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WO2009122340A1 - Transducteurs à ultrasons permettant d'obtenir un mélange microfluidique - Google Patents

Transducteurs à ultrasons permettant d'obtenir un mélange microfluidique Download PDF

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Publication number
WO2009122340A1
WO2009122340A1 PCT/IB2009/051304 IB2009051304W WO2009122340A1 WO 2009122340 A1 WO2009122340 A1 WO 2009122340A1 IB 2009051304 W IB2009051304 W IB 2009051304W WO 2009122340 A1 WO2009122340 A1 WO 2009122340A1
Authority
WO
WIPO (PCT)
Prior art keywords
membrane
fluid
cavity
fluidic channel
transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IB2009/051304
Other languages
English (en)
Inventor
Peter Dirksen
Ralph Kurt
Jacob M. J. Den Toonder
Ronaldus M. Aarts
Mareike Klee
Elisabeth M. L. Alexander-Moonen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of WO2009122340A1 publication Critical patent/WO2009122340A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30—Micromixers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/45—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads
    • B01F25/451—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by means for moving the materials to be mixed or the mixture
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/45—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads
    • B01F25/452—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces
    • B01F25/4521—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces the components being pressed through orifices in elements, e.g. flat plates or cylinders, which obstruct the whole diameter of the tube
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F31/00—Mixers with shaking, oscillating, or vibrating mechanisms
    • B01F31/30—Mixers with shaking, oscillating, or vibrating mechanisms comprising a receptacle to only a part of which the shaking, oscillating, or vibrating movement is imparted
    • B01F31/31—Mixers with shaking, oscillating, or vibrating mechanisms comprising a receptacle to only a part of which the shaking, oscillating, or vibrating movement is imparted using receptacles with deformable parts, e.g. membranes, to which a motion is imparted
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F31/00—Mixers with shaking, oscillating, or vibrating mechanisms
    • B01F31/80—Mixing by means of high-frequency vibrations above one kHz, e.g. ultrasonic vibrations
    • B01F31/86—Mixing by means of high-frequency vibrations above one kHz, e.g. ultrasonic vibrations with vibration of the receptacle or part of it
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F7/00—Pumps displacing fluids by using inertia thereof, e.g. by generating vibrations therein

Definitions

  • the present invention is related to microfluidic devices which are suitable to mix, transport, pump, and separate fluids on a micro-scale. These microfluidic devices make use of ultrasound transducers, which are integrated in channels of the device.
  • microfluidic devices and systems in particular those used for bio molecular diagnostics, fluids, e.g. chemicals, have to be transported and mixed on a very small scale. Due to the high costs involved downscaling of the processes in these systems is very attractive. Accordingly, the architecture of microfluidic devices asks for new fluid transport and mixing mechanisms.
  • Stroock et al. (“Chaotic mixer for microchannels", Science, Volume 295, page 647, 2002) have presented a passive method for mixing streams of steady pressure-driven flows in microchannels at low Reynolds numbers. Using this method the length of the channel required for mixing grows only logarithmically with the number and hydrodynamic dispersion along the channel is reduced relative to that in a simple, smooth channel. This method uses bas-relief structures on the floor of the channel that are easily fabricated with commonly used methods of planar lithography.
  • Sritharan et al. (“Acoustic mixing at low Reynolds numbers", Applied Physics Letters 88, page 054102, 2006) demonstrated the potential of acoustic mixing by attaching a piezoelectric ultrasound transducer at the surface of a microfluidic device. According to this document interaction of small fluid volumes and acoustic waves in a solid (bulk acoustic waves) leads to pronounced streaming effects in the fluid inducing mixing and stirring. However, local control of fluid mixing as required by many applications is difficult with this approach since the bulk acoustic waves are traveling almost within the entire device. Moreover, Sritharan et al.
  • US 6,854,338 B2 discloses fluidic devices and systems which have micromachined ultrasonic transducers integrated into microchannels. The ultrasonic transducers generate and receive ultrasonic waves. The transducers can be disposed and operated to measure fluidic characteristics such as pressure, density, viscosity or flow rate and can also be used to mix and pump fluids.
