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WO2010015414A1 - Procédé de réalisation d'un élément céramique - Google Patents

Procédé de réalisation d'un élément céramique Download PDF

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Publication number
WO2010015414A1
WO2010015414A1 PCT/EP2009/005746 EP2009005746W WO2010015414A1 WO 2010015414 A1 WO2010015414 A1 WO 2010015414A1 EP 2009005746 W EP2009005746 W EP 2009005746W WO 2010015414 A1 WO2010015414 A1 WO 2010015414A1
Authority
WO
WIPO (PCT)
Prior art keywords
ceramic component
ceramic
temperature
component
sintering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2009/005746
Other languages
German (de)
English (en)
Inventor
Helmut D. Link
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Deru GmbH
Original Assignee
Deru GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/EP2008/006524 external-priority patent/WO2009036845A2/fr
Application filed by Deru GmbH filed Critical Deru GmbH
Priority to EP09804525.5A priority Critical patent/EP2331483B1/fr
Priority to CN2009801294353A priority patent/CN102137827B/zh
Priority to JP2011521487A priority patent/JP5535212B2/ja
Priority to ES09804525T priority patent/ES2570975T3/es
Priority to US13/057,913 priority patent/US20110127700A1/en
Publication of WO2010015414A1 publication Critical patent/WO2010015414A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

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    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F2/00Filters implantable into blood vessels; Prostheses, i.e. artificial substitutes or replacements for parts of the body; Appliances for connecting them with the body; Devices providing patency to, or preventing collapsing of, tubular structures of the body, e.g. stents
    • A61F2/02Prostheses implantable into the body
    • A61F2/30Joints
    • A61F2/30767Special external or bone-contacting surface, e.g. coating for improving bone ingrowth
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    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F2/00Filters implantable into blood vessels; Prostheses, i.e. artificial substitutes or replacements for parts of the body; Appliances for connecting them with the body; Devices providing patency to, or preventing collapsing of, tubular structures of the body, e.g. stents
    • A61F2/02Prostheses implantable into the body
    • A61F2/30Joints
    • A61F2/44Joints for the spine, e.g. vertebrae, spinal discs
    • A61F2/442Intervertebral or spinal discs, e.g. resilient
    • A61F2/4425Intervertebral or spinal discs, e.g. resilient made of articulated components
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/486Fine ceramics
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/51Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
    • C04B41/5133Metallising, e.g. infiltration of sintered ceramic preforms with molten metal with a composition mainly composed of one or more of the refractory metals
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    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
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    • A61F2002/30011Material related properties of the prosthesis or of a coating on the prosthesis the prosthesis being made from materials having different values of a given property at different locations within the same prosthesis differing in porosity
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    • A61F2002/30001Additional features of subject-matter classified in A61F2/28, A61F2/30 and subgroups thereof
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    • A61F2002/30317The prosthesis having different structural features at different locations within the same prosthesis
    • A61F2002/30321The prosthesis having different structural features at different locations within the same prosthesis differing in roughness
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    • A61F2/30771Special external or bone-contacting surface, e.g. coating for improving bone ingrowth applied in original prostheses, e.g. holes or grooves
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    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F2310/00Prostheses classified in A61F2/28 or A61F2/30 - A61F2/44 being constructed from or coated with a particular material
    • A61F2310/00389The prosthesis being coated or covered with a particular material
    • A61F2310/00395Coating or prosthesis-covering structure made of metals or of alloys
    • A61F2310/00407Coating made of titanium or of Ti-based alloys
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00836Uses not provided for elsewhere in C04B2111/00 for medical or dental applications
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/602Making the green bodies or pre-forms by moulding
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/612Machining
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/66Specific sintering techniques, e.g. centrifugal sintering
    • C04B2235/661Multi-step sintering
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/963Surface properties, e.g. surface roughness

