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WO2009035079A1 - 化合物半導体基板、化合物半導体基板の製造方法及び半導体デバイス - Google Patents

化合物半導体基板、化合物半導体基板の製造方法及び半導体デバイス Download PDF

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Publication number
WO2009035079A1
WO2009035079A1 PCT/JP2008/066537 JP2008066537W WO2009035079A1 WO 2009035079 A1 WO2009035079 A1 WO 2009035079A1 JP 2008066537 W JP2008066537 W JP 2008066537W WO 2009035079 A1 WO2009035079 A1 WO 2009035079A1
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WO
WIPO (PCT)
Prior art keywords
substrate
compound semiconductor
semiconductor substrate
hydrogen
raised
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/066537
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English (en)
French (fr)
Inventor
Yoshihiko Shibata
Masatoshi Miyahara
Takashi Ikeda
Yoshihisa Kunimi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Kasei Microdevices Corp
Original Assignee
Asahi Kasei EMD Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Kasei EMD Corp filed Critical Asahi Kasei EMD Corp
Priority to JP2009532239A priority Critical patent/JP5428023B2/ja
Priority to US12/677,627 priority patent/US8552533B2/en
Priority to EP08830273A priority patent/EP2190006A4/en
Priority to KR1020107004906A priority patent/KR101088985B1/ko
Priority to CN2008801069045A priority patent/CN101802979B/zh
Publication of WO2009035079A1 publication Critical patent/WO2009035079A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/82—Heterojunctions
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/18—Epitaxial-layer growth characterised by the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02373—Group 14 semiconducting materials
    • H01L21/02381—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02538—Group 13/15 materials
    • H01L21/02546—Arsenides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02656—Special treatments
    • H01L21/02658—Pretreatments
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N52/00—Hall-effect devices
    • H10N52/101—Semiconductor Hall-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Materials Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Recrystallisation Techniques (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

　本発明は、Ｓｉ基板と化合物半導体層との界面の転位（欠陥）密度を低減させた化合物半導体基板及びその製造方法に関する。Ｓｉ基板に、有機洗浄、酸洗浄及びアルカリ洗浄を順次実施し、Ｓｉ基板の表面の有機物や金属等の汚染物質を除去し、平坦な酸化膜を形成した（Ｓ３１）。濃度１．０ｗｔ％のフッ化水素水溶液を用いて、表面の酸化膜を除去し、水素終端処理を行った（Ｓ３２）。水素終端処理を行った直後のＳｉ基板を、真空装置内に納めた後に、Ｓｉ基板の基板温度を昇温する（Ｓ３３）。このまま基板温度を上昇させていくと、終端処理された水素が離脱する。水素が離脱する前に、Ａｓを先行照射し（Ｓ３４）、Ｓｉ基板と化合物半導体層との界面を準備した後、数秒後にＧａとＡｓを照射し（Ｓ３５）、化合物半導体基板を作製した（Ｓ３６）。
PCT/JP2008/066537 2007-09-12 2008-09-12 化合物半導体基板、化合物半導体基板の製造方法及び半導体デバイス Ceased WO2009035079A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2009532239A JP5428023B2 (ja) 2007-09-12 2008-09-12 化合物半導体基板、化合物半導体基板の製造方法及び半導体デバイス
US12/677,627 US8552533B2 (en) 2007-09-12 2008-09-12 Compound semiconductor substrate and method for manufacturing the same
EP08830273A EP2190006A4 (en) 2007-09-12 2008-09-12 COMPOUND SEMICONDUCTOR SUBSTRATE, PROCESS FOR PRODUCING SEMICONDUCTOR COMPOUND SUBSTRATE, AND SEMICONDUCTOR DEVICE
KR1020107004906A KR101088985B1 (ko) 2007-09-12 2008-09-12 화합물 반도체 기판, 화합물 반도체 기판의 제조 방법 및 반도체 디바이스
CN2008801069045A CN101802979B (zh) 2007-09-12 2008-09-12 化合物半导体衬底、化合物半导体衬底的制造方法以及半导体器件

