WO2010052060A2 - Method for operating an oil-tight vacuum pump and oil-tight vacuum pump - Google Patents
Method for operating an oil-tight vacuum pump and oil-tight vacuum pump Download PDFInfo
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- WO2010052060A2 WO2010052060A2 PCT/EP2009/062161 EP2009062161W WO2010052060A2 WO 2010052060 A2 WO2010052060 A2 WO 2010052060A2 EP 2009062161 W EP2009062161 W EP 2009062161W WO 2010052060 A2 WO2010052060 A2 WO 2010052060A2
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- WIPO (PCT)
- Prior art keywords
- vacuum pump
- oil
- intake
- chamber
- sealed vacuum
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
Definitions
- the invention relates to a method for operating an oil-sealed vacuum pump and an oil-sealed vacuum pump such as a rotary valve or gate valve pump,
- Oil-sealed vacuum pumps have pumping elements arranged in a pumping chamber, such as pistons or slides.
- the seal of the pump elements with respect to the inner wall of the suction chamber is made by oil.
- the suction space is connected to an intake passage and an exhaust passage.
- the object of the invention is to provide a method for operating an oil-sealed vacuum pump and an oil-sealed vacuum pump, in which or in the penetration of oil vapor in one with the A ⁇ saugkanal connected area such as a vacuum chamber or the interior of a vacuum pump is significantly reduced.
- the regulation takes place according to the invention in such a way that the suction TotaStik neither falls below a predetermined pressure range.
- the intake total pressure prevailing in the intake passage is thus regulated by regulation of the intake total pressure Speed of the oil-sealed vacuum pump kept in a predetermined pressure range.
- the intake total pressure is measured in the intake passage of the oil-sealed vacuum pump.
- the rotational speed of this vacuum pump is controlled such that the speed of the vacuum pump is lowered when falling below a lower critical intake total pressure.
- an upper critical total intake pressure increase the speed of the oil-sealed vacuum pump. Since a time delay may occur due to the inertia of the system, it is advantageous that the pressure limits defined by the lower and upper critical intake total pressures are within the predetermined pressure range.
- the lower critical intake total pressure is thus higher than the lower limit defined by the pressure range.
- the upper critical intake total pressure is lower than the upper limit defined by the pressure range. This ensures that the defined pressure range is not left despite the inertia of the system, so that the risk of the entry of oil vapor in the associated with the intake duct vacuum region is also reduced according to the invention in the border areas.
- the pressure prevailing in the suction pressure region is preferably 5-10 "2 -. 0.5 mbar
- the lower and upper critical suction Total pressure at which preferably takes place reducing the rotational speed of the oil-sealed vacuum pump is preferably within the predetermined pressure range, wherein the actual values of the lower critical intake total pressure and the upper critical intake total pressure depend on the inertia of the system.
- the intake channel is cooled. This is preferably done by influx of the intake duct with ambient air, which may preferably also be cooled air.
- ambient air which may preferably also be cooled air.
- the cooling of the intake passage is an independent of the speed control invention.
- the invention relates to an oil-sealed vacuum pump with pumping elements arranged in the pump chamber.
- the o-sealed vacuum pump is a rotary valve or gate valve pump.
- the intake duct is curved in the direction of flow directly in front of an intake opening of the pump chamber. Due to the curvature of the intake duct is the risk of leakage of oil particles from the pump chamber into the Ansaugkana! reduced. Due to the curvature of the intake channel, the oil particles in the exit direction of the oil particles shortly after passing through the inlet opening to an air cooled inner wall of the intake passage. On the inside of the intake passage of the oil vapor is cooled and the oil vapor pressure is significantly reduced so that a return flow of the oil vapor through the Ansaugkanai is avoided in a connected to the intake duct vacuum region, such as a vacuum chamber or a pump chamber of a connected pump.
- a connected to the intake duct vacuum region such as a vacuum chamber or a pump chamber of a connected pump.
- the curvature of the intake passage is selected such that a straight exit of a particle from the intake passage is avoided from each point of the inlet opening of the pumping chamber.
- the curvature preferably has an angle of 45 °, whereby in the case of a partially annular configuration of the intake duct in the region of the curvature, this is thus Ve of a circular ring.
- the curvature is at least 60 ° and more preferably at least 90 ° or 1 A circular ring.
- the curvature preferably has a length of at least 80 mm, particularly preferably of at least 100 mm. It is particularly preferred that the Krürnrnungscardi of the intake takes place counter to the direction of rotation of the pump elements bearing rotor. This has the advantage that oil vapor particles pass to a large extent through the inlet opening due to an impulse exerted by the pump elements such as the slides on the particles.
- the direction of the pulse is influenced by the direction of rotation of the rotor carrying the pumping elements, so that by a curvature of the intake channel in the opposite direction, the amount of in the with the Ansaugkana! connected vacuum region penetrating oil vapor can be further reduced.
- the lowering of the oil vapor partial pressure is carried out by condensation of oil vapor in the intake passage.
- Thedeetnraum may be, for example, a fan for air cooling, the cooling is preferably carried out by ambient air, which may optionally be cooled.
- the cooling device on guide elements, such as baffles, baffles or the like, to direct the flow of air in the direction of the intake duct, in particular targeted toward critical areas of the intake duct.
- guide elements such as baffles, baffles or the like.
- a gas inlet is arranged in the intake passage.
- An additional flow in the intake channel in the direction of the pump chamber of the oil-sealed vacuum pump can be generated via the gas inlet.
- the risk of leakage of oil vapor is reduced.
