WO2010124781A2 - Furnace for producing photovoltaic thin-film cells - Google Patents
Furnace for producing photovoltaic thin-film cells Download PDFInfo
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- WO2010124781A2 WO2010124781A2 PCT/EP2010/002141 EP2010002141W WO2010124781A2 WO 2010124781 A2 WO2010124781 A2 WO 2010124781A2 EP 2010002141 W EP2010002141 W EP 2010002141W WO 2010124781 A2 WO2010124781 A2 WO 2010124781A2
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- furnace
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
Definitions
- the invention relates to a furnace for the production of photovoltaic thin-film cells with
- a conveyor system comprising a plurality of support rollers, with which substrate plates can be conveyed through the furnace housing;
- Photovoltaic thin-film cells increasingly solve the older photovoltaic cells, in which the semiconductor material causing the conversion of light into electricity should be in monocrystalline state as possible.
- Thin-film technology uses amorphous semiconductor layers that are less than ten microns thick a thick can. They can be produced in a furnace in a continuous continuous process, as explained in more detail in DE 693 34 189 T2. Pure annealing processes without material application can also be carried out in such an oven.
- controlled atmosphere a different atmosphere from the outer, normal pressure atmosphere, the parameters of which are adapted to the physical / chemical processes occurring within the oven casing during coating.
- Controlled atmosphere may, in particular, be an atmosphere with pressure modified with respect to normal pressure and / or an atmosphere with a special gas, in particular protective or inert gas.
- the drive means for the conveyor system is arranged outside the gas-tight envelope in normal atmosphere;
- the storage device is so tightly integrated into the gas-tight envelope that the sealing means contained in it represent separation points between the controlled atmosphere in the interior of the gas-tight envelope and outside atmosphere.
- the drive means for the transport rollers of the conveyor system is taken out of the gas-tight envelope, components can be used for them as they are commercially available and adapted to operate in normal atmosphere and at moderate temperatures.
- the separation between the controlled atmosphere located inside the gas-tight envelope and the outside atmosphere takes place, as far as it is not already ensured by the gas-tight envelope is, in the storage device itself, in which the driven ends of the support rollers are mounted.
- the drive rollers driving the support rollers are easy to seal, lighter as well as, in and of itself obvious seal the support rollers even against the furnace wall when passing through them. This is not only dependent on the higher temperature prevailing in the furnace wall, but also on the fact that the carrying rollers consist of a material, in particular ceramic, whose dimensional accuracy and surface quality do not readily permit a problem-free sealing.
- the present invention which consists of a cheaper material, in particular metal, and whose outer surface to be sealed is smooth and well dimensionally stable.
- the quality of the seal also affects the geographic proximity between the bearing and the point of the seal.
- the bearing device comprises at least one bearing block, which can be pressed against the outer surface of the gas-tight envelope with the interposition of at least one seal for each supporting roller mounted in it.
- each bearing block stores only one support role.
- a good seal of the bearing block against the drive shaft and between bearing block and gas-tight envelope can be achieved particularly easily.
- the bearing block supports a multiplicity of carrying rollers, in particular all carrying rollers present in the conveying system.
- Each bearing block can have an interior for each supporting roller mounted in it, in which the end of the carrying roller located there is connected via a coupling to a drive shaft. In this way, the bearing block simultaneously provides a shelter for the connection point between the support roller itself and the corresponding drive shaft.
- each support roller is carried out by storage of a drive shaft connected to it in the storage facility.
- the reasons for this lie again in the different surface textures and dimensional accuracy of the idlers and the drive shafts.
- FIG. 1 shows a horizontal section through an oven for producing photovoltaic thin-film cells in the region of a lateral longitudinal wall;
- Figure 2 is an enlarged detail of Figure 1;
- FIG. 3 shows, on a somewhat larger scale, a vertical section through the furnace of FIGS. 1 and 2 according to the line III-III there;
- FIG. 4 shows a detail enlargement from FIG. 3.
- the furnace described below with reference to the drawing and provided with the reference numeral 1 in its basic structure is similar to that described in DE 693 34 189 T2 already mentioned above. Reference is additionally made to this document. This applies in particular to all devices with which those substances are introduced into the furnace 1 or produced in the furnace 1, which are to be applied to the substrate plates moved through the furnace 1. Also omitted are all devices that serve to generate the desired controlled inside the furnace 1 atmosphere, so for example, vacuum pumps or lines through which a protective gas can be supplied.
- the furnace 1 differs from the known essentially only in the region which is shown in Figure 1 and described in more detail below.
- the rough structure of the furnace 1 can be seen particularly well in FIG. It shows a furnace housing 2, which in turn comprises an inner, relatively thick insulating layer 3 of mineral wool and a gas-tight envelope 4 of sheet material surrounding the insulating layer 3.
- the vertical side walls 5, 6 are constructed in this way.
- the entire furnace housing 2 is slightly elevated above the room floor on a steel structure 7.
- the substrate plates to be coated are moved through the oven housing 2 by means of a roller conveyor system 8; the conveying direction is assumed in Figure 1 from left to right in the direction of arrow 9.
- the conveyor system 8 comprises a plurality of support rollers 10, which are arranged parallel to one another and spaced apart from one another, made of a suitable, temperature-resistant material, for example ceramic.
- the support rollers 10 extend perpendicular to the two side walls 5, 6 of the furnace housing 2 and are guided with their end portions by entspechende openings 11 in the side walls 5, 6.
- the over the side walls 5, 6 outwardly projecting end portions of the support rollers 10 are mounted in the manner described below:
- Bearing in designed as a floating bearing conventional ball or roller bearings, which allow an axial movement of the support rollers 10 and of which in Figure 3 only one is shown schematically and provided with the reference numeral 12.
- a bulge 4 a of the shell 4 surrounds the protruding ends of the support rollers 10, so that a gas-tight separation between the outside atmosphere and the inside of the shell 4 existing controlled atmosphere is ensured here.
