WO2010016134A1 - Reaction vessel made of carbon - Google Patents

Abstract

A reaction vessel made of carbon which is to be used for conducting the vapor-phase reaction of chlorosilane with hydrogen at high temperatures. It is characterized by comprising nearly cylindrical members made of carbon nearly coaxially disposed in a butt joint arrangement, the joints being externally fastened with rings made of carbon.

Description

Carbon reaction vessel

The present invention relates to a carbon reaction vessel having excellent resistance to thermal and physical impacts, and a method for reacting chlorosilane and hydrogen with high work efficiency.

Chlorosilane is expected to increase in demand as a raw material for high-purity silicon used in elements such as semiconductors and solar cells, and there has been a demand for efficient production of these.

As a part of the manufacturing method, for example, there is generation of trichlorosilane (SiHCl ₃ ) by bringing tetrachlorosilane (SiCl ₄ ) into contact with hydrogen (H ₂ ).
SiCl ₄ + H ₂ → SiHCl ₃ + HCl
This reaction is performed in a carbon reaction vessel or the like in which a mixed gas of gasified tetrachlorosilane and hydrogen is heated to 800 ° C. to 1300 ° C. (Patent Document 1).
JP-A-9-157073

The carbon reaction vessel for reacting tetrachlorosilane and hydrogen is preferably integrally molded in order to achieve excellent durability and heat transfer efficiency. As shown, a plurality of carbon substantially cylindrical bodies 101 that are connected and integrated are used.

In the conventional carbon reaction vessel 100, in order to stably connect the substantially carbon cylinders 101, the inner diameter of the upper end of the substantially carbon cylinder 101 is larger than the inner diameter of the cylindrical part. The shoulder portion 102 is formed by a step generated by the difference in inner diameter between the shoulder portions 102. Further, the outer diameter of the lower end of the substantially cylindrical body 101 made of carbon is reduced from the outer diameter of the cylindrical portion, and the protruding portion 103 is formed by a step formed by the difference in outer diameter between the lower end and the cylindrical portion. The shoulder 102 and the protrusion 103 are fitted into the shoulder 102 of the other carbon substantially cylindrical body 101 when the carbon substantially cylindrical bodies 101 are connected to each other. In order to match, the depth of the shoulder 102 and the length of the protrusion 103 are designed to be the same. In addition, in order to screw and fasten the substantially cylindrical bodies 101 made of carbon, a corresponding screw thread or screw groove (not shown) may be provided on the inner peripheral surface of the shoulder portion 102 and the outer peripheral surface of the protruding portion 103. is there. An appropriate sealing material (not shown) such as a cement material is used for the connecting portion in order to maintain airtightness between the substantially cylindrical bodies 101 made of carbon.

However, since the carbon substantially cylindrical body 101 having the above structure has the shoulder portion 102 and the protruding portion 103 at the upper end and the lower end, the wall thickness at the end portion is reduced to almost half of the cylindrical portion. The physical impact resistance of the substantially cylindrical body 101 becomes brittle at the shoulder 102 and the protrusion 103. As a result, when an impact is applied by transportation or the like, the shoulder 102 and the protrusion 103 may be cracked or cracked, and may not be usable.

In particular, since the carbon substantially cylindrical body 101 is assembled into the reaction vessel 100 and used in a high-temperature environment, it slightly expands during use. However, since the coefficient of thermal expansion of the carbon substantially cylindrical body 101 is different from each other, when the plurality of carbon substantially cylindrical bodies 101 having the above structure are connected and integrated and used in a high temperature environment, one of the connected carbon approximately cylindrical bodies 101 Since the shoulder 102 of the body 101 expands to the inside of the container, and the protrusion 103 of the other carbon substantially cylindrical body 101 fitted into the shoulder 102 expands to the outside of the container, the substantially carbon cylinder 101 Lateral stress is applied to the connecting portion. When this stress becomes prominent, the thin wall surfaces of the shoulder portion 102 and the protruding portion 103 cannot withstand the load and are cracked or cracked, thereby impairing the airtightness of the reaction vessel 100. As a result, it is frequently necessary to take recovery measures such as stopping the reaction furnace, disassembling the carbon reaction vessel 100, and replacing the substantially cylindrical body 101 made of carbon.

Thus, there has been a demand for improving the physical shock resistance and thermal shock resistance of the carbon reaction vessel.