Definitions

  • the invention relates to a method for producing a ceramic component.
  • a ceramic starting material is provided in powder form and introduced into a form predetermining the shape of the ceramic component.
  • the ceramic component is pre-sintered, released from the mold, and then sintered at a temperature higher than the pre-sintering temperature.
  • Such a method for producing a ceramic component is known, for example, from EP 0 421 085. It turns out that ceramic components produced in this way have a low surface roughness and that it is therefore difficult to firmly adhere a coating to the ceramic component.
  • the invention is based on the object to present a method for producing a ceramic component, in which a ceramic component produced according to the invention provides a better starting base for applying a coating. Based on the above-mentioned prior art, the object is achieved by the features of the independent claims. Advantageous embodiments can be found in the subclaims.
  • a temperature between 880 0 C and 980 0 C is selected for the step of presintering. After presintering and before sintering, the surface of the ceramic component is treated with a blasting material.
  • a powder-shaped ceramic starting material is filled into a mold which predetermines the shape of the ceramic component. Since the volume of the ceramic component is reduced by subsequent processing steps, the shape is larger than the finished ceramic component. A stable internal structure of the ceramic component is achieved by subsequent sintering. The sintering creates solid bonds between the particles of the powder.
  • the sintering is carried out in several steps.
  • a first step the ceramic component is pre-sintered at a lower temperature, so that only narrow bridges between the grains of the powder are formed.
  • the stability of the narrow bridges should be just such that the treatment of the surface with a blasting material leads to an increased surface roughness. If the stability of the bridges is too low, the ceramic component can break into several components, if the stability of the bridges is too high, the treatment with the abrasive material is insufficient to change the surface structure of the ceramic component.
  • the desired change in the surface structure by the blasting material occurs when a temperature between 880 0 C and 980 0 C is selected for pre-sintering.
  • the inner structure of the ceramic component is then just such that fragments of the desired size can be broken out of the component with the blasting material.
  • the strength of the bond between the particles of the powder material increases when the temperature of the Pre-sintering is increased. Good results were achieved with the inventive method, if the presintering temperature was greater than 900 0 C and 95O 0 C. was less than
  • the surface roughness R a should be greater than 2.5 ⁇ m (WO 2009/036845).
  • the roughness data in the context of the invention relate to the mean roughness R a according to DIN EN ISO 4288 and 3274 and to the finished ceramic component after sintering.
  • the surface roughness achieved with the method according to the invention depends on the parameters selected during the treatment with the blasting material, such as, for example, the particle size of the blasting material and the speed at which the particles impinge on the ceramic component. Preferably, these parameters are adjusted in the inventive method so that the surface roughness R a of the finished ceramic component is greater than 2.5 microns.
  • the surface roughness R 3 of the finished ceramic component should not be greater than 7 ⁇ m.
  • the entire surface of the ceramic component can be treated with the blasting material. This is useful if the entire surface of the ceramic component is to be provided with a coating. Often, however, only part of the surface should be coated, while another part of the surface should be free from coatings. This applies, for example, to endoprothesis components whose surface is intended to form part of a connection with bone material, while another part serves as a sliding surface for interaction with another prosthesis. thesenkomponente is determined. For the sliding surface increased surface roughness is not desired. In the method according to the invention, it can therefore be provided that only a part of the surface of the ceramic component is treated with the blasting material, while another part of the surface remains recessed from the treatment with the blasting material. If, in the context of the invention, a treatment of the surface of the ceramic component is used, then the entire surface or a part of the surface may be meant.
  • the particle size of the blasting material is preferably of the same order of magnitude as the particle size of the ceramic starting material.
  • the blasting material can then act particularly effective on the ceramic component.
  • the particles then constitute impurities in the ceramic material. Impurities of this type can be prevented by using as blasting material a powder which corresponds to the powder of the ceramic starting material. If particles of this material become stuck in the ceramic component, they do not change the homogeneous composition of the ceramic material.
