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WO2009144322A1 - Dispositif utilisé pour déterminer des propriétés physiques et/ou chimiques - Google Patents

Dispositif utilisé pour déterminer des propriétés physiques et/ou chimiques Download PDF

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Publication number
WO2009144322A1
WO2009144322A1 PCT/EP2009/056680 EP2009056680W WO2009144322A1 WO 2009144322 A1 WO2009144322 A1 WO 2009144322A1 EP 2009056680 W EP2009056680 W EP 2009056680W WO 2009144322 A1 WO2009144322 A1 WO 2009144322A1
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WO
WIPO (PCT)
Prior art keywords
fluid
reference electrode
sensor surface
active
sensors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2009/056680
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German (de)
English (en)
Inventor
Andreas Schober
Mario Kittler
Michael Gebinoga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Technische Universitaet Ilmenau
Original Assignee
Technische Universitaet Ilmenau
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technische Universitaet Ilmenau filed Critical Technische Universitaet Ilmenau
Priority to EP09753977A priority Critical patent/EP2179277A1/fr
Publication of WO2009144322A1 publication Critical patent/WO2009144322A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value ; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid or cerebral tissue
    • A61B5/14539—Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value ; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid or cerebral tissue for measuring pH
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4145—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for biomolecules, e.g. gate electrode with immobilised receptors
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2503/00—Evaluating a particular growth phase or type of persons or animals
    • A61B2503/02—Foetus
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value ; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid or cerebral tissue
    • A61B5/1468—Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value ; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid or cerebral tissue using chemical or electrochemical methods, e.g. by polarographic means
    • A61B5/1473—Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value ; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid or cerebral tissue using chemical or electrochemical methods, e.g. by polarographic means invasive, e.g. introduced into the body by a catheter

