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WO2009038022A1 - 複合シール材 - Google Patents

複合シール材 Download PDF

Info

Publication number
WO2009038022A1
WO2009038022A1 PCT/JP2008/066559 JP2008066559W WO2009038022A1 WO 2009038022 A1 WO2009038022 A1 WO 2009038022A1 JP 2008066559 W JP2008066559 W JP 2008066559W WO 2009038022 A1 WO2009038022 A1 WO 2009038022A1
Authority
WO
WIPO (PCT)
Prior art keywords
seal member
fitted
seal
corrosive
performances
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/066559
Other languages
English (en)
French (fr)
Inventor
Akira Muramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Valqua Industries Ltd
Nihon Valqua Kogyo KK
Original Assignee
Nippon Valqua Industries Ltd
Nihon Valqua Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Valqua Industries Ltd, Nihon Valqua Kogyo KK filed Critical Nippon Valqua Industries Ltd
Priority to JP2009533123A priority Critical patent/JP5126995B2/ja
Publication of WO2009038022A1 publication Critical patent/WO2009038022A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Gasket Seals (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

[課題] 真空シール性能、耐プラズマ性、ならびに耐腐食ガス性などの性能を併せ持ち、また、繰り返しの使用によっても真空シール性能が低下することがなく、使用時に金属パーティクルが発生することもなく、また、半導体製造装置で一般的に用いられているいわゆるあり溝に適用可能で、さらにゲート弁開閉部などのように、繰り返し開閉が行なわれる場所に用いられても耐プラズマ性や耐腐食ガス性などの性能が低下することのない複合シール材を提供すること。 [解決手段] 第１のシール部材（６）は環状のシール本体（６Ａ）と、シール本体（６Ａ）の内周側から径方向内側に突設された環状凸部（６Ｂ）と、環状凸部（６Ｂ）から径方向内側に向けて突設された嵌合部（６Ｃ）とにより構成する。また、第２のシール部材（８）には、嵌合部（６Ｃ）と略相補的な形状の被嵌合凹部（８Ａ）と、被嵌合凹部（８Ａ）から段差部（６Ｄ）に向けて延びた屈曲部（８Ｂ）とを設ける。
PCT/JP2008/066559 2007-09-21 2008-09-12 複合シール材 Ceased WO2009038022A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009533123A JP5126995B2 (ja) 2007-09-21 2008-09-12 複合シール材

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-245236 2007-09-21
JP2007245236 2007-09-21

Publications (1)

Publication Number Publication Date
WO2009038022A1 true WO2009038022A1 (ja) 2009-03-26

Family

ID=40467838

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/066559 Ceased WO2009038022A1 (ja) 2007-09-21 2008-09-12 複合シール材

Country Status (3)

Country Link
JP (1) JP5126995B2 (ja)
TW (1) TWI414700B (ja)
WO (1) WO2009038022A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010113079A3 (en) * 2009-03-31 2011-04-21 Sacmi Cooperativa Meccanici Imola Societa' Cooperativa Apparatus for blow-moulding parisons
WO2011119916A1 (en) 2010-03-25 2011-09-29 Parker-Hannifin Corporation Substrate processing apparatus with composite seal
TWI594347B (zh) * 2012-10-09 2017-08-01 Nippon Valqua Industries Ltd Composite seal body
CN113969980A (zh) * 2020-07-23 2022-01-25 中国科学院微电子研究所 一种真空装置
US12013036B2 (en) 2018-08-02 2024-06-18 Valqua, Ltd. Composite seal material
WO2024202498A1 (ja) * 2023-03-27 2024-10-03 株式会社バルカー 複合シール材

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI401376B (zh) * 2011-01-21 2013-07-11 Chime Ball Technology Co Ltd Piston airtight device
JP6809917B2 (ja) * 2017-01-31 2021-01-06 株式会社バルカー 複合シール材
KR102845235B1 (ko) 2024-12-20 2025-08-12 주식회사 에스에스케이 실링기능이 향상된 복합 실링부재

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001124213A (ja) * 1999-09-27 2001-05-11 Green Tweed Of Delaware Inc シール及び保護用のシールド
JP2005330988A (ja) * 2004-05-18 2005-12-02 Mitsubishi Cable Ind Ltd シール材
JP2007120738A (ja) * 2005-09-30 2007-05-17 Tokyo Electron Ltd シール部品及び基板処理装置
JP2008202787A (ja) * 2007-02-21 2008-09-04 Ti Group Automotive Systems Llc 組合せシール

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3833228A (en) * 1973-07-19 1974-09-03 Chenprene Inc Stackable sealing mechanism
KR100995420B1 (ko) * 2006-02-14 2010-11-18 닛폰 바루카 고교 가부시키가이샤 복합 실링재

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001124213A (ja) * 1999-09-27 2001-05-11 Green Tweed Of Delaware Inc シール及び保護用のシールド
JP2005330988A (ja) * 2004-05-18 2005-12-02 Mitsubishi Cable Ind Ltd シール材
JP2007120738A (ja) * 2005-09-30 2007-05-17 Tokyo Electron Ltd シール部品及び基板処理装置
JP2008202787A (ja) * 2007-02-21 2008-09-04 Ti Group Automotive Systems Llc 組合せシール

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010113079A3 (en) * 2009-03-31 2011-04-21 Sacmi Cooperativa Meccanici Imola Societa' Cooperativa Apparatus for blow-moulding parisons
WO2011119916A1 (en) 2010-03-25 2011-09-29 Parker-Hannifin Corporation Substrate processing apparatus with composite seal
US8623145B2 (en) 2010-03-25 2014-01-07 Parker-Hannifin Corporation Substrate processing apparatus with composite seal
TWI594347B (zh) * 2012-10-09 2017-08-01 Nippon Valqua Industries Ltd Composite seal body
US9892945B2 (en) 2012-10-09 2018-02-13 Nippon Valqua Industries, Ltd. Composite seal
US12013036B2 (en) 2018-08-02 2024-06-18 Valqua, Ltd. Composite seal material
CN113969980A (zh) * 2020-07-23 2022-01-25 中国科学院微电子研究所 一种真空装置
WO2024202498A1 (ja) * 2023-03-27 2024-10-03 株式会社バルカー 複合シール材

Also Published As

Publication number Publication date
TW200914755A (en) 2009-04-01
TWI414700B (zh) 2013-11-11
JPWO2009038022A1 (ja) 2011-01-06
JP5126995B2 (ja) 2013-01-23

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