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WO2009035045A1 - ポジ型感光性組成物、該組成物を用いたパターン形成方法、及び、該組成物に用いられる樹脂 - Google Patents

ポジ型感光性組成物、該組成物を用いたパターン形成方法、及び、該組成物に用いられる樹脂 Download PDF

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Publication number
WO2009035045A1
WO2009035045A1 PCT/JP2008/066444 JP2008066444W WO2009035045A1 WO 2009035045 A1 WO2009035045 A1 WO 2009035045A1 JP 2008066444 W JP2008066444 W JP 2008066444W WO 2009035045 A1 WO2009035045 A1 WO 2009035045A1
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WO
WIPO (PCT)
Prior art keywords
composition
positive
working photosensitive
photosensitive composition
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/066444
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English (en)
French (fr)
Inventor
Yuko Yoshida
Kazuto Shimada
Shuji Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
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Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Priority to KR1020107005496A priority Critical patent/KR101400823B1/ko
Priority to EP08830724.4A priority patent/EP2194073B1/en
Priority to US12/678,023 priority patent/US8043791B2/en
Publication of WO2009035045A1 publication Critical patent/WO2009035045A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F20/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide or nitrile thereof
    • C08F20/02—Monocarboxylic acids having less than ten carbon atoms, Derivatives thereof
    • C08F20/10—Esters
    • C08F20/26—Esters containing oxygen in addition to the carboxy oxygen
    • C08F20/28—Esters containing oxygen in addition to the carboxy oxygen containing no aromatic rings in the alcohol moiety
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10—Esters
    • C08F220/12—Esters of monohydric alcohols or phenols
    • C08F220/16—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms
    • C08F220/18—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms with acrylic or methacrylic acids
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10—Esters
    • C08F220/26—Esters containing oxygen in addition to the carboxy oxygen
    • C08F220/28—Esters containing oxygen in addition to the carboxy oxygen containing no aromatic rings in the alcohol moiety
    • C08F220/283—Esters containing oxygen in addition to the carboxy oxygen containing no aromatic rings in the alcohol moiety and containing one or more carboxylic moiety in the chain, e.g. acetoacetoxyethyl(meth)acrylate
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/42—Nitriles
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0277—Electrolithographic processes
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10—Esters
    • C08F220/12—Esters of monohydric alcohols or phenols
    • C08F220/16—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms
    • C08F220/18—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms with acrylic or methacrylic acids
    • C08F220/1818—C13or longer chain (meth)acrylate, e.g. stearyl (meth)acrylate
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y10S430/111—Polymer of unsaturated acid or ester

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Pyrane Compounds (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

　通常露光（ドライ露光）のみならず、液浸露光においても、露光ラチチュードが広く、ラインエッジラフネスが抑制されたポジ型感光性組成物、該ポジ型感光性組成物を用いたパターン形成方法及び該ポジ型感光性組成物が含有する新規な樹脂として、（Ａ）側鎖に特定のラクトン構造を有する酸の作用によりアルカリ現像液に対する溶解度が増大する樹脂、及び、（Ｂ）活性光線又は放射線の照射により酸を発生する化合物を含有するポジ型感光性組成物、該ポジ型感光性組成物を用いたパターン形成方法、及び該ポジ型感光性組成物が含有する新規な樹脂を提供する。
PCT/JP2008/066444 2007-09-14 2008-09-11 ポジ型感光性組成物、該組成物を用いたパターン形成方法、及び、該組成物に用いられる樹脂 Ceased WO2009035045A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020107005496A KR101400823B1 (ko) 2007-09-14 2008-09-11 포지티브형 감광성 조성물, 상기 조성물을 사용한 패턴형성방법, 및 상기 조성물에 사용되는 수지
EP08830724.4A EP2194073B1 (en) 2007-09-14 2008-09-11 Positive-working photosensitive composition, method for pattern formation using the composition, resin for use in the composition, and monomer.
US12/678,023 US8043791B2 (en) 2007-09-14 2008-09-11 Positive photosensitive composition, pattern forming method using the composition and resin for use in the composition

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007239572 2007-09-14
JP2007-239572 2007-09-14
JP2008-201279 2008-08-04
JP2008201279A JP5459998B2 (ja) 2007-09-14 2008-08-04 ポジ型感光性組成物、該ポジ型感光性組成物を用いたパターン形成方法、及び、該ポジ型感光性組成物に用いられる樹脂

Publications (1)

Publication Number Publication Date
WO2009035045A1 true WO2009035045A1 (ja) 2009-03-19

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ID=40452052

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PCT/JP2008/066444 Ceased WO2009035045A1 (ja) 2007-09-14 2008-09-11 ポジ型感光性組成物、該組成物を用いたパターン形成方法、及び、該組成物に用いられる樹脂

Country Status (6)

Country Link
US (1) US8043791B2 (ja)
EP (1) EP2194073B1 (ja)
JP (1) JP5459998B2 (ja)
KR (1) KR101400823B1 (ja)
TW (1) TWI427417B (ja)
WO (1) WO2009035045A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009186503A (ja) * 2008-02-01 2009-08-20 Fujifilm Corp ポジ型感光性組成物、該ポジ型感光性組成物を用いたパターン形成方法及び該ポジ型感光性組成物に用いられる化合物
US9046773B2 (en) * 2008-03-26 2015-06-02 Fujifilm Corporation Actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method using the same, polymerizable compound and polymer compound obtained by polymerizing the polymerizable compound