- Support rollers 10 extend, are not even gas-tight.
- a bulge 4b of the shell 4 is provided, which overlaps and surrounds the insulating layer 35 and the region of the support roller 10 passing therethrough.
- the driven end region of each support roller 10 shown in FIG. 4 is passed through a hole 14 of the bulge 4b.
- This implementation is not gas-tight itself.
- the support roller 10 by means of a coupling 15, the exact structure is not of interest here, rotationally connected to a drive shaft 16.
- the end of the support roller 10 and the clutch 15 are in a cup-shaped interior 18 of a
- the drive shaft 16 is passed through a coaxial bore 19 of the bearing block 17 and supported therein by means of a bearing 36. Only a little further out, between the drive shaft 16 and the lateral surface of the bore 19, there are two sealing rings 20, which here for a gas-tight separation between the external atmosphere and the control element present inside the sleeve 4. atmosphere.
- the bearing block 17 in turn is supported by a U-shaped profile sheet 21. This is displaced with its base on a flat, horizontal surface of a strut 37, which is fixed in height adjustable on a boom 22 of the steel structure 7.
- the bearing block 17 On its front side facing the bulge 4b, the bearing block 17 carries, for each support roller 10, a ring seal 23 in a groove not provided with reference numerals. The entire bearing block 17 is pressed by means of a clamping device 24 against the outer surface of the bulge 4b so that takes place at this point a gas-tight separation between the outside atmosphere and the inner controlled atmosphere.
- the clamping device 24 comprises an upper angle plate 25 and a lower angle plate 26, which on the upper or lower horizontal surface of the bulge
- a clamping plate 27 has an upper, planar leg 27a and an aligned therewith lower planar leg 27b, which by a surrounding the outer region of the bearing block 17
- Bulge 27c are connected.
- the drive shafts 16 are led out through openings 38 of the bulge 27 c of the clamping plate 27.
- the drive shafts 16 are set in rotation by a drive device, indicated overall by the reference numeral 29, which lies completely outside the controlled atmosphere in normal atmosphere and will now be described in more detail in particular with reference to FIGS. 1 and 2.
- the actual drive source for the drive device 29 is an electric geared motor 30 with two opposite, aligned output shafts, which can each set a parallel to the longitudinal wall 6 extending main shaft 31 in rotation.
- Each main shaft 31 acts with several cross gears
- each of these cross gear 32 is guided parallel to the main shaft 31 king shaft 33 in rotation.
- Each of these king shafts 33 is associated with a certain number of drive shafts 16 and thus of idlers 10, which can be driven in this way.
- the king shafts 33 cooperate with the ends of the corresponding drive shafts 16 via suitable, known transmissions.
- the drive shafts 16 are in two parts, wherein the two aligned parts are connected by a Axialausdehnitch the drive shaft 16 female coupling 34 with each other.
- Both the electric geared motor 30 and the crossed gears 32 and finally those parts which support the king shafts 33 are also fixed to and supported by the boom 22 of the steel structure.
- a controlled atmosphere which, as already indicated above and explained in detail in DE 693 34 189 D2, is a gas filling with a pressure that is different from normal pressure and / or a suitable inert gas For example, carbon dioxide, nitrogen or inert gas, can act.
- This controlled atmosphere is permanently maintained by the gas-tight sheath 4 with its bulges 4a and 4b and the driven end portions of the support rollers 10 encompassing bearing block 17.
- suitable locks are provided, which are not shown and described in detail here and ensure that the introduction of the substrate plates and the application of the coated substrate plates, the loss of controlled atmosphere is kept as low as possible.
- the requirements for the cost of the drive device 29 can be significantly reduced; the susceptibility of the drive device 29 is reduced
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Abstract
Description
Ofen zur Herstellung von photovoltaischen Dünnschichtzellen ========================================= Furnace for producing thin-film photovoltaic cells =====================================
Die Erfindung betrifft einen Ofen zur Herstellung von photovoltaischen Dünnschichtzellen mitThe invention relates to a furnace for the production of photovoltaic thin-film cells with
a) einem Ofengehäuse, dessen Wand eine Isolierschicht umfasst ;a) a furnace housing whose wall comprises an insulating layer;
b) einer das Ofengehäuse umgebenden gasdichten Hülle, in deren Innenraum eine kontrollierte Atmosphäre vorliegt;b) a gas-tight envelope surrounding the furnace housing, in the interior of which there is a controlled atmosphere;
c) einem eine Vielzahl von Tragrollen umfassenden Fördersystem, mit dem Substratplatten durch das Ofengehäuse förderbar sind;c) a conveyor system comprising a plurality of support rollers, with which substrate plates can be conveyed through the furnace housing;
d) einer Antriebseinrichtung für das Fördersystem, welche jeweils an einem Endbereich jeder Tragrolle angreift, um diese in Drehung zu versetzen;d) a drive means for the conveyor system, which engages in each case at an end region of each support roller in order to set these in rotation;
e) mindestens einer die kontrollierte Atmosphäre ime) at least one controlled atmosphere in the
Innenraum des Ofengehäuses auf Arbeitstemperatur bringenden Heizeinrichtung.Interior of the furnace housing on working temperature heating device.
In jüngster Zeit lösen sog. photovoltaische Dünnschicht- zellen zunehmend die älteren photovoltaischen Zellen ab, bei denen das die Umwandlung von Licht in elektrischen Strom bewirkende Halbleitermaterial möglichst in einkristallinem Zustand vorliegen sollte. Bei der Dünnschicht -Technologie werden amorphe Halbleiter- schichten eingesetzt, die weniger als zehn Mikron dick ein können. Sie können in einem Ofen in einem kontinuierlichen Durchlaufverfahren hergestellt werden, wie dies etwa in der DE 693 34 189 T2 näher erläutert ist. In einem solchen Ofen können auch reine Glühpro- zesse ohne Materialaufbringung durchgeführt werden.Recently, so-called. Photovoltaic thin-film cells increasingly solve the older photovoltaic cells, in which the semiconductor material causing the conversion of light into electricity should be in monocrystalline state as possible. Thin-film technology uses amorphous semiconductor layers that are less than ten microns thick a thick can. They can be produced in a furnace in a continuous continuous process, as explained in more detail in DE 693 34 189 T2. Pure annealing processes without material application can also be carried out in such an oven.
