steels with ⁇ -> ⁇ phase conversion can be used when cooled from the temperature range of the diamond coating.
  • the steel types differ in terms of their weldability.
  • a multi-layer functional element which is suitable for coupling power ultrasound into a liquid and which has flawlessly applied coatings having the properties of resisting cavitation erosion and, at the same time, the conditions on the supporting substrate of such functional elements as already described are known in the art (weldable and mountable to the corresponding trough-like configurations), met.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

La présente invention concerne un dispositif et/ou l'utilisation en tant que revêtement de protection contre l'érosion par cavitation, d'un élément fonctionnel (1) multicouche présentant un revêtement de surface, l'élément fonctionnel (1) comprenant un substrat (1a) et le revêtement de surface comprenant un élément en couches qui recouvre au moins en partie le substrat (1a), l'élément en couches comprenant au moins une couche intermédiaire (1b) reliée au substrat, suivie d'une couche de diamant (1c) reliée à la couche intermédiaire située la plus vers l'extérieur.
PCT/IB2010/003240 2009-12-14 2010-12-14 Dispositif et utilisation d'éléments fonctionnels comprenant un revêtement de diamant sur des couches intermédiaires recouvrant des substrats en tant qu'éléments fonctionnels présentant un revêtement de protection contre l'érosion par cavitation Ceased WO2011073767A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009044876A DE102009044876A1 (de) 2009-12-14 2009-12-14 Verwendung von Funktionselementen mit Diamantbeschichtung auf Zwischenschichten auf Stahlsubstraten als Funktions- elemente mit Schutzbeschichtung gegen Kavitationserosion
DE102009044876.4 2009-12-14

Publications (2)

Publication Number Publication Date
WO2011073767A2 true WO2011073767A2 (fr) 2011-06-23
WO2011073767A3 WO2011073767A3 (fr) 2011-11-17

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PCT/IB2010/003240 Ceased WO2011073767A2 (fr) 2009-12-14 2010-12-14 Dispositif et utilisation d'éléments fonctionnels comprenant un revêtement de diamant sur des couches intermédiaires recouvrant des substrats en tant qu'éléments fonctionnels présentant un revêtement de protection contre l'érosion par cavitation

Country Status (2)

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DE (1) DE102009044876A1 (fr)
WO (1) WO2011073767A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015106343A1 (de) * 2015-04-24 2016-10-27 Weber Ultrasonics Gmbh Vorrichtung und Verfahren zum Entgraten von Bauteilen mittels Ultraschall
CN112522701B (zh) * 2020-11-26 2022-10-21 太仓史密斯理查森精密制造有限公司 一种用于芯撑的消泡型表面处理工艺

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2670690A1 (fr) 1990-12-20 1992-06-26 Bandelin Electronic Gmbh Co Kg Sonotrode avec couche de protection contre la cavitation.
EP1358363B1 (fr) 2000-12-29 2008-07-16 Lam Research Corporation Revetements de diamant sur paroi de reacteur et procede de fabrication de ceux-ci

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61139696A (ja) * 1984-12-10 1986-06-26 Fuji Photo Film Co Ltd 超音波エロ−ジヨンの防止方法
JPH02233184A (ja) * 1989-03-03 1990-09-14 Brother Ind Ltd 超音波振動子
AU646266B2 (en) * 1990-09-27 1994-02-17 General Electric Company CVD diamond coated ultrasonic probe tips

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2670690A1 (fr) 1990-12-20 1992-06-26 Bandelin Electronic Gmbh Co Kg Sonotrode avec couche de protection contre la cavitation.
DE4041365A1 (de) 1990-12-20 1992-07-02 Bandelin Electronic Gmbh & Co Sonotrode mit kavitationsschutzschicht
EP1358363B1 (fr) 2000-12-29 2008-07-16 Lam Research Corporation Revetements de diamant sur paroi de reacteur et procede de fabrication de ceux-ci

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
J.C. BAREISS; G. HACKL; N. POPOVSKA; S.M. ROSIWAL; R.F. SINGER, SURFACE AND COATINGS TECHNOLOGY, 2006, pages 718
J.C. BAREISS; G. HACKL; N. POPOVSKA; S.M. ROSIWAL; R.F. SINGER, SURFACE AND COATINGS TECHNOLOGY, 2006, pages 718,201
K. KELLERMANN; J. C. BAREISS; S. M. ROSIWAL; R. F. SINGER, ADVANCED ENGINEERING MATERIALS, 2008, pages 657

Also Published As

Publication number Publication date
DE102009044876A8 (de) 2011-11-17
WO2011073767A3 (fr) 2011-11-17
DE102009044876A1 (de) 2011-06-16

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