  • US 6,986,601 B2 describes a method for mixing at least two fluids in a mixing chamber.
  • the mixing chamber includes a piezoelectric component for mechanical actuation of fluid motion within or adjacent the mixing chamber.
  • the piezoelectric component includes at least first, second, third, and fourth actuation domains, wherein the first and third actuation domains are on first and third opposite sides of the piezoelectric component and the second and fourth actuation domains are on second and fourth opposite sides of the piezoelectric component.
  • the first and third domains are actuated at a first phase of an oscillation frequency and the second and fourth domains are actuated at a second phase of the oscillation frequency.
  • the present invention is based on the idea to provide a microfluidic device or system with an integrated ultrasound transducer, wherein the system is volume conservative. Accordingly the present invention provides a microfluidic device comprising at least one fluidic channel and an integrated ultrasound transducer, said transducer comprising a first vibratable membrane being at least partially in contact with the fluid within the fluid channel and a cavity adjacent the membrane, said cavity being adapted to transfer fluid into the cavity and vice versa.
  • the cavity may either be on the same side of the first vibratable membrane as the fluidic channel or on the opposite side.
  • the first membrane may be located between the fluidic channel and the cavity and the first membrane may comprise a hole connecting the fluidic channel with the cavity.
  • the cavity is formed by the motion or vibration of the membrane: If the first membrane moves away from the center of the fluidic channel, space or volume is created which may be occupied by the fluid within the fluidic channel.
  • a cavity is provided adjacent the first membrane which is adapted to transfer fluid into the cavity and vice versa.
  • the membrane is actuated in such a vibration mode that there is no net volume change in the fluid of the channel.
  • This is preferably realized by driving said membrane to vibrate at a harmonic frequency higher than the fundamental frequency.
  • the cavity adapted for fluid transfer is formed by the vibrations of the first membrane.
  • the first membrane is driven in an even harmonics state e.g., the second harmonic.
  • the second harmonic e.g., the second harmonic.
  • two ultrasound transducers are located close to each other and driven in anti-phase alternatively odd harmonics could be applied as well.
  • two oscillations such as 2,2 or 4,4 and even 2,4 or 4,2 modes. This would imply that more than one cavity being adapted to transfer fluid into the cavity and vice versa is formed simultaneously.
  • the present invention is, on the whole, described with respect to mixing fluids on a micro-scale the present invention is also applicable to transporting, pumping, and separating fluids in microfluidic devices.
  • the present invention makes use of acoustic waves in order to manipulate fluids on a micro-scale. Due to the vibrating membrane an acoustic wave comprising a pressure interference pattern is generated. Said interference pattern is the driving force for the movement of the fluid(s). Said induced motion may then be used to transport or pump fluid in a predetermined direction to mix the fluid, optionally with other components or to separate mixed fluids from each other.
  • the microfluidic device further comprises a second membrane which is at least partially in contact with the fluid within the fluidic channel wherein said second membrane is located opposite to the first membrane.
  • the second membrane may simply be a passive membrane, which vibrates or oscillates together with the first membrane e.g. in phase.
  • two cavities adapted for fluid transfer are created on two sides of the microfluidic channel in an alternating manner. It is, however, even more preferred to provide a further ultrasound transducer adapted to vibrate the second membrane. This allows for more complicated oscillation patterns e.g. in-phase, anti-phase and the like. In this case the mixing efficiency may be enhanced.
  • the first membrane is located between the fluidic channel and the cavity and the first membrane comprises a hole or a plurality of holes connecting the fluidic channel with the cavity. If the first membrane vibrates, fluid may be transferred into the cavity and vice versa. This is a particularly efficient way of mixing the fluid since the fluid is forced to flow through the hole within the first membrane.
  • This configuration is preferably used together with an odd mode e.g. the first harmonic.
  • the membrane is driven in a mode of vibration, which induces a velocity of the fluid in the channel substantially perpendicular to the flow direction of the fluid within the channel.
