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WO2010084523A1 - Capteur d'humidité et dispositif de mesure d'humidité - Google Patents

Capteur d'humidité et dispositif de mesure d'humidité Download PDF

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Publication number
WO2010084523A1
WO2010084523A1 PCT/JP2009/000187 JP2009000187W WO2010084523A1 WO 2010084523 A1 WO2010084523 A1 WO 2010084523A1 JP 2009000187 W JP2009000187 W JP 2009000187W WO 2010084523 A1 WO2010084523 A1 WO 2010084523A1
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Prior art keywords
optical fiber
light
humidity
refractive index
film
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English (en)
Japanese (ja)
Inventor
博幸 佐々木
篤志 関
一弘 渡辺
尚平 秋田
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Soka University
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Soka University
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Priority to PCT/JP2009/000187 priority Critical patent/WO2010084523A1/fr
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G01N21/553—Attenuated total reflection and using surface plasmons

Definitions

  • the present invention relates to a surface plasmon humidity sensor using an optical fiber, a surface plasmon humidity sensor, an optical fiber type humidity sensor, and a humidity measuring apparatus using these humidity sensors.
  • a surface plasmon sensor that uses the surface plasmon phenomenon for detection of a measurement object is known.
  • a Kretschmann type surface plasmon sensor known as a kind of surface plasmon sensor has a structure in which a metal film is provided on a flat plate made of glass and the metal film is brought into contact with a sample to be measured.
  • surface plasmon resonance occurs when the incident angle of the light with respect to the metal film and the refractive index of the sample to be measured in contact with the metal film satisfy a predetermined relationship. It occurs and the intensity of reflected light decreases. Therefore, the refractive index of the measurement target sample obtained by detecting the incident angle at which the reflected light attenuates can be used for measurement of the measurement target.
  • Patent Documents 3 and 4 a metal film for generating surface plasmons on the surface of the hetero-core part is provided by fusion-bonding a part called a hetero-core part having a different core diameter at the middle part or end part of the optical fiber.
  • the provided arrangement is disclosed.
  • the present invention provides an optical fiber type surface plasmon humidity sensor, a surface plasmon humidity sensor, an optical fiber type humidity sensor, and a humidity measuring device using these humidity sensors, which have improved sensitivity to humidity. That is the issue.
  • An optical fiber type surface plasmon humidity sensor includes an optical fiber, a light transmission member provided in a middle portion of the optical fiber, and a part of transmitted light interacts with the outside, and an outer peripheral surface of the light transmission member
  • the above-described optical fiber type surface plasmon humidity sensor of the present invention is provided with a light transmission member that causes a part of transmitted light to interact with the outside world in the middle part of the optical fiber, and the outer peripheral surface has the outer peripheral surface.
  • a metal film that generates surface plasmon by reflection of light in the light transmitting member is provided, and a film whose refractive index changes according to the humidity in the atmosphere is provided on the outer peripheral surface of the metal film.
  • the film whose refractive index changes is a plurality of stacked polyion films.
  • the film whose refractive index changes is a gelatin film.
  • the light transmitting member is a hetero-core portion having a core diameter different from the core diameter of the optical fiber.
  • the light transmitting member is a light transmitting member having a refractive index equivalent to a refractive index of a core of the optical fiber or a refractive index of a clad.
  • the optical fiber is a multimode optical fiber.
  • one end of the optical fiber is branched into two to provide a light incident end and an output end, and the other end of the optical fiber reflects light transmitted through the optical fiber. Then, a reflection part for returning to the optical fiber is provided.
  • the surface plasmon humidity sensor of the present invention includes a light transmissive substrate, a metal film that is provided on the surface of the light transmissive substrate, and generates surface plasmons by reflection of light in the light transmissive substrate on the surface. And a film provided on an upper layer of the metal film, the refractive index of which changes according to the humidity in the atmosphere.
  • a metal film that generates surface plasmons by reflection of light in the light-transmitting substrate on the surface is provided on the surface of the light-transmitting substrate, and the upper layer of the metal film.
