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WO2010059793A2 - Processus de revêtement pour la production de composants de pile à combustible - Google Patents

Processus de revêtement pour la production de composants de pile à combustible Download PDF

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Publication number
WO2010059793A2
WO2010059793A2 PCT/US2009/065095 US2009065095W WO2010059793A2 WO 2010059793 A2 WO2010059793 A2 WO 2010059793A2 US 2009065095 W US2009065095 W US 2009065095W WO 2010059793 A2 WO2010059793 A2 WO 2010059793A2
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WIPO (PCT)
Prior art keywords
electrode
layer
depositing
sputtering
sofc
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
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PCT/US2009/065095
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English (en)
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WO2010059793A3 (fr
Inventor
Dien Nguyen
Tad Armstrong
Emad El Batawi
Avinash Verma
Ravi Oswal
K.R. Sridhar
Ujwal Deshpande
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Bloom Energy Corp
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Bloom Energy Corp
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Publication date
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Priority to CN2009801459765A priority Critical patent/CN102217130A/zh
Publication of WO2010059793A2 publication Critical patent/WO2010059793A2/fr
Publication of WO2010059793A3 publication Critical patent/WO2010059793A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/88—Processes of manufacture
    • H01M4/8825—Methods for deposition of the catalytic active composition
    • H01M4/8867—Vapour deposition
    • H01M4/8871—Sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/8605—Porous electrodes
    • H01M4/8621—Porous electrodes containing only metallic or ceramic material, e.g. made by sintering or sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/88—Processes of manufacture
    • H01M4/8825—Methods for deposition of the catalytic active composition
    • H01M4/8867—Vapour deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/90—Selection of catalytic material
    • H01M4/9016—Oxides, hydroxides or oxygenated metallic salts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M2008/1293—Fuel cells with solid oxide electrolytes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells