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007237030 2007-09-12
JP2007-237030 2007-09-12

Publications (1)

Publication Number Publication Date
WO2009035079A1 true WO2009035079A1 (ja) 2009-03-19

Family

ID=40452085

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/066537 Ceased WO2009035079A1 (ja) 2007-09-12 2008-09-12 化合物半導体基板、化合物半導体基板の製造方法及び半導体デバイス

Country Status (6)

Country Link
US (1) US8552533B2 (ja)
EP (2) EP2190006A4 (ja)
JP (1) JP5428023B2 (ja)
KR (1) KR101088985B1 (ja)
CN (1) CN101802979B (ja)
WO (1) WO2009035079A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102460199A (zh) * 2009-06-30 2012-05-16 旭化成微电子株式会社 磁传感器
JP6780805B1 (ja) * 2019-11-01 2020-11-04 三菱電機株式会社 化合物半導体の結晶欠陥観察方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10096473B2 (en) * 2016-04-07 2018-10-09 Aixtron Se Formation of a layer on a semiconductor substrate

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07263357A (ja) * 1994-03-25 1995-10-13 Hikari Gijutsu Kenkyu Kaihatsu Kk Ｉｉｉ−ｖ族化合物薄膜の製造方法
JPH08306622A (ja) * 1995-05-01 1996-11-22 Nippon Telegr & Teleph Corp <Ntt> 化合物半導体の微結晶成長方法
JPH0927451A (ja) * 1995-07-12 1997-01-28 Sumitomo Metal Ind Ltd 化合物半導体基板の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2512018B2 (ja) 1987-10-07 1996-07-03 松下電子工業株式会社 ホ―ル効果装置
JP3286921B2 (ja) * 1992-10-09 2002-05-27 富士通株式会社 シリコン基板化合物半導体装置
JP3414833B2 (ja) 1993-05-28 2003-06-09 松下電器産業株式会社 半導体薄膜の製造方法および磁電変換素子の製造方法
JPH07193331A (ja) 1993-12-27 1995-07-28 Toshiba Corp 発光素子用ＧａＡｓ基板
JPH07240378A (ja) * 1994-02-28 1995-09-12 Toshiba Corp 半導体薄膜製造装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07263357A (ja) * 1994-03-25 1995-10-13 Hikari Gijutsu Kenkyu Kaihatsu Kk Ｉｉｉ−ｖ族化合物薄膜の製造方法
JPH08306622A (ja) * 1995-05-01 1996-11-22 Nippon Telegr & Teleph Corp <Ntt> 化合物半導体の微結晶成長方法
JPH0927451A (ja) * 1995-07-12 1997-01-28 Sumitomo Metal Ind Ltd 化合物半導体基板の製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2190006A4 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102460199A (zh) * 2009-06-30 2012-05-16 旭化成微电子株式会社 磁传感器
CN102460199B (zh) * 2009-06-30 2014-01-08 旭化成微电子株式会社 磁传感器
JP6780805B1 (ja) * 2019-11-01 2020-11-04 三菱電機株式会社 化合物半導体の結晶欠陥観察方法
WO2021084755A1 (ja) * 2019-11-01 2021-05-06 三菱電機株式会社 化合物半導体の結晶欠陥観察方法
US12038396B2 (en) 2019-11-01 2024-07-16 Mitsubishi Electric Corporation Crystal defect observation method for compound semiconductor

Also Published As

Publication number Publication date
EP2190006A1 (en) 2010-05-26
US8552533B2 (en) 2013-10-08
CN101802979A (zh) 2010-08-11
CN101802979B (zh) 2012-02-22
JP5428023B2 (ja) 2014-02-26
JPWO2009035079A1 (ja) 2010-12-24
US20100200956A1 (en) 2010-08-12
EP3029716A1 (en) 2016-06-08
KR101088985B1 (ko) 2011-12-01
KR20100034058A (ko) 2010-03-31
EP2190006A4 (en) 2011-09-28

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