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WO2009031290A1 - 弾性波デバイス - Google Patents

弾性波デバイス Download PDF

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Publication number
WO2009031290A1
WO2009031290A1 PCT/JP2008/002392 JP2008002392W WO2009031290A1 WO 2009031290 A1 WO2009031290 A1 WO 2009031290A1 JP 2008002392 W JP2008002392 W JP 2008002392W WO 2009031290 A1 WO2009031290 A1 WO 2009031290A1
Authority
WO
WIPO (PCT)
Prior art keywords
acoustic wave
surface acoustic
piezoelectric substrate
transport path
path plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/002392
Other languages
English (en)
French (fr)
Inventor
Jun Kondoh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shizuoka University NUC
Original Assignee
Shizuoka University NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shizuoka University NUC filed Critical Shizuoka University NUC
Priority to US12/676,107 priority Critical patent/US8118156B2/en
Priority to JP2009531109A priority patent/JP5283232B2/ja
Publication of WO2009031290A1 publication Critical patent/WO2009031290A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/36—Devices for manipulating acoustic surface waves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
    • B01L3/502784—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics
    • B01L3/502792—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics for moving individual droplets on a plate, e.g. by locally altering surface tension
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/08—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using travelling waves, i.e. Rayleigh surface waves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0627—Sensor or part of a sensor is integrated
    • B01L2300/0654—Lenses; Optical fibres
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0867—Multiple inlets and one sample wells, e.g. mixing, dilution
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0887—Laminated structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/089—Virtual walls for guiding liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0433—Moving fluids with specific forces or mechanical means specific forces vibrational forces
    • B01L2400/0436—Moving fluids with specific forces or mechanical means specific forces vibrational forces acoustic forces, e.g. surface acoustic waves [SAW]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0433—Moving fluids with specific forces or mechanical means specific forces vibrational forces
    • B01L2400/0439—Moving fluids with specific forces or mechanical means specific forces vibrational forces ultrasonic vibrations, vibrating piezo elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
    • B01L3/502784—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Hematology (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Multimedia (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

　圧電基板の洗浄作業を不要として被搬送物質の搬送作業の効率を向上させることができるとともに、幅広い種類の被搬送物質を取り扱うことができ、かつ弾性表面波の伝播方向に沿って物理的に離れて存在する２つ以上の被搬送物質を同時に搬送可能とすることで弾性波デバイスの適用範囲・適応分野を拡大することができる弾性波デバイスを提供する。 　弾性波デバイス１００は、圧電効果により弾性表面波を発生する圧電基板１０１上に、同弾性表面波を励振するための励振電極１０２を備えている。圧電基板１０１上には、励振電極１０２に隣接して搬送路プレート１０５が水層Ｗを介して配置されている。励振電極１０２が通電されると、圧電基板１０１上には弾性表面波が発生する。弾性表面波は、水層Ｗに縦波を放射し減衰する。水層Ｗ内に放射された縦波は搬送路プレート１０５に伝播され、同搬送路プレート１０５上に配置された液滴Ｄｐを放射圧によって変位させる。
PCT/JP2008/002392 2007-09-03 2008-09-01 弾性波デバイス Ceased WO2009031290A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/676,107 US8118156B2 (en) 2007-09-03 2008-09-01 Acoustic wave device
JP2009531109A JP5283232B2 (ja) 2007-09-03 2008-09-01 弾性波デバイス

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-228404 2007-09-03
JP2007228404 2007-09-03

Publications (1)

Publication Number Publication Date
WO2009031290A1 true WO2009031290A1 (ja) 2009-03-12

Family

ID=40428614

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/002392 Ceased WO2009031290A1 (ja) 2007-09-03 2008-09-01 弾性波デバイス

Country Status (3)

Country Link
US (1) US8118156B2 (ja)
JP (1) JP5283232B2 (ja)
WO (1) WO2009031290A1 (ja)

Families Citing this family (13)