- the valve is connected to the gas inlet a controllable valve. At higher pressures, the valve is preferably completely closed. The lower the pressures, the more the valve is opened, so that a larger amount of additional gas flows into the intake passage. As a result, the SaugAusslee that occur by introducing an additional gas is reduced.
- a gas inlet in the intake passage represents an independent of the curvature of the intake passage invention, wherein in a particularly preferred embodiment, the two inventions for further reducing the risk of ⁇ ldarnpf-outlet can be combined.
- the oil-sealed vacuum pump for carrying out the method according to the invention has a total pressure sensor arranged in the intake duct.
- a further pressure sensor is arranged in the vacuum region connected to the intake passage.
- the drawing shows a schematic cross section of a preferred embodiment of a rotary vane pump according to the invention.
- the schematically illustrated rotary vane pump has in a housing 10 an eccentrically mounted rotor 12.
- the rotor 12 carries in slits 14 slide 16, which rest against the inner wall 18 of the pumping chamber 20.
- the housing 10 of the oil-sealed rotary vane pump to an intake passage 22 is sucked through the medium in the direction of an arrow 24.
- the suction channel 22 is connected to a vacuum chamber, not shown, or a suction chamber of a series-connected further vacuum pump.
- the sucked through the A ⁇ saugkanal 22 medium is ejected via an ejection channel 26 due to the rotation of the rotor 12 in the direction of an arrow 28, as shown by the arrow 30.
- a pump chamber 32 is formed within the housing 10. Since it is an oil-sealed rotary vane pump, the seal between the rotor 12 and the inner wall 18 and between the sliders 16 and the inner wall 18 of the pumping chamber 32 due to an oil film, the resulting oil vapor occurs here not only through the discharge channel 26, but can also against the suction direction 24 into the intake passage 22 pass. Optionally, the oil vapor from the intake passage 22 may penetrate into the vacuum region connected to the intake passage 22.
- the intake duct 22 which in the illustrated embodiment is a curve around 90 °, which takes place counter to the direction of rotation 28 of the rotor 12. Due to the curvature of the Ansaugkanais 22 as shown by the dashed line 34, the risk of leakage of oil vapor particles is reduced because they meet even at unfavorable exit angles from an inlet opening 36 of the pumping chamber to an inner wall 38 of the curved Ansaugkanais 22.
- an exemplary embodiment illustrated as fan 40 can be provided.
- the cooling device 40 blows ambient air to an outside of the Ansaugkanafs 22.
- At this cooling fins 42 may be provided to further improve the cooling.
- guide elements 44 such as baffles or baffles to ensure a targeted flow against the outside of the intake duct.
- a pressure sensor 46 is arranged in the intake passage 22.
- the measurement of the total pressure in the intake channel 22 is effected by the pressure sensor 46.
- the pressure sensor 46 is connected via a line 48 to a regulating / control device 50.
- a control of the rotational speed of the rotor 12 of the vacuum pump takes place via a control line 52 connected to the control device 50.
- the in particular electronic control / control device 50 can be connected to a further pressure sensor arranged in the vacuum region, so that a comparison of the pressure prevailing in the vacuum region, such as the vacuum chamber and the pressure prevailing in the suction channel 22, is directly possible. On the basis of the comparison, a control of the rotational speed of the rotor 12 can then take place.
- a further measure according to the invention consists in providing a gas inlet 54 in the intake duct 22. Through this gas can be admitted into the intake duct, in particular in critical pressure ranges, in order to generate an additional flow.
- the gas inlet is connected in a preferred embodiment with a controllable valve 56.
- the valve 56 is preferably connected via a line 58 to the Regeh / control device 50.
- the amount of gas flowing into the intake passage through the gas inlet 54 can thus be regulated in dependence on the measured pressure in the intake passage and / or the vacuum region.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
Verfahren zum Betreiben einer ölqedichteten Vakuumpumpe sowie ölqedichtete Vakuumpumpe Method for operating an oil-sealed vacuum pump and oil-sealed vacuum pump
Die Erfindung betrifft ein Verfahren zum Betreiben einer ölgedichteten Vakuumpumpe sowie eine öigedichtete Vakuumpumpe wie Drehschieber- oder Sperrschieber-Pumpe,The invention relates to a method for operating an oil-sealed vacuum pump and an oil-sealed vacuum pump such as a rotary valve or gate valve pump,
Öigedichtete Vakuumpumpen weisen in einem Schöpfraum angeordnete Pumpelemente auf, wie Kolben oder Schieber. Die Dichtung der Pumpeiemente gegenüber der Innenwand des Schöpfraums erfolgt durch Öl. Ferner ist der Schöpfraum mit einem Ansaugkanal und einem Ausstoßkanal verbunden. Beim Betrieb ölgedichteter Vakuumpumpen tritt insbesondere bei niedrigen Ansaugdrucken, d, h. bei weniger als 5-10"2 mbar, Öldampf in den Ansaugkanal ein, Von diesem kann der Öldampf in eine Vakuumkammer oder eine andere an den Ansaugkanal angeschlossene Pumpe, wie z» B. eine Turbomolekularpumpe, eindringen. Dies führt zu Verunreinigungen in der Vakuumkammer bzw. der TurbomoSekuJarpumpe und kann insbesondere in der Turbomolekularpumpe zu Beschädigungen führen.Oil-sealed vacuum pumps have pumping elements arranged in a pumping chamber, such as pistons or slides. The seal of the pump elements with respect to the inner wall of the suction chamber is made by oil. Further, the suction space is connected to an intake passage and an exhaust passage. When operating oil-sealed vacuum pumps occurs, in particular at low suction pressures, d, h. at less than 5-10 "2 mbar, oil vapor enters the intake duct, from where the oil vapor can penetrate into a vacuum chamber or other pump connected to the intake duct, such as a turbomolecular pump, leading to contamination in the vacuum chamber or the TurbomoSekuJarpumpe and can lead to damage, especially in the turbomolecular pump.