  • a film whose refractive index changes according to the humidity in the atmosphere is provided.
  • the optical fiber type humidity sensor of the present invention includes an optical fiber, a light transmissive member provided in the middle of the optical fiber, allowing a part of transmitted light to interact with the outside world, and an outer peripheral surface of the light transmissive member. And a film whose refractive index changes depending on the humidity in the atmosphere.
  • a light transmission member that causes a part of transmitted light to interact with the outside world is provided in the middle of the optical fiber, and the outer peripheral surface thereof is adjusted to the atmospheric humidity.
  • a film whose refractive index changes accordingly is provided.
  • the film whose refractive index changes is a plurality of stacked polyion films.
  • the film whose refractive index changes is a gelatin film.
  • the light transmitting member is a hetero core portion having a core diameter different from the core diameter of the optical fiber.
  • the light transmitting member is a light transmitting member having a refractive index equivalent to a refractive index of a core of the optical fiber or a refractive index of a clad.
  • the optical fiber is a multimode optical fiber.
  • one end portion of the optical fiber is branched into two, and an incident end and an exit end of light are provided, and light transmitted through the optical fiber is reflected to the other end portion of the optical fiber. And a reflecting portion for returning to the optical fiber.
  • the humidity measuring device of the present invention is provided on the optical fiber, a light transmission member provided in the middle of the optical fiber, and a part of the transmitted light interacts with the outside world, and an outer peripheral surface of the light transmission member.
  • a light source configured to emit sensor light to the incident end of the optical fiber; and a light receiving unit configured to detect the sensor light emitted from the output end of the optical fiber via the light transmitting member.
  • a light transmission member that causes a part of transmitted light to interact with the outside world is provided in the middle part of the optical fiber, and the light transmission member on the outer peripheral surface is provided on the outer peripheral surface thereof.
  • a metal film that generates surface plasmons by reflection of light therein is provided, and a film whose refractive index changes according to the humidity in the atmosphere is provided on the outer peripheral surface of the metal film.
  • a light source is provided to emit sensor light to the incident end of the optical fiber, and a light receiving unit is provided to detect the sensor light emitted from the output end of the optical fiber via the light transmitting member. ing.
  • the film whose refractive index changes is a plurality of stacked polyion films.
  • the film whose refractive index changes is a gelatin film.
  • the light transmitting member is a hetero-core portion having a core diameter different from the core diameter of the optical fiber.
  • the light transmitting member is a light transmitting member having a refractive index equivalent to a refractive index of a core of the optical fiber or a refractive index of a clad.
  • the optical fiber is a multimode optical fiber.
  • one end portion of the optical fiber is branched into two to provide the incident end and the output end, and reflects light transmitted through the optical fiber to the other end portion of the optical fiber. And a reflecting portion for returning to the optical fiber.
  • the humidity measuring device of the present invention is a light transmissive substrate, a metal film that is provided on the surface of the light transmissive substrate and generates surface plasmons by reflection of light in the light transmissive substrate on the surface, Sensor light is emitted from the inner side of the light-transmitting substrate toward the interface between the metal film and the light-transmitting substrate, provided on the upper layer of the metal film and having a refractive index that changes according to the humidity in the atmosphere. And a light receiving unit that detects the sensor light reflected from the interface between the metal film and the light transmissive substrate.
  • a metal film that generates surface plasmons by reflection of light in the light-transmitting substrate on the surface is provided on the surface of the light-transmitting substrate.
  • a film whose refractive index changes according to the humidity in the atmosphere is provided.
  • a light source is provided to emit sensor light from the inside of the light transmissive substrate toward the interface between the metal film and the light transmissive substrate, and a light receiving unit is provided to reflect from the interface between the metal film and the light transmissive substrate. The sensor light is detected.
  • the humidity measuring device of the present invention is provided on the optical fiber, a light transmission member provided in the middle of the optical fiber, and a part of the transmitted light interacts with the outside world, and an outer peripheral surface of the light transmission member.