  • the applied to the surface of the ceramic component coating may consist of a titanium alloy or pure titanium.
  • Plasma spraying is a process by which a gas is passed through an arc and thereby ionized.
  • the coating material is introduced in powder form in the ionized gas and transported by the gas flow to the workpiece to be coated.
  • FIG. 2 shows an enlarged detail of the intervertebral disc prosthesis according to FIG. 1;
  • FIG. Fig. 3 is a schematic representation of the internal structure of the ceramic material in the initial state;
  • FIG. 4 shows the view from FIG. 3 after pre-sintering
  • Fig. 5 is the view of Fig. 3 after sintering.
  • Fig. 1 is designed as a disc prosthesis
  • the intervertebral disc prosthesis comprises a first connecting plate 1 and a second connecting plate 2.
  • the first connecting plate 1 is an endoprosthesis component designed for connection to a first vertebral body 6;
  • the second connecting plate 2 is an endoprosthesis component designed for connection to a second vertebral body 7.
  • the first connection plate 1 and the second connection plate 2 abut each other via matching sliding surfaces 3.
  • the sliding surfaces 3 form a joint for movements between the upper terminal plate 1 and the lower terminal plate 2.
  • projections 12 are formed in regions 13 of the surfaces of the connection plates 1, 2, with which the connection plates 1, 2 bear against the bone material of the vertebral bodies 6, 7, projections 12 are formed.
  • the projections 12 have a flatter edge in the direction in which the connection plates 1, 2 are inserted into the intervertebral space, and a steeper flank in the opposite direction. Due to the flatter edge, the insertion of the connection plates 1, 2 is facilitated in the intervertebral space.
  • the steeper flank offers the connection plates 1, 2 stop when the projections 12 have penetrated into the bone material of the vertebral bodies 6, 7.
  • the steeper flanks prevent the connection plates 1, 2 from being pulled out of the intervertebral space in the opposite direction.
  • connection plates 1, 2 are intended to abut against the ventral side of the vertebral bodies 6, 7.
  • connection plates 1, 2 in the dorsal direction can not be inserted beyond the desired position in the Eisenwirbelhoffm.
  • the terminal plate 1 and the terminal plate 2 are formed of a ceramic material 9.
  • the sliding surfaces 3 on the connection plates 1, 2 are formed on a surface of the ceramic material 9.
  • the regions 13, via which a connection to the bone material is produced, are covered with a coating 10 made of a titanium alloy.
  • Fig. 2 shows an enlarged section of a connection plate 1, 2, in which the interface 8 between the Ceramic material 9 and the coating 10 is shown.
  • the ceramic material 9 has at the interface 8 to the coating 10 a roughness R a , which is at least 2, 5 microns. This roughness at the interface 8 is sufficient to establish a stable bond with the coating 10, but is not sufficient for a stable bond with bone material.
  • the coating 10 has a greater roughness and greater porosity than the ceramic material 9 and therefore forms a stable connection with the bone material.
  • a starting material in powder form is first introduced into a mold whose shape corresponds to the ceramic component to be produced. Since the ceramic component loses volume through the subsequent process steps, the mold has larger dimensions than the finished ceramic component.
  • the powder is mechanically compressed, for example by shaking and pressure, the particles 14 of the powder are then adjacent to each other, as shown schematically in Fig. 3. By presintering at a temperature of 920 ° C., bridges shown in FIG. 4 form between the particles 14. The internal structure of the material is now so stable that the ceramic component can be removed from the mold.
  • the ceramic material has a greater stability in its structure than would be chosen for mechanical machining by drilling or milling.
  • the stability of the structure is just adjusted so that by irradiating with a powder containing the starting material corresponds, fragments can be removed from the pre-sintered ceramic material. The fragments are so large that forms the desired surface roughness after sintering in the finished ceramic component.
  • the ceramic component is sintered at a temperature higher than the pre-sintering temperature. At the interfaces of the previously only connected via the bridges 15 particles form planar connections 16. Since the cavities disappear from the interior, the volume of the ceramic component continues to decrease. On the part of the surface which has been treated with the blasting material, the surface now has a roughness R a of approximately 4 ⁇ m. A coating of a titanium alloy applied to this surface portion adheres firmly to the surface.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Biomedical Technology (AREA)
  • Orthopedic Medicine & Surgery (AREA)
  • Transplantation (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Oral & Maxillofacial Surgery (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Vascular Medicine (AREA)
  • Cardiology (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Neurology (AREA)
  • Composite Materials (AREA)
  • Prostheses (AREA)
  • Materials For Medical Uses (AREA)

