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WO2010119038A3 - Schraubenvakuumpumpe - Google Patents

Schraubenvakuumpumpe Download PDF

Info

Publication number
WO2010119038A3
WO2010119038A3 PCT/EP2010/054842 EP2010054842W WO2010119038A3 WO 2010119038 A3 WO2010119038 A3 WO 2010119038A3 EP 2010054842 W EP2010054842 W EP 2010054842W WO 2010119038 A3 WO2010119038 A3 WO 2010119038A3
Authority
WO
WIPO (PCT)
Prior art keywords
screw
vacuum pump
type vacuum
suction chamber
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2010/054842
Other languages
English (en)
French (fr)
Other versions
WO2010119038A2 (de
Inventor
Peter Birch
Robert Jenkins
Roland Müller
Magnus Janicki
Wolfgang Giebmanns
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=42751084&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO2010119038(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Priority to US13/264,021 priority Critical patent/US8602759B2/en
Priority to JP2012505148A priority patent/JP5665847B2/ja
Priority to KR1020117027054A priority patent/KR101695319B1/ko
Priority to CN201080016680.6A priority patent/CN102395793B/zh
Priority to EP10713646.7A priority patent/EP2419640B2/de
Publication of WO2010119038A2 publication Critical patent/WO2010119038A2/de
Publication of WO2010119038A3 publication Critical patent/WO2010119038A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
    • F04C29/126—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00—Geometry
    • F04C2250/10—Geometry of the inlet or outlet

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Eine Schraubenvakuumpumpe, die insbesondere zur Verdichtung gegen Atmosphärendruck eingesetzt wird, weist einen in einem Pumpengehäuse (10) angeordneten Schöpfraum (12) auf. In dem Schöpfraum (12) sind zwei ineinander greifende Schraubenrotoren (14) angeordnet. Ferner ist ein Überdruckauslass (26) vorgesehen, der mehrere in einer Seitenwand (24) des Schöpfraums (12) angeordnete Überdrucköffnungen (28) aufweist.
PCT/EP2010/054842 2009-04-17 2010-04-13 Schraubenvakuumpumpe Ceased WO2010119038A2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US13/264,021 US8602759B2 (en) 2009-04-17 2010-04-13 Screw-type vacuum pump having overpressure openings
JP2012505148A JP5665847B2 (ja) 2009-04-17 2010-04-13 スクリュー式真空ポンプ
KR1020117027054A KR101695319B1 (ko) 2009-04-17 2010-04-13 스크류-타입 진공 펌프
CN201080016680.6A CN102395793B (zh) 2009-04-17 2010-04-13 螺杆式真空泵
EP10713646.7A EP2419640B2 (de) 2009-04-17 2010-04-13 Schraubenvakuumpumpe

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009017886A DE102009017886A1 (de) 2009-04-17 2009-04-17 Schraubenvakuumpumpe
DE102009017886.4 2009-04-17

Publications (2)

Publication Number Publication Date
WO2010119038A2 WO2010119038A2 (de) 2010-10-21
WO2010119038A3 true WO2010119038A3 (de) 2011-06-23

Family

ID=42751084

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2010/054842 Ceased WO2010119038A2 (de) 2009-04-17 2010-04-13 Schraubenvakuumpumpe

Country Status (8)

Country Link
US (1) US8602759B2 (de)
EP (2) EP2419640B2 (de)
JP (1) JP5665847B2 (de)
KR (1) KR101695319B1 (de)
CN (1) CN102395793B (de)
DE (1) DE102009017886A1 (de)
TW (2) TWI589779B (de)
WO (1) WO2010119038A2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2978214B1 (fr) * 2011-07-21 2013-08-16 Adixen Vacuum Products Pompe a vide multi-etagee de type seche
TWI491803B (zh) * 2013-02-07 2015-07-11 Hanbell Precise Machinery Co Ltd 一種雙段螺旋導程真空泵
US11365735B2 (en) 2017-10-25 2022-06-21 Carrier Corporation Internal discharge gas passage for compressor
CN109139471B (zh) * 2018-09-03 2019-07-02 东北大学 一种具备过压排气功能的卧式无油螺杆真空泵
CN109113991B (zh) * 2018-09-03 2019-07-23 东北大学 一种具备过压排气功能的立式无油螺杆真空泵
KR102178373B1 (ko) 2018-10-11 2020-11-13 (주)엘오티베큠 과 압축 발생을 방지하는 진공펌프 하우징 및 이를 포함한 진공펌프
JP7198116B2 (ja) * 2019-03-01 2022-12-28 株式会社日立産機システム 多段圧縮機
KR102382668B1 (ko) 2020-03-05 2022-04-06 (주)엘오티베큠 과 압축 발생을 방지하는 진공펌프 하우징 및 이를 포함한 진공펌프
GB2606224B (en) 2021-04-30 2024-01-31 Edwards Ltd Stator for a vacuum pump
BE1029442B1 (nl) 2021-05-27 2023-01-09 Atlas Copco Airpower Nv Element voor het samenpersen van een gas en werkwijze voor het regelen van dergelijk element
US11713761B2 (en) * 2021-09-26 2023-08-01 Paul Xiubao Huang Screw compressor with a shunt-enhanced decompression and pulsation trap (SEDAPT)
CN114526233B (zh) * 2022-03-02 2024-05-10 安徽理工大学 罗茨转子和螺杆转子串联的复合干式真空泵及使用方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3677664A (en) * 1967-09-21 1972-07-18 Edwards High Vacuum Int Ltd Rotary mechanical pumps of the screw type
JPH03111690A (ja) * 1989-09-22 1991-05-13 Tokuda Seisakusho Ltd 真空ポンプ
WO2006099104A2 (en) * 2005-03-10 2006-09-21 Alan Notis Pressure sealed tapered screw pump/motor