  • a light receiving portion for detecting the sensor light is provided on the optical fiber, a light transmission member provided in the middle of the optical fiber, and a part of the transmitted light interacts with the outside world, and an outer peripheral surface of the light transmission member.
  • a film whose refractive index changes according to the humidity in the atmosphere a light source that emits sensor light to the incident end of the optical fiber, and an output end of the optical fiber through the light transmitting member.
  • a light receiving portion for detecting the sensor light for detecting the sensor light.
  • a light transmission member that causes a part of the transmitted light to interact with the outside world is provided in the middle of the optical fiber, and the outer peripheral surface thereof has a humidity according to the humidity in the atmosphere.
  • a film whose refractive index changes is provided.
  • a light source is provided to emit sensor light to the incident end of the optical fiber, and a light receiving unit is provided to detect the sensor light emitted from the output end of the optical fiber via the light transmitting member.
  • the film whose refractive index changes is a plurality of stacked polyion films.
  • the film whose refractive index changes is a gelatin film.
  • the light transmitting member is a hetero-core portion having a core diameter different from the core diameter of the optical fiber.
  • the light transmitting member is a light transmitting member having a refractive index equivalent to a refractive index of a core of the optical fiber or a refractive index of a clad.
  • the optical fiber is a multimode optical fiber.
  • one end of the optical fiber is branched into two to provide the incident end and the output end, and the other end of the optical fiber reflects light transmitted through the optical fiber. Then, a reflection part for returning to the optical fiber is provided.
  • the surface plasmon humidity sensor of the present invention is an optical fiber type surface plasmon sensor in which a light transmitting member such as a hetero core is provided in the middle of an optical fiber, and the humidity in the atmosphere on the outer peripheral surface or upper layer of the metal film. Accordingly, a film whose refractive index changes according to the above is provided, and the sensitivity to humidity in the atmosphere can be improved.
  • a film whose refractive index changes according to the humidity in the atmosphere is provided on the outer peripheral surface of a light transmitting member such as a hetero core provided in the middle of the optical fiber.
  • the sensitivity to the humidity in the atmosphere can be improved.
  • the humidity measuring apparatus of the present invention described above is the surface plasmon humidity sensor or optical fiber type humidity sensor of the present invention, wherein the outer peripheral surface or upper layer of the metal film of the surface plasmon humidity sensor, or the light transmitting member of the optical fiber type humidity sensor.
  • a film whose refractive index changes according to the humidity in the atmosphere is provided on the outer peripheral surface, and the sensitivity to the humidity in the atmosphere can be improved.
  • FIG. 2A is a perspective view of the vicinity of the sensor portion of the optical fiber type surface plasmon humidity sensor according to the first embodiment of the present invention
  • FIG. 2B is a longitudinal sectional view of the vicinity of the sensor portion
  • FIGS. 3A and 3B are cross-sectional views in the longitudinal direction in the vicinity of the sensor portion of the optical fiber type surface plasmon humidity sensor according to the second embodiment of the present invention.
  • FIG. 10A is a perspective view of the vicinity of the sensor portion of the optical fiber type humidity sensor according to the ninth embodiment of the present invention
  • FIG. 10B is a longitudinal sectional view of the vicinity of the sensor portion.
  • Embodiments of an optical fiber type surface plasmon humidity sensor, a surface plasmon humidity sensor, an optical fiber type humidity sensor, and a humidity measuring device using these will be described below with reference to the drawings.
  • a humidity measuring apparatus using the optical fiber type surface plasmon humidity sensor according to the first embodiment of the present invention will be described. With reference to FIG. 1, this humidity measuring device is provided with a sensor part SP in the middle of optical fibers 20a and 20b.
  • a light source 11 that emits sensor light such as a white light source is provided at the light incident end of the optical fiber 20a, and a photodiode that detects sensor light emitted from the light emitting end is provided at the light emitting end of the optical fiber 20b.
  • a spectrum analyzer 12 having a light receiving unit such as a power meter is provided. The sensor unit SP is placed in the measurement target atmosphere, and the humidity of the measurement target atmosphere is measured by measuring the sensor light at this time.