  • other vibration modes explicitly also fall within the scope of protection.
  • This second component may be a second fluid and/or a soluble component such as labels, capture probes, enzymes, primers or the like. Vibrating the membrane(s) exposes the second component to the fluid within the fluidic channel and thus causes mixing of the fluid with the second component on demand.
  • a membrane which is initially closed and which may be opened if necessary.
  • suitable means may be additionally provided. For example local heater elements may be provided on the membrane, which are adapted to burn a hole or a plurality of holes into the membrane.
  • the ultrasound transducers can be actuated i.e.
  • MUT micromachined ultrasound transducer
  • PMUT piezoelectric micromachined ultrasound transducer
  • CMUT capacitive micromachined ultrasound transducer
  • Typical oscillation frequencies of the ultrasound transducers are in the range between 150 kHz and 300 MHz more preferred in the range from 500 kHz to 100 MHz and even more preferred in the range from 1 MHz to 20 MHz.
  • the operating voltage may be 10- 100 Volts.
  • each CMUT element comprises asymmetric electrodes. Thus it is facilitated to drive the membrane in odd harmonics.
  • the present invention is further directed to a microfluidic device or system in which a plurality of the above-described ultrasound transducer mixing elements is provided.
  • a plurality of the above-described ultrasound transducer mixing elements may be provided.
  • several ultrasound transducers may be arranged in a series along the channel and/or substantially parallel to the width direction of a single fluidic channel or a plurality of fluidic channels.
  • the ultrasonic mixing elements may be integrated in one wall of the microfluidic channel or into opposite walls of the microfluidic channel. The latter may enhance the mixing efficiency.
  • an array or a matrix of such mixing elements may be provided.
  • the single mixing elements may be controlled independently and simultaneously.
  • predetermined mixing patterns may be realized allowing to tune the mixing of the fluid according to the demand of a specific application. For example different areas or individual elements may be switched on or off in a predetermined sequence. This allows, for instance, for achieving a peristaltic movement along the channel. Since the typical diameter of a membrane according to the present application lies in the range between 10 and 300 micron (thickness about 0.3- 10 ⁇ m), a large amount of ultrasonic mixing elements may be integrated into a small fluidic channel. This is particularly important for downscaling the size of so-called "lab on a chip" devices.
  • the present invention is further directed to a method for mixing a fluid in at least one fluidic channel by means of an integrated ultrasound transducer comprising a vibratable membrane being at least partially in contact with the fluid within the fluidic channel, wherein the fluid is transferred from the fluidic channel into a cavity and vice versa in response to the vibration of the membrane.
  • the vibratable membrane is vibrated such as to provide a standing acoustic wave within the fluidic channel. It is preferred to use a device as described above in order to perform the inventive method. Accordingly all features described with respect to the microfluidic device may also be implemented into the method according to the present invention.
  • the device and method according to the present invention are advantageous over the prior art since they provide active and local control over the mixing process.
  • a highly efficient mixing of fluids may thus be achieved at relatively low costs.
  • the provision of ultrasonic mixing elements in arrays as described above allows for performing highly complex and specifically adapted protocols for different types of experiments.
  • the device and method according to the present application are suitable for application in different fields but in particular in the field of molecular diagnostics.
  • the present invention allows for rapid and sensitive detection of proteins and nucleic acids in complex biological mixtures such as blood or saliva.
  • the present invention may be implemented for on-site testing as well as for diagnostics in centralized laboratories. Preferred applications are in the medical area (DNA, protein diagnostics for cardiology, infectious disease and oncology, or pharmaceutical applications e.g., medicine development). But also applications in food and environmental diagnostics are envisaged.
  • Fluid mixing according to the present invention may be achieved in several types of biosensors such as on a "lab on a chip" or on (Q)PCR devices.
  • Fig. 1 schematically shows membranes according to the present invention.
  • Fig. 2 shows an SEM micrograph of a single element CMUT.
  • Fig. 3 schematically depicts the structure of a device according to the present invention.
  • Fig. 4 shows a preferred embodiment of a PMUT according to the present invention.
