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WO2009152811A2 - Procédé de mesure de concentrations gazeuses au moyen d'un capteur de gaz à oxydes métalliques, dispositif de détection destiné à la mise en oeuvre du procédé et utilisation du dispositif - Google Patents

Procédé de mesure de concentrations gazeuses au moyen d'un capteur de gaz à oxydes métalliques, dispositif de détection destiné à la mise en oeuvre du procédé et utilisation du dispositif Download PDF

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Publication number
WO2009152811A2
WO2009152811A2 PCT/DE2009/000836 DE2009000836W WO2009152811A2 WO 2009152811 A2 WO2009152811 A2 WO 2009152811A2 DE 2009000836 W DE2009000836 W DE 2009000836W WO 2009152811 A2 WO2009152811 A2 WO 2009152811A2
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WO
WIPO (PCT)
Prior art keywords
sensor
gas
measuring
signal
metal oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2009/000836
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German (de)
English (en)
Other versions
WO2009152811A3 (fr
Inventor
Gerhard Müller
Andreas Helwig
André Freiling
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airbus Defence and Space GmbH
Original Assignee
EADS Deutschland GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EADS Deutschland GmbH filed Critical EADS Deutschland GmbH
Publication of WO2009152811A2 publication Critical patent/WO2009152811A2/fr
Publication of WO2009152811A3 publication Critical patent/WO2009152811A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0006—Calibrating gas analysers