Aufgabe der Erfindung ist es, ein Verfahren zum Betreiben einer ölgedichteten Vakuumpumpe sowie eine öigedichtete Vakuumpumpe zu schaffen, bei welchem bzw. bei der das Eindringen von Öldampf in einen mit dem Aπsaugkanal verbundenen Bereich wie eine Vakuumkammer oder das Innere einer Vakuumpumpe erheblich verringert wird.The object of the invention is to provide a method for operating an oil-sealed vacuum pump and an oil-sealed vacuum pump, in which or in the penetration of oil vapor in one with the Aπsaugkanal connected area such as a vacuum chamber or the interior of a vacuum pump is significantly reduced.
Die Lösung der Aufgabe erfolgt erfiridungsgernäß durch ein Verfahren zum Betreiben einer ölgedichteten Vakuumpumpe gemäß Anspruch 1 bzw. durch eine öigedichtete Vakuumpumpe gemäß Anspruch 8,Erfiridungsgernäß by a method for operating an oil-sealed vacuum pump according to claim 1 or by an oil-sealed vacuum pump according to claim 8,
Untersuchungen haben gezeigt, dass die Öidampf-Strömung aus dem Schöpfraum ölgedtchteter Vakuumpumpen in deren Ansaugkana! und gegebenenfalls in einen mit dem Ansaugkanal verbundenen Bereich, wie eine Vakuumkammer oder das Innere einer anderen mit dem Ansaugkanai verbundenen Vakuumpumpe dadurch hervorgerufen wird, dass der ÖSdampf- Partiai-Druck im Ansaugkana! der ölgedichteten Pumpe höher ist als in dem mit dem Ansaugkanal verbundenen Bereich. Um die Menge des Öldampfes zu verringern, die aus dem Ansaugkanal in den angeschlossenen Bereich gelangen kann, wird nach dem erfindungsgemäßen Verfahren in einem ersten Schritt der Ansaug-Totaldruck der öigedichteten Vakuumpumpe in ihrem Ansaugkanal gemessen. In Abhängigkeit des in dem Ansaugkanai gemessenen Ansaug-Totaldrucks erfolgt ein Regeln der Drehzahl der Vakuumpumpe, Die Regelung erfolgt erfindungsgemäß derart, dass der Ansaug-TotaSdruck einen vorgegebenen Druckbereich weder unter- noch überschreitet Erfindungsgemäß wird der im Ansaugkanal herrschende Ansaug-Totaldruck somit durch Regelung der Drehzahl der ölgedichteten Vakuumpumpe in einem vorgegebenen Druckbereich gehalten. Hierdurch ist die Gefahr des Austretens von Öldampf aus dem Ansaugkanal in den angeschlossenen Bereich wie z, B. eine Vakuumkammer erheblich verringert.Investigations have shown that the oi-vapor flow from the pump chamber oil-filled vacuum pumps in their Ansaugkana! and possibly in a region connected to the intake passage, such as a vacuum chamber or the interior of another connected to the Ansaugkanai vacuum pump is thereby caused that the ÖSdampf- Partiai-pressure in Ansaugkana! the oil-sealed pump is higher than in the area connected to the intake passage. In order to reduce the amount of oil vapor which can pass from the intake passage into the connected area, the intake total pressure of the oil-sealed vacuum pump in its intake passage is measured by the method according to the invention in a first step. In accordance with the invention, the regulation takes place according to the invention in such a way that the suction TotaSdruck neither falls below a predetermined pressure range. According to the invention, the intake total pressure prevailing in the intake passage is thus regulated by regulation of the intake total pressure Speed of the oil-sealed vacuum pump kept in a predetermined pressure range. As a result, the risk of leakage of oil vapor from the intake passage in the connected area such as z, B. a vacuum chamber is significantly reduced.
Vorzugsweise erfolgt ein Messen des Ansaug-Totaldrucks im Ansaugkanal der ölgedichteten Vakuumpumpe. Erfindungsgemäß wird die Drehzahl dieser Vakuumpumpe derart geregelt, dass beim Unterschreiten eines unteren kritischen Ansaug-Totaldrucks die Drehzahl der Vakuumpumpe abgesenkt wird. Dementsprechend erfolgt vorzugsweise beim Überschreiten eines oberen kritischen Ansaug-Totaldrucks ein Erhöhen der Drehzahl der ölgedichteten Vakuumpumpe. Da aufgrund der Trägheit des Systems eine Zeitverzögerung eintreten kann, ist es vorteilhaft, dass die durch den unteren und oberen kritischen Ansaug-Totaldruck definierten Druckgrenzen innerhalb des vorgegebenen Druckbereichs liegen. Der untere kritische Ansaug-Totaldruck ist somit höher als die durch den Druckbereich definierte untere Grenze. Entsprechend ist der obere kritische Ansaug-Totaldruck niedriger als die durch den Druckbereich definierte obere Grenze. Hierdurch ist gewährleistet, dass der definierte Druckbereich trotz der Trägheit des Systems nicht verlassen wird, so dass auch in den Grenzbereichen die Gefahr des Eintretens von Öldampf in den mit dem Ansaugkanal verbundenen Vakuumbereich erfindungsgemäß reduziert wird.Preferably, the intake total pressure is measured in the intake passage of the oil-sealed vacuum pump. According to the invention, the rotational speed of this vacuum pump is controlled such that the speed of the vacuum pump is lowered when falling below a lower critical intake total pressure. Accordingly, preferably occurs when an upper critical total intake pressure increase the speed of the oil-sealed vacuum pump. Since a time delay may occur due to the inertia of the system, it is advantageous that the pressure limits defined by the lower and upper critical intake total pressures are within the predetermined pressure range. The lower critical intake total pressure is thus higher than the lower limit defined by the pressure range. Accordingly, the upper critical intake total pressure is lower than the upper limit defined by the pressure range. This ensures that the defined pressure range is not left despite the inertia of the system, so that the risk of the entry of oil vapor in the associated with the intake duct vacuum region is also reduced according to the invention in the border areas.