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1737588A (en) * 1925-12-10 1929-12-03 Cons Ashcroft Hancock Co Incased adjustable weight-loaded valve
GB384355A (en) † 1931-08-05 1932-12-08 Frederick Charles Greenfield Improvements in and relating to rotary machines for the compression and propulsion of
US2519913A (en) * 1943-08-21 1950-08-22 Jarvis C Marble Helical rotary compressor with pressure and volume regulating means
JPS5475409U (de) * 1977-11-09 1979-05-29
SE444601B (sv) * 1983-10-24 1986-04-21 Stal Refrigeration Ab Anordning for reglering av volymkapaciteten hos en skruvkompressor
JPH06100188B2 (ja) * 1984-09-05 1994-12-12 株式会社日立製作所 オイルフリースクリュー真空ポンプ
JPH0510285A (ja) * 1991-07-04 1993-01-19 Hitachi Ltd 気体圧縮機の容量調整装置
US5246357A (en) * 1992-07-27 1993-09-21 Westinghouse Electric Corp. Screw compressor with oil-gas separation means
JP3111690B2 (ja) 1992-10-01 2000-11-27 トヨタ自動車株式会社 圧電積層体の製造方法
JP3593365B2 (ja) * 1994-08-19 2004-11-24 大亜真空株式会社 ねじれ角可変型歯車
JP3635869B2 (ja) * 1997-06-16 2005-04-06 株式会社デンソー 逆流防止弁
DE19800711A1 (de) * 1998-01-10 1999-07-29 Hermann Dipl Ing Lang Trockene Schraubenspindel Vakuumpumpe mit innerer Vorverdichtung
KR100301478B1 (ko) * 1998-07-03 2002-01-15 구자홍 스크롤압축기의바이패스밸브
DE19839501A1 (de) * 1998-08-29 2000-03-02 Leybold Vakuum Gmbh Trockenverdichtende Schraubenspindelpumpe
DE10045768C1 (de) 2000-09-15 2002-03-21 Siemens Ag Verfahren zum Steuern eines elektromechanischen Stellantriebs
DE10046768B4 (de) 2000-09-21 2011-08-11 Leybold Vakuum GmbH, 50968 Schraubenvakuumpumpe mit Bypass-Ventil
JP2002106735A (ja) 2000-09-29 2002-04-10 Seiko Instruments Inc チェックバルブとこれを用いた気体圧縮機

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3677664A (en) * 1967-09-21 1972-07-18 Edwards High Vacuum Int Ltd Rotary mechanical pumps of the screw type
JPH03111690A (ja) * 1989-09-22 1991-05-13 Tokuda Seisakusho Ltd 真空ポンプ
WO2006099104A2 (en) * 2005-03-10 2006-09-21 Alan Notis Pressure sealed tapered screw pump/motor

Also Published As

Publication number Publication date
JP5665847B2 (ja) 2015-02-04
KR101695319B1 (ko) 2017-01-11
US8602759B2 (en) 2013-12-10
CN102395793B (zh) 2015-04-01
WO2010119038A2 (de) 2010-10-21
EP2419640B1 (de) 2014-01-15
CN102395793A (zh) 2012-03-28
TWI589779B (zh) 2017-07-01
US20120039737A1 (en) 2012-02-16
TWI513903B (zh) 2015-12-21
EP2419640A2 (de) 2012-02-22
EP2419640B2 (de) 2017-09-13
TW201042153A (en) 2010-12-01
JP2012524202A (ja) 2012-10-11
TW201546373A (zh) 2015-12-16
EP2719899B1 (de) 2017-09-06
KR20110136898A (ko) 2011-12-21
DE102009017886A1 (de) 2010-10-21
EP2719899A1 (de) 2014-04-16

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