Von Bedeutung im vorliegenden Zusammenhang ist, dass die Herstellung der photovoltaischen Zellen in einer "kontrollierten" Atmosphäre erfolgen muss. Unter einer solchen "kontrollierten" Atmosphäre ist eine von der äußeren, auf Normaldruck befindlichen Atmosphäre unterschiedliche Atmosphäre gemeint, deren Parameter an die innerhalb des Ofengehäuses bei der Beschichtung stattfindenden physikalisch/chemischen Vorgänge angepasst ist. "Kontrollier- te" Atmosphäre kann insbesondere eine Atmosphäre mit gegenüber Normaldruck verändertem Druck und/oder eine Atmosphäre mit einem besonderen Gas, insbesondere Schutz - oder Inertgas, sein.Of importance in the present context is that the production of the photovoltaic cells must be done in a "controlled" atmosphere. By such a "controlled" atmosphere is meant a different atmosphere from the outer, normal pressure atmosphere, the parameters of which are adapted to the physical / chemical processes occurring within the oven casing during coating. "Controlled" atmosphere may, in particular, be an atmosphere with pressure modified with respect to normal pressure and / or an atmosphere with a special gas, in particular protective or inert gas.
Die o. g. Druckschrift beschreibt einen Ofen der eingangs genannten Art . Bei diesem ist die gesamte Antriebseinrichtung für das Fördersystem mit Ausnahme der Motoren selbst innerhalb der gasdichten Hülle angeordnet. Dies bringt einen dreifachen Nachteil mit sich: Zum einen eignen sich die handelsüblichen Antriebseinrichtungen von Haus aus nicht ohne weiteres zum Betrieb in einer "kontrollierten" Atmosphäre im obigen Sinne. Zum zweiten können von der Antriebseinrichtung Verunreinigungen ausgehen, welche die Qualität der hergestellten Produkte beeinträchtigen. Schließlich sind die Komponenten der Antriebseinrichtung beim Gegenstand der DE 693 34 189 T2 auch verhältnismäßig hohen Temperaturen ausgesetzt, was ebenfalls besondere Anforderungen an diese Kompo- nenten stellt. Aufgabe der vorliegenden Erfindung ist es, einen Ofen der eingangs genannten Art so auszugestalten, dass die Antriebseinrichtung preiswerter gehalten werden kann und zuverlässiger arbeitet.The above publication describes a furnace of the type mentioned. In this, the entire drive means for the conveyor system with the exception of the motors itself is arranged inside the gas-tight envelope. This has a threefold disadvantage: on the one hand, the commercially available drive devices are inherently not suitable for operation in a "controlled" atmosphere in the above sense. Secondly, the drive device can emit contaminants which impair the quality of the products produced. Finally, the components of the drive device in the subject matter of DE 693 34 189 T2 are also exposed to relatively high temperatures, which also makes special demands on these components. Object of the present invention is to provide a furnace of the type mentioned in such a way that the drive device can be kept cheaper and works more reliable.
Diese Aufgabe wird erfindungsgemäß dadurch gelöst, dassThis object is achieved in that
f) die Antriebseinrichtung für das Fördersystem außerhalb der gasdichten Hülle in Normalatmosphäre angeordnet ist;f) the drive means for the conveyor system is arranged outside the gas-tight envelope in normal atmosphere;
g) in der Lagereinrichtung, in welcher die mit der Antriebseinrichtung verbundenen Endbereiche der Tragrollen gelagert sind, Dichtungseinrichtungen vorgesehen sind, welche mit den Tragrollen verbundene, zur Antriebseinrichtung führende Antriebswellen gegen die Lagereinrichtung abdichten;g) in the bearing device, in which the end portions of the support rollers connected to the drive means are mounted, sealing means are provided which seal with the support rollers connected, leading to the drive means drive shafts against the bearing means;
h) die Lagereinrichtung in die gasdichte Hülle so dicht eingebunden ist, dass die in ihr enthaltenen Dichtungseinrichtungen Trennstellen zwischen der kontrollierter Atmosphäre im Innenraum der gasdichten Hülle und Außenatmosphäre darstellen.h) the storage device is so tightly integrated into the gas-tight envelope that the sealing means contained in it represent separation points between the controlled atmosphere in the interior of the gas-tight envelope and outside atmosphere.
Dadurch, dass erfindungsgemäß die Antriebseinrichtung für die Transportrollen des Fördersystemes aus der gasdichten Hülle herausgenommen wird, können für sie Komponenten eingesetzt werden, wie sie handelsüblich und an den Betrieb in Normalatmosphäre und bei mäßigen Temperaturen angepasst sind. Die Trennung zwischen der innerhalb der gasdichten Hülle befindlichen kontrollierten Atmosphäre und der Außenatmosphäre erfolgt, soweit sie nicht schon durch die gasdichte Hülle gewährleistet ist, in der Lagereinrichtung selbst, in welcher die angetriebenen Enden der Tragrollen gelagert sind. An dieser Stelle sind die die Tragrollen antreibenden Antriebswellen leicht abzudichten, leichter etwa auch, als die an und für sich naheliegende Dichtung der Tragrollen selbst gegen die Ofenwandung bei der Durchführung durch diese . Dies hängt nicht nur mit der in der Ofenwandung herrschenden höheren Temperatur sondern auch damit zusammen, dass die Tragrollen aus einem Mate- rial, insbesondere Keramik, bestehen, dessen Maßhaltigkeit und Oberflächengüte eine problemlose Abdichtung nicht ohne weiteres zulässt .Characterized in that according to the invention, the drive means for the transport rollers of the conveyor system is taken out of the gas-tight envelope, components can be used for them as they are commercially available and adapted to operate in normal atmosphere and at moderate temperatures. The separation between the controlled atmosphere located inside the gas-tight envelope and the outside atmosphere takes place, as far as it is not already ensured by the gas-tight envelope is, in the storage device itself, in which the driven ends of the support rollers are mounted. At this point, the drive rollers driving the support rollers are easy to seal, lighter as well as, in and of itself obvious seal the support rollers even against the furnace wall when passing through them. This is not only dependent on the higher temperature prevailing in the furnace wall, but also on the fact that the carrying rollers consist of a material, in particular ceramic, whose dimensional accuracy and surface quality do not readily permit a problem-free sealing.