Erfindungsgemäß beträgt der in dem Ansaugkanal herrschende Druckbereich vorzugsweise 5-10"2 - 0,5 mbar. Der untere und der obere kritische Ansaug- Totaldruck, bei dem vorzugsweise ein Verringern der Drehzahl der ölgedichteten Vakuumpumpe erfolgt, liegt vorzugsweise innerhalb des vorgegebenen Druckbereichs, wobei die tatsächlichen Werte des unteren kritischen Ansaug-Totatdrucks und des oberen kritischen Ansaug-Totaldrucks von der Trägheit des Systems abhängen.According to the invention the pressure prevailing in the suction pressure region is preferably 5-10 "2 -. 0.5 mbar The lower and upper critical suction Total pressure at which preferably takes place reducing the rotational speed of the oil-sealed vacuum pump is preferably within the predetermined pressure range, wherein the actual values of the lower critical intake total pressure and the upper critical intake total pressure depend on the inertia of the system.
Bei einer weiteren bevorzugten Ausführungsform des erfϊndungsgemäßen Verfahrens erfolgt ein Kühlen des Ansaugkanals. Dies erfolgt vorzugsweise durch Anströmen des Ansaugkanals mit Umgebungsluft, wobei es sich vorzugsweise auch um gekühlte Luft handeln kann. Durch die Kühlung des Ansaugkanals und das hierdurch hervorgerufene Absenken der Temperatur im Ansaugkanai kann ein größerer Druckbereich zugelassen werden, innerhalb dem ein entsprechendes erfindungsgemäßes Regeln der Drehzahl der ölgedichteten Vakuumpumpe erfolgt. Das Kühlen des Ansaugkanals stellt eine von der Drehzahlregelung unabhängige Erfindung dar. Ferner betrifft die Erfindung eine Ölgedichtete Vakuumpumpe mit im Schöpfraum angeordneten Pumpelementen. Ferner ist mit dem Schöpfraum ein Ansaugkanai und ein Ausstoßkana! verbunden. Insbesondere handelt es sich bei der öigedichteten Vakuumpumpe um eine Drehschieber- oder Sperrschieber-Pumpe. Erfindungsgemäß ist der Ansaugkanai in Strömuπgsrichtung unmittelbar vor einer Einiassöffnung des Schöpfraums gekrümmt ausgebildet. Durch die Krümmung des Ansaugkanals ist die Gefahr des Austretens von Ölpartikeln aus dem Schöpfraum in den Ansaugkana! verringert. Aufgrund der Krümmung des Ansaugkanals treffen die Öipartikel in Austrittsrichtung der Öipartikel kurz hinter dem Durchtreten der Einlassöffnung auf eine Luft gekühlte Innenwand des Ansaugkanals. An der Innenseite des Ansaugkanals wird der Öldampf gekühlt und der Öldampfdruck so deutlich reduziert, dass ein Rückströmen des Öldampfes durch den Ansaugkanai in einen mit dem Ansaugkanal verbundenen Vakuumbereich, wie eine Vakuumkammer oder einen Schöpfraum einer angeschlossenen Pumpe, vermieden wird.In a further preferred embodiment of the method according to the invention, the intake channel is cooled. This is preferably done by influx of the intake duct with ambient air, which may preferably also be cooled air. By cooling the intake passage and the resulting lowering of the temperature in Ansaugkanai a larger pressure range can be allowed within which a corresponding inventive rules the speed of the oil-sealed vacuum pump. The cooling of the intake passage is an independent of the speed control invention. Furthermore, the invention relates to an oil-sealed vacuum pump with pumping elements arranged in the pump chamber. Furthermore, with the pump chamber a Ansaugkanai and a Ausstoßkana! connected. In particular, the o-sealed vacuum pump is a rotary valve or gate valve pump. According to the invention, the intake duct is curved in the direction of flow directly in front of an intake opening of the pump chamber. Due to the curvature of the intake duct is the risk of leakage of oil particles from the pump chamber into the Ansaugkana! reduced. Due to the curvature of the intake channel, the oil particles in the exit direction of the oil particles shortly after passing through the inlet opening to an air cooled inner wall of the intake passage. On the inside of the intake passage of the oil vapor is cooled and the oil vapor pressure is significantly reduced so that a return flow of the oil vapor through the Ansaugkanai is avoided in a connected to the intake duct vacuum region, such as a vacuum chamber or a pump chamber of a connected pump.
