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WO2011051334A3 - Verfahren zur aufarbeitung von sägerückständen aus der produktion von silizium-wafern - Google Patents

Verfahren zur aufarbeitung von sägerückständen aus der produktion von silizium-wafern Download PDF

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Publication number
WO2011051334A3
WO2011051334A3 PCT/EP2010/066255 EP2010066255W WO2011051334A3 WO 2011051334 A3 WO2011051334 A3 WO 2011051334A3 EP 2010066255 W EP2010066255 W EP 2010066255W WO 2011051334 A3 WO2011051334 A3 WO 2011051334A3
Authority
WO
WIPO (PCT)
Prior art keywords
production
silicon wafers
residue
silicon
processing saw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2010/066255
Other languages
English (en)
French (fr)
Other versions
WO2011051334A2 (de
Inventor
Oliver Pikhard
Marco Scholz
Thomas Melin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rheinisch Westlische Technische Hochschuke RWTH
Original Assignee
Rheinisch Westlische Technische Hochschuke RWTH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rheinisch Westlische Technische Hochschuke RWTH filed Critical Rheinisch Westlische Technische Hochschuke RWTH
Publication of WO2011051334A2 publication Critical patent/WO2011051334A2/de
Publication of WO2011051334A3 publication Critical patent/WO2011051334A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/037—Purification
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
    • C01B33/10757—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane
    • C01B33/10763—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane from silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)

Abstract

Die Erfindung betrifft ein Verfahren zur Aufarbeitung von Sägerückständen aus der Produktion von Silizium-Wafern, umfassend die folgenden Schritte: a) Versetzen der Sägerückstände aus der Produktion von Silizium-Wafern umfassend feinkörniges Silizium und feinkörniges Siliziumcarbid mit Flusssäure, b) Filtern der mit einem Lösungsmittel versetzten Reaktionsmischung aus Schritt a), c) Trocknen der Filterrückstände und d) Durchströmen der aus Schritt c) erhaltenen Feststoffmischung mit Chlorwasserstoff sowie die Verwendung des Verfahrensprodukts zur Herstellung von hochreinen Siliziumblöcken für die Waferproduktion.
PCT/EP2010/066255 2009-10-30 2010-10-27 Verfahren zur aufarbeitung von sägerückständen aus der produktion von silizium-wafern Ceased WO2011051334A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200910046265 DE102009046265A1 (de) 2009-10-30 2009-10-30 Verfahren zur Aufarbeitung von Sägerückständen aus der Produktion von Silizium-Wafern
DE102009046265.1 2009-10-30

Publications (2)

Publication Number Publication Date
WO2011051334A2 WO2011051334A2 (de) 2011-05-05
WO2011051334A3 true WO2011051334A3 (de) 2011-07-07

Family

ID=43629999

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2010/066255 Ceased WO2011051334A2 (de) 2009-10-30 2010-10-27 Verfahren zur aufarbeitung von sägerückständen aus der produktion von silizium-wafern

Country Status (2)

Country Link
DE (1) DE102009046265A1 (de)
WO (1) WO2011051334A2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9061439B2 (en) 2008-08-04 2015-06-23 Semlux Technologies, Inc. Recovery of silicon from kerf silicon waste

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011115081B4 (de) 2011-09-19 2017-08-31 Baufeld-Mineralölraffinerie GmbH Verfahren zur Gewinnung von Solarsilizium aus Sägeabfällen
DE102012015417B4 (de) 2012-08-02 2018-08-16 Technische Universität Bergakademie Freiberg Verfahren zur Aufarbeitung von Sägerückständen aus der Produktion von Siliciumwafern

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001042136A1 (en) * 1999-12-08 2001-06-14 Elkem Asa Refining of metallurgical grade silicon
EP1942077A1 (de) * 2005-07-04 2008-07-09 Sharp Kabushiki Kaisha Verfahren zur rezyklierung von silicium, dadurch hergestelltes silicium und siliciumstab
WO2008133525A1 (en) * 2007-04-25 2008-11-06 Norsk Hydro Asa A process for the recycling of high purity silicon metal
WO2010017231A1 (en) * 2008-08-04 2010-02-11 Hariharan Alleppey V Method to convert waste silicon to high purity silicon

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3317286A1 (de) * 1983-05-11 1984-11-22 Heliotronic Forschungs- und Entwicklungsgesellschaft für Solarzellen-Grundstoffe mbH, 8263 Burghausen Verfahren zur reinigung von silicium durch saeureeinwirkung
DD240729A1 (de) * 1985-09-04 1986-11-12 Akad Wissenschaften Ddr Verfahren zur gewinnung von hochreinem siliziumpulver
JP3296781B2 (ja) * 1998-04-21 2002-07-02 信越半導体株式会社 水性切削液、その製造方法、ならびにこの水性切削液を用いた切削方法
US6780665B2 (en) * 2001-08-28 2004-08-24 Romain Louis Billiet Photovoltaic cells from silicon kerf
DE102004017453A1 (de) * 2004-04-08 2005-10-27 Wacker-Chemie Gmbh Verfahren zur Herstellung von Trichlormonosilan
CN103481383A (zh) * 2008-04-11 2014-01-01 伊奥西尔能源公司 从废弃的晶片锯切浆回收硅和碳化硅的方法和设备

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001042136A1 (en) * 1999-12-08 2001-06-14 Elkem Asa Refining of metallurgical grade silicon
EP1942077A1 (de) * 2005-07-04 2008-07-09 Sharp Kabushiki Kaisha Verfahren zur rezyklierung von silicium, dadurch hergestelltes silicium und siliciumstab
WO2008133525A1 (en) * 2007-04-25 2008-11-06 Norsk Hydro Asa A process for the recycling of high purity silicon metal
WO2010017231A1 (en) * 2008-08-04 2010-02-11 Hariharan Alleppey V Method to convert waste silicon to high purity silicon

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9061439B2 (en) 2008-08-04 2015-06-23 Semlux Technologies, Inc. Recovery of silicon from kerf silicon waste

Also Published As

Publication number Publication date
DE102009046265A1 (de) 2011-05-19
WO2011051334A2 (de) 2011-05-05

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