Definitions

  • the present invention relates to a device for determining physical and / or chemical properties, in particular the pH, of a liquid or gaseous, chemical or biological fluid or of biochemical cell reactions which are produced by addition of individual substances or substance mixtures.
  • biological liquid or gaseous fluids should primarily define fluids which can be present in cells, organs or organisms and can also be excreted by them.
  • Known biological fluids are for example blood, saliva, urine, lymph fluid and bile.
  • biological fluids include cell culture media and nutrient media for supplying eukaryotic and prokaryotic cells.
  • the term "medium” here usually refers to a biological fluid which consists of a mixture of different biological components and is often referred to in one embodiment as a nutrient medium.
  • a nutrient medium often referred to as substrate, serves to cultivate microorganisms, cells and tissues
  • liquid for example, broth, nutrient broth or nutrient solution
  • gelled nutrient media
  • These biological fluids by virtue of their specific composition, can have an aggressive character which poses problems for a number of engineering materials. These include, for example, blood, which has a relatively high reduction potential, or gastric juice, which has a strongly acidic pH.
  • Chemical fluids here liquid substances are referred to, which under normal pressure and temperature conditions (temperature range -50 0 C to +150 0 C) are present in the liquid Aggregateu state, that is, a shape change as good as none, a volume change, however to oppose great resistance.
  • Chemical fluids can be pure liquids (eg water, acetic acid, liquid ammonia) as well as mixtures.
  • the mixtures may be solutions of ionic compounds (eg sodium chloride) as well as solutions of organic compounds in various solvents (eg water, organic solvents, ionic liquids).
  • Biosensors are sensors, the specific biochemical reactions caused by isolated enzymes, immunosystems, organelles, whole cells or tissues use to detect chemical substances by means of optical, electrical or thermal etc. signals (NIC, M. et al., "IUPAC Compendium of Chemical Terminology", http://goldbook.iupac.org/index.html ( accessed Nov 02, 2007)).
  • biological elements such as nucleic acids are coupled with a "transducer system" to a dependent on the substance to be detected biochemical To absorb reaction and transform it into an electrical, usually to be amplified signal.
  • the electrical transport properties of the electron gases in AlGaN / GaN heterostructures can be used (M. STUTZMANN et al., Diamond and Related Materials 11 (2002) 886).
  • the electrical properties and the relatively large piezoelectric constants of group III nitrides are particularly interesting. If an Al x Gai X N barrier is pseudomorphically grown on an epitaxial GaN layer, the AlGaN layer is tensilely tensed, with the strength of the stress increasing with increasing Al concentration. Therefore, the total (piezoelectric and spontaneous) polarization in the AlGaN layer can be controlled by their composition.
  • the Contacting 2DEG sideways creates a so-called ISFET with source, drain, and open gate, and any manipulation of the surface potential results in a significant change in the surface charge density of the 2DEG, resulting in a measurable change in the drain current, which is why an AlGaN is suitable / GaN transistor structure for the detection of ions or adsorbed polar molecules in liquid droplets deposited on the surface, where the gate potential is determined by the charged ions in the liquid to be detected, and the evaluation of the drain current allows the detection of polar liquids with high sensitivity and wide dynamic range, the ISFET shows dab There is an intrinsic pH sensitivity at the Nernstian limit given by the oxide present on the surface. There is a linear relationship between pH value and surface potential in the pH range from 2 to 12. Due to the high chemical stability of Group III nitrides for both alkalis and acids, the determination of pH values are carried out with high accuracy.
  • ISFET structures are produced.
  • the outstanding suitability of the AlGaN / GaN semiconductor material for the investigation of biological or chemical fluids manifests itself above all in the biological and chemical inertness of the AlGaN material, which is characterized by its high biocompatibility with respect to its adherence to cells, ie it finds no measurable influence cells and no significant changes. tion of the AlGaN surfaces by the cells. (CIMALLA, et al., AlGaN / GaN biosensor effect of device processing steps on the surface properties and biocompatibility accepted by Sens. Actuators, B: Chem. (2006), doi: 10.1016 / j. Snb .2006.10.030) ,
  • the realization of a reference electrode for electrochemical measurements with ISFETs represents a critical point in an analysis system, especially with regard to miniature and solid state variants.
  • the basic structure of the reference electrode is always composed of the components internal dissipation, conducting electrolyte and membrane.
  • the internal dissipation is realized via a silver / silver chloride (Ag / AgCl) wire or an Ag / AgCl thick film.
  • the conducting electrolyte consists either of an aqueous KCl solution or a KCl-added hydrogel, which simultaneously serves as a membrane for the analyte via a small pinhole junction (0-100 ⁇ m), in the case of a KCl solution a porous membrane is required which can be made in glass, ceramic or teflon.