Deshalb wird mit der vorliegenden Erfindung nicht die Tragrolle selbst, sondern eine mit der Tragrolle verbundene Antriebswelle abgedichtet, die aus einem günstigeren Material, insbesondere Metall, besteht und deren abzudichtende Mantelfläche glatt und gut maßhaltig ist. Günstig auf die Qualität der Abdichtung wirkt sich zudem die räumlche Nähe zwischen der Lagerstelle und der Stelle der Abdichtung aus .Therefore, not the support roller itself, but one connected to the support roller drive shaft is sealed with the present invention, which consists of a cheaper material, in particular metal, and whose outer surface to be sealed is smooth and well dimensionally stable. Favorable on the quality of the seal also affects the geographic proximity between the bearing and the point of the seal.
Bei einer vorteilhaften Ausführungsform der Erfindung umfasst die Lagereinrichtung mindestens einen Lagerbock, der unter Zwischenschaltung mindestens einer Dichtung für jede in ihr gelagerte Tragrolle gegen die Außenfläche der gasdichten Hülle andrückbar ist. Auf diese Weise gelingt der gasdichte Anschluss zwischen der gasdichten Hülle und der Lagereinrich- tung in einer Weise, welche zum einen die Herstellung des Ofens aber auch eine ggfs. später zu Wartungszwecken erforderliche Demontage erleichtert.In an advantageous embodiment of the invention, the bearing device comprises at least one bearing block, which can be pressed against the outer surface of the gas-tight envelope with the interposition of at least one seal for each supporting roller mounted in it. In this way, the gas-tight connection between the gas-tight envelope and the storage facility succeeds in a manner which on the one hand facilitates the production of the furnace but also a disassembly which may be required later for maintenance purposes.
Wie viele Tragrollen jeweils in einem Lagerbock gelagert werden, kann nach Zeckmäßigkeitsgesichtspunkten gewählt werden .How many idlers are each stored in a bearing block, can be selected according to Zeckmäßigkeitsgesichtspunkten become .
In vielen Fällen erweist es sich als günstig, wenn jeder Lagerbock nur eine Tragrolle lagert. So lässt sich eine gute Abdichtung des Lagerbocks gegen die Antriebswelle und zwischen Lagerbock und gasdichter Hülle besonders einfach erreichen.In many cases, it proves to be advantageous if each bearing block stores only one support role. Thus, a good seal of the bearing block against the drive shaft and between bearing block and gas-tight envelope can be achieved particularly easily.
Herstellungstechnisch kann es andererseits aber auch besonders günstig sein, wenn der Lagerbock eine Vielzahl von Tragrollen, insbesondere alle im Fördersystem vorhandene Tragrollen, lagert.On the other hand, it can also be particularly favorable in terms of production technology if the bearing block supports a multiplicity of carrying rollers, in particular all carrying rollers present in the conveying system.
Jeder Lagerbock kann für jede in ihr gelagerte Trag- rolle einen Innenraum aufweisen, in welchem das dort befindliche Ende der Tragrolle über eine Kupplung mit einer Antriebswelle verbunden ist. Auf diese Weise stellt der Lagerbock gleichzeitig einen Schutzraum für die Verbindungsstelle zwischen der Tragrolle selbst und der entsprechenden Antriebswelle her.Each bearing block can have an interior for each supporting roller mounted in it, in which the end of the carrying roller located there is connected via a coupling to a drive shaft. In this way, the bearing block simultaneously provides a shelter for the connection point between the support roller itself and the corresponding drive shaft.
Schließlich ist es besonders günstig, wenn die Lagerung jeder Tragrolle durch Lagerung einer mit ihr verbundenen Antriebswelle in der Lagereinrichtung erfolgt. Die Gründe hierfür liegen wieder in den unterschiedlichen Oberflächenbeschaffenheiten und Maßhaltigkeiten der Tragrollen und der Antriebswellen.Finally, it is particularly advantageous if the storage of each support roller is carried out by storage of a drive shaft connected to it in the storage facility. The reasons for this lie again in the different surface textures and dimensional accuracy of the idlers and the drive shafts.
Ein Ausführungsbeispiel der Erfindung wird nachfol- gend anhand der Zeichnung näher erläutert; es zeigenAn embodiment of the invention will be explained in more detail below with reference to the drawing; show it
Figur 1 einen horizontalen Schnitt durch einen Ofen zur Herstellung photovoltaischer Dünnschichtzellen im Bereich einer seitlichen Längswand; Figur 2 eine Detailvergrößerung aus Figur 1 ;1 shows a horizontal section through an oven for producing photovoltaic thin-film cells in the region of a lateral longitudinal wall; Figure 2 is an enlarged detail of Figure 1;
Figur 3 in etwas größerem Maßstab einen vertikalen Schnitt durch den Ofen der Figuren 1 und 2 gemäß der dortigen Linie III-III;FIG. 3 shows, on a somewhat larger scale, a vertical section through the furnace of FIGS. 1 and 2 according to the line III-III there;
Figur 4 eine DetailVergrößerung aus Figur 3.FIG. 4 shows a detail enlargement from FIG. 3.