  • Fig. 5 shows a preferred embodiment of a CMUT according to the present invention.
  • Fig. 6 is a SEM micrograph showing a cut through a single element CMUT.
  • Fig. 1 schematically shows a membrane 5 driven in a second harmonic state; the fluidic channel 3 and the cavity 6 are schematically depicted by means of broken lines. Accordingly a first portion 5 a of membrane 5 is driven towards the micro fluidic channel 3, whereas a second portion 5b of membrane 5 is driven away from the micro fluidic channel 3. Thus a cavity 6 is formed which is adapted to allow fluid to be transferred into said cavity.
  • a second harmonic guarantees that there is no net volume change in the fluid of the fluidic channel i.e. the system is volume-conservative.
  • membrane 5 ' comprises a hole 9 as shown in Fig. 1.
  • the membrane 5' separates the cavity 6 from the fluidic channel 3.
  • the hole 9 in membrane 5' connects the fluidic channel 3 with the cavity 6 adjacent to the membrane 5'.
  • fluid can flow into and out of said cavity depending on the vibration mode of the membrane 5'.
  • This configuration is preferably used in an odd harmonic such as the first harmonic.
  • Fig. 2 is a scanning electronic microscope (SEM) micrograph showing a single element CMUT which is adapted to be integrated into a microfluidic device according to the present invention.
  • a single flow channel of the microfluidic device may accommodate several such CMUT elements.
  • the CMUT element comprises a membrane 5, a bottom electrode 7 and a top electrode 8, which is embedded within membrane 5. Furthermore, etch channels 10 with sealed edge holes may be identified.
  • Fig. 3 schematically depicts the structure of a CMUT according to the present invention which, is similar to the one shown in the SEM micrograph of Fig. 2.
  • a microfluidic channel 3 is formed between substrates 1 and 2.
  • Substrate 1 comprises an integrated CMUT.
  • substrate 2 could comprise an integrated CMUT.
  • both substrates 1 and 2 comprise an integrated CMUT.
  • each substrate comprises a plurality of such CMUTs.
  • the CMUT element comprises a flexible membrane 5, spacers 4 and a cavity 6.
  • the CMUT can be actuated by driving the electrodes 7 and 8. These electrodes can be manufactured in such a way that they comprise segments, such as segments 8a and 8b of Fig. 3.
  • the membrane 5 is driven in a vibration mode, which induces velocity of the fluid in the channel 3 perpendicular to the flow direction. It is preferred to induce a second harmonics mode as indicated in Fig. 3. However, other modes, in particular other even modes, do fall under the scope of the present invention. It is particularly preferred to drive membrane 5 in such a way as to create standing waves in the channel dimension D.
  • a piezoelectric thin film transducer is used for mixing.
  • An example for a PMUT is shown schematically in Fig. 4.
  • Membrane 5 is in contact with cavity 6 comprising the fluid to be mixed.
  • the PMUT element further comprises a piezo thin film 11 and electrodes 8a and 8b, which are attached to a fixed edge 13. If an electric field 12 is applied between electrodes 8a and 8b, a flexural motion of membrane 5 is induced.
  • the piezoelectric transducer can be operated either in a d33 mode, with the electrodes on the same side of the piezoelectric thin film or alternatively in a d31 mode. In the latter the electrodes to excite the piezoelectric film are processed on both sides of the piezoelectric layer.
  • a d33 mode operated thin film transducer where the membrane is in direct contact with the fluid is shown in Fig. 4.
  • a matching material such as a hydrogel can be applied between the membranes and the polymer channel walls for transmission of the ultrasound waves into the fluid.
  • the device according to the present invention is preferably fabricated by CMOS compatible processors. This allows for running the fabrication in standard IC facilities.