  • the measurement of the pH of blood or dissolved in blood gases (p ⁇ 2 and PCO2) is to be named. This is a particularly difficult task to solve for very small amounts of liquid. The reason for this lies in the strong oxidizing effect of the blood.
  • the immediate and rapid measurement is a necessary prerequisite for initiating appropriate treatment measures.
  • a particularly important case for example, is the fetal microblood test (MBU) in blood gas determinations. It is used during birth in pathologic / pathopathic CTG (cardiotocography) and provides important information on fetal vital signs. Blood collection for an MBU is performed on the head surface by a small incision on the unborn child. The escaping blood must be spotted from the head surface by means of a heparinized capillary, which is not easy under limited viewing and spatial conditions.
  • MBU fetal microblood test
  • the sampling must be repeated in such a case. This leads to a loss of time.
  • special microsensors as well as suitable microfluidic systems are necessary, which allow even critical blood samples such as umbilical cord blood to be reliably analyzed.
  • the object of the present invention is to provide a device for determining physical and / or chemical properties, in particular the pH, of a liquid or gaseous, chemical or biological fluid or of biochemical cell reactions which can be obtained by adding individual Substances or substance mixtures are produced to provide for which only minimal amounts (nl range) of the fluid to be examined are required and which are characterized by a long service life due to their resistance to the fluids to be examined and beyond are easy to handle.
  • physical / chemical properties of aggressive fluids such as eg blood, should be determinable.
  • the determination of the pH for example, in medical technology (blood pH) with the legally required high accuracy places high demands on the entire measurement setup and the measurement and evaluation method to be used.
  • the device according to the invention is preferably a compact transportable system, with the aid of which fast and low-noise measurements on AlGaN / GaN-based sensors are carried out.
  • a current-voltage analyzer is coupled to this system with which both small voltage ( ⁇ V range) and current changes (nA range) can be detected within a very short time interval (ms or ⁇ s range).
  • a closed and above all electrically shielded measuring structure eg Faraday cage
  • Disturbance variables eg light, electrical surrounding fields
  • a preferred embodiment of the device according to the invention for determining physical and chemical properties, in particular the pH of a liquid or gaseous fluid comprises an openable inner housing (frame housing), preferably with a hinged or sliding lid; a ceramic or printed circuit board frame with an integrated sensor chip; a solid state reference electrode or solid reference electrode; and a against light incident, darkened outer housing (system housing), which is preferably designed as a hinged lid housing.
  • the inner frame housing is located within the darkened system housing and is completely closed when closed. It has electrical plug contacts for contacting the internal components and contains fluidic connections for filling and emptying. When filled, the frame housing contains a special solution / fluid with defined chemical properties (e.g., known pH, concentration of certain ions).
  • the ceramic or printed circuit board frame (also referred to below as frame) consists of a highly insulating material with conductor tracks and contact pads. It receives some of the required transmitter electronics and includes the reference electrode, which is modular (i.e., easily interchangeable with, for example, male or female contacts) on the circuit board frame.
  • the circuit board frame also carries a sensor chip, which is preferably firmly connected to the frame.
  • a chip field of the frame is completely filled with an elastic, trans- Parents, highly insulating material potted (eg silicone).
  • the connection between PCB frame and frame housing is modular (easily replaceable) realized via plug or spring contacts below the lid.
  • the mentioned sensor chip contains in a preferred embodiment at least four active, non-passivated ion-sensitive / -selective biosensors with different length and width ratios, which are not electrically connected to each other on the chip.
  • the individual sensors are firmly connected to the frame via conductor tracks and bond pads.
  • the complete system sensor chip, reference electrode and frame has a modular structure and can be exchanged / changed independently of each other. This makes it possible to use custom or commercial reference electrodes.
  • the assembly of the components is preferably carried out via click and plug technology.
  • the frame housing is designed as faradayscher cage.
  • a modified embodiment is characterized in that the interior of the frame housing and / or the system housing is illuminated with a predetermined radiation intensity and wavelength.
  • the reference electrode is placed directly over the sensor chip. In other applications, it may instead be advantageous if the reference electrode is not placed directly over the frame, but within a fluidic channel through which the reference and the fluids to be examined are pumped.
  • the reference electrode preferably has a planar surface, which facilitates cleaning.
  • the reference electrode consists of a solid / solid, for example in the form of a hollow cylinder with an attached tool. This tool is realized as a scorer, tip, thin cannula or semipermeable membrane.
  • the tool can also consist of a hydrogel mixed with electrolyte solution.