Definitions

  • the present invention is generally directed to fuel cell components, and to solid oxide fuel cell materials in particular.
  • Fuel cells are electrochemical devices which can convert energy stored in fuels to electrical energy with high efficiencies.
  • Electrolyzer cells are electrochemical devices which can use electrical energy to reduce a given material, such as water, to generate a fuel, such as hydrogen.
  • the fuel and electrolyzer cells may comprise reversible cells which operate in both fuel cell and electrolysis mode.
  • a high temperature fuel cell system such as a solid oxide fuel cell (SOFC) system
  • SOFC solid oxide fuel cell
  • the oxidizing flow is typically air
  • the fuel flow can be a hydrocarbon fuel, such as methane, natural gas, propane, ethanol, or methanol.
  • the fuel cell operating at a typical temperature between 750 0 C and 950 0 C, enables combination of the oxygen and free hydrogen, leaving surplus electrons behind.
  • the excess electrons are routed back to the cathode side of the fuel cell through an electrical circuit completed between anode and cathode, resulting in an electrical current flow through the circuit.
  • Fuel cell stacks may be either internally or externally manifolded for fuel and air.
  • internally manifolded stacks the fuel and air is distributed to each cell using risers contained within the stack.
  • the gas flows through openings or holes in the supporting layer of each fuel cell, such as the electrolyte layer, and gas separator of each cell.
  • externally manifolded stacks the stack is open on the fuel and air inlet and outlet sides, and the fuel and air are introduced and collected independently of the stack hardware. For example, the inlet and outlet fuel and air flow in separate channels between the stack and the manifold housing in which the stack is located.
  • SOFC are fabricated either as electrolyte supported, anode supported, or cathode supported, depending on which of the three functional components of the cell provides structural support.
  • the anode and cathode electrodes are painted as an ink onto the opposite surfaces of a planar ceramic electrolyte using a contact method such as screen printing.
  • the interconnects or gas separator plates which are located between adjacent fuel cells contain an oxidation protection barrier layer, such as a lanthanum strontium manganite (LSM) layer on the side which faces the cathode (i.e., air) electrode of the fuel cell.
  • LSM lanthanum strontium manganite
  • the LSM layer may be deposited by a spray process, such as an air plasma thermal spray process.
  • a method of making a solid oxide fuel cell includes providing a solid oxide electrolyte and depositing at least one electrode on the electrolyte by PVD, such as sputtering.
  • a method of making an interconnect for a fuel cell stack includes providing an electrically conductive interconnect, and depositing a layer on the interconnect by PVD, such as depositing a LSM barrier layer by sputtering.
  • the SOFC and the interconnect may be located in the same fuel cell stack.
  • Figure 1 is a side view of a fuel cell stack according to an embodiment of the invention.
  • the inventors realized that the air plasma thermal spray process used to deposit the oxidation protection barrier layer on the interconnect is relatively expensive because of relatively low deposition efficiency and high source material wastage. Likewise, since the SOFC electrode screen printing method is a contact deposition method which includes handling the electrolyte, it requires a relatively thick electrolyte substrate (>150 microns) to have sufficient bulk strength. [0010] The present inventors realized that a physical vapor deposition (PVD) method, such as sputtering, may be used to deposit layers on the interconnect and/or on the SOFC electrolyte.
  • PVD physical vapor deposition
  • thinner electrolytes decrease SOFC cost and improve cell performance.
  • any suitable layers may be formed by PVD, such as sputtering or other PVD methods.
  • the oxidation barrier layer such as an LSM layer
  • the oxidation barrier layer may be deposited by sputtering on side of the interconnect adapted to face the SOFC cathode.
  • one or both electrodes of the SOFC may be deposited on the electrolyte by sputtering.
  • a perovskite cathode electrode, such as an LSM, or lanthanum strontium chromite or cobaltite electrode may be sputtered on the electrolyte.
  • the anode electrode such as a nickel-stabilized zirconia, a nickel-doped ceria, or a nickel-stabilized zirconia-doped ceria cermet electrode may be sputtered on the electrolyte.
  • the anode electrode cermets include a nickel-scandia or yttria stabilized zirconia cermet, nickel-samaria or gadolinia doped ceria cermet or a nickel-scandia or yttria stabilized zirconia-samaria or gadolinia doped ceria cermet.
  • the nickel in the anode may be initially deposited as a nickel oxide and then reduced to nickel by an anneal in a reducing ambient, such as a hydrogen containing ambient.
  • a reducing ambient such as a hydrogen containing ambient.
  • all layers coating the interconnect and both SOFC electrodes are formed by sputtering.
  • only some layers or electrodes, such as one layer or electrode, for example a LSM interconnect oxidation barrier and/or LSM SOFC cathode electrode are formed by sputtering.
  • the layers may be formed by passive and/or reactive sputtering.
  • LSM layers or electrodes may be formed by passive sputtering an LSM layer or electrode from a single LSM target.
  • plural targets containing LSM component materials may be used.
  • metal targets such as La, Sr and Mn targets and/or alloy or composite targets, such as Sr-Mn alloy or composite targets
  • single-phase oxide targets such as La 2 O 3 , SrO or Mn ⁇ 2
  • targets comprising a mixed blend oxides such as La 2 O 3 , SrO and/or MnO 2
  • a targets comprising a mixture of both metal and oxide may be used.
  • reactive sputtering may be used to deposit the LSM layer or electrode.
  • the reactive sputtering may be conducted in an oxygen ambient using a lanthanum- strontium-manganese composite or alloy target.
  • the oxygen ambient may be provided to the sputtering chamber from an oxygen tank or another similar source.
  • separate lanthanum, strontium and manganese targets and/or binary composite or alloy targets such as Sr and Mn composite or alloy targets
  • the selection of the desired target allows the tailoring of the composition of the layer deposited by PVD (such as an electrode or protective layer).
  • composition of the deposited layer may not necessarily be the same as that of the target due to preferential sputtering of the elements in question.
  • anode electrode sputtering either a single cermet target (such as a nickel- stabilized zirconia or doped ceria cermet target) or plural targets (such as a nickel or another metal target and a ceramic target, such as a stabilized zirconia or doped ceria ceramic target) may be used.
  • a nickel oxide target may also be used to deposit an anode electrode comprising nickel oxide and a ceramic, such as a stabilized zirconia and/or a doped ceria. The nickel oxide may be later reduced to nickel with a reducing anneal.
  • Reactive sputtering from metal targets may also be used to form the anode electrodes.