The present invention has been made in view of the above circumstances, and is a carbon reaction vessel that has excellent physical impact resistance and does not cause cracks or cracks in the connection even when used in a high temperature environment, and the carbon reaction. It aims at providing the method of making chlorosilane and hydrogen react with high working efficiency by using a container.

As a result of earnestly examining the method for solving the above problems, the present inventors used a substantially cylindrical carbon substantially cylindrical body that does not have a shoulder portion or a projecting portion, and the connection portion between the substantially cylindrical carbon bodies is arranged on the outer periphery. By fastening with a carbon ring from the side, it has been found that even if a substantially cylindrical body made of carbon is used in a high heat environment, no cracks or cracks are generated in the connecting portion, leading to the present invention.

That is, the present invention is a carbon reaction vessel for causing a gas phase reaction between chlorosilane and hydrogen at a high temperature, wherein a plurality of carbon substantially cylindrical bodies are arranged substantially coaxially with their ends abutted to each other, It is characterized in that the portion is fastened with a carbon ring from the outer periphery.

In particular, a male screw part is formed on the outer peripheral surface of the butted end of the substantially cylindrical carbon body, and a female screw part corresponding to the male screw part is formed on the inner peripheral surface of the carbon ring. Is preferably screwed and fastened to the substantially cylindrical body made of carbon.

According to such a carbon reaction vessel, since the end of one carbon substantially cylindrical body is not fitted to the end of the other carbon substantially cylindrical body at the connecting portion, each carbon substantially cylindrical body is temporarily Even if the thermal expansion coefficients are different, there is no possibility of causing cracks or cracks in the connecting portion when used in a high temperature environment.
Moreover, since a thin-walled portion is not formed at the upper end or lower end of the substantially cylindrical body made of carbon, it has excellent resistance to physical impact that can be received during transportation. Further, since the structure of the substantially cylindrical body made of carbon is simple, the manufacture is easy.

In particular, it is preferable that the inner peripheral surface and / or the outer peripheral surface of the carbon substantially cylindrical body is treated with a silicon carbide coating, and the silicon carbide coating is formed with a thickness of 10 to 500 μm by a CVD method.
Since the silicon carbide coating has a very high resistance to chemical degradation, chemical erosion of the carbon structure can be prevented. Therefore, according to such a carbon reaction vessel, the surface of the carbon substantially cylindrical body can be protected from corrosion.

Furthermore, since the airtightness is excellent, it is preferable that the carbon substantially cylindrical body is made of graphite.

In addition, it is preferable that the surface of the carbon ring is treated with a silicon carbide coating to prevent corrosion, and the silicon carbide coating is formed with a thickness of 10 to 500 μm by a CVD method. Furthermore, the carbon ring is preferably made of graphite.

By using the carbon reaction vessel according to the present invention as a carbon reaction vessel for reacting chlorosilane and hydrogen, the occurrence of cracks and cracks in the carbon reaction vessel can be reduced. Can be reduced, and the working efficiency of the reactor can be improved.

According to the present invention, since a thin-walled portion is not formed at the upper end or the lower end of the carbon substantially cylindrical body, it has excellent resistance to physical impact. In addition, since the end of one carbon substantially cylindrical body is not fitted to the end of the other carbon substantially cylindrical body at the connecting portion, the carbon substantially cylindrical body is thermally expanded when used in a high temperature environment. Even so, there is no possibility of causing cracks or cracks in the connecting portion due to differences in the thermal expansion coefficients of individual carbon substantially cylindrical bodies. Therefore, the frequency of exchanging the components of the reaction vessel is reduced, and the working efficiency of the reaction furnace can be improved.

It is a schematic longitudinal cross-sectional view which shows the conventional carbon reaction container. It is a schematic longitudinal cross-sectional view which shows one embodiment of the carbon reaction container by this invention. It is a schematic perspective view which shows one embodiment of the carbon substantially cylindrical body used for this invention. It is a schematic perspective view which shows one embodiment of the carbon-made rings used for this invention. It is a schematic sectional drawing which shows the embodiment at the time of loading the filling member in the carbon reaction container by this invention.

Explanation of symbols

1: reaction container 2: substantially cylindrical body 3: ring 4: reaction container canopy part 5: reaction container bottom plate part 6: inlet 7: outlet 8: outlet pipe 9: male thread part 10: female thread part 11: filling Member 100: reaction vessel 101: substantially cylindrical body 102: shoulder 103: protrusion

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, the same components are denoted by the same reference numerals, and description thereof will be omitted as appropriate.