Definitions

  • the invention relates to a method for measuring gas concentrations by means of a metal oxide gas sensor located in a measuring space and to a sensor device for detecting substances in a fluid having a measuring space and a metal oxide sensor in the measuring space. Moreover, the invention relates to advantageous uses of such a sensor device.
  • metal oxide sensors For detection of various gases and vapors, cost-effective thick film metal oxide sensors are used in the industry today. However, metal oxide sensors change their base resistance with operating time and operating temperature. A possible use of these gas sensors in fire alarm and monitoring systems is thus problematic because an alarm threshold set by a controller or software is exceeded with the operating time. The use of metal oxide sensors therefore always involves complex calibration and maintenance work.
  • sensor devices with metal oxide gas sensors are disclosed in WO 01/65211 A2 and EP 0 722 789 A1. In this case, elaborate calibration work using external gas sources is described. The known sensor devices are therefore labor-intensive and require external gas reservoirs.
  • a microreactor (also called a microstructured reactor or microchannel reactor) is a device for performing chemical or physical reactions in an environment having typical widths of less than about 1 mm.
  • Microreactors have, for example, microchannels or are designed as such. Such microchannels typically have a flow area of the order of less than about 1 mm 2 .
  • MOX metal oxide
  • FIG. 10 shows the measurement results of the measurement of a sensor base resistance of various types of MOX gas sensors of the prior art during a constant temperature operation (at about 400 ° C.) over a period of several months.
  • the base resistance in particular initially increases more strongly and does not remain the same afterwards.
  • a change in the basic resistance determined during a measurement can thus be caused, on the one hand, by the presence of a reactive gas or, on the other hand, by the grain size growth.
  • the drift of the base resistor is particularly problematic for use in automatic fire alarm systems or other automatic monitoring systems, as will be explained below with reference to FIG. 11.
  • 11 shows a graph of a sensor resistance with a base resistor 100 over a longer period of time.
  • the base resistor 100 gradually increases as previously explained with reference to FIG.
  • a fire alarm threshold 106 has been fixed based on the initial base resistance. In case of fire, the sensor resistance decreases to some extent.
  • the base resistance 100 is still relatively low, so that by lowering the sensor resistance of the fixed set fire alarm threshold is exceeded and a fire alarm is triggered. But if, as in the second, later fire situation 104, the base resistance 100 is higher, then the lowering of the sensor resistance in case of fire is no longer sufficient to fall below the fixed set fire alarm threshold; the fire is not recognized.
  • the object of the invention is to provide a method for operating a MOX gas sensor in such a way that the MOX gas sensor operates more accurately and reliably over a longer period of time.
  • a sensor device with which such a method can be carried out is specified in the independent claim.
  • two basic principles of operation are used to avoid influencing the measurement by a drift of the sensor base resistor.
  • existing reactive gases are catalytically decomposed in a measuring space in which the MOX gas sensor is operated in order to generate a zero gas atmosphere in the measuring space, which can be used for re-calibration of the MOX gas sensor.
  • This can be carried out in particular with a small measuring chamber volume, which is why the measuring chamber is preferably designed as a microchamber.
  • the sensor signal is processed so that only slowly over a longer period of time changing signal components are filtered out and only in smaller periods corresponding to the implementation of measuring cycles, changing signal components for the measurement are taken into account.
  • the invention provides a method for measuring gas concentrations by means of a metal oxide gas sensor located in a measuring space, wherein a measuring cycle has at least the following steps a) to c) and several such measuring cycles are carried out successively: a) replacing a gas located in the measuring space with b) confining the gas to be analyzed in the measuring space and c) measuring the gas concentration by detecting the electrical resistance of the metal oxide gas sensor during the containment phase in step b), and further reducing or avoiding measuring errors by a
  • step d) catalytic conversion of gases in the measurement space into non-reactive products and calibration of the base resistance for subsequent
  • Measurements are carried out on a subsequently obtained electrical resistance value of the metal oxide gas sensor and / or by a primary sensor signal obtained from the metal oxide gas sensor (16) during the measuring cycles, only slowly changing signal components and only the remaining one , based on changes in the rhythm of the measuring cycles signal component is used for the measurement.
  • the repetition of the measuring cycles prescribes a certain period of time within which the sensor signal should change.