Besonders bevorzugt ist es hierbei, dass die Krümmung des Ansaugkanals derart gewählt ist, dass von jedem Punkt der Einlassöffnung des Schöpfraums ein gradliniger Austritt eines Partikels aus dem Ansaugkanal vermieden ist. Um die Menge austretender Öldampf-Partikel stark zu reduzieren, weist die Krümmung vorzugsweise einen Winkel von 45° auf, wobei es sich bei einer teil-kreisringförmigen Ausgestaltung des Ansaugkanals im Bereich der Krümmung somit um Ve eines Kreisrings handelt. Vorzugsweise beträgt die Krümmung mindestens 60° und besonders bevorzugt mindestens 90° bzw. 1A Kreisring.It is particularly preferred in this case that the curvature of the intake passage is selected such that a straight exit of a particle from the intake passage is avoided from each point of the inlet opening of the pumping chamber. In order to greatly reduce the amount of escaping oil vapor particles, the curvature preferably has an angle of 45 °, whereby in the case of a partially annular configuration of the intake duct in the region of the curvature, this is thus Ve of a circular ring. Preferably, the curvature is at least 60 ° and more preferably at least 90 ° or 1 A circular ring.
Gemessen an der Mittellinie des Kanals weist die Krümmung vorzugsweise eine Länge von mindestens 80 mm, besonders bevorzugt von mindestens 100 mm auf. Besonders bevorzugt ist es, dass die Krürnrnungsrichtung des Ansaugkanals entgegen der Drehrichtung eines die Pumpelemente tragenden Rotors erfolgt. Dies hat den Vorteil, dass Öldampf-Partikel zu einem großen Teil durch die Einlassöffnung aufgrund eines Impulses hindurchtreten, den die Pumpeiemente wie die Schieber auf den Partikel ausüben. Die Impulsrichtung wird hierbei durch die Drehrichtung des die Pumpelemente tragenden Rotors beeinflusst, so dass durch eine Krümmung des Ansaugkanals in entgegengesetzte Richtung die Menge des in dem mit dem Ansaugkana! verbundenen Vakuumbereichs eindringenden Öldampfs weiter reduziert werden kann.Measured at the center line of the channel, the curvature preferably has a length of at least 80 mm, particularly preferably of at least 100 mm. It is particularly preferred that the Krürnrnungsrichtung of the intake takes place counter to the direction of rotation of the pump elements bearing rotor. This has the advantage that oil vapor particles pass to a large extent through the inlet opening due to an impulse exerted by the pump elements such as the slides on the particles. The direction of the pulse is influenced by the direction of rotation of the rotor carrying the pumping elements, so that by a curvature of the intake channel in the opposite direction, the amount of in the with the Ansaugkana! connected vacuum region penetrating oil vapor can be further reduced.
Um, wie vorstehend anhand des erfindungsgemäßen Verfahrens beschrieben, ein Absenken der Temperatur innerhalb des Ansaugkanals zu realisieren und hierdurch zusätzlich zur Veränderung des Öldampf-Partial-Drucks im Ansaugkanal auch das Kondensieren von Öldampf-Partikeln an der Innenwand des Ansaugkanais zu unterstützen, erfolgt in besonders bevorzugter Ausführungsform ein Kühlen des Ansaugkanals durch Vorsehen einer Kühleinrichtung, Die Absenkung des Öldampf-Partial-Drucks erfolgt durch Kondensation von Öldampf im Ansaugkanal. Bei der Kühletnrichtung kann es sich beispielsweise um ein Gebläse zur Luftkühlung handeln, wobei die Kühlung vorzugsweise durch Umgebungsluft erfolgt, die gegebenenfalls gekühlt sein kann. Vorzugsweise weist die Kühieinrichtung Leitelemente, wie Leitbleche, Leitwände oder dergleichen auf, um die Luftströmung in Richtung des Ansaugkanals, insbesondere gezielt in Richtung kritischer Bereiche des Ansaugkanals zu lenken. Zu einer weiteren Verbesserung der Kühlung ist es möglich, den Ansaugkanal an seiner Außenseite mit Kühlrippen zu versehen.In order, as described above with reference to the method according to the invention, to realize a lowering of the temperature within the intake duct and thereby additionally to the change of the oil vapor partial pressure in the intake duct to assist the condensation of oil vapor particles on the inner wall of the intake duct, takes place in particular Cooling of the intake passage by providing a cooling device, the lowering of the oil vapor partial pressure is carried out by condensation of oil vapor in the intake passage. The Kühletnrichtung may be, for example, a fan for air cooling, the cooling is preferably carried out by ambient air, which may optionally be cooled. Preferably, the cooling device on guide elements, such as baffles, baffles or the like, to direct the flow of air in the direction of the intake duct, in particular targeted toward critical areas of the intake duct. To further improve the cooling, it is possible to provide the intake duct on its outside with cooling fins.
Bei einer weiteren bevorzugten Ausführungsform, die eine selbständige Erfindung darstellt, ist im Ansaugkanal ein Gaseinlass angeordnet. Über den Gaseinlass kann eine Zusatzströmung im Ansaugkanal in Richtung des Schöpfraums der ölgedichteten Vakuumpumpe erzeugt werden. Hierdurch ist die Gefahr des Austretens von Öldampf reduziert. In bevorzugter Ausführungsform ist mit dem Gaseinlass ein steuerbares Ventil verbunden. Bei höheren Drücken ist das Ventil vorzugsweise vollständig geschlossen. Je niedriger die Drücke werden, desto mehr wird das Ventil geöffnet, so dass eine größere Menge an zusätzlichem Gas in den Ansaugkanal strömt. Hierdurch sind die Saugvermögensverluste, die durch Einleiten eines zusätzlichen Gases auftreten, verringert.In a further preferred embodiment, which represents an independent invention, a gas inlet is arranged in the intake passage. An additional flow in the intake channel in the direction of the pump chamber of the oil-sealed vacuum pump can be generated via the gas inlet. As a result, the risk of leakage of oil vapor is reduced. In preferred Embodiment is connected to the gas inlet a controllable valve. At higher pressures, the valve is preferably completely closed. The lower the pressures, the more the valve is opened, so that a larger amount of additional gas flows into the intake passage. As a result, the Saugvermögensverluste that occur by introducing an additional gas is reduced.