FIG. 2 schematically shows the carbon reaction container of the present embodiment.
In the carbon reaction container 1 of the illustrated embodiment, a plurality of substantially cylindrical bodies 2 made of carbon are arranged substantially coaxially up and down while butting ends together, and the butted ends are screwed and fastened with a carbon ring 3 from the outside. It is constituted by. The substantially cylindrical body 2 arranged at the upper end is closed at the upper end side to form the canopy portion 4 of the reaction vessel 1, and the substantially cylindrical body 2 arranged at the lower end is closed at the lower end side to form the bottom plate portion 5 of the reaction vessel 1. It is configured. In addition, a source gas inlet 6 is formed at the center of the bottom plate 5, and a gas outlet 7 after reaction is formed on the side wall of the substantially cylindrical body 2 on the upper side far from the inlet. The extraction pipe 8 is connected to the extraction outlet 7.
The carbon reaction vessel 1 is placed in an outer cylinder provided with a plurality of elongated heaters extending in the vertical direction, and the outer wall of the reaction vessel 1 is heated by the heater, thereby introducing tetrachlorosilane introduced from the introduction port. The hydrogen gas is reacted at a high temperature of about 800 ° C. to about 1300 ° C., and is extracted from the reaction outlet 7 in the form of a reaction product gas containing trichlorosilane.

<Carbon cylinder>
As shown in FIG. 3, the carbon substantially cylindrical body 2 of the present embodiment has a substantially cylindrical shape in which male screw portions 9 are formed on the outer periphery of the upper and lower ends, and has been used in a conventional carbon reaction vessel. No shoulder or protrusion is formed at the upper or lower end as in the cylindrical body. Therefore, it has an extremely simple shape without large unevenness, and the thickness can be made substantially uniform over the entire length direction, so that it has excellent resistance to physical impact and thermal impact.

The thickness of the carbon substantially cylindrical body 2 is typically 0.5 to 20 cm, preferably 1.5 cm, in order to maintain strength and to avoid peeling of the silicon carbide coating described later on the surface thereof. It is preferable to set it to ˜15 cm.

Male threaded portions 9 for screwing the carbon substantially cylindrical body 2 to the carbon ring 3 are formed on the upper end outer peripheral surface and the lower end outer peripheral surface of the carbon substantially cylindrical body 2, respectively.
The formation width of the male threaded portion 9 on the outer peripheral surface of the upper end and the outer peripheral surface of the lower end is not particularly limited, but in order to ensure the screw fastening with the carbon ring 3, the substantially cylindrical body 2 made of carbon. The cylindrical height is preferably 8/100 or more, more preferably 9/100 or more.
The winding direction, the number of threads, the shape of the thread, the diameter, and the pitch of the male screw portion 9 to be formed are not particularly limited.

Further, as the material constituting the substantially cylindrical body 2 made of carbon, a graphite material having excellent airtightness is preferable, and particularly, the strength is high due to the fine particle structure, and the characteristics such as thermal expansion are the same in any direction. Therefore, it is preferable to use isotropic high-purity graphite that is excellent in heat resistance and corrosion resistance.

<Carbon ring>
As shown in FIG. 4, the carbon ring 3 of the present embodiment is a substantially cylindrical ring having an internal thread portion 10 formed on the inner peripheral surface. Like the carbon substantially cylindrical body 2, it has an extremely simple shape without large unevenness, and the thickness is almost uniform over the width direction, so it has excellent resistance to physical and thermal shocks. Have.

Since the carbon ring 3 needs to be screwed to the male screw portion 9 on the upper end outer peripheral surface or the lower outer peripheral surface of the carbon substantially cylindrical body 2 by the female screw portion 10 formed on the inner peripheral surface thereof, the inner diameter thereof is the carbon. The outer diameter of the substantially cylindrical body 2 is substantially the same.

The thickness of the carbon ring 3 in the radial direction is typically 0.5 to 20 cm, preferably 1. to maintain strength and avoid peeling of the silicon carbide coating described later on the surface. It is preferably 5 cm to 15 cm.

The vertical width of the carbon ring 3 must be surely screwed with the upper end of one carbon substantially cylindrical body 2 and the lower end of the other carbon substantially cylindrical body 2 to be connected. Typically, when the carbon substantially cylindrical body 2 and the carbon ring 3 are screwed together, it is considered that one carbon substantially cylindrical body 2 can be screwed only to half the width of the carbon ring 3. The vertical width of the carbon ring 3 may be 10/100 or more and 1/2 or less, more preferably 12/100 or more and 1/2 or less, of the cylindrical height of the carbon substantially cylindrical body 2. preferable.