  • FIG. 2A shows a perspective view of the vicinity of the sensor part SP of the optical fiber type surface plasmon humidity sensor used in the humidity measuring apparatus of the present embodiment
  • FIG. 2B shows a longitudinal sectional view of the vicinity of the sensor part SP.
  • the optical fiber type surface plasmon humidity sensor has a configuration in which, for example, a sensor unit SP is provided between one optical fiber 20a and the other optical fiber 20b which are multimode fibers having a core diameter of 50 ⁇ m.
  • the sensor part SP is provided on the outer peripheral surface of the heterocore part 3 that is a light transmitting member that causes a part of the transmitted light to interact with the outside world, and the light in the light transmitting member on the outer peripheral surface of the heterocore part 3.
  • the optical fibers 20a and 20b have a core 21 and a clad 22 provided on the outer periphery thereof.
  • the hetero core part 3 has a core 31 having a core diameter different from the core diameters of the optical fibers 20a and 20b, and a clad 32 provided on the outer peripheral part thereof.
  • the length cl of the heterocore part 3 is 1 mm to several cm.
  • the hetero-core portion 3 and the optical fibers 20a and 20b constituting the sensor portion SP are joined substantially coaxially so that the cores are joined at the interface 4 orthogonal to the longitudinal direction, for example, by fusion using a generalized discharge. Has been.
  • optical fibers 20a and 20b and the hetero core section 3 for example, any of a single mode optical fiber and a multimode optical fiber can be used, and these may be used in combination.
  • the metal film 50 is formed so that the hetero core part 3 of the sensor part SP according to the present embodiment covers the surface side.
  • the metal film 50 is formed, for example, by forming a chromium (Cr) film on the outer surface of the hetero core portion 3 by vapor deposition, and forming a gold (Au) film on the chromium film by vapor deposition.
  • a metal film 50 made of a laminated film is formed.
  • the film thickness of the chromium film is, for example, about several nm
  • the film thickness of the gold film is, for example, about several tens of nm.
  • the metal film 50 may be formed using other metals such as silver (Ag) and aluminum (Al).
  • the surface plasmon is generated by reflection of light inside the hetero-core part 3 at the boundary between the hetero-core part 3 and the metal film 50.
  • the film 60 whose refractive index changes according to the humidity in the atmosphere is, for example, a plurality of stacked polyion films or gelatin films.
  • the polyion film is a polymer film in which a large number of positively or negatively charged functional groups such as ionized carboxylic acid groups (—COO—) and protonated amino groups (—NH 3+) are bonded.
  • the film 60 can have a structure in which a plurality of positive functional group polyion films and negative functional group polyion films are alternately stacked, and a gelatin film can also be used. Any material whose refractive index varies with humidity can be used.
  • the film thickness of the film 60 such as a polyion film is not particularly limited, but is, for example, about 1 nm to several ⁇ m.
  • the diameter bl of the core 31 in the hetero core part 3 and the diameter al of the core 21 of the optical fibers 20a and 20b are the interface 4. Is different. Due to the difference in the core diameter, as shown in FIG. 2A, a leak W to the clad 32 of the hetero-core portion 3 that is a part of the light occurs.
  • the sensor light is transmitted as light in which a plurality of modes are formed due to the normal properties of the optical fiber.
  • the mode of light transmitted by the optical fiber 20a can also be schematically taken as the reflection angle of light at the boundary between the core 21 and the clad 22.
  • the reflection angle of the light in the optical fiber 20a can be considered as a very large number of discrete angles.
  • the mode when light defined in a certain mode is incident on the hetero-core portion 3, the mode is deregulated, the mode is destroyed, and the light is reflected at various reflection angles and becomes a mode-disrupted light. Leaks in.
  • the leaked light is reflected at the boundary between the clad 32 of the hetero-core portion 3 and the metal film 50.
  • an evanescent interaction an interaction occurs between the light in the clad 32 and the metal film 50, a change appears on the spectrum as an optical loss, the reflectivity changes, and in most cases In some cases, the reflectance of light decreases and the intensity of reflected light decreases.