  • Period can be used for signal processing by filtering out longer-term changes. Both basic principles of procedure can basically be carried out alternatively. In a particularly preferred embodiment, the two principles of the method are carried out together, wherein a base resistance calibrated with the first method principle is used in the signal processing according to the second method principle in order to obtain a larger and possibly more accurate output signal.
  • the basis resistance is determined such that the sensor is integrated into a small chamber volume (in the range of at most a few cm 3 , preferably less than 1 cm 3 , more preferably less than 500 mm 3 ), which is time-discrete from the environment can be separated. Activating a catalyst also introduced into the volume, the existing gases are converted into non-reactive products both on the sensor surface and through the catalyst.
  • gases are burned to CO 2 and H 2 O.
  • the gas volume after the combustion phase no more reactive gas shares (zero gas concentration) and then measured sensor resistance corresponds to the base resistance.
  • a sensor calibration can thus be carried out automatically.
  • a measurement is achieved independently of the base resistance via suitable signal processing.
  • the sensor function is ensured - even over longer periods of time and maintenance intervals.
  • the maintenance intervals can be reduced.
  • the uses and applications of gas sensors, in particular metal oxide sensors are further extended.
  • FIG. 1 shows a schematic cross section through the structure of a microreactor system with a gas sensor.
  • Fig. 2 is a graph of a gas measurement using this
  • Fig. 3 is a graph showing the change of the chamber temperature
  • Fig. 4 is a graph showing the change in the chamber humidity and the sensor resistance when switching on and off of the pump
  • FIG. 6 shows a circuit diagram of an RC network which can be used for signal processing for measuring concentration levels of reactive gases on a MOX gas sensor with base resistance R s .
  • Fig. 7 is a graph showing, as simulation results, the effects of signal processing performed on the principle of the circuit of Fig. 6;
  • Fig. 8 shows the comparison of two graphs comparable to those of Fig. 7, illustrating the effects of better matching of a base resistor
  • 9 is a circuit diagram of another embodiment of an RC network usable for signal processing for measuring reactive gas concentration levels on a MOX gas sensor and having a load resistor adaptable to a variable base resistance;
  • 11 is a schematic representation of the drift problem in a prior art method of operating a MOX gas sensor with fixed alarm thresholds.
  • a sensor device 10 with an expanded microreactor system 12 (also referred to below as EMRS) is used for gas analysis.
  • EMRS expanded microreactor system
  • the microreactor system 12 shown in greater detail in FIG. 1 has a microchamber 14, an MOX gas sensor 16, a catalytic converter 18 and a pump 20.
  • the micro-chamber 14 is made, for example, in microtechnology.
  • the microchamber 14 has thin gas inlets 22 and gas outlets 24 that have microchannels 26 as flow channels.
  • the microchannels 26 have due to their very small flow cross-section, a high flow resistance, so that the micro-chamber 14 - even without end elements such as valves or the like - is separated from the environment solely by the thin gas inlets 22 and gas outlets 24.
  • the MOX gas sensor 16 is integrated in the thus closed micro chamber 14. It is heated by a not shown in detail and only indicated by heating connections 58 heater.
  • the catalytic converter 18 is likewise designed to be heatable by means of a heating device (not shown in more detail and only indicated by heating connections 58) and likewise installed in the microchamber 14.
  • the pump 20 is designed for example as a micropump and designed such that the air in the micro-chamber 14 is sucked off and replaced by fresh air with unknown concentrations of reactive trace gases.
  • the microreactor system 12 is operated alternately in two different operating modes: 1) in a flow-through active state 28 (pump on) - pumping phase -;
  • a rest state 34 The pump 20 is turned off, so the sucked fresh air is trapped in the micro-chamber 14. In this confining phase, the volume of air drawn in is analyzed by means of the built-in MOX gas sensor 16. After completion of the gas measurement, the possibly still existing reactive gas can be catalytically decomposed or burned by heating the also integrated catalyst 18. In this way, a zero gas sample can be generated synthetically before each gas exposure. Thereafter, the microreactor system 12 is ready for a new measurement cycle.
  • the measuring cycle therefore has the following steps: a) switching on the pump 20; b) turning off the pump 20; c) polling the sensor signal of the MOX gas sensor 16; d) heating the catalyst 18.
  • a new measurement cycle can be performed again with the beginning of step a).
  • Such measuring cycles can be carried out periodically one after the other in an automated measuring method.
  • the sensor device 10 is provided with a controller 50 for controlling the individual components of the microreactor system 12.
  • the controller 50 is associated with a calibration device 51 for automatic calibration.
  • the controller 50 is connected to the pump 20 by a line 52 to periodically control it.