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Publication number Priority date Publication date Assignee Title
EP2454002A1 (en) * 2009-07-13 2012-05-23 FOSS Analytical A/S Analysis of an acoustically separated liquid
GB0914762D0 (en) 2009-08-24 2009-09-30 Univ Glasgow Fluidics apparatus and fluidics substrate
GB201103211D0 (en) 2011-02-24 2011-04-13 Univ Glasgow Fluidics apparatus, use of fluidics apparatus and process for the manufacture of fluidics apparatus
GB201108462D0 (en) * 2011-05-19 2011-07-06 Univ Glasgow Sample nebulization
US8785855B2 (en) * 2012-10-16 2014-07-22 Uvic Industry Partnerships Inc. Interlaced terahertz transceiver using plasmonic resonance
KR101602172B1 (ko) * 2014-01-29 2016-03-10 한국해양과학기술원 자기장과 토네이도 와류 기술을 이용한 장거리 준설토 운송 시스템 및 그 제어방법
DE102014109314A1 (de) * 2014-07-03 2016-01-07 Afag Holding Ag Schwingförderer
GB201420061D0 (en) * 2014-11-11 2014-12-24 Univ Glasgow Nebulisation of liquids
US9620006B2 (en) 2014-11-21 2017-04-11 At&T Intellectual Property I, L.P. Systems, methods, and computer readable storage devices for controlling an appearance of a surface using sound waves
US9889564B2 (en) 2015-07-08 2018-02-13 Empire Technology Development Llc Stable grasp point selection for robotic grippers with machine vision and ultrasound beam forming
US10907055B2 (en) * 2016-02-02 2021-02-02 Sensor Electronic Technology, Inc. Curing ultraviolet sensitive polymer materials
US10054501B2 (en) * 2016-03-16 2018-08-21 Nissan North America, Inc. In-situ stress detector for an electrode and a method of use
CN109731621B (zh) * 2019-01-02 2020-07-24 京东方科技集团股份有限公司 微流控基板及其制备方法、微流控面板

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01106453U (ja) * 1988-01-06 1989-07-18
JP2004173409A (ja) * 2002-11-20 2004-06-17 Yamanashi Tlo:Kk 弾性表面波の干渉を利用した液膜の流動制御方法および装置
JP2007053890A (ja) * 2005-07-19 2007-03-01 Matsushita Electric Works Ltd 弾性表面波アクチュエータ

Family Cites Families (12)

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Publication number Priority date Publication date Assignee Title
JPH01106453A (ja) 1987-10-19 1989-04-24 Mitsubishi Electric Corp リードフレームの製造方法
JPH10327590A (ja) * 1997-05-22 1998-12-08 Yoshikazu Matsui 弾性表面波アクチュエータ
AU2003211895A1 (en) * 2002-03-11 2003-09-22 Iai Corporation Ultrasonic levitation device
CA2391171C (en) * 2002-06-20 2010-01-12 Cashcode Company Inc. Motion sensor for flat objects
DE10352944A1 (de) * 2003-11-11 2005-06-23 Technische Universität München Vorrichtung zum berührungslosen Transportieren, Handhaben und Lagern von Bauteilen und Materialien
JP2006009727A (ja) * 2004-06-28 2006-01-12 Fuji Xerox Co Ltd 液体制御ユニット及び液体制御装置
JP4733404B2 (ja) 2005-02-21 2011-07-27 日本無線株式会社 弾性波センサ
JP4860935B2 (ja) 2005-03-14 2012-01-25 日本無線株式会社 搬送システム
JP2007068334A (ja) * 2005-08-31 2007-03-15 Japan Radio Co Ltd 搬送システム
JP2007129788A (ja) * 2005-11-01 2007-05-24 Japan Radio Co Ltd 弾性波デバイス
US7764005B2 (en) * 2006-08-08 2010-07-27 Palo Alto Research Center Incorporated Traveling wave grids with agitated surface using piezoelectric effect and acoustic traveling waves
JP2008101969A (ja) * 2006-10-18 2008-05-01 Japan Radio Co Ltd 液体搬送方法および液体搬送装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01106453U (ja) * 1988-01-06 1989-07-18
JP2004173409A (ja) * 2002-11-20 2004-06-17 Yamanashi Tlo:Kk 弾性表面波の干渉を利用した液膜の流動制御方法および装置
JP2007053890A (ja) * 2005-07-19 2007-03-01 Matsushita Electric Works Ltd 弾性表面波アクチュエータ

Also Published As

Publication number Publication date
JPWO2009031290A1 (ja) 2010-12-09
US20100206696A1 (en) 2010-08-19
US8118156B2 (en) 2012-02-21
JP5283232B2 (ja) 2013-09-04

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