  • the presence of the metal film 50 causes the energy of light to be lost and lost to create a surface plasmon resonance wave by a phenomenon called surface plasmon resonance (SPR). Therefore, the presence of the metal film 50 can increase the change in reflectivity and facilitate the measurement of the change in light intensity.
  • SPR surface plasmon resonance
  • the reflection spectrum of the light in the clad 32 changes according to the refractive index of the film 60 whose refractive index changes according to the humidity which is a substance in contact with the metal film 50.
  • the wavelength causing surface plasmon resonance changes, and this causes a change in the attenuation peak wavelength of the spectrum of the reflected light in the cladding 32.
  • the refractive index of the film 60 can be measured by measuring the spectrum of the reflected light in the hetero-core part 3, and here, the refractive index and the atmospheric humidity of the film 60 whose refractive index changes according to the humidity can be measured. By relating in advance, the humidity value in the atmosphere can be obtained from the refractive index of the film 60.
  • the leak W increases and the loss of sensor light to be transmitted also increases.
  • the leak W is reduced, the loss is also reduced.
  • the magnitude of the leak W that is, the amount of loss of sensor light changes sharply due to changes in the bending of the optical fibers 20a and 20b in the vicinity of the sensor unit SP.
  • the optical fibers 20a and 20b can be bent and held so as to have a certain radius of curvature at the sandwiched position, and the leakage can be adjusted to increase the measurement sensitivity due to the surface plasmon phenomenon. Measurement sensitivity can be improved.
  • the outer periphery of the metal film 50 is a surface plasmon sensor in which a light transmitting member such as the hetero core portion 3 is provided in the middle of the optical fibers 20a and 20b.
  • a film 60 whose refractive index changes according to the humidity in the atmosphere is provided on the surface, and the sensitivity to the humidity in the atmosphere can be improved.
  • a protonated amino group (—NH 3+) is introduced into the surface of the metal film 50 by treatment with an ion coupling agent, and then It can be produced by alternately immersing in a solution of a polymer having an ionized carboxylic acid group (—COO—) and a solution of a polymer having a protonated amino group (—NH 3+).
  • the film thickness of each polyion layer can be adjusted by the concentration of the polymer solution, the immersion time, and the like.
  • a carboxylic acid group (—COO—) ionized on the surface of the metal film 50 by treatment with an ion coupling agent is introduced, and then a polymer solution having a protonated amino group (—NH 3+); It may be alternately immersed in a polymer solution having ionized carboxylic acid groups (—COO—).
  • the gelatin film can be formed, for example, by applying a gelatin aqueous solution to the metal film 50 and drying it.
  • FIGS. 3A and 3B are cross-sectional views in the longitudinal direction in the vicinity of the sensor portion SP of the optical fiber type surface plasmon humidity sensor used in the humidity measuring apparatus of the present embodiment.
  • the diameter bl of the core 31 of the hetero-core part 3 which is a light transmitting member constituting the sensor part SP is larger than the diameter al of the core 21 of the optical fibers 20a and 20b.
  • a metal film 50 is formed on the outer peripheral surface of the hetero core portion 3.
  • the light transmitting member 30 that is not a hetero-core part and made of a material having a refractive index equivalent to the refractive index of the core 21 of the optical fibers 20a and 20b or the refractive index of the cladding 22 is used as the sensor part SP.
  • the fiber 20a, 20b is joined to the middle part.
  • a metal film 50 is formed on the outer peripheral surface of the light transmitting member 30, and a film 60 whose refractive index changes according to the humidity in the atmosphere, such as a polyion film or a gelatin film, is provided on the outer peripheral surface. .
  • the configuration of the present embodiment other than the above is substantially the same as that of the first embodiment.
  • the humidity measuring apparatus using the optical fiber type surface plasmon humidity sensor of the present embodiment in the surface plasmon humidity sensor in which the light transmitting member such as the hetero core portion 3 is provided in the middle of the optical fibers 20a and 20b, the metal film 50 A film 60 whose refractive index changes according to the humidity in the atmosphere is provided on the outer peripheral surface, and the sensitivity to the humidity in the atmosphere can be improved.
