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WO2011058481A3 - Particle sensor - Google Patents

Particle sensor Download PDF

Info

Publication number
WO2011058481A3
WO2011058481A3 PCT/IB2010/054998 IB2010054998W WO2011058481A3 WO 2011058481 A3 WO2011058481 A3 WO 2011058481A3 IB 2010054998 W IB2010054998 W IB 2010054998W WO 2011058481 A3 WO2011058481 A3 WO 2011058481A3
Authority
WO
WIPO (PCT)
Prior art keywords
airborne particles
unit
filtration unit
charge
particle sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IB2010/054998
Other languages
French (fr)
Other versions
WO2011058481A2 (en
Inventor
Johannes Marra
Siebe-Jan Van Der Hoef
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of WO2011058481A2 publication Critical patent/WO2011058481A2/en
Publication of WO2011058481A3 publication Critical patent/WO2011058481A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0266—Investigating particle size or size distribution with electrical classification
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2247—Sampling from a flowing stream of gas

Landscapes

  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

The invention relates to a particle sensor for sensing airborne particles, having an improved detection limit for particles larger than about 10 nm, so that it may be used in a clean room of ISO-3 Class standard or higher. The particle sensor (100) comprises an air inlet (110) for entry of an air flow (120) comprising the airborne particles (121), a charging unit (130) for electrically charging at least part of the airborne particles (121) to create electrically charged airborne particles (122), an electrically insulated filtration unit (140) for filtering the electrically charged airborne particles (122) at least partly from the air flow (120), a sensing unit (150) for generating a sensor signal (151) based on the amount of electrically charged airborne particles (122) filtered by the filtration unit (140), and an evaluation unit (160) for deriving, from the sensor signal (151), data relating to the electrically charged airborne particles (122) filtered from the air flow (120) by the filtration unit (140). According to the invention, the particle sensor (100) further comprises a switch (190) between the filtration unit (140) and the sensing unit (150), to enable the particle sensor (100) to be operated in a charge accumulation mode wherein the switch (190) is open during a charge accumulation time to accumulate electric charge in the filtration unit (140), and in a charge release mode wherein the switch (190) is closed during a charge release time to release the accumulated electric charge from the filtration unit (140) into the sensing unit (150), the charge accumulation time being larger than the charge release time by at least a factor of 10.
PCT/IB2010/054998 2009-11-10 2010-11-04 Particle sensor Ceased WO2011058481A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP09175539 2009-11-10
EP09175539.7 2009-11-10

Publications (2)

Publication Number Publication Date
WO2011058481A2 WO2011058481A2 (en) 2011-05-19
WO2011058481A3 true WO2011058481A3 (en) 2011-07-14

Family

ID=43606421

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2010/054998 Ceased WO2011058481A2 (en) 2009-11-10 2010-11-04 Particle sensor

Country Status (1)

Country Link
WO (1) WO2011058481A2 (en)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2308522A (en) * 1939-08-22 1943-01-19 Tung Sol Lamp Works Inc Thermal relay switch
US4556849A (en) * 1983-03-01 1985-12-03 Vsesojuzny Nauchno-Issledovatelsky Institut Nerudnykh Stroitelnykh Materialov Gidromekhanizatsii Apparatus for measuring the grain-size composition of powders
US5214386A (en) * 1989-03-08 1993-05-25 Hermann Singer Apparatus and method for measuring particles in polydispersed systems and particle concentrations of monodispersed aerosols
DE19517314A1 (en) * 1995-05-04 1996-11-07 Brose Fahrzeugteile Thermal relay for excess current and temp control
WO2007000710A2 (en) * 2005-06-28 2007-01-04 Koninklijke Philips Electronics N.V. Ultra fine particle sensor
US20080105567A1 (en) * 2006-11-08 2008-05-08 Honda Motor Co., Ltd. Sensing device and method
WO2008111677A1 (en) * 2007-03-15 2008-09-18 Ngk Insulators, Ltd. Granular substance detector and granular substance detecting method
WO2009074943A1 (en) * 2007-12-12 2009-06-18 Koninklijke Philips Electronics N.V. Device for characterizing a size distribution of electrically-charged airborne particles in an air flow
WO2009109688A1 (en) * 2008-03-04 2009-09-11 Pegasor Oy Particle measurement process and apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1781481B1 (en) 2004-08-11 2009-04-15 Koninklijke Philips Electronics N.V. Air pollution sensor system

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2308522A (en) * 1939-08-22 1943-01-19 Tung Sol Lamp Works Inc Thermal relay switch
US4556849A (en) * 1983-03-01 1985-12-03 Vsesojuzny Nauchno-Issledovatelsky Institut Nerudnykh Stroitelnykh Materialov Gidromekhanizatsii Apparatus for measuring the grain-size composition of powders
US5214386A (en) * 1989-03-08 1993-05-25 Hermann Singer Apparatus and method for measuring particles in polydispersed systems and particle concentrations of monodispersed aerosols
DE19517314A1 (en) * 1995-05-04 1996-11-07 Brose Fahrzeugteile Thermal relay for excess current and temp control
WO2007000710A2 (en) * 2005-06-28 2007-01-04 Koninklijke Philips Electronics N.V. Ultra fine particle sensor
US20080105567A1 (en) * 2006-11-08 2008-05-08 Honda Motor Co., Ltd. Sensing device and method
WO2008111677A1 (en) * 2007-03-15 2008-09-18 Ngk Insulators, Ltd. Granular substance detector and granular substance detecting method
WO2009074943A1 (en) * 2007-12-12 2009-06-18 Koninklijke Philips Electronics N.V. Device for characterizing a size distribution of electrically-charged airborne particles in an air flow
WO2009109688A1 (en) * 2008-03-04 2009-09-11 Pegasor Oy Particle measurement process and apparatus

Also Published As

Publication number Publication date
WO2011058481A2 (en) 2011-05-19

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