Der nachfolgend anhand der Zeichnung beschriebene und insgesamt mit dem Bezugszeichen 1 versehene Ofen ähnelt in seinem Grundaufbau demjenigen, der in der oben schon erwähnten DE 693 34 189 T2 beschrieben ist. Auf diese Druckschrift wird ergänzend Bezug genommen. Dies gilt insbesondere für alle Einrichtun- gen, mit denen diejenigen Substanzen in den Ofen 1 eingebracht oder in dem Ofen 1 erzeugt werden, die auf die durch den Ofen 1 bewegten Substratplatten aufgebracht werden sollen. Weggelassen sind außerdem alle Einrichtungen, die der Erzeugung der innerhalb des Ofens 1 gewünschten kontrollierten Atmosphäre dienen, also beispielsweise Vakuumpumpen oder Leitungen, über welche ein Schutzgas zugeführt werden kann. Der Ofen 1 unterscheidet sich von dem bekannten im Wesentlichen nur in dem Bereich, der in Fi- gur 1 dargestellt und nachfolgend näher beschrieben ist.The furnace described below with reference to the drawing and provided with the reference numeral 1 in its basic structure is similar to that described in DE 693 34 189 T2 already mentioned above. Reference is additionally made to this document. This applies in particular to all devices with which those substances are introduced into the furnace 1 or produced in the furnace 1, which are to be applied to the substrate plates moved through the furnace 1. Also omitted are all devices that serve to generate the desired controlled inside the furnace 1 atmosphere, so for example, vacuum pumps or lines through which a protective gas can be supplied. The furnace 1 differs from the known essentially only in the region which is shown in Figure 1 and described in more detail below.
Der grobe Aufbau des Ofens 1 ist besonders gut der Figur 3 zu entnehmen. Sie zeigt ein Ofengehäuse 2, welches seinerseits eine innere, verhältnismäßig dicke Isolierschicht 3 aus Mineralwolle und eine die Isolierschicht 3 umgebende gasdichte Hülle 4 aus Blechmaterial umfasst . Auch die vertikalen Seitenwände 5, 6 sind in dieser Weise aufgebaut . Das gesamte Ofengehäuse 2 steht etwas erhöht über dem Raumboden auf einem Stahlbau 7 .The rough structure of the furnace 1 can be seen particularly well in FIG. It shows a furnace housing 2, which in turn comprises an inner, relatively thick insulating layer 3 of mineral wool and a gas-tight envelope 4 of sheet material surrounding the insulating layer 3. The vertical side walls 5, 6 are constructed in this way. The entire furnace housing 2 is slightly elevated above the room floor on a steel structure 7.
Die zu beschichtenden Substratplatten werden mit Hilfe eines Rollenfördersystemes 8 durch das Ofengehäuse 2 hindurchbewegt; die Förderrichtung sei in Figur 1 von links nach rechts im Sinne des Pfeiles 9 angenommen.The substrate plates to be coated are moved through the oven housing 2 by means of a roller conveyor system 8; the conveying direction is assumed in Figure 1 from left to right in the direction of arrow 9.
Das Fördersystem 8 umfasst eine Vielzahl von parallel zueinander, in Abstand voneinander angeordneten Tragrollen 10 aus einem geeigneten, temperaturbeständigen Material, beispielsweise Keramik. Die Tragrollen 10 erstrek- ken sich senkrecht zu den beiden Seitenwänden 5, 6 des Ofengehäuses 2 und sind mit ihren Endbereichen durch entspechende Öffnungen 11 in den Seitenwänden 5, 6 hindurchgeführt. Die über die Seitenwände 5, 6 nach außen vorstehenden Endbereiche der Tragrollen 10 sind in nachfolgend beschriebener Weise gelagert:The conveyor system 8 comprises a plurality of support rollers 10, which are arranged parallel to one another and spaced apart from one another, made of a suitable, temperature-resistant material, for example ceramic. The support rollers 10 extend perpendicular to the two side walls 5, 6 of the furnace housing 2 and are guided with their end portions by entspechende openings 11 in the side walls 5, 6. The over the side walls 5, 6 outwardly projecting end portions of the support rollers 10 are mounted in the manner described below:
Die in Figur 3 linken Endbereiche der Tragrollen 10, die in den Figuren 1 und 2 nicht gezeigt sind, finden ihreThe left in Figure 3 end portions of the support rollers 10, which are not shown in Figures 1 and 2, find their
Lagerung in als Loslager ausgebildeten herkömmlichen Kugel - oder Wälzlagern, die eine Axialbewegung der Tragrollen 10 zulassen und von denen in Figur 3 nur eine schematisch dargestellt und mit dem Bezugszeichen 12 versehen ist. Eine Ausbuchtung 4a der Hülle 4 umgibt dabei die überstehenden Enden der Tragrollen 10, so dass auch hier eine gasdichte Trennung zwischen der Außenatmosphäre und der im Inneren der Hülle 4 bestehenden kontrollierten Atmosphäre gewährleistet ist. Die Öffnungen 11 inner- halb der Seitenwände 5, 6, durch welche sich dieBearing in designed as a floating bearing conventional ball or roller bearings, which allow an axial movement of the support rollers 10 and of which in Figure 3 only one is shown schematically and provided with the reference numeral 12. A bulge 4 a of the shell 4 surrounds the protruding ends of the support rollers 10, so that a gas-tight separation between the outside atmosphere and the inside of the shell 4 existing controlled atmosphere is ensured here. The openings 11 within the side walls 5, 6, through which the
Tragrollen 10 erstrecken, sind selbst nicht gasdicht.Support rollers 10 extend, are not even gas-tight.