  • the reference electrode can be easily exchanged after carrying out a measurement.
  • several reference electrodes can be stored in one cartridge, so that the replacement can be carried out quickly and easily.
  • a flat reference unit which also serves as a cover plate and relative to the array, which preferably comprises a plurality of sensors, is attached. This also ensures easy cleaning of the system, since only flat surfaces need to be cleaned.
  • the surfaces of the individual biosensors are hydrophilic and the area surrounding the biosensors is made hydrophobic. It is also expedient if the sensor chip is equipped with a shift register for charge accumulation (CCD architecture).
  • CCD architecture shift register for charge accumulation
  • the frame housing is opened, ie, the lid mechanically opened or raised, and the individual fluids are directed by means of capillaries or fluidic channels on the surface of the circuit board frame.
  • the frame housing is not opened, but the reference fluids are pumped into or out of the frame housing; Here the frame housing remains closed.
  • the source and drain contacts of the active sensor and the necessary reference or reference electrode of the aqueous solution are connected to one output channel of the analyzer.
  • the active area of the sensor is wetted with the liquid sample to be examined and also the current-voltage characteristic of the previously calibrated Sensor measured.
  • the pH value is calculated from the shift of the characteristic recorded for the liquid sample to be examined to the individual calibration curves.
  • a faraday cage closed and darkened from all sides is realized.
  • a radiation source with a defined illuminance and wavelength of the emitted light is installed inside this cage. This measure minimizes the light-sensitive drift of the sensor and thereby improves the accuracy of the measurement result.
  • complete compensation of all disturbing variables affecting the sensor is not achieved by this expansion stage.
  • the active, non-passivated ion-sensitive / -selective sensors used for the measurement are integrated in a bridge circuit with a plurality of preferably identical passivated ion-sensitive / -selective sensors.
  • Passive ion-sensitive / -selective sensors are those in which the AlGaN / GaN or GaN / AlGaN / GaN layer system is a layer of chemically inert, depending on the application optically transparent (eg a glass solder) or optically opaque (eg a polyimide ) Material is applied so that there is no direct contact of the sensor surface with a fluid to be measured.
  • a second voltage divider is connected in parallel to the leads and the two inner bridge branches, each of which is designed as a series circuit preferably an active, non-passivated ion-sensitive / -selective sensor and a passivated ion-sensitive / -selective sensor, in addition to the influence of external lead resistances compensated for the measurement result.
  • the individual active, non-passivated ion-sensitive / -selective sensors of the inner bridge branches are each wetted with a defined fluid (eg buffer solutions with specific pH values).
  • the charges thus supplied to the individual sensor surfaces change its electrical resistance by accumulation or depletion of charge carriers in the conductive channel of the sensor.
  • Dependence of the electrical sensor resistance sets a stable transverse voltage of the bridge circuit. If, for example, one of the active, non-passivated ion-sensitive / -selective sensors is wetted with the measuring liquid, the associated change in the electrical resistance of this sensor shifts the transverse voltage of the measuring bridge. This change in the transverse stress is quantitatively evaluated and related to the pH value. This measurement principle eliminates a complex zero balance of the bridge circuit.
  • At least four preferably identical active, non-passivated ion-sensitive / -selective individual sensors are measured in parallel to increase the measurement dynamics.
  • at least three of these sensors are wetted with aqueous reference buffers of different pH values and the fourth sensor, for example, with the measuring liquid. Subsequently, the current-voltage characteristics of all sensors are measured and the pH value is determined at the same time.
  • a sensor / reference electrode system can be integrated into a fluidic channel so that it can be acted upon by multi-way valves both with the liquid to be measured and with corresponding rinsing and cleaning liquids.
  • particularly small amounts of liquid are applied from or with a capillary to the sensor in a measuring chamber.
  • the planar arrangement of the inventive arrangement of the measuring system of sensor and reference electrode allows easy application a drop of measuring liquid and, after the measurement, an easy cleaning of the planar surface by means of suitable cleaning fluids.
  • the active sensor surfaces and the reference electrode are made flat. This reduces surfaces and facilitates cleaning.
  • An essential advantage of the device according to the invention is based on the sensor used and consists in that it can be used to carry out a pH measurement which is not influenced by simultaneously present redox properties of the fluid under investigation. This allows in particular the pH determination of blood and comparable fluids.
  • the presented invention also makes it possible to solve the problem of microblood examination presented above.
  • the pH of the blood can be determined with the system.
  • Particularly advantageous working conditions are in the volume range 500 nl to 5 ul.