  • Any suitable sputtering deposition systems may be used, such as rf, DC, magnetron (rf or DC type), ion beam or other sputtering systems in which a plasma or an ion beam is used sputter material from a target onto a substrate, such as the interconnect or SOFC electrolyte substrate, may be used.
  • the sputtering process (passive or reactive) may be either static or dynamic. In a static process, a stationary substrate is coated by sputtering (i.e., a "stop-coat-go" type process). In a dynamic process, a moving substrate is coated by sputtering (i.e., a process with continuously moving parts).
  • the material usage or target deposition efficiency would improve, leading to a higher deposition efficiency and lower manufacturing cost compared to thermal spray methods. It is expected that the deposition efficiency by the sputtering method would be much higher than about 50% efficiency achieved with air plasma thermal spray coating method. Furthermore, sputtering can produce a higher density coating for LSM on the interconnect. This allows a thinner barrier coating which results in lower cost and reduced ASR contribution.
  • PVD allows electrode thickness to be orders of magnitude lower than screen printing.
  • PVD such as sputtering
  • a contact deposition method such as screen printing
  • the thick electrode made by screen printing is problematic when the electrolyte is made thinner.
  • cells with electrolyte thickness of less than 150 microns and thick screen printed electrodes experience process-induced camber when they undergo electrode sintering.
  • Non-contact PVD method forms thinner electrodes and thus allows the use of thinner substrates (less than 150 microns), because electrodes having 1-2 micron thickness should lessen the camber effect.
  • the sputtering apparatus is first operated in a sputter etching mode (where the ions bombard the substrate rather than target surface to sputter etch the substrate surface) to clean the substrate surface before depositing the layer, such as an LSM layer, on the cleaned substrate surface.
  • a sputter etching mode where the ions bombard the substrate rather than target surface to sputter etch the substrate surface
  • the layer such as an LSM layer
  • Post-annealing or other treatment substrate may be added.
  • sputtering allows deposition of a layer at different temperatures, or even having multiple layers coated using different conditions, including temperatures, enabling different grain structures, film stress control, etc.
  • plural layers with different grain structures may be deposited on the same substrate (i.e., LSM layer with a smaller grain size may be deposited before or after (i.e., under or over) an LSM layer with a larger grain size).
  • an amorphous LSM layer may be deposited before or after a polycrystalline LSM layer.
  • Sputtering systems provide an ability to crystallize a layer or electrode in-situ, such as by heating the deposited layer during or right after deposition.
  • an amorphous coating of LSM applied to the interconnect or as the cathode electrode may be crystallized in-situ to provide a better electrical bond and possibly eliminate need for a cathode contact layer.
  • both sides of the fuel cell e.g., both sides of the electrolyte
  • the anode and cathode electrodes may be formed on opposite sides of the electrolyte at the same time by positioning the electrolyte between anode material and cathode material sputtering targets.
  • both major sides of the interconnect plate may be coated at the same time by respective barrier and/or contact layers. This would increase throughput and helps relieve stresses on the substrate, such as the electrolyte.
  • the substrate such as the electrolyte or interconnect may be positioned vertically (i.e., with an edge pointing up and down) on a substrate holder such that both major sides face a different sputtering target (or a different set of targets).
  • the substrate may also be positioned horizontally if desired if one target is located above and the other target is located below the substrate.
  • a partition may be provided around the substrate holder to prevent cross contamination from a given target to the opposite side of the substrate.
  • the reactive sputtering stoichiometry can be adjusted, such that an LSM layer with a higher oxygen content may be deposited before or after (i.e., under or over) an LSM layer with a lower oxygen content on the same substrate.
  • LSM is described as an exemplary perovskite
  • other conductive perovskites having a general formula (La x Sri -x )(Mn y Ai -y )O 3 where A is Cr and/or Co, 0.6 ⁇ x ⁇ 0.9, 0 ⁇ y ⁇ 0.4 or (La x Di -x )(E y Gi -y )O 3 where D is Sr or Ca, and E and G are one or more of Fe, Co, Mn, and Cr (0.6 ⁇ x ⁇ 0.9, 0 ⁇ y ⁇ 0.4), including LSCr, LSCo, etc., or noble metals, such as Pt, may also be used.
  • a PVD method such as sputtering, is used to co-deposit multiple functional layers in the same processing run to form a multi-layer coating on an interconnect and/or a multi-layer electrode for a SOFC.
  • This provides an ability to tailor any desired number of layers and tailor the composition to optimize redox tolerance, internal reformation and electrochemical three phase boundary with custom tailored morphology and thickness for each layer.
  • Different types of layers i.e., different composition, crystallinity stress state, etc.
  • a first high temperature oxidation resistant metal alloy layer may be deposited over the interconnect surface.
  • the metal alloy layer may be any suitable high temperature alloy layer, such as a nickel alloy layer which decreases oxide growth on the interconnect.
  • the LSM layer is used as the cathode contact layer and would prevent or decrease Cr evaporation from a Cr alloy interconnect and hence would prevent or decrease cathode poisoning by Cr.
  • the cathode comprises a perovskite material other than LSM, such as a LSCr
  • the contact layer may comprise the same other perovskite layer, such as LSCr.
  • the metal layer may comprise a 0.5 to 5 micron, such as 1-2 micron thick Haynes 230 alloy layer.
  • the second layer may be a 0.5 to 5 micron, such as 1-2 micron LSM layer.
  • the Haynes layer would decrease oxide growth and the LSM would prevent or decrease cathode poisoning.
  • Haynes 230 is an alloy of nickel-chromium and tungsten having the following composition in weigh percent:
  • PVD targets such as sputtering targets can be provided for specific composition, density, and/or with sacrificial fillers such as carbon and other organics that can be oxidized or burn off for porosity formation.
  • sequential deposition can be optimized to lay down in 3-D preferential structure that can "build" the preferred porosity and pore morphology.
  • U.S. Application Serial Number 12/292,151 filed on 1 1/12/08 titled Electrolyte Supported Cell Designed For Longer Life And Higher Power (attorney docket number 079173/0367), incorporated herein by reference in its entirety, describes a SOFC design with porous electrodes and use of pore formers to form porous electrodes.
  • At least one of anode and cathode electrodes is initially deposited with a pore former which is then removed from the electrodes by heating or annealing to leave a porous electrode located over an electrolyte which has a lower porosity.