The winding direction, the number of threads, the shape of the thread groove, the diameter, and the pitch of the female screw portion 10 formed on the inner peripheral surface of the carbon ring 3 are the same as those of the butted end portions of the two carbon substantially cylindrical bodies 2 to be connected. It must correspond to the threads formed on the outer peripheral surface.

Further, the material constituting the carbon ring 3 is preferably the same as the material constituting the carbon substantially cylindrical body 2 so that the coefficient of thermal expansion is not extremely different from that of the carbon substantially cylindrical body 2 described above.

<Surface treatment>
Since the carbon substantially cylindrical body 2 and the carbon ring 3 are mainly made of carbon, as shown below, the thickness of the tissue is reduced by hydrogen supplied into the reaction vessel or water generated by hydrogen combustion. Or it will be embrittled.
C + 2H ₂ → CH ₄
C + H ₂ O → H ₂ + CO
C + 2H ₂ O → 2H ₂ + CO ₂
Since the silicon carbide coating is extremely resistant to these chemical decompositions, it is preferable to form the silicon carbide coating on the surfaces of the substantially carbon cylinder 2 and the carbon ring 3.

The silicon carbide film is not particularly limited, but typically can be formed by vapor deposition by a CVD method.
In order to form a silicon carbide film on the surfaces of the substantially carbon cylinder 2 and the carbon ring 3 by the CVD method, for example, a silicon halide compound such as tetrachlorosilane or trichlorosilane and a hydrocarbon compound such as methane or propane Or a heated carbon while thermally decomposing silicon halide compounds having hydrocarbon groups such as methyltrichlorosilane, triphenylchlorosilane, methyldichlorosilane, dimethyldichlorosilane, and trimethylchlorosilane with hydrogen. A method of depositing silicon carbide on the surfaces of the substantially cylindrical body 2 and the carbon ring 3 can be used.

The thickness of the silicon carbide coating is preferably 10 to 500 μm, more preferably 30 to 300 μm. If the thickness of the silicon carbide coating is 10 μm or more, corrosion of the carbon substantially cylindrical body 2 and the carbon ring 3 caused by hydrogen, water, methane, etc. existing in the reaction vessel can be sufficiently suppressed, and if the thickness is 500 μm or less. For example, cracking of the silicon carbide coating and cracking of the carbon substantially cylindrical body 2 and the carbon ring 3 structure are not promoted.

The formed silicon carbide coating is a dense and uniform pinhole-free coating and is excellent in chemical stability. Therefore, the carbon formed by the carbon substantially cylindrical body 2 and the carbon ring 3 coated with the silicon carbide coating. If the reaction of chlorosilane and hydrogen is performed in the reaction container 1, the frequency of repairing the equipment can be reduced and the work efficiency can be further improved.

<Assembly of reaction vessel>
In order to connect the carbon substantially cylindrical body 2 using the carbon ring 3, the carbon ring 3 is fitted to the upper end of the first carbon substantially cylindrical body 2, and the first carbon substantially cylindrical body 2 The upper end of the carbon ring 3 is screwed in until it reaches half the width, and the lower end of the second carbon substantially cylindrical body 2 is fitted to the open end side of the carbon ring 3 so that the second carbon The second substantially carbon cylinder 2 is screwed into the carbon ring 3 until the lower end of the cylinder 2 comes into contact with the upper end of the first substantially carbon cylinder 2. The above operations are sequentially repeated until a container body portion having a desired size is obtained.

At this time, in order to airtightly connect the carbon substantially cylindrical body 2, an appropriate seal such as a cement material is previously attached to the upper and outer peripheral surfaces of the carbon substantially cylindrical body 2 or the inner peripheral surface of the carbon ring 3. It is preferable to apply the material. Alternatively, after the carbon substantially cylindrical body 2 and the carbon ring 3 are screwed together, the joints of both members may be closed with a sealing material.