  • a silicon substrate is thermally oxidized and a nitride layer of about 400 nm thickness is applied by Plasma Enhanced Chemical Vapor Deposition (PECVD). Then an aluminum bottom electrode is created using standard patterning techniques with a mask. The aluminum electrode is roughly 500 nm thick. Subsequently a further nitride layer of 400 nm thickness is deposited by PECVD. Then a further aluminum layer of 300-1000 nm thickness is applied by patterning techniques, which later on will provide the cavity. This second aluminum layer is again coated with nitride by PECVD. Subsequently a 500 nm aluminum layer is deposited as top electrode. A hole is provided in the nitride membrane and the second aluminum layer is etched away. Finally, a 600 nm sealing membrane from nitride is deposited by PECVD. The finished product can be seen in Fig. 5.
  • PECVD Plasma Enhanced Chemical Vapor Deposition
  • piezoelectric micromachined transducers In case of the piezoelectric micromachined transducers, standard silicon- compatible layers as membranes are processed on top of a silicon substrate. Piezoelectric thin films and electrodes are deposited. The silicon is finally etched away to achieve piezoelectric thin film transducers on top of a thin film membrane.
  • the device is preferably fabricated from one of the well known large area electronics technologies (also called thin film technology TFT), such as a amorphous silicon (a-Si), low temperature polycrystalline silicon (LTPS) or organic transistor technologies. It is further preferred that the thin film produced according to any of these techniques is applied on glass, ceramics or a polymeric substrate material.
  • TFT thin film technology
  • the actuators are addressed individually by an active matrix addressing.
  • the active matrix allows for independently controlling a large number of components on the device with a small number of control terminals. This device enables accurate and localized control of actuation in an active matrix set-up, without the need for large device periphery to locate the I/O pins.
  • the micro fluidic device further comprises electronic components suitable for sensing properties of the fluid, such as the fluid flow, the result of the mixing, the viscosity and the like.
  • electronic components suitable for sensing properties of the fluid, such as the fluid flow, the result of the mixing, the viscosity and the like.
  • the electronic components comprises thin film transistors having gate, source and drain electrodes.
  • the active matrix includes a set of select lines and a set of control lines such that each individual component may be controlled by one select line and one control line. The gate electrode of each thin film transistor is then connected to a select line.
  • a memory device is provided for storing a control signal supplied to the control terminal.
  • CMUT elements and PMUT elements may be combined within the same channel of a microfluidic device according to the present invention.
  • different mixing elements within the same channel may employ different harmonics.
  • some of the elements are driven by even harmonics, whereas some of the elements comprise membranes with a hole as described above.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Dispersion Chemistry (AREA)
  • Reciprocating Pumps (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

La présente invention porte sur un dispositif microfluidique comprenant au moins un canal de fluide (3) et un transducteur à ultrasons intégré, ledit transducteur comprenant une première membrane (5) pouvant vibrer qui est au moins partiellement en contact avec des fluides à l'intérieur du canal de fluide et une cavité (6) adjacente à la membrane, ladite membrane (5) étant apte à transférer un fluide dans la cavité et inversement.
PCT/IB2009/051304 2008-04-04 2009-03-30 Transducteurs à ultrasons permettant d'obtenir un mélange microfluidique Ceased WO2009122340A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP08154068.4 2008-04-04
EP08154068 2008-04-04

Publications (1)

Publication Number Publication Date
WO2009122340A1 true WO2009122340A1 (fr) 2009-10-08

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012104648A1 (fr) * 2011-02-03 2012-08-09 The Technology Partnership Plc Pompe