  • the humidity measuring device is provided with a sensor part SP in the middle of the optical fibers 20a and 20b.
  • An optical coupler 16 is provided in the middle of the optical fiber 20a, and the optical fiber 20c is branched in the optical coupler 16, and a reflecting portion (mirror) 15 formed by vapor-depositing silver at the end of the optical fiber 20b. Is provided.
  • the end of the optical fiber 20a is the light incident end, and the end of the optical fiber 20c is the light emitting end.
  • a light source 11 is provided at the light incident end of the optical fiber 20a, and a spectrum analyzer 12 is provided at the light emitting end of the optical fiber 20c.
  • the metal film 50 A film 60 whose refractive index changes according to the humidity in the atmosphere is provided on the outer peripheral surface, and the sensitivity to the humidity in the atmosphere can be improved.
  • this humidity measuring device is provided with a sensor part SP in the middle of optical fibers 20a and 20b.
  • a light source 11a for emitting sensor light such as a laser diode or a light emitting diode is provided at the light incident end of the optical fiber 20a, and an optical multimeter for detecting sensor light emitted from the light emitting end at the light emitting end of the optical fiber 20b.
  • the laser diode or the light emitting diode emits light of a single wavelength
  • an optical multimeter that can monitor the light intensity without being split can be used for the light receiving portion.
  • the emission wavelength of a laser diode or a light emitting diode is selected as the wavelength at which surface plasmon resonance occurs, and the refractive index change of the film 60 whose refractive index changes according to humidity from the attenuation of light intensity monitored by an optical multimeter. Can be detected.
  • the humidity measuring apparatus using the optical fiber type surface plasmon humidity sensor of the present embodiment in the surface plasmon humidity sensor in which the light transmitting member such as the hetero core portion 3 is provided in the middle of the optical fibers 20a and 20b, the metal film 50 A film 60 whose refractive index changes according to the humidity in the atmosphere is provided on the outer peripheral surface, and the sensitivity to the humidity in the atmosphere can be improved.
  • the metal film 50 A film 60 whose refractive index changes according to the humidity in the atmosphere is provided on the outer peripheral surface, and the sensitivity to the humidity in the atmosphere can be improved.
  • a humidity measuring apparatus using an optical fiber type surface plasmon humidity sensor according to a fifth embodiment of the present invention will be described. Referring to FIG. 6, this humidity measuring device is provided with a sensor part SP in the middle of the optical fibers 20a and 20b.
  • An optical coupler 16 is provided in the middle of the optical fiber 20a, and the optical fiber 20c is branched at the optical coupler 16.
  • the end of the optical fiber 20a is the light incident end, and the end of the optical fiber 20c is the light exit end.
  • a light source 11a that emits sensor light such as a laser diode or a light emitting diode is provided at the light incident end of the optical fiber 20a, and an optical multimeter that detects sensor light emitted from the light emitting end at the light emitting end of the optical fiber 20c. 12a is provided.
  • the laser diode or the light emitting diode emits light of a single wavelength
  • an optical multimeter that can monitor the light intensity without being split can be used for the light receiving portion.
  • the emission wavelength of a laser diode or a light emitting diode is selected as the wavelength at which surface plasmon resonance occurs, and the refractive index change of the film 60 whose refractive index changes according to humidity from the attenuation of light intensity monitored by an optical multimeter. Can be detected.
  • the metal film 50 A film 60 whose refractive index changes according to the humidity in the atmosphere is provided on the outer peripheral surface, and the sensitivity to the humidity in the atmosphere can be improved.
  • a humidity measuring apparatus using an optical fiber type surface plasmon humidity sensor according to a sixth embodiment of the present invention will be described.
  • the humidity measuring device is provided with a sensor part SP in the middle of the optical fibers 20a and 20b.
  • An OTDR (Optical time-domain reflectometer) device 70 is connected to the optical fiber 20a.
