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WO2010085764A3 - Method, apparatus, and compositions making anti-reflective coatings for substrates - Google Patents

Method, apparatus, and compositions making anti-reflective coatings for substrates Download PDF

Info

Publication number
WO2010085764A3
WO2010085764A3 PCT/US2010/022010 US2010022010W WO2010085764A3 WO 2010085764 A3 WO2010085764 A3 WO 2010085764A3 US 2010022010 W US2010022010 W US 2010022010W WO 2010085764 A3 WO2010085764 A3 WO 2010085764A3
Authority
WO
WIPO (PCT)
Prior art keywords
deposition
substrate
films
reflective coating
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2010/022010
Other languages
French (fr)
Other versions
WO2010085764A2 (en
Inventor
Chih-Hung Chang
Seung-Yeol Han
Brian K. Paul
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oregon State University
Original Assignee
Oregon State University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oregon State University filed Critical Oregon State University
Publication of WO2010085764A2 publication Critical patent/WO2010085764A2/en
Publication of WO2010085764A3 publication Critical patent/WO2010085764A3/en
Priority to US13/189,411 priority Critical patent/US8553333B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • C09D5/32—Radiation-absorbing paints
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/40—Additives
    • C09D7/60—Additives non-macromolecular
    • C09D7/61—Additives non-macromolecular inorganic
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/40—Additives
    • C09D7/66—Additives characterised by particle size
    • C09D7/67—Particle size smaller than 100 nm
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/40—Additives
    • C09D7/66—Additives characterised by particle size
    • C09D7/68—Particle size between 100-1000 nm
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00—Use of inorganic substances as compounding ingredients
    • C08K3/18—Oxygen-containing compounds, e.g. metal carbonyls
    • C08K3/20—Oxides; Hydroxides
    • C08K3/22—Oxides; Hydroxides of metals
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00—Use of inorganic substances as compounding ingredients
    • C08K3/34—Silicon-containing compounds
    • C08K3/36—Silica
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B2207/00—Coding scheme for general features or characteristics of optical elements and systems of subclass G02B, but not including elements and systems which would be classified in G02B6/00 and subgroups
    • G02B2207/101—Nanooptics

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Biophysics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

Embodiments of the present system and method are useful for chemical deposition, particularly continuous deposition of anti-reflective films. Disclosed systems typically comprise a micromixer and a microchannel applicator. A deposition material or materials is applied to a substrate, such as aluminum, glass, silicon, or polycarbonate, to form a nanostructured, anti-reflective coating. Uniform and highly oriented surface morphologies of films deposited using disclosed embodiments are clearly improved compared to films deposited by a conventional batch process. In some embodiments, an anti-reflective coating is applied to a surface of a solar catalytic microreactor suitable for performing endothermic reactions, where energy is provided to the reactor by absorption of solar radiation. The process can be used to tailor the composition and morphology of the material deposited on a substrate. The present process can be used at low temperatures as a post-deposition, high-temperature annealing step is obviated.
PCT/US2010/022010 2009-01-23 2010-01-25 Method, apparatus, and compositions making anti-reflective coatings for substrates Ceased WO2010085764A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US13/189,411 US8553333B2 (en) 2009-01-23 2011-07-22 Nanostructured anti-reflective coatings for substrates

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US20576609P 2009-01-23 2009-01-23
US61/205,766 2009-01-23

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US13/189,411 Continuation-In-Part US8553333B2 (en) 2009-01-23 2011-07-22 Nanostructured anti-reflective coatings for substrates

Publications (2)

Publication Number Publication Date
WO2010085764A2 WO2010085764A2 (en) 2010-07-29
WO2010085764A3 true WO2010085764A3 (en) 2010-11-18

Family

ID=42356423

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2010/022010 Ceased WO2010085764A2 (en) 2009-01-23 2010-01-25 Method, apparatus, and compositions making anti-reflective coatings for substrates

Country Status (1)

Country Link
WO (1) WO2010085764A2 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8236599B2 (en) 2009-04-09 2012-08-07 State of Oregon acting by and through the State Board of Higher Education Solution-based process for making inorganic materials
US8753515B2 (en) 2009-12-05 2014-06-17 Home Dialysis Plus, Ltd. Dialysis system with ultrafiltration control
US8501009B2 (en) 2010-06-07 2013-08-06 State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University Fluid purification system
US8801979B2 (en) 2010-06-10 2014-08-12 State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University Apparatus and method for continuous production of materials
EP2763719B1 (en) 2011-10-07 2017-08-09 Outset Medical, Inc. Heat exchange fluid purification for dialysis system
US20140009834A1 (en) * 2012-07-05 2014-01-09 Intermolecular, Inc. Novel antireflective coatings with graded refractive index
JP6657186B2 (en) 2014-04-29 2020-03-04 アウトセット・メディカル・インコーポレイテッドＯｕｔｓｅｔ Ｍｅｄｉｃａｌ， Ｉｎｃ． Dialysis system and method
HUP1600384A1 (en) 2016-06-15 2018-01-29 Hungaro Lux Light Kft Anti-reflection coating
EP3500317B1 (en) 2016-08-19 2022-02-23 Outset Medical, Inc. Peritoneal dialysis system and methods
AU2019325668B2 (en) 2018-08-23 2025-03-27 Outset Medical, Inc. Dialysis system and methods
CA3133332A1 (en) 2019-04-30 2020-11-05 Dean Hu Dialysis system and methods
CN110981208A (en) * 2019-12-17 2020-04-10 河南豫科光学科技股份有限公司 Preparation process of ultra-white glass substrate
CN114163882A (en) * 2021-12-06 2022-03-11 中科智清生态技术(苏州)有限公司 Photovoltaic panel film layer and production process for river treatment
CN114524450B (en) * 2022-03-21 2024-01-19 南京科技职业学院 Preparation method of nano cerium oxide ultraviolet absorbent
CN114956592A (en) * 2022-06-28 2022-08-30 河北光兴半导体技术有限公司 Ultra-thin flexible glass manufacturing method and manufacturing system
CN118357136A (en) * 2024-05-21 2024-07-19 广西大学 A method for modifying the hydrophilicity of the inner surface of a microchannel reactor and its application

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001281411A (en) * 2000-03-30 2001-10-10 Fuji Photo Film Co Ltd Glare proof antireflection film and image display device
KR20010106048A (en) * 2000-05-20 2001-11-29 서정은 The permanent live concert permanent live concert which Stars will be appeared and organized
US6343865B1 (en) * 1998-02-17 2002-02-05 Dai Nippon Printing Co., Ltd. Non-glare film, polarizing device and display device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6343865B1 (en) * 1998-02-17 2002-02-05 Dai Nippon Printing Co., Ltd. Non-glare film, polarizing device and display device
JP2001281411A (en) * 2000-03-30 2001-10-10 Fuji Photo Film Co Ltd Glare proof antireflection film and image display device
KR20010106048A (en) * 2000-05-20 2001-11-29 서정은 The permanent live concert permanent live concert which Stars will be appeared and organized

Also Published As

Publication number Publication date
WO2010085764A2 (en) 2010-07-29

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