Das Vorsehen eines Gaseinlasses im Ansaugkanal stellt eine von der Krümmung des Ansaugkanals unabhängige Erfindung dar, wobei in besonders bevorzugter Ausführungsform die beiden Erfindungen zur weiteren Reduzierung der Gefahr des Öldarnpf-Austritts miteinander kombiniert werden können.The provision of a gas inlet in the intake passage represents an independent of the curvature of the intake passage invention, wherein in a particularly preferred embodiment, the two inventions for further reducing the risk of Öldarnpf-outlet can be combined.
Bei einer weiteren bevorzugten Ausführungsform weist die ölgedichtete Vakuumpumpe zur Durchführung des erfindungsgemäßen Verfahrens einen im Ansaugkanai angeordneten Total-Drucksensor auf. Gegebenenfalls ist ein weiterer Drucksensor in dem mit dem Ansaugkanal verbundenen Vakuumbereich angeordnet.In a further preferred embodiment, the oil-sealed vacuum pump for carrying out the method according to the invention has a total pressure sensor arranged in the intake duct. Optionally, a further pressure sensor is arranged in the vacuum region connected to the intake passage.
Aufgrund des erfindungsgemäßen Verfahrens sowie der erfinduπgsgemäßen Ausgestaltung der öigedichteten Vakuumpumpe kann die Gefahr des Eindringens von Öldampf in einen Vakuumbereich wie eine Vakuumkammer oder einen Schöpfraum einer in Reihe mit der öigedichteten Vakuumpumpe verbundenen, insbesondere trockenen Vakuumpumpe erheblich reduziert, insbesondere ausgeschlossen werden. Dies hat den Vorteil, dass ölgeschmierte Vakuumpumpen in Bereichen eingesetzt werden können, in denen nach dem Stand der Technik nur trockenlaufende Pumpen verwendet werden können. Hierbei ist insbesondere zu berücksichtigen, dass ölgedichtete Vakuumpumpen, wie Drehschieber- oder Sperrschieberpumpen eine deutlich höhere Lebensdauer als trockenlaufende Pumpen haben. Hierdurch kann eine erhebliche Kosteneinsparung erzielt werden. Nachfolgend wir die Erfindung anhand einer bevorzugten Ausführungsform unter Bezugnahme auf die anliegende Zeichnung näher erläutert.Due to the method according to the invention and the erfinduπgsgemäßen design of the sealed vacuum pump, the risk of penetration of oil vapor in a vacuum region such as a vacuum chamber or a suction chamber connected in series with the öigedichteten vacuum pump, in particular dry vacuum pump can be significantly reduced, in particular excluded. This has the advantage that oil-lubricated vacuum pumps can be used in areas in which only dry-running pumps can be used according to the prior art. It should be noted in particular that oil-sealed vacuum pumps, such as rotary vane or gate valves have a significantly higher life than dry-running pumps. This can be achieved a significant cost savings. Hereinafter, the invention with reference to a preferred embodiment with reference to the accompanying drawings explained in more detail.
Die Zeichnung zeigt einen schematischen Querschnitt einer bevorzugten Ausführungsform einer erfindungsgemäßen Drehschieberpumpe.The drawing shows a schematic cross section of a preferred embodiment of a rotary vane pump according to the invention.
Die schematisch dargestellte Drehschieberpumpe weist in einem Gehäuse 10 einen exzentrisch gelagerten Rotor 12 auf. Der Rotor 12 trägt in Schlitzen 14 Schieber 16, die an der Innenwand 18 des Schöpfraums 20 anliegen. Ferner weist das Gehäuse 10 der ölgedichteten Drehschieberpumpe einen Ansaugkanal 22 auf, durch den Medium in Richtung eines Pfeils 24 angesaugt wird. Der Ansaugkanal 22 ist mit einer nicht dargestellten Vakuumkammer oder einem Schöpfraum einer in Reihe geschalteten weiteren Vakuumpumpe verbunden. Das durch den Aπsaugkanal 22 angesaugte Medium wird über einen Ausstoßkanal 26 aufgrund der Drehung des Rotors 12 in Richtung eines Pfeils 28, wie durch den Pfeil 30 dargestellt, ausgestoßen.The schematically illustrated rotary vane pump has in a housing 10 an eccentrically mounted rotor 12. The rotor 12 carries in slits 14 slide 16, which rest against the inner wall 18 of the pumping chamber 20. Furthermore, the housing 10 of the oil-sealed rotary vane pump to an intake passage 22, is sucked through the medium in the direction of an arrow 24. The suction channel 22 is connected to a vacuum chamber, not shown, or a suction chamber of a series-connected further vacuum pump. The sucked through the Aπsaugkanal 22 medium is ejected via an ejection channel 26 due to the rotation of the rotor 12 in the direction of an arrow 28, as shown by the arrow 30.