WO2012150874A1 (fr) * 2011-05-03 2012-11-08 Getalov Andrey Aleksandrovich Procédé de traitement par cavitation ultrasonique de milieux liquides et d'objets disposés dans un tel milieu
US9375690B2 (en) 2009-08-24 2016-06-28 The University Court Of The University Of Glasgow Fluidics apparatus and fluidics substrate
US9410873B2 (en) 2011-02-24 2016-08-09 The University Court Of The University Of Glasgow Fluidics apparatus for surface acoustic wave manipulation of fluid samples, use of fluidics apparatus and process for the manufacture of fluidics apparatus
WO2017035559A1 (fr) * 2015-09-04 2017-03-09 Monash University Membrane et procédé de micromélange
DE102018212125A1 (de) 2018-07-20 2020-01-23 Robert Bosch Gmbh Mikrofluidisches System und Verfahren zum Mischen von Fluiden
JP2020535776A (ja) * 2017-09-29 2020-12-03 シルテラ マレーシア エスディーエヌ．ビーエイチディー． Ｃｍｏｓ上におけるｐｍｕｔのモノリシック集積
US20210404994A1 (en) * 2020-06-30 2021-12-30 Butterfly Network, Inc. Heaters in capacitive micromachined ultrasonic transducers and methods of forming and activating such heaters
US11311686B2 (en) 2014-11-11 2022-04-26 The University Court Of The University Of Glasgow Surface acoustic wave device for the nebulisation of therapeutic liquids
CN118477590A (zh) * 2024-07-12 2024-08-13 墨格微流科技(汕头)有限公司 一种超声连续流直接作用分散装置
US12331759B2 (en) 2020-07-31 2025-06-17 Lee Ventus Ltd. Method of making an actuator for a resonant acoustic pump

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WO2000054874A1 (fr) * 1999-03-16 2000-09-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micromelangeur actif
US20040000843A1 (en) * 2000-09-18 2004-01-01 East W. Joe Piezoelectric actuator and pump using same
WO2004090335A1 (fr) * 2003-04-09 2004-10-21 The Technology Partnership Plc Generateur de flux de gaz
US20060024206A1 (en) * 2004-07-29 2006-02-02 Sinha Naveen N Non-invasive acoustic technique for mixing and segregation of fluid suspensions in microfluidic applications
US20060232167A1 (en) * 2005-04-13 2006-10-19 Par Technologies Llc Piezoelectric diaphragm with aperture(s)

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WO2000054874A1 (fr) * 1999-03-16 2000-09-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micromelangeur actif
US20040000843A1 (en) * 2000-09-18 2004-01-01 East W. Joe Piezoelectric actuator and pump using same
WO2004090335A1 (fr) * 2003-04-09 2004-10-21 The Technology Partnership Plc Generateur de flux de gaz
US20060024206A1 (en) * 2004-07-29 2006-02-02 Sinha Naveen N Non-invasive acoustic technique for mixing and segregation of fluid suspensions in microfluidic applications
US20060232167A1 (en) * 2005-04-13 2006-10-19 Par Technologies Llc Piezoelectric diaphragm with aperture(s)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9375690B2 (en) 2009-08-24 2016-06-28 The University Court Of The University Of Glasgow Fluidics apparatus and fluidics substrate
US9751057B2 (en) 2009-08-24 2017-09-05 The University Court Of The University Of Glasgow Fluidics apparatus and fluidics substrate
WO2012104648A1 (fr) * 2011-02-03 2012-08-09 The Technology Partnership Plc Pompe
US10975855B2 (en) 2011-02-03 2021-04-13 The Technology Partnership Plc. Fluid pump including a pressure oscillation with at least one nodal diameter
US9410873B2 (en) 2011-02-24 2016-08-09 The University Court Of The University Of Glasgow Fluidics apparatus for surface acoustic wave manipulation of fluid samples, use of fluidics apparatus and process for the manufacture of fluidics apparatus
WO2012150874A1 (fr) * 2011-05-03 2012-11-08 Getalov Andrey Aleksandrovich Procédé de traitement par cavitation ultrasonique de milieux liquides et d'objets disposés dans un tel milieu
US11771846B2 (en) 2014-11-11 2023-10-03 The University Court Of The University Of Glasgow Nebulisation of liquids
US11311686B2 (en) 2014-11-11 2022-04-26 The University Court Of The University Of Glasgow Surface acoustic wave device for the nebulisation of therapeutic liquids
WO2017035559A1 (fr) * 2015-09-04 2017-03-09 Monash University Membrane et procédé de micromélange
JP7307076B2 (ja) 2017-09-29 2023-07-11 シルテラ マレーシア エスディーエヌ．ビーエイチディー． Ｃｍｏｓ上におけるｐｍｕｔのモノリシック集積
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