Interessanter im vorliegenden Zusammenhang ist dieMore interesting in the present context is the
Art der Lagerung der gegenüberliegenden, in Figur 3 rechten Endbereiche der Tragrollen 10, die auch in den Figuren 1 und 2 gezeigt ist.Type of storage of the opposite, in Figure 3 right end portions of the support rollers 10, which also in the Figures 1 and 2 is shown.
Am besten sind die entsprechenden Verhältnisse der Figur 4 zu entnehmen, in welcher die Art der Lage- rung und des Antriebes einer der vielen Tragrollen 10 des Fördersystems 8 gezeigt ist.4, in which the type of bearing and drive of one of the many carrying rollers 10 of the conveyor system 8 is shown.
An die vertikale Außenfläche der Isolierschicht 3 schließt sich im Bereich der Öffnung 11 zunächst eine weitere Isolierschicht 35 an, welche die Tragrolle 10 umgibt. Erneut ist eine Ausbuchtung 4b der Hülle 4 vorgesehen, welche die Isolierschicht 35 und den durch sie hindurchlaufenden Bereich der Tragrolle 10 übergreift und umgibt. Im Gegensatz zu der in Figur 3 links dargestellten, die nicht angetriebenen Endbereiche der Tragrollen 10 umgebenden Ausbuchtung 4a ist jedoch der angetriebene, in Figur 4 dargestellte Endbereich jeder Tragrolle 10 durch ein Loch 14 der Ausbuchtung 4b hindurchgeführt . Auch diese Durchführung ist selbst nicht gasdicht.At the vertical outer surface of the insulating layer 3 is followed in the region of the opening 11, first a further insulating layer 35, which surrounds the support roller 10. Again, a bulge 4b of the shell 4 is provided, which overlaps and surrounds the insulating layer 35 and the region of the support roller 10 passing therethrough. In contrast to the bulge 4a shown on the left in FIG. 3, which surrounds the non-driven end regions of the support rollers 10, the driven end region of each support roller 10 shown in FIG. 4 is passed through a hole 14 of the bulge 4b. This implementation is not gas-tight itself.
Im äußersten Endbereich ist die Tragrolle 10 mittels einer Kupplung 15, deren genauer Aufbau hier nicht von Interesse ist, drehschlüssig mit einer Antriebswelle 16 verbunden. Das Ende der Tragrolle 10 und die Kupplung 15 sind dabei in einem becherförmigen Innenraum 18 einesIn the extreme end region, the support roller 10 by means of a coupling 15, the exact structure is not of interest here, rotationally connected to a drive shaft 16. The end of the support roller 10 and the clutch 15 are in a cup-shaped interior 18 of a
Lagerbocks 17 untergebracht, die sich entlang der gesamten Seitenwand 6 erstreckt (vgl. Figuren 1 und 2) .Bearing housed 17, which extends along the entire side wall 6 (see Figures 1 and 2).
Die Antriebswelle 16 ist durch eine koaxiale Boh- rung 19 des Lagerbocks 17 hindurchgeführt und in dieser mittels eines Lagers 36 gelagert. Nur wenig weiter ausser- halb sind zwischen der Antriebswelle 16 und der Mantelfläche der Bohrung 19 zwei Dichtringe 20 angeordnet, welche hier für eine gasdichte Trennung zwischen der Außenatmos- phäre und der im Inneren der Hülle 4 vorliegenden kontrol- lierten Atmosphäre sorgen.The drive shaft 16 is passed through a coaxial bore 19 of the bearing block 17 and supported therein by means of a bearing 36. Only a little further out, between the drive shaft 16 and the lateral surface of the bore 19, there are two sealing rings 20, which here for a gas-tight separation between the external atmosphere and the control element present inside the sleeve 4. atmosphere.
Der Lagerbock 17 seinerseits wird durch ein U- förmiges Profilblech 21 getragen. Dieses steht mit seiner Basis verschiebbar auf einer ebenen, horizontalen Fläche einer Strebe 37, die höhenverstellbar an einem Ausleger 22 des Stahlbaues 7 befestigt ist.The bearing block 17 in turn is supported by a U-shaped profile sheet 21. This is displaced with its base on a flat, horizontal surface of a strut 37, which is fixed in height adjustable on a boom 22 of the steel structure 7.
An seiner der Ausbuchtung 4b zugewandten Stirnseite trägt der Lagerbock 17 für jede Tragrolle 10 eine Ringdichtung 23 in einer nicht mit Bezugszeichen versehenen Nut. Der gesamte Lagerbock 17 wird mit Hilfe einer Klemmeinrichtung 24 gegen die Außenfläche der Ausbuchtung 4b so angedrückt, dass an dieser Stelle eine gasdichte Trennung zwischen Außenatmosphäre und innerer kontrollierter Atmosphäre stattfindet .On its front side facing the bulge 4b, the bearing block 17 carries, for each support roller 10, a ring seal 23 in a groove not provided with reference numerals. The entire bearing block 17 is pressed by means of a clamping device 24 against the outer surface of the bulge 4b so that takes place at this point a gas-tight separation between the outside atmosphere and the inner controlled atmosphere.