Innerhalb des Gehäuses 10 ist ein Schöpfraum 32 ausgebildet. Da es sich um eine ölgedichtete Drehschieberpumpe handelt, erfolgt die Dichtung zwischen Rotor 12 und der Innenwand 18 sowie zwischen den Schiebern 16 und der Innenwand 18 des Schöpfraums 32 aufgrund eines Ölfilms, Der entstehende Öldampf tritt hierbei nicht nur durch den Ausstoßkanal 26 aus, sondern kann auch entgegen der Ansaugrichtung 24 in den Ansaugkanal 22 gelangen. Gegebenenfalls kann der Öldampf aus dem Ansaugkanal 22 in den mit dem Ansaugkanal 22 verbundenen Vakuumbereich eindringen.Within the housing 10, a pump chamber 32 is formed. Since it is an oil-sealed rotary vane pump, the seal between the rotor 12 and the inner wall 18 and between the sliders 16 and the inner wall 18 of the pumping chamber 32 due to an oil film, the resulting oil vapor occurs here not only through the discharge channel 26, but can also against the suction direction 24 into the intake passage 22 pass. Optionally, the oil vapor from the intake passage 22 may penetrate into the vacuum region connected to the intake passage 22.
Um die Gefahr des Eindringens von Öldampf in den Vakuumbereich zu verringern, sind erfindungsgemäß mehrere unterschiedliche Maßnahmen vorgeschlagen.In order to reduce the risk of the penetration of oil vapor in the vacuum region, several different measures are proposed according to the invention.
Gemäß der ersten Maßnahme erfolgt ein Krümmen des Ansaugkanals 22, wobei es sich in der dargestellten Ausführungsform um eine Krümmung um 90° handelt, die entgegen der Drehrichtung 28 des Rotors 12 erfolgt. Aufgrund der Krümmung des Ansaugkanais 22 ist wie durch die gestrichelte Linie 34 dargestellt, die Gefahr des Austretens von Öldampf-Partikeln verringert, da diese auch bei ungünstigen Austrittswinkeln aus einer Einlassöffnung 36 des Schöpfraums auf einen Innenwand 38 des gekrümmten Ansaugkanais 22 treffen.According to the first measure, there is a bending of the intake duct 22, which in the illustrated embodiment is a curve around 90 °, which takes place counter to the direction of rotation 28 of the rotor 12. Due to the curvature of the Ansaugkanais 22 as shown by the dashed line 34, the risk of leakage of oil vapor particles is reduced because they meet even at unfavorable exit angles from an inlet opening 36 of the pumping chamber to an inner wall 38 of the curved Ansaugkanais 22.
Um ein Kondensieren der Dampfpartikel an der Innenwand 38 des Ansaugkanals 22 zu verbessern, kann gemäß einer weiteren Maßnahme eine dargestellten Ausfuhrungsbeispiel a!s Lüfter 40 dargestellte Kuhleinrichtung vorgesehen sein. Die Kuhleinrichtung 40 bläst Umgebungsiuft an eine Außenseite des Ansaugkanafs 22. An diesem können zur weiteren Verbesserung der Kühlung Kühlrippen 42 vorgesehen sein. Ferner weist die Kühleinrichtung 40 in bevorzugter Ausführungsform Leitelemente 44, wie Leitbleche oder Leitwände auf, um ein gezieltes Anströmen der Außenseite des Ansaugkanals zu gewährleisten.In order to improve condensation of the vapor particles on the inner wall 38 of the intake duct 22, according to a further measure, an exemplary embodiment illustrated as fan 40 can be provided. The cooling device 40 blows ambient air to an outside of the Ansaugkanafs 22. At this cooling fins 42 may be provided to further improve the cooling. Further, the cooling device 40 in a preferred embodiment, guide elements 44, such as baffles or baffles to ensure a targeted flow against the outside of the intake duct.
Durch die Kuhleinrichtung 40 erfolgt ein Reduzieren der Temperatur innerhalb des Ansaugkanals 22 der den Öldampf-Partiai-Druck verändert. Dies fuhrt zu einer weiteren Reduzierung der Gefahr des Eindringens von Öldampf in den mit dem Ansaugkanal 22 verbundenen Vakuumbereich.By the cooling device 40, a reduction of the temperature within the intake passage 22 of the oil vapor Partiai pressure is changed. This leads to a further reduction in the risk of oil vapor intrusion into the vacuum region connected to the intake passage 22.
Gemäß einer weiteren erfindungsgemäßen Maßnahme ist im Ansaugkanal 22 ein Drucksensor 46 angeordnet. Durch den Drucksensor 46 erfolgt insbesondere das Messen des Totaidrucks in dem Ansaugkanal 22. Der Drucksensor 46 ist über eine Leitung 48 mit einer Regel~/Steuereinrichtung 50 verbunden. In Abhängigkeit des gemessenen Drucks in dem Ansaugkanal 22 erfolgt über eine mit der Steuereinrichtung 50 verbundene Steuerleitung 52 ein Regeln der Drehzahl des Rotors 12 der Vakuumpumpe.According to a further inventive measure, a pressure sensor 46 is arranged in the intake passage 22. In particular, the measurement of the total pressure in the intake channel 22 is effected by the pressure sensor 46. The pressure sensor 46 is connected via a line 48 to a regulating / control device 50. Depending on the measured pressure in the intake passage 22, a control of the rotational speed of the rotor 12 of the vacuum pump takes place via a control line 52 connected to the control device 50.