  • the high chemical inertness of the sensor material makes it an excellent candidate for measuring aggressive materials such as blood.
  • the procedure for the determination of physical and chemical properties runs in principle as follows:
  • the individual active, not passivated ion-sensitive / -selective biosensors of the sensor chip become successively in short Time intervals wetted with different fluids and the voltage between the reference electrode and a fixed reference potential (eg mass) as a reference voltage is determined at a constant sensor current.
  • a fixed reference potential eg mass
  • the fluids to be measured are supplied, for example, in the following order:
  • Reference fluid 1 (eg 7.0 pH )
  • Reference fluid 2 (eg 4.0 pH ) 3.
  • Reference fluid 3 (eg 7.0 pH )
  • the sequence can be reversed, then moves the fluid to be examined to the first position, the order of the reference fluid remains the same afterwards.
  • the pH of the fluid to be examined is then determined from the difference of the reference voltages of the reference fluids (sensitivity) with respect to the reference voltage of the fluid to be examined.
  • the pH of the fluid to be examined is determined from the displacement of measured sensor current reference voltage characteristics or from the change in the measured sensor current at a constant reference voltage.
  • the pH value can be determined accumulatively from multiple measurements of the same measuring volume.
  • a plurality of identical active, non-passivated ion-sensitive / -selective sensors are preferably simultaneously or in short or middle time intervals with reference media of different pH values and at least one further preferably identical active, non-passivated ion-sensitive / -selective sensor with the wetted fluid and the pH of the investigating fluid or the biochemical cell reaction from the displacement of the measured current-voltage characteristics of the individual active, non-passivated ion-sensitive / -selek- tive sensors determined.
  • the current flowing through the active, non-passivated ion-sensitive / -selective sensor current can be kept constant by controlling the reference voltage, wherein the pH of the fluid to be examined from the change of the reference voltage is determined.
  • the reference voltage can be kept constant, wherein the pH of the fluid to be examined is determined from the change in the current flowing through the active, non-passivated ion-sensitive / -selective sensor. It is likewise possible to determine the pH value of the fluid to be investigated or of the biochemical cell reaction from the change in the transverse voltage of the bridge circuit. Multiple measurements can be performed accumulating in the same measuring volume.
  • FIG. 1 is a simplified perspective view of a device for determining physical and / or chemical properties, in particular the pH, of a liquid or gaseous fluid.
  • Fig. 2 is a simplified perspective view of a rod design of the device according to the invention for incision and simultaneous measurement of the blood pH at the head of the unborn child.
  • the device according to the invention is designed as a folding system.
  • the illustrated device comprises a plurality of fluidic connections 1 and at least one capillary supply 3 in a frame housing 10.
  • an active sensor surface 4 is arranged which has source and drain contacts 5.
  • a reference electrode 2 is attached to a frame housing cover 11.
  • an outer system housing (not shown) is provided, which encloses the frame housing 10 and allows the opening of the frame housing in the closed space.
  • the system housing may be at least partially formed integrally with the frame housing.
  • the fluidic connections 1 are used for the supply of flushing medium to flush the device.
  • the fluid to be examined is deposited on the active sensor surface 4 via the capillary feed 3.
  • the frame housing cover 11, to which the reference electrode 2 is attached, is meanwhile opened, so that the reference electrode does not yet come in contact with the fluid.
  • the areas within the circles shown in dotted lines in Fig. 1 are hydrophilic, whereas the remaining components of the system are hydrophobic.
  • the cover 11 is set down with the reference electrode 2 so that it dips into the fluid to be examined.
  • the measurement is now performed. Subsequently, the entire device is rinsed. The reference electrode 2 is then discarded. It is rinsed again. A new reference electrode 2 is used.
  • the exchange The primary purpose of the reference electrode is to create sterile conditions and a clearly defined measurement environment. If similar fluids are to be tested successively with less stringent purity requirements, the reference electrode 2 can also be used multiple times.
  • a plurality of interchangeable reference electrodes in a cartridge system i. held in a magazine. From there they are fed to the measuring field and electrically contacted. The rinsing takes place according to the principle described above.
  • Fig. 2 shows schematically a further preferred embodiment of the invention.
  • the device is here so compact and miniaturized that it allows in a rod execution directly the incision and simultaneous measurement of the blood pH at the head of the unborn child.
  • the reference electrode 2 which is mounted on a rod tip 8, simultaneously used as a scorer to remove a small amount of blood (about l ⁇ L) from the skin.
  • a pulling over of a carriage 6 in the direction indicated by an arrow 7 presses the scorer (the reference electrode 2) with the blood directly into the measuring field, ie onto the active sensor surface 4 between the source and drain contacts 5.