  • the OTDR device 70 itself detects Rayleigh scattered light behind the sensor light incident from the OTDR device 70.
  • the humidity measuring apparatus using the optical fiber type surface plasmon humidity sensor of the present embodiment in the surface plasmon humidity sensor in which the light transmitting member such as the hetero core portion 3 is provided in the middle of the optical fibers 20a and 20b, the metal film 50 A film 60 whose refractive index changes according to the humidity in the atmosphere is provided on the outer peripheral surface, and the sensitivity to the humidity in the atmosphere can be improved.
  • the metal film 50 A film 60 whose refractive index changes according to the humidity in the atmosphere is provided on the outer peripheral surface, and the sensitivity to the humidity in the atmosphere can be improved.
  • this humidity measurement device an optical fiber 20a, the sensor unit SP 1 is provided in an intermediate portion of the 20b, the optical fiber 20b, the sensor unit SP 2 in the middle portion of the 20c provided, further optical fibers 20c, the sensor unit SP 3 in the middle of 20d are provided. That is, a plurality of sensor units SP 1 to SP 3 are connected in series on one optical fiber.
  • An OTDR device 70 is connected to the optical fiber 20a. When the sensor light from the OTDR apparatus 70 is incident, the Rayleigh scattered light backward is generated in each of the plurality of sensor portions SP 1 to SP 3, which OTDR apparatus 70 is detected.
  • the metal film 50 A film 60 whose refractive index changes according to the humidity in the atmosphere is provided on the outer peripheral surface, and the sensitivity to the humidity in the atmosphere can be improved.
  • a humidity measurement apparatus using a Kretschmann type surface plasmon humidity sensor according to an eighth embodiment of the present invention will be described.
  • a metal film 50 that generates surface plasmons by reflection of light in the light-transmitting substrate on the surface is formed on the surface of a light-transmitting substrate 80 made of a glass substrate or the like.
  • a film 60 whose refractive index changes according to the humidity in the atmosphere is provided on the upper layer of the metal film 50.
  • the metal film 50 and the film 60 whose refractive index changes according to the humidity in the atmosphere are the same as those described in the first embodiment.
  • a humidity measuring device can be configured by combining a light source and a light receiving unit.
  • FIG. 10A shows a perspective view of the vicinity of the sensor part SP of the optical fiber type humidity sensor used in the humidity measuring apparatus of the present embodiment
  • FIG. 10B shows a longitudinal sectional view of the vicinity of the sensor part SP. Show.
  • the optical fiber type surface plasmon humidity sensor used in the humidity measuring apparatus of the present embodiment is provided with a sensor unit SP between one optical fiber 20a and the other optical fiber 20b, which are multimode fibers having a core diameter of 50 ⁇ m, for example. It is the structure which was made.
  • the sensor unit SP is provided on the outer surface of the hetero core unit 3 that is a light transmitting member that causes a part of transmitted light to interact with the outside world, and the refractive index changes according to the humidity in the atmosphere.
  • the metal film 50 is substantially omitted in FIGS. 2A and 2B.
  • the optical fibers 20a and 20b have a core 21 and a cladding 22 provided on the outer periphery thereof, and the hetero-core portion 3 has a core 31 having a core diameter different from that of the optical fibers 20a and 20b, and an outer periphery thereof. And a clad 32 provided on the portion.
  • the length cl of the heterocore part 3 is 1 mm to several cm.
  • the hetero-core part 3 and the optical fibers 20a and 20b constituting the sensor part SP are, for example, substantially coaxial so that the cores are joined at the interface 4 orthogonal to the longitudinal direction, for example, by fusion using a generalized discharge. Are joined.
  • optical fibers 20a and 20b and the hetero core section 3 for example, any of a single mode optical fiber and a multimode optical fiber can be used, and these may be used in combination.
  • the film 60 whose refractive index changes according to the humidity in the atmosphere is formed on the hetero core portion 3 of the sensor portion SP according to the present embodiment so as to cover the surface side.