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5314990B2 (ja) * 2008-10-07 2013-10-16 東京応化工業株式会社 液浸露光用レジスト組成物およびレジストパターン形成方法
JP5608492B2 (ja) * 2009-09-18 2014-10-15 富士フイルム株式会社 感活性光線性又は感放射線性樹脂組成物、及びそれを用いたパターン形成方法
JP6261948B2 (ja) * 2012-11-15 2018-01-17 住友化学株式会社 レジスト組成物及びレジストパターンの製造方法
JP6261947B2 (ja) * 2012-11-15 2018-01-17 住友化学株式会社 レジスト組成物及びレジストパターンの製造方法
JP6261949B2 (ja) * 2012-11-15 2018-01-17 住友化学株式会社 レジスト組成物及びレジストパターンの製造方法
KR102612639B1 (ko) * 2016-01-27 2023-12-11 도오꾜오까고오교 가부시끼가이샤 레지스트 조성물 및 레지스트 패턴 형성 방법
JP6454760B2 (ja) * 2017-07-28 2019-01-16 東京応化工業株式会社 レジスト組成物及びレジストパターン形成方法

Citations (4)

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Publication number Priority date Publication date Assignee Title
JPH05163265A (ja) * 1991-05-31 1993-06-29 Hoechst Ag 置換デカレストリクチン類
JP2000098612A (ja) * 1998-09-24 2000-04-07 Toshiba Corp 半導体装置の製造方法、感光性組成物及びパターン形成方法
JP2000119588A (ja) * 1998-10-15 2000-04-25 Daicel Chem Ind Ltd （メタ）アクリル酸エステル誘導体、酸感応性重合体及びフォトレジスト用樹脂組成物
JP2002091002A (ja) * 2000-09-18 2002-03-27 Jsr Corp 感放射線性樹脂組成物

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US6303266B1 (en) 1998-09-24 2001-10-16 Kabushiki Kaisha Toshiba Resin useful for resist, resist composition and pattern forming process using the same
JP2001033971A (ja) 1999-07-22 2001-02-09 Fuji Photo Film Co Ltd ポジ型フォトレジスト組成物
US6808860B2 (en) * 2000-04-17 2004-10-26 Fuji Photo Film Co., Ltd. Positive photoresist composition
JP3444844B2 (ja) 2000-07-17 2003-09-08 富士写真フイルム株式会社 ポジ型フォトレジスト組成物
JP3841399B2 (ja) * 2002-02-21 2006-11-01 富士写真フイルム株式会社 ポジ型レジスト組成物
US7279265B2 (en) * 2003-03-27 2007-10-09 Fujifilm Corporation Positive resist composition and pattern formation method using the same
US20050147920A1 (en) * 2003-12-30 2005-07-07 Chia-Hui Lin Method and system for immersion lithography
JP4505357B2 (ja) 2005-03-16 2010-07-21 富士フイルム株式会社 感光性組成物、該感光性組成物に用いる化合物及び該感光性組成物を用いたパターン形成方法
JP4881686B2 (ja) * 2005-12-09 2012-02-22 富士フイルム株式会社 ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP4857138B2 (ja) * 2006-03-23 2012-01-18 富士フイルム株式会社 レジスト組成物及びそれを用いたパターン形成方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05163265A (ja) * 1991-05-31 1993-06-29 Hoechst Ag 置換デカレストリクチン類
JP2000098612A (ja) * 1998-09-24 2000-04-07 Toshiba Corp 半導体装置の製造方法、感光性組成物及びパターン形成方法
JP2000119588A (ja) * 1998-10-15 2000-04-25 Daicel Chem Ind Ltd （メタ）アクリル酸エステル誘導体、酸感応性重合体及びフォトレジスト用樹脂組成物
JP2002091002A (ja) * 2000-09-18 2002-03-27 Jsr Corp 感放射線性樹脂組成物

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2194073A4 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009186503A (ja) * 2008-02-01 2009-08-20 Fujifilm Corp ポジ型感光性組成物、該ポジ型感光性組成物を用いたパターン形成方法及び該ポジ型感光性組成物に用いられる化合物
US9046773B2 (en) * 2008-03-26 2015-06-02 Fujifilm Corporation Actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method using the same, polymerizable compound and polymer compound obtained by polymerizing the polymerizable compound

Also Published As

Publication number Publication date
EP2194073B1 (en) 2013-06-05
EP2194073A1 (en) 2010-06-09
JP2009086646A (ja) 2009-04-23
US20100216072A1 (en) 2010-08-26
KR101400823B1 (ko) 2014-05-29
TWI427417B (zh) 2014-02-21
TW200915003A (en) 2009-04-01
EP2194073A4 (en) 2011-10-05
JP5459998B2 (ja) 2014-04-02
KR20100055465A (ko) 2010-05-26
US8043791B2 (en) 2011-10-25

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