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Abstract

L'invention concerne un dispositif utilisé pour mesurer des propriétés physiques et/ou chimiques, notamment le pH, d'un fluide liquide ou gazeux. Ledit dispositif comprend au moins un capteur actif non passivé sensible aux ions /sélectif d'ions, à structure ISFET ou HEMT, constitué d'un système en couche des nitrures de groupe III ainsi que d'une surface de détection (4) active sur laquelle le fluide peut être appliqué. Ledit dispositif comprend également au moins une électrode de référence (2) montée mobile par rapport à la surface de détection (4) active, afin de pouvoir être positionnée à distance de la surface de détection (4) active, avant de procéder à la mesure et de pouvoir être mise en contact avec le fluide avant d'effectuer la mesure sur la surface de détection (4) active. Dans un mode de réalisation préféré dudit dispositif, le(s) capteurs actif(s) et les électrodes de référence (2) sont placés dans un boîtier à cadre (10) pouvant être fermé, qui présente des raccordements fluidiques (1) par l'intermédiaire desquels un milieu de lavage peut être acheminé, ainsi qu'une conduite d'alimentation en fluide (3) par l'intermédiaire de laquelle le fluide à analyser peut être acheminé jusqu'à la surface de détection (4). Un autre mode de réalisation se caractérise en ce que l'électrode de référence (2) se présente sous forme d'élément de type racle servant à prélever dans le réservoir de petites quantités de fluide à analyser, ledit élément de type racle étant fixé sur un coulisseau (6) déplaçable.
PCT/EP2009/056680 2008-05-29 2009-05-29 Dispositif utilisé pour déterminer des propriétés physiques et/ou chimiques Ceased WO2009144322A1 (fr)

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DE200810026929 DE102008026929A1 (de) 2008-05-29 2008-05-29 Sensor, Vorrichtung und Verfahren zur Ermittlung von physikalischen und/oder chemischen Eigenschaften
DE102008026929.8 2008-05-29

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DE102011083675A1 (de) * 2011-09-29 2013-04-04 Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG Sensor zur Bestimmung und/oder Überwachung von zumindest einer gelösten Substanz in einem Medium
CN107831202A (zh) * 2017-11-16 2018-03-23 中山大学 一种具有遮光封装结构的传感器芯片及其制备方法
CN108120752A (zh) * 2017-12-26 2018-06-05 中山大学 一种具有空气桥参比电极遮光结构的传感器芯片及制备方法
WO2019215610A1 (fr) 2018-05-08 2019-11-14 Ecole Polytechnique Federale De Lausanne (Epfl) Dispositif de mesure de pression de gaz

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FR2971849A1 (fr) * 2011-02-17 2012-08-24 Commissariat Energie Atomique Procede et dispositif de detection et/ou de dosage de composes organiques dans l'air

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DE102011083675A1 (de) * 2011-09-29 2013-04-04 Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG Sensor zur Bestimmung und/oder Überwachung von zumindest einer gelösten Substanz in einem Medium
CN107831202A (zh) * 2017-11-16 2018-03-23 中山大学 一种具有遮光封装结构的传感器芯片及其制备方法
CN107831202B (zh) * 2017-11-16 2023-11-24 中山大学 一种具有遮光封装结构的传感器芯片及其制备方法
CN108120752A (zh) * 2017-12-26 2018-06-05 中山大学 一种具有空气桥参比电极遮光结构的传感器芯片及制备方法
CN108120752B (zh) * 2017-12-26 2023-11-24 中山大学 一种具有空气桥参比电极遮光结构的传感器芯片及制备方法
WO2019215610A1 (fr) 2018-05-08 2019-11-14 Ecole Polytechnique Federale De Lausanne (Epfl) Dispositif de mesure de pression de gaz

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