As mentioned above, although embodiment of this invention was described with reference to drawings, these are the illustrations of this invention, Various structures other than the above are also employable.
For example, in the above embodiment, a case has been described in which threads or screw grooves are provided on the upper and outer peripheral surfaces of the substantially cylindrical body made of carbon or the inner peripheral surface of the carbon ring, and both members are screwed together. Any structure may be used as long as the upper and outer peripheral surfaces of the substantially cylindrical body can be fastened to the carbon ring. For example, the outer diameter of the upper end and the lower end of the substantially cylindrical body made of carbon may be smaller than the outer diameter of the cylindrical portion, and the upper end and the lower end may be fitted into a carbon ring and joined with a sealing material. Furthermore, a convex part may be formed in the upper end and lower end outer peripheral surfaces of the substantially cylindrical body made of carbon at intervals in the circumferential direction, and a concave part may be formed at a corresponding position on the inner periphery of the carbon ring.

Further, as shown in FIG. 5, a carbon filling member 11 that forms a gas passage that disturbs the flow of the mixed gas composed of chlorosilane and hydrogen may be disposed inside the carbon reaction vessel 1. By disposing such a carbon filling member 11, it is possible to effectively mix the mixed gas in the reaction vessel 1, to secure a longer residence time, and to improve the heat transfer efficiency for the supplied mixed gas. Therefore, the production efficiency of trichlorosilane can be improved. Also in this case, it is preferable that the surface of the carbon filling member 11 is coated with a silicon carbide coating from the viewpoint of reducing the frequency of repairing the equipment and further improving the work efficiency.

Here, the carbon filling member 11 means a member which is disposed in the gas flow passage in the reaction vessel 1 and causes a disturbance in the gas flow. For example, a molded filling such as Raschig ring or a wrestling ring, Any structure such as a plate or baffle plate may be used. Various arrangements are possible depending on the type of the filling member 11 as long as the arrangement method can cause disturbance in the flow of chlorosilane and hydrogen gas.

In particular, the carbon filling member 11 is composed of a plurality of partition plates that divide the inside of the carbon reaction vessel 1 into a plurality of small chambers, and the partition plates are formed with a plurality of vent holes penetrating the partition plates. Is preferred.
In this case, the position, number, size, and the like of the vent holes can be set arbitrarily, but it is preferable to set the gas components so that the gas components can be reliably mixed and the residence time can be secured longer.

Further, it is preferable that the silicon carbide film of the carbon filling member 11 is formed by a CVD method, and that the thickness of the film is 10 to 500 μm.
Furthermore, since it is excellent in thermal shock resistance, it is preferable if the carbon filling member 11 is made of graphite.

Hereinafter, the present invention will be further described with reference to examples, but the present invention is not limited thereto.

Example 1
A substantially cylindrical carbon cylinder made of isotropic graphite having an outer diameter of 15 cm, a height of 10 cm, and a thickness of 3 cm. The outer peripheral surface extends 3.5 cm from the upper end and the outer peripheral surface extends 3.5 cm from the lower end. A plurality of carbon substantially cylindrical bodies provided with screw portions were prepared. Similarly, a male screw portion was provided on the outer peripheral surface of the end portion on the connection side for the upper end side substantially cylindrical body constituting the canopy portion of the reaction vessel and the lower end side substantially cylindrical body constituting the bottom plate portion of the reaction vessel.

Next, in order to form a silicon carbide coating on the inner and outer peripheral surfaces of these carbon cylinders, the carbon cylinders were installed in a CVD reactor, and the inside of the apparatus was replaced with argon gas. Heated to 1200 ° C. A mixed gas of trichloromethylsilane and hydrogen (molar ratio 1: 5) was introduced into the CVD reactor, and a silicon carbide film having a thickness of 200 μm was formed on the entire surface of the substantially carbon cylinder by the CVD method.

Next, a carbon ring made of isotropic graphite having an inner diameter of 15 cm, a vertical width of 7.5 cm, and a radial thickness of 3.6 cm, the male ring formed on the inner peripheral surface of the carbon substantially cylindrical body. A plurality of carbon rings each having a female thread portion to be screwed with the thread portion were prepared, and a silicon carbide coating was applied to the entire surface in the same manner as described above.

A reaction vessel main body was constructed using these carbon substantially cylindrical bodies and carbon rings, and piping and a heating device were set in the reaction vessel to prepare a reaction furnace.

A mixed gas of tetrachlorosilane and hydrogen (mole = 1: 1) was supplied to the reactor, and the reaction was performed at normal pressure and a reaction temperature of 1100 ° C. to produce trichlorosilane.
After the reactor was continuously operated for 2000 hours, the reaction vessel was disassembled and a substantially cylindrical body made of carbon was observed. No cracks or cracks were observed in the carbon substantially cylindrical body of this example. In addition, no significant corrosion was observed on the surface of the carbon substantially cylindrical body.