Die Klemmeinrichtung 24 umfasst ein oberes Winkel - blech 25 und ein unteres Winkelblech 26, die an der oberen bzw. unteren horizontalen Fläche der AusbuchtungThe clamping device 24 comprises an upper angle plate 25 and a lower angle plate 26, which on the upper or lower horizontal surface of the bulge
4b der Hülle 4 befestigt sind. Die Winkelbleche 25, 26 erstrecken sich über die gesamte Längswand 6. Ein Klemmblech 27 besitzt einen oberen, ebenen Schenkel 27a und einen hiermit fluchtenden unteren ebenen Schenkel 27b, die durch eine den äußeren Bereich des Lagerbocks 17 umgebende4b of the shell 4 are attached. The clamping plates 25, 26 extend over the entire longitudinal wall 6. A clamping plate 27 has an upper, planar leg 27a and an aligned therewith lower planar leg 27b, which by a surrounding the outer region of the bearing block 17
Ausbuchtung 27c verbunden sind. Mit Hilfe einer Vielzahl von Bolzen 28a und zugehörigen Muttern 28b, die durch fluchtende Bohrungen einerseits in den Schenkeln 27a, 27b des Klemmblechs 27 und andererseits in den vertikal verlaufenden Schenkeln der Winkelbleche 25, 26 hindurchgeführt sind, lässt sich das Klemmblech 27 und insbesondere der "Boden" der Ausbuchtung 27c gegen die äußere Stirnfläche des Lagerbocks 17 und damit der Lagerbock 17 gegen die äußere Stirnfläche der Ausbuchtung 4b der Hülle 4 gasdicht andrücken. Die Antriebswellen 16 sind durch Öffnungen 38 der Ausbuchtung 27c des Klemmbleches 27 herausgeführt.Bulge 27c are connected. By means of a plurality of bolts 28a and associated nuts 28b, which are passed through aligned holes on the one hand in the legs 27a, 27b of the clamping plate 27 and on the other hand in the vertically extending legs of the angle plates 25, 26, the clamping plate 27 and in particular the " Floor "of the bulge 27c against the outer end face of the bearing block 17 and thus the bearing block 17 against the outer end face of the bulge 4b of the shell 4 gas-tight press. The drive shafts 16 are led out through openings 38 of the bulge 27 c of the clamping plate 27.
Die oben beschriebene Anordnung im Bereich der Lagerung der angetriebenen Endbereiche der Tragrollen 10 ist also so, dass die gasdichte Trennung zwischen der Außenatmosphäre und der inneren kontrollierten Atmosphäre entlang der Hülle 4, deren Ausbuchtung 4b, dem Lagerbock 17 und sodann wieder der Ausbuchtung 4b und der Hülle 4 erfolgt.The arrangement described above in the storage of the driven end portions of the support rollers 10 is thus such that the gas-tight separation between the outside atmosphere and the inner controlled atmosphere along the shell 4, the bulge 4b, the bearing block 17 and then the bulge 4b and the Case 4 takes place.
Die Antriebswellen 16 werden ihrerseits von einer insgesamt mit dem Bezugszeichen 29 versehenen Antriebs- einrichtung in Rotation versetzt, die vollständig außerhalb der kontrollierten Atmosphäre in Normalatmosphäre liegt und nunmehr insbesondere anhand der Figuren 1 und 2 näher beschrieben wird.In turn, the drive shafts 16 are set in rotation by a drive device, indicated overall by the reference numeral 29, which lies completely outside the controlled atmosphere in normal atmosphere and will now be described in more detail in particular with reference to FIGS. 1 and 2.
Die eigentliche Antriebsquelle für die Antriebseinrichtung 29 ist ein Elektrogetriebemotor 30 mit zwei gegenüberliegenden, fluchtenden Abtriebswellen, welche jeweils eine sich parallel zur Längswand 6 erstreckende Hauptwelle 31 in Drehung versetzen kann. Jede Hauptwelle 31 wirkt mit mehreren KreuzgetriebenThe actual drive source for the drive device 29 is an electric geared motor 30 with two opposite, aligned output shafts, which can each set a parallel to the longitudinal wall 6 extending main shaft 31 in rotation. Each main shaft 31 acts with several cross gears
32 zusammen, von denen in Figur 1 zwei dargestellt sind; entsprechende Kreuzgetriebe 32 sind auf der rechts von dem Elektrogetriebemotor 30 liegenden, in Figur 1 nicht mehr dargestellten Seite zu denken.32 together, two of which are shown in Figure 1; corresponding cross-gear 32 are on the right of the electric gear motor 30 lying, not shown in Figure 1 side to think.
Über jedes dieser Kreuzgetriebe 32 wird eine parallel zur Hauptwelle 31 geführte Königswelle 33 in Drehung versetzt. Jeder dieser Königswellen 33 ist eine bestimmte Anzahl von Antriebswellen 16 und damit von Tragrollen 10 zugeordnet, die auf diese Weise angetrieben werden können. Die Königswellen 33 wirken hierzu über geeignete, bekannte Getriebe mit den Enden der entsprechenden Antriebswellen 16 zusammen.About each of these cross gear 32 is guided parallel to the main shaft 31 king shaft 33 in rotation. Each of these king shafts 33 is associated with a certain number of drive shafts 16 and thus of idlers 10, which can be driven in this way. For this purpose, the king shafts 33 cooperate with the ends of the corresponding drive shafts 16 via suitable, known transmissions.
Wie der Zeichnung zu entnehmen ist, sind die Antriebswellen 16 zweiteilig, wobei die beiden fluchtenden Teile durch eine Axialausdehnungen der Antriebswelle 16 aufnehmende Kupplung 34 miteinander verbunden sind.As can be seen from the drawing, the drive shafts 16 are in two parts, wherein the two aligned parts are connected by a Axialausdehnungen the drive shaft 16 female coupling 34 with each other.
Sowohl der Elektrogetriebemotor 30 als auch die Kreuzgetriebe 32 und schließlich diejenigen Teile, welche die Königswellen 33 lagern, sind ebenfalls an dem Ausleger 22 des Stahlbaues befestigt und werden von diesem getragen.Both the electric geared motor 30 and the crossed gears 32 and finally those parts which support the king shafts 33 are also fixed to and supported by the boom 22 of the steel structure.