  • the pump 20 with the gas inlets 22 and the gas outlet 24 and the controller 50 thus form a flow device 62, by means of which the flow of gas and in particular moist air through the micro-chamber 14 and thereby by the measuring chamber 36 can be adjusted and in particular periodically change. In the preferred embodiment shown here, this is done simply by turning on and off the pump 20.
  • the controller 50 is further connected to a signal line 54 to the MOX gas sensor 26 and connected to a line 56 to the heater 18 of the catalyst.
  • the controller 50 has a self-testing device 60, implemented as a software, for example, which measures the sensor signal obtained via the signal line 54 as a function of the control of the flow-through device 62 and in particular as a function of correlated to the switching state of the pump 20 and thereby performs a self-test.
  • a self-testing device 60 implemented as a software, for example, which measures the sensor signal obtained via the signal line 54 as a function of the control of the flow-through device 62 and in particular as a function of correlated to the switching state of the pump 20 and thereby performs a self-test.
  • Micro-reactor system 12 there are special possibilities of a baseline-independent gas measurement, which are explained in more detail below. In addition, there is the possibility of a self-test function.
  • the course of the electrical resistance of the MOX gas sensor 16 is plotted in FIG. 2 over several EMRS measuring cycles as a function of time. As squares schematically indicated are the respective times - active states 28 - in which the microreactor system 12 is forcibly flowed through by activating the pump 20 with fresh outside air.
  • the calibration device 51 is designed in software such that it automatically performs such a calibration at the end of each measurement cycle.
  • FIG. 2 thus represents the gas measurement with the aid of a microreactor system 12.
  • the curve 30 represents the electrical resistance of the MOX gas sensor 16 as a sensor signal.
  • the time in seconds is entered on the x-axis.
  • Next is applied to the pump 20 applied pump voltage 32 in volts.
  • NO 2 is sucked into the EMRS.
  • moist fresh air is sucked in.
  • the microchamber is catalytically cleaned of any reactive gas present.
  • H 2 O behaves similarly to a large number of other reactive gases, such as occur in the event of a fire or other environmental accident.
  • An exception in the field of reactive gases is formed by H 2 alone, which due to its small size can also penetrate relatively thick, passively acting SiO 2 and Al 2 O 3 layers. Since atmospheric moisture is present in all regions of the earth, the proposed H 2 O-based process is universally applicable and, in particular, is superior to possible H 2 -based processes.
  • the sensor device 10 is characterized in particular by the following three circumstances: 1) The microchamber 14 shown in FIG. 2 is made of ceramic or another poorly heat-conductive material. 2) The measuring space 36 is connected to the outside world through the gas inlets 22 and gas outlets 24 having a high flow resistance. These gas inlets 22 and gas outlets 24 hinder the diffusive gas exchange with the environment so much that when the pump 20 is switched off, the air in the interior of the microchamber 14 - ie in the measuring space 36 - is effectively separated from the outside air.
  • a MOX gas sensor 16 with a reactive surface sees, depending on the operating mode, two different humidity levels that can be used for the sensor test.
  • the self-test device 60 is therefore designed, for example, such that it monitors a continuous change of the sensor signal when changing between the two operating modes. However, if the sensor signal remains the same when the operating mode is changed, then the self-test device 60 outputs a fault signal. The controller 50 then reports a function control of the MOX gas sensor 16.
  • Fig. 3 shows the change in the chamber temperature and the chamber humidity when switching on and off the pump 20.
  • the gradually decreasing moisture is due to the settling of the previously opened microreactor system 12.
  • Fig. 3 shows in particular the periodic variation of the chamber temperature 40 in the two operating modes and a concomitant change in the relative humidity in the chamber interior. A curve for the
  • Chamber moisture 42 was detected directly here by means of a placed in the microreactor 12 wet sensor.
  • FIG. 4 shows that the changes in the humidity of the dampers 42 and the sensor resistor 30 when the pump 20 is switched on and off are shown in FIG. 4.
  • the moisture changes measured with the built-in wet sensor (not shown) are also affected by the MOX sensor integrated into the microchamber 14. Gas sensor 16 are detected.
  • FIG. 5 shows the senior response (the relative change in resistance) of the MOX gas sensor 16 when exposed to a) humidity - left-hand illustration - and b) NH 3 - right-hand illustration - at different sensor operating temperatures.
  • the parameter in both figures is the applied vapor or gas concentration.
  • the left-hand illustration in FIG. 5 (FIG. 5 a) shows that the humidity sensitivity of an MOX gas sensor 16 itself is greatly different from that of FIG. 5 a)
  • the data shown in FIGS. 3, 4, 5 prove that, given a sufficiently high sensor operating temperature, the "breathing" of the MOX gas sensor-that is, a change in the sensor signal (here of the resistor 30) that depends on an air flow and / or the moisture content. as an indication of a functioning reactivity of the sensor surface can be interpreted.