Abstract

La présente invention concerne un procédé de réalisation d'un élément céramique. Le procédé consiste à : fournir une matière céramique de départ sous forme de poudre et un moule prédéfinissant la forme de l'élément céramique; introduire la matière céramique de départ dans le moule; réaliser un frittage préalable de l'élément céramique à une température comprise entre 880 °C et 980 °C puis le sortir du moule; traiter la surface de l'élément céramique avec un agent de grenaillage et fritter l'élément céramique à une température supérieure à la température de frittage préalable. Le procédé de l'invention permet la réalisation d'éléments céramiques ayant une rugosité de surface élevée. La rugosité de surface élevée facilite l'application d'un revêtement qui adhère bien à l'élément céramique.
PCT/EP2009/005746 2008-08-07 2009-08-07 Procédé de réalisation d'un élément céramique Ceased WO2010015414A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP09804525.5A EP2331483B1 (fr) 2008-08-07 2009-08-07 Procédé de réalisation d'un élément céramique
CN2009801294353A CN102137827B (zh) 2008-08-07 2009-08-07 制造陶瓷元件的方法
JP2011521487A JP5535212B2 (ja) 2008-08-07 2009-08-07 セラミック部材の製造方法
ES09804525T ES2570975T3 (es) 2008-08-07 2009-08-07 Procedimiento para producir un componente cerámico
US13/057,913 US20110127700A1 (en) 2008-08-07 2009-08-07 Method for producing a ceramic component

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/EP2008/006524 WO2009036845A2 (fr) 2007-09-13 2008-08-07 Élément endoprothétique
EPPCT/EP2008/006524 2008-08-07

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WO2010015414A1 true WO2010015414A1 (fr) 2010-02-11

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WO (1) WO2010015414A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
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US8241361B2 (en) 2007-09-13 2012-08-14 Deru Gmbh Endoprosthesis component
CN110944962A (zh) * 2017-07-28 2020-03-31 京瓷株式会社 等离子体处理装置用构件
CN112979322A (zh) * 2021-02-20 2021-06-18 北京北方华创微电子装备有限公司 陶瓷件及其制作方法

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EP0421084A1 (fr) * 1989-09-13 1991-04-10 Asea Brown Boveri Ag Procédé d'obtention d'une pièce par métallurgie des poudres
EP0633440A1 (fr) * 1993-07-02 1995-01-11 Abb Research Ltd. Procédé pour la préparation d'un support de frittage
DE4322083A1 (de) * 1993-07-02 1995-01-12 Abb Research Ltd Verfahren zur Herstellung eines Formteils aus einem pulverförmigen Material
DE4322085A1 (de) * 1993-07-02 1995-01-12 Abb Research Ltd Verfahren zur Herstellung eines Formteils aus einem pulverförmigen Material
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US20040246088A1 (en) * 2003-06-09 2004-12-09 Tdk Corporation Ferrite substrate for thin-film inductors, thin-film common mode filter using the substrate, thin-film common mode filter array using the substrate and manufacturing method of the substrate

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8241361B2 (en) 2007-09-13 2012-08-14 Deru Gmbh Endoprosthesis component
CN110944962A (zh) * 2017-07-28 2020-03-31 京瓷株式会社 等离子体处理装置用构件
CN110944962B (zh) * 2017-07-28 2022-05-31 京瓷株式会社 等离子体处理装置用构件
CN112979322A (zh) * 2021-02-20 2021-06-18 北京北方华创微电子装备有限公司 陶瓷件及其制作方法
CN112979322B (zh) * 2021-02-20 2023-09-08 北京北方华创微电子装备有限公司 陶瓷件及其制作方法

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