Im Betrieb des Ofens 1 ist dessen Innenraum mit einer kontrollierten Atmosphäre gefüllt, bei der es sich, wie schon oben angedeutet und im Einzelnen in der DE 693 34 189 D2 erläutert, um eine Gasfüllung mit gegenüber Normaldruck verändertem Druck und/oder aus einem geeigneten Inertgas, beispielsweise Kohlendioxid, Stickstoff oder Edelgas, handeln kann. Diese kontrollierte Atmosphäre wird durch die gasdichte Hülle 4 mit ihren Ausbuchtungen 4a und 4b sowie den die angetriebenen Endbereiche der Tragrollen 10 umgreifenden Lagerbock 17 dauerhaft aufrecht erhalten. Am Einlass und am Auslass des Ofens 1 sind geeignete Schleusen vorgesehen, die hier im Einzelnen nicht dargestellt und beschrieben sind und dafür sorgen, dass beim Einbringen der Substratplatten und beim Ausbringen der beschichteten Substratplatten der Verlust an kontrollierter Atmosphäre so gering wie möglich gehalten wird.During operation of the furnace 1, its interior is filled with a controlled atmosphere, which, as already indicated above and explained in detail in DE 693 34 189 D2, is a gas filling with a pressure that is different from normal pressure and / or a suitable inert gas For example, carbon dioxide, nitrogen or inert gas, can act. This controlled atmosphere is permanently maintained by the gas-tight sheath 4 with its bulges 4a and 4b and the driven end portions of the support rollers 10 encompassing bearing block 17. At the inlet and outlet of the furnace 1 suitable locks are provided, which are not shown and described in detail here and ensure that the introduction of the substrate plates and the application of the coated substrate plates, the loss of controlled atmosphere is kept as low as possible.
Durch die Anordnung der Antriebseinrichtung 29 voll- ständig außerhalb der kontrollierten Atmosphäre, also in einer Normalluft enthaltenden, sich auf Normaldruck und im Wesentlichen nahe Zimmertemperatur befindenden Atmosphäre, lassen sich die Anforderungen an die Kosten der Antriebseinrichtung 29 deutlich reduzieren; die Störanfälligkeit der Antriebseinrichtung 29 ist reduziert Due to the arrangement of the drive device 29 completely outside the controlled atmosphere, ie in an atmosphere containing normal, at normal pressure and substantially close room temperature atmosphere, the requirements for the cost of the drive device 29 can be significantly reduced; the susceptibility of the drive device 29 is reduced
Claims
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102009019127.5 | 2009-04-29 | ||
| DE200910019127 DE102009019127A1 (en) | 2009-04-29 | 2009-04-29 | Furnace for producing thin-film photovoltaic cells |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO2010124781A2 true WO2010124781A2 (en) | 2010-11-04 |
| WO2010124781A3 WO2010124781A3 (en) | 2011-08-11 |
Family
ID=43032609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/EP2010/002141 Ceased WO2010124781A2 (en) | 2009-04-29 | 2010-04-03 | Furnace for producing photovoltaic thin-film cells |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE102009019127A1 (en) |
| WO (1) | WO2010124781A2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10340411B2 (en) | 2014-11-26 | 2019-07-02 | Eisenmann Se | Installation for treating a material |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011116136B4 (en) | 2011-10-15 | 2021-05-12 | Onejoon Gmbh | Plant for the treatment of workpieces |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69334189T2 (en) | 1992-05-12 | 2008-11-27 | First Solar, Inc., Perrysburg | METHOD AND APPARATUS FOR PRODUCING PHOTOVOLTAIC DEVICES AND PRODUCT THEREBY |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE400971A (en) * | 1933-01-26 | |||
| US2175233A (en) * | 1938-09-16 | 1939-10-10 | Electric Furnace Co | Bearing construction for roller hearth furnaces |
| US2205242A (en) * | 1939-03-23 | 1940-06-18 | Westinghouse Electric & Mfg Co | Roller-hearth type electric furnace |
| DE1130835B (en) * | 1955-11-05 | 1962-06-07 | Nassheuer Industrieofenbau J | Roller hearth furnace with insertable and removable conveyor rollers |
| DE4228006A1 (en) * | 1992-08-24 | 1994-03-03 | Ngk Insulators Ltd | Continuous roller hearth furnace |
| IT1306298B1 (en) * | 1998-06-18 | 2001-06-04 | Tecnochimica Sassolese S R L | SEALING AND ROLLER HANDLING DEVICE TRANSPORT OF A ROLLER OVEN |
| ITMI20012628A1 (en) * | 2001-12-13 | 2003-06-13 | Eurosolare Spa | BAKING OVEN FOR PHOTOVOLTAIC DEVICES |
| DE202005006587U1 (en) * | 2005-04-20 | 2005-08-25 | Rollmod Hochtemperatur-Transportsysteme Gmbh | Drive device for rolls of roller hearth furnaces and roller hearth furnace |
| JP4938410B2 (en) * | 2006-10-24 | 2012-05-23 | 関東冶金工業株式会社 | Continuous furnace for brazing aluminum products |
| JP5090096B2 (en) * | 2007-07-25 | 2012-12-05 | 株式会社ノリタケカンパニーリミテド | Conveying roller support device for heating furnace |
| DE102007050932A1 (en) * | 2007-10-23 | 2009-05-07 | Lenzen Att Gmbh | Radial slip bearing for conveyer furnace or conveyer belt oven |
-
2009
- 2009-04-29 DE DE200910019127 patent/DE102009019127A1/en not_active Withdrawn
-
2010
- 2010-04-03 WO PCT/EP2010/002141 patent/WO2010124781A2/en not_active Ceased
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69334189T2 (en) | 1992-05-12 | 2008-11-27 | First Solar, Inc., Perrysburg | METHOD AND APPARATUS FOR PRODUCING PHOTOVOLTAIC DEVICES AND PRODUCT THEREBY |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10340411B2 (en) | 2014-11-26 | 2019-07-02 | Eisenmann Se | Installation for treating a material |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102009019127A1 (en) | 2011-05-05 |
| WO2010124781A3 (en) | 2011-08-11 |
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