  • Any suitable pore former material may be used, such as for example carbon (e.g., graphite, activated carbon, petroleum coke, carbon black or the like), starch (e.g., corn, barley, bean, potato, rice, tapioca, pea, sago palm, wheat, canna, or the like), and/or polymer (e.g., polybutylene, polymethylpentene, polyethylene (such as beads), polypropylene (such as beads), polystyrene, polyamides (nylons), epoxies, ABS, acrylics, polyesters (PET), or the like), as described in U.S. Published Application 2007/0006561 , which is incorporated herein by reference.
  • carbon e.g., graphite, activated carbon, petroleum coke, carbon black or the like
  • starch e.g., corn, barley, bean, potato, rice, tapioca, pea, sago palm, wheat, canna, or the like
  • different pore formers may be incorporated into different layers (which can also be referred to as sublayers) of the same electrode to obtain an electrode comprised of different porosity layers.
  • a first type of pore former material may be incorporated into a first electrode layer and a second pore former material different in at least one of size, concentration or composition from the first pore former material is incorporated into a second electrode layer.
  • the second pore former material may comprise particles having a larger or smaller size or diameter than the first pore former material depending if it is desired to form larger or smaller pores in the second layer compared to the first layer.
  • the second pore former material may comprise a material composition which is easier or harder to remove from the electrode by heating than the first pore former material if it is desired to form more or less pores in the in the second layer compared to the first layer.
  • the second pore former material concentration may be higher or lower than that of the first pore former material if it is desired to form more or less pores in the second layer compared to the first layer.
  • the first electrode layer may be designed to have a different porosity (i.e., pore size and/or number of pores) from the second electrode layer by using different sputtering targets with different pore formers to deposit each layer. For example, U.S.
  • a cathode electrode may comprise a doped ceria layer located below a LSM or other perovskite layer or it may comprise two different LSM layers with different compositions or crystallinity.
  • An anode electrode may have a different nickel to ceramic ratio in the cermet in each layer, as described in U.S. Application Serial Number 11/907,204 filed on October 10, 2007 and incorporated herein by reference in its entirety by using different sputtering targets to deposit each layer of the electrode.
  • an anode electrode may comprise a doped ceria layer below a nickel-stabilized zirconia or a nickel-stabilized zirconia-doped ceria cermet layer as described in U.S. Application Serial Number 1 1/785,034 filed on April 13, 2007 and incorporated herein by reference in its entirety by using different sputtering targets to deposit each layer.
  • the LSM barrier layer on the interconnect may be deposited by a powder deposition method.
  • a powder deposition method which uses a magnet (i.e., a magnetic field) to form a uniform layer of LSM powder on the interconnect followed by melting the powder layer to obtain a very thin and uniform film.
  • Any suitable heating source such as resistance heaters, high temperature filament bulbs, laser, etc., may be used for melting the powder.
  • Chemical vapor deposition may be used to deposit electrodes, such as LSM cathode electrodes, in an alternative embodiment.
  • CVD may be used to induce controlled, uniform porosity in a uniform electrode film.
  • Post deposition treatment with high temperature annealing thermal or optical heating, such as UV curing, etc. may follow the deposition.
  • Fuel cell stacks are frequently built from a multiplicity of SOFCs in the form of planar elements, tubes, or other geometries. Fuel and air has to be provided to the electrochemically active surface, which can be large.
  • one component of a fuel cell stack is the so called gas flow separator (referred to as a gas flow separator plate in a planar stack) or interconnect 9 that separates the individual cells in the stack.
  • the gas flow separator plate separates fuel flowing to the fuel electrode (i.e. anode 3, such as a nickel- stabilized zirconia and/or doped ceria cermet) of one cell in the stack from oxidant, such as air, flowing to the air electrode (i.e.
  • the fuel may be a hydrocarbon fuel, such as natural gas for internally reforming cells, or a reformed hydrocarbon fuel comprising hydrogen, water vapor, carbon monoxide and unreformed hydrocarbon fuel for externally reforming cells.
  • the separator 9 contains gas flow passages or channels 8 between the ribs 10. Frequently, the gas flow separator plate 9 is also used as an interconnect which electrically connects the fuel electrode 3 of one cell to the air electrode 7 of the adjacent cell. In this case, the gas flow separator plate which functions as an interconnect is made of or contains electrically conductive material, such as a Cr-Fe alloy.
  • An electrically conductive contact layer such as a nickel contact layer or mesh, may be provided between the anode electrode and the interconnect.
  • a conductive ceramic layer such as the LSM barrier layer discussed above, may be provided between the cathode electrode and the next adjacent interconnect of the stack.
  • Figure 1 shows that the lower SOFC 1 is located between two gas separator plates 9.
  • the electrolyte 5 of the SOFC is a ceramic electrolyte, such as a stabilized zirconia and/or doped ceria, such as yttria stabilized zirconia (“YSZ”), scandia stabilized zirconia (“SCZ”), gadolinia doped ceria (“GDC”) and/or samaria doped ceria (“SDC”) electrolyte.
  • YSZ yttria stabilized zirconia
  • SCZ scandia stabilized zirconia
  • GDC gadolinia doped ceria
  • SDC samaria doped ceria
  • the interlayer material may be used as the interlayer material.
  • the doped ceria phase composition comprises Ce (I - X) A x O 2 , where A comprises at least one of Sm, Gd, or Y, and x is greater than 0.1 but less than 0.4.
  • x may range from 0.15 to 0.3 and may be equal to 0.2.
  • the interlayer(s) may also be formed by sputtering.
  • the stack comprises a plurality of planar or plate shaped fuel cells
  • the fuel cells may have other configurations, such as tubular.
  • vertically oriented stacks are shown in Figure 1
  • the fuel cells may be stacked horizontally or in any other suitable direction between vertical and horizontal.
  • the term "fuel cell stack,” as used herein, means a plurality of stacked fuel cells which share a common fuel inlet and exhaust passages or risers.
  • the "fuel cell stack,” as used herein, includes a distinct electrical entity which contains two end plates which are connected to power conditioning equipment and the power (i.e., electricity) output of the stack. Thus, in some configurations, the electrical power output from such a distinct electrical entity may be separately controlled from other stacks.
  • the term “fuel cell stack” as used herein, also includes a part of the distinct electrical entity. For example, the stacks may share the same end plates. In this case, the stacks jointly comprise a distinct electrical entity. In this case, the electrical power output from both stacks cannot be separately controlled.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Fuel Cell (AREA)
  • Inert Electrodes (AREA)