  • the microreactor system 12 used herein is preferably fabricated in microtechnology using manufacturing techniques known in the semiconductor device industry.
  • the volume of the measuring space 36 is preferably below 1 cm 3 , for example in the range of less than about 200 mm 3 .
  • the alternating, in particular periodic mode of operation also offers the following advantageous procedure for a baseline-independent gas measurement:
  • Second method for baseline-independent gas measurement In addition to the method described above, to redetermine the Sensorbasiswidertand after each gas measurement and thus re-calibrate the microreactor system 12 and provided therewith the sensor device 10 provides another way gas measurements without reference to the concrete Perform sensor base resistance.
  • the sensor device 10 has a signal processing device 64, by means of which over long periods slowly changing signal components can be filtered out, so that essentially only those in the order of the frequency of the measuring cycles and / or the operating phases changing signal components are considered for the gas measurement.
  • the signal processor 64 includes an RC network 66, as shown in more detail in FIG. Fig. 6 shows a block diagram for a circuit for signal processing.
  • a base voltage U B is applied via a voltage divider to the load resistance R L and the sensor resistance R s .
  • a tapped on the sensor resistor R s voltage is transmitted as a primary sensor signal Us (t) on the RC network 66.
  • the RC network 66 has a differentiated as a first RC element 68 with a capacity C ⁇ jj ff and a resistor R d w, a driver amplifier 69 and an integrator connected second RC element 70 with a resistor Rin t and a capacity Cin t - further, the current flowing through the first RC-element 68 input current Ij n and the current flowing through the second RC circuit 70 output current I shown in Fig 6 out..
  • the abrupt resistance change mentioned above is transferred to the RC network 66 by capacitive coupling.
  • the resistance change occurring at the sensor resistance R s is transmitted through the first RC member 68, wherein at its output substantially the temporal Derivative U d rive (t) of the primary sensor signal Us (t) is formed.
  • the second RC element 70 is arranged, which integrates the differentiated output signal again, whereby the output signal U out (t) is formed.
  • the first RC element 68 acts as a high-pass filter. Due to this high-pass filter characteristic of the first RC element 68, U out (t) is not a 1: 1 image of the primary sensor output signal U s (t), which includes the baseline information. Rather, the output signal U out (t) is a processed sensor signal which contains only the metrologically relevant alternating component.
  • circuit shown in Fig. 6 shows only a practical example, with which this signal processing method can be performed. It will be appreciated that similar procedures may be practiced using a variety of filtering techniques known in the art. Conceivable are both hardware implementations and software implementations.
  • the voltage signals U d ri ve and U ou t occurring in the RC network 66 result, for example, from the primarily generated sensor input signal Us (t) by solving the following two coupled differential equations: and
  • FIG. 7 shows correspondingly digitally obtained simulation results.
  • the primary voltage signal Us the differentiated output signal of the first RC element, ie the time derivative U d riv e and the secondary sensor output signal produced by integration - output signal U out - are shown.
  • the load resistance RL has been set to the actual base resistance R s _o of the MOX gas sensor 16.
  • ⁇ Rs O
  • 5xRs_o has been assumed for the purpose of the present simulation.
  • FIG. 8 shows a comparison of such simulations for different adaptations of the load resistance R L to the actual base resistance Rs_o.
  • the primary sensor output signal Us, the differentiated output signal Udriv e and the sensor output signal U ou t restored by integration are shown under conditions of poor matching of the load resistance RL to the sensor base resistor Rs_o.
  • This disadvantage can be compensated for in a preferred embodiment of the method by starting from that described in the first method Possibility of a periodic or at least carried out in some of the measurement cycles zero gas measurement in the microreactor system makes use.
  • FIG. 9 shows a circuit modified with respect to the circuit of FIG. 6, with which this possibility can be used.
  • the circuit of FIG. 9 differs from that of FIG. 6 essentially in that the load resistor R L is controllably designed, for example as a transistor T.
  • FIG. 9 accordingly shows a variant of the circuit of FIG. 6 with adjustable RL (transistor T).
  • a method for operating a gas sensor (16) located in a measurement space (36) has been described.
  • cost-effective gas sensors (16) in a sensitive environment with greater reliability and lower cost, it is proposed to operate the gas sensor (16) alternately discontinuously in a small measuring volume (14) in at least two operating modes.
  • catalytic purification in one of the operating modes and / or filtering out only one For a longer period of changing signal components, a baseline-independent measurement can then take place.