Example 2
A reaction furnace was prepared in the same manner as in Example 1 except that a carbon filling member having a silicon carbide coating on the surface was disposed in the reaction vessel.
The carbon filling member used in this example is made of isotropic graphite, has a disk shape with a diameter of 8.8 cm and a thickness of 0.5 cm, and the disk is used as a support bar at a position 4.4 cm from the center. A fixing hole for fixing is provided, a plurality of air holes having a diameter of 0.2 cm are provided at arbitrary positions of the disk, and a silicon carbide film having a thickness of 200 μm is provided on the entire surface.

These carbon filling members were fixed to a support rod made of isotropic graphite having a length of 65 cm with a silicon carbide coating on the surface in the same manner as described above with a spacing of 0.9 cm and placed in a carbon reaction vessel. Arranged.
After operating this reactor in the same manner as in Example 1, the reaction vessel was disassembled and the carbon substantially cylindrical body was observed. Even in this example, no cracks or cracks were observed in the carbon substantially cylindrical body. It was. Further, no significant corrosion was observed on the surface of the substantially cylindrical carbon body and the surface of the carbon filling member.

Comparative Example 1
It is a substantially cylindrical carbon cylinder made of isotropic graphite having an outer diameter of 15 cm, a height of 10 cm, and a thickness of 3 cm, with a shoulder at a depth of 3.8 cm at the upper end and a length of 3. at the lower end. A plurality of carbon substantially cylindrical bodies having 8 cm protrusions were prepared. A screw groove was formed on the inner peripheral surface of the shoulder, and a screw thread corresponding to the screw groove was formed on the outer peripheral surface of the protrusion. Further, a silicon carbide film having a thickness of 200 μm was formed on the inner peripheral surface and the outer peripheral surface of the substantially carbon cylindrical body in the same manner as in Example 1 above.

Next, these carbon substantially cylindrical bodies were directly screwed together to constitute a reaction vessel main body, and in the same manner as in Example 1, piping and a heating device were set to prepare a reaction furnace.

When this reactor was operated in the same manner as in Example 1 and the reaction vessel was disassembled and the carbon substantially cylindrical body was observed, no significant corrosion was observed on the surface of the carbon substantially cylindrical body. Cracks and cracks were observed on the shoulder of the cylindrical body.

<Experimental considerations>
As is clear from the above comparative experiment, by using a carbon ring from the outer peripheral side of the connecting portion of the substantially cylindrical body made of carbon that does not have a shoulder portion or a protruding portion, it can be used in a high temperature environment. It is possible to prevent the occurrence of cracks and cracks that can occur in the connecting portion.

In the above, this invention was demonstrated based on the Example. It is to be understood by those skilled in the art that this embodiment is merely an example, and that various modifications are possible and that such modifications are within the scope of the present invention.

Claims (9)

A carbon reaction vessel for reacting chlorosilane and hydrogen at high temperatures in a gas phase. A plurality of carbon substantially cylindrical bodies are arranged substantially coaxially with their ends abutting each other, and the abutting ends are carbon from the outer periphery. A carbon reaction vessel characterized by being fastened with a ring made of carbon. A male screw part is formed on the outer peripheral surface of the butted end of the carbon substantially cylindrical body, a female screw part corresponding to the male screw part is formed on the inner peripheral surface of the carbon ring, and the carbon ring 2. The carbon reaction container according to claim 1, wherein the carbon reaction container is screwed and fastened to the carbon substantially cylindrical body. The carbon reaction vessel according to claim 1, wherein the inner peripheral surface and / or the outer peripheral surface of the substantially carbon cylinder is treated with a silicon carbide coating. 4. The carbon reaction container according to claim 3, wherein the silicon carbide coating of the carbon substantially cylindrical body is formed with a thickness of 10 to 500 μm by a CVD method. The carbon reaction vessel according to claim 1, wherein the substantially cylindrical body made of carbon is made of graphite. 2. The carbon reaction vessel according to claim 1, wherein the surface of the carbon ring is treated with a silicon carbide coating. The carbon reaction vessel according to claim 6, wherein the silicon carbide coating on the carbon ring is formed with a thickness of 10 to 500 µm by a CVD method. The carbon reaction vessel according to claim 1, wherein the carbon ring is made of graphite. A method for reacting chlorosilane with hydrogen, wherein the carbon reaction vessel according to claim 1 is used.

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