Abstract

Le procédé selon l’invention de fabrication d’une pile à combustible à oxyde solide (SOFC) consiste à réaliser un électrolyte à oxyde solide et à déposer au moins une électrode sur l’électrolyte par PVD, par exemple par pulvérisation. Un procédé de fabrication d’une interconnexion pour un empilement de piles à combustible consiste à réaliser une interconnexion électriquement conductrice et à déposer une couche sur l’interconnexion par PVD par exemple en déposant une couche de barrière LSM par pulvérisation. La SOFC et l’interconnexion peuvent être situées dans le même empilement de piles à combustible.
PCT/US2009/065095 2008-11-21 2009-11-19 Processus de revêtement pour la production de composants de pile à combustible Ceased WO2010059793A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009801459765A CN102217130A (zh) 2008-11-21 2009-11-19 用于生产燃料电池组件的涂覆工艺

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US19337708P 2008-11-21 2008-11-21
US61/193,377 2008-11-21

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WO2010059793A2 true WO2010059793A2 (fr) 2010-05-27
WO2010059793A3 WO2010059793A3 (fr) 2010-08-26

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CN (1) CN102217130A (fr)
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WO2021232083A1 (fr) * 2020-05-20 2021-11-25 High Tech Coatings Gmbh Procédé de fabrication d'un revêtement protecteur sur un composant

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TWI621302B (zh) 2013-05-16 2018-04-11 博隆能源股份有限公司 用於固體氧化物燃料電池堆的抗腐蝕障壁層及其製造方法
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