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Abstract

L'invention concerne un procédé d'utilisation d'un capteur de gaz (16) situé dans un espace de mesure (36). L'invention vise à permettre l'utilisation de capteurs de gaz économiques dans un environnement sensible, avec une plus grande sécurité de fonctionnement et des coûts réduits. A cet effet, le capteur de gaz (16) est utilisé dans un petit volume de mesure (14) de façon discontinue avec alternance entre au moins deux modes de fonctionnement. Une mesure indépendante des lignes de base peut ensuite être réalisée par lavage catalytique dans un des modes de fonctionnement et/ou filtrage de fractions de signal ne variant que sur une longue durée.
PCT/DE2009/000836 2008-06-17 2009-06-16 Procédé de mesure de concentrations gazeuses au moyen d'un capteur de gaz à oxydes métalliques, dispositif de détection destiné à la mise en oeuvre du procédé et utilisation du dispositif Ceased WO2009152811A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200810028682 DE102008028682A1 (de) 2008-06-17 2008-06-17 Verfahren zum Vermessen von Gaskonzentrationen mittels eines Metalloxid-Gassensors, Sensorvorrichtung zum Durchführen des Verfahrens sowie Verwendung desselben
DE102008028682.6 2008-06-17

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WO2009152811A2 true WO2009152811A2 (fr) 2009-12-23
WO2009152811A3 WO2009152811A3 (fr) 2010-06-03

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014118028A1 (fr) * 2013-01-30 2014-08-07 Beko Technologies Gmbh Appareil de mesure de restes d'huile
CN116202692A (zh) * 2023-05-06 2023-06-02 生态环境部华南环境科学研究所(生态环境部生态环境应急研究所) 地下水阻隔工程渗漏的动态实时监测方法及系统

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2908549A1 (fr) 2014-02-13 2015-08-19 Oticon A/s Dispositif de prothèse auditive comprenant un élément de capteur
DE102017207710A1 (de) * 2017-05-08 2018-11-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Kalibrierverfahren, seine Anwendung und Vorrichtung zur Durchführung des Verfahrens
DE102022109534A1 (de) 2022-04-20 2023-10-26 Dräger Safety AG & Co. KGaA Gasdetektionsvorrichtung und Gasdetektionsverfahren mit einem Sensor-Bauteil und einem Oxidierungs-Bauteil
JP7689154B2 (ja) * 2022-04-20 2025-06-05 ドレーガー セイフティー アクチエンゲゼルシャフト ウント コンパニー コマンディートゲゼルシャフト アウフ アクチエン センサ部品と酸化部品とを備えたガス検知装置およびガス検知方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2043913B (en) * 1979-02-15 1983-01-26 Emi Ltd Gas detector
US4489590A (en) * 1982-01-25 1984-12-25 Delphian Corporation Method and apparatus for gas detector calibration
EP0092068B1 (fr) * 1982-04-15 1986-06-11 Cerberus Ag Dispositif d'alarme pour gaz et/ou vapeurs
CH667739A5 (de) * 1984-04-04 1988-10-31 Cerberus Ag Verfahren und vorrichtung zum nachweis von reduzierenden gasen in einem gasgemisch.
US4742708A (en) * 1986-08-13 1988-05-10 Beckman Industrial Corporation Apparatus for electrochemical sensor calibration
JPH0810216B2 (ja) * 1990-07-17 1996-01-31 株式会社堀場製作所 ガス分析計
EP0722789A1 (fr) 1995-01-17 1996-07-24 Elpatronic Ag Méthode pour tester le fonctionnement d'un détecteur dans une station d'inspection
US6044689A (en) * 1997-04-24 2000-04-04 Ngk Insulators, Ltd. Apparatus for sensing low concentration NOx, chamber used for apparatus for sensing low concentration NOx; gas sensor element and method of manufacturing the same; and ammonia removing apparatus and NOx sensor utilizing this apparatus
DE19926139A1 (de) * 1999-06-09 2000-12-14 Volkswagen Ag Kalibrierung eines NOx-Sensors
LU90536B1 (en) 2000-03-01 2006-11-17 Health And Safety Systems Hold Method for operating a sensor.
DE10245947B4 (de) * 2002-09-30 2007-01-04 Eads Deutschland Gmbh Mikrogasanalysesystem mit beheizbarem Filter und Verfahren zur Gasanalyse
CH696777A5 (de) * 2003-08-06 2007-11-30 Saia Burgess Murten Ag Anordnung und Verfahren zur Detektion von Stoffen.

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014118028A1 (fr) * 2013-01-30 2014-08-07 Beko Technologies Gmbh Appareil de mesure de restes d'huile
CN104956221A (zh) * 2013-01-30 2015-09-30 贝科技术有限公司 用于测量残留油的装置
CN116202692A (zh) * 2023-05-06 2023-06-02 生态环境部华南环境科学研究所(生态环境部生态环境应急研究所) 地下水阻隔工程渗漏的动态实时监测方法及系统
CN116202692B (zh) * 2023-05-06 2023-07-04 生态环境部华南环境科学研究所(生态环境部生态环境应急研究所) 地下水阻隔工程渗漏的动态实时监测方法及系统

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