  • the film 60 whose refractive index changes according to the humidity in the atmosphere is the same as in the first embodiment, and is, for example, a plurality of stacked polyion films or gelatin films.
  • the diameter bl of the core 31 in the hetero core part 3 and the diameter al of the core 21 of the optical fibers 20a and 20b are the interface 4. Is different. Due to the difference in the core diameter, as shown in FIG. 2A, a leak W to the clad 32 of the hetero-core portion 3 that is a part of the light occurs.
  • the refractive index of the film 60 whose refractive index changes according to the humidity in the atmosphere the leakage of light leaked to the cladding 32, that is, the loss changes.
  • the refractive index of the film 60 whose refractive index changes increases, and the loss increases.
  • the refractive index of the film 60 whose refractive index changes decreases, and the loss decreases.
  • the humidity value in the atmosphere can be obtained from the transmission loss by relating the transmission loss and the atmospheric humidity in advance.
  • the outer peripheral surface of the light transmitting member is an optical fiber type sensor in which a light transmitting member such as the hetero core portion 3 is provided in the middle of the optical fibers 20a and 20b. Further, a film 60 whose refractive index changes according to the humidity in the atmosphere is provided, and the sensitivity to the humidity in the atmosphere can be improved.
  • the metal film 50 is not formed in the configuration shown in the second embodiment, and a film in which the refractive index changes directly according to humidity is formed on the outer peripheral surface of the light transmitting member. It can also be.
  • the humidity measuring device can be applied to the configurations of the third to seventh embodiments.
  • the present invention is not limited to the above description.
  • the light source and the light receiving unit used are not limited to those described above, and various types can be used.
  • the optical fiber can be a multimode fiber or a single mode fiber.
  • various modifications can be made without departing from the scope of the present invention.
  • the optical fiber type surface plasmon humidity sensor, surface plasmon humidity sensor, and optical fiber type humidity sensor of the present invention can be applied as a head of a humidity measuring device.
  • the humidity measuring device of the present invention can be applied as a device for measuring humidity easily.

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
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Abstract

L'invention porte sur un capteur d'humidité à plasmons de surface avec lequel la sensibilité à l'humidité peut être améliorée, sur un capteur d'humidité à plasmons de surface, sur un type de capteur d'humidité à fibre otique et sur un dispositif de mesure d'humidité. Une partie détecteur SP disposée à mi-chemin des fibres optiques (20a, 20b) a une partie à cœur hétérogène (3) qui amène une partie de la lumière transmise à interagir avec l'extérieur. Un film métallique (50) qui génère des plasmons de surface par la réflexion de la lumière dans un élément transmettant la lumière sur la surface périphérique externe de ladite partie à cœur hétérogène (3) est formé sur ladite surface périphérique externe. Un film (60) dont l'indice de réfraction change selon l'humidité dans l'atmosphère est formé sur la surface périphérique externe du film métallique (50).
PCT/JP2009/000187 2009-01-20 2009-01-20 Capteur d'humidité et dispositif de mesure d'humidité Ceased WO2010084523A1 (fr)

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CN102313792A (zh) * 2011-08-22 2012-01-11 中国兵器工业集团第五三研究所 一种湿度指示器
CN109001123A (zh) * 2018-05-30 2018-12-14 武汉理工大学 一种倏逝波型湿度传感器制作方法及倏逝波型湿度传感器
CN113866131A (zh) * 2021-09-26 2021-12-31 岭南师范学院 一种准分布式湿度在线监测系统

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CN102313792A (zh) * 2011-08-22 2012-01-11 中国兵器工业集团第五三研究所 一种湿度指示器
CN109001123A (zh) * 2018-05-30 2018-12-14 武汉理工大学 一种倏逝波型湿度传感器制作方法及倏逝波型湿度传感器
CN113866131A (zh) * 2021-09-26 2021-12-31 岭南师范学院 一种准分布式湿度在线监测系统
CN113866131B (zh) * 2021-09-26 2024-02-09 岭南师范学院 一种准分布式湿度在线监测系统

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