Ferner kann die insbesondere elektronische Rege!-/Steuereinrichtung 50 mit einem weiteren im Vakuumbereich angeordneten Drucksensor verbunden sein, so dass unmittelbar ein Vergleich des in dem Vakuumbereich wie der Vakuurnkarnmer und des in dem Ansaugkaπai 22 herrschenden Drucks möglich ist. Auf Basis des Vergleichs kann sodann eine Regelung der Drehzahl des Rotors 12 erfolgen.Furthermore, the in particular electronic control / control device 50 can be connected to a further pressure sensor arranged in the vacuum region, so that a comparison of the pressure prevailing in the vacuum region, such as the vacuum chamber and the pressure prevailing in the suction channel 22, is directly possible. On the basis of the comparison, a control of the rotational speed of the rotor 12 can then take place.
Eine weitere erfindungsgemäße Maßnahme besteht darin, in dem Ansaugkanal 22 einen Gaseinlass 54 vorzusehen. Durch diesen kann insbesondere in kritischen Druckbereichen Gas in den Ansaugkanal eingelassen werden, um eine Zusatzströmung zu erzeugen. Hierzu ist der Gaseinlass in bevorzugter Ausfuhrungsform mit einem steuerbaren Ventil 56 verbunden. Das Ventil 56 ist über eine Leitung 58 vorzugsweise mit der Regeh/Steuereinrichtung 50 verbunden. Die Menge des Gases, das durch den Gaseinlass 54 in den Ansaugkanal einströmt, kann somit in Abhängigkeit des gemessenen Drucks in dem Ansaugkanal und/ oder dem Vakuumbereich geregelt werden. A further measure according to the invention consists in providing a gas inlet 54 in the intake duct 22. Through this gas can be admitted into the intake duct, in particular in critical pressure ranges, in order to generate an additional flow. For this purpose, the gas inlet is connected in a preferred embodiment with a controllable valve 56. The valve 56 is preferably connected via a line 58 to the Regeh / control device 50. The amount of gas flowing into the intake passage through the gas inlet 54 can thus be regulated in dependence on the measured pressure in the intake passage and / or the vacuum region.
Claims
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP09783213A EP2342462A2 (en) | 2008-11-08 | 2009-09-21 | Method for operating an oil-tight vacuum pump and oil-tight vacuum pump |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE200810057548 DE102008057548A1 (en) | 2008-11-08 | 2008-11-08 | Method for operating an oil-sealed vacuum pump and oil-sealed vacuum pump |
| DE102008057548.8 | 2008-11-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO2010052060A2 true WO2010052060A2 (en) | 2010-05-14 |
| WO2010052060A3 WO2010052060A3 (en) | 2010-07-29 |
Family
ID=42096522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/EP2009/062161 Ceased WO2010052060A2 (en) | 2008-11-08 | 2009-09-21 | Method for operating an oil-tight vacuum pump and oil-tight vacuum pump |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP2342462A2 (en) |
| DE (1) | DE102008057548A1 (en) |
| WO (1) | WO2010052060A2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108414406A (en) * | 2018-04-27 | 2018-08-17 | 华北电力大学 | A kind of overcritical form experimental system |
| US20230296096A1 (en) * | 2019-12-19 | 2023-09-21 | Leybold France S.A.S. | Lubricant-sealed vacuum pump, lubricant filter and method |
| GB2619105A (en) * | 2022-05-23 | 2023-11-29 | Leybold France S A S | Pump start up control |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB747344A (en) * | 1952-02-29 | 1956-04-04 | Edwards & Co London Ltd W | Improvements in or relating to oil sealed rotary vacuum pumps |
| CH359237A (en) * | 1958-05-07 | 1961-12-31 | Balzers Hochvakuum | Single or multi-stage gas ballast pump |
| CH419421A (en) * | 1964-09-14 | 1966-08-31 | Balzers Patent Beteilig Ag | Rotary vane pump |
| AU5180279A (en) * | 1978-10-27 | 1980-05-01 | Dynavac Pty. Ltd. | Vacuum pump inlet valve |
| JPS62243982A (en) * | 1986-04-14 | 1987-10-24 | Hitachi Ltd | 2-stage vacuum pump and operating method thereof |
| DE3828608A1 (en) * | 1988-08-23 | 1990-03-08 | Alcatel Hochvakuumtechnik Gmbh | Vacuum-pump device |
| JP2001207984A (en) * | 1999-11-17 | 2001-08-03 | Teijin Seiki Co Ltd | Vacuum exhaust device |
| CA2737435C (en) * | 2005-11-22 | 2013-11-26 | Korona Group Ltd. | Internal combustion engine |
-
2008
- 2008-11-08 DE DE200810057548 patent/DE102008057548A1/en not_active Withdrawn
-
2009
- 2009-09-21 EP EP09783213A patent/EP2342462A2/en not_active Withdrawn
- 2009-09-21 WO PCT/EP2009/062161 patent/WO2010052060A2/en not_active Ceased
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108414406A (en) * | 2018-04-27 | 2018-08-17 | 华北电力大学 | A kind of overcritical form experimental system |
| CN108414406B (en) * | 2018-04-27 | 2024-04-12 | 华北电力大学 | Supercritical window experiment system |
| US20230296096A1 (en) * | 2019-12-19 | 2023-09-21 | Leybold France S.A.S. | Lubricant-sealed vacuum pump, lubricant filter and method |
| US12196207B2 (en) * | 2019-12-19 | 2025-01-14 | Leybold France Sas | Lubricant-sealed vacuum pump, lubricant filter and method |
| GB2619105A (en) * | 2022-05-23 | 2023-11-29 | Leybold France S A S | Pump start up control |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102008057548A1 (en) | 2010-05-12 |
| WO2010052060A3 (en) | 2010-07-29 |
| EP2342462A2 (en) | 2011-07-13 |
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